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Bulletin Board
Subject: International Conference on Biodiversity & Sustainable Energy DevelopmentThe International Conference on Biodiversity & Sustainable Energy Development (Biodiversity-2012) will be held September 14–15, 2012 at Hyderabad, India. The conference theme is the socioecological study of conservation biology. Abstracts for papers are currently being accepted, with a discount for registrations before April 24. All abstracts will be published in OMICS group journals, Journal of Ecosytem & Ecography, Hydology: Current Research, and Journal of Biofertilizers and Biopesticides.
The conference will consist of 12 tracks and 77 sessions and highlights the following topics:
• Ecosystem and Ecography
• Origin of Species and Evolution
• Biodiversity, Energy Systems, and Environmental Sustainability
• Plant Pathology and Microbiology
• Biofertilizers and Biopesticides
• Linking Hydrology and Biodiversity
• Biodegradation and Bioremediation for Conservation
• Biodiversity in Earth Science and Climate Change
• Biogeochemical Cycles and Food Webs
• Sustainable Energies and their Development
• Governance for Sustainable Development
• Biothreats and Biosecurity
Visit http://www.omicsonline.org/biodiversity2012/index.php and http://www.omicsonline.org/biodiversity2012/cfa.php to learn more about the sessions offered.
Frank Dirrigl <email@example.com>
Thursday, April 12, 2012
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Apple releases Digital Camera Raw Compatibility Update 3.6, adds support for new camera formats
Date: Thursday, February 17th, 2011, 05:53
Category: News, Software
Late Wednesday, Apple posted its Digital Camera Raw Compatibility Update 3.6, an update designed to extend RAW image compatibility for the Aperture 3 and iPhoto '09 applications.
The update, a 6.4 megabyte download, adds support for the following cameras:
- Canon EOS Rebel T3 / 1100D / Kiss X50
- Canon EOS Rebel T3i / 600D / Kiss X5
- Olympus E-5
- Panasonic Lumix DMC-FZ100
- Pentax K-r
- Pentax K-5
It also addresses processing issues for the following cameras:
- Nikon D7000
- Nikon COOLPIX P7000
- Panasonic Lumix DMC-GF1
- Panasonic Lumix DMC-GH2
The update requires Mac OS X 10.5.8 or later to install and run and is also available via Mac OS X's built-in Software Update feature.
If you've tried the new Digital Camera update and noticed any changes, please let us know how it went.

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Dubai International Dance Festival
Time: 2012-10-18T20:00:00+04:00 20:00 - 02:00 2012-10-20T02:00:00+04:00
Venue: DUCTAC
Welcome to the 5th Dubai International Dance Festival 2012.
It was a great year for DIDF last year with an increase in audiences, higher accessibility through ticket offers, and a fantastic array of international and homegrown talent taking part in our highest number of performances yet!
So what will 2012 bring? Certainly not just 'more of the same' anyway. For the first time in 6 years, this will be an ALL UNDER ONE ROOF Festival. The Festival is an unique multi-arts event and has a reputation for attracting some of the finest young dance companies, classical dance academies, youth orchestras, bands and music ensembles from around the region and the world.
The Festival is also a catalyst for the creation of new work and creative activity, with an education programme and artistic collaborations with organizations throughout the UAE, the Middle East, and the rest of the world. Those who love music, dance and the passion, which we all share, bring the 5th Dubai International Dance Festival 2012 to you…
This Festival is intended to bring something new and exciting to the dance scene in Dubai, the Middle East and the region as well as international dancers who wish to visit our wonderful city, Dubai… The 5th Dubai International Dance Festival 2012 is the largest Dance event of the year; featuring 3 days of performances, LIVE Entertainment, workshops, themed dance parties, dance competitions, International guest DJs and more.
The 5th DIDF 2012 will mesmerize audience during the evening festivities with performances by world-renown professional dancers, extremely talented local and regional performers, and guest DJ's from dance capitals of the world. There are some things that you just can't put into words. Some experiences change you in ways you never could have imagined www.dubaidancefestival.com
Dubai International Dance Festival (DIDF), largest Dance event of the year in the region, featuring 2 days of performances, LIVE Entertainment, workshops, themed dance parties, dance competitions, guest DJs and more, is pleased to announce the dates of 5th Dubai International Dance Festival (DIDF 2012), which will be held from 17th to 20th October 2012 at Ductac & Pullman hotel, Mall of the Emirates, Dubai, UAE.


text:
Family Dollar posts flat 1Q profit, shares fall
Family Dollar Stores Inc. posted fiscal first-quarter net income that was little changed compared with a year ago as its customers snapped up merchandise at reduced prices, lowering the company's profitability.
The earnings fell short of Wall Street predictions and the Matthews, N.C.-based company issued weak outlooks for the current period and full year, adding that the holiday shopping season was tougher than expected.
Its shares dropped more than 11 percent in morning trading.
For the quarter ended Nov. 24, Family Dollar earned $80.3 million, or 69 cents per share, compared with $80.4 million, or 68 cents per share, in the year-ago period.
The recent quarter's results are based on 116.2 million outstanding shares, while those of the year-ago quarter are based on 118.6 million.
Revenue rose 13 percent to $2.42 billion from $2.15 billion, boosted by contributions from new stores. Sales of consumables jumped 19 percent, helped by higher demand for tobacco, food and health and beauty aids.
Analysts, on average, expected a profit of 75 cents per share on $2.38 billion in revenue, according to a FactSet poll.
Family Dollar said customer response to its promotional activities was stronger than expected, boosting sales but lowering profitability. In addition, insurance costs were higher than expected, the company said.
Revenue at stores open at least a year rose 6.6 percent, as more customers visited the company's stores and spent more, on average, per visit. The metric is a key measure of a retailer's health, because it excludes sales at stores that recently opened or closed.
Family Dollar opened 125 new stores and closed one store during the recent quarter.
The company said increasing financial uncertainty for many of its customers resulted in a tougher-than-expected holiday sales environment, with December revenue at stores open at least a year rising about 2.5 percent.
Family Dollar said that taking into account the December sales results, it expects its second quarter revenue at stores open at least a year to increase between 4 and 5 percent. The company also projected a profit of $1.18 to $1.28 per share for the period, while analysts expect earnings of $1.39 per share.
For the full year, Family Dollar said it expects to earn $3.95 to $4.20 per share. Analysts expect $4.25 per share.
Family Dollar shares dropped $7.34, or 11.5 percent, to $56.70 in morning trading. That is near its 52-week low of $53.03 set almost a year ago.


text:
libGL.so.1: undefined symbol: _nv000008gl
I have successfully compiled and installed the NVIDIA-Linux-x86_64-195.36.24 video card driver on my Linux x86-64 box with 2.6.34 Kernel, and the NVidia driver works fine with X11 for standard graphics.
However... GL doesn't work. I get "libGL.so.1: undefined symbol: _nv000008gl"
when I try to run any application that uses GL. I have copied libGL.so.195.36.24 and libGL.la to /usr/lib64, and I've deleted all previous libGL modules. My previous version of the NVidia driver, 185, worked OK with GL but not 195. Any suggestions ?
Re: libGL.so.1: undefined symbol: _nv000008gl
are you running 32bit application? Have you installed 32bit OpenGL libraries?
Why don't you use NVIDIA installer?
Re: libGL.so.1: undefined symbol: _nv000008gl
This error indicates that the incorrect version of libGLcore.so.1 is being picked up from somewhere. Please run `ldd /usr/bin/glxinfo` and see which libGLcore.so.1 it's using. If it's in a nonstandard location, please figure out where the stale version came from and uninstall it.
You might have better luck if you stick with your Linux distribution's driver packages.
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text:
Just the Job?
Filed: Friday, 12th August 2005
By: Matthew O'Greel
West Ham are being linked with a move for Middlesborough striker Joseph Desire-Job.
Alan Pardew, who has failed to land any of his main targets during the close season could turn to the Boro striker, who is likely to be surplus to requirements at the Riverside this season.
The 27-year-old Cameroon international joined Boro from French side Lens in 2000, but has made just 62 league starts in his four-and-a-half years in the North East.
Job spent a short spell on loan at Metz in 2002 before hitting the best form of his Boro career shortly after returning.
Any move by the Hammers is likely to involve a loan deal as it is unlikely that Pardew views the 5'10" forward as a permanent answer to his shortfall up front.
Related NewsHammers hire Silkman [20th Jan 2010]
No news is good news? [31st Aug 2005]
Job: Hammers move not dead [26th Aug 2005]
Job - confirmation [16th Aug 2005]
Confusion surrounds Job future [15th Aug 2005]
No Desire for Joseph [13th Aug 2005]


text:
DURHAM, N.H. -- Mike Ayers (Hingham, Mass.) made 19 saves to record his fifth shutout of the season and 13th of his career to lift the 10th-ranked University of New Hampshire hockey team to Saturday night's 1-0 victory against Providence College at the Whittemore Center in Game 3 of the best-of-three Hockey East quarterfinal series. UNH won the series 2-1 to advance to the March 19 semifinals at the FleetCenter for the third consecutive year.
UNH, seeded fourth in the tourney, reached the 20-win mark for the eighth consecutive season by improving to 20-13-6 overall. The Wildcats will face third-seeded UMass in a semifinal matchup and the 'Cats went 1-1-1 vs. the Minutemen this season. PC, which forced a decisive third game with a 4-3 overtime victory in Game 2, ends the season at 16-14-7.
With the win, Ayers broke the school record for career victories with his 58th. He surpassed the benchmark of 57 established by Ty Conklin (1998-2001).
Following two scoreless first periods, Preston Callander (Regina, Sask.) scored what proved to be the only goal of the game when he redirected a centering pass from Jacob Micflikier (Winnipeg, Man.) into the open left side of the net. Nathan Martz (Chilliwack, B.C.) was also credited with an assist.
PC called time out with 1:26 remaining in regulation and pulled goaltender Bobby Goepfert (26 saves) with 41 seconds to play. The Friars could not sustain pressure, however, and did not get a shot on goal the rest of the way.
UNH generated a 10-9 shot advantage in the first period and both teams recorded six shots in the middle stanza. In the second period, PC's Stephen Wood fired a wrist shot from the right circle into the net, but the Friars were whistled for obstruction interference to negate the shot.
Both teams were denied by the left post in the third period. Seven minutes into the stanza, Callander beat Goepfert from the right circle but the puck caromed off the left post. Two minutes later, PC's Chase Watson fired a shot from the high slot that ricocheted off the post into the left corner.


text: Healthy Recipes Herb Roasted Potatoes Recipe E-mail recipe Print recipe To save this recipe, register now! Quick Info: Servings Vegetarian Good for Leftovers Heart-Healthy Nutritional Info (Per serving): Calories: 220, Saturated Fat: 2g, Sodium: 10mg, Dietary Fiber: 3g, Total Fat: 11g, Carbs: 28g, Cholesterol: 0mg, Protein: 3g Carb Choices: 2 Recipe Source: Prep Time: 4 mins Cook Time: 22 mins Total Time: 26 mins Ingredients 1 1/2 pounds potato(es), red 1 tablespoon rosemary, fresh 3 tablespoon oil, olive 1 1/2 teaspoon garlic, minced Preparation 1. Preheat oven to 450 degrees F (232 degrees C). 2. Wash and scrub potatoes under running water. Cut into wedges. 3. Toss potato wedges with rosemary, olive oil, and garlic. 4. Roast potatoes 20 to 25 minutes, until golden brown and tender, stirring occasionally. Enjoy. E-mail recipe Print recipe To save this recipe, register now!


text: Personal Change Management: When It's Time for a Coach By Rebecca R. Hastings 1/1/2006 Permissions WHETHER OR NOT A JOB CHANGE IS PLANNED, it's an event that poses a personal change management challenge. For some, such a change may be seamless. For others, however, a coach may help effectively manage the transition. Coaches can play several roles in helping an individual execute a job change. "During a job search, people often use a coach to help them identify what type of job to look for," says Beth Bloomfield, PCC, CMC, of the Annapolis-based coaching firm Bloomfield Associates LLC. "Or, they may have figured out what type of job they want but need a strategy to land it." In other cases, "job seekers use coaches when they want a sounding board and help making better decisions," says Annette Wellinghoff, SPHR, president of Coaches@Work, a Miami-based coaching company. "Sometimes they realize they are in a critical development phase and want some support that will help them identify the type of company and type of job that will help them develop faster. At other times they have received critical feedback and need to understand what is derailing them." Job transitions may bring positive life altering results, if approached the right way. "Coaching during a job change is one of the most viable personal growth opportunities," says Wellinghoff. "That kind of powerful event lets you really contemplate who you are." When accompanied by coaching, job changers often experience "a lot more self-insight, empathy and forward momentum," she adds. Coaches can provide specific guidance to HR professionals seeking a new challenge. "More and more people are looking to move away from what they have been doing," says Bloomfield. "The field of HR is changing quite a bit; some people may want to specialize in a particular aspect of HR or become a consultant." Yet given their unique perspective, some HR professionals may question the value of a coach, particularly in cases where they have developed a strong professional and social network. However, coaches say they offer their clients a unique perspective; one that cannot be found in other relationships. For example, unlike therapists, "Coaches view the future, rather than the past," says Wellinghoff. "They offer insight and perspective as well as creative alternatives and help making sound decisions," she adds. While family, friends and significant others may also be useful sounding boards, "their support is wrapped up in their own interests and agenda in the relationship," Wellinghoff says. "A coach's only agenda is to support the client's agenda." Coaches are not mentors. "Mentors are helpful for providing guidance and networking within a specific profession or industry. But coaches bring special knowledge and training related to personality that mentors may not possess," Wellinghoff says. Coaches often encourage clients to use mentors, however, as part of their transition strategy. A coaching arrangement should be entered into with caution, to ensure the investment of time and money is beneficial. Wellinghoff says there are three primary things to look for when selecting a coach: Connections. "Interview several coaches and see how you feel when you do so," she says. Qualifications. "Make sure the person has background, qualifications, experience and relevant certifications." References. "A good coach will offer references to talk to about how their experience with a coach helped them." Bloomfield agrees, but stresses that qualifications are key. "Coaching is still a pretty new profession, and it's not regulated so it's sort of like the Wild West," Bloomfield says. And, like any professional investment, coaching does come at a price. "The range is all over the place," says Bloomfield. But there may be options to cover the cost. "If your employer is helping you out the door, you may want to ask them to cover the cost of coaching," Bloomfield says. "And if you're working with headhunters they may offer it as a service and add it into the fee they charge employers," she adds. "Some coaches may even take a certain number of clients each year on a pro-bono basis," says Wellinghoff. "Don't just assume you can't afford it," she adds. In addition to a financial investment, coaching also involves an investment of time. For example, "plan on three to six months of coaching time for a job search transition," says Bloomfield. "The really important thing for people to realize about a coaching relationship is that it's a two-way partnership," Bloomfield says. A coach guides a client through a thought process to figure out what obstacles, options and outcomes exist. But, says Bloomfield "It's not going to happen overnight." If a client feels the coaching arrangement is unproductive, it's important that they raise the issue with their coach. "Good coaches will offer a money-back guarantee," Wellinghoff says, before coaching even begins. But individuals should trust their instincts when deciding whether or not to end a coaching relationship. "It's an awful lot like dating," Bloomfield says. Unlike earlier decades, there is currently no shame in using a coach. "These days it's more socially acceptable to have a coach," Wellinghoff says. "People now see it as a positive thing." Coaching can provide valuable insights for those who are open to what a coach can offer. "In some cases coaching helps individuals realize that they are not happy with the path they are on so they choose to pursue something completely different and are much happier as a result," says Bloomfield. "Part of what holds us back is our past," says Wellinghoff. "When we think who we are is who we will always be." Coaches redirect that kind of thinking into positive change. For HR professionals, that is a natural fit. "HR people really understand that work has meaning. After all, work is a primary way of expressing our purpose in life," says Bloomfield. Rebecca R. Hastings, SPHR, is online writer/editor for SHRM. Permissions Related Content Chief Culture Officers Fill a Growing Need Member Spotlight: Valerie Utsey, SHRM-CP Member Spotlight: Toby Atkinson, SHRM-SCP Develop Better Leaders Through Coaching by HR Member Spotlight: Mandy Woulfe, SHRM-SCP TOP PICKS: LEGAL & REGULATORY DEVELOPMENTS FLSA Essentials Manual Online compliance guide with update service. Webcast: Who and What Federal Contractors Must Count Cara Crotty on new rules for employers doing business with the government. Available on demand. Seminar: California HR Learn critical California workplace regulations. Oct. 26-27, L.A. Labor Law Posters State and federal labor law posters with one-year update service. U.S. Immigration Essentials SHRM Seminar - Oct. 2015 in Los Angeles; Nov. 2015 in Houston Workplace Compliance E-Newsletter Free weekly update, summarizing legal decisions, legislative news and regulatory news. Whistleblowing, Reporting, & Retaliation Online course from SHRM E-Learning Express Request: Same-Sex Marriage Learn implications of Supreme Court's recent ruling. Webcast: The ACA After the Supreme Court Sibyl Bogardus discusses what employers should do now. Available now on-demand. Swipe for more! ADVERTISING LINKS


text:
By Gerry J. GilmoreAmerican Forces Press Service
WASHINGTON, Jan. 21, 2004 Lessons learned from U.S. military operations in Afghanistan and Iraq are greatly assisting Defense Department transformation efforts, the chief of U.S. Joint Forces Command said here today.
"The fact that we are conducting (those) operations with the breadth and depth that we are allows our services and allows our joint forces to experiment in a way that you can't replicate running any type of concept development and experimentation program war games or the like," noted Navy Adm. Edmund P. Giambastiani Jr.
Giambastiani said Joint Forces Command, with headquarters in Norfolk, Va., is committed "to add joint context to everything we do."
As part of that effort, the admiral noted, the armed services run joint war games in conjunction with his command.
"The reason for this is we're trying to put in joint context to allow the services to explore their capabilities," Giambastiani explained, "while at the same time we can explore issues and we can look at the challenges all of the services face and come up with joint solutions."
In fact, he noted, joint war games were during 2003 held with the Army in May and with the Navy in October, while a joint war game hosted by U.S. Joint Forces Command in June featured U.S. services and some allied militaries as participants.
Giambastiani, who took over Joint Forces Command and NATO's newly established Allied Command Transformation on October 2002, said Joint Forces Command would run three more joint war games this year.
The admiral pointed out that Joint Forces Command has "created a dynamic, interactive process of lessons learned to capture battlefield lessons learned and bring them back to the services and our joint commands in a way like we've never done before." Many of those lessons-learned reports, Giambastiani noted, are classified.
To obtain timely information and feedback from recent military operations, Giambastiani said, special teams were embedded across U.S. Central Command.
"We're trying to be as proactive as possible -- in real time -- in bringing these lessons learned out" from warfighting theaters of operation, he concluded.
Related Sites:U.S. Joint Forces CommandU.S. Central Command
Related Articles:Joint Forces Command, Navy to Test Operational Concepts


text:
A telemetering system permits multiple functions to be monitored in response to each interrogation pulse by utilizing multiple sets of reply frequencies to distinguish between simultaneous reply pulses. The status of the various functions is displayed on a color television screen segmented into a grid wherein the color of each grid location represents the status of a respective monitored function. Remote utility meter reading is effected using a single reply pulse per interrogation by monitoring only one dial of a multiple-dial meter for intervals of angular motion of the indicator and updating a total accumulated count at the central station each time a unit of fractional revolution is sensed. In a preferred embodiment, telemetering is effected via a coaxial cable dedicated solely to the telemetering system.
Revendications disponible en
Description (Le texte OCR peut contenir des erreurs.)
Turner et a1.
x1, 3,737,666 1 H n. I United States P: 3,737,858
June 5, 1973 To: Z:
541 VERSATILE TELEMETERING SYSTEM 3,179,883 4/1965 Farrow ..340/324 AD 3,268,814 8/1966 Duvivier ..340/1s3 [75] Inventors: Loyce A. Turner, Smyrna; Edward A. Rollor, Jr., Marietta, both of Ga.
[73] Assignee: Advanced Research Corporation,
Atlanta, Ga.
[22] Filed: July 13, 1971 [211 Appl. No.: 162,111
[52] US. CL, ..340/151,178/69.5,179/15 FD, 340/183, 340/203, 340/324 A '[51] Int. Cl. ..H04q 9/1 [58] Field of Search ..340/203, 204, 150,
[5 6] References Cited Primary Examiner-John W. Caldwell Assistant Examiner-Robert J. Mooney Att0rneyRose & Edell [5 7] ABSTRACT screen segmented into a grid wherein the color of each grid location represents the status of a respective monitored function. Remote utility meter reading is effected using a single reply pulse per interrogation by monitoring only one dial of a multiple-dial meter for intervals of angular motion of the indicator and updat- UNITED STATES PATENTS ing a total accumulated count at the central station 3,256,018 8/1966 Higgins "HMO/151 each time a unit of fractional revolution is sensed. In a 3,164,771 1/1965 Milford 340/151 preferred embodiment, telemetering is effected via a 3,445,814 5/1969 Spalti ....340/151 coaxial cable dedicated solely to the telemetering 3,210,498 10/1965 Jackson et al... ....335/206 system 3,579,252 5/1971 Goodman ...l78/7.85 3,179,931 4/1965 Middaugh ..'340/l63 33 Claims, 37 Drawing Figures CONTROL LUCflC CHANNEL 1 I M I i I 14 l w 1 1s l TRRNSDUCEPS RHNSDUCERS T RHNSDUC ERS Patented June 5, 1973 LNE COUNT CQECBND i l ELD) 1 7 Sheets-Sheet 3 LINE COUNT (FIRST HELD) \NVENTDQ$ LDYCE A. Turzumzar' enwmzo Q. EULLUR Jr.
AT TO QNEHS l 7 Sheets-Sheet 4 Patented June 5, 1973 AT'I'UMMhYS Patented June 5, 1973 l 7 Sheets-Sheet 9 AV UruV EON Patented June 5, 1973 17 Sheets-Sheet 10 \NVENTDQS LDYCE ATUENER 3;; amwmw A. RDLLDRAF.
2. @2535 Y mwmzsz W2: 0 5K 5m;
ATTO R MEYS VERSATILE TELEMETERING SYSTEM BACKGROUND OF THE INVENTION The present invention relates to remote monitoring communication (telemetering) systems of the type wherein a control station interrogates remote and diversely located stations to ascertain the condition of specified monitored functions. More specifically, the present invention relates to improving the versatility of such systems whereby the number and type of monitored functions may be significantly increased and expeditiously interpreted at relatively small expense.
Some prior art telemetering systems of the type with which the present invention is concerned include individual connections from each remote location to the central station. Other systems employ some form of time sharing or multiplexing to make use of a common transmission path between the central station and all of the remote locations. The latter type system is usually more economical than the former but is generally limited regarding the number of remote parameters which can be monitored. Specifically, the time sharing system requires the central station to transmit a series of coded interrogate signals, each signal in the series identifying a respective monitored parameter. A transponder for the remote parameter decodes the interrogate signals and responds for its monitored parameter by transmitting back to the central station a signal representing the 7 status of the parameter. In many instances, the time permitted between interrogations of a given parameter is limited by considerations of accuracy, security, or the like, thereby limiting the total number of parameters which can be monitored in a complete interrogation cycle. In some cases, where the system is controlled by or interfaces with a time-shared general purpose computer, computer time is limited, thereby limiting the number of parameters which can be effectively monitored by the system.
It is therefore one object of the present invention to provide a telemetering system of the type employing multiplexing techniques wherein a much greater number of parameters can be measured in a complete interrogation cycle than was possible in the prior art. It is another object of the present invention to increase the capacity of a multiplexed telemetering system without unduly increasing the cost and complexity of the interrogation equipment.
Another problem area in prior art telemetering systems concerns the medium by which information is transmitted. Some systems employ radio transmission; however federal regulations limiting broadcast band availability severely restrict the quantity and type of data which can be effectively transmitted. Other systems employ individual wire pairs for each transponder; this approach, however, is quite expensive where large numbers of transponders are employed, the expense resulting from the necessity of laying and connecting the many wire pairs required. In addition, the individual wire pair approach has the problem of limited frequency response.
Another approach to datatransmission in telemetering systems is the shared utilization of existing telephone lines. This approach has the disadvantages of leasing expense, poor frequency response, and the fact that the lines (when carrying conversations) are not always available for data transmission. This, of course,
severly limits the times during which remote meters may be interrogated.
Still another approach to data transmission in telemetering systems is the sharing of an existing CATV coaxial cable. At the present time, however, this approach requires some compromise in performance of the television transmission system, and exposes the data transmission system to failures in the CATV system. Although the present invention can be employed in this manner, it is ideally suited for use with a special coaxial cable, requiring no active devices directly to the signal path. This can be an extremely important factor in transmission of emergency alarms, wherein protection of human life is involved.
It is therefore another object of the present invention to provide an approach to transmitting interrogation and data signals in a telemetering system wherein the disadvantages attendant with prior art signal transmissions can be substantially eliminated without undue expense.
Another problem in prior art telemetering systems relates to the monitoring of remote alarms and particularly to the display of alarm conditions. Most central station alarm systems are rather large and complicated, usually employing a meter or a plurality of lamps for each alarm function. Alternatively, only a single alarm indication is provided and the central station operator is required to actuate a series of controls to identify the location of an indicated alarm condition.
It is a further object of the present invention to provide a novel compact display arrangement for a telemetering system wherein the current status of each of a multiplicity of monitored functions is clearly indicated and identified.
Many prior art telemetering systems have been designed to'effect remote reading of utility meters or similar meters which monitor a continuously increasing parameter. Unfortunately, these prior art systems have not been sufficiently compatible with central station alarm telemetering systems to permit both types of functions to be efficiently monitored by a common system. Moreover, and apart from compatability with alarm monitoring systems, prior art remote utility meter reading has been fraught with the disadvantages of expensive and complex decoding circuitry. For example, prior art approaches to remotely monitoring residential electric power meters have required a complex decoder at each remote location to convert the reading of all four meter dials into a form suitable for transmission back to the central station. The coded reading is then transmitted, usually in the form of multiple binary signals, to appropriate decoding circuitry at the central station. Where the multiple binary signals are in parallel form, many individual lines, connections, and circuits are required at the remote location. Where the multiple binary signals are in serial form, complex circuitry is required at the remote location; but possibly more important is the fact that precious time is consumed in transmitting the serial information for each parameter, thereby limiting the number of parameters which can reasonably be monitored in a limited interrogation cycle.
One prior art approach for simplifying data transmission of remote meter readings is described in U.S. Pat. No. 3,445,814. The problem with that approach however is its lack of adaptability to presently employed utility meter mechanisms and its requirement for considerable modification with additional structure at the remote location.
It is therefore an object of the present invention to effect efficient remote meter reading of existing utility meter types with a minimum of equipment at the remote location. Specifically, it is an object of the present invention to provide an approach to remote meter reading wherein only a single bit need be transmitted from the remote location to indicate the status of the meter at that location.
SUMMARY OF THE INVENTION In accordance with one aspect of the present invention, a central station transmits a series of pulses of an interrogate frequency signal to multiple remote channels, preferably, though not necessarily, via a coaxial cable dedicated to the telemetering system. Each channel includes one or more transponders which count the interrogate frequency pulses and which are responsible for monitoring the state of one or more parameters. The monitored parameters in each channel are assigned numbers in a series corresponding to the series of interrogate pusles. The transponder sends back a pulse of either a first reply frequency signal or a second mechanical reply frequency signal according to the state of the monitored parameter having an assigned number corresponding to the current interrogate pulse. Each channel utilizes a different set of reply frequencies to permit maximum utilization of the range/frequency characteristics of the transmission medium. The reply pulses are transmitted, preferably, though not necessarily, via the dedicated coaxial cable to the central station where filters are provided to sort simultaneously received reply pulses according to the frequency of the pulsed signal.
In accordance with another aspect of the present invention a compact data display comprises a color television monitor having a viewing screen which is segmented into a grid of columns and rows. Each grid location represents a repective monitored parameter, the status of each parameter being represented by the color of its corresponding grid location.
In accordance with another aspect of the present invention, existing types of remote utility meters are monitored on an incremental basis whereby a switch is sequentially opened and closed for successive intervals of angular displacement of only one of the plural indicator dials of the meter. The telemetry system interrogates this parameter sufficiently often to preclude the possibility of the switch changing states more than once between interrogations. At the central station the current state of the switch is compared to the previous state and any change in state increments an accumulated count. The switch is preferably a magnetic reed placed on one side of an indicator dial, opposite a permanent magnet. A magnetic shield overlays half the dial permitting sequential opening and closing of the reed switch by the magnet for successive half cycles of the dial. Other means of producing a switch actuator related to rotation of the indicator dial are satisfactory, i.e., a cam actuated contact.
BRIEF DESCRIPTION OF THE DRAWINGS The above and still further objects, features and advantages of the present invention will become apparent upon consideration of the following detailed description of specific embodiments thereof, especially when taken in conjunction with the accompanying drawings, wherein:
FIG. 1 is a functional block diagram of a telemetering system according to the present invention;
FIG. 1a is a functional block diagram of a modified version of the system of FIG. 1;
FIG. 2 is a diagrammatic illustration of a television display screen according to the present invention;
FIGS is a more detailed functional block diagram of the system of FIG. 1 as employed in conjunction with the display of FIG. 2;
FIG. 4,511, 5b, 6, 8, 9,14,15, 16,17,18 and 18a are more detailed schematic diagrams of various functional blocks illustrated in FIG. 3;
FIGS. 7, 12, 13 and 13a are timing diagrams for various signals provided in the system of FIG. 3;
FIG. 10 and 11 (a throughj) are diagrammatic illustrations of detailed portions of the display of FIG. 2;
FIGS. 19 and 20 are front and side views, respectively, ofa utility meter adapted for remote meter reading according to the present invention;
FIG. 21 is a simplified schematic representation of a typical transducer circuit capable of utilization with the telemetering system of the present invention;
FIG. 22 is a diagrammatic representation of a modified version of the remote meter reading approach of the present invention;
FIG. 23 is a block diagram illustrating circuitry at the central station which cooperates with the remote meter reading approach of the present invention; and
FIG. 24 is a block diagram illustrating a portion of the system of FIG. 1 when employed to monitor pay TV billing information.
DESCRIPTION OF PREFERRED EMBODIMENTS Referring specifically to FIG. 1, a telemetering system includes a central station and multiple remote transponders communicating via a signal transmission medium. For purposes of the system and components described below, the transmission medium may be multiple wire pairs, telephone lines, radio links, shared usage of a CATV cable, or any conventional electrical signal transmission medium. Preferably, however, the transmission medium comprises a separate coaxial cable dedicated solely to utilization by the telemetering system. Such a cable can be inexpensively installed, especially when installation is contemporaneous with a CATV cable. In addition, the primary advantage of the dedicated cable resides in the fact that the transmission medium is always available for telemetering system purposes. The coaxial cable is particularly advantageous relative to the multiple wire pair and telephone line approaches in that a much greater range of signal frequencies can be transmitted over the coaxial cable; further a relatively small cable can be selected to pass frequencies in the particular range desired for the telemetering system. The dedicated cable is also particularly advantageous relative to shared utilization of a CATV cable for the following reasons: (a) the telemetering system signals do not have to be tailored to prevent interference with television signals; (b) since telemetering signals are binary in nature, the extreme precautions required to prevent television ghosts resulting from line reflections are not necessary for the dedicated cable; (c) the dedicated cable may be laid out for optimization of telemetering signal transmission rather than for television signal transmission as in the CATV
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text:
"Tendulkar is my sporting hero and because of the aura he carries, I still have difficulties speaking up to him outside a cricket field. But on field, I always give my honest inputs about team strategy," Dhoni said.
"Tendulkar and I used to discuss team strategy on the field. If I am convinced I would even disagree with him and it happened quiet often. I think my honesty has paid dividends when he recommended me for captaincy. He might be thinking that
I have learnt in quick time on different aspects of the game and team strategy," he said.
"Even if I was not made the captain, it was a huge thing that Tendulkar had recommended my name for captaincy," the Indian captain said at a book launch here on Wednesday.
Dhoni revealed that when he met Tendulkar for the first time more than 10 years back, he could not speak to him but ended up serving the veteran batsman drinks on the field.


text:
Posted at: 01/18/2013 9:38 PM
Updated at: 01/18/2013 10:14 PM
By: Naomi Pescovitz
The Metro's mild forecast won't last long. Single digit and sub-zero temperatures are expected into Sunday, leaving local heating companies planning for a busy weekend.
Greg Ryan, owner of Ryan Plumbing and Heating in St. Paul, says he will have all men on board.
"I anticipate the phones to continuously ring," Ryan said.
With 8 field employees, Ryan expects 30 to 50 calls an hour once the cold hits.
"We're going to be working full time and everybody has been notified. All of our staff has been notified that they are going to be working overtime and into the evening," Ryan said.
There are ways homeowners can look out for their own heating systems before the temperatures drop. Ryan recommends keeping doors closed and putting blankets under loose doorways or windows.
"Let's be careful with making sure the heat stays in, the cold stays out. Any noises that originate from your heating system, have them looked at right away," Ryan said.
Ryan also recommends turning your thermostat up slightly before the cold arrives so it does not have to work as hard or long during the cold snap.


text:
A wafer processing system employing a single-wafer load lock with a cooling unit is disclosed. The small volume of the single-wafer load lock allows for fast pump down and vent cycles. By providing a cooling unit within the load lock, system throughput is further increased by eliminating the need to move a newly processed wafer to a separate cooling station before moving the wafer to the load lock. In another embodiment, the wafer processing system includes a load lock having the capability to both heat and cool a wafer. This further increases throughput in processes where the wafer needs to be pre-heated before putting the wafer in the reactor by eliminating the need for an intermediate pre-heating station.
1. A load lock for a semiconductor wafer processing system comprising:
a load lock chamber having first and second openings and first and second doors for opening and closing said first and second openings, respectively;
an upper level including an upper pedestal;
a lower level including a lower pedestal;
a heating unit for heating a wafer on one of said pedestals and a cooling unit for cooling a wafer on the other of said pedestals; and
a pump for reducing the pressure in said load lock.
2. The load lock of
3. The load lock of
4. The load lock of
5. The load lock of
a first actuator for lifting and lowering said upper pedestal with respect to said upper pins;
a second actuator for lifting and lowering said lower pedestal with respect to said lower pins;
a pin support, said upper and lower pins being mechanically coupled to said pin support; and
a third actuator mechanically coupled to said pin support and said first and second actuators.
6. The load lock of
7. The load lock of
8. The load lock of
9. The load lock of
10. The load lock of
11. The load lock of
12. The load lock of
13. A system for processing a semiconductor wafer comprising:
a loading station;
a load lock according to
a first robot for moving the wafer between said loading station and said load lock;
a reactor;
a transfer chamber in communication with said reactor and said load lock; and
a second robot for moving the wafer between said load lock and said reactor.
14. A method for processing a semiconductor wafer using a loading station, a reactor, and a load lock, the load comprising an upper level including an upper pedestal, a lower level including a lower pedestal, a heating unit for heating a wafer on said upper pedestal, and a cooling unit for cooling a wafer on said lower pedestal; said method comprising:
moving said wafer from said loading station to said upper pedestal;
heating said wafer using said heating unit;
moving said wafer from said upper pedestal to said reactor;
processing said wafer within said reactor;
moving said wafer from said reactor to said lower pedestal;
cooling said wafer using said cooling unit; and
moving said wafer from said lower pedestal to said loading station.
15. The method of
moving said wafer from said loading station to said upper pedestal comprises moving said wafer from said loading station to a position at rest on said upper pins and lifting said upper pedestal to support said wafer;
moving said wafer from said upper pedestal to said reactor comprises lowering said upper pedestal so that said wafer rests on said upper pins;
moving the wafer from said reactor to said lower pedestal comprises moving the wafer from said reactor to a position at rest on said lower pins and lifting said lower pedestal to support said wafer; and
moving the wafer from said lower pedestal to the loading station comprises lowering said lower pedestal so that said wafer rests on said lower pins.
16. The method of
This application is a continuation-in-part of U.S. patent application Ser. No. 09/346,258, filed Jun. 30, 1999, which claims priority from U.S. Provisional Application No. 60/092,242 filed Jul. 10, 1998.
1. Field of the Invention
The invention generally relates to semiconductor device manufacturing equipment.
2. Description of the Related Art
In the semiconductor industry, special wafer processing systems are used to convert bare semiconductor wafers into working devices. Typically, the wafer processing system has a reactor for processing wafers and a wafer handling system for moving wafers to and from the reactor. The reactor or process module is where wafer processing such as film deposition or etching occurs. The wafer handling system is mechanically coupled to the reactor and has a loading station on which wafers can be loaded from the factory floor. Once loaded onto the loading station, wafers are transferred to and from reactors using mechanical manipulators such as robots.
FIG. 1 shows a wafer processing system in the prior art. Wafer processing system 1 includes a reactor 2 and a wafer handler 3. Wafer handler 3 further includes a user interface 4, a loading station 5, load locks 7A and 7B, and a transfer chamber 6. User interface 4 has a display terminal for entering and reading information and a computer system (not shown) for controlling the operation of wafer processing system 1.
A typical wafer handling sequence for wafer processing system 1 is as follows. Wafer cassette or carrier 10 is moved from loading station 5 into load lock 7A by an indexer robot 28A. Pressure within load lock 7A is decreased using a vacuum pump (not shown). When the desired pressure differential between transfer chamber 6 and load lock 7A is reached, load lock 7A is opened to transfer chamber 6 and a wafer 11 is picked up from wafer carrier 10 and then transferred to reactor 2 by vacuum robot 9. Wafer 11 is then processed inside reactor 2. When processing is completed, wafer 11 is moved from reactor 2 and placed into a cooling station 8 by vacuum robot 9. Cooling of wafer 11 is required because wafer processing temperatures can reach as high as 650° C. whereas wafer carrier 10 typically has a limitation of 70° C., beyond which deformation begins. When cooled, vacuum robot 9 transfers wafer 11 from cooling station 8 and into its original wafer carrier (carrier 10) inside load lock 7A. The other wafers in carrier 10 are processed in a similar manner. After all wafers originally contained in wafer carrier 10 have been processed, load lock 7A is vented to atmospheric pressure, after which cassette 10 is transferred from load lock 7A back to loading station 5.
Load locks 7A and 7B function as transition chambers between transfer chamber 6, which is maintained under vacuum, and loading station 5, which is at atmospheric pressure. Load locks 7A and 7B are referred to as batch load locks because they accommodate multiple wafers, typically in a carrier, at a time. Because load locks 7A and 7B do not have an integral cooling unit, cooling station 8 must be provided within transfer chamber 6. Providing cooling station 8 outside load lock 7A significantly cuts down on the number of wafers that can be processed within a given amount of time because vacuum robot 9 has to move a processed wafer to cooling station 8 before moving the processed wafer into load lock 7A.
In a batch load lock, pump down and vent operations take time because batch load locks must have a volume large enough to accommodate multiple wafers. The long pump down and vent times of the batch load lock adversely affect the wafer processing system's throughput or the number of wafers that the system can process within a given amount of time. This throughput problem is compounded when the system is used with partially filled wafer carriers, as is the case in many factories, specially those involved in custom device fabrication.
The large volume and large internal surface area of batch load locks raise micro-contamination problems. The walls of a load lock adsorb moisture every time the load lock is vented and exposed to atmospheric pressure. This moisture outgasses at operating pressures, creating partial pressure build-up of gases such as, for example, H2O, N2, or O2 in the transfer chamber and the reactor. The larger the load lock, the greater the chance of micro-contaminants entering the transfer chamber and reactor. Further, the load lock must be pumped down to a pressure slightly lower than that of the transfer chamber to prevent micro-contaminants from getting into the transfer chamber. Obtaining this lower pressure takes additional time in a batch load lock because of its large volume.
In order to alleviate the throughput problems associated with batch load locks, some batch load lock systems transfer multiple wafers at a time from the loading station to the load locks. A problem with this approach is that moving multiple wafers at a time increases the chance of wafer handling errors or breakage. Further, all ancillary wafer operations such as wafer alignment, wafer ID reading, and metrology must be performed inside the load lock or transfer chamber under vacuum. This leads to increased complexity and implementation cost.
U.S. Pat. No. 5,512,320 to Turner et. al., incorporated herein by reference, discloses a batch load lock with an integral metallic carrier for cooling processed wafers. In Turner, as in any batch load locks, an elevator is required for incrementally raising each shelf of the metallic carrier to the same level as the vacuum robot or an external atmospheric robot. Because the elevator must be precisely controlled for proper wafer exchange with the vacuum and atmospheric robots, the elevator is essentially a robot which not only complicates but also raises the cost of the wafer processing system. Further, Turner suffers from the same problems associated with batch load locks in the prior art.
Thus, there is a clear need for a wafer processing system that has better throughput, has better contamination control, and is less expensive to implement than those in the prior art.
The invention provides for a modular wafer processing system. In one embodiment, the modular wafer processing system includes a single-wafer load lock having a cooling unit within. Having a cooling unit within the single-wafer load lock provides for increased system throughput because processed wafers can be directly transferred from the reactor and into the load lock. Throughput is further increased by reducing the volume of the single-wafer load lock to allow for fast pump down and vent times.
In another embodiment of the invention, the modular wafer processing system includes a load lock having the capability to heat and cool a wafer within the load lock. In processes requiring the wafer to be pre-heated before moving the wafer into a reactor, the capability to heat the wafer in the load lock increases throughput because the wafer can be directly moved from the load lock and into the reactor without having to move the wafer into an intermediate pre-heating station. Having a cooling unit within the load lock further increases throughput because processed wafers can be directly transferred from the reactor and into the load lock.
The present invention may be better understood, and its numerous objects, features, and advantages made apparent to those skilled in the art by referencing the accompanying drawings.
FIG. 1 is a top view of a wafer processing system in the prior art.
FIG. 2 is a top view of a wafer processing system in accordance with the present invention.
FIG. 3 is a top view showing a location for optional devices which can be used with a wafer processing system in accordance with the present invention.
FIG. 4 is a cross-sectional view of a single-wafer load lock in accordance with the present invention.
FIG. 5 shows a top view of a load lock in accordance with the present invention.
FIG. 6 shows a cross-sectional view of the load lock shown in FIG. 5.
FIG. 7 shows another cross-sectional view of the load lock shown in FIG. 5.
The use of the same reference symbols in different drawings indicates similar or identical items.
FIG. 2 shows an embodiment of a wafer processing system according to the present invention. Modular wafer processing system 12 comprises a process module or reactor 13 and a wafer transfer system (WTS) 14. An example of modular wafer processing system 12 is the model CONCEPT-3™ wafer processing system manufactured by Novellus Systems, Inc. of San Jose, Calif. Reactor 13 in this particular example is a chemical vapor deposition reactor but could be any semiconductor manufacturing reactor such as those used for etching or physical vapor deposition. Wafer processing system 12 can accommodate a plurality of reactors but only one is shown for clarity of illustration.
WTS 14 further includes a front end module 15 and a transfer module 17. Front end module 15 includes a loading station 19 for loading and unloading wafers which are typically in a wafer carrier. Loading station 19 can accommodate commercially available interfaces such as pod loaders or open cassette stages. Front end module 15 also includes an atmospheric robot 20 for moving wafers between loading station 19 and single-wafer load locks 16A and 16B. Atmospheric robot 20 is a conventional 3-axis robot mounted on a fourth translation axis for movement in the direction shown by arrow 29. An example of atmospheric robot 20 is the model 400 Series from Equipe Technologies of Sunnyvale, Calif. The use of other robot configurations is also possible. To minimize wafer handling errors and to simplify wafer ancillary operations, atmospheric robot 20 is designed to pick up one wafer at a time from loading station 19. As shown in FIG. 3, front end module 15 can also be fitted with a wafer aligner and/or protective electrostatic cover (PEC) storage in location 21. The wafer aligner is used for detecting the XY offset of the wafer as well as the wafer notch orientation. The wafer aligner can be any standard wafer aligner unit which is readily available in the semiconductor industry. The PEC consists of one or more horizontally placed shelves located above the wafer aligner.
As shown in FIG. 2, transfer module 17 comprises a transfer chamber 18 and single-wafer load locks (SWLL) 16A and 16B. Transfer chamber 18 includes a vacuum robot 22, a 3-axis polar coordinate robot with two opposing end effectors, for moving wafers between reactor 13 and SWLL 16A and 16B. An example of vacuum robot 22 is the MAGNATRAN™ Model MAG-7 from Brooks Automation, Inc. of Chelmsford, Mass. Any conventional robot may be used without detracting from the merits of the invention. SWLL 16A and 16B are transition chambers between transfer chamber 18, which is maintained under vacuum, and front end module 15, which is at atmospheric pressure. Although the following discussion will be equally applicable to either SWLL 16A or SWLL 16B, only SWLL 16A will be referred to in the interest of clarity. For example, while a description recites moving a wafer to SWLL16A, it is to be understood that the same wafer can be moved to either SWLL16A or SWLL16B, whichever is available. FIG. 4 shows a cross-sectional view of SWLL 16A taken at IV—IV in FIG. 3. Unlike load locks in the prior art, SWLL 16A is a reduced volume load lock and can accommodate only one wafer at a time. SWLL 16A's reduced volume and correspondingly reduced internal surface area allow for better micro-contamination control.
SWLL 16A's small volume provides for maximum system throughput. Because SWLL 16A has a volume of about 5.0 liters, for example, it is capable of pump down and vent times of 10 seconds or less. In contrast, batch load locks typically have a volume greater than 90 liters and can take as long as 3 minutes to pump down or vent. The fast pump down and vent times of SWLL 16A reduce the amount of time a wafer spends in the system (wafer cycle time). Short wafer cycle times provide for high system throughput. Appendix 1 shows load and unload time calculations for various load lock architectures while Appendix 2 shows the corresponding cycle times. Note that although SWLL 16A must be loaded and unloaded 25 times in a 25 wafer run, only the first load and unload cycle affects system throughput. This is because SWLL16A can pump down and vent faster than the vacuum robot can move a wafer from SWLL16A to a reactor and from a reactor to SWLL16A. In other words, vacuum robot 22 does not have to wait for SWLL16A to be available. Thus, a batch load lock's capability to process multiple wafers in a single load and unload cycle does not compensate for the batch load lock's long pump down and vent times.
As shown in FIG. 4, SWLL 16A includes a door 23, a pedestal 24, a pedestal lift 25, a slit valve 26, and a plurality of pins 27. Door 23 faces front end module 15 and allows atmospheric robot 20 to access SWLL 16A while slit valve 26 faces transfer chamber 18 to provide access for vacuum robot 22. Slit valve 26, a widely known component in the semiconductor industry, has a gate which moves in a vertical direction for sealing or opening SWLL 16A. An example of slit valve 26 is the model VAT Series 03 Type-L from VAT, Inc. of Woburn, Mass. To seal SWLL 16A, door 23 is closed and slit valve 26 is placed in the up position.
Pedestal 24 supports the wafer while SWLL 16A is being pumped down to vacuum or vented to atmospheric pressure. For cooling the wafer, pedestal 24 is water cooled using conventional methods. For example, plumbing can be routed through pedestal lift 25 to supply water to cooling channels within pedestal 24. U.S. Pat. No. 5,512,320 to Turner et. al., incorporated herein by reference, also discloses liquid cooling means. Other cooling methods can also be used without detracting from the merits of the present invention. Because a cooling unit in the form of water cooled pedestal 24 is integrated within SWLL 16A, vacuum robot 22 can move a processed wafer directly to SWLL 16A instead of having to move the processed wafer to a separate cooling station, saving a move step and increasing throughput. In comparing the architectures of WTS 14 and wafer handler 3 (shown in FIG. 1), it is evident that WTS 14 requires the wafer to be moved by vacuum robot 22 only twice (load lock to reactor, reactor to load lock) whereas wafer handler 3 requires the wafer to be moved 3 times (load lock to reactor, reactor to cooling station, cooling station to load lock). Assuming each wafer movement takes 10 seconds, throughput for WTS 14 and wafer handler 3 can be calculated as shown in Table 1. Thus, considering vacuum robot 22 as the limiting component of WTS 14, the present invention can realize an increased throughput of 60 wafers per hour (180 wph−120 wph), or a 50% increase over wafer handler 3.
Pedestal lift 25 provides vertical travel for pedestal 24 to allow the wafer to be lifted from or placed on pins 27 during wafer exchange. Unlike the elevators or indexer robots used in batch load locks, pedestal lift 25 only has an up and a down position. Those skilled in the art will appreciate that a two position lift does not need precise control and can be actuated using, for example, low-cost conventional pneumatic methods. Further, pins 27 define a fixed wafer pick-up or placement point for both vacuum robot 22 and atmospheric robot 20, simplifying robot alignment requirements in the system.
Wafer transfer and processing according to the teachings of the present invention are now described. A wafer carrier containing pre-processed wafers is loaded onto loading station 19 shown in FIG. 2. Ancillary wafer operations, such as wafer mapping, are performed on the pre-processed wafers. Atmospheric robot 20 then picks up a single pre-processed wafer from loading station 19 and places the pre-processed wafer through door 23 onto pins 27 within SWLL 16A or SWLL 16B, whichever is available. If an optional wafer aligner, wafer ID reader, or metrology unit is installed, the pre-processed wafer is moved to said optional units in location 21 shown in FIG. 3 before the pre-processed wafer is placed on pins 27 inside SWLL 16A (or SWLL 16B). SWLL 16A is sealed (i.e. door 23 and slit valve 26 are closed) and, simultaneously, pedestal 24 is lifted to raise the pre-processed wafer from pins 27. SWLL 16A is then pumped down. When the desired pressure differential between transfer chamber 18 and SWLL 16A is reached, slit valve 26 is opened (i.e. placed in the down position) while, simultaneously, pedestal 24 is lowered to rest the pre-processed wafer on pins 27. Vacuum robot 22 picks up the pre-processed wafer from pins 27 and moves the pre-processed wafer into reactor 13 for processing. Subsequently, vacuum robot 22 picks up a processed wafer from reactor 13 and places the processed wafer on pins 27 within SWLL 16A or 16B, whichever is available. Once the processed wafer is inside SWLL 16A (or SWLL 16B), slit valve 26 is closed (i.e. placed in the up position) and pedestal 24 is lifted to raise the processed wafer from pins 27. While SWLL 16A is vented to atmospheric pressure, pedestal 24 cools the processed wafer to a temperature below 70° C. When SWLL 16A reaches atmospheric pressure, door 23 opens and pedestal 24 is lowered to rest the processed wafer on pins 27. Atmospheric robot 20 picks up the processed wafer from pins 27 for movement to loading station 19, completing the wafer processing cycle. During vent operations and during wafer exchange with atmospheric robot 20, it is desirable to purge SWLL 16A with an inert gas, such as nitrogen, argon, or helium, to prevent moisture from adsorbing onto the surfaces of the load lock.
In another embodiment of the invention, a load lock 500, which is shown in FIG. 5, is used in wafer processing system 12 instead of SWLL 16A (or SWLL 16B). FIG. 5 shows a top view of load lock 500 and end-effectors 501 and 502, which are attached to vacuum robot 22 and atmospheric robot 20, respectively. Referring to FIG. 6, which shows a cross-sectional view of load lock 500 taken along section VI—VI in FIG. 5, load lock 500 has an upper level, which includes an upper pedestal 616 for heating a pre-processed wafer, and a lower level, which includes a lower pedestal 617 for cooling a processed wafer. Pedestals 616 and 617, and thus the heating and cooling functions, may be implemented in either level of load lock 500. The upper level has upper pins 602 for supporting a pre-processed wafer thereon during wafer exchange. Once the pre-processed wafer is on upper pins 602, load lock 500 is sealed (i.e. doors 503 and 504 shown in FIGS. 5 and 7 are closed) and upper pedestal 616 lifts the pre-processed wafer from pins 602. The pre-processed wafer is heated while load lock 500 is pumped down to vacuum pressure. Subsequently, door 504 opens, pedestal 616 lowers the pre-processed wafer onto upper pins 602, and robot 22 moves the pre-processed wafer to a reactor. Both the upper and lower levels of load lock 500 are raised such that the lower level lines up with the opening of door 504. Robot 22 then moves a processed wafer from the reactor and onto lower pins 603. Once door 504 closes, pedestal 617 lifts the processed wafer from lower pins 603. The processed wafer is cooled while load lock 500 is vented to atmospheric pressure. Thereafter, door 503 opens, pedestal 617 lowers the processed wafer onto lower pins 603, and the processed wafer is picked-up by atmospheric robot 20. The upper and lower levels of load lock 500 are then lowered such that the upper level lines up with the opening of door 503. Atmospheric robot 20 places another pre-processed wafer onto upper pins 602 to repeat the processing cycle.
Upper pedestal 616 is attached to a shaft 612 which is coupled to a piston 610. When air is pumped into an air cylinder 609, piston 610 is pushed upwards thereby lifting upper pedestal 616 via shaft 612. As shown in FIGS. 5 and 6, upper pedestal 616 has an embedded channel 614, which is coupled to channel 613 of shaft 612, to accommodate resistive heating elements (not shown) or heating liquid for heating the pre-processed wafer. The pre-processed wafer may also be heated using other heating methods such as by using irradiative heating elements (e.g. lamps).
Load lock 500's lower level is configured similarly to its upper level. Referring to FIG. 7, which shows a cross-sectional view of load lock 500 taken along section VII—VII in FIG. 5, a lower pedestal 617 lifts a processed wafer from lower pins 603 when air is pumped into an air cylinder 701 thereby driving upwards a shaft 702 which is attached to lower pedestal 617. Lower pedestal 617 has a channel 615 through which a cooling liquid is flown to cool the processed wafer while load lock 500 is vented to atmospheric pressure. Channel 615 is coupled to a channel (not shown) within shaft 702.
As shown in FIG. 6, upper pins 602 and lower pins 603 are supported by a pin support 601. Pin support 601 is attached to a shaft 604 which is coupled to a piston 607 of an air cylinder 608. When air is pumped into cylinder 608, piston 607 pushes shaft 604 upwards, thereby lifting pin support 601, upper pins 602, and lower pins 603. Shaft 604 is also attached to a mounting frame 611 which, in turn, supports air cylinder 609 and air cylinder 701 (FIG. 7). Thus, pumping air into cylinder 608 not only lifts pins 602 and 603, but pedestals 616 and 617 (via shafts 612 and 702) as well. This allows either level of load lock 500 to line up with the openings of doors 503 and 504 and provide robot access during wafer exchange. Bellows 605, 606, and 703 are employed to vacuum seal the openings used by shafts 604, 612, and 702, respectively. Doors 503 and 504 (FIGS. 5 and 7) may be any conventional hinged door, sliding door, slit valve, or gate valve.
Dimples (not shown) which are approximately 0.0012 inch in height may be added to the surface of pedestals 616 and 617 of load lock 500 and pedestal 24 of SWLL 16A (or SWLL 16B). Such dimples can be made, for example, by embedding items such as balls (e.g. sapphire balls) or pins into a pedestal's surface. Dimples can also be made by machining the pedestal. By providing dimples on the pedestal surface, the entire wafer does not directly contact the pedestal. The resulting gap between the wafer and the pedestal allows for uniform heat or cooling transfer thereby preventing wafer warpage due to temperature gradients. The use of dimples on a pedestal surface including other techniques which may be applicable to pedestals in general is also described in commonly-owned U.S. Provisional Application No. 60/154,438, filed Sep. 17, 1999, entitled "Apparatus and Method For Semiconductor Wafer Cooling, Heating, and Backside Particle Control," which is incorporated herein by reference in its entirety.
In processes requiring the wafer to be pre-heated before moving the wafer into a reactor, the capability to heat the wafer within load lock 500 increases system throughput because the wafer can be directly moved from load lock 500 and into the reactor without having to move the wafer to an intermediate pre-heating station or to spend additional time pre-heating the wafer in the reactor. Having a cooling unit within load lock 500 also increases throughput because the wafer can be directly transferred from the reactor and into load lock 500, eliminating the need to move the wafer to an intermediate cooling station. Of course, the cooling unit and heatings unit of load lock 500 are not limited to any specific application and may be used for both incoming (to be processed) and outgoing (processed) wafers. Further, load lock 500 may be built such that one level is passive (i.e. does not have a heating unit or a cooling unit) while another level has a heating unit or a cooling unit. Load lock 500 may also have more than two levels.
The above detailed description is provided to illustrate the specific embodiments of the present invention and is not intended to be limiting. It is to be understood that numerous variations and modifications within the scope of the present invention are possible. For example, robots, cooling methods, and heating methods which are different from that disclosed herein can be used without detracting from the merits of the present invention. Further, the invention can be used for moving wafers in a variety of semiconductor manufacturing applications. The invention is set forth in the following claims.
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Man - please tell me how he can get away with everything he is doing? GCCF is doing it now to the Gulf Coast people, OB's doing to the American people - I sure hope the House holds their feet to the fire and not let up.


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OZARK (KFSM)-There's no where to go but up from last season for the Ozark football team. They saw their season fall apart after a record year in 2012.
"Last year was a really rough year for us," said senior left tackle Ryan Hopper. "The year before we went to the state championship, lost, but that's 12 wins the year before and two wins last year."
The 2013 season is one to forget. A small offensive and defensive line, injuries and a lack of experience led to the ten game drop off. This year is the exact opposite. The seniors were sophomores on that state-runner up team. Now they use their experience of success to lead the others.
"I learned quite a bit from them, interacting with them at school and football and lifting with them" said right guard Patrick McCartney. "I gained a lot of strength mentally and physically from practicing with them."
Although there's not a lot of depth to the linemen, their size makes up for it along with their strength in the backfield.
"Last year we had a pretty small line, at one point we had four sophomores starting," said McCartney. "We averaged maybe 190 last year on the line but this year we are averaging a little over 250."
"We've got a few more skill guys this year coming back, especially coming off the junior high team from last year," said head coach Jeremie Burns. "Skill guys, we are a little better off depth wise."
With an improved team and a shakeup in the conference, players are confident they'll have success.
"We're excited to be in the new conference that we are in, we will see some new competition that we haven't played in the past years," said Jenkins. "I feel like we match up well with most of them and we can really compete."
Of course the HIllbillies look forward to one game more than most-week one against Booneville.
"This is Booneville. We don't like each other, that's a big deal," said Hopper. "It's a huge game for us, it's a big confidence boost."


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Gear Question
hello, im from argentina. can you send me...
hello, im from argentina. can you send me this product? how much it costs?
Brandon Collett
Unfortunately, we cannot ship to Argentina. If you know someone in the US to have them shipped to, you could go about it that way.
View More Details on Nike Mavrk Low 2 Skate Shoe - Men's


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August 3, 2015
As of Friday, June 22nd, Rice was in 38th place out of 107 bikers, despite injuring his ankle in a minor crash.
A College Station man has started a race down the continental divide and he's doing it in the memory of those who died in the PHI helicopter crash in 2008.
The race started Friday morning in Banff, Canada four years to the day that the PHI crew tragically lost their life.
Billy Rice is off to a good start and Friday his father sent us these pictures of Billy starting his 2700 mile ride from Canada to the Mexican border.
You can keep up with Billy through a GPS tracker he'll be wearing throughout the race.
We've got a link to Billy's tracker below.
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Actor Bob Hoskins dies at the age of 71
Posted: April 30, 2014|
BOB HOSKINS, one of Britain's most popular actors, has died from pneumonia.
The movie star, who spent time on stage in the Potteries doing productions like 'Romeo and Juliet' during the 1960s, was 71 years old.
Hoskins, who starred in well-known films like 'Who Framed Roger Rabbit?' and 'Hook', also received an Academy Award nomination for 'Mona Lisa' in 1986.
But the Londoner retired from screen work in 2012 after he was diagnosed with Parkinson's disease.
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His family released a statement confirming he died last night in hospital.
His wife Linda and children Alex, Sarah, Rosa and Jack said: "We are devastated by the loss of our beloved Bob.
"Bob died peacefully at hospital last night surrounded by family, following a bout of pneumonia.
"We ask that you respect our privacy during this time and thank you for your messages of love and support."
The diminutive actor with the gravelly cockney accent - who often played rough-edged characters with a heart of gold - was also familiar to millions for his ad campaign for British Telecom in which he told viewers: "It's good to talk".
One role he is said to have regretted was playing one of the Super Mario Bros in the film of the same name based on the hit computer game.
He had a better time with a role he did not win - when a proposed move to replace Robert De Niro as Al Capone in The Untouchables fell through he was given a £20,000 pay-off by director Brian De Palma, prompting Hoskins to ask if he had any more films he did not want him to be in.
He continued to work steadily - appearing alongside Dame Judi Dench in wartime drama Mrs Henderson Presents, playing one of the seven dwarfs in Snow White And The Huntsman, starring Kristen Stewart, and appearing in British films including Made In Dagenham and Outside Bet.
The star - who had been married to his second wife, Linda, for more than 30 years - also moved into directing with The Raggedy Rawney and Rainbow.
Despite his flourishing big-screen career, Hoskins took a role in Jimmy McGovern's BBC1 series The Street in 2009, winning an international Emmy.
He announced his 2012 retirement after what he called a "wonderful career" and said he was looking forward to spending time with his family.
Culture Minister Ed Vaizey paid tribute, saying: "For decades, Bob Hoskins has entertained television and film audiences of all age groups around the world. The British film industry has lost one of its true greats, and my thoughts and sympathies go out to his family and friends."


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Posted on 1 September 2013
- 18:58
Gareth joined from Southampton in May 2007 and during his six years with the Club made 203 appearances, scoring 55 goals
Chairman, Daniel Levy commented, "Gareth was a player we had absolutely no intention of selling as we look to build for the future. He is a player whose career we have fostered and developed and he was only a year into his new four year contract.
"Such has been the attention from Real Madrid and so great is Gareth's desire to join them, that we have taken the view that the player will not be sufficiently committed to our campaign in the current season.
"We have, therefore, with great reluctance, agreed to this sale and do so in the knowledge that we have an exceptionally strong squad to which we have added no fewer than seven top internationals. More importantly, we have an immense team spirit and a dressing room that is hungry for success.
"We wish Gareth all the best in the future and he shall always be welcome at the Lane."
8 July 2015
Ten-year partnership includes playing a minimum of two games per year at the venue.
16 March 2015
16 February 2015
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