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Solar Energy Companies in Peru
Category: Energy & Renewables ×
Subcategory: Solar Energy ×
Location: Latin America ×
Location: Peru ×
Solar Media Ltd
based in UNITED KINGDOM
Solar Media Ltd. is a diversified publishing and events business, servicing the global solar energy supply chain. With a portfolio consisting of print and digital publishing and a growing number of international conferences and exhibitions, Solar Media provides its clients with a comprehensive platform for international business within the solar energy sector.
based in Victoria, BRITISH COLUMBIA (CANADA)
FTS is a leading manufacturer of remote environmental monitoring systems, instrumentation and communications technology. We focus on hydrology, fire weather and specialized meteorological applications. Our equipment forms the backbone of some of the world`s most sophisticated and demanding environment monitoring networks. For over 3 decades, FTS weather and water ...
E Instruments International, LLC
based in Langhorne, PENNSYLVANIA (USA)
E Instruments International, LLC leads in designs, manufactures and markets a complete range of innovative instrumentation solutions encompassing Combustion Gas Analyzers, Emissions Analyzers, Indoor Air Quality, and Calibration equipment especially designed for the power, process, industrial, institutional, food, and HVAC markets. Customer Support and Applications ...
Epiphany Solar Water Systems
based in New Castle, PENNSYLVANIA (USA)
Epiphany Solar Water Systems (SWS) began in 2005 when Tom Joseph and Henry Wandrie first conceived of a simple and inexpensive method of distilling water with concentrated solar energy. After receiving seed funding from Innovation Works (a PA Ben Franklin Technology Partner) in 2009, a team of diverse and highly skilled individuals was secured to undergo the project. ...
NOV Mono - Mono Pumps Ltd
based in Audenshaw, UNITED KINGDOM
NOV Mono is a global manufacturer of progressing cavity pumps and pump parts and has a wide product range suitable for the pumping of fluids within the waste water, chemical, food, beverage, paper, mining, mineral processing, marine, agricultural and oil and gas sectors.
SPIG S.p.A
based in Arona, ITALY
SPIG is a global turn-key Cooling Systems supplier. Since its establishment, the Company has been providing the customers with an increasingly extensive range of high quality Cooling Towers Air Cooled Condenser and related Services. Since its inception thousands of tailor made Cooling Systems have been installed thanks to the core competence of interdisciplinary ...
SolarOne Solutions, Inc.
based in Needham, MASSACHUSETTS (USA)
SolarOne Solutions, Inc. manufactures commercial-scale, solar-powered lighting for use in a variety of outdoor applications such as parking lots, streets, pathways, pedestrian areas, landscapes, outdoor signage and shelters.
Sonnenkraft UK Ltd
based in Colchester, UNITED KINGDOM
SONNENKRAFT has been at the frontline of the solar energy business since 1992. But times are changing and the need for effective and pollution-free energy solutions are bigger than ever before. More recently, even families are showing an increasing demand for energy solutions that make their homes less polluting, more cost efficient and independent. At SONNENKRAFT we are ...
Delta-T Devices Ltd
based in Cambridge, UNITED KINGDOM
Delta-T offers a wide range of data loggers and sensors able to measure and record hydrological, meteorological and other environmental parameters. Our products provide direct measurements of the forces and effects that renewable energy and other environmental technologies attempt to harness, control or monitor.
Procal - Parker Hannifin Corp
based in Peterborough, UNITED KINGDOM
Procal design and manufacture continuous emissions monitors suitable for applications that come under the European Large Combustion Plant and Waste Incineration Directives. These monitors are also used on US EPA approved sites. Certified under MCERTS for the measurement of NO, SO2, CO, CO2, H2O, and providing information as required for compliance with EN14181, Procal ...


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Mark Rolston
Actor Mark Rolston Movies / Films:April Apocalypse (2013) Saw VI (2009) Asylum (2008) Saw V (2008) Aliens (1986) aka Alien 2, Alien II (1986)
Reviewed Movies Starring Mark Rolston
Asylum (2008)
Six unsuspecting college co-eds discover their dorm was once the site of a notorious insane asylum infamous for conducting gruesome lobotomy's on its teenage inmates during the 1930's. When…
Alien 2 (Aliens) (1986)
I have watched this movie when I was a pre-teen at the cinema, and MY! It completely blew me away. It has got my adrenalin pumping so hard that I almost wanted to slip back to my seat and take a breather!…

subset: commoncrawl


text: KING: Trina Interview & Photos From Summer Issue By XXL Staff May 17, 2010 12:03 PM Share on Facebook Share on Twitter Category: Affiliate News Share on Facebook Share on Twitter More Send to a friend! Print this page Pin it! Reddit This! Share on Tumblr! Recommended For You Around the Web Best of XXL Rappers Who Starred in a Television Show 22 Rappers With Their Own Liquor Lines 22 Aftermath Artists Who Have Left The Label 25 Lawsuits Filed Against Rappers So Far This Year


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Client handout: Parasite prevention for the indoor-only cat
Use this client handout to teach pet owners about the risks of parasites for indoor-only cats.
Apr 01, 2014
Download this client education tool to hand out to pet owners—or use it as a cheat sheet to tackle tough client conversations about parasite prevention for indoor-only cats.
Hot topics on dvm360
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Aug 26, 2015
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Jul 24, 2015


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Choose a News item and you can browse, search, and post messages.
[Fixed] Windows Package Building Issues
Dear R-Forge Users,
Style guide / coding conventions for the micEcon project
The micEcon project has published a style guide for its R code (and that may also be used by other projects / R packages):
[CRAN like check]
Dear R-Forge-Users,
[Fixed] Package Building Issues
Dear R-Forge Users,
Package Building Issues
Dear R-Forge Users!
RecordLinkage back on CRAN
The memory access errors that lead to package RecordLinkage being archived have been fixed and the package is available on CRAN again.
Version 1.8-1 now on CRAN & New technical report
This is to announce that Version 1.8-1 of the surveillance package is now on CRAN. The update was made to make the newest functionality for the spatio-temporal modelling of count data time series and point processes available. A comprehensive document describing what spatio-temporal modelling is possible with the package can be found in the Arxiv report:
dcGOR published online
The dcGOR package (http://dcgor.r-forge.r-project.org) for analysing ontologies and protein domain annotations published in PLoS Computational Biology (see http://dx.doi.org/10.1371/journal.pcbi.1003929)
synbreed 0.10 now on CRAN
A new version of synbreed is now available on CRAN. Due to the policies of R we removed the beagle.jar file from the package. If you like to use the beagle option for imputing, the explanation of how to use it is provided in the manual of the codeGeno-function. Get the package from http://cran.r-project.org/web/packages/synbreed/
sampleSelection 1.0 released
The recently released version of the sampleSelection package has the version number 1.0, because we consider the package now to be mature and feature-complete. Compared to version 0.6 of the sampleSelection package (which is described in an article in the Journal of Statistical Software [1]), the new version has, for instance, following new features:


text:
PhotoForum at 2015 Pingyao International Photography Festival
September 21st, 2015
Exhibition banner, photograph credit: Barney Brewster, Shrouds c. 1980 (detail).
Collective Passion – Singular Visions
PhotoForum – A New Zealand Legacy
19 – 25 September 2015
Pingyao International Photography Festival
Pingyao, Shanxi Province, China
An exhibition of over 70 digitally presented images selected from the History in the Taking exhibition and PhotoForum at 40 book, offering the largest photography festival in China an insight in to the influence of PhotoForum on the photographic cultural landscaper of New Zealand over the last four decades.
Supporting exhibition information:
Wall text banner [pdf]
List of works banner
Ephemera banner
Note: for best viewing of List of works & Ephemera banners, click on loaded images to enlarge.
Two Rooms: Greta Anderson, Joyce Campell, Conor Clarke
September 20th, 2015
Two Rooms
16 Putiki St, Newton, Auckland
Gallery hours: Tue to Fri 11am – 6pm, Sat 11am – 3pm
Phone 64 (9) 360 5900
2015 Pingyao International Photography Festival, China – Tony Carter (NZ) and Kirk Crippens (USA)
September 18th, 2015
Close to Home and Far Away
Photographs by Tony Carter (NZ) and Kirk Crippens (USA)
Curated by John B. Turner for the 2015 Pingyao International Photography Festival, Pingyao, Shanxi Province, China, 19 – 25 September 2015.
"If a man does not keep pace with his companions, perhaps it is because he hears a different drummer. Let him step to the music which he hears, however measured or far away." Henry David Thoreau (1817 – 1862)
This exhibition is a lot to do with human aspirations. Not everyone can be rich or wants to be. But wherever we fit on the socio-economic scale, our character is shaped by our life experience and our imagination. Tony Carter and Kirk Crippens know this and it is reflected in their approach to environmental portraiture. These portraits represent a collaboration between strangers, and in this case, the people, like the photographers are from very different places, far from one another, sharing a new-found connection.
Kirk Crippens' people live in the wealthy US city of Portland, Oregon, which prides itself on promoting individualism. Tony Carter's people live in Ohura, a run down New Zealand mining town of 130 inhabitants west ot of Lake Taupo. Crippens' investigation, 'Portraitlandia,' was made in response to a popular television comedy series, 'Portlandia', which satirises the city of 600,000 as a hub of liberal politics and alternative lifestyles. His mix of imaginative characters suggests a high level of personal reinvention and tends to confirm Portland as a consumerist paradise. Carter's concern is to capture an overlooked aspect of New Zealand life that is more akin to its raw pioneering days.
Both photographers, like the US philosopher Henry David Thoreau, perceive difference and nonconformity as an expression of people being true to themselves. No matter what adversity they may have encountered in their lifetime, the people in these photographs are confident enough to let the photographer enter their homes or personal spaces to reveal as much as the eye can see.
John B Turner
Images & information for this exhbition can be viewed at John B Turner's website
McNamara Gallery Photography, Whanganui: New gallery focus
September 17th, 2015
Gallery Letter#41 (11 September 2015), from McNamara Gallery Photography:
'Following our September 2015 exhibition we are closing our Wicksteed Street exhibition space.
Our gallery office, print & book store, and print viewing [by appointment] will operate from 3 Rees Street, Whanganui.
Our gallery focus, in this our 14th year, is on outreach exhibitions, print viewings, on-line exhibition postings, catalogue & book sales, and as a resource for the medium of photography.
Our revised gallery contact details, and city visits itinerary, are published on our website Information page to facilitate client/curator appointment-based meetings and print viewings.
We are dedicated to exhibiting and promoting lens-based media, and exploring the range of practice, both materially [the photographic object] and conceptually. To date, we have exhibited the work of 113 photographers.
Our resource functions include: consultation [AIPAD member], research, publications, public presentations, public gallery curator assistance/facilitating loans, and private viewing of photographs & publications. Included in our outreach exhibitions are 30 in public galleries.
We are also an image resource for publications and book/CD covers. Our image library is much more extensive than those posted on our website Artists page.' Paul McNamara
McNamara Gallery Photography Ltd
190 Wicksteed Street
Whanganui 4500
New Zealand
AIPAD member
*06 348 7320 / 027 249 8059
New address/phone change effective 26 September 2015:
3 Rees Street, Whanganui 4500
ph 06 345 8466
Peter McLeavey Gallery, Wellington: Antumbra – performance & photography
August 31st, 2015
Peter McLeavey Gallery
147 Cuba St
McNamara Gallery, Whanganui: Mark Adams
August 30th, 2015
Clevedon garden, 1978 – George Brown / Ihaka Paraone
September 4 – 25* 2015
Reception with Mark Adams, 5.30pm Friday 4th September
1978 images of a domestic garden, in Clevedon, which was full of carvings by George Brown / Ihaka Paraone.They stand in an unfamiliar relationship to the received assumptions about the carving 'traditions' and the carving histories as they have presented to the NZ public thus far.
The photographer says: "Looking at George's garden with its Arawa whakapapa of carved stories, including the migration tradition, I saw Pakeha me standing there looking at and PAST those works to their context. An isolated farm house on a dairy farm where George lived alone, his family having moved into town."
Earlier work by this photographer can be viewed here
This exhibition leads into our next touring out-reach exhibition: Celebrating Wood: back to the future; photographs by Laurence Aberhart accompanied by university & museum collection items, and scientific exhibits, selected by the host venues in response to the photographs.
McNAMARA GALLERY Photography Ltd
190 Wicksteed St. WHANGANUI 4500
Tuesday / Wednesday – Saturday 11 – 3 [often open to 6] or by appointment
* Please check website INFORMATION page for occasional closed days due to travel commitments
06 348 7320 / 027 249 8059 email@example.com
Massey & Syacruse Universities: Exhibition & Symposium in Wellington
August 28th, 2015
reflex, figment Exhibition
Shannon Te Ao, Richard Bell, Stu Foster + Kura Puke, Karl Fritsch + Gavin Hipkins, Jeremy Millar, Dane Mitchell, Sally J. Morgan, Morgan + Richards, Anne Noble
2 – 18 September 2015
Opening Tuesday 1 September 2015, 7.30 pm
Engine Room
East End Block 1,
Massey University
63 Wallace Street, Entrance C
Curated by Heather Galbraith, in conjunction with the Triggering Memory symposium, 1–2 September 2015, a partnership between Massey University, Syracuse University and The Memory Waka.
Reflex, figment is supported by Whiti or Rehua School of Art, College of Creative Arts Toi Rauwharangi, Massey University.
A Massey University-Syracuse University-Memory Waka partnership presents the Triggering Memory Symposium to be held:
1-2 September 2015
The Pit, Te Ara Hihiko
College of Creative Arts
Massey University
Wellington, New Zealand.
Registration now available.
Triggering Memory Symposium 2015
What initiates the willed or involuntary process of recall when memories might be, as A. S. Byatt describes, "taken out, burnished, and contemplated"? Sensory experiences, places, objects, images, language, rituals, and therapy are some of the means by which memory is evoked. Distinguished speakers from a variety of fields in New Zealand representing Massey University, The University of Auckland, Te Papa, and AUT, will be joined by artists and scholars from Syracuse University, United States, to present their perspectives on 'triggering memory'.
For full details including presenters list please refer [pdf] Triggery Memory_2015
To register please go to: https://triggering-memory-symposium.lilregie.com/
Photobook New Zealand 2016: Venue announcement
August 27th, 2015
Photobook New Zealand is delighted to announce that Massey University's College of the Creative Arts has become a supporter and will provide the venue and technical support for our event.
Photobook New Zealand is New Zealand's first photobook fair. The event will run in Wellington from 11 – 13 March, 2016, during the New Zealand Festival Writers' Week when the city is buzzing with cultural activity.
Massey's beautiful, well-equipped Te Ara Hihiko complex, in Tasman St, will host the bookfair and the exciting programme of talks and events. The Massey building offers the advantages of an auditorium and flexible spaces for bookfair exhibitors and informal talks and discussions.
Combining the different elements in one spacious building will allow book fair exhibitors to attract the audience attending the talks programme and make an easy flow between both parts of the programme. Tasman St is also close to Wellington's CBD and the complex also offers plentiful parking.
Photobook New Zealand is currently signing some exciting Australian and New Zealand presenters for our programme. We'll also shortly be announcing our Boosted funding initiative which will give people the opportunity to help us fly.
Photobook New Zealand is organised under the auspices of PhotoForum NZ. Website:photoforum-nz.org/photobooknz
If you'd like to receive updates about Photobook New Zealand, please email us at email@example.com
AIPA Workshops & Conference – Sept & Oct 2015
August 19th, 2015
The AIPA has a few events coming up that might be of interest to PhotoForum members:
AIPA Photo Academy Workshop:
How to Plan and Execute a Photo Story (with Arno Gasteiger)
Date: Saturday, September 12th
Time: 9:00am to 5:30pm
Format: Full day workshop
Venue: White Studios, 30 Burleigh Street, Eden Terrace, Auckland
More info here
AIPA Photo Academy Workshop:
Using Adobe Lightroom to Process and Organise Images (with Leon Rose)
Date: Saturday, September 26th
Time: 9:00am to 1:00pm
Format: Half day workshop
Venue: White Studios, 30 Burleigh Street, Eden Terrace, Auckland
More info here
Image Nation 2015 Photography Conference
Date: Monday, October 19 & Tuesday October 20
Time: 9:00am to 1:00pm
Format: Two day conference
Venue: Q Theatre, 305 Queen Street, Auckland
Speakers Include: Nels Israelson, Sean Izzard, Peter Bennetts, Lisa Reihana, David Cook, Fiona Quinn + 4 more to be announced
More info: http://imagenation.co.nz/
AIPA: Advertising & Illustrative Photographers Association
Phone: +64 9 849 5728
Email: email@example.com
Website: www.aipa.org.nz
Facebook: www.facebook.com/aipa.org.nz
Massey University, Wellington: Peter Turner Memorial Lecture
August 17th, 2015
Massey University
Peter Turner Memorial Lecture 2015
Paul Seawright
Landscapes of Conflict: Photography, Society and Contested Space
Paul Seawright is acclaimed internationally for his photographic depictions of the contested, peripheral and marginal spaces of political and social conflict. Beginning with his own work on the conflict in Northern Ireland Paul Seawright will discuss how he and other artists have extended the possibilities of photographing conflict in an era corrupted by mainstream media representations. His photographs of the theatre of war as played out in the internal landscape of the US newsroom reveal the media itself as the creator of illusion and entertainment.
His lecture will also explore the interconnecting threads that run through much of his work – from investigatons of the minefields and battlesites of the Afghanistan war to his more recent work about subtle and invisible sites of conflict found in prosaic urban environments – such as the listed dwellings of sex offenders and the invisible sites of military recruitment across the USA.
Paul Seawright is Professor of Photography and Head of Belfast School of Art at the Ulster University. In 2002 he was commissioned by the Imperial War Museum London as War Artist for Afghanistan and his photographs of battle-sites and minefields have subsequently been exhibited in more than 20 countries. In 2003 he represented Wales at the Venice Biennale of Art and in 1997 won the Irish Museum of Modern Art/Glen Dimplex Prize. He has published seven monographs on his multiple award winning photographic projects.
The Peter Turner Memorial Lecture 2015 is a free event and we are kindly asking you to register your attendance here peter-turner- lecture-2015.lilregie.com as there are limited seats available.
Wednesday 9 September 2015
5.30–7 pm
The Pit, Te Ara Hihiko, Block 12
Massey University, Wellington Campus
Entrance E, Tasman Street
Free Parking


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Use Windows 10's individual display scaling to perfect your multi-monitor setup
Want to boost the scaling on your 1080p monitor by a little and your 4K display by a lot? With Windows 10 that's an easy fix.
How to play DVDs in Windows 10 for free
Regretting the loss of DVD playback on your fancy new Windows 10 upgrade? Here's how to get that capability back for free.
Google search tweak helps you avoid long lines at local shops
Got a hankering for coffee but can't stand the thought of waiting in line? Google search on mobile can help you figure out if that's likely to happen.
How to download Windows 10 ISO files
Want to stash an ISO of Windows 10 on a thumb drive or your regular hard drive? Here's how to do that.
Windows 7 holdouts: Why diehard users refuse to move to Windows 10
We asked, you answered. From legacy software to pure suspicion, the people speak about why they're staying right where they are, thank you.
Set Windows 10's Wi-Fi connections as metered to download forced updates at your own pace
Want to avoid Windows updates downloaded to your PC automatically? Setting your connection as metered can help avoid that.
How to schedule when Windows 10 updates restart your PC
You can't choose which updates to download in Windows 10, but you do have a say about when they're installed. Here's how to schedule Windows 10 updates.
This awesome micro PC and its accessories look like giant Lego bricks
Looking for a PC that's a little out of the ordinary as a basic entertainment PC? How about one built entirely out of Lego?
3 tips for a hassle-free Windows 10 upgrade
Even if you aren't part of the first wave that's getting Windows on July 29, your upgrade shouldn't be far behind. Here are a few things you can do to get ready.
Windows 10 installation files already sneaking onto Windows 7 and 8 PCs
'Twas the night before Windows and all through the house, not a creature was stirring, not even a clicky mouse. The PC was running in the basement with care in the hopes that Cortana soon would be there.
How to use Windows 10's Task View and virtual desktops
Task View and virtual desktops are two powerful new Windows 10 features. Here's how to use them.
LinkedIn brings back simple, instant contact exports following user outrage
The power of the crowd has stopped a new data export process from LinkedIn dead in its tracks--at least until LinkedIn can figure out how to make its new feature faster.
Optional Windows 10 utility blocks bad updates from messing with your PC
You can't stop the downloads from happening before they land on your Windows 10 PC with this utility, but you can rollback your system and then block them.
Google's Nest smart thermostat yanked from the Apple Store
HomeKit-enabled devices are slowly rolling into Apple's world, and Google's Nest Learning Thermostat is rolling out.
Hilarious Google Maps easter egg answers age-old question: 'Are we there yet?'
Google Maps ain't taking your sass this summer, missy, so watch it!
Articles by PaulNext Page
Most Commented


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Taking a long flight in coach? Here's why you should pack a bib.
If you find yourself itching to have the latest gadget, take comfort knowing you're not alone. Roughly half of Americans cut back on other expenses just to be able to afford new technology, according to CNBC's All-America Economy Survey. Show More Summary
It's easy enough to say the Chinese economy is slowing down and that is creating problems for some other countries around the world. Never settle for such a comfortable understanding! Might there be deeper ways to think about the problem? I am not endorsing any of the following speculative hypotheses, rather they are attempts to […]
Markit's US Services PMI printed a healthy 56.1 for August, rising for the 2nd consecutive month, comfortably beating expectations and giving The Fed more ammo for a September hike. This rise was achieved despite the weakest rise in new work in 3 months. Show More Summary
"Although this has some elements of giving comfort to the market, this is more about giving a real boost to the real economy so the government can continue to have its 7 percent growth rate fulfilled", said Liu Li-Gang, China economist at ANZ Bank in Hong Kong. "As the world's second largest economy, we require
China is using cash to prop up its stock market. It is injecting funds into the economy to try and spur growth. It is trying to manage the devaluation of the yuan. Despite all of that chaos, observers take comfort from the knowledgeShow More Summary
The S550 Hybrid lets its owners plug in to gain limited pure electric miles in this opulent and comfortable sedan, or just push this big, powerful sedan to high-20s average fuel economy.
The move appeared to be a response to signs that the economy was slowing too fast for comfort and could raise tension with trading partners like the United States.
Well, the San Francisco Bay Area startup-for-everything economy has now reached a new low: Interested, eh? Well, there are plenty of details. I personally take comfort from the pledge that the people paid to drag my trash can will be...Show More Summary
Seating, comfort and food is all well and good when you?re talking about airplanes, and on a recent flight on the Virgin Atlantic 787 Dreamliner, we can confirm they?ve done a good job - particularly in the economy seats, which are far...Show More Summary
With stocks just 1-2% from record highs, because China is fixed, oil is recovering, Europe is awesome, and gas prices are low? it appears the talking heads forgot to tell the 'people' how great things are. Bloomberg's Consumer Comfort index plunged (by the most since Sept 2014) to hover at 18 month lows... Show More Summary
Consumer confidence declined to a five-week low as Americans continue to question the future state of the US economy. The Bloomberg Consumer Comfort Index retreated to 42.4 in the period ended July 19 from 43.2. That index has plummeted...Show More Summary
Well, sorta. Union leadership apparently isn't as comfortable with the Sanders brand of socialism as it is with the Clinton brand. Richard Trumpka, President of the AFL-CIO, sent out a memo this week: His message wasn't anything new for the federation's state leaders: They know that endorsement decisions belong to the national leadership. Still, it […]
Vehicle Style: Medium sedan Price: $45,990 (plus on-roads) Engine/trans: 120kW/340Nm 2.0 turbo diesel 4cyl | 6sp automatic Fuel Economy claimed: 5.7 l/100km | tested: 8.9 l/100km OVERVIEW Updated for 2015 with a sharper snout and more...Show More Summary
Categories: Afternoon Coffee Tags: General News US spending increased in May to its highest level in 6 years. And, Consumers are increasingly confident about the US economy as well, the latest Bloomberg Consumer Comfort Index showed. The index came in at 42.6 this week. Afternoon Coffee brings you the latest in procurement and supply chain news. (Read more...)
This is a continuation on my series about how to get the best prices and routings to Europe. Now I'll talk about how to make it more comfortable and one of the few cases where status matters: international flights in economy class. Previous Installments: Coach Getting Too Pricey? Check out Business Class to Europe Pick the Best Days to [...]Show More Summary
If you're traveling this summer, you might want to take a look at this new airplane seating chart. The new seating plan introduces several new Economy classes as well as designated spaces for notoriously annoying passengers. via TheCooperReview.com This post originally appeared on The Cooper Review. Show More Summary
MRI Systems Market to 2020 Focus on Patient Comfort and Operational Efficiency, with Growth Driven by Developing Economies" discusses the market, competitive landscape, and trends for three MRI systems market segments: High-field, Mid-field, and Low-field MRI systems. Show More Summary
David Smith sets us straight on this one: One of the most enduring claims about the British economy in recent years is that the then coalition government abandoned austerity in 2012. It is a claim that gives comfort to those who see everything that has happened to the economy through the lens of fiscal policy. […]
You have to get rich these days just to finance a comfortable retirement. That's the conclusion financial advisors are increasingly coming around to, as they gauge the direction of the economy in a strange new world of glacial growth and super-low interest rates. Show More Summary


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Military Base Realignments and Closures:
Transfer of Supply, Storage, and Distribution Functions from Military Services to Defense Logistics Agency
GAO-08-121R: Published: Oct 26, 2007. Publicly Released: Oct 26, 2007.
Additional Materials:
- Full Report:
- Accessible Text:
(202) 512-4523
Office of Public Affairs
(202) 512-4800
As a result of the 2005 base realignment and closure (BRAC) round, the military services are required to transfer to the Defense Logistics Agency (DLA) all of their supply, storage, and distribution functions at specified depot maintenance locations that are collocated with a DLA distribution depot. These transfer actions are part of a larger BRAC recommendation, commonly referred to as the Supply, Storage, and Distribution (SS&D) recommendation, that is intended to reduce both the number of supply distribution depots and related excess capacity, while providing the Department of Defense (DOD) with a logistics base that saves money and enhances the effectiveness of logistics support to operational forces. There has been disagreement among the services and DLA about whether certain personnel positions that include functions inherently involving both supply and maintenance operations at the services' industrial depots should transfer to DLA as part of this recommendation. The Air Force, Navy, and Marine Corps reached agreement with DLA about these positions in January, February, and April 2007, respectively. After repeated opposition to the transfer of certain positions, in July 2007 the Army agreed to comply with direction from the Office of the Secretary of Defense (OSD) on the specific functions and positions to transfer. DLA subsequently submitted its draft business plan for implementing the SS&D recommendation to OSD for approval on September 18, 2007. Because of the broad congressional interest in the implementation of the 2005 BRAC round recommendations, we prepared this report under the Comptroller General's authority to conduct evaluations on his own initiative. Our work was in response to concerns raised by several congressional offices about possible inefficiencies and disruptions in depot maintenance production that could potentially generate higher costs at the department's depot maintenance activities and affect equipment readiness during a critical time for maintenance and support of our nation's warfighters. Our objectives were to determine (1) what efforts have been made to determine which supply-related functions will transfer to DLA, (2) what are the military services' key concerns in implementing the transfer of functions, (3) the extent to which DLA's plans establish a transfer process that minimizes disruptions depot maintenance, and (4) what are the estimated costs and savings associated with implementing this transfer of functions.
DLA and the services have taken several actions in an effort to reach agreement on which SS&D functions and related positions and inventories are to transfer to DLA as a result of implementing the 2005 BRAC SS&D recommendation. These actions have been ongoing since late 2005 when DLA began its planning process for implementing the consolidation of SS&D functions across DOD. Some key actions include defining SS&D functions at the beginning of the planning process, contracting a study to assess the effects and risks associated with the transfers, establishing integrated process teams to work through problems and concerns and identify potential solutions, and conducting detailed analyses of depot positions to identify transfer candidates. DLA has also worked with the services to develop comprehensive action plans that include specific and detailed actions that identify each task's duration, including start and completion dates; percentage completed; organization and personnel assigned; criticality of task; and milestones. Although the services have reached agreement with DLA on the specific functions to be transferred, officials from all of the services have expressed concerns in four key areas regarding the transfers. First, officials from all of the services expressed concern that the insertion of DLA into the internal operations of their depot maintenance activities may hinder their ability to meet depot production schedules and maintain equipment readiness. Second, depot maintenance officials expressed concern that if the transfer of functions to DLA takes place using DLA's existing price structure, it would increase the cost of depot maintenance operations and the depots will have to pass these additional costs on to their customers by increasing their hourly rates, which, in turn, would affect their operation and maintenance budgets. Third, officials from each of the services expressed concern about the future maintenance, upgrades, and usage of service information technology systems transferring with depot maintenance supply functions to DLA. Fourth, depot maintenance and service officials expressed concerns about several human capital issues, ranging from turnover among affected employees and limited promotion potential to the possibility of outsourcing transferred positions to the private sector. The extent to which any of these concerns may actually materialize is unknown, as implementation has not yet begun. DLA is developing plans to minimize the risk of disrupting depot maintenance, but it faces several challenges. In addition, DLA plans to time phase the transfer of SS&D functions across the implementation period, which extends to September 2011. Our analysis of the BRAC Commission cost and savings estimates and DLA's planning documents shows that over the fiscal year 2006 to 2011 BRAC implementation period, estimated costs have increased by about $45 million and estimated savings have decreased--by about $1 billion--for transferring the SS&D functions and associated inventories from the military services' industrial depots to DLA.
Oct 1, 2015
Ford Class Aircraft Carrier:Poor Outcomes Are the Predictable Consequences of the Prevalent Acquisition CultureGAO-16-84T: Published: Oct 1, 2015. Publicly Released: Oct 1, 2015.
Tricare Pharmacy Pilot:Improved Monitoring Needed with Expansion of Pilot RequirementsGAO-15-768: Published: Sep 30, 2015. Publicly Released: Oct 1, 2015.
Sep 30, 2015
DOD Contract Services:Improvements Made to Planning and Implementation of Fiscal ControlsGAO-15-780: Published: Sep 30, 2015. Publicly Released: Sep 30, 2015.
Sep 28, 2015
DOD Financial Management:Continued Actions Needed to Address Congressional Committee Panel RecommendationsGAO-15-463: Published: Sep 28, 2015. Publicly Released: Sep 28, 2015.
Sep 21, 2015
- Department of Defense's Waiver of Competitive Prototyping Requirement for the Air Force's F-15 Eagle Passive/Active Warning and Survivability System (EPAWSS) ProgramGAO-15-800R: Published: Sep 21, 2015. Publicly Released: Sep 21, 2015.
Sep 17, 2015
Prepositioned Stocks:Marine Corps Needs to Improve Cost Estimate Reliability and Oversight of Inventory Systems for Equipment in NorwayGAO-15-651: Published: Sep 17, 2015. Publicly Released: Sep 17, 2015.
Sep 9, 2015
Defense Infrastructure:In-Kind Construction and Renovation Projects Initiated by DOD during Fiscal Year 2013GAO-15-649: Published: Sep 9, 2015. Publicly Released: Sep 9, 2015.
Military Compensation:DOD Needs More Complete and Consistent Data to Assess the Costs and Policies of Relocating PersonnelGAO-15-713: Published: Sep 9, 2015. Publicly Released: Sep 9, 2015.
Sep 3, 2015
Military Personnel:Additional Steps Are Needed to Strengthen DOD's Oversight of Ethics and Professionalism IssuesGAO-15-711: Published: Sep 3, 2015. Publicly Released: Sep 3, 2015.
Aug 27, 2015
Weapon System Acquisitions:Opportunities Exist to Improve the Department of Defense's Portfolio ManagementGAO-15-466: Published: Aug 27, 2015. Publicly Released: Aug 27, 2015.
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With No Rings Till The End Of The Year Star Wars saga has new secrets Drew Goddart opened 3 mysteries about Martian MORE ›
Lyrics/song texts are property and copyright of their owners and provided for educational purposes only.
Call Me Mavy Lyrics
Call Me Mavy Song Lyrics
Good morning, Mavy wavy
I wanna go out and see the world.
Whoa whoa honey, you're too young.
I'm 118 years old.
Don't give me the pouty bat face.
My 118th birthday.
Dads throwing a big party.
Monsters are coming today.
But I just wanna get away.
Been stuck here in this Hotel.
Left for the moon, and I feel
Looking for someone to tell.
And now you're in my way.
Your stare was holding
Cargo shorts, blue skin showing
( ) ball world wind blowing.
Who beats me?
Where do you think your going, baby?
Ok, you win.
All this bacon.
Ah ha ha ha. No, get them off.
Two, Three, Four
Hey, you're a human.
(Hi, human)
( ) crazy. (crazy)
Cause I'm a vampire.
What's your name?
But call me Mavy.
And all the zombies.
Try to chase me.
But here's my number.
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Hey, you're a human.
Sorry, I, I just – I gotta get used to that.
Go – go – do your thing.
Cause I'm a vampire.
But call me Mavy.
And all the zombies.
Try to chase me.
But here's my number.
So call me maybe.
Before you came to Hotel T
I missed you so bad.
I wish you know that
I missed you so so bad.
Before you came to Hotel T
I missed you so bad.
It makes my dad mad.
It makes him real real mad.
Go to the corner, you're in a time-out.
I'm a grown man
Seriously dad.
Hotel Transylvania Song List
›Call Me Mavy
Traci L
›Hush Little Baby
Adam Sandler
›Daddy's Girl
Adam Sandler
›Sexy And I Know It
›Where Did The Time Go Girl
Kevin James, CeeLo Green
›Sweet 118
Andy Samberg
Peter Tvrznik
›The Zing
Robert Smigel, Adam Sandler and Dennis White
›Problem (The Monster Remix)
Becky Gomez feat. Will i Am


text:
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Hotel Sumireh
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TripAdvisor Reviews Hotel Sumireh Sendai
Travel Blogs from Sendai
Day 45: Zao Onsen
... WE LOVED: - getting off the bus and being told that although scientists have warned of seismic activity we shouldn't be too worried (but 2/3 cable cars were out-of-use, along with various paths and areas including the Okama crater lake) - the buffet in our restaurant serving almost everything from steak to sashimi: so ...
Let the Adventure begin - First stop.
This is our first layover for a few days. We are hoping to spend a day touring and then a day to tour and enjoy lunch with our friend Yuko. The house that we are staying at is incredibly beautiful. We are up the side of a cliff with lots of stairs and very steep small road up so no worries about getting exercise. The sun ...
The perils of walking alone in the dark
... the day, Shibuya if I recall correctly, and grabbed a bite to eat on the way there.
We ate our fill, headed towards the station, and said our goodbyes. I promised I would let them know whether we would be able to meet up that night and hopped on a train towards Tokyo Central, where I was planning to shoot myself off north like a speeding bullet with one of the, you guessed it, bullet trains.
I enthusiastically proclaimed Sendai, sumimasen!, got my ticket, and, after ...
... and a trinket shop. Down the narrow side alleys are dozens of tiny bars and restaurants, each with only 2 or 3 tables or 5 bar stools. Then there'll be a little shrine tucked away in the back, the incense mingling with the smell of Japanese beer.
At dinner the second night our new friends, who ordered everything so we don't know what we ate, suggested a couple of days in Matsushima, one of the most beautiful spots in Japan. ...
Samurai Houses and a paradise bay
We left the Onsen in the morning and went back to Kakunodate to visit the Samurai houses. At the station you can always leave the baggage in coin lockers, so we could make the walk through the town in a more relaxed way.
Unfortunately it was pouring rain that we became wet - even with the umbrellas and were happy to get inside these samurai houses. They are very big, some of them even free of charge to visit
Later we travelled ...


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text:
|Número de publicación
|Tipo de publicación
|Número de solicitud
|Fecha de publicación
|27 Mar 2001
|Fecha de presentación
|28 Sep 1998
|Fecha de prioridad
|28 Sep 1998
|También publicado como
|Número de publicación
|Mehdi Vaez-Iravani
|Cesionario original
|Kla-Tencor Corporation
|Exportar cita
|BiBTeX, EndNote, RefMan
|Citas de patentes (15), Citada por (91), Clasificaciones (9), Eventos legales (4)
|Enlaces externos: USPTO, Cesión de USPTO, Espacenet
1. Field of the Invention
The present invention relates generally to the art of optical inspection of specimens, such as semiconductor wafers, and more specifically to a massively parallel inspection system having relatively large fields of view.
2. Description of the Related Art
Optical inspection techniques for small specimens, such as features on semiconductor wafers, have previously utilized confocal microscopy to locate and examine the desired site. Confocal microscopy or confocal imaging each provide a variety of limitations, most particularly a relatively narrow field of view, or spot width, depending on the desired resolution of the image received and the overall quality of the components employed.
The essence of confocal microscopy or confocal imaging is to perform a double imaging of the specimen utilizing point illumination and a point detector. For example, the use of confocal imaging entails focusing a beam transmitted and reflected on the semiconductor wafer using an objective lens, wherein the area examined at any given time is on the order of 20-50 microns on each side. The problem with this narrow field of view is that inspection of a wafer having dimensions in excess of 100 square inches can be extremely time consuming.
Further, this single spot inspection system, wherein inspection comprises scanning using a single narrow spot, requires two dimensional scanning. In such an arrangement, the single spot passes over a linear portion of the sample while recording data, then moves one spot diameter or a fraction of a spot diameter over and passes over the next linear portion of the sample while recording data. The system thus iteratively progresses through inspection of the wafer using this stepping technique.
Different methodologies have been employed to improve the throughput of confocal microscopy and inspection systems, but these systems typically address improving scanning speed and accuracy using the smaller spot width mentioned above. The use of large spots removes much of the confocal advantage and is therefore undesirable.
Systems employing beam expanders have been utilized previously, but such systems have been directed toward alignment issues. Such a system is illustrated in U.S. Pat. No. 5,231,467 to Takeuchi et al. The Takeuchi system provides a compensating optical system which utilizes a diffraction grating on a semiconductor wafer to diffract the incoming light beam. However, this does not significantly alter the area on the specimen which can be observed in a given time period, but rather provides position alignment assistance when different wavelength light is used on the two samples to be aligned.
Further, systems employing multiple spot confocal imaging have also been available. U.S. Pat. No. 5,737,084 to Ishihara illustrates a system in which a multi-spot confocal arrangement is used to measure three-dimensional shapes. U.S. Pat. No. 5,248,876 to Kerstens et al. describes a similar system for imaging at different heights. In both these systems an array of pinholes is utilized both with and without an accompanying lens array in front of an extended source of light to generate a plurality of point sources. These point sources are then brought into focus on the sample by the action of an objective lens. The reflected beams are directed back through the same pinhole array, or another matching array of pinholes. One drawback of such an approach is that the illumination position and collection pinholes must be precisely matched over the entire array. This requires a very high degree of mechanical stability, and implies a relatively large sensitivity to unwanted vibrations. Even in a situation where the illumination and collection pinhole arrays are one and the same, as in the case of U.S. Pat. No. 5,737,084, the relative size of the pinholes with respect to the eventual pixel size in the detector array still requires precise alignment between the detector and pinhole arrays. A further problem with the identical illumination/pinhole array arrangement is the possibility of stray light that may find its way onto the unintended detector pixels. Special precautions are thus necessary to eliminate this risk. In addition, the patent only describes a system capable of generating a sampled version of the image of the object under examination. No provisions are made for the scanning of either the beams or the sample to cover the entire sample, and no methodology is taught to achieve the same. It is important to note that the scanning action in a multi-spot system should ideally be different from that practiced in the a case of a single spot system so that proper advantage is taken of the multiplicity of the beams.
Yet another consideration that pertains to these references is the fact that they rely on a precise action of the microlens/pinhole structures to generate high quality beams for each individual focal spot. This precision may not be easily attainable, particularly for applications in very high resolution imaging, where the quality of the wavefront in each beam is paramount.
An important aspect of current scanning applications is the operation of such a system as a dark-field imaging/inspection system. This issue is addressed in U.S. Pat. No. 5,248,876, which teaches the use of polarization, and polarization rotating components, to separate scattered radiation from the spectrally reflected light. Such an approach has undesirable consequences in that it essentially transforms the system into a polarizing microscope and requires the use of polarized light of a given direction to image the specimen. This polarization method also requires the use of two orthogonal polarizers in an arrangement, with one being positioned annularly with respect to the other, which forms the central region of a circular aperture. In dark-field imaging/inspection, the ability to respond to all features regardless of the specificity of their orientation or polarization behavior is extremely important. The inability to provide this feature is a significant drawback.
The references cited above also only address usage of multiple normally, or nearly normally, incident beams with respect to the sample. They do not teach the methodology under which the multi-spot arrangement could be used in obliquely incident configurations, where great advantage is gained in detecting minute defects on the surface of specimens such as silicon wafers.
It is therefore an object of the current invention to provide a system for increasing the inspected area of a confocal microscopic system, thereby increasing throughput, while at the same time offering minimal optical or confocal degradation under both brightfield and darkfield scanning.
It is a further object of the current invention to provide a system for optical inspection which has improved throughput performance and does not require significant modifications to existing hardware or software.
It is still a further object of the current invention to provide a system for detecting defects on a semiconductor wafer, the system having the ability to detect defects in a relatively short time period.
It is yet another object of the current invention to provide an optical inspection system which is relatively impervious to mechanical vibrations and stray light, and does not require precise alignment between detector and collection array.
It is yet another object of the current invention to provide a darkfield imaging optical inspection system which does not require use of polarized light of a given direction in the imaging process, and responds to all features irrespective of the specificity of their orientation or polarization behavior.
According to the present invention, there is provided a massively parallel inspection and imaging system which employs a plurality of focused beams to illuminate the sample. Light energy is emitted from a laser and passes through a relatively low resolution diffraction grating or preferably a digital optical element (multi spot generator). The low resolution diffraction grating concentrates the transmitted energy into multiple discrete directions or orders. The low resolution diffraction grating can be either a linear or two dimensional grating. The beams split by the diffraction grating pass through a telescope and are recombined onto a beamsplitter/scanner and are diverted toward the specimen. On reflection downward, the beams diverge again toward a focusing objective, wherein the focal plane of the focusing objective coincides with the apparent plane of light splitting.
The resultant light thus consists of a number of focused beams, and the sample is illuminated by these beams simultaneously. Upon reflection of the light from the sample, the light passes back through the focusing objective in a number of beams, and the beams converge toward the beamsplitter. The beamsplitter reflects a portion of the energy in the collimated beams. The collimated beams pass through a focusing lens, which brings all beams onto foci on a detector array, which may be one or two dimensional discrete photodiodes, CCD, or any other reasonable detection array.
Scanning in the system may occur in various ways. The system may pass the sample iteratively by scanning it beneath the objective in a raster fashion in the x and y directions, or alternately by spinning the sample about a central axis. Using these types of scanning methods, the position of the focused spots on the CCD or sensor array elements is fixed. Alternately, the system may employ a mechanical raster scanning arrangement of the beams using a scanning arrangement such as a resonant mirror scanner. In this case, both the sample and the beams are mechanically rastered. In this situation, for example, the beams may repeatedly move backward and forward in the x direction while staying fixed in the y direction, while the sample makes smaller movement in the y direction and does not move in the x direction.
Another potential scanning technique for the current invention may be used during the inspection of a patterned wafer. Using motion of both the scanning beam and the wafer, movement of each must be coordinated to properly observe the Manhattan "streets", or tracks of wiring, located on the wafer. To achieve proper orientation and observation, the stage speed in the cross direction is set at the ratio of the distance between the first and last lines divided by the period of the scanner. When the wafer reaches the end of a swath, the scanning must occur in the opposite direction. The same strategy as described above may be employed, with the exception of a reversal of the fast scanning direction, or a re-orientation of the stage or scanner to provide the reverse angular disparity between the scanner and the wafer. This reverse scanning technique may be employed by using a bidirectional scanner such as a galvo mirror and taking data on the reverse path across the wafer. Alternately, the stage may perform a fast return to one swath width plus one pixel from the position where the prior scan began, and the next swath of data is then taken in the same manner as before.
Other objects, features, and advantages of the present invention will become more apparent from a consideration of the following detailed description and from the accompanying drawings.
FIG. 1 illustrates a side view of the inventive massively parallel inspection and imaging system disclosed herein;
FIG. 2 is an alternate embodiment of the inventive system disclosed herein with sensing occurring at an alternate orientation to the specimen;
FIG. 3 presents an embodiment of the system which operates in a dark-field imaging/inspection mode;
FIG. 4 presents an arrangement of the focal spots and the resulting scan line for each focal spot in accordance with the current invention; and
FIG. 5 shows a scanning technique for patterned wafer specimens in accordance with the current invention and the relative orientation of the wafer with respect to the scanning lines, wherein the angles are exaggerated to illustrate the inventive method.
The inventive system herein is intended for use with a readily available wafer inspection platform with modifications to specific portions of such systems.
The present invention employs a plurality of focused beams to illuminate the sample, wherein the light emitted from laser is passed through a relatively low resolution diffraction grating, or preferably a digital optical element (multispot generator). A simplified drawing of the concept employed herein is illustrated in FIG. 1. As shown in FIG. 1, laser 101 passes light through low resolution diffraction grating 102. Low resolution diffraction grating 102 is an array of fine, parallel, equally spaced grooves, or rulings, on a transparent substrate wherein such grooves produce diffractive and mutual interference effects which concentrate the transmitted energy in discrete directions or orders. The low resolution diffraction grating 102 can be either a linear or two dimensional grating which splits the light into a number of orders along a line, or in 2 dimensions depending on the type of grating employed. A digital optical element in this case is an array of repetitive structures which produce a plurality of diverging beams from an input beam. The advantage of digital optical elements is that they can be designed to produce essentially uniform power distribution among the beams, with little wastage.
The beams pass through a telescope 103. At the output of the telescope 103, the beams are recombined onto the beamsplitter 104 and are thereby reflected downward toward the specimen 106. It should be noted that as shown in FIG. 1, the multiple beams converge when emitted from telescope 103 toward beamsplitter 104. On reflection from the beamsplitter 104 downward toward the specimen 106, the beams diverge again toward the focusing objective 105. The focal plane of the focusing objective 105 coincides with the apparent plane of splitting of the light.
The resultant light thus consists of a number of focused beams 109, and the sample is illuminated by these beams simultaneously. Upon reflection of the light from the sample or specimen 106, the light passes back through the focusing objective 105 in a number of focused beams, and the focused beams converge toward beamsplitter 104. Beamsplitter 104 performs a beamsplitting function on the light at this point, transmitting a portion of the light as shown in the form of collimated beams. These collimated beams pass through focusing lens 107, where the focusing lens 107 brings all beams onto foci on a detector array 108. Detector array 108 may be a one dimensional or two dimensional array of discrete photo detectors, CCD (Charged-Coupled Device), or any other reasonable detection array. Since each element of a CCD acts as a confined area independent detector, each point in the array produces an independent confocal imaging signal.
An alternative mechanization is illustrated in FIG. 2. As shown therein, laser 201 provides light energy to the one or two dimensional diffraction element 202, which splits the beam into multiple beams. The light energy passes through beamsplitter 203, and thereafter to telescope 204, which collects the multiple beams. Light then passes to mirror or deflector 205, which expands the light energy toward objective 206, collecting the light and providing multiple beams to sample 207. Light passes back through objective 206, reflects from mirror or deflector 205, passes through telescope 204, and deflects from beamsplitter 203 downward, through focusing lens 208, and onto detector array 209. If the detector array 209 comprises an array of relatively large discrete detectors, a pinhole array 210 is placed in front of the detector in a manner described below.
As may be appreciated by those of skill in the art, the number of spots or points in the array may vary while still within the teachings of the invention and providing larger scan areas than previously known. For example, a 10 spot by 10 spot or 100 spot array may be employed, or a one spot by 10 spot, or 10 spot total array may be created using the diffraction elements and mechanizations illustrated in FIGS. 1 and 2.
FIG. 3 presents an embodiment of the system which operates in a dark-field imaging/inspection mode. As shown therein, the system is similar to that shown in FIG. 2, and all the components illustrated in FIG. 3 have the same functionality as their corresponding components in FIG. 2. A stop, or obstruction, may be placed at focal point 310 in the manner described below.
The configuration illustrated in FIG. 3 utilizes the fact that when a beam of light is focused onto a flat surface, the reflected beam will essentially reconstitute its original shape and size after passing through the same focusing system. Thus, if a physical stop is placed along the reflected path in the path of the beam so that the physical extent of the beam essentially matches the size of the stop, no light reaches any element of the detector. This arrangement results in a low (essentially zero) signal. When the part of the sample directly under each beam is in focus and featureless, the signal due to that part of the sample results in a dark background. In a situation where the portion of the sample under a particular beam has some kind of scattering structure, such as an edge, the scattered part of the beam will cover a greater solid angular distribution than the illumination beam. In this case, the obstruction that is placed so as to eliminate a beam equal in size to the illumination beam is not able to eliminate all of the scattered radiation. Therefore, a certain amount of light which falls outside the diameter of the obstruction reaches the detector and produces a signal. Since this signal only forms in the presence of a scattering feature on the interrogated region of the sample, the system acts as a darkfield imaging/inspection modality.
Where a system employs a plurality of beams as opposed to a single beam, all the beams reflected off the sample re-converge upon the same central region before diverging outward again. It is therefore only necessary to place a single obstruction at this position to ensure that all beams are subjected to dark-field detection.
A prerequisite for maximum efficiency of this darkfield arrangement is that the optical train used to illuminate the sample should be capable of carrying higher spatial frequencies than those required to constitute the illumination foci. This condition implies that the numerical aperture of the focusing system must be larger than would normally be required to generate the required spot size of each beam. Upon illumination only the relatively central region of the illumination optics is utilized. However, the scattered radiation from each interrogated part of the sample fills a larger part of the aperture, thus producing a plurality of larger sized beams. The central portion of these beams is obstructed by the stop, as discussed above, and the detected signal for each beam is that due to the scattered radiation, indicating dark-field imaging/inspection. In practice, such an arrangement is easily implemented, especially, but not exclusively, when a two dimensional fanning of the beams is used. Such an approach constitutes a fast inspection methodology, since the size of each beam can be substantially larger than would be the case for high resolution microscopy, allowing for a much shorter inspection time per sample. At the same time, the sensitivity of the technique remains high due to the fact that darkfield inspection is employed.
For the system to perform confocal imaging, each detector must effectively be a pinhole. Confocal imaging is best achieved by placing an array of pinholes directly in front of the detector array such that the center of each pinhole is substantially aligned with the center of each element of detector array. In such an arrangement, the axis of each beam passes through the center of its respective pinhole. As is known to those skilled in the art, the size of the pinhole is determined based on the size of the focal spot size of the sample as well as the magnification that exists between the sample plane and the pinhole plane. The pinholes can be produced using a variety of techniques, such as laser drilling, in an otherwise opaque substrate.
Since the size of each pinhole is significantly larger than the corresponding focal spot, the need for precise alignment, and the requirement for extreme mechanical stability of the pinhole array are avoided. In essence, once the stability of the sample/beams combination is assured (a task required of all high resolution imaging), the stability of the pinhole array itself is not critical. This permits both easy operation and alignment of the array.
In the arrangement illustrated in FIGS. 1, 2, and 3, the light beam passes through a beamsplitter, such as beamsplitter 203. The passage of light introduces some spherical aberration between the adjacent beams in the multibeam arrangement. The result of the aberration of the beams passing through the beamsplitter is that the origin of the splitting of the beams appears to move through the axial direction for different angular locations of the beams. The shifting has two components, a relatively large and common component, which can be compensated for by relocating the affected optics, such as the telescope, and a much smaller position-dependent part, which may be negligible especially for relatively thin beamsplitters. Thus the beamsplitting does not significantly detract from overall performance.
Scanning in the system illustrated in FIGS. 2 and 3 may occur in various ways. The system may pass the sample iteratively by scanning it beneath the objective in a raster fashion in the x and y directions, or alternately by spinning the sample about a central axis. Using these types of scanning methods, the position of the focused spots on the CCD or sensor array elements is fixed. Alternately, the system may employ a mechanical raster scanning arrangement of the beams using a scanning arrangement such as a resonant mirror scanner. In this case, both the sample and the beams are mechanically rastered. In this situation, for example, the beams may repeatedly move backward and forward in the x direction while staying fixed in the y direction, while the sample makes smaller movement in the y direction and does not move in the x direction.
The arrangement of the focal spots and the resulting scan line for each are schematically shown in FIG. 4. The system must ensure that upon the completion of the scan in one direction, proper sampling of data is achieved. Proper data sampling must occur both along the linescan direction and perpendicular thereto. Proper data sampling is achieved along the linescan direction by requiring electronic data sampling as the scan is executed at the required rate. For example, if 3 samples, in each direction, per point spread function (i.e. the optical spot size) are required, then data sampling is generated at a particular detector in the detector array at least 3 times per time period necessary for a sample/beam to traverse each other by a distance equal to the spot size. To ensure proper sampling in the direction perpendicular to the linescan, the system provides for the angle between the columns of the spot array and the fast scan direction to be such that the separation of the scan lines generated by each spot is approximately ⅓ (for 3×3 sampling) of the spot size. Under these circumstances, the sampling per point spread function of each focal beam is the required 3×3. This procedure applies to other sampling schemes as well, such as an A×B sampling, where the sampling along the fast linescan direction will be A times per transit time of the sample over each focal spot. The separation between adjacent lines in this situation will be 1/B of the spot size.
The reconstruction of the acquired two-dimensional image involves a shifting of the sampled data in time such that the displayed or processed data are properly de-skewed. This is easily achieved using ordinary computing techniques, since the system has precise knowledge of the amount of shifting required per channel.
Another potential scanning technique for the current invention may be used during the inspection of a patterned wafer. During inspection of a patterned wafer, a considerable throughput advantage exists for maintaining the Manhattan geometry alignment with the inspection direction. Particular attention must be paid to providing the capability wherein the trace of each scanning beam remains parallel to the "streets" as the scanning beam traverses the wafer. Using dual motion as described above, movement of each must be coordinated to properly observe the Manhattan "streets". To achieve proper orientation and observation, the stage speed in the cross direction is set at the ratio of the distance between the first and last lines generated by the spots divided by the period of the scanner. For example, if the scanner operates at 500 Hz and the separation between the first and last scanner line is 80 microns, the stage speed is set at (80×0.001)×500=40 millimeters/second. The orientation of the wafer with respect to the scanning lines is illustrated in FIG. 5, wherein the wafer 501 is oriented at an angle whose sine is given by:
Note that the angular orientations of the scan direction relative to the stage direction are exaggerated for clarity. This angular orientation and speed calculation ensures that the pattern covered by the scanning beams cover the Manhattan geometric path.
When the wafer reaches the end of a swath, the scanning must occur in the opposite direction. The same strategy as described above may be employed, with the exception of a reversal of the fast scanning direction, or a re-orientation of the stage or scanner to provide the reverse angular disparity between the scanner and the wafer. This reverse scanning technique may be employed by using a bidirectional scanner such as a galvo mirror and taking data on the reverse path across the wafer. Alternately, the stage may perform a fast return to one swath width from the position where the prior scan began, and the next swath of data is then taken in the same manner as before.
In general, if the laser beam is split in two directions using a diffractive element into an n×m array of individual beams, the reflected light is collected and directed onto n×m separate detectors, wherein each detector results in a separate output. Placement of a pinhole in front of each detector provides a parallel confocal system.
An alternate embodiment of the detector or sensor 313 would be a multiple PMT array, or the reflected beams could be focused with appropriate magnification onto a two dimensional CCD array, as shown in FIGS. 1, 2, and 3. The axis of such a CCD array is aligned with the direction of the scan. When using the CCD array, the confocal effect is still attained since any defocus spreads the energy outside the intended pixels. Since adjacent pixels are not used for detection, the reception of photons by these adjacent pixels is of no consequence.
Timing between the sample data from each detector permits the composition of the image in two dimensions, eliminating the beam stagger effect. Such compensation is a software alterable feature which may be performed in real time, or by post processing of data.
In applications where severe requirements exist for the separation of the top layer and the underlying circuitry, such as in the inspection of CMP wafers, the system employs shorter wavelength lasers, such the 266 nm quadrupled Nd system.
With respect to illumination angle, the system may employ normal or oblique angular illumination, and collection can be performed using normal, near normal, single darkfield, or double darkfield modes. In the case of oblique illumination, the two dimensional distribution of the spots causes a level of defocus among the spots. However, for spot sizes desired for some systems, such as 50 by 20 micron spots for a system similar to the SP1 system manufactured by KLA-Tencor Corporation of San Jose, Calif., the degree of defocus is insignificant. The orientation of the spots on the specimen with respect to the scan direction, i.e. the specimen rotation, is similar to that associated with microscopy. The result is m by n concentric circles due to wafer rotation, and separation between the spots as set by the transmission, filtering, and lensing characteristics of the system satisfy any predetermined sampling requirements.
The scattered radiation is collected by the imaging lens and is re-imaged onto the elements of a high sensitivity two dimensional detector array, such as PMT, APD, or photodiode/preamplifier arrays. For near-normal or single darkfield imaging, the system does not provide a defocusing problem due to the imaging lens. The individual detector size of a multiple photodiode or PMT array can range from a 1×1 millimeter area to a 2.5×2.5 millimeter area. Any defocus at the detector plane due to oblique collection simply spreads the energy over a larger area of the intended detector, but still well within the boundaries of the intended detector, thereby inhibiting crosstalk in the detector arrays. Some crosstalk inevitably results in the detector arrays, but such cross talk for particular arrays is of known quantity and can be compensated for. Also, the type of detector used may decrease the amount of crosstalk, as different detectors have known characteristics which provide less crosstalk problems than other detectors.
With respect to rotary scanning devices, such as the KLA-Tencor SP1, the result of the use of parallel detectors is that the instantaneous area being observed is much larger than previous applications. Thus, a system employing the massively parallel arrangement disclosed herein does not require the fast rotation of the wafer, currently at approximately 4500 rpm for the SP1. For an m×n spot/detector arrangement, the rotation speed on average decreases to 4500/ (m×n). Such a speed provides for relatively simple edge handling of the specimen without excessive forces applied thereto.
The current system applies to the scanning of patterned wafers as well. To keep all the points in focus on the wafer, the illumination incidence angle for single darkfield or near normal illumination is kept at or near normal. In near normal illumination, collection optics are fully focused for all points. In single dark field collection, a certain amount of defocus exists among the image points across the field. Since the collection site per element is large, defocus should again not cause excessive crosstalk.
The inspection speed can also be increased from that currently available by incorporating a fast scanner, such as a resonant scanner or polygon, into the design. However, the massive parallelism of the system drastically reduces the required scan speed for the scanner. For example, using a resonant scanner or polygon operating at 1 kHz, together with an array of 10 beams by 10 beams, or 100 beams, provides an equivalent scanning speed of 100 kHz. This provides a faster linescan speed compared with a single AOD or polygon scanner.
While the invention has been described in connection with specific embodiments thereof, it will be understood that the invention is capable of further modifications. This application is intended to cover any variations, uses or adaptations of the invention following, in general, the principles of the invention, and including such departures from the present disclosure as come within known and customary practice within the art to which the invention pertains.
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|Clasificación de EE.UU.
|Clasificación internacional
|Clasificación cooperativa
|Clasificación europea
|28 Sep 1998
Owner name: KLA-TENCOR CORPORATION, CALIFORNIA
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Square Wine Bottles Free Up Storage Shelf Space [Pics]
Stranger & Stranger gives the California Square wine an update through a space-saving packaging design.
Truett-Hurst's California Square wine gets a new bottle design in the form of a square bottle that not only helps wine lovers save on shelf space, but also helps reduce the amount of outer packaging required for the wine.
Designed by Kevin Shaw of branding and packaging design company Stranger & Stranger, the square bottle design features vintage graphics, embossing, and comes in three main accent colors–blue, burgundy, and gold.
The new square design also saves up on cardboard boxes, which in turn can help save on shipping and storage.
The premium bottles made their pre-release debut during the festivities surrounding this year's Emmy Awards. The new bottles will be available at Total Wines in October.
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