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The Islamization of Germany in 2013
http://www.gatestoneinstitute.org/4130/islamization-germany In December, two new studies, one funded by the German government, found that the majority of Muslims believe that Islamic Sharia law sho
By: SideshowNob | Comments: 28 | Views: 5708 | Votes: 2 | Shared: 0
Location: Germany | Leaked: Feb-2-2014 in Other
Informant: Islamic Compounds In America Are Training For Jihad.
In Hancock, NY an Islamic community that sits on 80 acres of land has decided to form its own government. They call their community: The Town of Islamberg. They have their own mayor, deputy mayor an
By: KLM35AboveUK | Comments: 33 | Views: 2962 | Votes: 2 | Shared: 40
Location: United States | Leaked: Jul-24-2013 in Other News
Carr: Next scandal: Platinum EBT cards
Thursday, May 30, 2013 By: Howie Carr The next welfare scandal is going to be the huge balances on some of these EBT cards. Wait until the Department of Terrorist Assistance (DTA) finally
By: Detroit Iron | Comments: 28 | Views: 1776 | Votes: 1 | Shared: 0
Location: United States | Leaked: May-30-2013 in Politics
Atos Kills
ATOS is the private IT company employed by the Department of Works and Pensions who's task is to remove 25% of claimants from disability living allowance, and 91% of ESA claimants will be deemed 'fit
By: BritishPatriot | Comments: 16 | Views: 1119 | Votes: 4 | Shared: 0
Location: England, United Kingdom (UK/GB) | Leaked: Jan-10-2013 in Other
We Love You Newt Gingrich
Newt wishes to eliminate Welfare Fraud Specificaly in Louisiana.... No Chip No Check: Vote for a real Nazi in 2012... I dare you! http://www.hermes-press.com/societal_apocalypse.htm "The m
By: Michael A Human | Comments: 30 | Views: 1310 | Votes: 1 | Shared: 0
Location: Broken Arrow, Oklahoma, United States | Leaked: Jan-25-2012 in Other
Scared of Staff Sergeants?
I don't care who they think they are! They put their pants on 1 leg at a time like I do so what's the deal? Are they all asses? So far, 2 out of 2 are asses. The first run in: Me and a friend we
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Location: Warsaw, Virginia, United States | Leaked: Aug-26-2009 in Your Say
Brothers steal parts from 244 corpses
Two brothers who ran a funeral home and crematorium admitted Tuesday that they sold corpses to a company that trafficked stolen body parts, a macabre scheme that left families aghast and unclear about
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Location: Houston, Texas, United States | Leaked: Sep-3-2008 in News
Texas Authorities Investigate More Polygamy Charges
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Walkathon for for Bush, MCain Kennedy AMNESTY. Join us at the Robles Junction AZ for the month of April and help us by camping out and reporting invaders disrecpecting our boundry laws,liberty taking,
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Obamacare's Tax Consequences: Much Worse Than Initially Feared
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The Corbett Report - Against Fascism: The Separation of Business and State
The problem of the corporate/government revolving door is so blatant, so obvious, so out in the open that even its opponents readily admit to its existence. And yet it continues without significant op
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Leaked: Feb-22-2014 in Politics, Other
News Alert! 10,982,920: More Americans on Disability Than People in Greece
http://cnsnews.com/news/article/terence-p-jeffrey/10982920-more-americans-disability-people-greece 10,982,920: More Americans on Disability Than People in Greece December 3, 2013 - 12:4
By: XyBerFuNK | Comments: 88 | Views: 939 | Votes: 0 | Shared: 0
Location: Washington, District of Columbia, United States | Leaked: Dec-3-2013 in Politics
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When the fourth season of Falling Skies premieres in two months, the weary warriors of the 2nd Mass have little time to savor their recent victory over the alien invaders. The Espheni may have been weakened in last summer's finale, but they are still a threat, and will once again wreak havoc on our heroes.
This past weekend at WonderCon in Anaheim, California, TNT screened a brand new trailer for the season - and TV Guide Magazine has an exclusive online first look. The intense two-minutes-plus montage reveals plenty of action, a mysterious blond-haired woman (though her identity should be clear by the end), a shocking kiss and scattered fates for the 2nd Mass, with many members taking on new roles in the fight for survival. "Everyone goes a little crazy this year," Doug Jones, who plays Cochise of the friendly Volm aliens, told the WonderCon crowd.
Perhaps the most striking change is seen in Anne Glass, the unit's onetime medic, who will become a full-on, gun-toting badass solider. "I get to be this warrior and get enraged and kill, and that's more fun to play," Moon Bloodgood said of her character.
Season 4 of Falling Skies premieres Sunday, June 22 at 10/9c on TNT.
Subscribe to TV Guide Magazine now!
View original Exclusive: Falling Skies' Explosive New Trailer for Season 4 at TVGuide.com
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New York, NYUSA
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June 18, 2013
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meeting fun Rubyists.
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Summer Session II TutoringTutors are here to support math, chemistry, and physics courses this summer. The Writing Center is also available for any writing project or assignment.Drop-in tutoring schedule
Supplemental Instruction OnlineThis summer, CHEM 151 students are taking advantage of this new online service from The THINK TANK. Logging in to Adobe Connect, they can participate in interactive, facilitated exercises to reinforce what they learn each week in class.Learn more about SI
Summer Strategies: Thinking Inside and Outside of the BoxAn article by THINK TANK Learning Specialist Earl Wadsworth in the latest PawPrints newsletter.Read the article
Sometimes learning IS fun and gamesIn Supplemental Instruction students use Jenga and other activities to reinforce important concepts. These students are discovering the interrelationships between the arts and their socio-historical contexts in the development of Latin America.Learn more
WorkshopsBuilding general academic skills can give students an advantage in any course. In Fall '15 the Think Tank offered more than 40 free workshops on skills like note taking, test prep, library research, time management, and public speaking.Learn more
Message from the Director
Welcome to the THINK TANK! I'm glad you've joined us at the UA. We have an assortment of services at a variety of locations. We have a staff of nearly 200 students, graduate assistants and professionals, all dedicated to helping you succeed at the UA.
The THINK TANK opened its doors on August 24th, 2009 in an effort to streamline and centralize academic support services at the UA. We have partnerships with many academic departments and colleges, as well as other support units, on campus. Those partnerships are vital to the success and vibrancy of the 'TANK.' It is this collaborative process that enables you to learn with confidence.
Our mission is to empower UA students by providing a positive environment where they can master the skills needed to become successful lifelong learners.
In order to accomplish our mission we have rigorous training programs, two of which have International Training Program Certification through the College Reading and Learning Association (CRLA). Our content tutors are certified through our International Tutor Training Program Certification (ITTPC) and our Academic Skills Tutors are certified through our International Mentor Training Program Certification (IMTPC). In addition, our Supplemental Instruction Leaders undergo a rigorous training in cooperative learning techniques and strategies in group management. All of our employees are required to attend ongoing training to enhance their skills. I am very proud of our excellent programs and have confidence in our ability to provide you quality service.
Dorothy Briggs, Director
The THINK TANK tells its story of academic success in various ways. Here are some Highlights of THINK TANK data.
Did you know -- Using the THINK TANK Impacts Retention
For the last five enrollment years, first-time full-time freshmen who made use of THINK TANK services have demonstrated higher institutional retention rates (4-8% higher) than the official UA rate. When compared specifically to first-time full-time freshmen who do not utilize THINK TANK services, there is a greater increase in retention (7-11%).
"I love coming to Think Tank. I always get my work done, and leave happy with more acquired knowledge. THINK TANK ROCKS!!!!" –Anonymous
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Video editor for NYC based yoga/movement teacher
Ariana Yoga — Virtual
December 04 2015
We are a small yoga and fitness company that has been around for a little over 5 years. We have 38 podcasts (to date) about yoga and fitness and have started to invite guests who are experts in our in…
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Video editor for small business
SMARTer Bodies — Virtual
December 04 2015
We are small company of yoga teachers and personal trainers who operate out of New York City and also offer online sessions to clients. We are a grass roots company that is less than 5 years old. We h…
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Cosine Additive Manufacturing Systems — Houston, TX
November 18 2015
Cosine Additive is an Industrial Additive Manufacturing Company located in Houston, Texas. You can learn more about our company at www.cosineadditive.com Currently we are looking to hire an electro-me…
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Marketing Activations — Miami, FL
November 17 2015
Market Activations is creating successful brand strategies and promotions focusing on direct interaction with consumers. We pride ourselves on understanding the fundamentals of consumer behavior and h…
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NJ Performing Arts Center — Newark, NJ
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The Production Intern assists the Production Managers in managing the day to day stage and performance related operations, along with other office related projects as needed. The Production Intern ass…
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Model Citizen Modeling Agency — New York, NY
November 14 2015
Have you noticed that today's spokes-model with multi-million dollar endorsement deals are populated with celebrities, sports stars, music icons and everyday looking people. The definition of supermod…
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Soaring Sky — Fort Myers, FL
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Soaring Sky is seeking a production intern to assist with our cinematography projects. Soaring Sky provides state of the art commercial services using drone technology. We believe in soaring to new le…
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UAN — Mesquite, TX
November 13 2015
The UAN is a state of the art independent production house and television station with 3 studios and 3 stations, with more coming soon. With all the latest in videography equipment including a full HD…
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November 12 2015
Infinity Media is an independent video production company, specializing in all kinds of video/photo/audio production services and we're looking for young, energetic and enthusiastic people to join the…
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The Mill — New York, NY
November 12 2015
The Mill is looking to fill an internship opportunity in the Content department of their New York office. This intern should have an interest in production and shooting live action. He/She must be har…
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NEW YORK May 6 Information technology consulting company Presidio Inc has tapped Barclays Plc and Credit Suisse Group AG to explore an initial public offering or a sale that could value the company at close to $1.5 billion, several people familiar with the matter said.
Founded in 2003, the Greenbelt, Maryland-based company deploys and manages technology for customers ranging from retailers to hospitals, by partnering with companies such as Cisco Systems, EMC, Microsoft and VMware.
Presidio, which competes with Computer Sciences Corporation and Insight Enterprises Inc, among others, is expected to reach revenues of $2.3 billion and earnings before interest, tax, depreciation and amortization of around $180 million this year, according to one of the people familiar with the matter.
All the sources asked not to be named because the matter is not public. The company and Credit Suisse declined to comment, while representatives for Barclays were not immediately available.
Presidio is owned by private equity firm American Securities. (Reporting by Nicola Leske, Greg Roumeliotis and Soyoung Kim in New York; Editing by Prudence Crowther)
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So I am still working on the type but, I thought I post the mark to get some feedback. This is suppose to be a abstract record as a speak bubble. I hope that makes sense.
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|Publication number
|Publication type
|Application number
|Publication date
|Oct 5, 2010
|Filing date
|Apr 29, 2004
|Priority date
|Aug 29, 2003
|Fee status
|Also published as
|Publication number
|Hartmut Ruelke, Katja Huy, Karla Romero
|Original Assignee
|Globalfoundries Inc.
|Export Citation
|BiBTeX, EndNote, RefMan
|Patent Citations (15), Non-Patent Citations (4), Classifications (27), Legal Events (3)
|External Links: USPTO, USPTO Assignment, Espacenet
1. Field of the Invention
The present invention generally relates to the fabrication of integrated circuits, and, more particularly, to the formation of small circuit elements, such as a gate electrode of a field effect transistor, on a substrate by sophisticated trim etch techniques requiring advanced masking schemes, wherein the dimensions of the circuit elements are significantly less than the resolution of the involved lithography technique.
2. Description of the Related Art
The trend in recent years to steadily decrease the feature sizes of circuit elements in integrated circuits will continue in the near future, wherein reproducible and robust processes have to be established that allow the formation of a huge number of integrated circuits in a cost-efficient manner. Presently, sophisticated integrated circuits that are available as mass products include elements having dimensions which are well below the optical resolution of the lithography apparatus used for transferring a pattern from a mask into a material layer formed on a substrate. Minimum dimensions of circuit elements are presently 100 nm and less, wherein the wavelength of radiation used for optically transferring patterns from the mask to the substrate surface are in the deep ultraviolet range, for example at 248 nm, and, in recently developed techniques, at approximately 193 nm. In this wavelength range, the absorption of optical transmissive elements, such as lenses, is considerable and will drastically increase with a further reduction of the wavelength. Thus, merely reducing the wavelength of light sources for lithography apparatus is not a straightforward development and may not easily be implemented in mass production of circuit elements having feature sizes of 50 nm and less. Thus advanced trim processes are required so as to obtain the final desired dimension from the minimum dimension that may be achieved with resist features by lithography.
Hence, the total resolution of reliably transferring circuit patterns from a mask to a substrate is determined, on the one hand, by the intrinsic optical resolution of the photolithography apparatus, the characteristics of materials involved in the photolithography patterning process, such as the photoresist and any anti-reflective coatings (ARC) that are provided to minimize deleterious scattering and standing wave effects in the photoresist, and by deposition and etch procedures involved in forming the resist and ARC layers and etching these layers after exposure. In particular, the highly non-linear behavior of the photoresist, in combination with sophisticated ARC layers and lithography mask techniques, allows the formation of resist patterns having dimensions considerably below the intrinsic optical resolution of the photolithography apparatus. Additionally, a further post-lithography trim etch process is applied to further reduce the feature sizes of the resist pattern that will serve as an etch mask in subsequent anisotropic steps for transferring the resist pattern into the underlying material layer. Thus, this resist trim process enables the reduction of the critical dimension of the gate electrode to a size that is well beyond the wavelength of the photolithography.
It is, however, of great importance to accurately control the resist trim process so as to form a precisely defined mask for the subsequent anisotropic etch process for patterning the gate layer stack, since any variation of the gate length directly translates into a corresponding variation of operating speed of the final device. Since the continuous device scaling requires extending the concept of resist trimming even further to obtain the desired reduced critical dimension for a given exposure wavelength, the resist layer thickness has to be adapted to the increased resist material removal during the trim process, thereby significantly deteriorating the optical characteristics of the layer stack comprised of the resist and the bottom anti-reflective coating (ARC). Particularly the reflectivity of the bottom ARC significantly affects the line width after the lithography and causes variations thereof that may not be efficiently compensated for by the subsequent trim process within the tight process tolerances dictated by the design rules.
For this reason, a process technique has recently been developed that proposes the formation of an amorphous carbon layer in combination with a dielectric cap layer as a bottom ARC, thereby providing significantly enhanced control of the reflectivity. Additionally, the carbon/cap layer stack may readily be patterned corresponding to the trimmed resist feature with a reduced resist layer thickness, thereby forming a hard mask feature in the carbon/cap layer stack that is used to etch the polysilicon layer.
With reference to
The semiconductor device 100 comprises a substrate 101, for instance a silicon substrate or a silicon-on-insulator (SOI) substrate having formed thereon the material layer to be patterned, such as a gate layer stack 102 including a gate insulation layer 103 and a polysilicon layer 104. An amorphous carbon layer 105 is formed on the polysilicon layer 104, followed by a cap layer 106, which may conventionally be comprised of silicon dioxide, silicon oxynitride, nitrogen-free dielectric layers, and the like, wherein silicon oxynitride may be used due to its capability of adjusting the optical characteristics by varying the oxygen/nitrogen ratio. The amorphous carbon layer 105 and the cap layer 106 are designed in such a manner that they act in combination as an efficient anti-reflective coating for the specified exposure wavelength and for the type of resist used. As previously discussed, the reflectivity of an anti-reflective coating during the patterning of a polysilicon layer may significantly affect the accuracy of the resist trim process, thereby also influencing the finally-obtained gate length of the polysilicon feature. For a gate length of 50 nm or less, a deviation of less than one nanometer is mandatory to meet the device specifications. Hence, a high degree of uniformity of the reflectivity provided by the anti-reflective coating formed by the layers 106 and 105 across the entire substrate 101 as well as from substrate to substrate is required so as to reduce the variations in size of a resist mask feature 107 having an initial lateral size 108 and an initial height 109.
A typical process flow for forming the semiconductor device 100 as shown in
Next, the cap layer 106, for instance comprised of silicon oxynitride, may be deposited by PECVD, wherein the thickness and the material composition of the cap layer 106 is selected so as to provide the required phase shifting of the specified exposure wavelength, thereby reducing, in combination with the amorphous carbon layer 105, the back reflection of exposure radiation during the lithography exposure.
Thereafter, a layer of photoresist is deposited, the characteristics of which are adapted to the specified exposure wavelength used during the lithography process, wherein a thickness of the resist layer substantially corresponds to the initial height 109 of the resist mask feature 107, except for a certain degree of shrinkage during any pre- and post-exposure bake processes. To accomplish a high resolution of the lithography process owing to a given depth of focus, it is necessary to provide the resist layer with a thickness of approximately 100-300 nm, depending on the exposure wavelength used. The size reduction of the resist mask feature 107A, depicted in dashed lines, after exposure and development of the resist layer from the initial lateral size 108 to a desired final lateral size 108A, however, is accompanied by a corresponding reduction of the initial height 109 to a final height 109A. The final height 109A may not be sufficient to serve as an etch mask for patterning the polysilicon layer 104 directly, which is a typical process flow for semiconductor devices requiring a gate length on the order of approximately 80-100 nm. For this reason, the amorphous carbon layer 105 is provided and may readily be patterned by reactive ion etching, wherein the final height 109A of the resist mask feature 107, after being subjected to a resist trim process so as to become the reduced resist mask feature 107A, is sufficient to allow reliable patterning of the amorphous carbon layer 105 and the cap layer 106. The cap layer 106 is necessary for substantially avoiding direct contact of the resist layer with the underlying amorphous carbon layer 105, which may otherwise result in resist poisoning and an increased defect rate of the finally obtained polysilicon feature. The reason for this may be chemical reaction between the carbon and the photoresist at the interface thereof, thereby possibly altering the optical characteristics of the photoresist and causing insufficiently developed resist portions that may then be patterned into the polysilicon line 104.
In view of the problems identified above, there is a need for an improved process for forming a cap layer for patterning polysilicon features by means of a carbon hard mask, wherein a defect rate is reduced and process reliability is enhanced.
Generally, the present invention is directed to a method for forming a silicon dioxide cap layer on an amorphous carbon hard mask layer for patterning a polysilicon feature. Without restricting the present invention to the following explanation, it is believed that the provision of a silicon dioxide layer formed by plasma enhanced chemical vapor deposition at temperatures of 370� C. and less may significantly reduce the defectiveness of the finally obtained polysilicon features. Based on this finding, the plasma enhanced CVD process for forming a silicon dioxide layer is designed so as to enable reliable control of a thickness of the silicon dioxide layer within a range of 5-50 nm, as is required for providing the desired optical characteristics in combination with the underlying amorphous carbon layer. Since, typically, a TEOS-based plasma enhanced CVD process exhibits an enhanced deposition rate at lower temperatures, which, according to the present invention, are required to reduce the defect rate, in some embodiments, the deposition process is controlled to provide a reduced deposition rate so as to enable a reliable control of the layer thickness, thereby assuring the required optical characteristics of the silicon dioxide/amorphous carbon layer stack.
According to one illustrative embodiment of the present invention, a method of forming a silicon dioxide cap layer comprises forming an amorphous carbon layer above a substrate and depositing silicon dioxide from TEOS in a plasma atmosphere on the amorphous carbon layer at a temperature of approximately 370� C. or less to form the cap layer with a thickness in the range of approximately 5-50 nm.
According to still a further illustrative embodiment of the present invention, a method of forming an anti-reflective layer comprises forming a material layer to be patterned above a substrate and forming an amorphous carbon layer of a first thickness above the material layer. Further, a silicon dioxide layer of a second thickness is formed at a temperature of less than approximately 370� C. on the amorphous carbon layer, wherein the first and the second thicknesses are selected so as to generate a reflectivity at a specified exposure wavelength that is approximately 2% or less.
The invention may be understood by reference to the following description taken in conjunction with the accompanying drawings, in which like reference numerals identify like elements, and in which:
While the invention is susceptible to various modifications and alternative forms, specific embodiments thereof have been shown by way of example in the drawings and are herein described in detail. It should be understood, however, that the description herein of specific embodiments is not intended to limit the invention to the particular forms disclosed, but on the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims.
Illustrative embodiments of the invention are described below. In the interest of clarity, not all features of an actual implementation are described in this specification. It will of course be appreciated that in the development of any such actual embodiment, numerous implementation-specific decisions must be made to achieve the developers' specific goals, such as compliance with system-related and business-related constraints, which will vary from one implementation to another. Moreover, it will be appreciated that such a development effort might be complex and time-consuming, but would nevertheless be a routine undertaking for those of ordinary skill in the art having the benefit of this disclosure.
The present invention will now be described with reference to the attached figures. Although the various regions and structures of a semiconductor device are depicted in the drawings as having very precise, sharp configurations and profiles, those skilled in the art recognize that, in reality, these regions and structures are not as precise as indicated in the drawings. Additionally, the relative sizes of the various features and doped regions depicted in the drawings may be exaggerated or reduced as compared to the size of those features or regions on fabricated devices. Nevertheless, the attached drawings are included to describe and explain illustrative examples of the present invention. The words and phrases used herein should be understood and interpreted to have a meaning consistent with the understanding of those words and phrases by those skilled in the relevant art. No special definition of a term or phrase, i.e., a definition that is different from the ordinary and customary meaning as understood by those skilled in the art, is intended to be implied by consistent usage of the term or phrase herein. To the extent that a term or phrase is intended to have a special meaning, i.e., a meaning other than that understood by skilled artisans, such a special definition will be expressly set forth in the specification in a definitional manner that directly and unequivocally provides the special definition for the term or phrase.
With reference to
A typical process flow for forming the semiconductor structure 200 as shown in
In particular embodiments of the present invention, the establishment of the gaseous ambient 220 may be preceded by one or more stabilization steps for bringing the substrate 201 to the desired temperature without any significant gas flow or pumping activity for reducing the ambient pressure prevailing around the substrate 201. Moreover, the distance of the substrate 201 with respect to a showerhead delivering carrier gases and reactive gases during the deposition may be adjusted to the desired value as is used during the actual deposition step. Furthermore, a carrier gas, such as helium, may then be introduced and, subsequently, oxygen may also be supplied to the gaseous ambient while the pressure is adjusted to a range of approximately less than 10 Torr, but still significantly higher than the pressure during the actual deposition step.
In a further stabilization step, the pressure may be reduced to the actual deposition pressure while an increased amount of liquid TEOS, for example in the range of approximately 700 mg/min, is supplied to the gaseous ambient 220 so as to "flush" the surface of the substrate 201 and the gaseous ambient 220 with gaseous TEOS. Next, an adaptation step may be performed so as to adjust the TEOS supply rate to the actual supply rate during the deposition, as is specified above, so as to "prepare" the ambient 220 for an appropriately low silicon dioxide deposition rate.
In one particular embodiment, the deposition time is selected so as to obtain the thickness 206B in the range of approximately 5-50 nm, and in other particular embodiments of approximately 8-40 nm within approximately 3-10 seconds. As previously discussed, the optical characteristics of the silicon dioxide layer 206 may be adjusted by controlling the thickness 206B such that, in combination with the carbon layer 205, the desired low reflectivity at the specified exposure wavelength is obtained. Since the index of refraction of PECVD-deposited silicon dioxide is well known, or the corresponding data may readily be determined for the above-specified deposition parameters by measuring a corresponding test substrate having formed thereon a silicon dioxide layer produced by the above-specified deposition parameters, an appropriate desired value for the thickness 206B may be determined in advance and the deposition may then be controlled on the basis of desired thickness.
The process of depositing silicon dioxide to form the layer 206 may be discontinued by deactivating the plasma excitation means and/or by discontinuing the TEOS supply. Thereafter, a pump step may be performed with the TEOS supply interrupted and with a reduced flow rate of the carrier gas, such as helium, and a reduced oxygen flow rate. In one embodiment, the oxygen flow rate may be reduced by more than 50% compared to the deposition flow rate, while the helium flow rate is less than the oxygen flow rate. Finally, the oxygen supply may be discontinued while maintaining a helium supply and, thereafter, the supply of all gases may be discontinued while still removing reaction by-products by continued pumping.
In one particular embodiment, a deposition recipe may be used for establishing the gaseous ambient 220, stabilizing the same, providing the plasma atmosphere 220A and removing gas by-products by pumping, wherein the recipe may include the following steps:
At the same time, the silicon dioxide layer formed in accordance with the low temperature process described above provides a sufficiently stable interface with the carbon layer 205 and also reliably suppresses any chemical reaction between the photoresist in the layer 207 and the carbon layer 205, thereby significantly reducing the defect rate in the finally obtained patterned polysilicon features. After exposure and development of the resist layer 207, a resist trim process may be performed with a well-established etch chemistry to obtain the finally desired lateral size of a corresponding resist feature, which is then used as an etch mask for patterning the layers 206 and 205. Corresponding etch recipes are well established and allow patterning of the layers 206 and 205 by a breakthrough etch step and a subsequent anisotropic etch process, respectively, with an initial height of the resist layer 207 of approximately 300 nm or even less.
As a result, the present invention provides an improved technique for forming a silicon dioxide layer by means of a low temperature plasma enhanced CVD process that enables high process control due to the moderately low deposition rate, so that the optical characteristics of the silicon dioxide layer may be precisely adapted to the underlying carbon layer, which then act, in combination, as an efficient anti-reflective coating having a reflectivity of 2% or less. Moreover, the low temperature PECVD deposition produces a reduced defect rate compared to conventional approaches, thereby enhancing process robustness and providing the potential for further device scaling on the basis of a 248 nm or 193 nm lithography process.
The particular embodiments disclosed above are illustrative only, as the invention may be modified and practiced in different but equivalent manners apparent to those skilled in the art having the benefit of the teachings herein. For example, the process steps set forth above may be performed in a different order. Furthermore, no limitations are intended to the details of construction or design herein shown, other than as described in the claims below. It is therefore evident that the particular embodiments disclosed above may be altered or modified and all such variations are considered within the scope and spirit of the invention. Accordingly, the protection sought herein is as set forth in the claims below.
|Cited Patent
|Filing date
|Publication date
|May 25, 1994
|Oct 31, 1995
|Georgia Tech Research Corporation
|Methods for passivating silicon devices at low temperature to achieve low interface state density and low recombination velocity while preserving carrier lifetime
|Jan 11, 1996
|Sep 23, 1997
|Lg Semicon Co., Ltd.
|Method of forming a metal pattern in manufacturing a semiconductor device
|Dec 29, 1995
|Oct 28, 1997
|Industrial Technology Research Institute
|Teos plasma protection technology
|May 24, 1996
|Jun 2, 1998
|Kabushiki Kaisha Toshiba
|Fabrication process using a thin resist
|Sep 5, 1997
|Dec 7, 1999
|Kabushiki Kaisha Toshiba
|Fabrication process using a multi-layer antireflective layer
|Nov 10, 1997
|Feb 22, 2000
|Lsi Logic Corporation
|Plasma-enhanced oxide process optimization and material and apparatus therefor
|Nov 25, 1997
|May 2, 2000
|Intel Corporation
|Air gap based low dielectric constant interconnect structure and method of making same
|Sep 25, 1997
|May 23, 2000
|International Business Machines Corporation
|Method for providing fluorine barrier layer between conductor and insulator for degradation prevention
|Nov 27, 2000
|Jun 18, 2002
|Chartered Semiconductor Manufacturing Inc.
|Method for fabricating an air gap shallow trench isolation (STI) structure
|Dec 2, 1999
|Nov 29, 2001
|Yoshihisa Matsubara
|Semiconductor device and manufacturing method thereof
|Nov 8, 2001
|Jul 4, 2002
|Park Young-Rae
|Method for fabricating a contact pad of semiconductor device
|Jul 8, 2002
|Dec 19, 2002
|Seiko Epson Corporation
|Fabrication process for thin film transistors in a display or electronic device
|Dec 18, 1987
|Jun 22, 1988
|Applied Materials, Inc.
|TEOS based plasma enhanced chemical vapor deposition process for deposition of silicon dioxide films.
|Jun 3, 1992
|Dec 9, 1992
|Eastman Kodak Company
|Deposited carbon mask for dry etch processing of Si
|Title not available
|Deshmukh and Aydil, "Investigation of low temperature SiO2 plasma enhanced chemical vapor deposition," J. Vac. Sci. Technol., 14-738-43, Mar./Apr. 1996.
|Liu et al., "Generating Sub-30nm Poly-Silicon Gates Using PECVD Amorphous Carbon as Hardmask and Anti-Reflecting Coating," Proceedings of SPIE, 5040:841-48, 2003.
|Martinet et al., "Deposition of SiO2 and TiO2 thin films by plasma enhanced chemical vapor deposition for antireflection coating," Journal of Non-Crystalline Solids, 216:77-82, 1997.
|Martinet et al., "Deposition of SiO2 and TiO2 thin films by plasma enhanced chemical vapor deposition for antireflection coating," Journal of Non-Crystalline Solids, 216:77-82, 1997.
|U.S. Classification
|427/569, 427/255.23, 427/249.1
|International Classification
|Cooperative Classification
|European Classification
|Apr 29, 2004
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Two injured in hatchet attack during home invasion
Two men were attacked with a hatchet during a home invasion robbery in San Francisco's Noe Valley neighborhood on Thursday.
Mea: Saul Alinsky died about 43 years ago, but his writings influenced those in political control of our nation today....... Recall that Hillary did her college thesis on his writings and Obama writes about him in his books. Died: June 12, 1972, Carmel-by-the-Sea, Ca. Education: University of Chicago Spouse: Irene Alinsky Books: Rules for Radicals, Reveille for Radicals How to create a social state by Saul Alinsky: (Pay attention to his mandate, remember this was almost 50 years ago) "There are eight levels of control that must be obtained before you are able to create a social state. The first is the most important". 1) Health care -- Control health care and you control the people . Hello! 2) Poverty -- Increase the Poverty level as high as possible, poor people are easier to control and will not fight back if you are providing everything for them to live. Really? 3) Debt -- Increase the debt to an unsustainable level. That way you are able to increase taxes, and this will produce more poverty. Is this not happening as you read this? 4) Gun Control -- Remove the ability to defend themselves from the Government. That way you are able to create a police state. This happening, is it not? 5) Welfare -- Take control of every aspect of their lives (Food, Housing, and Income). Is this not fact? 6) Education -- Take control of what people read and listen to, take control of what children learn in school. Again, Hello? 7) Religion -- Remove the belief in their God from the Government and schools. Thank You ACLU! 8) Class Warfare -- Divide the people into the wealthy and the poor. This will cause more discontent and it will be easier to take Tax from the wealthy with the support of the poor. Is this not happening? Does any of this sound like what is happening to the United States? Unless you are an idiot, that is exactly what is happening! Alinsky merely simplified Vladimir Lenin's original scheme for world conquest by communism, under Russian rule. Stalin described his converts as "Useful Idiots." The Useful Idiots have destroyed every nation in which they have seized power and control. It is presently happening at an alarming rate in the U.S. If people can read this and still say everything is just fine -- they are---- Useful Idiots & Low Information Voters!!!.


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Photoshop CS4 For Dummiesby Peter Bauer
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This latest version of Photoshop has a few new tricks up its sleeve and Adobe Photoshop CS4 For Dummies will teach you how to use them. From the basics like getting your images into and out of Photoshop to enhancing, cropping, and color correction, it's all here!
You'll get all of the basics of digital images and master the importing and exporting of images. You'll find out how to create easy enhancements like adding shadows and highlights and making color natural, in addition to learning how to use the Adobe camera raw plug-in. Before you know it, you'll be making beautiful "art" with Photoshop by combining images, precision edges, dressing up images, painting in Photoshop, and using filters. You can even streamline your work in Photoshop using advanced techniques. Find out how to:
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Complete with lists of ten reasons to love your Wacom tablet, ten reasons to own a digital camera, and ten favorite tips and tricks, Adobe CS4For Dummies is your one-stop guide to setting up, working with, and making the most of Photoshop CS4 for all your digital photography needs.
Product Details
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Peter Bauer is an award-winning photographer and contributing writer for Photoshop User and Layers magazines. He is best known as the Help Desk Director for the National Association of Photoshop Professionals (NAPP), but he has also authored or coauthored a dozen books on Adobe Photoshop, Illustrator, computer graphics, and photography.
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This book was bought before I ventured into my class in Web Design. Little did I know how helpful it was going to be to me. It actually saves me much time when I am trying to remember how to do layers, copying from one image into another, and other tricky pieces of the Photoshop game. Somehow I think Adobe could take lessons from Peter Bauer and come up with a radically different way of writing instructions for the users to follow. The funny part is: my instructor talks so fast that the book is a necessary accompaniment to the text book produced by the Digital Classroom folk! yet she looked at this book and said they should adopt it for the class at my school! I knew then I had done right by purchasing it. I also highly recommend the one for Dreamweaver CS4 as well as Illustrator CS4 and any other application in the CS4 suite. You cannot go wrong with simple plain English as well as the author insights of the Dummies Series books.
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Blog Entry# 403013
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Opening Nebraskas skies: Congress restores funds to North Platte airport
Davis at the Legislature: Paying tribute to the cowboy culture
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South Dakota Supreme Court: Cattle died from drowning in blizzard
Town Hall set to discuss mega-chicken plant near Fremont
More Ag News
After one of the worst drought years in history, Sen. Mark Christensen of Imperial wants southern Nebraska farmers to be reimbursed.
The bill (LB 522), sponsored by Christensen, advanced on a 27-0 vote.
Senators plan to continue to amend the bill before it moves to final passage.
Christensen proposed the bill because residents of the Republican River Basin irrigation district in southern Nebraska lost much of their surface water in the river during last years extreme drought.
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Articles tagged lil wayne
14 Jun 2016 // 12:00 PM
"No Problem" is a bold hip-hop song that will make you want to go to church and the club at the same time.READ more
8 Aug 2013 // 9:00 AM
Here are your pop culture options for end-of-summer fun.READ more
4 Aug 2011 // 9:20 AM
Female rapper Kreayshawn is on her way to becoming 2011's international sensation after her song "Gucci Gucci" ridiculed all "basic bitches" that value designer clothes. So who is this Oakland-based revelation?READ more
1 Aug 2011 // 9:00 AM
West consciously kept the guest spots and big-name collaborations at a minimum when constructing his fourth album. That mantra allowed this particular joint effort to stand firmly on its own among some of the best work he has ever been a part of.READ more
17 Jul 2011 // 10:00 PM
The way some of us disparage Southern rap, you'd think rappers like Gucci Mane and Waka Flocka Flame had recorded a record dissing Kool G. Rap and Big Daddy Kane.READ more
21 Jun 2010 // 10:00 PM
Eminem finds his fire and his flow again on Recovery, nearly reinventing himself in the process.READ more
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Adam Bhala Lough's documentary on Weezy F. Baby made waves at Sundance and is set for a DVD release on November 17th. Lil WayneREAD more
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Rap royalty joined the extremely pregnant M.I.A. for a turn through "Swagga Like Us" last night.READ more
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Oft-maligned hitmaker's third album doesn't do much to convince the haters that he's not the hack that they think.READ more
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Health scares continue to plague Rick Ross. His latest scheduled performance in Guyana was canceled due to seizures, according to a statement released by promoters.
The show was to take place on Monday (April 9) as part of the Easter Fest Rozay program at the Guyana National Stadium.
Promoters at Hits and Jams Entertainment released a statement which said they were informed that Ross "suffered a medical emergency" and has been ordered by his doctors to not travel, reports Allhiphop.com.
They promoters went on to say they will work on an alternative date for the festival.
This is not the first health scare concerning Ross. In October 2011, he suffered a string of seizures, including one while he was on his way to a performance in Tennessee.
He chalked those episodes up to over exertion.
"I felt a little wore out but I felt like I could keep going," he explained to BET's 106 & Park. "And I boarded a jet and I had another seizure and when I snapped out of that one, I woke up in front of doctor."
Ross has not yet spoken about the recent health episode.
–E. Parker, CBS Local
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text: mBiosphere tag:typepad.com,2003:weblog-86834737791080204 2016-07-20T11:54:24-07:00 The latest news from mBio, a new online, open-access journal from the American Society for Microbiology. TypePad Disarming a pathogen's ability to cause disease tag:typepad.com,2003:post-6a0133ec8b9631970b01b8d2077faa970c 2016-07-20T11:54:24-07:00 2016-07-20T12:13:17-07:00 The anaerobic, Gram-positive Clostridium difficile is a big problem. It causes rampant diarrhea and tissue necrosis, with more than 150,000 annual cases in the United States alone. Many of the disease manifestations of C. difficile are mediated by two exotoxins that C. difficile produces: TcdA and TcdB. Researchers have long been working at toxin inhibition as an approach to disarm C. difficile and improve treatment, and new research in Clinical and Vaccine Immunology shows promise in blocking toxin activity in vivo. C. difficile toxins cause cell rounding, as seen in the right panel Both TcdA and TcdB toxins are glucosyltransferases... mBiosphere One microbial pathogen 'disguised' as another leads to misdiagnoses tag:typepad.com,2003:post-6a0133ec8b9631970b01b8d205bd87970c 2016-07-15T15:42:11-07:00 2016-07-15T15:42:11-07:00 If it looks like a duck and quacks like a duck, it's likely a duck – so goes the saying that illustrates the simplest explanation is usually the right one. But what about duck decoys used in conjunction with bird calls? Misidentification can be a deadly error – and the same goes for microbes. Misdiagnosed infectious disease etiologies can be a very dangerous mistake for sick patients. Most clinical microbiology labs are able to use sophisticated biochemical and genetic tests to differentiate microbial species and strains, but newly emerging pathogens can be misidentified if they closely mimic another. That appears... mBiosphere Antibiotic stewardship - a community effort tag:typepad.com,2003:post-6a0133ec8b9631970b01b7c87b7c68970b 2016-07-14T14:05:51-07:00 2016-07-14T14:06:20-07:00 As we highlighted in our previous blog, antibiotic stewardship – the careful use of appropriate antibiotic administration – can have positive effects. A small change from a difference in clinical lab reporting led to less drug use, which led to fewer drug-resistant infections. When we think of antibiotic stewardship, the onus is often thought to be on those that work in the clinic – the scientists who determine isolate susceptibility, or the clinicians who decide which antibiotic should be prescribed to a patient. These individuals certainly have an essential role to play in proper antimicrobial drug use in a health-care... mBiosphere And now for something completely different: optimistic news from the world of antibiotic stewardship tag:typepad.com,2003:post-6a0133ec8b9631970b01bb091e29f7970d 2016-07-12T13:50:27-07:00 2016-07-12T13:50:27-07:00 There's no way to avoid the news of a growing concern for drug-resistant infections. In both life-threatening and relatively superficial infections, the ability to successfully treat microbial infections with antimicrobials is decreasing. Our only recourse is to use the drugs we have carefully while researchers hunt for new drugs that must pass the stringent FDA guidelines before they can be used clinically. But here comes a bit of good news among all the doom-and-gloom: meticulous drug management programs can have a positive effect on drug-resistant infections. Pseudomonas aeruginosa Support for the decrease in drug-resistant infections comes from a study performed... mBiosphere


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Brazil Rate-Futures Yields Fall to Record on Shrinking Industry
Yields on Brazilian interest-rate futures contracts dropped to a record low on speculation the central bank will deepen cuts in borrowing costs after a report showed industrial production fell more than economists forecast.
Yields on the futures contract due in January 2014 fell two basis points, or 0.02 percentage point, to 7.82 percent in Sao Paulo after touching a record low 7.79 percent. The real snapped a two-day gain, depreciating 1.5 percent to 2.0155 per U.S. dollar, the biggest loss in almost two weeks.
Output declined 0.9 percent in May from a month earlier, the national statistics agency said today in Rio de Janeiro. Economists had expected a decline of 0.6 percent, according to the median forecast in a Bloomberg survey of 40 analysts.
"The industrial sector is what suffers most from the global deceleration, which the market should be interpreting as a possibility for more stimulus," Flavio Serrano, senior economist at Banco Espirito Santo de Investimento, said in a phone interview from Sao Paulo.
The real rallied yesterday to a level stronger than 2 per dollar for the first time in a month after the central bank supported it with currency swap auctions three times last week. The bank has sold the swaps on 11 days since May 18 for $16.8 billion, according to data compiled by Bloomberg.
The swaps are a reversal of the bank's dollar purchases, which increased to $7.2 billion in April, the most in 13 months, to weaken the currency and support the country's exporters. The bank abandoned those purchases in May.
'Surprised Again'
"We could be surprised again by the central bank," Italo Abucater, head of currency trading at Icap do Brasil CTVM, said in a phone interview from Sao Paulo. "If the real rises above 1.95 per dollar, we could see the bank buying dollars again."
Brazil's gross domestic product expanded 2.7 percent in 2011, down from growth of 7.5 percent in 2010. Analysts surveyed by the central bank reduced their 2012 growth forecast for an eighth week to 2.05 percent, a report showed yesterday.
The central bank has cut its target lending rate by 4 percentage points since August, the most among Group of 20 nations, to a record low of 8.5 percent. Traders are betting policy makers will reduce the benchmark to 7.75 percent by the end of next month, interest-rate futures yields indicate.


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|Boxing Champions | Boxing Schedule | Boxing Video | Boxing History | Pound For Pound | Lounge | The Wire | Arcade
Interim Champion
Join Date: Jul 2010
Posts: 932
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How dare you question the integrity of Emanuel. He is a very humble man who is only looking out for his country.
He has passed every test the commission has asked. who is dloyd to ask the number 1 p4p to take OST.
Join Date: Feb 2010
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AKA Bologna Panini
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There isnt a satisfactory explanation. But there are reasons why, even if they are weak as fuk.
Floyd and Pac are 2 sides of the same coin in some ways. We dont know wtf is going on in their minds.
This whole issue is a big black eye for boxing IMHO.
larry's world
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Cause blood makes him weak and he fears needles.even tho he gets blood drawn before EVERY fight for std testing
Bottoming out
Join Date: Feb 2011
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I haven't seen a good enough excuse as to why pac would avoid the test yet. There must be more to it than just cut off dates.
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He doesnt look scared at all here
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Undisputed Champion
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secondly, ppl should remember the OST is a demand, not included in the commission rules. some *****s got it ingrained in their retarded minds the opposite. the mayweather clan went on a smear campaign even before negotiations started. pac and mayweather are both superstars and pride comes w/ the territory. if it had played out differently, in a civil manner then who knows, pac might have agreed. pac knows like everyone else that mayweather needs the fight more if he wanted to be higher on the ATG list.
Most Definitely
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Where have you been? We should all blame USADA for there actions. That was just unacceptable! I know everyone wants to blame Team Pac for holding the fight up for the past 2 years and they have every right too but come on now, be rational about it, USADA has no right to be biased towards the Pac.
Thank god Pac finally "agreed", has "no issues" and corrected the biased problems that the USADA had towards him. I hope Pac takes them to court too. USADA biased cowards. How dare they hold the fight up for 2 years!
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Is it possible to get all of the points earned by each member to total and display as part of their user name? Or at least post the total points earned somewhere on their profile? I want it to be displayed where other user can see it as a status in the community. The more points and badges, the more popular they are.
Can this be done with the achievements?


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Reviews written by registered user
|1 reviews in total
This film is absolutely fantastic! Madonna, as usual, is so great... It's interesting to learn all the process of the show and all the work that is done by people! Every Madonna's fans will love it .. and the others.. you should like it because everybody loves the Queen! ;-)I think it's a good film to know more about Madonna and her "new life". There are a lot of talented people in it that deserve to be discovered like Stuart Price, her musical director, and all of her excellent dancers!! The documentary is done in a very spiritual mood, but the're also a lot of humor. Madonna, Her husband, Guy Ritchie and her children are lovely and it's cool to enter in their world for about 2 hours... Plus, it's a good way to understand things that are going on in the world. It's not SO political, but there's a bit of that. We can see Michael Moore, Gwyneth Paltrow and many other artist that support Madonna in the film.Finally, you must see it. It worth a sincere 10/10. :) P.S Sorry for the bad quality of my writing, but i'm french!!!


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Definición de upper school en inglés:
upper school
1(In the UK) a secondary school for children aged from about fourteen upwards, generally following on from a middle school.
Oraciones de ejemplo
- Today, she regularly visits other Montessori middle and upper schools across North America and around the world, observing and consulting.
- Bedfordshire County Council operates a three-tier education system, with lower, middle and upper schools.
- If we raise money from selling off shops in Bingley to use on upper schools or special schools, then that seems a sensible use of our capital.
1.1The section of a school which comprises or caters for the older pupils.
Oraciones de ejemplo
- Around 400 Year 9 to Year 13 pupils from the upper school building spilled into the town centre to oppose war as police were called to try to dispel the crowds.
- Half of the pupils at the upper school will spend the day at Lockeridge with the infants' classes.
- The middle school is on the same campus as the upper school but we used separate buildings.
For editors and proofreaders
Saltos de línea: upper school
Definición de upper school en:
¿Qué te llama la atención de esta palabra o frase?
Los comentarios que no respeten nuestras Normas comunitarias podrían ser moderados o eliminados.
Muy popular en Reino Unido
Muy popular en Australia
= de moda


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Playing sports; baseball, basketball, football. Fishing, playing racing video games, collecting model racecars.
Most Memorable Moments:
-Winning his first A Main Event at Cycleland Speedway June 10, 2000.
-Winning the Knoxville Outlaw Sprint Kart Nationals Open Division with a damaged kart-Video Clips click on: Wreck on lap 3, Passing Pistol Pete Johnston, The Win
-Winning his first Sprint Car main event-Civil War Series August 4, 2007
Chili Bowl | All rights reserved


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The sys admin's daily grind – Biabam and Tre-agrep
Take Two
Most of the tools that show up in this column are small, smart, fast, and easily explained. This month is no exception; we feature a dynamic duo of tools.
If something goes wrong on one of my systems, I have the system send me an email – fortunately, I have never experienced a situation in which Postfix went haywire. I normally just use the mail command for this.
However, it is difficult if you want to attach a file, such as a dump or a graphical overview by Munin. Some unsavory workarounds convert binary data into ASCII and create the necessary header so you can feed the whole enchilada to the mail command without any serious accidents, but life is so much easier with the right tool for the job.
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Mirantis to Refactor OpenStack Fuel for Kubernetes
The company is collaborating with Google and Intel to use Kubernetes as an engine for Fuel
Canonical Joins Document Foundation Advisory Board
The upcoming release of LibreOffice will be available as a snap package
SUSE Joins the Microsoft Test Drive Program
Customers can take a free test drive of SLES for HPC on the Azure Cloud
SiFive Launches a Line of Open Source Chips
San Francisco-based chip company announces their first fully open source chip platform.
Fedora 24 Released
The whole distro gets rebuilt on glibc 2.3
Canonical Announces Cross-Distro Support for Snaps
Ubuntu Vendor tries to solve app packaging and distribution problem across distributions.
ownCloud Forked
Founder of ownCloud launches the Nextcloud project.
HP Enterprise Unveils a Futuristic Computer
Will The Machine change the way future programmers think about memory?
CoreOS Announces Distributed Storage System
The new Torus distributed storage system is available under an open source license on GitHub
Google Beats Oracle in the Android Lawsuit
Juries decides Google's use of Java APIs Was Fair Use


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My ideal match is an intelligent woman who always delights with her friendly personality and quick wit. We love to banter back and forth on a myriad of subjects and find that even when we don't agree we still have fun together.
I'm searching for that one woman who will join me in creating a satisfying friendship that will evolve into a strong, loving committed partnership, through which we can explore our personal growth together. I'm very creative, caring and loving, and sometimes a bit unconventional (in a good way). My match and I encourage each other to explore new places, try new things and to embrace the opportunities that each day presents. I'll celebrate our differences, because I'm not looking for a carbon copy of me.
For shows, I was addicted to the Daily Show and Colbert, Mad Men and Modern Family. Now I'm catching up on shows through Amazon Prime.
Latest: Catastrophe. If you haven't seen it, I recommend --it's delicious!
There's room in my life for a variety of music, but I have to admit I still don't get rap.
And food? Almost anything.


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BMW launched its mind-boggling X6 in 2008, but aside from the addition of a high-powered M variant and a battery-laden hybrid (the latter of which has reportedly been killed), not much has been done to the high-riding, not-so-practical crossover. Even now, with the X6's refresh coming into clearer view, it doesn't appear that BMW will be making drastic changes to its most expensive CUV.
- Volvo shoots for self-drivers by 2021
- Jeep spends $1 billion on factories
- Find Parts & Accessories for your vehicle!
- Obama rolls out new EV plan
- Infiniti dealers ranked best, Tesla worst
- Compare Volvo XC90 and Lincoln MKX


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- You'll save an extra 5% on Books purchased from Amazon.ca, now through July 29th. No code necessary, discount applied at checkout. Here's how (restrictions apply)
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How to Live Well Without Owning a Car: Save Money, Breathe Easier, and Get More Mileage Out of Life Paperback – Sep 1 2006
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Chris Balish is an award-winning feature writer, reporter, and broadcast journalist. He began his writing career working for Writer's Digest magazine and Writer's Digest Books. Since 1995 he has been a full-time reporter and television news anchor. Chris is the recipient of nearly thirty awards for excellence in journalism and writing, including six regional Emmy Awards. He is a graduate of Dartmouth College in Hanover, New Hampshire. But most important, Chris is passionate about how going car-free improved his life and how it can improve the lives of others. He commutes by bicycle year-round and travels all over on foot, on mass transit, and by carpooling with friends, girlfriends, and coworkers. Chris is single and has a vibrant car-free dating and social life.
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The author saved about 40K or more in 4 years of living without a car. To say he did not EVER USE a car, however, would not be totally true. He bumped up against reality sometime and had to rent a car on occasion...but mostly he made do by bicycling, walking or using public transportation or taxis.
"Wait", you might say, "Take a taxi? Aren't they expensive?" Not as part of an overall plan that allows one to stop paying for auto insurance, car maintenance, buying a car, etc.
The author makes a convincing argument and I have cut down on my use of our auto as a result, walking as much as possible. I'd do away with it forever if we had reliable public transportation and if our kids weren't involved in activities that were out of the public transportation loop, sometimes out of the city.
But I still have hope of living "car free" and I am aiming for a life where using our car isn't necessary, in a town with good public transportation and mild winters...someday. In the meantime, this book has given me a road map (pun intended) for a simpler, less auto-dependent lifestyle.
And as Balish points out, time in a car is wasted time compare to time bicycling, walking or using public transit. The first two modes give you an opportunity to exercise, and the last gives you an opportunity for productive reading (unless, of course, you live in a place where transit is TOO good, in which case you will not have a seat to yourself and thus will have less opportunity to read).
Also, Balish does not limit himself to walking and public transit, but instead discusses less obvious (to me) alternatives such as carsharing, bicycling, carpooling and motorcycles. He even cites websites devoted to these modes, to assist those of us who don't know much about these options.
Having said that, this book is not for everyone. Balish himself points out that "Families with children might find it difficult" to live car-free as well as "People who live in rural areas." Even these groups can get something out of the book: for example, Balish discusses how a two-car family might be able to function as a one-car family.
And I do wish Balish had addressed a few more objections in more detail, such as:
*In some cities, it may be hard to avoid driving without either (1) living in (or at least passing through) high-crime areas or (2) spending a premium on housing in order to live in a coveted intown neighborhood.
*The difficulties of living in Sunbelt cities (like, say, Jacksonville) that are far more car-dependent than Balish's native St. Louis.
*The concern (for single men) that women won't view you as a real protector or provider if you don't drive them anywhere.
*Once you are married, the difficulties that arise when you and your spouse work in different parts of a region.
But having said that, this book is worth reading for anyone who can possibly get to work without driving.
Besides, the book is just an enjoyable read. It's filled with testimonials from people all over the place who have reduced their car dependence and the subsequent rewards they've realized by doing so. Comedic and pointed illustrations and quotes kept me turning pages of a book that takes a serious yet lighthearted look at car ownership and alternatives to it. If you're thinking of buying a car, first read this book, then decide.
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Here is our suggested route for a train journey between North Greenwich and Brent Cross station:
Journey: North Greenwich → Canary Wharf → Canada Water → Bermondsey → London Bridge → Southwark → Waterloo change train Waterloo → Embankment → Charing Cross → Leicester Square → Tottenham Court Road → Goodge Street → Warren Street → Euston → Mornington Crescent → Camden Town → Chalk Farm → Belsize Park → Hampstead → Golders Green → Brent Cross
Estimated time: 52 mins
Fare zones: 1, 2, 3 (what is the train fare?)
Return journey: Brent Cross to North Greenwich station
Remember to check if your journey will be affected by train strikes or engineering works
Note: This journey has been created by a computer program and may not be the fastest possible route. Closures, cancellations or delays might affect your journey and you should allow for extra time on top
London: A Visitor's Guide
Have you seen our eBook? It has a beginner's guide to using London's buses, boats, taxis and trains, including all the fares
1,000+ pages filled with money-
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For the fare between North Greenwich station and Brent Cross, see zones 1 to 3 fares
Buy an Underground ticket Buy an Oyster Card (more info)
Buy a Visitor Oyster Card (info)
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Car parks: Parking near North Greenwich train station
Minicabs: Taxi cab firms near North Greenwich station
Alternative train stations nearby:
North Greenwich to Hendon Central, North Greenwich to Golders Green or North Greenwich to East Finchley


text:
New deals added at 12pm every day. Limited stock!
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My 11 year old grandson loved this Lego Technic Racer. It is a bit different and was excited to put it together. You can't go wrong.
Pull back, release and watch the Black Champion Racer win the day!
The smooth lines of the LEGO® Technic Black Champion Racer can only mean one thing… speed! Pull the super-sleek car back, release and watch it shoot forwards! The black and orange color scheme makes it look even cooler and there's a sticker sheet of chrome decals to add even more detail. For an even more action-packed play experience, combine your model with 42027 Desert Racer to build a Race Truck with 2 pull-back motors!
Item: 42026
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Salt Lake City, UTUSA
March 13, 2013
No answer yet
Im Ryan :
Welcome to NAKID Social Sports - the newest kickball, dodgeball and volleyball league in Boston! NAKID stands for "No, Adult Kickball Isn't Dumb" and we play fully clothed!
Throughout each kickball, dodgeball and volleyball season, we have lots of great social events that NAKIDs are invited to, such as our FREE parties, FREE movie screenings, the Beerlympics, sports games watches, tailgates, flip cup tournaments, festival trips, happy hours and more! Many of our events are free or have a small fee associated with it.
Anyone is more than welcome to join our Meetup group, but if you're not a paid member of NAKID, you may have to pay a higher fee to come to our events. Non-NAKIDs aren't permitted at our free movie screenings, unless you're coming with a NAKID - so come to our other events and start making some NAKID friends!
Play kickball or dodgeball in Boston this upcoming season with us!
Like NAKID Boston on Facebook. Then play kickball in Boston with us!
Follow NAKID Boston on Twitter for more kickball & dodgeball in Boston!
7,509 Technologists
1,622 GenX'ers
2,919 Friends
4,131 Players
6,697 Secret Diners
2,853 Ladies
Meetup members, Log in
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Short Order: Seabirds brings vegan to The Lab
Just before retiring their food truck last month, the folks behind Seabirds opened a cute little brick-and-mortar cafe at The Lab in Costa Mesa. I never followed their truck, so I didn't know much about them.
I didn't realize they were vegan until I wandered in for lunch recently. To be honest, vegan restaurants don't hold much appeal for me. Don't get me wrong. I love vegetables. I find it hard to get enough vegetables. But the idea of a taco made without meat, or even fish, or the concept of a quesadilla filled with "cheese" that doesn't come from cows or even goats, is not something I get excited about easily.
But then I tasted the fried avocado taco. It's actually pretty good, a few thick slices of avocado dipped in a tempura batter and deep-fried until golden and crisp, served on very good corn tortillas with shredded cabbage and well-crafted salsa. After that, I went back for the arancini, risotto balls made with artificial cheese, which are also very satisfying thanks to a deeply flavored marinara sauce that tastes as if it has been simmering on the stove for hours.
The menu is really short, and the most satisfying dishes of all are the ones that don't try to replace meat or mimic cheese but focus instead on the inherent beauty of vegetables, like the caramelized Brussels sprouts with garlic and mustard, or the rice bowls with black beans, or the salad of butternut squash with almonds and apples.
I'm not quite ready to embrace that whole Meatless Mondays trend, but I do have a new go-to place for a salad.
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If you'd like to come join us, let's chat.
If you'd like to come and work, grow and play with us, here's where we're hiring:
When you work at Essence, we promise you:
Our global Talent team supports our people with bespoke learning and development opportunities in being the best they can be. Talent will help you 'Go Grow!'.
Have a free breakfast, give back to the community with our nonprofit partners, play a game of foosball and more. What makes a great workplace for you? You pick.
Your wellbeing is important to us. That's why we provide or contribute to private medical cover, maternity and paternity leave, pensions and more.


text:
Top Definition
A random Hmong name where the Ly and the Lee are pronounced the same. Kao is pronounced as "Cow." Also a name for a cool Hmong girl.
Kao Ly Lee is very cool.
de jenniferlee 05 Noiembrie 2010
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E-mailurile sunt trimise de la email@example.com. Nu-ți vom trimite mesaje nedorite.×


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Property owners in the New South Wales South East say authorities have ignored their concerns about a swarm of locusts destroying crops.
Topics: pest-management, pests, rural, dalgety-2628
Monaro farmers in the New South Wales South East say yesterday's Sheep Circuit Sales were the most successful for a long time.
Topics: livestock, rural, bombala-2632, bibbenluke-2632
Posted| Updated
The union representing ambulance officers wants the Queensland Government to ban items such as pool cues and glass ashtrays in pubs and clubs.
Topics: assault, government-and-politics, parliament, state-parliament, states-and-territories, unions, law-crime-and-justice, crime, antisocial-behaviour, crime-prevention, brisbane-4000, australia, qld, maroochydore-4558
Posted| Updated
Courtroom erupts in anger as man gets 7 years non-parole jail for abducting and raping a 10yo girl.
Topics: courts-and-trials, law-crime-and-justice, sexual-offences, paralowie-5108, adelaide-5000, sa
Most Mackay regional councillors have voted to accept a 3 per cent pay rise, in line with the recommendations of Queensland's remuneration tribunal.
Topics: local-government, mackay-4740
A new emergency communication network has been partially completed in Victoria's Alpine region.
Topics: emergency-planning, emergency-incidents, dederang-3691, wodonga-3690
The earthquake that shattered Haiti has unleashed fears that child-eating spirits, mythological figures entrenched in Haitian culture, are prowling homeless camps in search of young prey.
Topics: earthquake, religion-and-beliefs, witchcraft, disasters-and-accidents, haiti
The Urban Development Institute of Australia (UDIA) says it is very concerned that Mackay continues to be one of the most unaffordable housing markets in the world.
Topics: housing-industry, industry, mackay-4740
Concerns have been raised that children as young as four years old are being left unattended at Mackay's Bluewater Lagoon.
Topics: children, parenting, safety, mackay-4740
Posted| Updated
Schools in South Australia's remote Aboriginal lands are among the worst performers in national testing results.
Topics: indigenous-aboriginal-and-torres-strait-islander, education, schools, federal---state-issues, internet-culture, port-augusta-5700, adelaide-5000, sa, port-pirie-5540
A real estate executive says he is surprised by the latest rating of housing costs on the Gold Coast.
Topics: housing-industry, industry, southport-4215
Posted| Updated
The Premier, John Brumby, has criticised the way Melbourne's Lord Mayor, Robert Doyle, has gone about asking for money for the development of Swantson Street.
Topics: local-government, government-and-politics, melbourne-3000, vic
Gold Coast Tourism has welcomed a new funding initiative aimed at bringing more international visitors to Australia.
Topics: tourism, industry, southport-4215
Posted| Updated
Still no decision on who will pay to fix Somerton Bridge
Topics: floods, local-government, states-and-territories, somerton-2340, tamworth-2340
Posted| Updated
The My School website shows that most Canberra students are performing above the national average in literacy and numeracy tests.
Topics: schools, primary-schools, public-schools, secondary-schools, federal-government, canberra-2600, act
A Pilbara worker talks to the ABC's Graeme Powell about why they are continuing to strike in defiance of a court order
Posted| Updated
The Fair Work Ombudsman (FWO) has launched a case against a Lockyer Valley farm west of Brisbane for allegedly underpaying seven Japanese workers.
Topics: farm-labour, community-and-society, work, rural, grantham-4347, australia, qld, toowoomba-4350
Posted| Updated
The Victorian Association of State Secondary Schools is urging parents to ignore the Federal Government's My School website when deciding where to enrol their children.
Topics: schools, education, primary-schools, public-schools, secondary-schools, federal---state-issues, parliament, australia, vic, melbourne-3000
Posted| Updated
Police have charged a 15-year-old Sudanese refugee with causing serious harm to a 20-year-old Sudanese refugee in Alice Springs.
Topics: refugees, assault, alice-springs-0870, australia, nt
Posted| Updated
Floodwaters from Queensland's central west have finally made it to the South Australian outback town of Innamincka.
Topics: floods, disasters-and-accidents, innamincka-5731, australia, qld, longreach-4730, mount-isa-4825, sa
Forestry Tasmania and the fire service will take advantage of relatively calm conditions today to contain an east coast bushfire.
Topics: bushfire, scamander-7215, tas
US soldiers have rescued a survivor from rubble in Haiti, two weeks after an earthquake wreaked havoc on the nation.
French rescuers have pulled a 16 year-old girl alive from the rubble in Haiti, 15 days after the quake struck Port-au-Prince.
Posted| Updated
A South Australian banking executive has been appointed chief executive officer of ME Bank.
Topics: banking, company-news, australia, adelaide-5000, sa
Posted| Updated
Proposed new laws will make it a crime in Tasmania to assault emergency services workers and medical staff.
Topics: police, states-and-territories, doctors-and-medical-professionals, tas, burnie-7320, hobart-7000, launceston-7250