text:
Palestinians in Gaza speak of life under Israeli occupation.
"My Nigeria is my earth, my material, my jokes"
16 Dec 2013 23:18 GMT | Politics, Business & Economy, Europe, Germany
Thousands of workers at the world's biggest online retailer have gone on strike in Germany.
They are demanding that Amazon sign a labour agreement based on Europe-wide regulations of the retail industry.
Al Jazeera's Kim Vinnell reports.
Source: Al Jazeera
The system will use unmanned aerial vehicles to deliver items to households within half an hour of ordering them.
Science & Technology, Environment, US & Canada, United States
Top executive says five major publishers discriminated against Amazon because it was setting prices of e-books too low.
Science & Technology, Business & Economy, US & Canada, United States
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Thanks to an innovative relocation programme, the Alameens' lives have changed dramatically after fleeing the war.
Refugees, Germany, Syrian crisis
After extending air war against fighters in Iraq, London contemplates military targets in Syria as well.
War & Conflict, United Kingdom, Middle East
Monsoon storms have wreaked havoc on Myanmar's persecuted Rohingya Muslims.
Rohingya, Human Rights, Weather
Critics lament New Delhi's fading pro-Palestinian stance at solidarity convention as Israel relations flourish.
Palestine, India, Gaza: After the war
Austrian police confirm final death toll, saying the refugees included eight women and four children.
Refugees, Politics, Europe, Mediterranean, Austria
Officials say 82 dead and at least 100 missing after boat sinks off Libyan coast in latest in series of disasters.
Humanitarian crises, Human Rights, Africa, Europe, Refugees
People & Power investigates South Korea's disturbing rise in suicides, particularly among the elderly.
Health, Poverty & Development, South Korea
A story of political skulduggery in Yemen and the high cost to the presidency of alleged collusion with the Houthis.
War & Conflict, Politics, Yemen
South Sudan's president talks about the ongoing violence, internal rivalries, and the future of his country.
Politics, South Sudan, Sudan
The comedian gives an insight into his street-smart Nigerian life as he gets his act together and grows his brand.
Arts & Culture, Africa, Nigeria


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The Top 10 In Action Sports
01À la Recherche du Stoke Perdu: How I Rekindled the Fire After Falling Out of Love With Surfing
02Pacific Paradise: A Journey to the Philippines' Final Frontier
03Surfing is for Sellouts: Why Catching Waves with Just Your Body is The Ultimate Ride
04A Journey Into Darkness: We Went Mountain Biking in the Abandoned Mines of Slovenia
05Against All Odds: The Incredible Story of One Surfer's Battle with his Own Government
06"Strava Has No Place Here" Mountain Biking In India
07Surf. Sit. Repeat. Is a Fake Wave on a Welsh Lake About to Start a Surfing Revolution?
08"Seven Went Up, Only Three Came Down": How The Unsolved Mystery Of The Matterhorn Keeps Our Fascination Alive
09Mad Descents & Lunar Landscapes: Incredible Shots from One of Europe's Best MTB Destinations
10Why Do We Travel?
Atom Elite Knee Pad
A Scoot video by skatehutuk - 477 views
ATOM Elite Knee Pad Available from: http://www.skatehut.co.uk/brands/atom/atom_elite_knee_pad.htm Atom Elite is the sleekest protective gear available whilst still providing maximum mobility and protection. These pads have High- Density EVA foam pads , not just on the knee but supporting the inside and outside areas to provide protection to the ligaments and tendons often injured whilst skating. These pads have a removable hard cap meaning that they also make great gaskets for under your existing pads Sizing- Measure 4" up from the top of your knee cap XS= 10"-12" circumference SM= 12"-16"circumference MD= 16"- 20" circumference LG= 20"-23" circumference XL= 23"+ circumference

subset: commoncrawl


text:
What are the results of the autopsy? Until these are known and made public it would be prudent, especially for the likes of an IDF Brig Gen to keep his mouth shut. Far too often declarative statements are trotted out as a substitute for the truth by Israeli officialdom.
Poland's central bank head calls story of Nazi train find a hoax (Reuters)


text:
Play Paul
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Paul De Homem-Christo is the brother of Guy-Manuel De Homem-Christo of Daft Punk.Read More...
Released Ain't No Ho \ La La Land on DJ Hell's International Deejay Gigolo Records, scooping up remixes from Ed Bangers main names SebastiAn and Xavier de Rosnay (Justice).... So the French House scene is high on his agenda.
Former drummer in heavy metal school bands (Danzig, The Cult, G n' R, Metallica, Megadeth). Member of the French house band The Buffalo Bunch (Roulé, Crydamoure).
A.k.a Dark One, Migrants, Syndicated People Read more on Last.fm. User-contributed text is available under the Creative Commons By-SA License; additional terms may apply.
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text: We're sorry, Vintage Baby Wooden Elephant Book Ends is no longer available Why not try one of these instead? Small Vinyl Record Bookends 45's by Vinyl Village £14$30.33€20.71$23.03 can be personalised Kitchenalia Bookend Range by Susan Bradley Design £18.40$39.87€27.23$30.27 Large Vinyl Record Bookends LP's by Vinyl Village £16$34.67€23.67$26.32 Jungle Bookends by Little Butterfly £20.99$45.48€31.06$34.53 Vintage Baby Wooden Elephant Book Ends by Posh Totty Designs Interiors £18$39€26.63$29.61 7 customer reviews(7) This item is no longer available £18.50$40.08€27.37$30.43 delivery to United States Receive this item 5-10 working days from dispatch International delivery available we're sorry we're sorry, This item is no longer available buy a gift voucher related categories baby & child > children's room accessories > children's decorative accessories > bookends home > home accessories > decorative accessories > bookends by Posh Totty Designs Interiors Location: Brighton, GB read seller's profile see seller's complete range more items from this seller Woodland Friends Bookends £25$54.17€36.99$41.13 Brown Embossed Liquor Is Quicker Hip Flask £17$36.83€25.15$27.96 Set Of Three Wooden Flexible Knights £15$32.50€22.19$24.67 Vintage Style Bicycle Pump £5.95$12.89€8.80$9.78 Brown Embossed Barely Enough Drink Hip Flask £17$36.83€25.15$27.96 Grey And Neon Decorative Placemat £9.50$20.58€14.05$15.62 view all you may also like PRODUCT DETAILS CUSTOMER REVIEWS DELIVERY RETURNS ask seller a question save for later A lovely pair of wooden elephant bookends, a great finishing touch to a child's bedroom or nursery. Brighten up your nursery or shelves with our colourful wooden elephant bookends. Made from wood, these charming bookends have cutouts of two cute baby elephants painted in greens, blues and corals. These little elephants are strong enough to keep your books in place whilst adding a splash of fun to any child's space. made from: Wood dimensions: 14.5 x 16cm product code: 245303 7 customer reviews Mon 22 Dec 2014 Delighted with the Book Ends Fri 04 Jul 2014 Great prompt delivery Sun 01 Dec 2013 No comment supplied. Fri 01 Nov 2013 Beautiful and well made. Look lovely on my daughters shelves. Thu 15 Aug 2013 I love these elephant book ends! They are beautiful but I would say the only thing is that they're not weighty enough, I use them as book ends on an open shelf in my daughter's room and they tend to get pushed off/fall over quite easily as soon as we touch a book. Tue 16 Jul 2013 I bought these for my baby nephews 1st birthday present. They are absolutely beautiful, just what I was looking for. They have a nice weight to them too, I was worried they might be a little light, but they are perfect, thank you! Sun 14 Jul 2013 Exactly what I wanted, looked like the picture and good quality. A lovely addition to my sons nursery. see all customer reviews hide some customer reviews read about our product rating system ratings guide trusted independent customer feedbackforum excellent bad good poor This product is dispatched to you by Posh Totty Designs Interiors. MAINLAND UK order now and receive this item on or before price Standard Delivery Monday 7 September FREEFREEFREEFREE Two Day Delivery Thursday 3 September £6.70$14.51€9.91$11.02 Express Next Day Wednesday 2 September £7.70$16.68€11.39$12.66 Saturday Delivery Saturday 5 September £15.70$34.02€23.23$25.82 NON-MAINLAND UK estimated delivery price Highlands & Islands of Scotland 2-5 working daysfrom dispatch FREEFREEFREEFREE Northern Ireland 2-5 working daysfrom dispatch FREEFREEFREEFREE Other UK Islands 2-5 working daysfrom dispatch FREEFREEFREEFREE INTERNATIONAL DELIVERY estimated delivery price Western Europe 2-5 working daysfrom dispatch £11.50$24.92€17.01$18.91 Rest of Europe 5-10 working daysfrom dispatch £11.50$24.92€17.01$18.91 USA & Canada 5-10 working daysfrom dispatch £18.50$40.08€27.37$30.43 Far East & Australasia 5-10 working daysfrom dispatch £19.50$42.25€28.85$32.08 Rest of the world 5-14 working daysfrom dispatch £19.50$42.25€28.85$32.08 You have 28 days, from receipt of cancellable goods, to notify the seller if you wish to cancel your order or exchange an item. Please note: goods that are personalised, bespoke or made-to-order to your specific requirements, perishable products and personal items sold with a hygiene seal (cosmetics, underwear) in instances where the seal is broken are non-refundable, unless faulty. Read more about our returns policy.Should you choose to return or exchange your order you will need to deliver the item(s) to the UK, where this seller is based. Posh Totty Designs Interiors's return policy


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Feel like home at our free ringtones website, where it's possible to use epic ringtones for your mobile phone. Today we have a ringtone of "Tango suicida" by Extremoduro as well as 369 other ringtones by Extremoduro. "Tango suicida" is the best track from the "Material defectuoso" album that was produced by Extremoduro at their major label together with other 11 tracks. You can listen to all 5 Extremoduro – "Tango suicida" ringtone variations available here and download it for free in few seconds. You can also look at other 10 albums produced by Extremoduro for all time. "Tango suicida" is referred to Rock, and you can download a huge amount of Rock songs absolutely for free. And finally, we have collected lyrics for this track and you can view it here as well. So feel free to browse, listen, download ringtones at Audiko.net. Make your phone sound cool!
Extremoduro Tango suicida Ringtone
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A story about a dog!4.33 / 5.00 6,789 Views
Finger Painting
this art teacher is WHACK!!!!4.21 / 5.00 8,753 Views
TD-The First Day
Meeting new people on the first day can be a real gamble.4.18 / 5.00 4,051 Views
liked the other one better
The other burnt face man was a lot better than this one in my opinion. This seemed to move way too slow and all the dialogue was emotionless. I think the same jokes would have been funnier if it moved quicker.
Nice :)
I Cant Wait To See The Movie, LoL Good Work, Looking Forward For
Burnt Face Man -=2=- :)
Good Work :)
Nice, but i hate to be technical.....
....what was he doing in a smelting factory at the age of 3? :P
Not bad, Salad Fingers was better though.
Craig the Evil Toilet...wasn't that from Fairly Odd Parents?
heh heh
it was was good but u cant weld aluminum cans because aluminum it not a welable metal im not sure about the pot and scissors tho


text:
Rep. John Kriesel has a badass hunting wheelchair [PHOTO]
Retiring Rep. John Kriesel, R-Cottage Grove, had both his legs blown off while on duty in Iraq in 2006, but he doesn't let that stop him from enjoying an active lifestyle, including deer hunting trips to South Dakota.
-- Bob Koss, MNGOP Senate staffer, calls John Kriesel a "piece of shit" -- and gets fired
-- John Kriesel, pro-gay marriage MNGOP Rep., won't seek reelection [VIDEO]
Over the weekend, Kriesel shared a cool picture with his Facebook friends showing how he gets around while he's trying to bag the big one.
Here it is:
"Loving my Action Trackchair. I've been able to creep through the woods like I never thought I'd be able to again..." -- Kriesel
Two working legs or no, the Action Trackchair sure looks like a fun way to cruise through the woods, doesn't it?
-- Hat-tip: Sally Jo Sorensen --
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Learn2Discern - Free Speech Challenged at Arab Festival - Ministry Videos
Embed crm1 1559 views 2010-10-02T01:13:11 The Arabic festival in Michigan is home to 30,000 Arab Americans-many of them Muslim. The city banned Christians from passing out literature on public sidewalks during the festival. Get the whole story on Learn2Discern! Go to www.coralridge.org/equip and find out how you can be equipped to learn2discern media lies and deceptions. Support this ministry and help impact lives: give online or call 1-800-229-9673.
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|Publication number
|Publication type
|Application number
|Publication date
|Mar 7, 2000
|Filing date
|Apr 10, 1998
|Priority date
|Apr 10, 1998
|Fee status
|Also published as
|Publication number
|Vijay Parkhe
|Original Assignee
|Applied Materials, Inc.
|Export Citation
|BiBTeX, EndNote, RefMan
|Patent Citations (9), Referenced by (39), Classifications (8), Legal Events (4)
|External Links: USPTO, USPTO Assignment, Espacenet
1. Field of the Invention
This invention generally relates to semiconductor wafer processing systems and, more particularly, to a process for igniting a plasma to process a substrate, such as a semiconductor wafer, in a plasma processing chamber of a semiconductor wafer processing system.
2. Description of the Background Art
Substrates such as semiconductor wafers are often processed by methods involving the use of plasma in the presence of the wafer or substrate. During wafer processing, the wafer rests on a pedestal containing an electrostatic chuck that can be a monopolar, or preferably, a bipolar electrostatic chuck. Electrostatic chucks contain one or more electrodes embedded within a dielectric material such as polyimide. Such a polyimide chuck is described in commonly assigned U.S. patent application No. 08/744,039, filed Nov. 5, 1996 U.S. Pat. No. 5,885,469, and incorporated herein by reference. When a voltage is applied to the electrodes, charges on the wafer and charges on the electrodes electrostatically retain the wafer on the chuck surface. As such, the wafer is held in a stationary position while being processed.
To accomplish wafer processing, such as plasma precleaning, a wafer is supported in a process chamber upon a pedestal. The pedestal generally contains an electrostatic chuck for retaining the wafer while the wafer is processed, e.g., exposed to a plasma to sputter clean the surface of the wafer. The chuck has one or more electrodes embedded within a chuck body. The chuck body is fabricated of a dielectric such as polyimide, aluminum nitride, alumina, and the like. In a well known manner, a voltage, applied to the electrodes, retains the wafer against the support surface of the chuck by electrostatic force.
An anode electrode is disposed above the pedestal and the pedestal generally contains a conductive element (e.g., a pedestal base) that is used as a cathode. During plasma cleaning of a wafer, a gas such as argon, helium, hydrogen, or a combination thereof is supplied to the chamber and energy is applied between the cathode and anode to produce a plasma. The active gas atoms bombard the wafer and sputter clean its surface. Typically, energy from a direct current (DC) voltage ignites and sustains the plasma. However, a radio frequency (RF) voltage may also be used to sustain the plasma and/or bias the wafer.
More specifically, in a wafer cleaning process, a reactive cleaning gas (process gas) such as hydrogen is introduced into the chamber. The plasma is formed when electrons are stripped from a portion of the process gas atoms to form positive ions. Positive ions and electrons both leak out of the plasma; however, the electrons, being lighter, move faster and therefore leave more rapidly. As a result, the plasma is at an electric potential that is positive with respect to the chamber walls, which are usually at ground potential. Electron bombardment of the surface of the wafer makes the plasma positive with respect to the wafer. This self bias of the wafer causes ions to accelerate towards the wafer and bombard its surface. If the wafer is further biased with an electric potential from a power supply that is substantially negative with respect to the plasma, additional positive ions from the plasma are accelerated towards the wafer.
While the plasma exists in the chamber, voltages on the wafer and the chuck are generally defined by the potential of the plasma. For the particular case that the wafer is allowed to "float" relative to the chamber walls and the chuck, some charge accumulates on the wafer primarily due to bombardment of the surface by energetic electrons from the plasma. However, as the wafer charges, an electric field develops which acts to repel electrons from the plasma. Thus, the potential difference between the plasma and the wafer is self limiting. The potential difference between the plasma and the floating wafer is approximated by the formula: ##EQU1## where ΔV is the potential difference between the plasma and the floating wafer, k is Boltzmann's constant, Te is the electron temperature, mi is the mass of an ion and me is the mass of an electron. Typical values of ΔV are in the range of 1 to 10 volts. This is generally small enough that field emission from the wafer does not occur during plasma processing. However, during plasma ignition, transient bursts of high voltage can cause, under some circumstances, field emission from the wafer.
A plasma in a preclean chamber is typically ignited by a transient burst of high voltage applied to the cathode electrode. The chamber, anode and chuck electrodes are typically grounded during ignition of the plasma. The transient high voltage can be larger than 1000 volts and typically lasts about 1 second, though it can last longer if there are problems achieving ignition. During this transient burst of high voltage, a similarly high transient voltage develops on the wafer. If the voltage on the wafer is large, a substantial electric field exists at the surface of the wafer. If the chuck electrodes are energized during the ignition of the plasma, the transient voltage on the wafer is even higher due to the high electric potential already existing between the chuck electrodes and the wafer.
This high voltage can lead to substantial charging of the wafer through field emission. A similar effect occurs if other components within a pedestal are energized or grounded during plasma ignition including components such as a bias electrode or resistive heater. Charging of the wafer through field emission is undesirable because it leads to substantial charge imbalance between the wafer and the chuck. The charge imbalance results in a residual charge being accumulated on the chuck surface. After the electrodes are deactivated, the residual charge will retain the wafer with such force that the wafer cannot be removed from the chuck. Charging of the chuck surface can also lead to arcing between wafer and chuck that can damage the wafer and/or the chuck.
Therefore, a need exists for a method of protecting a wafer on an electrostatic chuck against charging during ignition of a plasma or other similar high voltage process.
To overcome the disadvantages associated with the prior art, the method of the present invention deactivates the chuck electrodes just prior to a high voltage process, such as ignition of a plasma, and leaves the electrodes deactivated during that high voltage process. It is critical that the chuck electrodes be floating, i.e., not grounded, during plasma ignition. Once the high voltage process has ceased, e.g., the plasma has been ignited, the chuck electrodes can be energized to retain the wafer without risk of charge build up upon the wafer. The invention is applicable to other components within the substrate support pedestal. As such, resistive heater elements and RF bias electrodes used for wafer biasing should be electrically "floating" during plasma ignition.
The teachings of the present invention can be readily understood by considering the following detailed description in conjunction with the accompanying drawings, in which:
FIG. 1 depicts a block diagram of a typical semiconductor wafer process chamber, illustratively, a "preclean" chamber; and
FIG. 2 depicts a flow diagram of the method of the present invention.
To facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements that are common to the figures.
The method of the present invention is applied to a semiconductor wafer processing system such as that depicted in FIG. 1 is best understood in terms of the flow diagram of FIG. 2 which shows the steps to be followed to sputter clean a wafer while the wafer is retained in the chamber using a bipolar electrostatic chuck.
FIG. 1 depicts a schematic, cross sectional view of a plasma processing system 50, known as a "preclean" chamber, for "cleaning" a wafer prior to deposition processing. In the preclean chamber 100, a wafer 102 is supported in the chamber 100 upon a pedestal 101 that contains a bipolar electrostatic chuck 104 and a cathode electrode 120. The chuck 104 has a pair of electrodes 106 and 108 embedded within a chuck body 107 made of a dielectric such as polyimide, aluminum nitride, boron nitride, alumina, and the like. A voltage, from a chuck power supply 150, applied to the electrodes 106 and 108, holds the wafer 102 against the chuck 104 by electrostatic force.
For effective cleaning, the wafer must be able to be chucked and temperature controlled prior to a plasma being ignited in the chamber. Temperature control is established by applying a heat transfer medium (a gas such as helium) between the wafer 102 and chuck 104 to fill the vacuum within the interstitial spaces beneath the wafer. Use of a heat transfer medium, generally known as backside gas, promotes uniform heat transfer between the pedestal assembly and the wafer. Chucking is necessary to ensure that a region of backside gas is maintained between the wafer 102 and the chuck 104 such that the wafer does not "float" off the chuck when backside gas is supplied. To allow for the wafer to be temperature stabilized prior to cleaning, bipolar chucks, which do not utilize the plasma to form a ground path to the wafer and thus do not need the plasma to ensure an electrostatic attraction between the wafer and the chuck, are generally used in preclean chambers because the plasma will not be ignited until the wafer is heated. As such, electrostatic chucks having two or more electrodes can be used in a preclean chamber as long as a bipolar chucking voltage is applied to at least two electrodes. Any chucking voltage may be used with the method of the present invention including DC and AC. Alternatively, although less common in preclean chambers, a monopolar chuck (also known as a unipolar chuck) having a single electrode within the chuck body and utilizing a wafer grounding electrode in contact with the wafer may be used to chuck the wafer 102 without the presence of the plasma 110. By applying a voltage between the grounding electrode and the embedded electrode, the wafer 102 is electrostatically retained on a monopolar chuck without a plasma.
A heat transfer gas supply 130 provides gas for transferring heat between the wafer 102 and the chuck 104. The gas flows through a passageway 109 in the chuck body 107 to the support surface 105 and disperses between the wafer and support surface to improve heat transfer between the pedestal and wafer. Alternatively, the wafer 102 can rest on a biased pedestal having one or more bias electrodes (not shown, but similar to the chucking electrodes) for applying a direct current (DC) or radio frequency (RF) bias voltage to the wafer 102. Furthermore, the pedestal may contain a resistive heater 121 and/or biasing electrodes with or without electrodes for the electrostatic chuck.
An anode electrode 111 is disposed above the wafer 102 and the chuck 104. The cathode electrode 120 is disposed immediately below the chuck 104 and supports the chuck 104 in the chamber 100. Alternatively, the cathode electrode may be formed by additionally or alternatively biasing the walls of the chamber 100 relative to the anode electrode 111. A cathode power supply 122 provides voltage to the cathode electrode 120.
During plasma cleaning of the wafer, a gas such as argon, helium, hydrogen, or a combination thereof is supplied to the chamber, from a gas source 155. Once the chamber has an appropriate gas pressure, energy from a DC voltage supplied to the chamber by the cathode power supply 122 ignites and sustains the plasma 110. The active gas atoms bombard the wafer 102 and sputter clean its surface 103. Alternatively, An RF voltage may be used to produce the plasma 110.
A system controller 160 includes hardware that provides the necessary signals to initiate, regulate, and terminate the processes occurring in the preclean chamber 100. The system controller 160 includes a programmable central processing unit (CPU) 162 that is operable with a memory 164 (e.g., RAM, ROM, hard disk and/or removable storage) and well-known support circuits 166 such as power supplies, clocks, cache, and the like. By executing software stored in the memory 164, the system controller 160 produces control outputs 159, 165, 167, 168, and 169 that respectively provide signals for controlling the heater power supply 161, the gas source 155, the cathode power supply 122, the chuck power supply 150, and the heat transfer gas supply 130. The system controller 160 also includes hardware for monitoring the processes through sensors (not shown) in the preclean chamber 100. Such sensors measure system parameters such as temperature, chamber atmosphere pressure, plasma content, voltage and current. Furthermore, the system controller 160 includes at least one display device 170 that displays information in a form that can be readily understood by a human operator. The display device 170 is, for example, a graphical display that portrays system parameters and control icons upon a "touch screen" or light pen based interface.
The steps of the method of the present invention could be implemented by a suitable computer program running on the CPU 162 of the system controller 160. The CPU 162 forms a general purpose computer that becomes a specific purpose computer when executing programs such as the embodiment of the method of the invention depicted in the flow diagram of FIG. 2. Although the invention is described herein as being implemented in software and executed upon a general purpose computer, those skilled in the art will realize that the invention could be implemented using hardware such as an application specific integrated circuit (ASIC) or other hardware circuitry. As such, the invention should be understood as being able to be implemented, in whole or in part, in software, hardware or both.
Those skilled in the art would be readily able to devise a computer program suitable for implementing the present invention from the flow diagram of FIG. 2. The routine 202 begins with step 204, where the wafer 102 is placed on the chuck 104. To retain the wafer, a chucking voltage is applied to the chuck electrodes 106 and 108. Next, in step 206, the wafer 102 may undergo pre-plasma processing such as heating or cooling by flowing backside gas from the heat transfer gas supply 130 through the passage 109 and/or activating a resistive heater 121 to heat the wafer 102. Wafer cooling is generally provided by a water jacket (not shown) within the pedestal base 123.
Once the wafer 102 is ready for plasma processing (cleaning), the chuck power supply 150 is turned off (or the chuck voltage is reduced) in step 208 and the electrodes 106 and 108 are allowed to float. If backside gas is in use, it must be turned off before the chucking voltage is turned off to prevent the wafer 102 from floating off the chuck 104. In step 210, the plasma 110 is ignited by a conventional process. For example, the plasma 110 could be ignited by applying a transient burst of high voltage to the cathode 120 in a manner well known in the art. Other methods of ignition may be used such as applying a transient burst of high gas pressure to the chamber 100 in conjunction with a RF voltage between cathode 120 and anode 111. Those skilled in the art will be able to devise other methods of igniting the plasma 110 in other chambers such as a coil/microwave driven reactors.
It is critical to the practice of the invention that the chuck electrodes 106 and 108 be allowed to float during the plasma ignition step 210. If the electrodes 106 and 108 are grounded, a path exists for charge to flow from the plasma 110 through the wafer 102 to ground via the chuck 104. Such a current to ground could be quite large and cause damage to or field emission from the wafer 102 and/or the chuck 104.
In step 212, after the plasma 110 has been ignited and the transient high voltage is no longer applied, a chucking voltage can be applied to the chuck electrodes 106 and 108.
Backside gas, if required, can then be turned on. If an RF bias is to be applied to the wafer 102 during plasma processing (before or after the plasma 110 is struck) the chuck voltage applied to the chuck electrodes 106 and 108 should be turned off or reduced first. The chuck voltage can be raised after the RF bias has been turned on. The wafer 102 can now be processed by conventional plasma cleaning methods in step 214.
In the present example, the wafer 102 is sputter cleaned by bombardment with ions from the plasma 110;
however, any plasma process may occur in step 214. Such processes include, but are not limited to plasma ashing, plasma etching, reactive ion etching (RIE), glow discharge sputter deposition, RF sputter deposition, magnetron sputtering, plasma enhanced chemical vapor deposition (PECVD) or any other similar process which utilizes a plasma to process a wafer or similar substrate.
A surge of voltage can also occur when the plasma is turned off. Therefore, the steps of the routine 202 should be performed in reverse order once the plasma cleaning is completed. For example, if the RF bias was turned on after striking the plasma, the backside gas would be turned off;
then the chuck voltage would be turned off (or reduced); then the RF bias would be turned off; and finally the cathode power supply 122 would be turned off.
Although the invention is described in terms of a high voltage used to retain a wafer on a chuck during plasma ignition, the invention may be used with any other high voltage process that produces a large voltage on a substrate retained on a pedestal having one or more electrodes. For example, the method could be applied to a system having a wafer supported on a pedestal containing a conductive element such as a resistive heater 121 or biasing electrode proximate the wafer 102 that, if grounded or powered during plasma ignition, would produce a substantial electric field between the wafer and ground (i.e., via the grounded or powered element). Consequently, the pedestal is susceptible to arcing and the wafer may experience field emission during plasma ignition. As such, to protect the wafer and chuck from such damage, these elements should be floated during the plasma ignition period.
The present invention has the advantage of preventing charge accumulation on an electrostatic chuck and thereby preventing a loss of chucking force due to such charge accumulation. Consequently, wafer processing is more uniform, leading to higher yields, increased productivity and reduced cost per wafer.
Although various embodiments, which incorporate the teachings of the present invention, have been shown and described in detail herein, those skilled in the art can readily devise many other varied embodiments that still incorporate these teachings.
|Cited Patent
|Filing date
|Publication date
|Dec 3, 1993
|Oct 24, 1995
|Tokyo Electron Limited
|Stage having electrostatic chuck and plasma processing apparatus using same
|Dec 20, 1993
|Oct 31, 1995
|International Business Machines Corporation
|Guard ring electrostatic chuck
|Oct 23, 1996
|Sep 9, 1997
|Tokyo Electron Limited
|Plasma processing apparatus
|Feb 14, 1994
|Sep 9, 1997
|Tokyo Electron Kabushiki Kaisha
|Plasma treatment apparatus having a workpiece-side electrode grounding circuit
|Dec 20, 1995
|Sep 29, 1998
|Sumitomo Metal Industries, Ltd.
|Electrostatic chuck and the method of operating the same
|Dec 1, 1997
|Mar 9, 1999
|Applied Materials, Inc.
|Electrostatic chuck capable of rapidly dechucking a substrate
|Jan 2, 1991
|Sep 14, 1994
|Applied Materials, Inc.
|Electrostatic clamp and method
|Nov 24, 1994
|Jun 28, 1995
|International Business Machines Corporation
|Guard ring electrostatic chuck
|Title not available
|Citing Patent
|Filing date
|Publication date
|Jun 23, 1999
|Nov 20, 2001
|U.S. Philips Corporation
|Display device with temperature stabilization
|May 26, 2000
|Apr 9, 2002
|Tokyo Electron Limited
|Apparatus for monitoring substrate biasing during plasma processing of a substrate
|Jul 16, 1999
|Jul 9, 2002
|Mitsubishi Denki Kabushiki Kaisha
|Wafer processing apparatus
|Oct 13, 2000
|Aug 27, 2002
|Promos Technologies, Inc.
|Pedestal design for a sputter clean chamber to improve aluminum gap filling ability
|Feb 23, 1999
|Jan 14, 2003
|Hitachi, Ltd.
|Sample processing apparatus and method for removing charge on sample through light irradiation
|Mar 8, 2002
|Jul 22, 2003
|Tokyo Electron Limited
|Method for monitoring substrate biasing during plasma processing of a substrate
|Feb 23, 2000
|Nov 18, 2003
|Matsushita Electric Industrial Co., Ltd.
|Apparatus and method for plasma processing
|Mar 27, 2002
|Nov 18, 2003
|Trikon Holdings Limited
|Method of etching a substrate
|Nov 1, 2000
|Apr 6, 2004
|Eni Technology Inc.
|Fast transient protection for RF plasma generator
|Jul 26, 2002
|May 24, 2005
|Brad Mays
|Method and apparatus for operating an electrostatic chuck in a semiconductor substrate processing system
|Dec 12, 2001
|Jun 21, 2005
|Applied Materials, Inc.
|Method and apparatus for cleaning substrates
|Jul 16, 2003
|Jul 12, 2005
|Unaxis Balzers Ag
|Structural element and process for its production including bonding through an amorphous hard layer
|Jul 10, 2001
|Nov 21, 2006
|Renesas Technology Corp.
|Plasma processing system in which wafer is retained by electrostatic chuck
|Apr 9, 2001
|Dec 23, 2008
|Tegal Corporation
|System for, and method of, etching a surface on a wafer
|Aug 26, 2004
|Jan 20, 2009
|Applied Materials, Inc.
|Gasless high voltage high contact force wafer contact-cooling electrostatic chuck
|Jun 16, 2006
|Oct 13, 2009
|Asm America, Inc.
|Method of supporting a substrate in a gas cushion susceptor system
|Apr 18, 2007
|Oct 13, 2009
|Novellus Systems, Inc.
|Controlling the temperature of a substrate in a film deposition apparatus
|Aug 18, 2004
|Oct 5, 2010
|Novellus Systems, Inc.
|Substrate temperature control in an ALD reactor
|Apr 24, 2006
|Aug 2, 2011
|Applied Materials, Inc.
|Method of operating a capacitively coupled plasma reactor with dual temperature control loops
|Apr 21, 2006
|Sep 6, 2011
|Applied Materials, Inc.
|Plasma reactor with a multiple zone thermal control feed forward control apparatus
|Apr 21, 2006
|Sep 20, 2011
|Applied Materials, Inc.
|Method for agile workpiece temperature control in a plasma reactor using a thermal model
|Apr 24, 2006
|Oct 11, 2011
|Applied Materials, Inc.
|Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactor
|Apr 21, 2006
|Jan 10, 2012
|Applied Materials Inc.
|Capacitively coupled plasma reactor having a cooled/heated wafer support with uniform temperature distribution
|Aug 12, 2010
|Jan 10, 2012
|Advanced Thermal Sciences Corporation
|Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes
|Apr 21, 2006
|Apr 17, 2012
|Applied Materials, Inc.
|Capacitively coupled plasma reactor having very agile wafer temperature control
|Apr 21, 2006
|Jul 17, 2012
|Applied Materials, Inc.
|Plasma reactor with wafer backside thermal loop, two-phase internal pedestal thermal loop and a control processor governing both loops
|Nov 18, 2010
|Dec 11, 2012
|Applied Materials, Inc.
|Method of processing a workpiece in a plasma reactor using feed forward thermal control
|Aug 12, 2010
|Dec 25, 2012
|B/E Aerospace, Inc.
|Capacitively coupled plasma reactor having very agile wafer temperature control
|Nov 24, 2010
|Oct 1, 2013
|B/E Aerospace, Inc.
|Method of processing a workpiece in a plasma reactor using multiple zone feed forward thermal control
|Apr 21, 2006
|Dec 17, 2013
|B/E Aerospace, Inc.
|Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes
|Aug 12, 2010
|Aug 12, 2014
|Be Aerospace, Inc.
|Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactor
|Aug 12, 2010
|Mar 17, 2015
|Be Aerospace, Inc.
|Plasma reactor with a multiple zone thermal control feed forward control apparatus
|Mar 27, 2002
|Oct 3, 2002
|Mark Puttock
|Method of etching a substrate
|Oct 24, 2001
|Oct 10, 2002
|Angstron Systems, Inc.
|Substrate temperature control in an ALD reactor
|Jul 16, 2003
|May 6, 2004
|Unaxis Balzers Aktiengesellschaft
|Structural element and process for its production
|Jul 28, 2004
|Jan 20, 2005
|Chiang Tony P.
|Controlling the temperature of a substrate in a film deposition apparatus
|Aug 18, 2004
|Jan 27, 2005
|Chiang Tony P.
|Substrate temperature control in an ALD reactor
|Nov 14, 2000
|May 29, 2002
|Promos Technologies Inc
|Sputtering process used for cleaning a substrate e.g. a wafer comprises using a platform made from a conducting metal placed into an outer shell of a vacuum chamber
|Nov 14, 2000
|Oct 17, 2002
|Promos Technologies Inc
|Substrathalter-Tisch und Verfahren f�r die Sputter-Reinigung eines Substrats
|U.S. Classification
|118/728, 361/234, 279/128
|International Classification
|Cooperative Classification
|European Classification
|Apr 10, 1998
Owner name: APPLIED MATERIALS, INC., CALIFORNIA
Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:PARKHE, VIJAY;REEL/FRAME:009161/0233
Effective date: 19980409
|Aug 28, 2003
|Fee payment
Year of fee payment: 4
|Aug 20, 2007
|Fee payment
Year of fee payment: 8
|Aug 24, 2011
|Fee payment
Year of fee payment: 12


text:
John Mayer iPod cases now available online
Recently we reported that John Mayer and Incase Design teamed up to bring you the first musician inspired iPod cases. The iPod and iPod mini cases were only available for purchase at concert venues, but now you can buy them at the official John Mayer online store for $25. "The John Mayer Limited Edition iPod case comes in four different color schemes. Additionally, each case includes a metallic charm-pick and a drawstring bag, both marked with John's signature."
Related Stories
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I've only seen John Mayer on my show.
Posted by Dennis Lloyd in Irvine, CA on August 18, 2004 at 11:24 AM (CDT)
Hehe haha, That's awesome ^ (Could that really be Dave?)
Posted by Dennis Lloyd in Irvine, CA on August 18, 2004 at 11:26 AM (CDT)
haha…I don't know but that's pretty cool if that is dave.
Posted by Dennis Lloyd in Irvine, CA on August 18, 2004 at 2:26 PM (CDT)
Not that I'd be caught dead with a JM case, but they really didn't go out of their way to make them look even semi-masculine.
Posted by Dennis Lloyd in Irvine, CA on August 18, 2004 at 3:52 PM (CDT)
If you're a member of his fan club, you can buy them for about $2.50 off. Not worth joining if you're just after an ipod case.. but if you're already a member it makes more sense :)
Posted by Dennis Lloyd in Irvine, CA on August 18, 2004 at 5:39 PM (CDT)
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text:
- Entire Place
- Listings where you have the whole place to yourself.
- Private Room
- Listings where you have your own room but share some common spaces.
- Shared Room
- Listings where you'll share your room or your room may be a common space.
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- Employee host
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3 Rentals
3 Rentals
This is a huge apartment with room to relax and unwind. It is the upstairs apartment with more than 1300 square feet. On a quiet street, but less than 2 blocks to a bustling main street. Learn More
*Please send me a message first (rather than a reservation request right off the bat) so we can get to know each other and make sure my place is a fit for you-thanks! This apartment is unavailable the month of September.* Your accommodations: the upstairs apartment of a duplex. This is a dedicated rental, not someone's apartment they rent out occasionally. That means you can move in and relax in complete comfort and privacy. The second floor consists of a bath, eat-in, fully equipped ...
Stay in the middle of Pittsburgh's hottest neighborhood. Steps to lots of trendy shops, restaurants, coffee houses, and more. 3 miles or less to Pitt/CMU, museums, sporting venues, convention center. On public transit line--no car needed! Learn More
*Please send me a message to receive a quote, include your check-in and check-out dates and occupancy, since rates depend on length of stay and time of year. Further discounts for hospital personnel and those working on TV shows or films.* This two story, one bedroom row house is a dedicated rental property on a quiet side street: you get complete privacy and quiet so you can really settle in and enjoy your visit to Pittsburgh. It is possible to add a twin inflatable bed to the living ro...
This is a roomy apartment with room to relax and unwind. It is a 1st floor apartment that sleeps up to four. Furnished to make you immediately feel at home. On a quiet street, but less than 2 blocks to a bustling main street. Learn More
*Pease send a message with your check-in and check-out dates and occupancy--rate shown is for stays of 7-10 nights. Special discounts for medical personnel and TV show and movie cast/crew members. Rates depend on length of stay, occupancy, and time of year.* This one bedroom, one bath apartment is a dedicated rental, on the first floor of a duplex (the upstairs apt. is also rented out on this site). This property is a dedicated rental property with complete privacy and quiet so you can...
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text:
Foursquare © 2015 Lovingly made in NYC & SF
Miyabi Japanese Steak House
Japanese · $$
1990 Skibo Rd
"Love the hibachi steak and chicken. My daughter likes the shrimp. We've never been disappointed."
Blue Moon Cafe
Café · $$
310 Hay St
"Salmon melt and Cranberry apple brie are amazing."
Bubble Tea Express
136 Westwood Shopping Ctr (Morganton & All American)
"I love the taro with yoghurt bobas."
Make sure your information is up to date. Plus use our free tools to find new customers.
Download Foursquare for your smart phone and start exploring the world around you!


text:
Wherefore Art, Thou?
Mar 01, 1997 By Larry Wall
Larry Wall entertains while expounding upon Art and the Art of Programming. This treatise originally appeared in The Perl Journal, Volume 1, Issue 1. (Check out TPJ at http://tpj.com/tpj/.)
Geek Guides
Practical (and free!) books for the most technical people on the planet.
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Plus many more.
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text:
|Little Captain America is now available as a print! Grab yours from my online store.
Cartoonist. Illustrator. Designer. Animator. Podcaster.
As I get older, the list gets longer.
I am a professional illustrator and designer based out of Halifax, Nova Scotia - my home town.
I am available for freelance work and commissions. Email me at email@example.com.
You can see more of my work by visiting my website.
Twitter joelduggan
Tumblr joelduggan.tumblr.com
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Starcrossed No. 188 - Cheesy Line
Hazah! A new Starcrossed comic! I've had this gag bouncing around in my head for a while. I couldn't quite get the pacing right, so I decide to flip it on its head and put the original cheesy pun punchline in the second panel, and go with a softer, more character driven punchline. It's different, but I think it works.
If you like my comic work, it would be super-wicked-cool of you to share Starcrossed and my Patreon Page with your friends. The more eyeballs on my work, the more potential for independent growth for me as an artist.


text:
Pink Ribbon Pieces of Courage Locket Keychain
Roll over image to zoom in
Take courage -- and a picture of your loved ones! -- along on your journey with our charmed keychain locket. Filled with tiny charms that read "faith," "hope," and "love," it's a fitting showcase for your favorite photo.
- Pewter & enamel
- Contains tiny charms reading "Faith," "Hope," & "Love"
- 4.5" L overall (11.4 cm)
- Imported
For bulk pricing on these and other items, please contact our Customer Service department at firstname.lastname@example.com.
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July 5, 2013 - As a ten year survivor of breast cancer, this locket key chain was the perfect addition to my collection of key chains. Each one that I own represents a significant event in my life and obviously it made sense to purchase it. It's adorable, sturdy, and I love that, besides the key ring, it also includes a "catch," to help me connect it to the others. Therefore, if I ever want to detach it from the group, and use it as a single, I just have to unlatch the clip. Great purchase.
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The Blenders Pride Fashion Tour 2013 Preview
The 'House of Style' exhibit had 10 Indian designers show us what's to come.
Last week saw Mumbai's concept store Le Mill transform its big Byculla space into a fashion exhibit for a preview of the upcoming edition of Seagram's Blenders Pride Fashion Tour 2013 scheduled for end November. Since its debut in 2006, the fashion tour has taken place each year, extending over six cities to showcase the works of Indian designers. In its current edition, the preview, called 'Blenders Pride -- House of Style', focused on ten designers, each revealing one creation from their collection worn by a muse.
- Nitya Chablani
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text: Home Page - Gulf in the Media HomePoliticsEconomy Record Not Available ISIS using chemical agents not hard to believe Source : Al Arabiya TV Date : 2015-08-18 There have been reports recently of the Islamic State of Iraq and Syria (ISIS) using poison gas in Iraq's Kurdish-controlled areas. Though as yet unconfirmed, such allegations are unsurprising. The... Putin is a man with a plan for Syria Source : Al Arabiya TV Date : 2015-08-18 Russia is very sceptical about the effectiveness of the U.S.-led coalition against the Islamic State of Iraq and Syria (ISIS), not least because it is not U.N.-approved, so it lacks... Who should go first, Assad or ISIS? Source : Al Arabiya TV Date : 2015-08-18 Saudi Foreign Minister Adel al-Jubeir put an end to suspicious rumors in many Arab capitals that Riyadh is now willing to approve of Syrian President Bashar al-Assad. In Berlin then... Analyzing new diplomatic activity in the Middle East Source : Al Arabiya TV Date : 2015-08-18 There has been a flurry of both converging and diverging ideas put forward to take Syria to a new phase. However, the mechanisms to achieve transition remain scarce, and subject... Chemical watchdog 'concerned' by Iraq attack reports Source : The Peninsula Date : 2015-08-18 The Organisation for the Prohibition of Chemical Weapons voiced "serious concern" over reports that the Islamic State group has used chemical weapons in Iraq.... Syria strikes toll nears 100, UN aid chief 'horrified' Source : Saudi Gazette Date : 2015-08-18 The toll in Syrian government airstrikes on a rebel-held town outside Damascus neared 100 Monday, as the UN's humanitarian chief expressed horror and appealed for civilians to be protected.... EU condemns human rights violations by Syrian regime, ISIL Source : Kuwait News Agency Date : 2015-08-18 The EU denounced Monday "the massive and systematic human rights violations " in Syria by the regime and its allies as well as the Islamic State in Iraq and the... Food and shelter are not enough Source : Saudi Gazette Date : 2015-08-18 A person would have to be inhuman or a member of Daesh (so-called IS) - which amounts to much the same thing - not to weep at the miserable and... Over 80 Syrians dead as regime air raids hit town Source : Arab News Date : 2015-08-17 At least 82 people were killed in Syrian regime air raids Sunday on a town outside Damascus, a monitor said, as the UN's top humanitarian chief held talks with government... Al Qaeda in Syria 'frees seven US-trained rebels' Source : The Peninsula Date : 2015-08-17 Al Qaeda's Syrian affiliate Al-Nusra Front has freed several members of a US-trained rebel force that it kidnapped two weeks ago, the Western-backed unit said in a statement.... Syria militants try to sneak in: Jordan Source : Arab News Date : 2015-08-17 Militants have tried to sneak into Jordan from Syria by blending in with Syrian refugees, and attempts to smuggle weapons and drugs into Jordan have increased, the commander of Jordan's... Predicting policy changes in ME region Source : Arab News Date : 2015-08-17 Confusion between end results and facts produces myths, much like the news that circulated lately about promised changes in the region. It was said that the situation in Syria is... UAE to fund sanitation project to help Syrian refugees in Zaatari camp Source : Gulf Today Date : 2015-08-17 As part of a multi-activity project funded by the United Arab Emirates to improve the overall water, sanitation and hygiene conditions for Syrian refugees in the Zaatari refugee camp in... Shelling hits Syrian towns as ceasefire breaks down Source : Saudi Gazette Date : 2015-08-16 Shelling resumed on Saturday in two government-held villages in northwest Syria and a rebel town near Damascus, state media and a monitor said, as a ceasefire for the areas collapsed.... Truce with Hezbollah over, says Syria group Source : Arab News Date : 2015-08-16 A rare cease-fire negotiated with Hezbollah militants in a Syrian town and two villages collapsed Saturday after several days during which guns fell silent, a rebel group involved in the... Syria Kurdish militia expands territory, recruits 5,000 Source : Oman Tribune Date : 2015-08-16 A Kurdish militia that has captured swathes of northern Syria from Baghdadi militia has signed up thousands of fighters in recent months as it seeks to tighten control over newly... Qatari Fund to treat injured Syrians in Jordan extended Source : The Peninsula Date : 2015-08-16 The Qatari Fund for Treating Injured Syrians in Jordan will continue following a decision by the sponsor, Qatari charity alliance, to extend it until September to further support Syrian refugees... 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|Boxing Champions | Boxing Schedule | Boxing Video | Boxing History | Pound For Pound | Lounge | The Wire | Audio | Arcade
Big Bad Booty Daddy
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Comments Thread For: Video: Manny Pacquiao Discusses Fourth Marquez Clash
Luis Sandoval catches up with Manny Pacquiao to discuss his upcoming fourth battle with Juan Manuel Marquez and more. [Click Here To Read More]
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Rooting for Marquez but picking Pacquiao by TKO.
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He looks focused, as does Marquez. I honestly think this may be the best fight yet between the two...don't think either guy wants to go 12 rounds. It also sounds like Arum wants Pacquaio vs Bradley 2 in April or so..me thinks he's pissed at Tim and wants him beltless for getting out of pocket on two offered fights.
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Schoeps (http://www.schoeps.de/), the German maker of microphones, will introduce the SuperCMIT digital shotgun microphone at the AES Convention in London on May 23.
Schoeps said the new microphone uses an innovative principle of operation: two transducers and a DSP. With its moderate length, it still has greater directivity than conventional shotgun microphones — even at low frequencies — as well as an extraordinary ability to suppress pickup of diffuse sound.
The mic uses digital signal processing algorithms from Illusonic and has two-channel output, with the SuperCMIT signal in channel one and the direct, single-transducer CMIT signal in channel two.
'Fear' Adds 3 Million Viewers With Delayed Watching
Virginia Teen Sentenced For Tweeting Aid to ISIL
Comcast Launches Video Voice Calling
FCC Group Presents Multiple Non-CableCARD Paths
AP, Reporters Committee Sue For Sting Records
Sound Devices 668 and SL-6 provide next-gen wireless power and control at IBC2015
4K World Summit 2015 registration now open
BT Sport prepares for National League coverage with Sony
What Next, Adobe? An Interview with their Sr. Director of Product Management for Video
Where it all Began: Interview with Premiere, FCP and iMovie developer, Randy Ubillos
Cool iPad Tools for Editors


text:
STAMFORD, Conn. (AP) – The Connecticut woman who was shot to death by police after a car chase in Washington had been sued by her condominium association for failure to pay fees.
The complaint filed in November by the association for the Stamford building said Miriam Carey had failed to pay her fees in full since August 2010 and owed the association $1,759 in addition to collection costs. The lawsuit was settled in February.
The lawsuit by the Woodside Green Association indicates Carey took out a mortgage on her Stamford condo in the amount of $237,616 in September 2009.
The 34-year-old Carey was identified by law enforcement officials as the woman who led police on a chase through Washington on Thursday after trying to breach a barrier at the White House.
Associated Press writers Eric Tucker and Adam Goldman in Washington contributed to this report.
(Copyright 2013 by The Associated Press. All Rights Reserved.)
The U.S. Capitol was briefly locked down after a vehicle tried to ram a barricade and police opened fire Thursday afternoon.
Gov. Larry Hogan and other Maryland officials received family members of former Gov. Marvin Mandel at the Maryland State House.


text:
All hotels in Mexico City, Distrito Federal, Mexico
1 room, 2 adults
Callejón de la Escondida # 41, Col. Coyoacán, Mexico City, DF, 04000, Mexico, 800-491-6126
La Casita del Patio Verde, Mexico City
Lowest price$80
Best Price Guarantee
Guestrooms with fireplaces, near Jardin del Arte
- Free full breakfast, free WiFi, and free parking
Main amenities
- 3 smoke-free guestrooms
- Airport shuttle
- Library
- Limited hour front desk
- Tour/ticket assistance
What's around
- Heart of Mexico City
- Jardin del Arte (1.7 mi / 2.8 km)
- Estadio Olimpico (2.2 mi / 3.6 km)
Great hotel, located in one of the best area of the city. This is the place to be if you…
My husband and I were very impressed with this bed and breakfast. We arrived and were…
TripAdvisor Traveller Rating: 4.5
From 52 reviews
Enter dates to check prices
Hotel Info: 866-539-8117from $80
- El Cuarto del Colibrí
- El Cuarto del Árbol
- La Cabaña
Also popular with travelers from the USA
At a glance
Key facts
Hotel size
- This hotel has 3 rooms
- This hotel is arranged over 2 floors
- Check-in time starts at 1 PM
- Check-out time is noon
Required at check in
- Credit card or cash deposit required
- Government-issued photo ID required
- Minimum check-in age is 18
Travelling with others
- No pets or service animals allowed
- Free WiFi in public areas
- Free WiFi in rooms
- Airport shuttle (available on request) *
- Free self parking
Other information
- Smoke-free property
Nearby Two Star Mexico City hotels
In the hotel
Food and drink
- Free full breakfast daily
- Front desk (limited hours)
- Tours/ticket assistance
- Number of buildings/towers - 1
- Library
In the room
Home comforts
- Ceiling fan
- Iron/ironing board
Things to enjoy
- Fireplace
Freshen up
- Hair dryer
Be entertained
- Satellite TV channels
- MP3 docking station
- DVD player
Stay connected
- Free WiFi
Top Mexico City hotels
Recently reviewed hotels in Mexico City
- Flowsuites CondesaFrom
"Unique concept/boutique hotel in Condesa with some of the largest rooms I've seen in the various boutique hotels I've stayed at in Mexico City. The setup made me feel like I had…"Aug 24, 2015
- Hotel Plaza RevoluciónFrom
"For the day and a half I was there it was great. It was in a good area and close to the main streets."Aug 24, 2015
- Ramada Aeropuerto MexicoFrom
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Nearby hotels
La Casita del Patio Verde, Mexico City's small print
Also known as
- Casita Patio Verde
- Casita Patio Verde B&B
- Casita Patio Verde B&B Mexico City
- Casita Patio Verde Mexico City
- Patio Verde
- La Casita Del Patio Verde Mexico City
The name on the credit card used at check-in to pay for incidentals must be the primary name on the guestroom reservation.
Optional extras
Airport shuttle service is offered for an extra charge of MXN 150 per vehicle (one way)
We have included all charges provided to us by this hotel. However, charges can vary, for example, based on length of stay or the room you book.


text:
Katatonia & P-Thief collab
what a weird team
I could not have seen this coming, but I'll definitely be checking this out
..huh. hopefully it will turn out better than the wilson/akerfeldt debacle
Digging: The Darcys - The Darcys
Anything will be better than wilson/akerfeldt.
Digging: World's End Girlfriend - Dream's End Come True
This could be interesting
DAMN. Excited. Song gets real interesting around 3:00...
this will suck hard
fucking love it!
Awesome song! I'll have to keep an eye out for this one
I'm so excited for this album to come out. Hopefully it makes it to my house before I move out in June!
i was not srs
this blowz
faohwh9h4987h teee heeee
did you predict that?
Interesting collaboration, and the song was really good.
Digging: Fear Factory - Genexus
Song's great. Really interested in how this will turn out. Bruce has never done anything bad so my hopes are high...
So Katatonia goes prog/alt? Can deal with it.
Digging: Johnnytwentythree - JXXIII
Haven't listened yet, but the idea of this collaboration is lol
Digging: Stolas - Allomaternal
Anything will be better than wilson/akerfeldt.
Fuck, I was so put off that record, such a waste of talent.
Digging: America - Homecoming
P-Thief is my favorite rappperrrrrrrrr
• Brand New release new song as a f..• Tool + Mastodon supergroup• Slint guitarist survives suicide ..• Muse unleash new single• Justin Lowe leaves After the Buri..• Scarlett Johansson forms band• Nickelback get groovy • Justin Lowe found dead• New Muse song• Steven Wilson premieres new tune
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Bands: A B C D E F G H I J K L M N O P Q R S T U V W X Y Z


text:
Read an Excerpt
Spinach and Cheese Quiche
If you'd prefer to use fresh spinach, you'll need about 8 cups of washed trimmed spinach leaves. Cook them in a large saucepan with only the water that clings to them, stirring as needed, until wilted, about 2 minutes. Drain well and finely chop.
Makes 12 servings
One 12-ounce can evaporated skimmed milk
1/3 cup low-fat cottage cheese
¼ cup grated Parmesan cheese
2 eggs
3 egg whites
½ teaspoon salt
¼ teaspoon black pepper
One 10-ounce box frozen chopped spinach, thawed and squeezed dry
Plain Pie Crust, baked and cooled
1. Preheat the oven to 425° F. In a medium bowl, whisk the milk, cottage cheese, Parmesan, eggs, egg whites, salt and pepper.
2. Place the pie plate on a jelly-roll pan; spread the spinach over the pie crust, then pour the filling over the spinach. Bake 15 minutes; reduce the oven temperature to 350° F and bake until the filling is set, 20 minutes longer. Let cool 10 minutes before serving.
Per Serving: 139 Calories, 5 g Ttotal Fat, 2 g Saturated Fat, 40 mg Cholesterol, 359 mg Sodium, 14 g Total Carbohydrate, 1 Dietary Finer, 9 g Protein, 188 mg Calcium
Points Per Serving: 3


text:
Seagram deal set to fuel major industry consolidation
The Seagram/Vivendi deal and the subsequent disposal of its drinks arm may bring to an end a two and a half year period with plenty of consolidation talk but little action. Chris Brook-Carter reviews the possible winners and losers. For two and a half years now, since Grand Met and Guinness shocked the city and the spirits world with the announcement that they were to merge to form Diageo, talk of further drinks consolidation has been this industry's favourite pastime.
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text:
List all words that contain downsizes
Only the word downsizes was found, nothing longer.
Some random words: graffiti vigesimal drogue ex bub kike lea
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text:
Latest Headlines
Not everyone was thrilled about the FCC's recent effort to define terms in a law passed year that essentially prohibits jurisdictions from blocking moderate modifications to existing wireless towers or base stations. Though it was attempting to settle disputes regarding application of the law, the FCC may have simply given the dueling sides a longer list of specific points to dispute.
Press Releases
- New core router sales push market towards all-time high in 2Q15, according to Dell'Oro Group
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- Sprint is Celebrating the Merger of DIRECTV and AT&T: DIRECTV Customers Get Free Service by Switching to Sprint
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InVision Communications- Walnut Creek , CA
Media Manager is responsible for positioning InVision as a leader in the use of media and ... in the area of Video, Media and Graphics to InVision Sales and Marketing efforts Track...30+ days ago from InVision Communications, IncSave - Share - Hide - Report - Description
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OSI-Approved Open Source (71)
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Enterprise-class, distributed monitoring solution for networks & apps11,201 weekly downloads
gPhoto is a program and library framework that lets users download pictures from their digital cameras. The libgphoto2 library gives you access to hundreds of models of digital cameras on several platforms.1,506 weekly downloads
BackupPC is a high-performance, enterprise-grade backup system for backing up Linux, WinXX PCs, Macs and laptops to a server's disk. Features include clever pooling of identical files, no client-side software, and a powerful Apache/CGI user interface.491 weekly downloads
JPPF makes it easy to parallelize computationally intensive tasks and execute them on a Grid.259 weekly downloads
DataVision is a reporting tool similar to Crystal Reports. DV supports many data sources (JDBC, files) and many output formats (HTML, XML, PDF, LaTeX, Excel, delimited files, DocBook). DV includes a GUI editor. DV is embeddable. Reports are XML-based.179 weekly downloads
HoldingNuts is an open source multi-platform poker client and server100 weekly downloads
fprobe and fprobe-ulog are NetFlow probes. fprobe - libpcap-based tool that collect network traffic data and emit it as NetFlow flows towards the specified collector. fprobe-ulog - libipulog-based fork of fprobe.95 weekly downloads
husky is a bunch of os-independent software for fidonet. It consitsts of tosser hpt, fileechoprocessor htick, message editor msged TE, libraries fidoconfig, smapi etc. Russian documentation may be found in Wiki http://sf.net/apps/mediawiki/husky/51 weekly downloads
ZoneMinder is video and cctv surveillance and security application. It supports multiple video or IP cameras and a sophisticated motion detection system based around zones. Both live streams and historic events can be viewed via the web interface.38 weekly downloads
A soundboard controlled by hotkeys41 weekly downloads
NMDC Hub Server26 weekly downloads
LinuxCNC (formerly EMC)
LinuxCNC performs real-time control of equipment such as machine tools, robots, and coordinate measuring machines. It runs in realtime under Linux with the RTlinux or RTAI patch. It provides a software PLC, and uses the HAL for flexibility.8 weekly downloads
Kamikaze IRCD
Kamikaze IRCD is a premium class of russian IRCD based on bahamut ircd core. Full SSL support and unicode charset mappings/nicknames.22 weekly downloads
3proxy tiny free proxy server
Universal freeware proxy server with HTTP, HTTPS, SOCKS v4, SOCKS v4a, SOCKS v5, FTP, POP3, UDP and TCP portmapping, access control, bandwith control, traffic limitation and accounting based on username, client IP, target IP, day time, day of week, etc.16 weekly downloads
libConfig++ is a portable and flexible C++ library for reading configuration files which were written in C style syntax.15 weekly downloads
HLBR - Hogwash Light BR
HLBR is an IPS (Intrusion Prevention System) that can filter packets in the OSI layer 2. Detection of malicious traffic is done by rules. It can even be used as bridge to honeypots. The HLBR is a firewall element and can use regular expressions. Warning: this project was discontinued and should not be used in production networks. There are several bugs.6 weekly downloads
ArpSite Content Management System
WWW XML+XSLT Content management system on J2SE with Tomcat and SQL-92 compatiblity database (like free MySQL or Oracle). Supports many sites, many groups, many users. XML-definition of content types, security system. Created with Apache Avalon.2 weekly downloads
MVDSV (MultiView Demo Server) - most popular QuakeWorld Server in the world with it's ability to record every player's point of view in a server side demo. Includes: mvdsv, qwdtools (demo tools), qwdplayer (client - removed, use http://ezquake.sf.net).5 weekly downloads
DAViCal CalDAV & CardDAV Server
The DAViCal CalDAV & CardDAV Server is a repository for calendar, todo, journal and vcard entries to be accessed via CalDAV clients such as Evolution, Lightning, Apple iCal or the iPhone. You need to download both DAViCal & the AWL library.1 weekly downloads
Audio Books Catalog
Catalog module for creating FTP server support website. Search engine for Files located on FTP sites or in other collections submitted to this catalog. It is oriented for Audio Books in mp3 format collections. Use PHP, Java & database MySQL or Oracle.4 weekly downloads
Fast Asterisk's Telephony Services
FATS - FATS is a Twisted and Fast Asterisk's Telephony Services. Project contains implementation of FastAGI, AMI protocols for the Twisted framework. Using it you can develop fast and pretty services for the Asterisk IP-PBX.4 weekly downloads
It's all about in-process message dispatching!2 weekly downloads
Unofficial MorphOS update
Unofficial updates for MorphOS operating system2 weekly downloads
Wrapper script for MPlayer which saves the playback position of your audio and video files after you quit and resumes when you play the file again.2 weekly downloads
P3Scan is a fully transparent scanning proxy-server for email clients. It provides scanning of incoming/outgoing email messages for Virus''s, Worms, Trojans, Spam, and harmfull attachments. It can also parse messages for web-bugs.3 weekly downloads


text:
Related Searches: 70 ford truck, Ford Water Truck, 48 ford truck, 1961 ford truck
18 Results for 70 Ford Truck - For Sale Classifieds
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Charles Peabody on JPMorgan, Banking Regulations
Aug. 16 (Bloomberg) -- Charles Peabody, an analyst at Portales Partners LLC, talks about the legal expenses JPMorgan Chase & Co. faces amid the "London Whale" trading loss. Peabody speaks with Tom Keene and Sara Eisen on Bloomberg Television's "Surveillance." Attorney Douglas Burns also speaks. (Source: Bloomberg)
Most Recent Videos
Zero Rates Kill Discipline in Financial Markets: Blinder
36:32 - Alan Blinder, former vice chairman of the Federal Reserve and professor of economics at Princeton University, talks about inflation expectation and Fed monetary policy. Blinder speaks with Brendan Greeley on Bloomberg Television's "Bloomberg Markets" from the sidelines of the Federal Reserve Bank of Kansas City's annual economic symposium in Jackson Hole, Wyoming. (Source: Bloomberg)


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At The Commons at Boston Road you can enjoy a number of lifestyle extras to simplify and soothe your...
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Police have identified the two men killed on Sunday in a highway collision near Mutrie Township, Ont.
Saskatchewan's Adrian Chapados, 37, was driving a westbound Ford Mustang that collided with an eastbound tractor trailer.
Chapados was killed instantly.
His passenger, 18-year-old Frisco McRae of Quebec was taken to hospital with serious injuries, which he later succumbed to while at the hospital.
The crash closed the highway for six hours.
No charges have been laid.
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