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Created: 08/19/2014 7:32 PM WHEC.com
A code enforcement officer in Livingston County is facing charges after sheriff's deputies say he pointed a gun at another man and threatened him.
Investigators say Leicester Code Enforcement Officer Gerald Parsons, 35, of Caledonia got into an argument with another man after driving past his house. Deputies say during the argument, Parsons pointed a pistol at the victim and threatened him.
According to authorities, Parson's pistol and other guns were taken into custody and a restraining order was put into effect, ordering Parsons to stay away from the victim.
Parsons was arraigned in York Town Court and released. He has been charged with menacing in the second degree.
Parsons is due back in court at a later date.
News10NBC/WHEC-TV welcomes your opinion and interaction on our website, but please remember to keep it clean. If you're advertising for another business, being profane, vulgar or slanderous your post will be deleted. By commenting on this website, you agree that anything you post may be used, along with your name and profile picture, in accordance with our Privacy Policy and the license you have granted pursuant to our Terms of Use. Comments are not pre-screened before they posted.


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Aug 26, 2007
#Getting to know me#Social Clutz Loveable Spaz#The Flinger Family
Friday night we were blessed with a date. A DATE. Yea, I know, what's that? It's that thing you do when you leave the house without the kids because someone else has
generously volunteered
been roped in to watching your children. It. Was. Awesome.
(Let me back up here a moment so as to 'splain it all.)
So. You know I've been trying to get my pre-baby body back? And you know how I'm only a whopping twenty pounds away from my goal now? That's like two dimes or two-decades, whichever. Anyway, I've been working out and eating well. Eating well means including a lot of snap peas for snacks. It also means wearing some pre-pregnancy clothes that haven't seen the daylight since 2003. Or 2005, I forget.
Since it's our first post-baby-O date where we decided to actually go out to dinner AND SEE A MOVIE (this part is really important and thusly is in caps), I thought I'd get all dolled up for the occasion and put on some makeup (gasp!) and a skirt (also, GASP!) I know. That's how impressed I was hoping to make the bald guy with two kids who showed up to take me out. Like I was getting some (snicker).
Auntie Nicole arrived and LB instantly was entertained. We headed out to have a drink (or four) and then see SuperBad. We sat outside for dinner and drinks and enjoyed our time together like the pent up HighSchoolers we are on the inside. We giggled, drank, ate, and frolicked (the cheapest possible porn, AKA, played footsie). We walked to the theater about 20 minutes early to make sure we'd get a seat.
This is where this poo hit the fan (or shit if you're in to cussing and all).
While watching the people purchase the twenty dollar buckets of heart-clogging popcorn, I realized I had the gas. GAS. As in SBD (Silent but deadly) gas. People! Those snap peas! They give me enough fuel to burn a tiny jet plane. I could make it to Hawaii solely on the fuel of my own ass. I swear to you. PFFTTTTT. PFFFTTTTT. Mr. Flinger looked at me, leaned in and asked, "uh, is that YOU?" I act completely disgusted, "NO! Oh, seriously? NO! It's that old guy standing right THERE!" I try to defend my own stank. It doesn't work. Six years of marriage and fourteen years of friendship trumps my ass. "DUDE! STOP IT!" he hisses. "I cannn'ttttt. It's those damn snap peas!" pppfffttttt. We start circling the theater so nobody can trace the stink back to us. Circling and circling. Until we reach the original spot and realize, in horror, the stench is still there. "KEEP MOVING!" he whispers feverishly. We do. In fact, we never stop walking until we're sure the previews have started and my ass has stopped.
We enjoy a show without a single :: ahem :: episode. We laugh (and surprisingly I do not fart here). We giggle. I get near tears with sheer exhaustion mixed with the hilarity which is Superbad. I laugh so hard I cry. I laugh until my stomach surely has a six pack. Until I nearly wet myself.
The show ends and we gather our things to slowly walk back to our car. We realize this is IT. This is the end of our date and we both wish for two more hours of kidless bliss. We're standing at the door to the theater discussing just this fact when a Canadian man and his two children approach us waiting for their mom to pull over their car. We begin chatting about the benefits of Canadian maternity leave and whatnot. He causally asks, "So when are you due?" There is the sound of the sky falling and the hell opening up to swallow him whole. "Oh, uh, I'm not pregnant. We have a three month old at home…" I mutter under my breath something about how he should never EVER ask a woman that and damn him to eternal red lights and soggy pizza. Damn him, I say. Minutes after he and his kids are safe in the refuge of their car, I turn to Mr. Flinger, "Ok, seriously? WHAT? THE? FUCK?" He laughs a little and points to my boobs. "Dude, is it cold in here?" He changes the subject. "Uh, listen, I'm either going to cry or swear off food for a year. Comeon, what are you talking about?" "Aren't you wearing a bra?"
Uh. No?
Ok, see, I was feeling all "WOOOT!" about my boobies and decided to wear a camisole instead. Because it has a BUILT IN BRA. Apparently, it's not so bra-ish. Where my usual perky (albeit bra-induced-perk) boobies usually are, there's the headlights of an SUV. But lower. "OHMAHGAH" I whisper staring at my own tits. "OHMAHGAH." He puts his arm around me and points me to the door. "Come on," he says, "Let's go home. It's warm there."
Oy, I hate it when you can see the nips from the Space Shuttle. Embarrassing!!!
Worse than the gas, keep blaming someone else. But the nips? Those are YOURS.
By Sonia on 2007 08 26
I've had some issues with that since I "Reclaimed my bosoms".
I was SO excited that they would be perky enough to not HAVE to wear a bra, but I usually do because HELLO! I could poke some persons eye out if they walked too close.
P.S. You.do.not.look.pregnant.
By Loralee on 2007 08 26
I seriously think that anyone who asks a non-pregnant woman if she is pregnant/when she is due should be beaten publicly. Seriously. I once had to argue with a woman who insisted that I was pregnant. And I got the question this past week too. You do not look pregnant. I do not look pregnant. WTF?? People are dumb. Please do not assume that all Canadians are that clueless. Grrrr.
By mamasutra on 2007 08 26
This post made me roar laughing. And no, you don't look pregnant. Nor do I, I hope, and I got asked this question by someone at work a few months ago. I still don't like that girl now!
By theotherbear on 2007 08 26
First off: I can't believe how much you look like your blog persona. Love the hair.
Second: You do not look pregnant.
Third: I am so jealous of your date night and your seeing of Superbad. Not so much of your fartiness, though.
By mel from freak parade on 2007 08 26
I can't stop laughing and hearing The Backyardigans singing "I wish I didn't have a nose. PU watch out, PU it's so stinky" in the background is not helping. Timing is everything!
As for the headlights, J and I just had that conversation this morning. Although ours was based on only having one shining at a time. God I hate that!
By SJSFalter on 2007 08 27
Canada Man must die. There is no way you look even a little bit pregnant. You look fabulous. Besides, doesn't he know the rules? I bet he got an earful from his wife when he got into the van! I'll kill him for you. Just let me know.
By YSP on 2007 08 27
I think I just died a little for you. Hearing stories like this are why I never ask a woman if she is pregnant unless she is in labor.
By Suburban Oblivion on 2007 08 27
You don't look pregnant!
I love you for this post because it's making me laugh despite getting up 4 times in the night.
Also, I am into cussing.
By Jennifer on 2007 08 27
I think I just peed….
By skyzi on 2007 08 27
Honey, you do not look pregnant. And this post made me laugh my ass off. I loved how you kept moving to escape the stink-blame. Just further proof that snap peas and those of their ilk are pure evil. Ice-cream has never given me gas, what about you?
By andi on 2007 08 27
LMAO! That man's an ass. Of course you don't look pregnant.
The gas thing… that would SO be me. OHMYGOSH!
Date night sounds splendid!!!!
By Marie on 2007 08 27
LOVE this….too funny, made me laugh on a PMS-ridden day. Thanks!!
By Natalie on 2007 08 27
i am dabbing my eyes right now. thankyou for the monday morning laugh riot. honestly. you rule.
By texasbelle on 2007 08 27
You do not look one bit pregnant, what an ass!
I am going to have to check myself in the mirror next time I leave the house in one of those camisoles instead of a bra, which is pretty much every day.
So glad you guys got out to have a date night. It is amazing what a few hours away from the kids can do to your outlook on life.
By andrea on 2007 08 27
I'm with Suburban Oblivion 100%.
By *pixie* on 2007 08 27
Ok, I couldn't even read your entire post at one sitting b/c I was laughing so hard. Thank you for MY workout for the day.
And you don't look preggo at ALL!
By boogiemum on 2007 08 27
He must have had a death wish! Ugh…what an idiot. I wish his wife had been there to elbow him in the side.
Despite the funky ending, I'm so glad you and Mr. Flinger had a hot date. That movie is on our "must see" list.
Oh, and lay off the snap peas next time, will ya?
By Jamie on 2007 08 27
Oh my, Lord - but, your "...pfffttt" had me snotting up my keyboard - you do NOT look pregnant…stupid, stupid man!
By Liz on 2007 08 27
Wow. I had a crap day and was taking a break. I just came across your blog through Club Mom, and I literally just laughed my drink up my nose You need to warn people about posts like that! I almost drowned. Hi-lar-ious.
By Chantelle on 2007 08 27

subset: commoncrawl


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What is the Best Face Moisturizer for Non-Greasy Hydration?
by Therese Higgins
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Let me tell you a quick story. Up until about a year ago, my face washing routine consisted of a "healthy" scrubbing, patting dry and then an urgent dash to apply a face moisturizer to relieve my uncomfortably-dry, skin-shrinking feeling. But now I had a heavy, greasy film on my faced that I had to rub and rub into my skin until it was absorbed. Sound familiar?
So, I set out on a quest to find the best face moisturizer for healthy, non-greasy hydration and, in the process, learned something that I was not expecting. Oil-free skin care products are not the answer. Let me explain.
Your skin produces its own oils in order to keep it soft and supple. Most soaps and cleansers strip out these natural oils.
So instead of replacing them with products that contain synthetic substances like mineral oil or glycerine, you need oils that are molecularly compatible with your skin. In other words, substances that are derived from nature. It makes sense when you think about it, right?
Nature-based oils are more readily absorbed into the deepest layers of your skin. They enter your skin cells to provide soothing treatment and repair so that your natural oil balance can be restored.
Your skin cannot absorb synthetic oils. Their molecular makeup is such that they can only clog your pores like sludge in a drain. If your pores are clogged your skin can't "breathe" or eliminate toxins as it was designed to do. The result is an increase in flare-ups and breakouts.
You might be wondering why cosmetic companies continue to use synthetic oils that have been show to be unhealthy for your skin. Well the answer is because they are cheap! Using ingredients that have to be researched, developed and tested cuts into their bottom line.
Fortunately, newer cosmetic companies are taking skin care very seriously. They understand that effective skincare products must support the body's natural ability to heal itself.
This approach to product development is a dramatic turn away from the ineffective methods that have been used for over the last 50 years.
If you want to find a face moisturizer that will soothe and nourish your skin with non-greasy hydration just look for ingredients like Babassu and Grapeseed Oil.
Babassu is a light, natural wax extracted from the fruit of the Babassu palm. This healthy oil helps retain moisture by creating an invisible barrier that also keeps out dirt and grime. Grapeseed Oil is great for treating the skin around the delicate eye area. It has powerful antioxidant properties and is rich in essential oils.
During my quest to find the best face moisturizer, I discovered many more healthy, nature-based oils that are being used to support healthy skin, fight aging, and dramatically improve your appearance.
Visit my website, to learn more about these natural oils that are found in the best face moisturizer that I now use daily.


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Virginia's 2005 dual enrollment policy change included two provisions: 1) high schools had to inform all students of dual enrollment opportunities and 2) selected freshmen and sophomores were eligible to participate. The goal was to increase overall access to and participation in dual enrollment courses. However, the increase was not uniform and minority groups remained significantly underrepresented when compared with their representation in the general student population.
Reference in this Web site to any specific commercial products, processes or
services, or the use of any trade, firm or corporation name is for the
information and convenience of the public, and does not constitute endorsement
or recommendation by the Education Commission of the States. Please contact
Kathy Christie at 303-299-3613 or firstname.lastname@example.com
for further information regarding the information posting standards and user
policies of the Education Commission of the States.


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Kunal Karan Kapoor
Kunal Karan Kapoor
Courtesy: Kunal Karan Kapoor
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you seem in a deep thought !! Kunal Karan Kapoor , keep smiling ...
Kunal Karan Kapoor ... keep enjoying traveling Mr. traveller... love u mr. magician...
EYES!!!!!!!that's all...sab kuch usme hai!!!
Love this photo very much. Nice close-up shot.
Those eyes man...just WOW!!! :)
Nice close up. Great character in his face
Kunal, you really outdid yourself in the past couple of episodes..
awww you rocking as mohan :)


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Sky sources understand Neville was at the United training ground on Thursday morning as Moyes looks to finalise his backroom team ahead of the tour to the Far East later this month.
Neville made 385 appearances in 11 seasons as a first-team player at Old Trafford.
Everton manager Roberto Martinez had claimed he intended to speak with the 36-year-old - who retired last season after eight years at Goodison Park - about a coaching role on Merseyside.


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Israel News - Stay Informed, Pray Informed
The Land of Israel is a special, sacred place for those who believe in the Bible. Like the ingathering of the Jewish people into the land of Israel, the restoration of the land itself is the unfolding of prophecy.
When Israel's restoration began, the land was largely barren. Today it is fully of lush green forests lovingly planted by the Jewish National Fund. There is still much work to do. What better way to participate in the restoration of the Land of Israel than by planting a tree.
Partner with the JNF to complete the reforestation of the Promised Land.
"And when you come into the land and have planted all kinds of trees for food..."
Leviticus, 19:23
In the Jewish calendar Tu Bishvat is marked as the New Year of trees.
Israel Today staff and the people of Israel celebrated the Tu Bishvat holiday by planting trees. The Jewish National Fund reported that a record 600,000 trees were planted over the holiday. Israel Today joined over 260 cities, towns and communities throughout Israel and hundreds of thousands of Israelis participated throughout the country to make the record possible.
Israeli soldiers planted trees on Tu Bishvat in order to protect residents who live under rocket fire every day. Help us replant the land.


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Tallahassee, Florida - Tuition increases at Florida's universities over the past few years have totaled between 45 and 60 percent and now state University System Chancellor Frank Brogan is questioning how much higher can they go.
Brogan says he sees a "change in the wind out there" over Florida's ever-increasing tuition rates. He says people are rightly asking if big tuition hikes for students every year are sustainable.
Brogan says state operating funds for universities have dropped about 43 percent over the past five years so schools have tried to make up for the lost cash by raising tuition. State law allows them to raise tuition up to 15 percent a year.
Brogan says tuition increases of 60 percent over the past few years are the bad news, but the good news is that Florida still offers some of the lowest in-state tuition rates in the nation.
"We're still ranked 45th in the United States. A full load of coursework is about $5,500 or $5,600 in Florida and you look at many states and it's $10,000 to $16,000 for that same load of coursework at public institutions. But be that as it may, that's hard sell to somebody who is seeing their tuition increase every year. Even though we have the 45th lowest undergraduate in-state tuition in the United States, is it sustainable to simply continue to make up on the backs of students without any let-up what we're not getting at this point in our history via the recession through the legislative process."
Brogan appeared before the governor's Blue Ribbon Task Force on Higher Education on Monday. The task force is meeting over the next few months to develop recommendations on how to reform higher education for the future.
Brogan says he has high hopes for the group and that it will help create an accountability-based approach to higher education.
"Make sure there's a return on investment. So at the end of the day I expect the governor's group will take a 30,000-feet look at this essential, critical issue and hopefully come back with some good recommendations about how we can further the issue of higher education in Florida's future."
The task force plans to offer its recommendations later this year.


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By Caryn James | James on Screens April 30, 2011 at 4:24AM
The funny publicity stunt called Beardpocalypse, with Will Ferrell threatening to shave Conan's beard when he appears on the show this coming Monday, has its own on-line component, including a photoshop contest featuring movie-poster parodies like the one above.
Here's Conan as Justin Bieber:
You can check out more photos on the Conan site.
If you missed my earlier selection of recent Ferrell videos, including more Beardpocalypse and a Letterman appearance, you can find the piece here.
And here's the latest Beardpocalypse promo.


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Ted Latham
Anna Peak, CLA, firstname.lastname@example.com, '16
Sayed Ali, TUSM, 2-4263, firstname.lastname@example.com, '16
Maia Cucchiara, EDUC, 1-8184, email@example.com, '16
Elizabeth Groff, CLA, 1-7918, firstname.lastname@example.com, `16**
Edward Latham, BCMD, 1-8498, firstname.lastname@example.com, '15**
To solicit and accept nominations for Faculty Scholarship and other student awards from the appropriate bodies and to select the awardees in accordance with established guidelines and criteria. The Committee may determine in consultation with the Steering Committee whether to make selections for other student awards at the request of the Administration. Students may participate and vote in all deliberations except those to select the Faculty Scholarship Awardees.
An interest in the academic excellence of undergraduate students and the ability to evaluate transcripts and other documentation.
9 Faculty appointed by the FSSC.


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Below is the poem entitled One With It All which was written by poet
Hall. Please feel free to comment on this poem. However, please remember, PoetrySoup is a place of encouragement and growth.
Read Poems by
Toshia Hall
Lying on a bed of grass blades.
Constellations are my blanket.
Breathing in the darkest shades.
Listening to the cricket's melody.
The sweet caress of the flowers.
Their scent coating my body,
To be washed away by the showers,
The cloud band poured down.
Swaying with the Whipping Willow tree,
With each burst of wind set loose.
Soaring with the birds; so high and free.
A giant world through the ant's eye.
Skipping across the variegation pond.
The fish nipping at my fingertips.
Whispering secrets of the fond,
Mother Nature and her gifts.


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Click Here to Watch the Whole Video in HD at Island Studs
These sexy boys really live and work in the Caribbean and Pacific Islands! Watch the models as they are being photographed for the first time naked and jerking it.
Hunky Hank possess a winning smile, personality and body that makes both men and women melt. Here is Part 2 of this athletic tree trimmer and his rock hard ass hangin' out in Hawaii. Horny Hank had no problem keeping his beautiful penis hard in various locations at the Beach House. There is something very special about a happy naked guy with BOTH a great set of pecs AND a great package. The video of Hank this week is a fun behind the scenes look at the afternoon I spent with this delightful muscle stud. He walks around with his boner, drinks beer (a Longboard - of course!) and adjusts the DVD player while stroking his rock hard dick. He even crouches on a bench outside with his red hot woodie throbbing with joy. Hank is stoked to finally blow his load. Check out the footage as he moans and moans before spraying his yummy juice all over his furry belly and thighs. He laughs as he holds up his cum filled hand to the camera. This Island Stud is welcome to trim our trees in the raw, anytim
Pixels: 320X240 | Bitrate: 350K
Pixels: 640X480 | Bitrate: 700K
Great looking.


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Brakhage, James Stanley
Born: Jan 14, 1933 AD
Died: 2003 AD, at 70 years of age.
Film Director
1933 - Born on the 14th of January as Robert Sanders in an orphanage in Kansas City, Missouri. Three weeks after his birth, he was adopted by Ludwig and Clara Brakhage and given the name James Stanley Brakhage.
- As a child, he appeared on radio as a boy soprano before going to high school in Denver, Colorado and then dropping out of Dartmouth College after several months to make films.
1952 - His first film, Interim, was in the neo-realist style and had music by James Tenney.
1953 - Brakhage moved to San Francisco where he associated with poets such as Robert Duncan and Kenneth Rexroth.
1954 - He moved to New York City where he met a number of contemporary artists, among them Maya Deren, Marie Menken, Joseph Cornell, and John Cage.
1961-1964 - Dog Star Man, perhaps his most famous work, features a man climbing a mountain, shots of stellar objects and more footage of his wife giving birth.
1963 - For Mothlight, he taped moth wings, twigs, and leaves onto clear film and made prints from it.
1963-2003 - Brakhage wrote a number of books, including Metaphors on Vision, A Moving Picture Giving and Taking Book, and the posthumously published "Telling Time: Essays of a Visionary Filmmaker".
1969 - He taught film history and aesthetics at the School of the Art Institute of Chicago.
1981 - Taught at the University of Colorado in Boulder. He taught because, despite being the best known American avant-garde filmmaker, he could not make a living from his work.
1987-2002 - Works from his later periods include the four-part "Faust Series", the four-part "Visions in Meditation", "Passage Through: A Ritual", and "The Vancouver Island Quartet".
1991-1998 - He also completed several more collaborations with musicians, including two more works with music by James Tenney, "Christ Mass Sex Dance", and "Ellipses #5".
1996 - Brakhage was diagnosed with bladder cancer, and his bladder was removed.
2002 - He retired from teaching and moved to Canada, settling with his second wife Marilyn and their two sons in Victoria, British Columbia.
2003 - Brakhage died there on the 9th of March, having made almost four hundred films in all.
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Rocket Brand Studios 48 hour thing... Links now available
- Login or register to post comments
- by Chris the Carpenter
- Collected by one user
By Chris the Carpenter
February 21, 2013
February 21, 2013
Hey guys,
Rocket Brand Studios will be participating in Deconstruction 2013. (woo hoo!)
Starting Friday afternoon (2.22.13), I will start building... ...something. 48 hours later I will be dead --or-- have something really cool built. --And it is all going to be live streamed!
You will be able to watch everything on the front page at
Links and Info:
The whole 48 hours will be live streamed via UStream.
I will have an eye on chat boxes etc. and respond when I can whilst I work.
I will be stopping and answering questions properly on the top of each hour.
I will be recording a stand-alone YouTube video on every 4th hour.
I may do a few G+ hangouts on top of the ustream so I can hear questions directly. (TBA)
Please keep me company via the uStream Chat
I will check @'s and DM's on a regular basis
The Let's Make Robots shout box will always be watched.
By Maxhirez @ Thu, 2013-02-21 13:07
Will you be taking requests?
Not that the jet engine powered Penny Farthing wouldn't be ultra cool.
By JerZ @ Thu, 2013-02-21 12:07
You are gonna need Red Bull on tap! I can't help but ponder the thought that went into their pages graphic. Looks to me like when the turbine starts the whole contraption will rotate counter-clockwise 90 degrees. A hidden joke? I'll watch too ;)
By antonio.caciuc @ Thu, 2013-02-21 11:01
U mad man Chris!!!
I'll watch :)
By chickenparmi @ Thu, 2013-02-21 08:36
Im definitely wathing this
Im definitely wathing this space!


text:
On this edition Paul talks about the history of Superman on the big screen and reviews the newest installment "Man of Steel" which opened to 123 Million dollars last weekend making it the biggest film of the summer.
This week Paul sits down with film critic Tim Day of Day at the Movies.com to talk about the alternative to "Man of Steel" this weekend at the theaters, "This is The End" starring Seth Rogen and James Franco.
On this edition of 24 Frames on 89.1, Paul Hunton talks folk music, specifically the wildly popular Avett Brothers. You can hear 24 Frames on 89.1 every Thursday only on Lubbock's Voice of the Arts.


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Adam Hall pitched three perfect innings to close out the game Saturday at GW.
May 12, 2012
ARLINGTON, Va. -- Xavier used a six-run first inning to cruise to an 11-4 win over Atlantic 10 rival George Washington Saturday afternoon. With the win, Xavier improved to an even 26-26 on the year and 11-9 in the A-10 while GW fell to 19-31 overall and 5-15 in the conference.
Xavier jumped out to a 6-0 lead in the top of the first. Freshman Derek Hasenbeck drove in the first run of the game with a double down the left field line that brought home Patrick Paligraf, who walked to lead off the game. Sophomore Tres Eberhardt knocked a RBI single that plated Selby Chidemo, and Brian Bruening walked with the bases loaded to score Hasenbeck to give XU a 3-0 lead before the first out.
Mitch Elliott's two-out double started a rally in the top of the fourth inning. Bruening brought Elliott home with a RBI base hit, then stole second. Mark Elwell capped the rally with a two-RBI double that gave XU a 10-4 lead.
Bruening had a big day offensively going 3-for-4 at the plate with three runs and two RBI. Saturday's contest was Bruening's sixth multiple-RBI game of the season.
Elwell finished the game with two hits in four at bats and two RBI of his own. Elwell's two hits gave the XU junior his 17th multi-hit game.
Junior left hander Jon Richard earned the win in six innings of action. Freshman Adam Hall pitched three perfect innings with two strikeouts to close out the game.
Xavier and George Washington will meet in the rubber game of this weekend's three-game series Sunday at 12 p.m.


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Introductory Comments
Properties of Animals
Major Classifications of Animals
Issues of Survivorship
...... You may ask, what do we have in common with the earthworm? The sparrow at your backyard feeder? Buzzing bees? The smallmouth bass you caught yesterday? Interestingly, we human organisms belong to the Animal Kingdom, and as such we display most structural and functional features common to all of these other animals. These features include: a high degree of structural organization and complexity; the ability to transduce chemical energy into usable forms; ability to reproduce at the cellular as well as the species level; we contain tissues which are stimulable; we are mobile; we continue to grow from the time of conception, and as a consequence develop new capabilities; and we humans are an integral, predominant part of the evolutionary tree initiated millions of years ago. However, what basically sets the human organism apart from all of the other animals is our brain, more specifically, the neocortex; it is this part of the brain which gives us the tremendous power to assemble and interpret sensory input, to think in abstract terms rather than simply react to environmental cues, as well as the power to deduct, rationalize and problem-solve. These and other characteristics of the human organism will be reviewed in the notes to Week 7.
Like the Plants, the Animal Kingdom contains a wide-range of organisms which share common properties which go to define animals as a distinct group of life-forms:
Complex Eukaryotic Cells - Made up of highly-organized eukaryotic cells; from the zygote stage, cells gradually differentiate into various tissues which ultimately provide specialized structure and function to the adult animal.
Tissue Specializations - Animals are multi-cellular; various tissue and organ systems are constructed to provide the specializations needed for day-to-day survival as well as survival of the species.
Animals are Aerobic - Aerobic metabolism is the means upon which animals breakdown food-stuffs and acquire ATP energy needed to drive all of their functions. In effect, oxygen is the final hydrogen acceptor molecule (forming water) in a step-wise breakdown of sugar and fat for energy (viz., metabolic processes called glycolysis, kreb's cycle, and electron transfer system).
Sexual reproduction - The survival of animal species is accomplished through sexual reproduction, where specialized organs called gonads (female ovary/male testis) through meiosis produce genetically-diverse gametes (female eggs/male sperm).
Mobility - Animals for the most part are capable of movement; this property has allowed animals to be distributed throughout the land as well as marine habitats around the world. Moreover, this property of motion is highly dependent upon the development of a stimulable skeletal-muscular system.
Land and Sea Habitats - Most of the early, evolutionary forms of animals were aquatic; however over evolutionary time, several animals groups adapted to and colonized the land masses.
...... Within the Animal Kingdom there are approximately 35 sub-divisions called Phyla; each phylum sub-division shares particular structural and functional properties which together separate it from other phyla. Research is underway today to apply genomic analyses to various animal phyla and develop an animal `family tree' based DNA sequences, rather than the conventional morphological/functional criteria used up to now. Until the day comes when all animals will be classified according to their DNA sequences, below are ten of the most common animal phyla classified according to traditional biological methodology:
Porifera These are the salt-water sponges; there are approximately 8,000 separate species existing today.
Cnidaria- This group is composed of jellyfish, and other lower aquatic animals; approx 15,000 species exist today
Platyhelminthes These are the flatworms which inhabit both marine and freshwater habitats; over 15,000 species exist today.
Nematodes This phylum consists mainly of about 80,000 known parasitic worms.
Rotifers This group consists of about 1,800 highly-mobile freshwater invertebrate animals.
Mollusca This major group consists of snails, clams, squid, and octopus; there are over 110,000 known species.
Annelida About 15,000 individual segmented worms comprise this phylum; the common earthworm is an example.
Arthropoda This very large group consists of insects; it is estimated that there are over 1 million species of insects existing today.
Echinodermata These are the marine starfish; about 6,000 species exist today.
Chordata This is a group of animals which are classified on the basis of possessing 3 common embryological features dorsal nerve cord, supportive structure called the notocord, and pharyngeal gill pouches. Within this phylum is a highly-advanced group called the `vertebrates' which include fish, amphibians, reptiles, birds, and mammals; it is this phylum to which the human organism belongs.
For more specific information on animals and their classifications and properties see:
www.ultranet.com/~jkimball/BiologyPages/I/Invertebrates.html , and
Issues of Animal Survivorship
...... There are a number of issues which have contributed to the survival and evolutionary success of the animal kingdom; this is particularly true for the mammals to which the human organism belongs. Some key survivorship issues:
...... Many Animals are Prolific As Survival Mechanism - As a species survival mechanism some animals reproduce at a remarkable rate. For example, representatives of the mollusca phylum produce 1000s if not millions of young with the hopes that a small percentage will survive predation, and the species in effect will survive. If one were to plot a survivorship curve (i.e., % alive versus relative age), the mollusks would demonstrate severe early mortality where most of the young would not survive the early going.
...... Parasitism as Survival Mechanism - Some groups of animals (e.g., nematodes) have adapted to a parasitic life style where nutrition is drawn from another free-living host organism.
...... Co-Evolution of Species (You Help Me, I'll Help You) - The evolutionary success of some groups of animals were in large part due to the success of other organisms. A good example of this is found in the co-evolution of the insects and the flowering plants; as the angiosperms prospered so did the insects which obtained food through nectar and pollen. In a synergistic manner, the angiosperms benefited from the pollinating actions of the insects. It was a win-win situation for both groups.
...... Homeostasis - The ability of an animal to control its own environment plays a large factor in whether or not an animal will survive. By far, most animals are at the mercy of changing environmental conditions. For example when temperatures get too hot or too cold, most animals die (or in some cases are metabolically shut for a period). On the other hand a number of higher animals like birds and mammals have evolved homeostatic mechanisms upon which the 19th century physiologist Claude Bernard stated A constant internal milieu allows for a free life! The abilities to maintain a relatively constant internal environment in the face of changing environmental pressures (e.g., temperature) have provided birds and mammals the unparalleled power to maintain activities year-round.
...... In Utero Protection - Compared to other animals, mammals produce few offspring at a time; however the offspring that are produced are well provided for. For example, mammalian embryos develop in utero which provides protection, insulation, and constant nutrition. After birth, the young are further protected through the nurturing power of the limbic part of the parental brain, as well as post-natal nutrients through the maternal mammary glands.
...... Sexual Reproduction Ensures Diversity in Offspring - Reproduction of animal species (with few exceptions) is accomplished through sexual reproductive means; through meiotic division of 2N stem cells to yield genetically-diverse gamete, the next generation is assured to be genetically different from the parental generation. Hence, individual diversity is assured within the animal kingdom.
Case Study Question
...... Today because of the in-roads of DNA technology and molecular biology, the lines between species (and even between Kingdoms) are often blurred. For example, bacterial and plant cells have been genetically-mutated to produced ...... medically-important human proteins. Are these bacterial and plant cells new species?
...... While the life-forms of the world can still be conveniently grouped into 5 kingdoms (6 if you include the ancestral bacterial group Archaea), today's molecular genetics has the potential of redefining biological classifications. What do you think?


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[Though, Mr Downstruck announced that YIntai is terminated, YIntai still works / alive by using a Patch called YIntai Stolen] If you are a chatter maniac, particularly used yahoo messenger, you already know that the web cam (web camera) viewer used to view cam from your partner chatter can not be capture or grabber or save in a file. This mean we can not recorded the web cam (such as notebook web cam) we have been viewed before. Yahoo messenger, indeed, doesn't give us that kind of tools or support. We only can grab and save the webcam yahoo messenger by pressing print screen and edit that copy screen via paint or other tools image processing. It's upsetting, is it?
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Can Homeschooled Children Get Into Good Colleges?
Karl Bunday's thorough reassurance that homeschoolers do indeed get into the best colleges. He keeps list updated alphabetically by college name. Last updated in 2006.
The Door is Open
While college may not be the best choice for every person, none of us wants to eliminate the option for our children. By Earl Gary Stevens, HEM.
Frequently Asked Questions About Unschooling High School and College with Alison Mckee
Whether your children are schooled, traditionally educated at home or unschooled, college admissions is not a guarantee. Don't fret, though, unschooled children are quite successful at getting into college. Not only are they getting into college but they are doing well once they get there.
Homeschooled students take unorthodox route to become top college candidates
Homeschoolers seem to be carrying off the transition into the mainstream well, with many getting into schools of their choice despite their unorthodox backgrounds. By Pamela R. Winnick, Post-Gazette Staff Writer.
Home-Schooled Teens Ripe for College
Myths about unsocialized home-schoolers are false, and most are well prepped for college, experts say.
In a Class by Themselves
A wave of homeschoolers has reached the Farm–students with unconventional training and few formal credentials. What have they got that Stanford wants? And how do admission officers spot it?
Homeschool Friendly Colleges
By US state. Includes military academies. From Homeschool Facts.com.
Schoolhouse Rocked
Most surprising of all is that Harvard, BU, Brown, and other colleges are welcoming home-schoolers like all other students.
Training Kids for College
Homeschooling is NOT a specific strategy, in and of itself, to get kids prepared for college. What homeschooling is, however, is a very flexible learning tool to allow kids to live a life of curiosity, and which, if college is the goal, provide an excellent opportunity to prepare kids for the collegiate experience. By Tammy Takahashi.
Yet Another Study Confirms The Effectiveness of Home Education
In the sample the author studied, there were 137 public school graduates, 142 students who graduated from catholic schools, and 129 homeschool graduates. The author compared four things among the three groups of students: SAT or ACT score, college grade point average (GPA), GPA by major, and GPA in the university's "core" curriculum. The results are very interesting, and they demonstrate yet again that homeschooled students are simply better prepared for college than their publicly- and privately-schooled counterparts.


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Welcome to STATEN ISLAND, NY 10302
10302 is a densely populated, upscale urban zip code in Staten Island, New York. The population is racially diverse, and about evenly divided between singles and married couples. At $390,600 the average home value here is a bit higher than average for the New York-Northern New Jersey-Long Island metro area, so this probably isn't the place to look for housing bargains.
The median age here is 33. There are 9,605 men and 9,483 women. The median age for men is 31 while for women the median age is 34.
10302 Zip code is located in the Eastern time zone at 41 degrees latitude (Fun Fact: this is the same latitude as Tashkent, Uzbekistan!) and -74 degrees longitude. It has an average elevation of 35 feet above sea level.
Neighborhoods in Zip Code 10302
Worth Watching
Premier Neighborhoods How to Earn a Star
- Decker Avenue Civic Association
- Elm Park Civic Association
- Flags Across the Island
- Nicholas Ave Civic Association
- Northfield Local Developoment Corp.
- Port Richmond Civic Association
- United Staten Island Veterans Organization
- West Brighton Community Local Development Corporation
Email Neighborhood Link Don't See Your Neighborhood?
Other nearby neighborhoods
See List of Nearby Neighborhoods
Real Estate & Home Values in Staten Island, NY
Average Home Value in 10302: $390,600
Home Buyer and Seller Resources
- Does Mortgage Aid Hurt Your Credit?
- Loan Modification: Is it Right for You?
- Should You Refinance Your Mortgage?
- First Time Homebuyers Guide
- Financial Assistance for First Time Homebuyers
- Do You Qualify for an FHA Loan?
- Homeowners insurance: What you need to know
- Home Maintenance Checklist
- What Is A Short Sale?
- What Is A Deed-In-Lieu?
- Reverse mortgage: the pros and cons
- How to Sell Your Home In a Down Market
- 2009 Mortgage Bailout Explained
- Obama Stimulus Plan FAQ
Instant Home Value!
Recent Home Value Searches
- Total Population: 19,088
- White Population: 10,068
- Black Population: 4,431
- Hispanic Population: 7,892
- Asian Population: 998
- Hawaiian Population: 59
- Indian Population: 290
- Male Population: 9,605
- Female Population: 9,483
- Median Age: 33
- Median Age of Males: 31
- Median Age of Females: 34
- Region: Northeast
- Division: Middle Atlantic
- State: New York
- CSA Name: New York-Newark-Bridgeport, NY-NJ-CT-PA
- CBSA Type: Metropolitan
- CBSA Name: New York-Northern New Jersey-Long Island NY-NJ-PA
- County: Richmond
- City: Staten Island
- Longitude: -74.1
- Latitude: 40.6
- Elevation: 36 feet above sea level
- Area code: 347/718/917
Marital Status
Average Age
The Economics
- Average House Value: $390,600
- Average Annual Household Income: $56,518
- Businesses: 406
- Employees: 4,659
- Annual Payroll: $204,082,000
The Politics
- Congressional District: 13
- Congressional District Land Area: 56.0
- Sr Senator: Charles E. Schumer (D)
- Jr Senator: Kirsten E. Gillibrand (D)
- US House Representative: Charles B. Rangel (D)
Other Stuff
- County FIPS Code: 085
- State FIPS Code: 36
Farmer's Markets in Zip Code 10302
Neighborhood Link provides free websites to thousands of farmer's markets across the US. If you notice a farmers market that isn't listed here yet, contact us and we'll set up a site right away!
Schools in 10302 Zip Code
View all schools in Staten Island
- Primary Schools
- P.S. 20 Port Richmond School
- 161 Park Avenue
- Staten Island, NY 10302
- (718) 442-4110
- P.S. 21 Margaret Emery Elm Park School
- 168 Hooker Place
- Staten Island, NY 10302
- (718) 442-1520
- Middle Schools
- I.S. 51 Edwin Markham
- 20 Houston Street
- Staten Island, NY 10302
- (718) 981-0502
- High Schools
- Port Richmond High School
- 45 Innis Street
- Staten Island, NY 10302
- (718) 273-3600
Photos near Zip Code 10302, Staten Island, NY
Sex Offender Information
For most citizens, the easiest method to obtain accurate and timely sex offender information for their local area is to visit their state sex offender registry website. States are required to provide this information for free. You do not need to pay for this information.
In the 10302 zip code, the registered sex offenders can be found at http://www.criminaljustice.state.ny.us/nsor/. Please be sure to read all the disclaimers provided by the state.
For more information check out the resources listed below:


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A system and method for controlling electron exposure on image specimens by adjusting a raster scan area in-between scan frame cycles. A small, zoomed-in, scan area and the surrounding area are flooded with positive charge for a number of frame cycles between scan frames to reduce the voltage differential between the scan area and surrounding area, thereby reducing the positive charge buildup which tends to obscure small features in scanned images. The peak current into a pixel element on the specimen is reduced by scanning the beam with a line period that is very short compared to regular video. Frames of image data may further be acquired non-sequentially, in arbitrarily programmable patterns. Alternatively, an inert gas can be injected into the scanning electron microscope at the point where the electron beam impinges the specimen to neutralize a charge build-up on the specimen by the ionization of the inert gas by the electron beam.
1. A method for imaging a specimen with a scanning electron microscope comprising an electron source and apparatus for forming, accelerating, focusing, and scanning an electron beam across a portion of said specimen, wherein said specimen is subject to a charge build-up thereon when so scanned, said method comprising the steps of:
a. raster scanning a first substantially large area of said specimen that includes a first small area of said specimen with said electron beam; and
b. raster scanning said first small area of said specimen individually with said electron beam following step a. to brighten the image of said first small area of said specimen as a result of the flooding of said first substantially large area with electrons.
2. A method as in claim 1 wherein step a. is repeated a plurality of times to brighten the image of said first small area of step b. relative to a cumulative image of said first substantially large area of step a.
3. A method as in claim 1 wherein said first substantially large area of step a. surrounds said first small area thus the area surrounding said first small area is flooded with electrons.
4. A method as in claim 1 further including the steps of:
c. raster scanning a second substantially large area of said specimen that includes a second small area of said specimen with said electron beam; and
d. raster scanning said second small area of said specimen with said electron beam following step c. to brighten the image of said second small area of said specimen as a result of the flooding of said second substantially large area with electrons.
5. A method as in claim 4 wherein steps a. and c. are each repeated a plurality of times to brighten the image of each of said first and second small areas of steps b. and d. relative to cumulative images of each of said first and second substantially large areas of steps a. and c.
6. A method as in claim 4 wherein said first substantially large area of step a. surrounds said first small area, and said second substantially large area of step c. surrounds said second small area thus flooding the areas surrounding each of said first and second small areas with electrons.
7. A method as in claim 4 wherein said first and second small areas at least partially overlap each other.
8. A method as in claim 4 wherein said first and second substantially larger areas at least partially overlap each other.
9. A method as in claim 4 wherein a line period of each raster scan of each of said first and second small areas of steps b. and d. is substantially shorter than typical video scan rates of scanning electron microscopes to reduce the peak scanning current.
10. A method as in claim 1 wherein a line period of each raster scan of said first small area of step b. is substantially shorter than typical video scan rates of scanning electron microscopes to reduce the peak scanning current.
11. A method as in claim 1 wherein step b. is performed by scanning said electron beam across said first small area starting at a selected first x axis coordinate and ending at a second x axis coordinate for each of a selected number of y axis coordinates with said electron beam otherwise blanked.
12. A method as in claim 1 wherein step b. is performed by scanning said electron beam across said first small area starting at a selected first x axis coordinate, proceeding to a second x axis coordinate and returning to said selected first x axis coordinate for each of a selected number of y axis coordinates with said electron beam otherwise blanked.
13. A method as in claim 1 further including the step of:
e. strobing each y axis scan signal of steps a. and b. at a selected multiple of the video scan rate to convert each said y axis scan signal into selected multiple y axis scan signals with an equal phase shift between each of said selected multiple y axis scan signals being determined by the multiple selected.
14. A method as in claim 13 wherein said selected multiple in step e. is four resulting in said selected multiple y axis scan signals being four in number each with a phase shift of 90� between each subsequent one of said four selected multiple y axis scan signals.
15. A method for imaging a specimen with a scanning electron microscope comprising an electron source and apparatus for forming, accelerating, focusing, and scanning an electron beam across a portion of said specimen, wherein said specimen is subject to a charge build-up thereon when so scanned, said method comprising the steps of:
a. raster scanning a selected small area of said specimen for a single frame cycle; and
b. injecting an inert gas at a point above said specimen where said electron beam impinges on said specimen to neutralize a charge build-up on said specimen by the ionization of said inert gas by said electron beam.
16. A method as in claim 15 wherein said inert gas is argon.
17. A scanning electron microscope to image a specimen having a secondary emission energy level that is greater than an energy level of a scanning beam of said electron microscope, said scanning electron microscope comprising:
a vacuum chamber;
an electron source contained within said vacuum chamber;
a focusing column and lens assembly contained within said vacuum chamber to direct electrons from said electron source to said specimen contained within said vacuum chamber;
a secondary and backscatter electron detector contained within said vacuum chamber to detect electrons from said specimen; and
a capillary tube extending into said vacuum chamber with an orifice positioned above said specimen at a point where electrons from said focusing column and lens assembly are delivered thereto, said capillary tube disposed to be connected to an inert gas supply tank external to said vacuum chamber to inject an inert gas from said orifice.
18. A scanning electron microscope as in claim 17 wherein said inert gas is argon.
The present invention relates generally to enhanced feature measurement in scanning electron microscopy, and more specifically to a system and methods for controlling electron exposure on image specimens in scanning electron metrology, particularly in the inspection of features of micro-circuits. It may also apply to critical dimension measurement in similar instruments.
In scanning electron microscopy, a beam of electrons is scanned over a specimen, and the resulting electrons that are returned from the specimen surface are used to create an image of the specimen surface. In some systems, the beam is arbitrarily controllable to make multiple scan passes over specific areas or portions of areas at different sample frequencies to magnify the image of the surface.
On a specimen made of a substantially insulative material (e.g., a semiconductor material), performing multiple scans over the same small area may cause the specimen to accumulate an excess positive charge in that small area relative to the rest of the scanned area. That excess charge causes an image of that small area to appear dark, thus obscuring image features in that small area.
One embodiment of the present invention is a system and method for imaging a specimen that acquires a charge when scanned with a scanning electron microscope comprising an electron source and apparatus for forming, accelerating, focusing, and scanning an electron beam across a portion of said specimen. That imaging being performed by raster scanning a selected small area of the specimen for a single frame cycle, and then raster scanning a substantially larger area of the specimen that includes the small area to brighten the image of the small area of said specimen by flooding the substantially larger area with electrons.
A second embodiment of the present invention is a system and method of a scanning electron microscope to image a specimen that acquires a charge when scanned with a scanning electron microscope by injecting an inert gas at the point where the electron beam impinges on the surface of the specimen. That inert gas being ionized by the electron beam and thus neutralizing the charge as it builds up on the specimen.
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate several embodiments of the present invention and, together with the description, serve to explain the principles of the present invention.
FIG. 1 is a simplified block diagram of the overall system of the present invention.
FIG. 2 a more detailed schematic of the system of the present invention shown in FIG. 1.
FIG. 3 is an expanded block diagram of the scanning control subsystem of FIG. 1.
FIGS. 4a-4b show one possible set of scan system voltage control signal waveforms of FIG. 3.
FIG. 4c illustrates the scan pattern on the substrate when the signal waveforms of FIGS. 4a-4b are used.
FIGS. 4d-4l illustrate similar scan system voltage control signal waveforms and scan patterns that may be used with the present invention.
FIG. 5 shows a more detailed view of an image scan area and illustrates typical scan patterns.
FIG. 6 shows a sequence of raster scans to illustrate the charge flooding technique of one embodiment of the present invention.
FIG. 7 illustrates an alternative detection and imaging subsystem for multiple scans at incremental offset one from the other.
FIG. 8 shows a portion of an image on a specimen to illustrate the capability of multiple feature measurement of the present invention without having to reposition the specimen.
FIG. 9 illustrates a second embodiment of the present invention that minimizes the charge build-up in a specimen when being scanned.
Reference will now be made in detail to the preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings.
FIG. 1 shows a block diagram of system 10 including an electron microscope subsystem 11 of the present invention. The electron microscope subsystem 11 includes an electron beam source 12, a focusing column and lens assembly 14, and a scan controller 16 to scan an electron beam across selected regions of specimen 20. Also included in electron microscope system 11 is an electron detector 24 to detect secondary and backscattered electrons from specimen 20. In system 10 of the present invention, electron detector 24 is selected to have a bandwidth that is at least adequate to detect the secondary and backscattered electrons that form electron signal 28. For example, electron detector 24 may be a micro-channel plate, micro-sphere plate, semiconductor diode, or a scintillator/ photomultiplier (PMT) assembly, each well known in the art. Then the electrons of signal 28 received by detector 24 are processed and stored for display by image processor and display subsystem 26.
In operation, electron beam 18 is scanned over specimen 20 and secondary and backscattered electron signal 28 is detected by electron detector 24. Further, electron beam 18 is focused on the surface of specimen 20 with the average current into specimen 20 determined by scan controller 16 that controls the raster scanning of beam 18. In the present invention electron beam 18, as discussed below, can be scanned for a single frame cycle, and then blanked for a period of one or more frame cycles.
Typically, specimen 20 may be comprised of a variety of materials with the present invention particularly applicable to materials containing a substantial amount of insulative material (e.g., semiconductor material). Small area 22 of specimen 20 is shown to illustrate a particular area of interest to be scanned to determine features of the specimen in the image of small area 22 developed by image processor and display subsystem 26. For example, small area 22, may, in a degenerate case, be a single line or a single pixel element on specimen 20. In the present invention the peak current onto small area 22 is reduced by scanning electron beam 18 faster than the television rate commonly used in conventional SEM instruments. In system 10 of the present invention, electron beam 18 is typically scanned with a line period of 16 μsec, or four times the rate normally used for TV raster scanning having a line period of 64 μsec.
FIG. 2 shows a partial cross-sectional view of electron microscope subsystem 11 of the present invention to reveal more detail. As shown here, subsystem 11 is shown with electron beam source 12 at the top which produces electron beam 34. One implementation that could be used includes an electron gun 36 that consists of a thermal field emitter (TFE) with the electrons accelerated by a surface field generated by power supply 32. Alternative electron gun embodiments could be employed. The electrons emitted by electron gun 36 are then, within beam source 12, directed through electrodes 38 and gun lens 39 (each also controlled by power supply 32) to form electron beam 34 that enters focusing column and lens assembly 14 to be directed to specimen 20. It should also be noted that electrodes 38 typically include both suppressor and extractor electrodes.
In focusing column and lens assembly 14, electron beam 34 passes through an aperture 41, reducing the beam current from approximately 300 pA to a range of 5 to 100 pA forming what is labelled electron beam 34' in FIG. 2. A larger electron beam current (e.g., 100 pA) is particularly useful for pattern recognition. That larger beam current also reduces the integration time to achieve a given signal-to-noise ratio for the image or linescan which is well known in the art. Stated a little differently, there is a better signal-to-noise ratio for higher beam currents, however there is an improved image quality for lower beam currents.
Electron beam 34' then passes through objective lens 42, including magnetic coils 43 and pole pieces 44, that generate a strong magnetic field. That magnetic field is used to focus beam 34' to form electron beam 18 with a spot size of approximately 5 nm when directed at specimen 20. Additionally, the location of electron beam 18 is controlled with scan plates 45, located within the magnetic field created by coils 43 and pole pieces 44, with scan plates 45 powered by raster generator 48 to direct beam 18 in both the x and y directions across specimen 20 by signals on lines 46 and 47, respectively. To tie FIGS. 1 and 2 together in this area, scan plates 45 and raster generator 48 correspond to scan control 16 in FIG. 1.
Referring next to FIG. 3, there is shown a block diagram of one potential embodiment of raster generator 48. Included in this sample embodiment of raster generator 48 is a clock 60 to produce a timing signal that is applied to ramp generator 62 and counter 64. Ramp generator 62 in turn produces a ramp signal x', and counter 64 produces a digital signal which represents a preset count. The preset count from counter 64 being representative of the timing signal from clock 60. In turn, the preset count from counter 64 is applied to look-up table 65 wherein look-up table 65 has been programmed to select individual y-axis lines on the surface of specimen 20 to be scanned that corresponds to the count from counter 64. It should be noted here that the y-axis lines to be scanned may be sequential; non-sequential; selected lines with one or more intermediate lines skipped; selected lines scanned repeatedly; or any combination or order desired for various regions on the surface of specimen 20. The output digital value of look-up table 65 is then applied to digital-to-analog converter (DAC) 66 to produce a stepped signal, y', that corresponds to the y-axis position on specimen 20 to be scanned. Next, signals x' and y' are directed to the rotation and scaling controllers 68 (e.g., utilizing a multiplying D/A converter with a technique that is well known in the art) that produces signals x and y that are applied to scan plates 45 (see FIG. 2) via lines 46 and 47, respectively, to control the actual x and y positions electron beam 18 scans on specimen 20.
Referring next to FIGS. 4a and 4b, representative waveforms of signals x (46) and y (47), respectively, from raster generator 48 are shown. In FIG. 4a, ramp segment 72 in the x signal (46) directs beam 18, via scan plates 45, to scan a spot along a single line in the x-axis direction on specimen 20. Since each segment of the signal in FIG. 4a is the same magnitude in voltage, alternatively the same duration in time, the length of each corresponding scan in the x direction is of the same length. Concurrently, in FIG. 4b each step segment 76 of the y signal (47) provides a y-address of a different signal value in the y-axis direction that is traced in the x direction of specimen 20 by the x signal. To illustrate what the x and y signals of FIGS. 4a and 4b are actually causing to happen relative to specimen 20, FIG. 4c is provided to show the paths scanned based on those signals, i.e., each line starts at xo and proceeds to xa at each of the corresponding y coordinates starting with ya and progressing through ye.
However, scan signals x and y may be manipulated to vary the scan pattern in various ways. For example, in FIGS. 4d and 4e, each of lines ya, yb and yc on specimen 20 are each scanned twice along the x axis from xo to xa, and then back from xa to xo before progressing to the next y line.
Another potential scan pattern is represented by FIGS. 4f and 4g where line ya is scanned three times in the x direction between xo and xa, always in the same x direction; then line Yb is scanned once between xo and xa ; next line Yc is scanned twice in the x direction between xo and xa, always in the same x direction; and finally each of lines Yd and Ye in that sequence, are scanned once between xo and xa.
Yet another scan example is illustrated FIGS. 4h, 4i and 4j. Here two y lines, Ya and Yb, are scanned in sequence with each y line scanned once between x coordinates xa and xb, and then twice between the x coordinates xo and xc.
An additional example is illustrated in FIGS. 4k and 41, assuming that the x axis scan is as illustrated in FIG. 4a. What is shown here is the non-sequential scanning of substrate 20 along a group of y lines, ya through yg, in the order of: yc, yf, yb, yd, yg, ya and ye.
It should be kept in mind that the various scan patterns illustrated here simply illustrate the variations in scan patterns that can be used and they are not intended to be anything other than examples of the variations of scan patterns that may be used.
Returning to FIG. 2, as beam 34' passes through the magnetic field of objective lens 42 and plates 45 it is focused into beam 18 and directed onto specimen 20. Given tolerances in today's applications, the spacing between column 14 (bottom of lens 42) and specimen 20 will typically be on the order of 2 mm, however that spacing is not critical to the operation of the present invention, it merely must be a known value. In addition, specimen 20 is biased to a selected potential by a second power supply 52 (e.g., up to 5VDC) to create an extremely large decelerating field for the primary electrons of beam 18 as they approach specimen 20. The result is that the "landing energy" of those electrons as they reach specimen 20 is therefore much lower than the energy with which they are provided by electron gun 36 and with which they travel through column and lens assembly 14. The electron beam of the illustrated implementation starts out from electron gun 36 with an energy level of typically 5000 eV, and travels through column and lens assembly 14 with that energy level essentially unchanged. As electron beam 18 exits lens 42, the decelerating field radiating from specimen 20, created by the bias of second power supply 52, substantially decelerates the electrons within beam 18 to the desired landing energy.
The effect of reducing the landing energy of the electrons by controlling the decelerating field allows for excellent optical performance by reducing the chromatic aberration coefficient of objective lens 42, and provides some immunity from stray magnetic fields in the environment (e.g., stray fields of 50 or 60 cycles from power lines). Thus, the beam landing energy can be adjusted by adjusting the bias applied to specimen 20 from second power supply 52.
Continuing the discussion of the operation of the system illustrated in FIG. 2, secondary and backscatter electrons 28 are released as a result of the interaction of electron beam 18 with specimen 20 and are directed back toward lens 42. As electrons 28 are released, they spiral through lens 42 as a result of the magnetic field, and then travel toward detector 55 as they leave the field within lens 42. The electron signal received by detector 55 is then collected by collector plate 56 which in-turn generates a signal that is amplified by transimpedance amplifier 58 before being applied to image generator 59. Other input signals to image generator 59 are signals x and y from raster generator 48 on lines 46 and 47, respectively, to form a video signal representing an image of specimen 20, or selected portions thereof. Again correlating the relationship between FIGS. 1 and 2, electron detector 24 includes detector 55 and collector plate 56, while image subsystem 26 includes amplifier 58 and image generator 59. Additionally, electron beam source 12, focusing column and lens assembly 14, and specimen 20 are all contained within a vacuum chamber 23.
Note also that when a high electron beam current 18 is used, the integration time for detector 55 to achieve a given signal-to-noise ratio for an image or linescan is reduced. This shorter acquisition time allows faster pattern recognition in automated systems, and reduces sensitivity to low frequency vibration and electronic and electromagnetic noise in the system.
In a system as described herein it is useful to look at the ratio of the detected electron beam current 28 from specimen 20 to the incoming electron beam current 18 to specimen 20, with that ratio referred to as the "emission coefficient". There are several variables that affect the value of the emission coefficient, some of which are the specimen material, the topography of the sample area, the bias voltage on the specimen and the landing energy of the primary electron beam. In cases where the emission coefficient is greater than one (e.g., for silicon specimens) -- that is, more electrons are being generated at the scanned area than are arriving at it -- the specimen tends to build up a positive charge in the scanned area. For other materials the emission coefficient will have differing values, greater than, less than, or equal to, one when a positive charge builds on a specimen of that material. The field which decelerates the primary beam (i.e., resulting from the bias of second power supply 52) further tends to accelerate the electrons of beam 28 as they leave the specimen surface, which accentuates the depletion of electrons from specimen 20.
As mentioned previously, the electron microscope of the present invention is able to select small areas, including a single line, for raster scanning. Incoming electron beam 18 is further controllable so that any particular line or area on specimen 20 may be scanned several times. This creates a problem, however, in scanning situations where the emission coefficient is greater than one (e.g., for silicon specimens), or for whatever value for other materials that might constitute specimen 20. Attempting to zoom in on an image and measure very small areas results in the accumulation of a large positive charge in that area, and electrons are prevented from escaping from specimen 20 by the resulting electrostatic field. In the present invention, this problem is solved by flooding the surrounding area with electrons during a number of frame cycles as discussed below.
As shown in FIG. 5, a small area 22 (see FIG. 1) may be scanned line by line. In the present invention that scan could begin with electron beam 18 at a top left pixel 102, proceed to the right across that y line in the increasing x direction to pixel 104, then proceed downward to a pixel 105 in another y line with the same x coordinate, from there proceed to the left in the negative x direction across that new y line to pixel 106, and continue scanning in that back and forth fashion in various y lines across small area 22. Then, when that scan reaches pixel 112, the beam is "blanked" (i.e., temporarily turned off) while electron beam 18 is returned to pixel 102. Alternatively, the scan may be controlled in one of the alternative patterns discussed in relation to FIGS. 4d-4l-- what ever is appropriate for specimen 20.
On a specimen made up of a substantially insulative material (e.g., a semiconductor die), each scan may result in the release of secondary electrons, increasing the positive charge of the area of interest with each scan. As a result of repeated scans, small area 22 acquires a higher positive charge than the surrounding area of specimen 20. Such a positive charge will be displayed as a darkened area by image processor and display subsystem 26 in the resulting image. Depending on the level of positive charge on small area 22 relative to the surrounding area, features of small area 22 may be difficult to discern in that image.
As shown in FIG. 6, the technique of one embodiment of the present invention alleviates that darkened image problem by performing a sequence of scans which includes flooding an image area 120 (includes small area 22 and the area surrounding small area 22) during an integer number of raster scans. For example, in a first scan frame cycle, n1, each line of only small area 22 is scanned. In each of a selected number of subsequent frames n1 +1 , n1 +2, . . . , n1 +m, each line in all of image area 120 is scanned in each frame sequentially, each time scanning the significantly increased image area of image area 120 as compared to small area 22, thus essentially flooding the image area 120. The next small area 124 on specimen 20 (may be the same, overlapping, adjoining, or separated from, small area 22) and the surrounding larger image area is similarly scanned in frame n2. This process is thus repeated until all of the small areas 22, 124, . . . , of interest are scanned. It must also be kept in mind that each subsequent small area to be imaged may be the same as the previously scanned small area, or offset from that previously scanned small area. Also during scanning of subsequent small areas (e.g., small area 124), the image area (e.g., 120') to be flooded, may include a substantial portion of the image area (e.g., 120) of the previously imaged small area (e.g., 22) since at least the image areas, if not the small areas as well, may overlap each other.
Flooding the scanned small area and surrounding image area with positive charge effectively reduces the voltage differential between the small area (e.g., 22) to be imaged and the surrounding image area (e.g., 120 less 22), thus allowing electrons to continue to escape from the imaged small area. The overall charge that builds up on specimen 20 while imaging each small area can be adjusted by changing the ratio between the number of frames in which only the small image area is scanned (zoomed-in-frame) versus the number of frames during which the larger image area is scanned (zoomed-out-frame).
FIG. 7 provides a sample implementation of an electron detector and image processor subsystem 128 that performs the combined function of electron detector 24 and image processor and display subsystem 26 of FIG. 1. Specifically, subsystem 128 includes a detector 130 that detects the reflected and backscattered electrons from specimen 20 with the output signal from detector 130 applied to amplifier 132. Amplifier 132 subsequently supplies an amplified signal to digitizer 134 where the signal is digitized for application to image processor 136. In the lower path of subsystem 128 there is an oscillator 138 that applies a signal to frequency divider 140 to generate signals to control both digitizer 134 and image processor 136 with the operation of subsystem 128 discussed more completely below. Additionally, comparing the components illustrated in FIG. 7 to those shown in FIG. 2: detector 130 relates to detector 55 and collector plate 56; amplifier 132 relates to amplifier 58; and the remainder of the circuit in FIG. 7 relates to image generator 59.
In the embodiment illustrated in FIG. 7, each y line scan signal in an area of interest on specimen 20 is strobed at four times the conventional video rate (i.e., 160 MHz, the frequency of oscillator 138, corresponds to a four times interleaving using a standard video rate). In the lower path of subsystem 128 a 160 MHz signal is generated by oscillator 138 and applied to frequency divider 140 that performs two functions.
One function of frequency divider 140 is to divide the 160 MHz signal by four to present a 40 MHz signal to image processor 136. The second function of frequency divider 140 is to phase split a 160 MHz signal from oscillator 138 into four 160 MHz strobing signals, each with a different phase relative to each other (i.e., φ1 =0�, φ2 = 90�, φ3 = 180� and φ4 = 270�). Each of those four different phase strobing signals, φ1, φ2, φ3 and φ4, are applied to a different terminal of digitizer 134 to cause digitizer 134 to divide each y line scan signal from amplifier 132 into four different y line scan signals.
Given this embodiment, 512 subpixel samples are obtained during each phase shifted strobe, and four consecutive strobes of the same y line scan signal are each strobed with an incremental offset of phase (i.e., a quarter pixel width). These phase shifted y line scan signals are interlaced, resulting in a total of 512 times 4, or 2048 samples per line (e.g., when there are a total of 2048 sample pixels for a y line scan signal, the first strobe with a 0� phase shift strobes pixels 0, 4, 8, etc.; on the next strobe with a 90� phase shift pixels 1, 5, 9 etc. are strobed; on the next scan with a 180�phase shift pixels 2, 6, 10 etc. are strobed; and on the fourth scan with a 270� phase shift pixels 2, 7, 11 etc. are strobed).
The four phase implementation discussed with respect to FIG. 7 represents an economical way of extracting the data from the y line scan signals using less expensive 10 MHz equipment rather than 40 MHz equipment that would be needed without the strobing routine.
FIG. 8 illustrates one of the aspects of the system of the present invention in which arbitrary programming of the direction of a line scan, and non-sequential line scans, can be used to obtain several critical dimension measurements on a substrate without having to reposition the substrate between each measurement.
Before illustrating that, it would be helpful to introduce the concept of "charge induced asymmetry". Basically when a feature is scanned, such as a line on a wafer, the video signal from the leading edge of that scan provides a different image than the trailing edge of that scan as a result of the scanning process depositing a charge on the wafer during the scanning process thus affecting the resultant video image. That difference in image is referred to as "charge induced asymmetry".
During the development of the present invention it was observed that line scan direction reversal during scanning reduces charge induced asymmetry in the line scan profiles. Therefore, multiple arrays of line scan data may be acquired, wherein the position, length, and orientation of each line scan over the specimen is arbitrarily programmable.
Specifically FIG. 8 shows a portion of a conductive trace 150 dog-legging around a conductive pad 152 on an insulative material. Scan lines 154 and 156 have been added to illustrate two potential locations where multiple, independent measurements may be made sequentially without having to reposition the substrate. Stated in another way, the scanning control system of the present invention can be programmed to deflect the electron beam to separated regions of the portion of the specimen surface beneath the beam deflection window of the electron beam column without moving the specimen. This ability to average over very small areas, and over different orientations, allows for accurate rapid metrology directly off the segment, without repositioning the sample.
Another embodiment of the present invention to neutralize the charge build-up on a substrate during scanning, and the resultant darkened region is shown in FIG. 9. Enclosed within vacuum chamber 200 are electron beam source 12, focusing column and lens assembly 14 and specimen 20 as in FIG. 2. Additionally, a capillary tube (or capillary array) 202 (such as made by Galileo of Sturbridge, Ma.), made of an electrically conductive material, is inserted into chamber 200 between lens assembly 14 and specimen 20 with an orifice of tube 202 directed at the point where the electron beam impinges on specimen 20. External to vacuum chamber 200 is supply tank 206 to contain an inert gas (e.g., argon) for delivery to capillary tube 202 via the serial connection of leak value 204 (e.g., Varian Model 951-5106) and a gas supply tube 208. The purpose of leak valve 204 is to control the rate at which the inert gas is injected into chamber 200 to maintain the vacuum at the desired level (e.g., 10-4 Torr). Thus, by injecting the inert gas into chamber 200 at the point at which the electron beam scans specimen 20 the gas ionizes and in so doing neutralizes the charge build-up on specimen 20.
Although the invention has been described in relation to various implementations, together with modifications, variations, and extensions thereof, other implementations, modifications, variations and extensions are within the scope of the invention. Other embodiments may be apparent to those skilled in the art from consideration of the specification and invention disclosed herein. The invention is therefore not limited by the description contained herein or by the drawings, only by the scope of the claims.
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