text:
|Publication number
|Publication type
|Application number
|Publication date
|Jan 14, 2003
|Filing date
|Apr 26, 1999
|Priority date
|Jan 16, 1997
|Fee status
|Also published as
|Publication number
|Roger L. Bottomfield
|Original Assignee
|Roger L. Bottomfield
|Export Citation
|BiBTeX, EndNote, RefMan
|Patent Citations (36), Non-Patent Citations (2), Referenced by (45), Classifications (23), Legal Events (3)
|External Links: USPTO, USPTO Assignment, Espacenet
This application claims priority to and repeats a substantial portion of prior application entitled "Vapor Deposition Components and Methods of making the same" filed on Jan. 16, 1997, which was accorded Ser. No. 08/783,880, now abandoned. Since this application names the inventor named in the prior application, the application constitutes a continuation-in-part of the prior application. Additionally, this application incorporates by reference the prior application filed on Jan. 16, 1997, which was accorded Ser. No. 08/783,880.
The present invention relates generally to components that are used in a vapor deposition chamber, and, more particularly, to shields and retainer rings with features that greatly reduce the amount of contaminants produced by delamination or exfoliation of sputtered material from such shields and retainer rings.
The need to have a clean environment for manufacturing processes in many different industries is well known. The clean environment is especially important when the manufacturing process involves the application of thin film materials, which, in many instances, have thicknesses on the same order as microcontaminants. In these cases, microcontaminants affect the properties of the thin film materials. Therefore, the existence of microcontaminants is a significant problem in these processes.
Vapor deposition systems have a process chamber, in which thin films are deposited. Since thin film deposition is carried out repetitively in the process chamber, a laminated film is likely to be formed on the interior wall of the process chamber. When the total thickness of the laminated film stack deposited on the interior wall exceeds a certain level, it begins to exfoliate. Exfoliation is caused by different thermal expansion coefficients within the film stack and interior wall of the process chamber, or due to membrane stresses within the laminated film itself. Exfoliation generates particles which may be in turn incorporated into thin films deposited on to substrate resulting in defects such as pinholes or contaminants within the film. Therefore, the interior of the process chamber must be cleaned before the thin film exfoliation starts. In a chemical vapor deposition system, a chemical etch is often used between deposition cycles without actually removing the deposition system from operation. However, this etch does not always remove deposited films.
Physical vapor deposition involve depositing thin films on a substrate or wafer in an evacuated chamber. In this process, a target material is bombarded with gaseous ions. The gaseous ions dislodge atoms from the target material. The dislodged material either follows a ballistic trajectory or is focused in the direction of the substrate or wafer to improve the efficiency of the process. The sputtered material adheres to both the substrate and its surroundings. Target materials which are sputtered onto a substrate or wafer, collect also on the process chamber walls. Since most chamber walls are planar and continuous, stresses in the deposited thin films materials builds rapidly across the entire film until the stresses reach a critical point. Stress is then released within the film through buckling or exfoliation from the adhered to surface(s) of the process chamber. This causes small pieces (particulates) of sputtered material to be released into the vapor deposition chamber. These microcontaminants then reach the substrate and can significantly affect the properties of the thin film.
One solution is to facilitate the removal of deposited films which have been sputtered onto chamber walls. This is accomplished with the installation of a removable shadow shielding system. This system does not prevent the materials from being sputtered inside the chamber and does not prevent or reduce the stresses in the thin films deposited across the surface of the shadow shielding system. However, this removable shadow shielding system allows a user to remove the shields and quickly install clean ones. This reduces the overall time that the manufacturing process chamber is removed from operation and production while these films are removed.
The shadow shield is placed around the substrate or wafer in order to reduce the amount of sputtered material from reaching the vapor deposition chamber walls. Furthermore, a retaining ring is sometimes used to hold the wafer in place within the vapor deposition chamber. These components only reduce the microcontamination problem since the sputtered metal collected on the shield or retaining ring will eventually buckle or delaminate, contaminating the chamber and/or the wafer.
Many attempts have been made to create vapor deposition chamber components which reduce or eliminate exfoliation or buckling of deposited thin films. One method of reducing microcontamination is to create a random and micro-rough surface on the vapor deposition component(s). One example of such a component is a sputtering shield that is disclosed in U.S. Pat. No. 5,202,008, by Talieh et al. ("Talieh") wherein the sputtering shield is bead blasted and sputter etched clean to create a micro-rough surface for adhesion of sputtered material. The micro-rough surface may allow an increase in nucleation sites which should minimize the formation of interface voids, thereby reducing the amount of microcontaminants. Another example of a sputtering shield is disclosed in U.S. Pat. No. 5,391,275, by Mintz ("Mintz"), in which the sputtering shield and clamping ring are bead blasted, ultrasonically cleaned, and, either: 1) sputter etched cleaned, 2) plasma reactively cleaned, or 3) plasma nonreactively cleaned. These processes create the same rough surface as taught in the Talieh patent. It is even known that attaching a layer of microcrystalline alumina (Aluminum Oxide, A1203) on the surface of a sputtering shield helps reduce the microcontaminants. The micro-roughening of the surfaces of these components reduces the amount of microcontamination within a vapor deposition chamber, but there is still a need for further reduction of these microcontamination amounts.
Another method for reducing microcontaminants is to paste or coat the sputtered material onto the surface of the vapor deposition components. An example of such a method is disclosed in U.S. Pat. No. 5,382,339 by Aranovich ("Aranovich"). Aranovich teaches the pasting of previously deposited material onto the surface by sputtering a material such as aluminum or titanium on top of the previously deposited material. This pasting holds the potential exfoliants to the surface and prevents buckling. However, this pasting, which is equivalent to lacquering, merely adds another layer of material on top of the potential exfoliant which could also buckle as well. Furthermore, this method of pasting or coating increases the complexity of the process, and, while helpful, it is not a final solution to the problem. These methods and devices serve to reduce the problem of stray particulates in the clean environment necessary for thin film deposition, but there remains a further need for vapor deposition chamber components which reduce, or even eliminate, the problem of exfoliation contamination.
Therefore, there is a need for improved vapor deposition chamber components which inhibit or prevent the formation of microcontaminants in a vapor deposition chamber.
A need exists for a method of making a vapor deposition chamber component surfaces which inhibit or prevent the formation of microcontaminants in a vapor deposition chamber that includes the step of selectively etching portions of the surface thereby creating a discontinuous surface to relax stress within deposited thin films.
Moreover, a need exists for a vapor deposition chamber component, such as a shield or retaining ring, that has such a discontinuous surface. The discontinuous surface is defined as a surface with features such as a plurality of projections, cavities, channels or grooves, partitions, or combinations thereof or equivalents.
Yet another need exists for a vapor deposition chamber component with a discontinuous surface that accumulates thin films not deposited on the substrate onto a vapor deposition chamber component surface and secures the thin films to the surface while inhibiting their exfoliation. Therefore reducing the amount of microcontaminants inside the vapor deposition chamber.
Moreover, a need exists for a vapor deposition chamber components which have projections, cavities, channels or grooves, partitions, or combinations thereof or equivalents thereof with a variety of acute angles in order to prevent microcontamination of the clean environment of the vapor deposition chamber.
For a more complete understanding of the present invention and the advantages thereof, reference is now made to the following description taken in conjunction with the accompanying drawings in which like reference numerals indicate like features and wherein:
FIG. 1 shows a cross sectional side view of a vapor deposition chamber;
FIG. 2 is an exploded view of one embodiment of a vapor deposition chamber with a sputtering shield and retaining ring according to the present invention;
FIG. 3 provides a cross section perspective view of an embodiment of a sputtering shadow shield according to the present invention;
FIG. 4 illustrates isometrically a quarter cut-away perspective view of an embodiment of a sputtering shield according to the present invention.
FIG. 5 provides an expanded view of area A in FIG. 4 which shows the shape of the pattern of the features of the textured surface according to the present invention;
FIG. 6 illustrates a top view of the projections or cavities according to the present invention with a six pointed star outline;
FIG. 7 is a partial cross sectional side view of area B in FIG. 4 illustrating the shape of the boundary side walls according to the present invention;
FIG. 8 provides a perspective view of another sputtering shield embodiment;
FIGS. 9-13 depict an embodiment of the etching method according to the present invention wherein these embodiments utilize photolithography to create a textured surface on vapor deposition chamber components;
FIG. 9 shows a surface on a vapor deposition chamber component;
FIG. 10 shows a photoresist applied onto the metal surface of FIG. 9;
FIG. 11 illustrates the results of placing a mask over the photoresist, and irradiating the photoresist, wherein a portion of the photoresist is removed with a first solvent;
FIG. 12 shows that the exposed metal surface of the sputtering shield is etched away;
FIG. 13 shows the remaining portion of the photoresist is removed with a second solvent.
Preferred embodiments of the present invention are illustrated in the FIGURES, like numerals being used to refer to like and corresponding parts of the various drawings.
The present invention is intended to prevent or delay the delamination or exfoliation of a series of deposited thin films. This delamination or exfoliation generates micro-contaminants which can result in the contamination of a vacuum process chamber.
The present invention provides a system having and a method for creating a textured or discontinuous surface within a vacuum process system that prevents or delays particle formation inside the system. Furthermore, the present invention will prevent or delay particles generated from the exfoliation of deposited thin films from the process chamber walls. The surface provided by the present invention has a macroscopically textured or discontinuous surface made of a number of raised horizontal surfaces with undercut vertical sidewalls. A film that is deposited on such a surface is done in a discontinuous manner, thereby relaxing the membrane stress and delaying the start of film exfoliation. Typically, there are less than fifty raised horizontal surfaces per inch on the surface of the deposition chamber component shielding. However, the present invention need not be limited to less than fifty raised horizontal surfaces per inch.
In the present invention, the expression that a deposited film is discontinuous may be defined such that the film is interrupted. Discontinuous includes not only gaps within the film but also a film which substantially covers the entire surface while being redirected by discontinuities on the surface on which the film is deposited. The term "continuous" means that a deposited film is substantially formed all over a surface without any discontinuity within the film or the surface to be covered.
One embodiment of the present invention provides a system or method of reducing particle exfoliation within a vapor deposition processing system. These particles would cause the deposited film quality to decrease. In a semiconductor manufacturing process, this would directly correlate to reduced product yields. Furthermore, the delay to the start of the exfoliation of the deposited films within the vacuum process chamber allows the frequency with which the process chamber needs to be opened to be greatly reduced. In a semiconductor manufacturing process, this would be directly reflected in increased productivity. However, the present invention need not be limited to deposition processes.
The present invention may be applied to any physical vapor deposition of thin films is accomplished by sputtering a target material. In this phenomenon, accelerated high-energy particles are made to collide with a target material, atoms or molecules in the target exchange momentum with the high-energy particles causing their release into the process chamber or free space. A physical vapor deposition system utilizes this phenomenon to create a film by allowing the dislodged atoms to collect as a thin film on a substrate. When this film is formed, sputtered material is deposited, not only on the substrate, but also on the surrounding process chamber surfaces, substantially in the same film thickness.
The vapor deposition system may also include an evaporative deposition system such as that where a metal or insulator is heated in a vacuum by resistive heating and the evaporating particles are released to the chamber or free space. The particles condense on a substrate to form a thin film. Vapor deposition may further include chemical vapor deposition system where a chemical process is employed to generate a plasma which produces a thin film on the substrate. Furthermore, the present invention may be applied.
Physical vapor deposition is generally performed in an evacuated sputtering chamber. FIG. 1 illustrates a cross sectional side view of such a physical vapor deposition chamber. In such a system, a substrate 4 is subjected to bombardment by sputtered atoms from a sputtering source 2. The substrate 4, typically a wafer, is placed upon a pedestal 6 and held in place with a retaining ring 8. A sputtering shield 10 which protects the vapor deposition chamber walls 14 from excessive contamination by sputtered materials is located around the wafer 2.
However, the present invention may be utilized for carrying out its purposes within any suitable system or method for the deposition of thin films on surfaces, and the present invention is not in any way limited to use within the vapor deposition system or apparatus shown or described in the FIGUREs or specification.
This application may also be applied to a plasma etch reactor or like processes in which thin films are deposited within the reactor chamber as a by-product of the process.
FIG. 1 illustrates a typical cross-sectional view of a physical vapor deposition chamber. The chamber is evacuated and filled with an inert gas; the inert gas is ionized and impinges upon a target material 2, which in turn the target material 2 is then sputtered to the available surfaces of the physical vapor deposition chamber. Typically, the geometry of the chamber is optimized to focus the sputtered material upon a substrate 4. The substrate 4 is placed upon a pedestal or a heater system 6 and held in place inside the chamber by clip ring 8. The target material 2, as stated earlier, is sputtered upon all the free surfaces inside the physical vapor deposition chamber. This process is often repeated without cleaning the chamber surfaces. This can cause problems in that the films deposited may form a laminate which in turn may delaminate and particulate upon the substrate 4. Contamination of the film deposited on substrate 4 may cause the semiconductor device or other devices using the deposited thin film on the substrate to fail.
A typical solution is shown here, in which a removable shielding system 10 is placed over the free surfaces of the physical vapor deposition chamber. The shielding 10 serves to collect the sputtered target material upon the shielding surface 12 rather than the chamber surface 14. This solution allows accumulated excess sputtered material to be quickly removed from the physical vapor deposition chamber prior to particulating upon a wafer substrate. Historically, without the shielding system in place, the excess sputtered material would be scraped or ground off the chamber walls 12.
FIG. 2, illustrates an exploded view of typical physical vapor deposition chamber illustrated in FIG. 1. The chamber walls 14 are a permanent part of the system. Hence, these walls 14 are typically very hard to clean and remove excess sputtered material. Hence, the addition of a removable shielding system 10 allows the excess sputtered material to be removed without grinding or scraping chamber walls 14. The shape of the shielding 10 may be unique to an individual process chamber (i.e. the Applied Material's Endura system, the MRC's Model 603 or the Varian 3000 Series), but the concept of the textured surface can be transferred to any tool set's internal shielding or internal chamber walls.
The surface of a conventional shielding system is relatively flat and may have microscopic deformations of the surface created through the use of a bead blasting process or similar process to create a microscopically rough surface. This microscopically rough surface has been found to aid in the gettering of excess sputtered materials and preventing the delamination of such materials.
FIG. 3 illustrates a shielding component for a typical vapor deposition chamber. However, in the present invention, the inner surface 11, which collects the excess sputtered target material, has a plurality of projections from the inner surface 11 of the shielding system 10. These projections serve to create a plurality of raised horizontal surfaces 15. The projections serve to relieve and minimize the stress build-up in thin continuous films deposited upon the shielding system 10. The projections fragment the larger continuous film into a series of smaller film surfaces. This reduces membrane stresses and serves to extend the insitu life of a shielding system 10 since membrane stresses of deposited films are not allowed to build up across large continuous free surfaces on the shielding system 10. Hence, the time intensive and difficult task of opening the vacuum chamber can be avoided until the target material has been depleted.
FIG. 5 is a top-down view of the raised horizontal surfaces of the shielding system. This embodiment illustrates that the raised horizontal surfaces may be in the shape of a five-pointed star 16, or a six-pointed star 28 as illustrated in FIG. 6. The reason that the shape of a star has been chosen is that between the arms of a star an angle 18 which is less than 180� has been formed which will allow improved collection sites for securing of the excess sputtered target material. A five-pointed star provides an approximately 128� inner angle 18 between the arms of the star, and a six-pointed star 28 of FIG. 6 provides an approximately 120� inner angle 22 between the arms of the star. The invention, however, should not be limited to a five- or six-pointed star. These shapes have produced unexpected results in that the inner angle has been best defined by the manufacturing method chosen to pattern the shielding. As the number of points in the star increase, the resolution and definition of the angles has been seen to decrease when patterned using photolithographic methods.
FIG. 7 is a cross-sectional view of the shielding system 10 which clearly illustrates the raised horizontal surfaces 15A formed upon the inner shielding surface 11. The projections forming the raised horizontal surfaces 24 may be of any height. In this embodiment, a height of 15-18 mils has been chosen. Additionally, the size of the raised horizontal surfaces has been found to be optimized with less than 50 raised horizontal surfaces per inch on the inner surface 11 of the shielding 10. This embodiment illustrates seven to eight raised horizontal surfaces, or stars, per inch. Further, it has been found that a ratio of the raised horizontal surface area to the total surface area helps determine the effectiveness of preventing delamination of deposited thin films. The present invention has been found to work with a ratio of 0.05 to 0.95. The current embodiment, illustrated with five-pointed stars 16, has a ratio of approximately 0.3.
FIG. 8 illustrates a typical cavity shield of a Varian 3000 Series deposition system. Again, the shielding has an inner surface 11 which will be textured with a plurality of raised horizontal surfaces to relieve the build-up of stress across a continuous film, and an outer surface 12 which may be smooth. The shielding typically has a hole or cavity in the center to allow the focus deposition of material primarily on the substrate 2.
FIGS. 9-13 illustrate one potential process for patterning the inner surface 12 of any physical vapor deposition system chamber component in which a metal surface 30 (FIG. 9) will be coated with a photoresistive material 32 (FIG. 10). In turn, this photoresist will be masked, exposed, and developed (FIG. 11) to create the pattern of the raised horizontal surfaces 34 in the photoresist 32. A timed etch process then can be used to either isotropically or anisotropically remove the unmasked materials from the metal surface 30 in FIG. 12. The protected areas 40 under the exposed photoresist 32 are not removed. Hence, the raised horizontal surfaces 40 of FIG. 13 are defined by the cavities 42 of the removed material. It should be noted that this is a timed etch based on the selectivity of the etch to the shielding material, the point being that enough shielding material should be left to both prevent the creation of voids inside the shielding material and to maintain the structural integrity of the shielding material.
Typically an undercut of the raised horizontal surface 40 is formed with an acute angle 17. Again, this acute angle 17 will assist in the securing of excess sputtered material to the shielding surface. However, it should be noted that the steps illustrated in FIGS. 9-13 are only one possible method of creating the textured surface upon the shielding. Additionally, both positive and negative resist may be used to form these surfaces 40. Further, the discontinuous or textured surface 38 could be created by actually stamping the textured pattern into the metal or affixing the projections to form the textured surface of the shielding material and that the photolithography means used are but one way of creating the textured surface of the shielding material.
Vapor Deposition Chamber Components
The vapor deposition chamber components of the present invention include, but are not limited to, the sputtering shield 10 and the retaining ring 8. As shown in FIG. 1 and FIG. 2, the shadow shield 10 of the present invention has two sides, an inner side 11 and an outer side 12. The inner side 11 of the sputtering shield 10 has a discontinuous or textured surface to anchor, capture, and/or secure collected sputtered materials. A discontinuous surface, contoured surface, or textured surface herein means a surface with features such as a plurality of projections, cavities, channels or grooves, partitions, or combinations thereof or equivalents.
In a first embodiment of the present invention, the shadow shield 10 has a discontinuous surface which includes features such as a plurality of upwardly directed projections forming raised horizontal surfaces 15 with boundary side walls 16 attached to the inner surface 11. (FIG. 5.) Preferably, the projections 15 are integrally formed onto the inner side 11 of the sputtering shield 10. Alternately, the projections 15 may be attached by welding, formed by stamping, or any other suitable ways of attachment.
The boundary side walls 16 of the projections 15A or the cavities 15B are not perpendicular to the inner side 11 of the sputtering shield 10, but preferably form an acute angle to the inner side 11, thus forming under-cuts 17 in the projections 15 or in the cavities 14. The under-cuts 17 aid in the retention of sputtered material on the inner side 11 of the sputtering shield 10. Preferably, all of the textured surface features of the present invention have under-cuts 17. These characteristics of the discontinuous surface features are illustrated in FIG. 7, which is a partial sectional view of two types of features, a single projection 15A and a single cavity 15B.
The discontinuous surface features include raised horizontal surfaces that may be of any shape. These shapes include but are not limited to a shape such as one with at least three vertices, but it is preferred that the shape be a five pointed star as seen in FIG. 5. Alternately, other shapes may be utilized, as seen in the six pointed star outline 18 of FIG. 7 or alternatively a triangular outline. The vertices provide angular points 18 or edges that aid in the retention of sputtered material to the discontinuous surface of the vapor deposition component. The present invention, however, is not limited to those shapes described herein and any polygon with both obtuse and acute angles along the outer edges may suffice.
The concentration of textured surface features is indicative of the performance of the present invention. The ratio by which this concentration is measured is solidity. Solidity is defined as the amount of non-elevated textured surface area divided by the total textured surface area, e.g., a smooth surface would have a ratio of 1 and an infinitely textured surface would approach a ratio of 0. The present invention works most effectively with a solidity between 0.05 and 0.95.
In a second embodiment of the present invention, the retaining ring 8, which also collects sputtered metals capable of producing microcontaminants, has textured surface features as described earlier in this specification. As on the sputtering shield 10, the textured surface features, such as the plurality of projections 15 (see FIG. 5), are attached to a side of the retaining ring 8 which faces the sputtering source 2 and the sputtered metal is then anchored, captured, and/or secured by the textured surface features.
However, any suitable vapor deposition component configuration or geometry may be utilized for carrying out the purposes of the present invention, which is not limited to those shown in the FIGUREs above. For example, FIGS. 3, 4 and 8 show different sputtering textured or contoured surface shield configurations which embody the present invention.
Furthermore, the projections, cavities, channels or grooves, partitions, or combinations thereof or equivalents can be made to be of any height or depth, which includes but is not limited to fifteen (15) mil. Alternatively, the height or depth may be of thirteen (13), fourteen (14), fifteen (15), sixteen (16), seventeen (17), eighteen (18), nineteen (19), or twenty (20) mil. Additionally, other technologies, such as bead blasting, coating, or other prior art methods or apparatus, can be used in conjunction with the present invention to further reduce or eliminate exfoliation or contamination problems associated with vapor deposition chambers or processes.
Methods of Making the Present Invention
The present invention presents novel methods for making vapor deposition component surfaces which inhibit or prevent the formation of microcontaminants within the vapor deposition chamber.
One method for making vapor deposition component surfaces according to the present invention is to etch selected portions of the surface of the vapor deposition component to form a textured surface. More particularly, the present invention contemplate the selective etching of surfaces of retaining rings 8 and sputtering shields 10. Furthermore, the surfaces of these components are etched so that the textured surface features such as projections, cavities, channels or grooves, partitions, or combinations thereof physically and/or visibly exist on the surface of the vapor deposition component (i.e. the present invention teaches or suggests selective roughening of the surface on a relatively macroscopic level compared with some of the prior art that discloses or teaches the random and micro-roughening of the surface using a method such as bead blasting, etc.).
One method for etching surfaces 30 (i.e. including but not limited to metal surfaces) uses photolithography to form patterns on the surfaces 30. These patterns are formed by taking a clean vapor deposition chamber component, such as sputtering shield 10 or retaining ring 8, having the surface 30 to be treated (FIG. 9) and applying a photoresist 32 to the surface 30 (FIG. 10). A photoresist is a material which changes structure when irradiated (exposed) such that different solvents are needed to dissolve exposed portions than non-exposed portions. A mask is then placed over the photoresist 32 and non-masked portions 34 are exposed. The exposed portions 34 of the photoresist 32 are then removed with a first solvent thereby exposing selected portions 36 of the surface 30 (FIG. 11) which is then etched (FIG. 12). This etching, may be done by suitable means such as plasma etching, but in the present invention, it is preferred that the etching be done with an acid capable of dissolving the surface 30 metal. Finally, the remaining non-exposed portions 34 of the photoresist 32 are dissolved with a second solvent and a clean discontinuous surface 38 is left as shown in FIG. 13. Additional cleaning according to normal industry practice, such as ultrasonic cleaning, may be performed to place the vapor deposition chamber components into condition for use.
Etching the metal surface 30 of the vapor deposition chamber components creates the textured surface 38 with features having a boundary side wall 16 with an under-cut area 17. The boundary side walls of the features are formed at an acute angle to the surface 30.
Another photolithographic method for etching surfaces 30 takes a clean vapor deposition chamber component, such as sputtering shield 10 or retaining ring 8, having a surface 30 to be treated (FIG. 9) and applying a photoresist 32 to the surface 30 (FIG. 10). A mask is then placed over the photoresist 32 and non-masked portions 34 are irradiated. The non-irradiated portions of the photoresist are then removed with the second solvent and the exposed metal of the sputtering shield 10 is then etched (FIG. 12). Finally, the remaining irradiated portions of the photoresist are removed with the first solvent (FIG. 13). Additional cleaning according to normal industry practice, such as ultrasonic cleaning, may be performed to place the vapor deposition chamber components into condition for use.
The result of these photolithographic processes is a vapor deposition chamber component with a textured surface which inhibits the formation of microcontaminants in a vapor deposition chamber system 5. It is within the scope of the present invention to utilize any suitable or equivalent etching method for making the textured surfaces of the present invention and is not limited to those disclosed or shown in the FIGUREs.
While etching methods for creating textured surfaces of the present invention are described above, textured surfaces may also be produced by other methods. One such method is to take a metal piece such as a pre-stamped metal plate, and hot pressing or rolling a die onto the surface of the plate thereby forming a texture on the surface. The textured plate is then formed into a suitable configuration for a vapor deposition chamber component. The vapor deposition chamber component can be made by forming several pieces which are attached together. See FIG. 2. However, any other suitable method for creating textured surfaces within the process chamber is considered within the scope of the present invention, and the present invention is not limited to the methods disclosed or shown in the FIGUREs.
The preferred embodiment of the invention is described above in the FIGUREs and Detailed Description. Unless specifically noted, it is the intention of the inventors that the words and phrases in the specification and claims be given the ordinary and accustomed meanings to those of ordinary skill in the applicable art(s). The foregoing description of preferred embodiments and best mode of the invention known to applicant at the time of filing the application has been presented for the purposes of illustration and description. It is not intended to be exhaustive or to limit the invention to the precise form disclosed, and many modifications and variations are possible in the light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and its practical application, and to enable others skilled in the art to best utilize the invention in various embodiments and with various modifications as are suited to the particular use contemplated.
Likewise, any use of the words "function" or "means" in the Detailed Description is not intended to indicate a desire to invoke the special provisions of 35 U.S.C. Sec. 112, Paragraph 6 to define his invention. To the contrary, if the provisions of 35 U.S.C. Sec. 112, Paragraph 6 are sought to be invoked to define the invention, the claims will specifically state the phrases "means for" or "step for" and a function, without reciting in such phrases any structure, material, or act in support of the function. Even when the claims recite a "means for" or "step for" performing a function, if they also recite any structure, material, or acts in support of that means or step, then the invention is not to invoke the provisions of 35 U.S.C. Sec. 112, Paragraph 6. Moreover, even if the inventors invoke the provisions of 35 U.S.C. Sec. 112, Paragraph 6 to define the invention, it is the intention that the invention not be limited only to the specific structure, material, or acts that are described in his preferred embodiment. Rather, if the claims specifically invoke the provisions of 35 U.S.C. Sec. 112, Paragraph 6, it is nonetheless the intention to cover and include any and all structures, materials, or acts that perform the claimed function, along with any and all known or later developed equivalent structures, materials, or acts for performing the claimed function.
The inventions described herein are not to be limited to the specific algorithms, methods, or steps disclosed in the preferred embodiment, but rather, are intended to be used with any and all such methods, algorithms, or steps. In its preferred form, applicant divides the method for etching surfaces into several steps. However, with appropriate knowledge and application of that knowledge to those of ordinary skill in the art, some of the steps can be implemented into a single step. Likewise, applicant divides the method of hot pressing or rolling texture onto surfaces into several steps However, with appropriate knowledge and application of that knowledge to those of ordinary skill in the art, some of the steps can be implemented into a single step. Thus, it is not the intention to limit the invention to any particular form or any number of method steps or to any specific procedural arrangement.
In summary, the present invention provides a method that prevents or delays the delamination of thin films deposited on vapor deposition chamber components.
The present invention provides a method of reducing or delaying the exfoliation of thin films within a vapor deposition chamber that substantially eliminates or reduces disadvantages and problems associated with previously developed shielding systems and methods used for their production.
More specifically, the present invention provides a method for reducing the exfoliation of deposited films within a vapor deposition system. The method of preventing the delamination of thin films deposited of a vapor deposition chamber components includes the steps of depositing a series of thin films on a discontinuous surface. The internal stress of the deposited thin films are relaxed by fragmenting the deposited thin film with the discontinuous surface.
Although the present invention has been described in detail, it should be understood that various changes, substitutions and alterations can be made hereto without departing from the spirit and scope of the invention as described by the appended claims.
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|Components of apparatus for film making and method for manufacturing the same
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|Jun 10, 1997
|Minnesota Mining And Manufacturing Company
|Sputtering shields and method of manufacture
|May 9, 1995
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|Seiko Epson Corporation
|Method of producing a semiconductor device with a heat sink
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|Nihon Sinku Gijutsu Kabusiki
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|Aug 7, 2008
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|Nolander Ira G
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|Applied Materials, Inc.
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|U.S. Classification
|216/11, 216/83, 216/49, 156/345.1, 204/298.11, 204/298.31, 204/192.32, 118/715, 216/58
|International Classification
|Cooperative Classification
|European Classification
|Apr 28, 2006
|Fee payment
Year of fee payment: 4
|Jun 16, 2010
|Fee payment
Year of fee payment: 8
|Jul 11, 2014
|Fee payment
Year of fee payment: 12


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subset: commoncrawl


text:
Mr. Tom Canterbury
Posted in the Milton Forum
United States
#1 Apr 5, 2013
Well, it's election time. Mr. Canterbury is having city employees trimming trees on Private Property and posting his election signs also on Private Property. Isn't this against the ethics committee? Uses his employees for his own publicity yet will screw them over in a heartbeat. As usual, Tom Canterbury has no morales and will be dishonest and stoop to immoral conduct and do whatever he wants because, As he says , "I'm the mayor, and I said so". Charlie Conrad is his little whipping bitch that is right up his rear end saying "yes Mr Mayor, of course Mr Mayor, whatever you say Mr Mayor".
#2 Apr 5, 2013
That's a shame he doesn't have any morales those are in season right now too.
#3 Apr 5, 2013
I guess it's no worse than the other idiot crook lol who cares anyway !!!!
United States
#4 Apr 5, 2013
I would vote for tom anyday the other one running wouldn't be mayor his wife would take over.
Since: Apr 13
Location hidden
#5 Apr 6, 2013
AMEN! MR. CANTERBURY THINKS HE IS KING OF MILTON, his bullshit is getting very old with a lot of people, i heard he laid off a city employee without pay because he waved at the city employee who was driving by after working all morning on another project. King Canterbury waved at the employee and the employee waved back not knowing that the "King" was summoning him to dig a hole.that event cost that employee time off without pay..
Since: Apr 13
Location hidden
#6 Apr 6, 2013
He usurps the city council members, and decided what he wants to do and to hell with the council members, who the F*ck does he think he is? He is a rude, insolent person who thinks the world has to kiss his butt! Him and His City Clerk make all the decisions and they never bring issues to the city council they decided and they act on their behalf! which this is in direct opposition of state laws!
Since: Apr 13
Location hidden
#7 Apr 6, 2013
If you vote for Tom you need your head examined! I guess if you like the fact that he omits the city council from important decisions and he is just as bad he lets his city clerk make all of his decisions so what are you bitching about?
Since: Apr 13
Location hidden
#8 Apr 6, 2013
I have met Jimmy Smith and he is a wonderful person, he would be a great Mayor for Milton, he cares about the laws, he cares about using the city council to make important decisions NOT THE FREAKIN CLERK! who runs that office ! she runs the mayor and she tries to rule the roost! She needs put out of that office like Tom Canterbury! this is old and the people suffer for it...
#9 Apr 6, 2013
You are a nut the clerk or the wife running the town what is the difference!!!!
#10 Apr 6, 2013
Are you jealous or what crazy ass !!!! Or do you want to rule the roost cause it won't be crucked jimmy !!
Since: Apr 13
Location hidden
#11 Apr 6, 2013
YYY sounds like you have some issues with women! I beg your pardon I am not a nut I am very well learned and have several degrees! everyone has there own opinion I was not being snide or rude like YOU I think you are a jealous mean spiteful person you need to grow up! maybe your just jealous you can't run the town?
Since: Apr 13
Location hidden
#12 Apr 6, 2013
My name is not Jimmy, My name is Missy I don't rule anyone's roost I am a patriot who believes that government serves the people my eyes are wide open and this government SERVES itself I shall ignore your insult because I understand how your lack of intelligence would make you mad enough to make a comment like that! you need to grow, shut up and see what goes on in this town!. I don't know what crucked means
I don't use stupid ignorant words like this I don't have to ! and who are you Tom???? or whoever you are I really do not care! you insignificant and petty! God Bless you!
Since: Apr 13
Location hidden
#13 Apr 6, 2013
well if you don't care why are you making rude and snide comments on other peoples stuff?
Since: Apr 13
Location hidden
#14 Apr 6, 2013
Look I want to make something perfectly clear to all of you on this forum! I have a right to vote for who I want to I am voting for Jimmy Smith, It is my opinion based on What I HAVE seen and What I know for a fact! If you want to be petty and make smart-ass comments that is your choice that just shows your ignorance! Right is Right and wrong hurts everyone!. I believe that Governments from Mayors to Governors should be held in check from hurting people to their own gain, I could care less but when I see what is going on and I see the truth in the situation I call a spade a spade, Me and all my friends are voting for Jimmy Smith it is our right and our privilege as tax paying citizens to do so..and let me tell you something I am not a NUT, I am not ignorant or stupid or what ever you like to sling at me they are words said in ignorance, I have several degrees and I am also a gold belt kick boxer. I am also a mother of 3 children who I would protect with my life. Every evening I drive around Milton and I see drug dealers at the park, I see them going up to middle school aged children and trying to sell them drugs as they wait at the bus stop! Is anything being done about it NO! I am sick of it I can't take matters into my own hands and beat that person up but what I can do is make other parents aware of the sniveling little drug dealing punk cowards who try to hook kids on drugs I watch and take note, I know they sneak around like little weasels spreading their poison to young kids,, It has to stop! the wrongs have to be righted sometime, and by who is the question...to let this go on and on and on somewhere, sometime someone has to stand up and voice it...THIS IS GONNA STOP! Your gonna take your drugs and leave this town, If more people cared this would not happen, if the parents would ban together and watch each others children and chase these punks away as a group, sitting on your hands and keeping quite isn't gonna work! Change needs to come, and whatever form it takes or whomever brings the change for better is the gist of this...NOTHING gets resolved by sitting on it and not saying anything, ignoring the problem doesn't make it go away it gets worse and worse until finally someones child dies because of drugs that some piece of shit dealer gave them. sometimes you just have to stand and fight for what you believe in, I don't want to offend anyone or make anyone mad! I was raised and taught to always stand for what I believe in! I am a patriot I believe in what is right and good and what is best for the people! If you want to call me crazy that is fine, if you want to call me a nut that is fine...it is of no consequence I want to be that eagle that watches over the innocent, I want to be that hawk that swoops down and destroys the snakes that destroy young lives with drugs. I want to see my children grow up in a beautiful happy place.. and if that makes me a bad person then I guess it just has to be that way!!! God Bless America and all of her people!
#15 Apr 6, 2013
So as long as people agree with you everything is fine. I see, exactly what kind of person you are !!!!
#16 Apr 12, 2013
Who paying his legal bills in that lawsuit that man brot against the cuty for his wife? Who gonna pay?
#17 Apr 12, 2013
Liberal or conservative? Not that it matters in a local election.
Just trying to size you up.
Since: Apr 13
Location hidden
#18 Apr 13, 2013
I am a Libertarian! I am a Constitutionalist! Yes I agree party lines do not really matter in a local election, but no matter what party is in office they still have mandates set for them by the state constitution and state law. When those laws are not followed by government the people end up paying the price.
United States
#19 Apr 13, 2013
Did you vote for Obama !!!!
#20 Apr 13, 2013
Shouldn't that come In the form of a question? Why all the exclams?!!!!!!!!! Did you vote?!!!
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PC Games
This page contains Bejeweled Twist Hints for PC called "Survivor Planet challenge" and has been posted or updated on Feb 28, 2010 by deda.
Boxshot & Details
- Developer: Popcap
- Publisher: Popcap
- Genre: Puzzle Matching
- Release: Oct 27, 2008
- ESRB: Everyone
Survivor Planet challenge
If the Doom Gem has the number 12, the other bomb gem is same, and your move remaining is 10, twist anywhere until the challenge has been completed.
Report Problem
Please Submit a Problem for any incomplete, non-working or fake cheat listed above.
If you know other secrets, hints, glitches or level guides, then please Submit your Cheats and share your insights with other gamers.
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From: mohd haidir
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text:
It is a mistake to assume that content development is an assumed talent, or that it can be an afterthought in the digital marketing realm. Content strategy is more than writing for the web. There is a science and strategy behind developing quality content for web pages, blogs, advertisements and social media. And although every successful copywriter must have a foundation of basics writing skills, such as subject matter expertise, an engaging style and tone, and basic grammar usage, there is much more to being a content king.
Sep 14, 2010
Encoding.com, an encoding service provider, released Mobile Made Easy, a collection of video encoding presets designed to meet the specific video requirements of all popular mobile phones. With this new product and its existing iPhone and iPhone streaming presets, Encoding.com reports that it now offers encoding services to 80% of the smartphone market. Mobile Made Easy aims to simplify the encoding process, requiring users only to select the applicable preset button and specify source and destination locations; Encoding.com's cloud-based service then prepares the video for delivery via the content producer's web server.
Among the organizations making use of Mobile Made Easy is Nature Education, a part of Nature Publishing Group. Nature Education is using Encoding.com's service to make Scitable, an open-access science library, available on all popular mobile phones. The mobile version of Scitable was launched on August 25.
(www.encoding.com; www.nature.com)


text:
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Krönke Bolsters Championship Lead with Imola Win
June 21st, 2016 by Rachael Whiteford, Images by Hugo Luis
The iRacing World Championship Grand Prix Series arrived at the Autodromo Enzo e Dino Ferrari in Italy for Round Nine of the championship and the first race at the newest circuit on the iRacing service. Martin Krönke entered the weekend on 288 points as the championship leader over Greger Huttu in second on 275 points … Read the Rest »
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The Outlaw Modified Series headed to Round 9 at South Boston Speedway with eight different winners in eight races. Coming off his first win the week before at Thompson Speedway, point leader Donny Moore looked to be the first two-time winner of the campaign. Series fast-guy Phillip Temples took advantage of his pole position start … Read the Rest »
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Scoot rolled from the speeding black car's open door like a man happy to be free. The landing was rough; nevertheless, he stuck it as if he were a gold-medal winning gymnast. Stony pavement scratched the bottoms of his bare soles. The blossoming morning sun creased his eyes. His stomach growled. He looked up at … Read the Rest »
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новости на русском
azərbaycan dilində
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Azerbaijani tourists begin to spend more
12 June 2014 [11:35] -
The counter services occupied one of the leading positions in international economic relations of Azerbaijan, which totaled $ 3.6 billion in the first quarter of 2014, according to the balance of payments posted on the website of the Central Bank of Azerbaijan.
The services worth in the amount of $2.5 billion were provided by non-residents to residents of Azerbaijan, according to the report. Azerbaijani residents have provided services worth $1.1 billion to the residents of foreign countries during the reported period.
Some 11.8 percent in the balance of counter services accounted for transport services. In total, transport services were rendered at $419.7 million. Some 45.3 percent of them is accounted for transport systems of foreign countries used by the Azerbaijani residents. The cost of transport services rendered by Azerbaijani residents to non-residents amounted to $229.6 million.
In January-March, the cost of tourist services provided to foreigners visiting Azerbaijan totalled $606.8 million. Some 33.5 percent of these services were provided to non-residents visiting Azerbaijan on business trips.
In turn, tourist services provided to the Azerbaijani residents by foreign countries increased by 24.4 percent compared to the same period last year, amounting to $814.3 million. Some 64.1 percent out of the spent fund s accounted for services of personal nature.
Thus, the share of counter services in the total volume of export-import operations of Azerbaijan with foreign countries amounted to 27.3 percent in the first quarter of 2014.
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24 June 2016 [16:17]
Azerbaijan, Russia ink deal on Green Card System
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President Aliyev meets high-ranking US State Department official
Negative interest rates in European banking system influence Azerbaijan
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Screenwriter David Hayter (X-Men, Watchmen, The Scorpion King and the upcoming Black Widow movie) will adapt Michael Morici's comic ReincarNATE for the small screen, according to The Hollywood Reporter. Read more...
Turns out, Iggy Azalea isn't such a Black Widow after all… On Sunday, the Fancy rapper announced on Instagram that she broke up with fiancé Nick Young because she is "unable" to trust him. In case you didn't hear, in March, a video leaked where the basketball star admitted to cheating on the 26-year-old. Related: Iggy Azalea [...]
A look at three of the Big Two's big books from last week.
This black widow is showing her fangs.
The 'Strip Panel Naked' comic series deconstructs the ocular manipulation tricks of 'Black Widow #1.'
This week the ridiculous Civil War rages on! But only kind of, and really just against Tony Stark. Black Widow goes back to basics, The Squadron Supreme continue to be not so supreme, and I have officially dropped Patsy Walker! Read...Show More Summary
The "Black Widow" rapper cited trust issues as the reason for the break-up.
Cris "Cyborg" Justino says her black widow bite was so bad, she required hospital care... but says she's confident she'll resume MMA training as early as next week. As we previously reported, Cyborg was bit by the venomous spider while…
Apparently, she's human after all... 'cause UFC superstar Cris "Cyborg" Justino says she's in all sorts of pain after being bit by a BLACK WIDOW SPIDER!! Cyborg says she was working in her garden last week when the spider appeared and sunk its…
Stacey Castor, 48, was serving 51 years to life at Bedford Hills Correctional Facility for Women in Westchester County when she passed away on Saturday morning.
Investigators in New York are working to figure out how a convicted female killer dubbed "The Black Widow" died behind bars. The post "Black Widow" Stacey Castor, Who Killed Husband With Antifreeze, Dies Behind Bars appeared first on CrimeFeed.
Notorious black widow Stacey Castor has passed away in prison at the age of 48. CBS News reports that the woman was serving 51 years to life in a women's correctional facility in New York when she died on Saturday under circumstances that have not yet been publicized. Show More Summary
Do you really want to understand yesterday's massacre of innocents –and the facts of ISIS intentions and recruitments? What's it mean for ISIS to publish a "hit list" of 8,000 Americans? How do they recruit and activate their killers? ...Show More Summary
There are so many Marvel heroes in Captain America: Civil War that it almost feels more like a bridge between Avengers: Age of Ultron and Infinity War than a Cap sequel. Directors Joe and Anthony Russo did a fine job of juggling multiple...Show More Summary
Marvel delivers plenty of war, urges you to "Vote Loki," goes undercover with "Black Widow" and reveals the man behind the mask in "Iron Man."
Watch an animatic version of a cut scene from Captain America: Civil War, where friends Captain America and Black Widow trade blows.
Last week I found a black widow in my mailbox. Luckily, it was during the day so I spotted it right away. But we often pick up the mail at night. I told Carla about the spider and now she is nervous about getting the mail. I just ordered this motion-activated mailbox light on Amazon for $12. I hope it does the trick.
What does it feel like to be bitten by a black widow spider? This question was originally answered by Brad Porteus on Quora.
One of the big surprises going into CAPTAIN AMERICA: CIVIL WAR was the reveal that Black Widow would be fighting alongside Team Iron Man. While she'd only met Steve Rogers as recently as the first AVENGERS film, the two got a lot closer when they want on the run from S.H.I.E.L.D. Show More Summary
Want to see an unused action sequence involving Captain America and Black Widow in Captain America: Civil War? Is Spider-Man 2 the greatest Marvel Comics adaptation ever made? Which new characters is Supergirl adding in its second season?...Show More Summary


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Plus: A bit of Brexit drama, and Heather Lind's breakout.
New York City residents are joining cultural institutions in droves, a perk of signing up for IDNYC, the city-issued identity cards.
'Blackness in Abstraction' gathers artworks spanning seven decades, by 29 international artists.
This week, producers announced a flurry of closing dates for musicals, most surprisingly 'Shuffle Along.' Meanwhile, the winner of the 2016 Tony Award for best play, 'The Humans,' is moving to a new theater and there is a new Shakespeare in town.
Sculptor David Brooks disassembled a 1976 John Deere 3300 combine harvester for a new exhibit at the Aldrich Contemporary Art Museum in Ridgefield, Conn.
For the past 30 years, the owner of 'Les Fleurs d'Été Dans un Gobelet' thought of it as a pretty little picture. It turns out it's a pretty little picture by the French master Paul Gauguin.
Each year, the New York Asian Film Festival and Japan Cuts: Festival of New Japanese Film introduce New York audiences to the latest waves in popular Asian cinema.
Airwayv, a new audio theater company, creates and distributes original scripted programming via podcasts and downloads.
International Center of Photography's exhibition space on the Bowery opens Thursday with 'Public, Private, Secret,' which reflects the center's effort to reposition itself as a public commons for talks on visual culture.
'Eclipsed' will open next spring at San Francisco's Curran, 'Hamilton' stars seek new horizons and Broadway sings in response to Orlando shootings in this week's Backstage Buzz.
Ralph Gardner visits Kehila Kedosha Janina, the last remaining Romaniote synagogue in the Western Hemisphere and a center for Greek Jews that dates back to 1927.
Davis translated French Cubism into an unmistakably American idiom.
A singer sails the Amazon; a couple escapes prejudice; an erotic pièce de résistance.
New York City residents are joining cultural institutions in droves, a perk of signing up for IDNYC, the city-issued identity cards.
No one will quite replace the late photographer, whose presence at an event told you it was worth attending.
"To Kill a Mockingbird" is poised to take center stage once again, with a new Broadway production of Harper Lee's classic 1960 novel in the works. The move marks a reversal for the author.
The daily $10 ticket lottery for the popular Broadway musical "Hamilton" will temporarily go digital starting on Tuesday, producers announced. A look back at the best "Ham4Ham" shows that were staged before each lottery drawing.
Actor James Earl Jones joined the Speakeasy podcast to discuss returning to Broadway in "The Gin Game," the diversity of "Star Wars" and being approached still for having voiced the iconic villain, Darth Vader.
Actor Andy Mientus currently stars in the Broadway show, "Spring Awakening," in a unique production of the rock musical that combines deaf and hearing actors.
Colleen Quinn, of the New York Police Department, went from yoga skeptic to yoga teacher and now shares techniques for freeing the mind and body of stress with her fellow officers in the 109th Precinct.
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David Burnett, Lillian Bassman, Simen Johan and more in this week's On Photography.
László Moholy-Nagy was an artist who evangelized new technologies.
Band of Skulls' new album and an unplugged concert reveal a group with plenty of musicality at any volume.
Content engaging our readers now, with additional prominence accorded if the story is rapidly gaining attention. Our WSJ algorithm comprises 30% page views, 20% Facebook, 20% Twitter, 20% email shares and 10% comments.
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Army Reserve's 163rd Ordnance Company returns
Soldiers from the Army Reserve's 163rd Ordnance Company returned from deployment on Saturday. They had been stationed at Camp Buehring in Kuwait since September. About 45 soldiers returned home to friends and family at the Tustin Armed Forces Reserve Center. The soldiers are ammunitions specialists and mechanics, said Sgt. Felix Fimbres, public affairs representative for the 311th Sustainment Command.
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Uncork'd Entertainment have acquired North American rights to The Hollow, written and directed by Miles Doleac and starring James Callis, Christiane Seidel, Jeff Fahey, William Sadler, William Forsythe and David Warshofsky. The deal will be officially announced in Berlin. The film, produced by Historia Films, chronicles the murder of a senator's daughter in Mississippi.
Uncork'd Entertainment have yet to announce rollout plans but are planning a festival run for the film prior to general distribution. The title was licensed by Jeffrey Cooper at Cut Entertainment Group.
Official Synopsis: When a U.S. congressman's daughter passing through a small town in Mississippi dies in a mysterious triple homicide, a team of F.B.I. agents descend to investigate, the team's brilliant but jaded lead agent battling demons both past and present, as his beautiful, tough-as-nails partner tries to hold him and the case together. They find a struggling and corrupt sheriff's department, a shadowy and much-feared figure, who seems to be pulling all of the town's strings from his mansion on the edge of town and a local victim with a strange connection to a number of the town's most prominent figures.
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- Telepaths' Tree Set to Release New Indie Horror Game 'Inner Chains' - June 28, 2016
- The Official 'The Girl with All the Gifts' Trailer is Here! - June 27, 2016


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Photoshop Fun!
The SA Forum Goons have pulled out their Photoshopping hats (you know, the ones with the pink feathers in them) and have started cracking on Osama Bin Laden's Mountain Fortress. Ever wonder what the headquarters of the international terrorist looks like?
Wow! Make a beeline (whatever the hell that is) for the Bin Laden Mountain Fortress Photoshop section and check out what you're missing!
We clear up the BREXIT for confused Americans wondering why the global economy is collapsing this time.
BEEP! BOOP! ZAP! Video games aren't for my dad anymore! Because he's dead.
Insanely twisted and messed up stick figure families... holy sh*t...
with a slight motion of his hands, he appeared to remove and then reattach his thumb repeatedly
Mission: Unwatchable, now in glorious Italian 3D!
The Something Awful front page news tackles anything both off and on the Internet. Mostly "on" though, as we're all incredible nerds.
Copyright ©2016 Rich "Lowtax" Kyanka & Something Awful LLC.


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A special set of elliptical satellite orbits are described which allow preferential coverage of one parameter over another. According to a first modification, the orbits are retrograde, and preferentially cover one geographical location or time of day as compared with another. A second modification uses prograde orbits and allows the apogee of the orbit to be offset a constant amount with respect to the sun, to thereby cover a different time of day relative to the others. According to a special preferred mode of the invention, the apogee is always pointing towards the sun.
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The Palestinian Authority denied reports that P.A. officials asked the European Union to blacklist Hamas as a terrorist organization. The reports, from Israel Radio and the European Union, say that representatives of P.A. Prime Minister Mahmoud Abbas asked the European Union to put additional pressure on Hamas to accept a cease-fire with Israel.
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A Florida rabbi protested Donald Trump – and lost his job
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American Denim - Emily DiDonato steams up Nino Muñoz's lens for the fall 2012 campaign from denim label True Religion. Emily poses alongside male model Ryan Heavyside in the studio images styled by Katie Mossman. The autumn designs were inspired by the American spirit and individual style. … [Read more...]
Gisele Bundchen Gets Sexy in A Campaign for Her Brazilian Intimates Collection
Intimate with Gisele - Gisele Bundchen strips down to lingerie looks for the second collection of her namesake intimates line launched in partnership with Hope. The Brazilian beauty was captured by Nino Muñoz (Stockland Martel) and styled by Katie Mossman for the sultry studio images. / Hair by David von Cannon, Makeup by Maud Laceppe … [Read more...]
Hilary Rhoda in Sporty Beachwear for Vogue Spain, Shot by Miguel Reveriego
Sun-drenched - Brunette beauty Hilary Rhoda relaxes at the beach with a story featured in Vogue Spain's June issue. Photographer Miguel Reveriego captures the top model gearing up for a swim session in the sexiest bathing suits of the season chosen by stylist Katie Mossman. Slicked back, wet hair by Rutger and tanned skin by make up artist Itsuki complete the smoldering beach … [Read more...]
Aline Weber by David Vasiljevic for Vogue Turkey May 2012
Queen of the Rodeo - Aline Weber taps into her inner cowgirl for the May cover shoot of Vogue Turkey. In front of David Vasiljevic's (Trouble Management) lens, the Brazilian stunner wears a wardrobe of all western inspired looks styled by Katie Mossman. With the help of hair stylist Tyron Machhausen and makeup artist Bok-hee, Aline delivers editorial gold in the designs of … [Read more...]
Marique Schimmel by Benny Horne for Harper's Bazaar Australia March 2012
Age of Aquarius - Marique Schimmel plays the role of sea siren for Benny Horne's (Community NYC) sultry story featured in the March edition of Harper's Bazaar Australia. Swathed in a wardrobe of glittering and sheer looks from the likes of Giorgio Armani, Ralph Lauren and Christopher Kane styled by Katie Mossman; Marique wows with wet hair and sun-kissed makeup. / Hair by … [Read more...]
Daga Ziober by Sebastian Kim for Vogue Germany January 2012
Roaring Twenties - Daga Ziober dons 1920's inspired ensembles for Sebastian Kim's energetic studio shots taken for the January issue of Vogue Germany. Outfitted by fashion editor Katie Mossman, Daga makes a delightful vision in sparkling dresses and fringe from labels such as Etro, Tom Ford and Yves Saint Laurent. A flapper bob by hair stylist Franco Gobbi and matching red lips … [Read more...]
Rosie Huntington-Whiteley by Greg Kadel for Harper's Bazaar US
Spring Forward - Rosie Huntington-Whiteley is looking towards blue skies for the December-January edition of Harper's Bazaar US. The British model turned actress gets swathed in tribal inspired prints from the spring season in Greg Kadel's dynamic images. Styled by Katie Mossman, Rosie delivers editorial gold in the colorful designs of Burberry Prorsum, Derek Lam, Bottega … [Read more...]
Crystal Renn by Sebastian Kim for Vogue Germany October 2011
As Time Goes By - Photographer Sebastian Kim and fashion editor Katie Mossmann reunite once again for a story of vintage glamour in the October edition of Vogue Germany. Channeling the classic style of Rita Hayworth, Katharine Hepburn and Joan Crawford, Crystal Renn dons autumn looks from the likes of Balenciaga, Lanvin, Rick Owens and Miu Miu in the dark portraits. Multiple … [Read more...]


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Family Fun Crafts: 16 Craft Ideas for Kids
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US: SEC claims insider trading from Pepsico Wimm-Bill-Dann buy
The US Securities and Exchange Commission has begun legal proceedings against unidentified buyers of Wimm-Bill-Dann securities after allegations of insider trading ahead of the Russian dairy company's proposed sale to PepsiCo.
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June 6, 2016
The Best Protein Pancakes
Protein pancakes! made in a blender with no refined grains, no refined sugar, and loads of healthy proteins. I reeeeeeally like where this is headed.
Pan-Cakes! Pan-Cakes! Pan-Cakes!
With peanut butter and chocolate chips and a little bit of maple syrup, which is just how I ate them growing up, post-swim-team practice, sometimes mushed together into a big pile of "scrambled pancakes" because me and my teenage squad didn't know what we were even doing with a pan and a spatula, but we knew we needed those chocolate-kissed carbs in our systems immediately, stat, SOS, even if it meant squished together into pan remnants topped with sprinkles and chocolate chips and syrup.
This is that, reincarnated.
Grown up. Diva Status. Healthier. More Delicious.
Also: I don't really swim anymore. I'm having a mid-post moment of sadness about that. I should get back into the pool routine again, right? The water is seriously so cold sometimes that I would consider not going just to keep my body from freezing solid, but really, I should get back in. Swimming gave me the hungriest appetite ever, and these days with my *literal* job being making food and eating? Yes and yes. We need to make these two things work together.
Pretty sure I once wore a t-shirt that said swimming is life, the rest is just details. Anyone? Ironically this is still true for me still except it's about food. Food is life and the rest is just details and PLEASE someone make that into the next gen of those t-shirts. I will be at the front of the line when you launch.
Friends, may the odds be ever in your favor to have protein pancakes for breakfast all summer long. So you can swim or get your brain and body powered up do whatever else it is that you do.
Like, just try to look at this and tell me it doesn't look good for you.