text:
|Publication number
|Publication type
|Application number
|Publication date
|Jul 22, 1980
|Filing date
|Dec 1, 1978
|Priority date
|Dec 1, 1978
|Publication number
|Victor A. Firtion, Donald R. Herriott, Martin E. Poulsen, Leif Rongved, Thomas E. Saunders
|Original Assignee
|Bell Telephone Laboratories, Incorporated
|Export Citation
|BiBTeX, EndNote, RefMan
|Patent Citations (9), Referenced by (81), Classifications (14)
|External Links: USPTO, USPTO Assignment, Espacenet
This application is a continuation-in-part of our copending application, Ser. No. 871,477, filed Jan. 23, 1978, now abandoned.
This invention relates to apparatus and method for holding and planarizing thin workpieces, and more specifically to vacuum apparatus for holding semiconductor wafers during pattern exposure in photolithography.
The invention also relates to a method for fabricating devices on a semiconductive wafer by utilizing such an apparatus.
Recent advances in large scale integration (LSI) of semiconductor circuits have been made possible largely by higher resolution photolithography which permits finer features to be patterned onto a semiconductor surface. Consequently circuit components can be made smaller, thus making it possible to place an increasing number of components onto a single semiconductor chip. The results are circuits of greater complexity, higher speed, lower power dissipation and lower cost.
As a practical matter, the feature size limitations in photolithography are not usually imposed by the resolution capabilities of the optical components nor by that of the photoresist, but rather by the flatness or planarity of the semiconductor surface being patterned. The consequence of nonplanarity is distortion of the pattern being exposed and an error in the focal position. Surface planarity is particularly important when projection printing is used where, to achieve the maximum resolution capability of the projection optics, the semiconductor surface being exposed must be made essentially coincident with the focal plane of the projection optics. Deviations of the surface from the focal plane must not exceed the depth of focus of the optical system. For example, if the total depth of focus were 10 microns, then to achieve maximum resolution, the semiconductor surface including a photoresist film approximately one micron thick must be maintained planar to within 10 microns during pattern exposure. A high degree of surface planarity is also required to achieve freedom from pattern distortion in contact printing and maximum pattern resolution in proximity printing although the requirement is not as critical as for projection printing.
Nonplanarity in semiconductor wafers may be separated into two sources. The first is that of nonlinear thickness variations in the wafer. Normally during pattern exposure, one surface of the wafer (back surface) is forced to substantially conform to a planar surface by some wafer holding apparatus. Thus, the other surface of the wafer (front surface) would be planar if the wafer had no nonlinear thickness variation. Notice that if the wafer had a linear thickness variation (e.g. a wedge shape), its front surface would still be planar although it would not be parallel with the back surface. This can be tolerated by most projection and proximity printing systems which have means for tilting the wafer surface to make it parallel to the optical plane of the printing system. But, if the wafer had a nonlinear thickness variation, its front surface would be nonplanar. However, nonlinear thickness variations can be reduced to an acceptable degree by careful wafer fabrication.
The second source of nonplanarity in semiconductor wafers is that of warpage. Owing to the thinness of semiconductor wafers used for intergrated circuit processing, some warpage is always present. A typical three inch diameter silicon wafer which has a thickness of fifteen to twenty thousandths of an inch may exhibit a warpage of as much as two thousandths of an inch or approximately fifty microns. Warpage is first introduced when the wafer is sawed from the boule. Because the thin wafer is rather springy, the warpage is not removed by the subsequent lapping and polishing steps in the wafer fabrication process. Furthermore, the furnace sequences and the growth and deposition of various films on the wafer surface during the device fabrication process may all aggravate the warpage.
The usual method for removing wafer warpage during pattern exposure is to hold the wafer on a vacuum holding apparatus with a highly planar holding face. Thus, if the wafer warpage were not too severe, (less than fifty microns), and if the wafer had minimal nonlinear thickness variation, the vacuum holding apparatus would in principle cause the front surface to have a high order of planarity.
However, a problem arises when dirt particles become interposed between the wafer and the holding face to prevent intimate contact. Since the size of dirt particles may be ten microns in diameter or greater, their effect is to cause the wafer front surface to deviate sufficiently from planarity to produce pattern distortion during photolithographic exposure. The problem of dirt particles is especially difficult to solve in a manufacturing environment where the necessity to maintain a high throughput of wafers through each photolithographic step renders any cleaning procedure to remove dirt particles from the wafer and the wafer holder impractical. Moreover, removal of particulates from the air as in an "ultra-clean room" environment does not completely solve the problem as most of the dirt particles come from the wafers themselves in the form of chips from the wafer edges and flakes from films grown or deposited on the wafer surface. A broken wafer causes the most severe contamination of particles.
Vacuum fixtures for holding thin workpieces are disclosed in U.S. Pat. Nos. 3,627,338, and 3,747,282. Both patents disclose vacuum chucks where the workpiece holding face comprises a planar surface with annular and radial grooves for distributing vacuum to the back surface of the workpiece. Furthermore, these known fixtures were apparently devised for applications in machining and polishing of thin workpieces where the requirements for workpiece planarity is not as critical as for photolithography. Therefore, none of the above-mentioned disclosures offers any solutions to the problems arising from the wafer planarity requirements imposed by photolithography and the detrimental effects of dirt particles on achieving that planarity.
From the foregoing, a need clearly exists for a vacuum wafer holding apparatus and wafer planarization method which is substantially immune to dirt particles which are always present in a semiconductor device manufacturing environment.
Accordingly, one object of the present invention is to provide a vacuum wafer holding apparatus and wafer planarization method which would meet the aforedescribed need.
Another object of the present invention is to provide a vacuum wafer holding apparatus and wafer planarization method which would improve the actual resolution capabilities of a photolithographic system in a manufacturing environment.
Still another object of the present invention is to provide a vacuum wafer holding apparatus and a fabrication method which would improve the manufacturing yield of LSI integrated circuits.
These and other objectives will become apparent from the following description of the preferred embodiment of the invention which is of a vacuum holding apparatus having a planar holding face comprising the points of a plurality of regularly spaced-apart substantially equal height pins mounted perpendicularly in a circular baseplate. The baseplate has a thin raised rim of the same height as the pins. The edge of the rim has a smooth planar surface which forms part of the holding face. The workpiece is positioned over the holding face with its edges overlapping the rim. The rim edge forms a substantially airtight seal against the workpiece creating an evacuable chamber enclosed by the baseplate, the rim, and the workpiece. The chamber is evacuated through an opening in the baseplate, the vacuum creating a pressure difference between the front and back workpiece surfaces giving rise to a net force uniformly distributed along the front surface which causes the workpiece to conform to the holding face. The pinpoint abutments of the holding face exert counterbalancing localized forces against the back surface to hold the workpiece in place. Owing to the small area of each pinpoint abutment, it is highly improbable that a dirt particle would collect on it. The few dirt particles that do collect on the pinpoints would normally be brushed off by any slight lateral motion of the wafer when it is positioned on the holding face. The extent of this lateral motion would determine the largest dimension which an abutment may have and still insure that a dirt particle situated on the abutment will be brushed off. It has been found that in a manufacturing environment, the minimum lateral motion of a wafer being positioned over a holding face is about fifty thousandths of an inch. Furthermore, the small area of the pinpoints would also tend to squeeze out any dirt particles which remain after the wafer is in place.
The invention will be better understood from the more detailed description taken in conjunction with the accompanying drawing in which:
FIG. 1 is a schematic representation of a vacuum holding apparatus in accordance with the preferred embodiment of the invention;
FIG. 2 is a top view of the embodiment of FIG. 1;
FIG. 3 is a view taken along lines 4--4 of FIG. 2; and
FIG. 4 depicts a wafer being manually loaded onto a wafer holding apparatus.
Referring now to FIGS. 1, 2 and 3, there is shown a schematic of the preferred embodiment of the invention comprising a generally circular baseplate 10 having a raised rim 11. The rim includes a press-fitted insert 12 to provide a narrow edge 13 which has a smooth top planar surface for supporting the periphery of the back surface of a thin workpiece such as a semiconductor wafer 14 having a resist layer, 19, coated thereon, the diameter of the rim being smaller than that of the workpiece to allow the workpiece edge to overhang the rim. In a typical embodiment intended to hold 3 inch diameter wafers, the outside diameter of the rim is 2.86 inches. The rim edge makes a substantially airtight seal with the back surface of the workpiece thereby forming an evacuable chamber 15. The chamber communicates with a vacuum pump through a vacuum passage 16 in the baseplate. Mounted in the baseplate and substantially perpendicular thereto are a plurality of regularly spaced-apart rigid cylindrical pins 17 with tapered points 18. The pinpoints together with the rim edge form the holding face against which the back surface of the workpiece is held when the chamber 15 is evacuated.
The pinpoints provide localized abutments whose areas can be made much smaller than that of the distributed abutments in prior art vacuum chucks which comprise annular strips of "land" between vacuum distributing grooves on the holding face of the chuck.
The heights of the pins 17 and the rim 11 must all be substantially the same to give the holding face a high degree of planarity. In the preferred embodiment the planarity is achieved by lapping the entire holding face after its construction. Thus, the holding face is made planar to a fraction of a micron over a circular region approximately three inches in diameter.
Since one principle of the invention is to decrease the probability of dirt particles collecting on the holding face by reducing its area, the holding face should be composed of as few pinpoints as possible. However, the pinpoints must not be spaced so far apart to allow the unsupported regions of the workpiece to distort under the force created by the vacuum, as that would defeat the main objective of the invention to maintain workpiece surfaces at a high degree of planarity. The optimal spacing between adjacent pinpoints depends on the thickness of the workpiece and the mechanical characteristics of the workpiece material. This spacing can be readily calculated by a person skilled in the art. An example of how such a calculation is made can be found in Advance Strength of Materials, J. P. DenHartog, published in 1952 by McGrawHill Book Co. (see page 128). In a specific illustrative embodiment intended for holding silicon wafers three inches in diameter and twenty thousandths of an inch thick, the spacing between adjacent pinpoints in the holding face is two-tenths of an inch. The diameters of semiconductor wafers used in device fabrication may vary, and in general the wafer thickness increases with increasing wafer diameter. In accordance with the principles of the invention, apparatus can be designed to hold wafers of any diameter.
Another principle of the invention is to reduce the area of each individual abutment in the holding face and thereby increase the probability that a dirt particle would be brushed off during the workpiece loading operation and that the thrust of the small localized abutment would squeeze out a dirt particle which becomes interposed between the abutment and the workpiece. In practice the smallness of the abutting area depends on the abutment material, the fabrication method for the pins, the method used to planarize the holding face and the rate of abrasion of the abutment used. In the preferred embodiment which has alumina pins with ground points, and in which the holding face is planarized by lapping, the pinpoints have diameters between ten and fifteen thousandths of an inch. Therefore, the area of each abutment in the preferred embodiment is in the range of approximately 8.0�10-5 to 1.8�10-4 square inches. As a practical matter, a holding face which is planarized by lapping will have abutments with minimum dimensions exceeding five thousandths of an inch (i.e., a minimum abutting area of approximately 2.0�10-5 square inches). In the same embodiment, the rim insert 13 which is, for example, made of hardended steel has an edge which is twenty thousandths of an inch wide.
Still another principle of the invention is that when the wafer is loaded onto the holding face either manually with tweezers or with automatic wafer loading apparatus, some lateral motion is always imparted to the wafer even after the wafer contacts the holding face as illustrated by FIG. 4. This lateral motion is used advantageously in the instant invention to "brush" dirt particles off the pinpoints by ensuring that the diameter of each pinpoint abutment (or the maximum dimension in the case of pinpoints having noncircular shapes) is less than the extent of the lateral motion of the wafer. In the preferred embodiment which is to be used in conjunction with automatic wafer loading apparatus which provides a minimum lateral "scrubbing" motion of at least fifty thousandths of an inch, the diameters of the pinpoints used were, accordingly, made smaller than fifty thousandths of an inch (i.e., the area of each abutment was made less than 2.0�10-3 square inches).
Also shown in FIG. 4 is a representation of a conventional pattern exposure apparatus 20 by means of which a high-resolution pattern can be exposed in the layer 19.
Although the particular illustrative embodiment described comprises apparatus for holding circular semiconductor wafers during photolithographic exposure, the invention can also be applied to apparatus for holding other types of thin workpieces with various shapes during other operations such as polishing, grinding and machining. It is to be understood that the terms "abutment" and "pinpoint abutments" as used in the specification and in the claims, includes any localized arbitrary shape having small area in addition to the circular shape shown in the drawing. Moreover, it is to be understood that the term "pins" as used in the specification and claims include column-like members of any cross-sectional shape and of any height, and represent just one of many possible structures for supporting small area localized abutments. Various other modifications may also be made by those skilled in the art without departing from the spirit and scope of this invention. Whichever particular apparatus is selected, it is apparent that the utilization of such an apparatus made in accordance with the principles of the present invention makes possible a method that improves the yield realized in fabricating microminiature devices.
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|U.S. Classification
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|International Classification
|Cooperative Classification
|European Classification


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Goal: Tail RecursionDo Now:
Consider how we calculate the sum of a list recursively:
(define sumList (lambda (L)
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Consider how we can re-write (fib n) using this method:
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-The helper function will have to keep track of your last two results, this will enable it to calculate the next value in one step.
DO NOT WRITE ANY CODE YET. After you show me your work for A + B on paper then you may turn on your monitor and start typing.
A) Decide how many parameters you need and discuss with your neighbors what they should be.
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Courses > Introduction to Computer Science 1 > Konstantinovich > ML1 9/2015 > announcements >


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Single (shared bath)* $2700
Deluxe Single (private bath)* $3125
*limited availability
Payment Schedule
- $500 deposit to reserve space
- Balance due ASAP / by July 1, 2017
Step 1 — Complete the Registration Form below. (Be certain to click the "SUBMIT" button at the form's end.)
Step 2 — Choose the occupancy you prefer and select an option from the appropriate drop-down menu to submit payment — either the initial deposit ($500), 50% of the total cost, or full payment. If you choose to pay a deposit, you will receive an invoice for the balance, due ASAP / by July 1 at the latest.
Step 3 — Stay tuned for follow-up materials, which will be emailed to you shortly.
Please contact Michael at firstname.lastname@example.com if you have any questions or need help with the registration process.
Retreat Registration Form
The fine print...
What's Included:
- 7 nights' accommodation at villa, linens and towels
- 3 vegetarian meals daily, except one lunch and one dinner out
- Local wine at dinner (1/2 bottle per person, per night)
- Unlimited fruit, water, and herbal tea throughout the day. (Tea and coffee-making facilities are available in each house.)
- All group transportation, including one transfer from Lucca to villa (9/30), and back to Lucca (10/7)
- Daily yoga practice and use of yoga room, yoga mats, blocks, blankets, belts, and bolsters, plus additional yoga mats for use outdoors
- Use of outdoor salt-water pool and common areas
- Planned activities (including day trip to Cinque Terre, tour of Lucca, cooking class, and winery visit), entrance fees, and local guides
- Wi-fi
- Use of laundry facilities in each house (€ 3 per load)
What's Not Included:
- Airfare from/to your home city
- Ground transportation to/from arrival airport to Lucca, and transfers from/to Lucca outside the one scheduled pick-up on arrival day and drop-off on departure day*
- One lunch, one dinner, and any other additional meals
- Supplemental activities (i.e. massages, shopping, opera, etc.) and transportation outside planned group activities
- Short-term traveler's insurance
- Other travel-related expenses
- Teacher/guide gratuities
* Transfer from arrival airport can be arranged and provided for an additional fee
Cancellation Policy
Should circumstances arise that result in your canceling your reservation, Ananda Expeditions, Ltd. will refund payment less a cancellation fee as follows (computed based on date of receipt of written cancellation):
Days Prior to Trip:
More than 120 days
91 – 120 days
46 – 90 days
45 days or less
Cancellation Fee:
$100 admin fee
100% of deposit
50% of trip cost
100% of trip cost
Ananda Expeditions, Ltd. reserves the right to cancel any trip prior to departure in the event that cancellation is deemed necessary or wise. Such conditions might include, but are not limited to, insufficient participant registration or other logistical challenges that would negatively affect trip operation. The refund of all payments received shall release Ananda Expeditions, Ltd. from any further liability. Ananda Expeditions, Ltd. is not responsible for non-recoverable expenses incurred by clients in preparation for a cancelled trip, including airfare.


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North To Port Portsmouth, New Hampshire
North To Port is a band and a podcast. Go on tour with us! Each episode chronicles our adventures in the form of a radio interview taped at a tour stop location, and features a song that epitomizes the episode.
Streaming and Download help


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What the Health! – Am I A Sugar Addict?
Feb 28, 2017
No Blame, But You Gotta Give the Beast a Name. Sugar Addiction.
Last month I reported on an easy to follow, effective approach to eating. Many of you tried it and many more came back to say they need more help with sugar cravings. First off, I want to tell you, sugar addiction is truly an issue of brain chemistry. Like crack, your brain and body get hooked on the fast hit of energy that leaves all too soon. Leaves you needing more. The packaged food industry knows this and uses it against you. Because sugar is addictive, industrial foods contain lots of it, not for your health, but to intentionally get you addicted so you buy and eat more.
Capitalism, crack and your waistline. Who knew they were connected? Remember the fried egg- "Your Brain on Drugs" commercial? It should have been a pint of ice cream smothered in fudge. Think I'm kidding? Check out this NY Times Article, The Extraordinary Science of Junk Food. Look up the explosion of diabetes in this country. It strangely parallels the steady rise of consumption of prepared foods. which also parallels women working more outside the home. At .79 on the dollar of their male counterparts. With no Equal Rights Amendment. And still expected to cook, clean and raise children in all their "free time". Dammit. I'm going to save the politics for another post. I will get back to this, but for now:
We must address the 5-25 pounds of detrimental excess weight, the emotional roller coaster and the potential for future health issues that are being created by your sugar addiction. Your life's too sweet to be killed by sugar!
What the Health's 3 step plan for freedom from sugar addiction.
Like your mood, everything runs better when your blood sugar can stay relatively even. Super duper highs can lead to super bummer lows, and will bring out some ugly behavior as your brain seeks A HAPPY PLACE NOW. No need for a flat line people, just a nice even, juicy flow.
Number One: Address the Food- Fuel Burn Rate
Increase protein and healthy fat.
Your body breaks down different types of fuel at different rates. Sugar and carbs are fast hitting fuel, followed by protein and fats. If you are about to sprint, sure, eat some candy, but if you're in it (and by "it" I mean life) for the long haul, long haul foods are a better choice. The optimal time for sugar? At the end of a meal. See, your ancestors with their dessert thing were not daft. When long burning fuels are in the system, sugars are less able to spike blood sugar or create an addictive future craving. So, protein with every meal. Healthy fat with every meal. Of course, lots of different colored vegetables, some grains, and once a day, a little bit of sugar. A couple squares of chocolate, a spoonful of ice cream, a half a mango. Along those lines.
Number Two: Heal your Digestive Organs
Get your pancreas on board with targeted glandular support.
In addition to the pusher man of junk food, many of you have genetics to blame for your sugar addiction. A family history of diabetes or hormone imbalances (thyroid, adrenal, estrogen, testosterone) can bring out the sugar crazy in even the most self disciplined soul. You may not know your family background, but if you make the basic changes in diet above and have no change in cravings or find yourself shoving a chocolate bar sideways down your throat before your period, you need more support. This is where a few key supplements can make a huge difference. A brief consult with me can get you the essential help you need to break the addiction cycle. Consult Here
Number Three: Feed your Noggin (And Your Soul).
Increase your happy brain chemicals via happy means.
This is where things start to get really interesting people, right here. I'd like to introduce you to your Brain. (One) of your brain's main games is TO BE HAPPY. This means happy brain chemicals. This means dopamine, oxytocin, endorphins and serotonin. For a happy infographic on that: Meet your Happy Chemicals. You can get these from sunlight, being outdoors, having sex (even with yourself) or engaging in any pleasurable act like dancing, painting, singing, surfing, riding your bike, the list is endless. IF, however, you don't do enough pleasurable stuff, your body will instead tun to high quantities of drug like foods to create this "high". Where am I going with this? YOU NEED TO HAVE ALOT MORE FUN, RIGHT NOW. This is not optional. This is absolutely essential. Oddly, this can be hard for people. I have helped 1,000's of people with this mysterious condition called guilt. And it's sister condition shame. I can help you too.
Easiest Diet Ever.
Feb 06, 2017
What the Health! What's an Easy Diet for the Rest of Us?
Never diet? Wouldn't care, except after the Holidays, your pants won't zip?
I have the diet for you!
Low carb, high protein and veggies 2 days a week. That's it. The rest of the time, eat what ever you want, as long as it's healthy. In studies where people ate this way, after 6 weeks, the average participant lost 9 lbs. The best part about this is that it's a practice you can actually continue, long term, to keep your weight at a healthy level, forever.
The fine print is 55 grams of carbohydrates per day for those two days. This can look something like, eggs with chopped tomato salsa for breakfast, a big green salad with grilled fish for lunch, some almonds and cheese for a snack and steak and green beans for dinner. Seems pretty doable, right? And even better, the two days don't have to be consecutive. This seems amazing, but I want to know for sure. I'll be trying it out this month. Who's with me?
Research Links:
Siberian Ginseng: Giving you a little something something.
Aug 01, 2016
The long term solution for your quick fix energy needs.
Feeling stressed, wired but unable to focus, ready to pass out by 4pm? Are you catching colds easily and gaining weight, especially around the middle?
You may be suffering from this fine modern illness known as Adrenal Fatigue.
While it is the hyped condition du jour, there's a reason for that. Modern life is not healthy. Long hours at a computer, no time barefoot in nature, eating in a rush and getting little sleep does not a peppy person make. Formally healthy people, including you, cannot live in this unnatural way, and expect no consequences. We are burning out and losing our health like never before, and we don't need to.
Happily, the natural world has a remedy! Here to rescue you from life's bad choices and make you feel happy again…ta da! Siberian ginseng!
Siberian ginseng is in a class of herbs called Adaptogens. Adaptogens reduce stress hormones, strengthen the immune system and give you an alert but relaxed energy.
Siberian ginseng is particularly balanced and suitable for both men and women.
I use it as the base of many of my custom herbal formulas. Taken regularly, it can have a profound effect on your wellbeing.
Siberian ginseng is only one of many adaptogen herbs to choose from when dealing with exhaustion and adrenal fatigue.
Come see me for the perfect superhero herb combo, made just for you.
Stress and Adrenal Fatigue. When the S*%$ Hits the Fan.
Jun 16, 2014
STRESS. The single biggest factor causing disease.
When external influences overwhelm the body's capacity to perform and maintain internal balance.
Overwork, over exercise, under rest, emotional abuse, physical abuse, toxic load from viruses, chemicals, and/ or pollution.
Anger, irritability, depression, anxiety, lowered immune response, poor sleep, weight gain, loss of joy, loss of ability to adapt, total exhaustion unrelieved by rest.
The Fix:
Rest, rest, rest, rest, and more rest. Specific nutrition and mind-body exercise. But mostly rest. Any treatment or therapy that switches your nervous system out of sympathetic response, into parasympathetic mode, like Acupuncture, Massage, Yoga, Meditation.
When stress goes on, unrelenting, for months or years, it has a profound impact on your overall health. The biggest impact comes in a complex of symptoms described above, which fall under the umbrella of Adrenal Fatigue. Adrenal fatigue is stress taken to it's end point, when the body cannot bounce back and starts to break down. THIS IS A GREAT TIME TO STOP OVER WORKING, OVER EXERCISING, OVER EMOTING, STOP "OVER" ANYTHING. Once you reach this level of exhaustion, in fact, the only thing that will restore your health is serious rest for a seriously long time. No whining, no cheating, no kidding.
Not only am I an expert in addressing Adrenal Fatigue from Stress, I have lived through it myself, and know all the ins and outs of restoring health, naturally. For more information on the how tos of adrenal exhaustion recovery, please drop me a line. email@example.com


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login redirection problem
Good Day,
I am using simple modal plugin on my site and used a premium theme but the problem is when a user login it only loads the image loader and the white background and it takes forever without doing nothing. Is there a way that the when the user login it will redirect to the homepage or samepage?
I already used the peter redirection plugin it but no luck
Here is my code im using:
<a href="wp-login.php?redirect_to=<?php echo $_SERVER['REQUEST_URI']; ?>" class="simplemodal-login">Login
Please help me.
Thank you!
Viewing 3 replies - 1 through 3 (of 3 total)
Viewing 3 replies - 1 through 3 (of 3 total)
- The topic 'login redirection problem' is closed to new replies.


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Error Message 554 5.7.1
From the error it looks like they don't have permissions to send an email. Submit a Threat Submit a suspected infected fileto Symantec. In Outlook, double-click the group name. Ask a Question vivek n/a Points 2014-12-04 1:42 am This message was created automatically by mail delivery software.A message that you sent could not be delivered to one or more of this contact form
Read Transport Routing in Exchange 2013 Hybrid Deployments for more info about transport routing in hybrid deployments. So the RemoteDomain.com mail server responded back with a554 Invalid recipient error. Even though the Hybrid Configuration Wizard automatically configures the inbound and outbound connectors in the Exchange Online Protection (EOP) service, you can verify that the connector settings are correct. You candelete your own text from the attached returned message. this
Yes No Great! Products Products Home Threat Protection Advanced Threat Protection Endpoint Protection IT Management Suite Email Security.cloud Data Center Security Information Protection Data Loss Prevention Encryption Validation & ID Protection Managed PKI Service Reply TJEdens Staff 10,077 Points 2016-03-11 6:35 pm Hello, If the email did not bounce back then it most likely was just a temporary issue on Yahoos' servers.
Microsoft doesn't support using more than one MX record for a domain that's enrolled in Exchange Online. at Thursday, April 21, 2016 Email This BlogThis! Large messages can't be sent to the group (but you'll receive a different NDR from this one if that's the issue). Please follow the guide on how to fight spam and prevent spoofing.
However, it cannot be removed if it has been added to blacklist more than once. Required fields are marked *Comment * Name * Email * CAPTCHA Code* Get the best web hosting and server administration information in the industry right in your inbox. You signed out in another tab or window. Here's the important part - the job of the sending mail server is to RELAY the mail to another server.
asunay commented Oct 21, 2015 from our local provider... The most likely reason for this error is that recipients' spam filters didn't let your message through. Troubleshoot Exchange Server Error 431, 432, 441, 442, 446, 447, 449 Exchange Server is a brilliant SMTP Server program developed by Microsoft that operates on Windows Server. Kindest Regards, Scott M Reply Rajesh n/a Points 2015-12-31 4:58 am When trying to deliver your message, the mail server at host encountered problems with the following addresses: Open (220.127.116.11) Error
Reload to refresh your session. Either way, I cannot send anything from that email address right now,e somehow except for internal corporate mail, soam I blocked by a generic ISP virus filter? Your IP address has been added to a recipient's private blacklist, which isn't publicly available; in this case, it's much harder to find out whether this is what happened. The additional perks that you get are removal of any restrictions on the quantity of emails sent per hour (or per day) and considerable speed improvement.
Primarily, if you can provide more of the error message AND also the email address you're emailing from, then we can try to test it on our end if you are http://vpcug.net/error-message/error-message-ol-249.html This is the qmail-send program at yahoo.com.I'm afraid I wasn't able to deliver your message to the following addresses.This is a permanent error; I've given up. User can check if the email address is not on a blacklist with the help of tools for blacklist check. Tips for fixing the problem that is causing DSN error code 5.7.1 or 5.7.0 through 5.7.999 Most of the time, you probably won't be able to fix this problem on your
Using Mailbox Repair Request Command for Exchange 2010 The concept and dependability on IsInteg Tool was dropped with the introduction of Exchange Server 2010. coreyhulen commented Oct 21, 2015 are "FeedbackName": "", "FeedbackEmail": "", set correctly ? The MX record for a domain that's enrolled in Exchange Online uses the syntax
Managing distribution groups Configure a moderated recipient in Exchange Online Manage Distribution Groups Office 365 email administrator help for Exchange NDR 5.7.1 or 5.7.0 through 5.7.999 If the steps in the Please find the below detail of the bounce back This is the mail system at host mail.nlayerz.com.I'm sorry to have to inform you that your message could notbe delivered to one If you would like to provide more details, please log in and add a comment below.
Example showing "554 5.7.1 Delivery not authorized" ----- The following addresses had permanent fatal errors -----
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The blog further discusses about the possible situations that could lead to this error and the ways to overcome the error to help users send the email successfully. More... The address in MAIL FROM appears to have insufficient submission rights, or is invalid, or is not authorized with the authentication used; the address in a RCPT TO command is inconsistent This is a permanent error.
In the Outbound connectors section, select the connector that's used for hybrid, and choose Edit. The sending server will attempt to resend the message at a later time, but the recipient will experience a delay in receiving the message. The following address(es) failed:[email protected] acemetal.com.inbound10.mxlogic.net[18.104.22.168]SMTP error from remote mail server after end of data:554 Denied [4bae7965.0.1074450.00-2325.2135769.s12p02m014.mxlogic.net] (Mode:normal)------ This is a copy of the message, including all the headers. ------Return-path:
For information about adding your domain to Office 365, see Domains in Office 365. Rewards Powered by Blogger. Still need help? It is generally used when there is a generic delivery failure that another email error code doesn't directly define a problem for.
However please make sure you are using DKIM/SPF as they can help prevent these emails to fail. Check if your internal network is not compromised by ensuring that the Anti-virus installed in the system is updated regularly. To investigate problems with the sender's reputation, consult http://ipremoval.sms.symantec.com/lookup/ Sender's DNS In addition to considering the reputation of the sender's IP address, MIT's spam filter also checks to see if the The user gets the delivery failure message i.e. 554 5.7.1.
Would you like to ask a question about this page? How To Solve Exchange Information Store Error 1053 On Startup Following an update, I thought of switching to a higher version of Microsoft antigen for Exchange Server 2003. MX Toolbox blacklist check DNSBL blacklist check Most of blacklists allow you to remove an IP if it was added due to a mistake or misconfiguration.


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Rivka Bier, CPA, MST
Rivka Bier is a senior manager at Hertzbach & Company, P.A. Rivka is a graduate of University of Baltimore, where she earned an undergraduate degree in Accounting and a Master's degree in Taxation. Rivka is a certified public accountant in Maryland. Her practice focuses on state and local taxation, corporate and partnership tax law, with concentration in tax planning and compliance regarding a wide range of income, franchise, and sales/use tax issues. Rivka is member of the Maryland Association of Certified Public Accountants and the American Institute of Certified Public Accountants.
Areas of Concentration
Real Estate
Service Industry
Professional Experience
2012 - Present
Hertzbach & Company, P.A.
Owings Mills, Maryland
2004 - 2012
Regional CPA Firm
Baltimore, Maryland
National CPA Firm
Baltimore, Maryland
Education & Certifications
State of Maryland, Certified Public Accountant
University of Baltimore
B.S. Accounting
University of Baltimore
M.S. Taxation
Professional Affiliations
American Institute of Certified Public Accountants
Maryland Association of Certified Public Accountants
Direct Number
410.363.3200 x2072
My Profile


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Screenplay: "Welcome To The Rileys"
Director : Jake Scott Cast : James Gandolfini, Kristen Stewart, Melissa Leo Writers : Ken Hixon
Alison Brie on 'Glow': "I had to audition many times"
"Of course when you're told that they don't think your right for it, I was even more fired up to prove them wrong." - Alison Brie on Auditioning for 'Glow'
Marvel's Inhumans: How Anson Mount Developed Black Bolt's Communication
"I tend to be more interested in a character's weaknesses than I do their strengths and in a comic book/graphic novel space, it's easy to lose sight of that, you know?" - Anson Mount
Jodie Whittaker on Becoming the First Female Doctor Who
"To be asked to play the ultimate character, to get to play pretend in the truest form: This is why I wanted to be an actor in the first place." - Jodie Whittaker
Watch: SAG Conversations with Actors from Broadway's 'Hamilton'
The cast speaks about filling the big shoes of the original cast and performing in perhaps the most popular American musical in decades.
Watch: SAG Conversations with Billy Bob Thornton of 'Goliath'
Thornton talks about playing a character that some would say is fairly typical for him as well as his career as a whole.


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DailySteals.com is a site that offers daily deals on outdoor equipement.
Offers deals in Orange County, California.
Offers deals in the Akron, Ohio area.
Offers local deals in Athens, Georgia.
Offers specials on products for kids; clothes & shoes, travel gear, toys, nursery items and more.
Specials on general merchandise. Expect to find toys, stuff for your home, electronics and more.
Find organizers for the kitchen, closet, bathroom, laundry room, office, dorm, garages and more at Organize.com.
Offers bodybuilding supplements.
Offers computers and electronics.
Offers specials on a wide range of health and beauty products. On Overstockdrugstore.com you can find cosmetics, vitamins, supplements, over the counter medicine and more.
Offers outdoor recreation products.
- Deal a Day Sites
- Apparel and Shoes
- Books and Collectibles
- Car Boats and Aircraft
- Cell Phones and Accessories
- Cigars
- Computers and Electronics
- Crafts
- Food and Wine
- For Parents
- For Pet Owners
- General Merchandise
- Health and Beauty
- Home and Garden
- Jewelry and Watches
- Local Deals
- Movies and Music
- Musical Instruments
- Office and Business
- Sporting Goods
- Supplements
- Video Games


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The Humane Society of Burnett County, Inc. helps hundreds of animals each year. Your financial support is crucial to provide shelter, food and medical care to the animals served by HSBC.
We use PayPal so be assured your donation is safe and secure.
We recycle printer cartridges and cell phones with FundingFactory to raise money!
Your used inkjet and laser cartridges can help us raise money! Donate today!
We have raised $1,494.80 since we began our recycling program!
Learn more about fundraising by recycling at FundingFactory.com


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Mumbai: Expecting the forthcoming Union Budget to lay emphasis on infrastructure in line with the Railway Budget, Cement Manufacturers' Association (CMA) has called for the rationalisation of VAT on cement on par with other commodities.
"I believe that in line with the Railway Budget, the Union Budget too would lay a lot of emphasis on the infrastructure sector. This will certainly help the cement industry," Cement Manufacturers Association (CMA) president, H M Bangur, told the agency.
In order to bring back the industry to good health, "we want an alignment of VAT on cement to be in line with steel and charging of royalty on limestone in line with iron ore," he said.
Also Read More on Budget 2009
An ACC Ltd spokesperson added that the government should bring down the import duty on coal, pet coke and gypsum to zero-level, since these were not sufficiently available within the country to meet the requirements.
"There is no import duty on the import of finished products. Why then should we have to pay import duty on raw materials when this is not sufficiently available domestically?" he asked.
CMA asked for restoration of import duty on cement and supply of fly ash to cement industry free of cost.


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tag:blogger.com,1999:blog-2699215819180184869.post8795111096555473989..comments2014-07-14T17:05:58.613-04:00Comments on I Got Two, Babe: Wanna make an easy $25?Miguelitahttp://email@example.com:blogger.com,1999:blog-2699215819180184869.post-2686288309156582162008-04-09T11:20:00.000-04:002008-04-09T11:20:00.000-04:00Sherry - your rock! I am searching for just the r...Sherry - your rock! I am searching for just the right sad eyed Precious Moments moppet for you.

And thanks to the other anonymous person who signed up. I am $20 closer to a vacation now. Wooot!Michelehttps://firstname.lastname@example.com:blogger.com,1999:blog-2699215819180184869.post-41420730068463648032008-04-09T08:53:00.000-04:002008-04-09T08:53:00.000-04:00I AM SO OFFENDED THAT YOU HATE PRECIOUS MOMENTS!!!...I AM SO OFFENDED THAT YOU HATE PRECIOUS MOMENTS!!!!

Just kidding! I don't hate them, but I certainly don't collect them. Just had to tease you! : )

I don't buy much online and haven't used paypal in so long I've forgotten all my account info, but I'll keep this one in mind and if I need one, I'll come back to your blog and click the link and set up an account.Shellyhttps://email@example.com:blogger.com,1999:blog-2699215819180184869.post-47776422761129548092008-04-08T23:53:00.000-04:002008-04-08T23:53:00.000-04:00Done!!!!Now, go and buy me something pretty, and d...Done!!!!

Now, go and buy me something pretty, and don't spend that $10 all in one place!Sherryhttp://email@example.com:blogger.com,1999:blog-2699215819180184869.post-88140201837278676452008-04-08T19:20:00.000-04:002008-04-08T19:20:00.000-04:00We have the same problem, two paypal accounts we w...We have the same problem, two paypal accounts we want to attach to the same account and they won't let us. Why? Is it not normal for 2 people to share a bank account? Drives me cRaZy! And here I thought I was the only one. Misery loves company!Karenhttps://firstname.lastname@example.com:blogger.com,1999:blog-2699215819180184869.post-41824951561450462352008-04-08T16:26:00.000-04:002008-04-08T16:26:00.000-04:00Paypal keeps doing that shit to me, too. My husba...Paypal keeps doing that shit to me, too. My husband and I have a joint credit card that we use for pretty much everything, but two different Paypal accounts. They won't let us tie our credit card to both accounts! Which not only SUCKS, it means I have to use one of our other credit cards that we don't normally use so that whenever I buy something using Paypal I have an extra bill to pay. I HATE paying bills.JMChttps://email@example.com