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Rare Live Recordings 1934-1959 (2007)
48 years after her passing, Billie Holiday was honored with a five-CD set of Rare Live Recordings that includes film soundtracks, concert and club ... Show synopsis 48 years after her passing, Billie Holiday was honored with a five-CD set of Rare Live Recordings that includes film soundtracks, concert and club performances, radio and television broadcasts, rehearsal tapes, and even a private home recording where Lady Day sings "My Yiddishe Mama" and "God Bless the Child" to a child! If you think you know this singer, tap into this collection and see how much more there was to her than at first meets the ear. The more or less chronological presentation maps her personal and artistic transformation between the years 1934 and 1959. Out of approximately 60 titles, seven are rendered no less than four times apiece, and three -- "Them There Eyes," "God Bless the Child" and "Please Don't Talk About Me When I'm Gone" -- appear in five different versions. For this reason, those who seek a nice all-purpose, easy-to-use sampler of her career should probably consult her studio recordings first. ESP's Rare Live Recordings set is for people who have been smitten for life and cannot possibly get enough Billie Holiday. The intertwined discography, biographical chronology, and extensive liner notes spread out over two booklets, are at once informative, insightful and (unfortunately) sprinkled with typographic, editorial, and even factual errors. The worst of these is a glaringly incorrect statement in reference to the CBS Sound of Jazz television broadcast of December 8, 1957, whereby the producer makes the statement that "...this would also prove to be one of the last performances for baritone saxophonist Harry Carney." The reference was actually to tenor saxophonist Lester Young, who would die almost exactly four months before the passing of Lady Day in 1959. (Carney, of course, lived for another 17 years as the bass clef backbone of the Duke Ellington Orchestra.) Furthermore, the amazing rehearsal tapes are only partially represented here; they were reissued in their entirety on CD in 2006 as Songs & Conversations: The Lost Billie Holiday Session (SRI 510021). Why ESP-Disk omitted several tracks from this soul-baring workshop (taped in bassist Artie Bernstein's living room with a rather outspoken Jimmy Rowles at the piano) is puzzling and maybe even frustrating. But let's not allow these flaws to detract too much from the magnificence of this extended tribute to a great artist. ESP-Disk, one of the world's great independent record labels, is to be commended for having Billie Holiday, Charlie Parker and Bud Powell in the same catalog with Sun Ra, Albert Ayler, Marion Brown, Frank Wright, Pharoah Sanders, Patty Waters, Pearls Before Swine and Yma Sumac. Given the relatively easy availability of Lady Day's Vocalion/Columbia, Decca, and Verve studio recordings, this fascinating anthology of her uncommon works can and will act as a richly rewarding appendix to the more familiar portions of her legacy. ~ arwulf arwulf, Rovi
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" We do not see things as they are, we see them as we are." – Anais Nin
When life is difficult and tough we do sometimes wonder how to be positive? When we are unhappy and unsatisfied, it is very difficult for most of us to remain positive in our thoughts and actions. Sometimes, it is easier to stay negative because many people don't know how to be positive.
Here are some helpful tips on having a more optimistic outlook in life:
A healthy diet helps children grow and learn. It also helps prevent obesity and weight-related diseases, such as diabetes. Children have their own unique nutrient needs and meeting those needs is vital for a child to grow up big and strong. A child's diet should consist of a variety of foods that contain a range of nutrients. The food a child eats in their early years can influence their dietary habits later in life, so it's important to instil good habits and a healthy relationship with food from an early age.
Babies and Milk:-
In the first six months, babies take their nutritional requirements from a milk-based diet. Cow's milk is best nutrition for children. Milk is a good source of many important vitamins, minerals, and other nutrients.
Proteins are essential for a number of important functions including growth, brain development and healthy bones. Of the 20 amino acids or building blocks that make proteins, children need to get 9 essential amino acids from their food. Choose seafood, lean meat and poultry, eggs, beans, peas, soy products, and unsalted nuts and seeds. These contain all 9 essential amino acids.
Children should look to include at least five portions of fruit every day. Portion sizes will differ depending on age, size and physical activity. Portion of fruits should be the size of the child's palm. Encourage the child to eat a variety of fresh, canned, frozen or dried fruits rather than fruit juice. If the child drinks juice, make sure it's 100 percent juice without added sugars and limit his or her servings.
Vegetables are a good starting point for children. Serve a variety of fresh, canned, frozen or dried vegetables. Variety of vegetables, including dark green, red and orange, beans and peas, starchy and others, each week. The portion size depends on their age, size and physical activity – so there are no set rules.
Children need a source of carbohydrate in each meal. Whole nuts and seeds are good sources of fiber as well as important healthy fats. Choose whole grains, such as whole-wheat bread, oatmeal, popcorn, quinoa, or brown or wild rice. Limit refined grains.
Fats and sugar:-
Fats are important for children, but in moderation. While children need some fat to grow and develop, too much of any sort of fat is not recommended. Butter, spreads and oils contribute to the taste, texture and enjoyment of food. Fats are also needed to aid the absorption of certain vitamins including vitamins A, D, E and K. There are some fats which are essential in your child's diet for a healthy immune system and for normal brain function.
Poor nutrition can cause health problems, overweight, and obesity. Some of the health problems associated with poor nutrition can be very serious, especially as child grows into an adult. Proper nutrition and regular physical activity are the keys to maintaining a healthy weight and preventing health problem.
Eating right potency not is sufficient to lose weight. Variety and quality of food will make an extreme difference in our overall health .More health effects of foods, such as the profits of antioxidants. Fresh, unprocessed foods are filled with amazing vitamins and minerals that can have a lasting effect on our body. Foods with the most confident effects are called super foods. Positive foods can help us slim down or help us protect a healthy weight while simultaneously packing our body with nutrients that aid in lowering cholesterol and blood pressure, preventing heart disorder, and controlling type 2 diabetes. Here are some amazing super foods that can boost our metabolism and prepare weight loss even smooth and uncomplicated.
These food choices could guidance change our scale in the right direction and would practically have to break sweat. These super foods support us fail weight by boosting our metabolism to burn fat and by curbing cravings for fatty foods. In addition, these will control our energy level high.
Xarelto is a medication that is often prescribed to patients who are at risk for clots and other circulatory problems. You are probably familiar with this medication from hearing about lawsuits against the pharmaceutical company that sells Xarelto and might be wondering if this drug is safe to use.
Xarelto helps reduce the risks of clots, strokes and other health conditions by thinning the blood. This means that blood cannot coagulate to form a clot, which could be life-threatening. Taking a blood thinning medication like Xarelto is necessary if a patient is at risk for circulatory problems.
The downside of using Xarelto and other blood thinners is that these drugs work by neutralizing the coagulation process. This means that clots cannot form but this also means that bleeding will not stop if the patient is injured. This can be extremely dangerous and even result in death if the patient does not receive medical attention on time.
Taking Xarelto can be dangerous because blood thinners can cause you to bleed to death if you receive an injury. It is possible to stop the bleeding if you receive medical care, but this is still a very dangerous situation. A cut or an injury that caused internal bleeding becomes life-threatening if your blood cannot coagulate by itself.
However, not taking a blood thinner is dangerous if you are at risk for clots or have other conditions that affect your circulation. A clot could form and stop circulation or reach your heart. If you are at risk for clotting or need to have better blood flow for any other reasons, taking Xarelto or another blood thinner will reduce your risks of developing a condition that could be life-threatening.
You should talk to your doctor about your condition and your different treatment options. You might be able to treat your condition with a different drug or by making some changes to your lifestyle. If taking a life thinner is your best option at the moment, you should weight the pros and cons. Xarelto and other blood thinners are dangerous only if you receive a deep cut or experience internal bleeding.
If there are other safer treatment options available to you, you should consider them instead of taking a blood thinner. However, taking Xarelto could be your best option since not treating clotting or another condition that affects your circulation is more dangerous than using a blood thinner.
You need to talk to your doctor about Xarelto and blood thinners. Ask if there are any other treatment options for your conditions and find out more about Xarelto to better understand the risks. You might find that taking a blood thinner is the best way to reduce your risks of developing a life-threatening medical condition and that you can lower the risks of bleeding by staying away from activities where you could get injured. There are some risks involved with taking Xarelto, but for a lot of patients, using a blood thinner to treat a health condition is a necessity.
Here is a simple way to demonstrate this fact. Think about the vegetarians you know, are there any overweight problems among them? The high protein diets rely on a lot of animal fats and proteins, but these vegetarians don't eat them. Startling indeed,isn't it? Maybe you don't know any vegetarians. They certainly are hard to find, especially in the Midwest, where I live.
You may wonder about the science involved here. After all, many of those folks promoting the low carb diets are medical doctors, aren't they? Being a medical doctor doesn't mean that you don't ever make any mistakes. Besides, the same science that supports the low carb diet also supports the high carb diet. They didn't get it wrong, they just didn't consider the whole story.
That might sound like a contradiction, but it isn't. I'm going to explain why in just a moment. Fist, let me give you the science on this. You most likely are not a biochemist or a physiologist and neither am I. But I have studied the subjects a bit. Don't focus on the technical jargon in the next paragraph, just try to grasp the overall point. You don't need to be a scientist to use common sense and basic reasoning skills.
Consider this bit of biochemistry. Malonyl -CoA exists in high amounts when there is plenty of metabolic fuel present. Thus, carnitine acyltransferase is inhibited and this in turn prevents acyl-CoA from crossing into the cell s mitochondria. Another enzyme is inhibited by the presence of NADH and Thiolase is also inhibited by the presence of Acetyl-COA. In short, when a lot of glucose is present, fatty acid metabolism is inhibited.
It is the last sentence that clues us in here. Basically, a cell will not convert fats into energy if there is glucose present. When the cell has carbs and sugar to work on, it will not convert the fat to energy, thus the fat gets stored.
This is why the low carb diets work, with little to zero carbohydrates and subsequently glucose to work on, the fat will be used for energy. This is exactly why the high carb diet works too. When no or little fat is present, it won't be stored as fat.
In addition to this, it is important to realize that it costs the body quite a bit of energy to take carbs and store them as fat. This alone is actually a positive. There really needs to be some form of fat present to make it easier.
This should help you understand that whatever your diet consists of, if you want to remain or get thin, you need to avoid mixing fats and carbs together. A fat consists of a fatty acid head and a carbohydrate tail. This means when you mix your fat and carbs together you are asking for trouble, assuming you care about weight, that is.
So now it should be clear why so many people in North America have a weight problem as the NIH was happy to point out a few weeks ago. Think about the typical American diet. It generally consists of lots of combinations of fat and carbs.

subset: commoncrawl


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SPRINGFIELD — — Gov. Pat Quinn and Attorney General Lisa Madigan both suggested Monday that the U.S. Supreme Court's decision to turn down an appeal of New York's tough gun law could boost Illinois lawmakers' attempts to set strict limits on who gets to carry concealed weapons.
But the Democratic governor also used Monday's Supreme Court move to escalate his call for Madigan to appeal to the high court a federal ruling that gives Illinois a deadline of early June to put in place a concealed weapons law.


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Shadmani ho Shadmani... MP3
Hai Mubarak Aaj ka Din Raat Aaye hai Suhani...
"Shadi Ke Geet" Hai Mubarak Aaj Ka Din... Shadmani Ho Shadmani MP3
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Aaj Sadi Ke Salgirah Muh Mitha Ho Jaye | Bhojpuri Hit Songs 2014 New | Anamika MP3
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Pastor Francis Feroz New Album Song 2012.
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HAWA HAWA.,,,,,,,Hassan Jahangir MP3
Hawa Hawa was a album song by pakistani singer Hasan Jahangir. it was a great hit in india/pakinstan during 1988-90.
Tu Tu Hai Wahi - Rishi Kapoor - Poonam Dhillon - Hindi Songs - Asha Bhosle - Kishore Kumar MP3
Movie : Yeh Vaada Raha Music Director: Rahul Dev Burman Singers: Asha Bhonsle and Kishore Kumar Director: Kapil Kapoor Enjoy this Hit song from the 1982 ...
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Yeh Sehra Mubarak Ho [Full Video Song] Sehra Aur Doli MP3
Album- Sehra Aur Doli Singer - Teena Parveen Music Director: Raju Khan Audio Label - Deeni Cassette.


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Chiang Rai Hotels
Hotel Reservations for Chiang Rai
Hotels in Chiang Rai offer a diverse array of escape experiences, most of which share a strong nature theme. In the city, most luxury hotels are spread along the riverside, with a handful of budget accommodations located closer to the Clock Tower. A range of upscale spa resorts are tucked away in the mountains of Mae Salong and Mae Chan or on the banks of the Mekong, around the Golden Triangle area.
This picturesque northern Thai city is rich in tourist attractions, both located in the city centre and a short drive outside. The walking street is the place to shop on the weekend, with thousands of locals and tourists converging on this long and narrow street for some great food and bargain opportunities. Chiang Rai is also famous for its stunning White temple – or Wat Rung Khun – which is located just a short drive outside the city. Scroll down to find all of our select hotels in Chiang Rai and around, and find the latest rates over on Asia Web Direct.Read More
- Sea Kayaking at Ang Thong Marine Park
- Flight of the Gibbon™ Zipline Tour
- Flight of the Gibbon™ Chonburi Zipline Tour
- Khao Yai National Park Full Day Tour
- Elephant Trekking at Siam Safari with Meal
- Elephant Trekking Adventure at Siam Safari
- Elephant Trekking, Whitewater Rafting, & 4-Wheel-Drive Quest
- Phi Phi Island Speedboat Excursion
- Guided Ayutthaya Tour with River Cruise & Lunch
- Simon Cabaret Show Admission


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You won't be able to dismiss this by usual means (escape or click button), but you can close it programatically based on user choices or actions.
"This was a very pretty design that I could see using for numerous occasions. I would like to see a couple of more standard color choices to enable further versatility. The simplicity is appealing."
"These were perfect for sealing and return-addressing our invitations! I ordered them in orange and love cheerful palette."
"Decided to add an artistic touch to our wedding invitations by having labels printed up. Not only did they come out beautifully but I was able to have it reviewed and retouched by the designers at wedding paper divas one last time before making my final decision. They arrived 3 days ahead of schedule."
"I absolutely love these labels! My only issue is that I ordered them for my save the dates, which came with a small envelope so instead of putting them on the front, I had to put them on the back. It ended up looking very nice though, but just keep that in mind!"
"I purchased these address labels to affix to our save the dates (With Evening Sparkle). They are exactly as pictured online. The stickers are a bit larger than I expected, and would be too large for the front address label, but were a reasonable size to put on the back of our save the date envelopes."


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8 x White King Stain-Lift Wipes 15pk
Eliminate stains in a snap with these ultra-handy White King Fabric Stain Remover wipes! Ideal for use on clothing, carpet and auto interiors, each wipe is individually wrapped to fit into your wallet or glove box for those unexpected accidents.
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- Dimensions (mm, approx.): 140 x 150


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Martina Liana / New Learn More
Martina Liana 'Couture'
/ Resell It & Make Up To: $900 Learn More
Martina Liana Couture Wedding Gown $1,500 Gently used and in immaculate condition- worn in my November 2015 wedding! Size 8-10 "Unique amid a sea of white and ivory...!" "Fit-and-flare designer wedding dress from the Martina Liana wedding gown collection features corded silver Lace over Lustre Satin fabrication, scalloped lace edging and a court train. The back zips up under crystal buttons. The silver stitching makes this wedding dress memorable and unique amid a sea of white and ivory." Fabrics: Lace over Lustre Satin Detail Options: Ivory Silver Lace Fabric Colors: Ivory Tulle and Royal Organza over Sable Lustre Satin Back: Zip Up Only- Crystal Buttons MARTINA LIANA The Martina Liana Bridal Collection is the embodiment of exquisite couture wedding dress design. Each dress is a perfect choice for the bride who wants to radiates confidence, global glamour, and impeccable style on her wedding day. The Martina Liana Collection rises from the celebrated mind of Chief Creative Officer, Martine Harris. She and her international design team have brought the collection to the forefront of the world stage, taking its place as a major international bridal label. Every cut, every embellishment, every consideration of a Martina Liana design is made with one idea in mind: "A bridal gown is more than just something a bride will wear once. She will replay the memories of her day in her mind for years to come and pictures of her will be passed down for generations", says Martine. This passion to create an enduring memory is exemplified in the couture craftsmanship of every Martina Liana gown. From the handcrafted fit to the heirloom quality detailing, each dress will leave guests in awe -- and stir the heart of a husband-to-be. When you select one of Martina Liana's designer wedding dresses, you will wear more than a wedding gown. You will make a statement that exemplifies the style, the attitude, and the elegance of the woman you are.
- Condition: new
- Alterations: no
- US Street Size: 08
- Dress Tag Size: 10
- Bust: 36C
- Waist: 36
- Hips: 38
- Tallest Wearable Height: 5' 7"
- Fabric: chantilly lace
- Silhouette: fit to flare
- Neckline: v neck
- Features: beading
- Dress Length: full
Once you have placed your order the Seller will be notified to pack and ship the gown. The seller will then ship the item to us and our inspection and authentication team will check that it is authentic and matches to the seller's description. The item will then be shipped to you upon approval.
Dress Q & A
Have a question not answered here? Contact us below.
Try It On - No Risk Return Policy: Have your cake & eat it too. Returns accepted on all items. More details


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Food Industry Unprepared for Bioterrorism Rule
Fifty percent of professionals are unaware of the FDA rule, survey reveals.
ELMWOOOD PARK, N.J. -- An astounding 50 percent of food industry professionals surveyed by the Food Institute don't know that all domestic and most foreign food manufacturing and distribution facilities must register with the U.S. Food and Drug Administration by Dec. 12 of this year as FDA implements the Bioterrorism Act. Another 21 percent know about the requirement but have done nothing to prepare.
The Food Institute administered the online survey to 1,292 food industry participants, and the Food Policy Institute at Rutgers University analyzed the results, finding that survey responses reveal that many food firms are aware of the new requirements, yet few have taken action toward compliance.
"There is a striking disparity between awareness and preparedness," said Dr. Calum Turvey, director of the Food Policy Institute. "Many food firms aware of the regulations, however, have not done a great deal to prepare. Our snapshot study reflects the overarching issue of uncertainty that pervades this act."


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Occidental College
Campus Dining
Discover Oxy's Suppliers and Distributers
Overview Supplier Highlight
Occidental has an established network of producers and suppliers who are committed to sustainability and economic and social responsibility. Campus Dining is always working to create meals that are sustainable, locally grown and delicious. Occidental supports many producers and suppliers that are local and community based, ecologically sound, humane, and fair trade—all of these factors are in compliance with the Real Food Challenge. If you have any questions about sources or ingredients, please contact Associate Director Judy Runyon at firstname.lastname@example.com
Supplier Highlight
Harvest Santa Barbara
Harvest Santa Barbara is an Oxy supplier who connects us with many sustainable farms, most of which are within 250 miles of Los Angeles. The mission of Harvest Santa Barbara is "to be the catalyst for a healthier, more sustainable food system by strengthening the ties between farmers and the community." Owners Jasper and Brook Eiler combined their knowledge of sustainable agriculture and their entreprenuerial skills to create a thriving business bringing fresh, local produce to insitutions and restaurants. When food is grown close to where it is consumed it tastes better and supports an ecologically and socially sustainable economy.
Harvest Santa Barbara Producers
- Frecker Farms: 85 miles from Oxy in Carpinteria, CA
- Goleta Farms: 100 miles from Oxy in Goleta, CA
- Kenter Canyon Farms: 56 and 215 miles from Oxy in Fillmore and Imperial, CA
Our Distributors and Suppliers
- A&R Food Distributor
- Ace Beverage Co.
- Action Cookies
- Berry Bowl
- BioBag
- BioTuf
- Bread Los Angeles
- Caffe Vita
- Cakery Bakery
- Driftwood Dairy
- Elsa's Bakery
- Espresso Masters
- F. Gavina & Sons Inc.
- Fosselman's Ice Cream
- Galasso's Bakery
- Groundwork Coffee
- Haralambos Beverage Co.
- J. S. Ubardelli Produce Co.
- Knights Distribution
- LA Distributing Co.
- LA Specialty
- Le Chef Bakery
- Mary's Free Range Chicken
- Melodee Ice Cream
- Mutual Trading Co.
- Nature's Best
- NuGo Nutrition
- Page Foods
- Pepsico
- Porto's Bakery & Cafe
- Premier Meat Co.
- R. L. Schreiber Inc.
- Red Shell Foods
- Reliant Foodservice
- So Cal Farm Network
- Sparkletts
- Superior Seafood
- Susina Bakery
- Sysco
- The Great American Syrup Co.
- The Healthy Baking Co.
- Tortilleria La California
- Wholesome Foods Distributing
- Office:
Johnson Student Center, 2nd Floor
- phone:
(323) 259-2629
- e-mail:


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login with
I did
If you have insurance that covers the tests than I recommend it . My oldest was flagged for down-syndrome and I went for the test and she screened out of it. My 2nd I didn't get offered it. My 3rd got screened when I went in for her ultrasound. It never hurts to check and some moms don't want to know.
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About Nicole
Current: Los Lunas, New Mexico
Birth: July 29
On Moms.com since: Dec 17, 2013
I'm so blessed to have my 3 beautiful girls, Marron, Havyn and Nahara and my handsome little man Kyle! I've been a SAHM for 2 years now and my husband have been married for 7 years! ^_^


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Viewtiful Joe
Review by sunny the armadillo
"It's a Viewtiful day in the neighbourhood..."
Today, you see your Halos and your Silent Hills and Final Fantasys and Mario 64s and etc .....but what about 2D? When's the last time they had a (non-portable, console) 2D game? Has that been forgotten? That's what I have been thinking about a while ago..... until I found out about something.......... something...... Viewtiful. (Expect me to say Viewtiful like 30 times in this review.)Well, when I first heard about this game I thought: ''ANOTHER 3D sucky platformer...... by Capcom....'' until I heard it was gonna be...... *gasp* OLD SCHOOL! The nostalgia factor in this game makes you wonder why did they go onto 3D. Well...I may be not that far in the game, (It is a big game) I can say this game is...... (Here it comes) VIEWTIFUL!
Graphics 10/10
Viewtiful.... just Viewtiful. The cel shading in this game beautifully represents the movie world. All three Viewtiful powers are well executed. SLO-MO! MACH-SPEED! ZOOM IN! All so Viewtiful... Everything looks so good, you'll feel like you actually are in the movie world! All the characters look awesome. (My only complaint is that they're too dark sometimes, but I didn't take a point off.) All looking nice. I want to compliment Capcom on the excellent backrounds as well, (the city especially..... heh heh.... Playboy knock-offs...) and the effects are nice.
Gameplay 10/10
Every aspect of the gameplay was flawlessly executed. No slow down. No glitches. Viewtiful! Sweet combos are jam packed into this game. The difficultly SHOULD NOT BE UNDERESTIMATED! This game is hard........old school hard. It must've taken me HOURS to beat chapter 2. It's old school projected.......with new school flavor! How Viewtiful! The controls are excellent too. They give you the option for using the D pad to add to the nostalgia. I HATE USING THE GCN'S D PAD!! So I use the Control Stick. Everything is well placed. Sometimes, it's a pain in the ass to Zoom in (until I found out about B) but you'll learn to use B too. Controls look good too!
Sound 10/10
Interesting tracks are used in this game and are perfect for the scene. A little forgetable, but eventually it'll get stuck in your head. The voice acting is..........Viewtiful.........also. All the characters sound awesome. Some of the dialog is VERY funny. Not corny funny, mind you, (though some of the dialog sounds like an insult a 3 year old would say). Well, it IS based on the movies, right? :P
Heh heh.... Stephen 1, Movies....... 317.
All around good sound. Hey I rhymed!
Lasting Appeal 9/10
An extremely long, difficult adventure awaits you in this game. Plenty of cool unlockables too. So many Viewtiful combos too! Sometimes the game might appeal less, because of the difficulty, but old school was always this hard...............................................................right? Anyways, the secrets (and harder difficulties) will keep you coming for more, and more, and MORE! How Viewtiful. I hate to add on extra crap and stuff (I love it, actually) but I have to drive this review to 600 words. CURSE YOU GAMEFAQS!!!!!!!
Rent or Buy
Go buy it..........NOW. It's an awesome, Viewtiful experience! Even newbies that don't even know what old school is should give this game a chance. Thanks Capcom for this game (and free T-Shirt! :P)
Let's see how many times I said Viewtiful...... 14 times huh? Much less than I expected....... oh well. Wait, I NEED MORE WORDS?!! DAMMIT! Um....... well, I had a VERY fun time playing it so far, and if you're renting it, you'll miss out on half the game! Do yourself a favor and buy this Viewtiful game! All aspects of this game is awesome!
As Joe would say......
Heshin a go-go baby!
Reviewer's Rating: 5.0 - Flawless
Originally Posted: 10/13/03
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I really appreciated that we were right on the beach. Any time you want, you can wander a few steps from your villa to the sand and water - no need to walk down the road trying to find a public pathway that will give you access to the beach. And, as alluded to in other reviews, Peter and the crew at Rancho create a fantastic sunset vibe.... down near the beach they have a tiki bar, a DJ spinning relaxed house beats, mats and pillows and good eats to order at your pleasing. Again, so nice to have this after a day of surfing or exploring.... just come home and not have to go out searching for a place to chill at sunset.
In regards to the surf, again, perfect location.... head right and you have the santa teresa breaks and head left and you have the playa carmen breaks... out front is one of the few places along the beach that has a nice tidal pool so that you can swim without getting hit by breaking waves.
The surf instructor Foley was awesome, he knows the beaches well and puts effort into choosing the right location and time of day so that the waves best match your level of ability. He's very encouraging, always got a big smile, and clearly an experienced instructor.
All round it was a great place to chill out, swing in a hammock... play with the resident pooches.... Luna and Ghandi... ( the dogs ) eat some good food and catch some waves.
- Official Description (provided by the hotel):
- A small family run business on one of the most beautiful beachfront properties in St,Teresa. The property is inbetween the 2 main surfing beaches situated on a 5000sqmtr big property. The property has lush tropical vegetation and infront of the property we have the best natural pool in whole St.Teresa. Just walk out to the beach and jump into the Pacific Ocean. we also offer 4 comfortable , clean and secure rooms. 2 are equiped with kitchens. all rooms have wifi. We have a restaurant which serves breakfast all year round . From nov. to april we also offer restaurant service from 3 pm , specially for sunsets on on our ocean front.there is also free parking, a chill rancho with sofas and dvd player and a beautiful yoga and massage rancho out on the front.we offer all kind of excursions, massage, yoga classes and we offer NSSSIA certified surf instructors. ... more less
- Reservation Options:
- TripAdvisor is proud to partner with Booking.com, Priceline and Agoda so you can book your Ranchos Itauna reservations with confidence. We help millions of travelers each month to find the perfect hotel for both vacation and business trips, always with the best discounts and special offers.
- Also Known As:
- Ranchos Itauna Costa Rica/Santa Teresa


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(The Hosting News) – EdgeConneX®, specializing in hosting solutions at the edge of the network, announced today a new partnership with custom network solutions and bandwidth infrastructure provider, SummitIG, to deliver dark fiber connectivity to its newly launched Richmond Edge Data Center® (EDC), with plans to subsequently extend the new fiber infrastructure to the EdgeConneX Norfolk facility.
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Based in Cheadle, Cheshire, Holistic Life treats people of all ages to help them overcome aches and pains, enhance performance and relieve stress. The owner, Caroline Boulton uses specialist therapeutic techniques in the treatment of sports injuries, musculoskeletal problems and spinal pain.
For more information please see About Us.
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PEARL iZUMi Women's Pro Cycling Team
"Caroline has worked with myself and the team throughout 2014 road and track season. Her understanding of cycling and the needs of athletes has impacted very positively on the whole team, from both performance and morale point of view. Having such expertise and great treatment within the team has ensured confidence remains high and we have all been able to focus on the racing knowing that any niggles or recovery requirements will be taken care of. I would highly recommend Caroline to any sports person, her down to earth approach and superb work ethic have made a valuable part of the team". Dame Sarah Storey
The Wellness Centre at Holistic Life now offers Psychotherapy provided by Wendy Priscott, helping people deal with issues such as anxiety, stress and depression.
Please call to arrange an office visit, evenings are also available.


text:
If an item you ordered from TextbookRush does not meet your expectations due to an error on our part, simply fill out a return request and then return it by mail within 30 days of ordering it for a full refund of item cost.
Learn more about our returns policy
Description: James A. Garfield was one of the most extraordinary men ever elected president. Born into abject poverty, he rose to become a wunderkind scholar, a Civil War hero, and a renowned and admired reformist congressman. Nominated for president against his will, he engaged in a fierce battle with the corrupt political establishment. But four months after his inauguration, a deranged office seeker tracked Garfield down and shot him in the back.But the shot didn't kill Garfield. The drama of what happened subsequently is a powerful story of a nation in turmoil. The unhinged assassin's half-delivered strike shattered the fragile national mood of a country so recently fractured by civil war, and left the wounded president as the object of a bitter behind-the-scenes struggle for power—over his administration, over the nation's future, and, hauntingly, over his medical care. A team of physicians administered shockingly archaic treatments, to disastrous effect. As his condition worsened, Garfield received help: Alexander Graham Bell, the inventor of the telephone, worked around the clock to invent a new device capable of finding the bullet.Meticulously researched, epic in scope, and pulsating with an intimate human focus and high-velocity narrative drive,The Destiny of the Republicwill stand alongsideThe Devil in the White CityandThe Professor and the Madmanas a classic of narrative history.From the Hardcover edition.
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All the information you need in one place! Each Study Brief is a summary of one specific subject; facts, figures, and explanations to help you learn faster.
List price: $23.00Publisher: Knopf Doubleday Publishing GroupPublication date: 6/12/2012Binding: PaperbackPages: 432Size: 5.25" wide x 8.00" long x 1.00" tall Weight: 1.122Language: English
Candice Millard is a former writer and editor for National Geographic magazine. Millard's first book, The River of Doubt: Theodore Roosevelt's Darkest Journey, was a New York Times bestseller and was named one of the best books of the year by a number of publications including the New York Times, Washington Post, San Francisco Chronicle, and Christian Science Monitor. The River of Doubt was also a Barnes & Noble Discover Great New Writers selection and a Book Sense Pick, was a finalist for the Quill Awards, and won the William Rockhill Nelson Award. Millard's second book, The Destiny of the Republic: A Tale of Madness, Medicine & the Murder of a President, was released in September 2011.
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expertisenoun [ U ]uk /ˌek.spɜːˈtiːz/ us /ˌek.spɝːˈtiːz/
› a high level of knowledge or skill:
She has considerable expertise in French history.
Más ejemplos
- I've been in this job for 30 years, and I've picked up a good deal of expertise along the way.
- Software is not really my area of expertise.
- You place too much reliance on her ideas and expertise.
- He is known for his expertise in the history of British economics.
- The database is simple to use and requires no expertise at all.
Thesaurus: sinónimos y palabras relacionadas


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Senior Dot net developer / Team Leader (Amritsar) ( 4 - 5 yrs)
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PHP Developer (CAKE PHP, core , wordpress) ( 1 - 6 yrs)
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Angular Js Developer / Laravel Developer Jobs in Ludhiana ( 1 - 3 yrs)
Bhatia Consultancy Services
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Web Developer Jobs in Ludhiana ( 1 - 3 yrs)
Bhatia Consultancy Services
RS 1,50,000 To 2,50,000 Ludhiana
Position: Web developer Jobs In Ludhiana Location: Ludhiana Qualification: MCA/B Tech Experience: 1-2 Years Job Description: • Understanding client requirements & functional specifications • Developing and maintaining dynam...
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Always InfoTech Private Limited
RS 70,000 To 1,50,000 Ludhiana
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Php Developer (cake Php, Core , Wordpress) ( 1 - 2 yrs)
leom international
RS Up To 1,75,000 Ludhiana
PHP Developer (CAKE PHP, core , wordpress) No. of Positions : 2 Experience Required : 0.6-2 years Offered Salary : upto 15k. Location :- ludhiana JOB DESCRIPTION :- • Candidate must have s...
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K D Groups
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Good Knowledge PHP, HTML CSS JAVA Script My SQL & CMS )
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Bhatia Consultancy Services
RS 3,25,000 To 4,50,000 Jalandhar, Jalandhar Cantt., Ludhiana, Phagwara
Position: Team Leader Php Location: Phagwara (Kapurthala District) Qualification: Mca/Be/B Tech Experience: Min. 4-5 Years Of Php Experience Job Description 1.Manage The Team Member And Guide Them In The Development Process. 2.Must...
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Asp Dot Net Programmer ( 0 - 2 yrs)
AIM Jobs HR Consultants
RS 1,00,000 To 3,00,000 Ludhiana
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Required Php Software Developer ( 1 - 7 yrs)
Cyberframe Infotech Pvt. Ltd.
RS 1,25,000 To 4,00,000 Ludhiana
1. Strong knowledge of PHP web frameworks. 2. Understanding the fully synchronous behavior of PHP 3. Understanding of MVC design patterns 4. Understanding of front-end technologies, such as JavaScript, HTML5, and CSS3 5. Knowledge of obje...
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RS 1,00,000 To 5,00,000 Chandigarh, Mohali ( Chandigarh ), Amritsar, Ludhiana, Mohali
Required candidates for PHP developers for IT companies in Mohali, Chandigarh and Ludhiana.
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Nav Placement World
RS 1,50,000 To 3,50,000 Ludhiana
Php Developers Required Who Can Independently Handle Projects
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RS 1,00,000 To 2,00,000 Ludhiana
Hiring Java Developer freshers .net,java,php developer, entry level software developer/engineer.
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RS 1,50,000 To 2,00,000 Chandigarh, Zirakpur, Panchkula, Patiala Road, Amritsar, Ludhiana, Moga, Mohali
Wordpress Developer/Php Developer No. Of Positions - 5-10 Job Description - Good Knowledge Of Php/Wordpress - Expertise In Wordpress. - Knowledge In Mvc\'S Will Add Advantage. - Knowledge Of Php, Mysql, Javascript And Cms\'S. -...
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Electronic Design Engineer ( Fresher)
ReckonTec Solutions
RS 1,00,000 To 2,50,000 Amritsar, Jalandhar, Ludhiana
We are Seeking for Electronic Design Engineer.
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Search Engine Optimization Seo ( 0 - 1 yrs)
Job Search Dot Com
RS 1,00,000 To 3,00,000 Mohali ( Chandigarh ), Ludhiana, Mohali
Search Engine Optimization Seo Job Location -; Ferozpur,Field Gunj,Rajguru Nagar, Ludhiana Company Profile -: IT Software - Developer Job Detail Locality : Ferozpur, Field Gunj, Raj ... Role : IT Software - Developer Company Name : Jobs Gur...
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Required 1-3 Yrs. Java Developer/trainer in Ludhiana ( 1 - 3 yrs)
Sds Techware Pvt.ltd
RS 2,00,000 To 3,25,000 Ludhiana
Sr. Java Developer,Java Programmer.software Developer Vacancy
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Required Freshers B.tech/be(cs,It,Ece)mca,Bca Only Freshers in Jaipur ( 0 - 1 yrs)
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RS 1,00,000 To 2,00,000 Ludhiana, Jaipur
Entry Level Software Engineer, .net,Java,Php Developer, software Programmer, only Freshers Exp. are Not Allowed.
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Web Developer PHP ( 0 - 2 yrs)
Callstem Software LLP
RS 1,00,000 To 1,75,000 Ludhiana
Profile: PHP Developer Skills: Core PHP, WordPress Experience: 1-2 Yrs Salary: decent hike on current CTC Location: Ludhiana
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Trainee Engineer/ Software Developer ( 0 - 1 yrs)
K D Groups
RS 1,00,000 To 2,50,000 Ludhiana
• will Work in Different Teams like Development Teams- Java / .net/ Php/ Project Teams for Development of World Class Innovative Product for Enhancing Performance of Web Based Applications • coding, Technical Code Reviews • Designing and Wri...
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Vibhuti Technologies
RS 50,000 To 2,00,000 Ludhiana
We are having below mentioned Job Openings at our Ludhiana office : Software Trainee (PHP) - Fresher but must have undergone with the training of minimum 6 months and should have knowledge of - PHP, HTML, Javascript, Jquery, Mysql.
Key Skills : javascript,jquery,mysql,php developer,cakephp,drupal,magento,adobe photoshop,photoshop,html,css,flash animation,dhtml,css-cascading style...
Senior level programmer ( 3 - 5 yrs)
Psm Hr Solutions
RS 2,50,000 To 7,00,000 Ludhiana
We are looking for Senior Level Programmer who has expertise on following: • Java/Scala (play framework) • LESS/CSS JavaScript • React and familiar with Postgres & Heroku Experience: 3-4 Years Location: Ludhiana Salary: Industry Stand...
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Asp.net Developer Jobs in Ludhiana ( 1 - 2 yrs)
Bhatia Consultancy Services
RS 2,00,000 To 3,25,000 Ludhiana
Position: Software Engineer (Asp.Net Developer) Location: Ludhiana Education: Mca Or B.Tech. (Computer) Or M.Sc.It Experience: 1-2 years Skills: ASP.net, MVC, Jquery, AngularJS, C# For Details, Contact: Bhatia Consultancy Services Punjab
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Vibhuti Technologies
RS 50,000 To 3,00,000 Ludhiana
We are having below mentioned Job Openings at our Ludhiana office : 1. Software Engineer (asp.net mvc ) - having 2 years of relevant experience.
Key Skills : ajax,c sharp,asp.net,asp.net developer,.net,mvc,mysql
RS 50000 To 90,000 Ludhiana
Urgent requirement of php developer
Key Skills : php,htm,css,javascript,php developer,software engineering
Php Programming Male Female ( 1 - 5 yrs)
Job Search Dot Com
RS 1,75,000 To 4,50,000 Chandigarh, Sector 21 Chandigarh, Mohali ( Chandigarh ), Ludhiana, Mohali
Php Programming Male Female it Software - Web Designer Chandigarh Road,Dholewal Chowk,Ferozpur, Ludhiana job Detail locality : role : it Software - Web Designer company Name : jobs Guru the Placement Consul min Salary : rs. 15000 max Salary ...
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Php Programming Male Female ( 1 - 5 yrs)
Job Search Dot Com
RS 1,75,000 To 4,50,000 Chandigarh, Sector 21 Chandigarh, Mohali ( Chandigarh ), Ludhiana, Mohali
Php Programming Male Female it Software - Web Designer Chandigarh Road,Dholewal Chowk,Ferozpur, Ludhiana job Detail locality : role : it Software - Web Designer company Name : jobs Guru the Placement Consul min Salary : rs. 15000 max Salary ...
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Software Developer ( 1 - 5 yrs)
North Way
RS 1,00,000 To 3,75,000 Chandigarh, Bathinda, Ludhiana, Mansa, Patiala, Greater Noida
Has designed large and complex enterprise web application and RESTful services using the .Net technology stack (.NET Framework 4 (C#, ASP.NET web forms, WCF restful services, Unity, NHibernate) Hands on experience in the design and development of ...
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Trainer Engg./ Sr. Software Developer ( 2 - 3 yrs)
Nutan Enterprises
RS 2,00,000 To 4,00,000 Ludhiana
Will Work in different teams like DEVELOPMENT TEAMS- JAVA / .NET/ PHP/ PROJECT TEAMS for development of world class innovative product for enhancing performance of web based applications -Coding, Technical code reviews - Designing and Writing Techn...
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Fabrication Plant Head Urgently Needed ( 1 - 30 yrs)
Wingas Oil and Gas Company Ltd
RS 1,25,000 To 50,00,000 Akkarampalle, Tirupati, Dibrugarh, NumaligarhRefineryTownship, Barauli, Muzaffarpur, Raigarh, Sarangarh, Gurgaon, Rewari(Rural), KulluManali-Kullu, Mandi, Washim, Ludhiana, Madurai, Ullur, Kolkata, Kolkata Suburb
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Software Developer (.Net) ( 0 - 1 yrs)
Doxbird Solutions
RS 50,000 To 60,000 Ludhiana
Doxbird Solutions is looking for .Net developers who will develop and maintain applications.
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Hiring It/php Programmer ( 1 - 3 yrs)
Gill International Recruiting Agency
RS 1,75,000 To 3,25,000 Ludhiana
Dear Candidate, we have An Urgent Opening for . Candidate Must have Good Communication Skills..
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Looking for PHP Project Manager ( 8 yrs)
Rd Consuntancy
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Sds Techware Pvt.ltd
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We are Urgent Required Freshers, b.tech/be(cs,It,Ece)mca,Bca, .net,Java,Php Developer, software Trainee, software Developer
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Sds Techware Pvt.ltd
RS 1,25,000 To 2,00,000 Ludhiana
Entry Level Software Engineer, .net,Java,Php Programmer. selected Candidates Will Get Appointment as a Trainee/jr. Programmer From the Date of Joining. -candidate Work On .net & Java & Php Technology and C Language -in Training Period, the Ctc W...
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Redefine Webs
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- A very strong understanding of web development languages - HTML / XHTML / HTML5 / CSS / CSS3. - Hands on experience on Responsive design. - Understanding of browser limitations and cross browser compatibility rendering techniques. - Must have us...
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Company Looking for Motivated and Talented Developers in all the Computers, Electronics and Mechanical Domains for Our Company. the Domains Should Be Matlab, Ns-2, Wsn, Cloud Computing, Image Processing, Java, Power Systems, Software Engineering, Sig...
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Trigbit Technologies
RS Up To 50000 Ludhiana
Trigbit Technologies is Looking for Experienced/fresher Asp.net Mvc Software Developers Who are Seeking a Bright Future in the Industry and Want to Work with An Organization Which is Open for Innovative Ideas. There are Urgent Openings for the Positi...
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ASP.NET Developer ( 0 - 2 yrs)
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RS 50,000 To 2,25,000 Chandigarh, Ambala, AmbalaCantt., Karnal, Shimla, Mumbai, Amritsar, Ludhiana, Rajasansi, IndianTelephone, Lucknow, Delhi
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text:
4 Pan Electric Counter Top Steamer Manual Drain
Southbend | Model: R18A-4M
Southbend R18A-4M Specifications
Low Price Guarantee On All Southbend Products!
This electric counter top steamer is perfect for cooking delicious vegetable dishes and delicate meats. Ideal for nursing home kitchens, cafeterias, and casual dining restaurants. A Scale Master Water Filtration System can be added to this item for no cost. For more information on purchasing this steamer with the water filter please contact us directly. This unit is stocked in 208v/3ph and is field convertible to single phase. All other configurations will have up to a 4 week lead time.
1 Year limited warranty
Manufacturer Information
Power Information
208/240 volts
157 lbs.
18.13 in.
29 in.
26.5 in.
Shipping Information
Your order will be shipped from
Customer Pick Up
(Not Available for pickup)
Included Options
This item is available in multiple configurations. Get the most from your investment by taking the time to select the right configuration for your needs.
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text:
|Publication number
|Publication type
|Application number
|Publication date
|Jan 18, 2011
|Filing date
|Dec 9, 2008
|Priority date
|May 16, 2008
|Fee status
|Also published as
|Publication number
|Robin Charis Scott, Matt Johnson
|Original Assignee
|Asm America, Inc.
|Export Citation
|BiBTeX, EndNote, RefMan
|Patent Citations (124), Non-Patent Citations (8), Classifications (20), Legal Events (2)
|External Links: USPTO, USPTO Assignment, Espacenet
This application claims priority to U.S. Provisional Patent Application No. 61/053,770, filed May 16, 2008, which is incorporated herein by reference in its entirety.
1. Field of the Invention
The present invention relates to treating semiconductor substrates, and more particularly to low pressure bakes and subsequent in-situ epitaxial deposition within a single-wafer chemical vapor deposition (CVD) chamber.
2. Description of the Related Art
High-temperature reactors are used to create structures of very fine dimensions, such as integrated circuits on semiconductor substrates. One or more substrates, such as silicon wafers (which may or may not include previously formed structures thereon or therein), are placed on a substrate support inside the reaction chamber. The substrate is heated to a desired temperature. In a typical treatment step, reactant gases are passed over the heated substrate, causing the CVD of a thin layer of the material derived from the reactant or precursor gases on the substrate. Various process conditions, particularly temperature uniformity and reactant gas distribution, must be carefully controlled to ensure the high quality of the resulting layers.
Through a series of deposition, doping, photolithography and etch steps, the starting substrate and the subsequent layers are converted into integrated circuits, with a single layer producing from tens to thousands or even millions of integrated devices, depending on the size of the substrate and the complexity of the circuits.
Batch processors have traditionally been employed in the semiconductor industry to allow multiple wafers to be processed simultaneously, thus economically presenting low processing times and costs per wafer. Recent advances in miniaturization and attendant circuit density, however, have lowered tolerances for imperfections in semiconductor processing. Accordingly, single wafer processing reactors have been developed for improved control of deposition conditions.
Among other process parameters, single wafer processing has greatly improved temperature and gas flow distribution across the wafer. In exchange for greater process control, however, processing time has become even more critical than with batch systems. Every second added to processing times must be multiplied by the number of wafers being processed serially, one at a time, through the same single-wafer processing chamber. Conversely, any improvements in wafer throughput can translate to significant fabrication cost savings.
One process for which process control is particularly critical, and for which single wafer processing is particularly useful, is the formation of epitaxial layers. If the deposited layer has the same crystallographic structure as the underlying silicon wafer, it is called an epitaxial layer. Through careful control of deposition conditions, reactant gases are passed over a heated substrate such that the deposited species precipitates in conformity with the underlying crystal structure, which is thus extended into the growing layer. The lowest level of devices, including transistors, often include epitaxial layers formed over a single crystal semiconductor substrate.
It is important that the epitaxial layers maintain a pure crystal structure, free of contamination which could affect device operation. The purity and crystalline structure of the underlying substrate prior to epitaxial deposition strongly affects the resultant epitaxial layer. Contaminants at the substrate surface, such as naturally forming "native oxide" and carbon contaminants, interfere with the crystal structure and consequent electrical properties of each overlying layer as it is formed, resulting in a polycrystalline layer. Note that clean, oxide-free semiconductor or conductor surfaces are also desirable for a number of contexts other than epitaxial deposition.
Typically wafers are cleaned prior to deposition with an ammonium hydroxide, hydrogen peroxide mixture, known as an "APM" clean. If an oxide-free surface is required, the silicon wafer is typically dipped into an aqueous solution of hydrofluoric acid or HF vapor treated to etch away the oxide layer left by an APM clean and, theoretically, obtain hydrogen termination. There are a large number of variations on APM clean and hydrofluoric acid treatments. After cleaning, wafers are typically stored for a period of time before further processing. A native oxide tends to form on the previously oxide-free silicon wafer surface almost immediately after exposure to air or moisture. Further, silicon-fluorine and silicon-carbon bonds are often observed on the silicon wafer surface after cleaning. The fluorine and carbon contamination on the surface can be detrimental to the thermal budget and/or the quality of the layer to be grown or deposited on the surface of the wafer.
If the silicon wafer is dipped in hydrofluoric acid as the last cleaning step (also known as an "HF last" treatment), the surface of the silicon is typically terminated mostly with a monolayer of hydrogen, attached to the substrate largely through Si—H bonds. The hydrogen-terminated surface resists oxidation more than untreated silicon. If desired, the hydrogen termination can be removed at temperatures greater than about 500� C. However, the surface of a silicon wafer after a conventional HF last treatment normally starts to reoxidize within about 20 minutes after the original oxide layer was removed, quickly forming a new 5 Å to 7 Å thick oxide layer on the surface of the silicon wafer. Carbon or fluorine termination can better prevent re-oxidation, though this will introduce other problems, such as contamination or difficulty in removing the termination prior to subsequent processing. The problem of reoxidation after the HF last treatment has been detrimental to the high-throughput manufacturing of many silicon devices.
A need exists, therefore, for methods of purifying substrate surfaces prior to chemical vapor deposition, and of maintaining the purity of a deposited layer after formation. Desirably, such methods should be compatible with single-wafer, epitaxial silicon deposition chambers without increasing system costs or reducing wafer throughput. In some arrangements, these methods should not exhaust the thermal budget for subsequent epitaxial layers. These and other needs are satisfied by several embodiments within the present invention.
In accordance with one aspect of the present invention, a method is provided for treating a semiconductor substrate by loading the substrate onto a substrate support in a chemical vapor deposition reaction chamber and decreasing pressure in the reaction chamber to a bake pressure between about 1�10−6 Torr and 10 Torr. The method further includes increasing pressure in the reaction chamber from the bake pressure to a deposition pressure and depositing a layer by chemical vapor deposition at the deposition pressure.
Another aspect of the present invention provides a method of cleaning a silicon surface. The method further comprises loading the substrate onto a substrate support in a reaction chamber and introducing a reducing gas to the reaction chamber. The method further comprises, after introducing the reducing gas, decreasing pressure in the reaction chamber to a bake pressure between about 1�10−6 Torr and 10 Torr while continuing to supply the reducing gas to the reaction chamber.
In accordance with another aspect of the present invention, a system for chemical vapor deposition on a semiconductor substrate is provided. The system comprises a reaction chamber having a volume less than about 100 liters, the reaction chamber comprising a reinforced structure configured to withstand a pressure of less than 5 Torr. The system further comprises a robot configured to transfer a substrate into the reaction chamber and a plurality of heating elements configured to heat the substrate within the reaction chamber. The system further comprises a controller configured to decrease pressure in the reaction chamber and carry out a low pressure bake at a bake pressure between about 1�10−6 Torr and 4 Torr.
These and other aspects of the invention will be readily apparent to the skilled artisan from the following description and the attached drawings, wherein:
While the preferred embodiments of the present invention are discussed in the context of a single-substrate reaction chamber, the skilled artisan will appreciate that the principles and advantages taught herein will have application to deposition reactors of other types. Furthermore, while a series of process steps are disclosed herein, one of ordinary skill in the art will recognize the utility of certain of the disclosed steps even in the absence of some of the other disclosed steps.
A system and methods are provided for low temperature, rapid baking to remove impurities from a semiconductor surface prior to in-situ deposition. Advantageously, a short, low temperature process consumes very little of the thermal budget and also improves throughput. Although embodiments of the present invention are illustrated with reference primarily to chemical vapor deposition (CVD), one skilled in the art will understand that atomic layer deposition (ALD) would also be suitable. In addition, while the embodiments are described with reference to wafers or semiconductor surfaces, the skilled artisan will understand that other substrates with a silicon-containing surface on which a layer is to be deposited can also be used. The skilled artisan will also understand that although the figures and the description depict a wafer that has not been patterned, processes described herein can also be performed using wafers that have been patterned.
An exemplary dilute (aqueous) hydrofluoric acid used for the HF last treatment 100 has a concentration of approximately 0.5% to 1.0% by weight (wt %) hydrogen fluoride, and more particularly about 0.5 wt % HF. Use of a dilute hydrofluoric acid for the etch treatment 100 minimizes contamination on the surface of the silicon wafer. The dilute hydrofluoric acid is preferably heated to a temperature of about 35� C. to 60� C., and more preferably at about 50� C., to minimize particles and to enhance hydrogen termination on the surface of the silicon wafer. The heated dilute hydrofluoric acid etch also provides for uniform oxide etch rates on the entire surface of the silicon wafer. In an exemplary procedure, the silicon wafer is etched with dilute hydrofluoric acid having a concentration of approximately 0.5 wt % hydrogen fluoride at a temperature of approximately 50� C. for approximately 60 seconds.
In an embodiment, the substrate is dipped in an aqueous or wet HF bath, but HF vapor can also be employed in other arrangements. The ultrapure water which is used to form the dilute hydrofluoric acid in the etch bath has high resistivity, indicating that the metals levels are low. The water which is used to form the dilute hydrofluoric acid in the etch bath has a resistivity greater than about 15 megaohms-cm (MΩ-cm) at a temperature of 25� C. In one embodiment, the resistivity is at least about 18 MΩ-cm. The total organic carbon (TOC) and the dissolved silica are also preferably minimized to levels of less than 10 ppb (parts per billion).
In an embodiment, the hydrofluoric acid which is used to form the dilute hydrofluoric acid in the etch bath is gigabit grade (on the order of parts per trillion impurities) hydrofluoric acid with low levels of particles and dissolved metals, commercially available as Part No. 107101 in a 49% solution from Alameda Chemical of Tempe, Ariz., (480) 785-4685.
Following the HF last treatment 100, the substrate is delivered into a reaction chamber by loading 110, as shown in
The EPSILON� single-pass horizontal flow design also enables laminar flow of reactant gases with low residence times which, in turn, facilitates sequential processing while minimizing reactant interaction with each other and with chamber surfaces. Such a laminar flow enables sequentially flowing reactants that might react with each other. Reactions to be avoided include highly exothermic or explosive reactions and reactions that produce particulate contamination of the chamber. Additionally, the chamber facilitates rapidly purging the chamber between processes, such as purging the chamber of air and moisture after loading a substrate onto the susceptor.
A CVD reactor including a quartz process, or reaction, chamber has particular utility for the methods disclosed herein. Such a reactor can safely and cleanly accomplish multiple treatments sequentially in the same chamber. Because of the low pressures of the processes described herein, reaction chambers may need to be structurally reinforced. For example, quartz chambers may include a plurality of ribs to support the pressure exerted by atmospheric air outside of the chamber during a reduced pressure CVD process. In one embodiment, the reaction chamber is configured to withstand internal pressures of 5 Torr or less. Another embodiment provides a reaction chamber configured to withstand internal pressures of 1�10−2 Torr or less. A more heavily reinforced reaction chamber can be configured to withstand internal pressures down to about 1�10−6 Torr. Additionally, the reaction chamber should be substantially impermeable to leaks at such low pressures, such as leaking 10−9 atm-cc/sec or less. An exemplary reactor in accordance with embodiments of the present invention is commercially used in the EPSILON� 3200 product from ASM America, Inc. of Phoenix, Ariz.
In order to facilitate the loading 110, a robot may be used for transferring the wafer from outside of the chamber into the chamber and onto a substrate support structure. In some embodiments, loading 110 includes opening a gate valve to the reaction chamber, inserting the robot carrying the wafer into the reaction chamber, allowing the robot to drop the wafer onto the support structure, withdrawing the robot from the reaction chamber, and closing the gate valve. The support structure may include a substrate holder, upon which the wafer rests, and a support spider for supporting the substrate holder. The spider is mounted to a shaft, which extends downwardly through an opening in the lower chamber wall.
In one embodiment, the cold wall reactor has a substrate holder that is a "susceptor" or absorber of radiant heat energy. Typical susceptors are formed of SiC or SiC-coated graphite, and may include a pocket sized to fit a 200-mm or a 300-mm wafer (or in the future a 450-mm wafer) with less than about 1 mm clearance around the wafer edge. In other arrangements, the susceptor can be designed to support wafers of other sizes. In one embodiment, the susceptor may be a standard susceptor, with a mass greater than the wafer it is designed to support. Such standard susceptors can have a thermal mass greater than about three times the thermal mass of the wafer to be supported. The susceptor may be maintained at a temperature between 600� C. and 800� C. when the wafer is loaded, more particularly between 650� C. and 750� C.
In some embodiments, a reducing agent is supplied to the reaction chamber while the wafer is being loaded, before the door of the reaction chamber is closed. The reducing agent removes or slows the formation of interfacial oxygen on the surface of the wafer. In the process illustrated in
After loading 110, a temperature ramp 130 increases temperature of the substrate from a load temperature to an initial bake temperature. The load temperature is the temperature of the susceptor or substrate support while the substrate is being loaded, and the bake temperature is the temperature of the substrate while it is undergoing the low pressure bake. The bake temperature can vary over time, as the substrate temperature can fluctuate during the low pressure bake 150. The temperature ramp 130 may increase temperature of the substrate by between about 0� C. and 100� C., more particularly by between about 25� C. and 75� C. In the embodiments illustrated in
Following the temperature ramp 130, the low pressure bake 150 begins when a pump down reduces pressure in the reaction chamber. Reducing pressure in the reaction chamber enables a low pressure bake of the wafer, which advantageously cleans oxide growth from the wafer quickly and at a minimal cost to the thermal budget. Without limiting the disclosure by theory, it is believed that the low pressure bake reduces a boundary layer over the wafer, thereby facilitating the movement of hydrogen to the surface of the wafer.
Even when an APM clean, an HF last, and/or other cleaning processes are performed prior to loading the wafer into the reaction chamber, an oxide layer 222 typically grows again on the surface 221 in the time interval between completing the cleaning process and loading the wafer, as shown in
In some arrangements, such as when the wafer is loaded from an environment at atmospheric pressure, the reaction chamber pressure before the low pressure bake 150 begins is substantially at atmospheric pressure. In other arrangements, such as when the wafer is loaded into the reaction chamber from a pressurized loading station, the pressure within the reaction chamber before the pump down may be less than or greater than atmospheric pressure. After the pump down, the pressure in the reaction chamber is at a pressure suitable for carrying out the low pressure bake 150. In one embodiment, the bake pressure is between about 1�10−6 Torr and 10 Torr. In another embodiment, the bake pressure is between about 1�10−3 Torr and 4 Torr. In still another embodiment, the bake pressure is between about 0.01 Torr and 3 Torr.
The pump down may be implemented by a vacuum pump, particularly a high capacity vacuum pump capable of reducing pressure quickly, thus conserving the thermal budget. The vacuum pump may be capable of reducing pressure within the reaction chamber from atmospheric or greater to 1 Torr or less in less than 60 seconds, more particularly from atmospheric or greater to 1�10−3 Torr or less in 40 seconds or less. Examples of commercially available vacuum pumps with these capabilities are the 1800 Series Semiconductor Drypumps available from BOC Edwards of West Sussex, United Kingdom.
The open loop control mode 140 provides a constant and relatively low wafer temperature during the low pressure bake. In one embodiment, during the low pressure bake in the open loop mode 140, the substrate temperature increases by less than 40� C. from the initial bake temperature (750� C. in the illustrated embodiments). In another embodiment, the substrate temperature increases by less than 20� C. during the low pressure bake. Maintaining temperature uniformity across the surface of the substrate is also important in wafer treatment processes. Accordingly, in one embodiment, the low pressure bake in the open loop mode 140 maintains a temperature range (ΔT) across the surface of the substrate of less than 80� C. In another embodiment, the low pressure bake in the open loop mode 140 maintains a ΔT of less than 60� C. Another aspect of the open loop mode 140 is that it provides a short bake time, albeit longer than some bake times of the closed loop mode 142. In the open loop mode 140, the time interval from when the pressure begins to decrease until deposition begins may be between 90 seconds and 240 seconds, more particularly between 110 seconds and 190 seconds.
In the closed loop mode 142, the controller seeks to achieve a temperature setpoint by supplying power to the heating elements based on feedback from temperature sensors in the reaction chamber. Carrying out a low pressure bake in the closed loop mode 142 provides a rapid temperature increase. In some embodiments, the temperature increases to between about 750� C. and 900� C., more particularly to between about 800� C. and 850� C. In some processes, the controller's temperature setpoint during the low pressure bake 150 remains substantially the same (e.g., 750� C.) as it was after the temperature ramp 130, but the actual temperature of the substrate increases. In other processes, the temperature setpoint increases during the low pressure bake, but the actual increase in substrate temperature exceeds the increased temperature setpoint. Because this temperature spike occurs during the low pressure bake 150, this entire range is considered to be the bake temperature for purposes of the present disclosure.
Without limiting the disclosure by theory, it is believed that the rapid temperature increase in the closed loop mode 142 results from a reduced heat transfer between the substrate and the temperature sensors, which is, in turn, caused by the diminished availability of gases for convection. The gas availability is diminished because gases have been evacuated during the pump down 130. Accordingly, the controller attempts to compensate for the lower temperature being erroneously detected by the sensors by rapidly ramping power supply to the heaters, thereby overshooting the temperature setpoint. Thus, it is believed that the relationship between the temperature and the pressure in the closed loop mode 142 is that the low pressure in the reaction chamber causes the controller to temporarily increase the temperature. Because rapid temperature increase is more important than precise temperature control or tracking for the purposes of a brief oxide reduction process, the temporary inaccuracy in temperature control is an acceptable trade-off.
A low pressure bake in the closed loop mode 142 can be effective even when very brief, which preserves the thermal budget. In one embodiment, the time interval from beginning to decrease pressure until beginning to deposit a layer on the substrate is less than 60 seconds. In another embodiment, the time interval from beginning to decrease pressure until beginning to deposit a layer on the substrate is less than 40 seconds. The closed loop mode 142 also promotes temperature uniformity across the major surface of the substrate. In one embodiment, the range of temperatures (ΔT) across the surface of the substrate during the low pressure bake in closed loop mode 142 is less than 50� C. In another embodiment, the ΔT across the surface of the substrate during the low pressure bake in closed loop mode is less than 30� C.
In the process shown in
Following the low pressure bake 150,
A controller 210 is in communication with the heating elements 202 and/or heat lamps 204, such that the controller can command the heating elements 202 and/or heat lamps 204 to increase or decrease their output. The controller 210 may be programmed to carry out low pressure bakes as described above, such as an open loop control low pressure bake or a closed loop control low pressure bake. As such, the controller 210 may also be in communication with the vacuum pump 240 and a gas panel 260. The gas panel may house valves for a reducing vapor supply line 262 and one or more semiconductor precursor supply lines 264, each discharging into the reaction chamber 200. Accordingly, the controller 210 can selectively introduce a reducing agent, such as hydrogen gas, and a silicon source gas into the reaction chamber 200.
The processes described herein can enable a low temperature and rapid hydrogen bake while still providing very clean, oxide-free silicon surfaces for subsequent deposition. Furthermore, the combination of the described low pressure bake with relatively low temperature deposition, conducted in-situ, allows for other considerable improvements in wafer throughput, lowering overall costs of operation.
It will be appreciated by those skilled in the art that various modifications and changes can be made without departing from the scope of the invention. Such modifications and changes are intended to fall within the scope of the invention, as defined by the appended claims.
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|Nov 12, 2002
|Sep 26, 2006
|Asm America, Inc.
|In situ growth of oxide and silicon layers
|May 12, 2006
|Dec 9, 2008
|Asm America, Inc.
|Low temperature load and bake
|Apr 27, 1999
|Oct 25, 2001
|Mark R. Tesauro
|Vacuum loadlock ultra violet bake for plasma etch
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|Aug 8, 2002
|Applied Materials, Inc.
|Precleaning process for metal plug that minimizes damage to low-kappa dielectric
|Apr 4, 2002
|Aug 15, 2002
|Steag Cvd Systems Ltd.
|Apparatus for removing native oxide layers from silicon wafers
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|Sep 12, 2002
|Apl Co., Ltd.
|Apparatus and method for surface cleaning using plasma
|Dec 22, 2000
|Oct 17, 2002
|Hallock John Scott
|Process for removal of photoresist after post ion implantation
|May 29, 2002
|Feb 20, 2003
|Brabant Paul D.
|Low temperature load and bake
|Sep 9, 2002
|Mar 27, 2003
|Kwang-Myung Lee
|Method for processing a wafer and apparatus for performing the same
|Feb 10, 2004
|Aug 11, 2005
|Goodman Matthew G.
|Two-stage load for processing both sides of a wafer
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|Asm America, Inc.
|Low-temperature cleaning of native oxide
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|Feb 8, 1984
|The Perkin-Elmer Corporation
|Dry resist development using downstream plasma generation
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|Nov 17, 1988
|The Board Of Trustees Of The Leland Stanford Junior University
|Plasma reactor for CVD
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|U.S. Classification
|International Classification
|Cooperative Classification
|European Classification
|Dec 10, 2008
Owner name: ASM AMERICA, INC., ARIZONA
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Owner name: ASM AMERICA, INC., ARIZONA
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Effective date: 20041011
|Jun 18, 2014
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