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Lindenhurst recently honored village Treasurer Art Neubauer for 50 years of service by designating Aug. 12 as "Arthur L. Neubauer Day." The lifelong Lindenhurst resident was appointed treasurer in 1963 and is the longest serving village officer in the community's history. He served as grand marshal of the 2013 Lindenhurst parade and also was recognized in 2006 for his civic commitment when the village board dedicated the name of the main street in Heritage Park as Neubauer Circle. Neubauer has been married to his wife, Donna, for 57 years. They have four children, 12 grandchildren and three great grandchildren.
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text: YouTube [ Dog With Two Broken Legs Is a True (And Adorable) Fighter By TheFW Staff September 9, 2014 | TheFW This may be the toughest animal on two -- or four -- legs that you'll ever see. Read More|Comment Category: Videos, Weird News Tags: amazing, Dogs Send to a friend! Share on Facebook Share on Twitter Pin it! Reddit This! Share on Tumblr!


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Posts Tagged 'Grant Dalton'
We've expected Barker to get eased off the helm of ETNZ for quite some time now, and the only nasty or surprising part of the affair was the shitty way he found out. Kiwi's biggest radio station RadioTalkZB gave our Senior Editor a call to discuss the controversy over Barker's axing this morning; listen to the six minutes with host Rachel Smalley by clicking the player above.
- Tags: America's Cup, dean barker, Emirates Team New Zealand, Grant Dalton, Mr. Clean, new zealand, newstalk zb, peter burling
February 26th, 2015 by admin
With just six months left to the start of the Volvo Ocean Race, CEO Knut Frostad is now facing his biggest challenge, because earlier today, Grant Dalton announced that the ETNZ mob will definitely not be competing in the 2014-15 edition of the race. This sets up a massive problem for Frostad and those, like us, who believed the move to One-Design was a prudent one, and those, like us, who believed a strictly manufactured boat could possible bring costs down enough to see a fully subscribed field of 8 teams.
It looks like both Knut and SA were wrong on this one, and we're not sure why: Were the cost savings on the VOD65 simply not big enough over a VO70? Is the corporate world simply not interested in this kind of yacht race? Did the VOR staff simply not bring enough sponsor development and negotiating skills to the table? We just don't know.
What we do know is this: If Pedro Campos and his Spanish VOR team didn't have leverage before in their bargaining for the best price on a Volvo 65, they sure do have some now! Expect an announcement from them next week, and expect 6 boats on the line in Alicante.
- Tags: alicante, ETNZ, Grant Dalton, volvo ocean race, VOR
May 2nd, 2014 by admin
Assisted by some tenacious questioning from TV3 (NZ) host Paul Henry, Dean Barker quite clearly lays much of the blame for ETNZ's America's Cup loss right at the feet of Grant Dalton, and not just as the guy with the reins. Barker blames Dalton for allowing Oracle to take the famous 'lay day' and says Winnie MacFarlane was a far better grinder, and goes even deeper – though they did not get into the single biggest reason they lost the Cup – ETNZ's acceptance of the 'post-Bart' safety recommendations that allowed a ten-knot wind speed to be simply too low to allow the boats to finish a race under the time limit. This one is worth watching, and tomorrow we'll have part two of this excellent interview. Click the pic or go here for the full ten-minute chat. The America's Cup Anarchy thread is already blowing up…add your comment here.
Hawaii 3-5
In other AC news, we hear that Hawaii is actually getting real consideration for the next America's Cup, and for the first time, we're not discounting it as yet another negotiation ploy by Ehman and Co. to get a better deal out of San Francisco – especially with SF recently announcing that the loss to the City from providing services to the Cup is more than double that initially thought. Pros? You're virtually guaranteed a massive crowd thanks to easy flights from Australia and New Zealand, it's never cold and wet and foggy and nasty, you have a local government that desperately needs the tourism dollars, and Larry already owns an island there. Cons: American and European fans will be in the firm minority…but thanks to Youtube and Stan Honey and the fact that Louis Vuitton never wants to be seen in the same zip code as Red Bull anyway, no one really cares…do they?
- Tags: America's Cup, choke, dean barker, ETNZ, Grant Dalton, hawaii
February 12th, 2014 by admin
While IMOCA figures out what to do with its future, some of its most legendary skippers are moving in another direction. As first reported here on SA almost half a year ago, Franck Cammas is moving forward with his usual laser-beam focus on a French America's Cup bid, and an announcement at the Paris "Nautic" boat show may be the first indicator that he could succeed where Les Freres Peyron couldn't.
Picking up his second-annual French Sailor of the Year award last night, today Cammas pulled together a true 'who's who' in French racing history for this morning's announcement. Michel Desjoyeaux will lead the technical team and Franck the sailing team, while Olivier de Kersauson and Stephane Kandler will handle the less exciting parts of the effort.
The team's "founding members" — in other words, the guys that have funded the initial sponsorship hunt and tried to open some boardroom doors — include big biz bosses Bruno Bich (Bic), Bertrand Méheut (Canal +), Thierry Martel (Groupama), Bruno Luisetti (formerly Kraft Jacobs Suchard) and Erik Maris (Messier Maris & Associés), but crucially no major sponsors were announced. In other words, there's enough money to go looking for more, but not enough to start spending. We also hear from les anarchistes in Paris that some of the veteran grinders are being asked to keep their schedules open for late 2014 and 2015's AC45 World Series, but no contacts have been signed…
The newly opened Team France thread is bound to be a big one; check it out over here.
Kiwi Kontinuity
While France throws its hat into the ring, Grant Dalton yesterday told 3News NZ that he was back in as well despite earlier question marks from the public and Dalts himself, and the bitter taste of a crushing defeat. It's great news for AC35, as Team NZ continues to prove, year in and year out, that it's the most credible of challengers. We're guessing he won't be on the boat this time, though Glenn Ashby has already re-upped and Dean Barker is a lifer. Meanwhile, Dalts continues his publicly lukewarm face on the VOR, claiming the $30M he estimates necessary to win might be impossible to find in the current economic climate. Then again, Dalts might just be pulling the old 'negotiation by media' option with VOR CEO Knut Frostad…
Pauly (on the) Shore
Doing it's beat to leave the Paul Cayard-led disaster that was Artemis' AC 34 effort, the team just announced that Nathan Outteridge and Iain "Goobs" Jensen are continuing with the team, which is currently preparing its bid for the 35th America's Cup. More. no word which teams are beating down the door to pay way too much for Cayard's incredible leadership skills.
World Series of Poke Her
The Bay Area Economic Council reported their final America's Cup economic benefit analysis on Monday, with around $364 million in total economic impact landing in the area over the roughly 3 month period of the event. This is less than 30% of the original (and insane) $1.4B projection, and less than 40% of the revised $902M projection from March 2013 (and hopefully the City will tell ACEA to get fucked when they tote the same incompetent financial consultants to the table when negotiating the 2017 deal). With this crap news and the embarrassing ratings for the entire "Summer Of Sailing" and even the incredible AC final (outside of NZ), Coutts is already hedging against big expectations for AC35 in recent softball interviews.
"We're considering having each of the teams host a World Series event", Coutts told AC33 and 34 PR staffer Peter Rusch, who's apparently playing reporter with Yachting World until his AC35 contract comes in. Coutts says this "would be great in terms of generating excitement in their home countries," but let's be serious: After dropping half the US military budget on incredible ACWS events, Russell is very clearly telling potential teams that they will be responsible for their own regattas in the future. It's a shame, because the ACWS is the one part of the AC34 plan that provided awesome racing from beginning to end, and if OTUSA has the kind of massive advantage over AC35 challengers that we would have seen had they not had the big capsize, it might be the only exciting racing of the next Cup – especially if, as we have been hoping, the AC45s race as one-design platforms with unrestricted foils.
Thankfully Coutts cited a coming nationality rule, a welcome change to anyone (like us) who thinks patriotism and sport make great bedfellows. But he's already preparing us for a small fleet, presumably because Ellison is shooting to keep the AC72 Class for AC35. "I think we are better to aim at quality rather than quantity," he said, despite claiming that new cost reduction measures should cut overall team budgets by around a third. Call us cynical, but there's no way in hell another AC72 program will magically cost 25-35 million less than the last time around, even if some one-design elements come into play and there is a joint logistics package. If there's one thing that Russell Coutts has proved over and over again, it's that he always wins, and it always costs a lot more than he says it will.
Legal Beagle
In our final bit of Cupdate news, longtime Kiwi Cup lawyer (and architect of Alinghi's doomed CNEV challenge) Hamish Ross hit the news today after claiming in a piece in the NZ Law Journal last month that the New York Courts should have no place in deciding how the America's Cup is run. Claiming that foreign litigants can't get a fair shake in the US courts (mostly because he personally can't seem to win one) Ross says that the Cup should be administered by ISAF instead. Because of course ISAF is so very impartial, and of course unmotivated by greed or the millions if fees they seek from the AC. Ross argues that the Deed of Gift and AC Trust are not even valid, and that they could perhaps be overturned by the Court if a strong plaintiff sued the current Trustee; it's been Ross's pet argument for a decade, and it's quite persuasive, until you realize Ross's theory rests on two centuries of hearsay, dicta, footnotes, quotes from irrelevant politicians, and courts of another country. It's no wonder Ross can't win a case in the US – even after all this time, he still doesn't understand how precedent works here.
There's a thread to discuss the legal stuff, and you can download the full NZLJ piece here.
- Tags: AC35, America's Cup, Australia, Coutts, ETNZ, Grant Dalton, San Francisco, Team France
December 11th, 2013 by admin


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37106-012: Boao Forum for Asia 2003
Project Data Sheet (PDS): Overview
The objective of ADB involvement in the Boao Forum is to provide participants, particularly private sector representatives, with an understanding of the benefits of pro poor, regional cooperation and the potential such cooperation creates for increased private sector investment, security and economic development. In particular, the intention is to showcase the cooperative efforts in various sectors, thereby its benefits to the investment environment and ultimately to development and poverty ... Read More
|Project Number
|Type or Modality of Assistance
Technical Assistance
|Public sector (Sovereign)
|Approval Number
TA No. 6094
|Approval Date
|06 Mar 2003
|ADB Financing ($ thousand)
Public sector management
|Economic and Public Affairs Management
Project Data Sheets (PDS) contain summary information on the project or program. Because the PDS is a work in progress, some information may not be included in its initial version but will be added as it becomes available. Information about proposed projects is tentative and indicative.
The Public Communications Policy (PCP) recognizes that transparency and accountability are essential to development effectiveness. It establishes the disclosure requirements for documents and information ADB produces or requires to be produced.
The Accountability Mechanism provides a forum where people adversely affected by ADB-assisted projects can voice and seek solutions to their problems and report alleged noncompliance of ADB's operational policies and procedures.
In preparing any country program or strategy, financing any project, or by making any designation of, or reference to, a particular territory or geographic area in this document, the Asian Development Bank does not intend to make any judgments as to the legal or other status of any territory or area.
View the latest procurement notices for Goods, Works and Related Services, or Consulting Services.


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Chewed up and spat out
Freud in the City
David Freud Bene Factum Publishing, 386pp, £18
Freud in the City
David Freud Bene Factum Publishing, 386pp, £18
by Alexander Preston Published
Only rarely does literature about the world of finance break out of its "special interest" bracket and grasp the imagination of the wider public. Certainly in Britain, where public share ownership lags far behind that in the US, it is rare for a book about the City to cross over into the mainstream the way Michael Lewis's Liar's Poker did in America in the early 1990s. The world of finance is full of arcane terminology and abstruse ritual; most of the time, it is rather boring. Anyone's attention can be gripped by tales of swindling villains and rags-to-riches heroes, but there is little to attract the layman in descriptions of the everyday workings of the financial machine.
In his memoir, Freud in the City, David Freud valiantly attempts to make this world come alive. Freud (the grandson of Sigmund) will be remembered in the City as one of the key players in several of the most embarrassing and badly managed deals in investment banking history - Eurotunnel, Euro Disney and Railtrack. The Eurotunnel farce ended with Freud begging John Prescott for £1.2bn to plug the gap in accounts left by our hero's optimistic projections; and it is at this crucial point that Freud in the City opens. We then trace Freud's path from his initial steps in the City to his eventually fruitless rendezvous with Two Shags.
Freud's anecdotes about his time in finance capture trading-floor banter in all its earthy glory. Fairly typical is this conversation with a colleague following a fractious meeting with his boss regarding the valuation of EuroDisney: "I feel like I've been raped." "Well, if you were raped, you were standing round the Place Pigalle with your blouse undone swinging your handbag and asking for it."
Freud came from the Lex column of the Financial Times to the broking house Rowe and Pitman shortly before the big bang - the deregulation of the financial markets in October 1986 - and rose swiftly towards the top of his organisation, which was soon bought out by the domestic banking giant Warburg. Freud's talents helped to build up this sleepy UK investment bank into a major European player, and his description of its demise in the wake of an abortive merger with Morgan Stanley (then, as now, led by the enigmatic John Mack) is fascinating to those on the inside of City life. Indeed, it is before Freud reaches the pinnacle of his career that his account is at its best, offering an intimate insight into the workings of an investment bank in the 1990s. In tatters as a result of the media and market mauling that followed the merger's collapse, Warburg was bought by SBC in 1995, then swallowed up by UBS in 1998.
Yet, despite the bruising encounters with other bankers, investors and pugnacious politicians, Freud's book is striking for how little it reveals about how the City works today. No doubt for outsiders (such as David Hare, who states on the jacket that the book reveals "what on earth people do in the City of London") Freud's experiences chime with how they believe things should be behind the mirrored glass windows of Canary Wharf. In truth, the markets have changed so much since the events of the 1990s that reading Freud in the City is like sitting in an armchair at Boodles and listening to the stories of an amiably port-soaked war veteran.
Mergers and acquisitions - the deal-making that Freud practised to such acclaim in the early days of his career - has been relegated to the sidelines in the list of priorities of the big investment banks. The advisory teams at the banks are now far more focused on the identification of leveraged buyout targets - inefficient public companies whose shareholders can be bought out through the issuance of debt. Perhaps traditional M&A business will come back in vogue, but the sort of deals Freud struck in the Nineties are to the current world of finance what Shed 7 are to the world of popular music - a fondly remembered footnote. Of Goldman Sachs's 2005 total earnings - a huge $8.3bn - only $413m was made from investment banking: less than 5 per cent. The big money is now made in the trading of fixed income products, derivatives and commodities. Were Freud to enter the City now, he would be a hedge fund manager or in charge of the proprietary trading desk at one of the major banks. M&A is yesterday's news, so there is something touchingly old-fashioned about Freud's story.
Freud lived through a revolution that paved the way for the sophistication and dynamism of today's markets. His memoir of this experience is no less valid because the world that chewed him up and spat him out has changed beyond recognition. Despite, or perhaps because of, its occasionally clumsy turn of phrase and ethical haziness, Freud in the City is a moving and acutely observed view of a man who, by a series of lucky chances and brave calls, rose to the top of the banking world. Fittingly, the book ends with Freud drunkenly vomiting in his office bin after being elbowed out of his firm by a younger, even more aggressive generation.
Alexander Preston is a portfolio manager at a Mayfair investment company


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By Jim GaramoneAmerican Forces Press Service
WASHINGTON, May 19, 2006 Traumatic injuries are a tragic fact of life in war. But thanks to the efforts of military medical personnel here, wounded servicemembers have the best chance of surviving their injuries than in any previous conflict.
"It's like the TV show 'Survivor,'" said Army Dr. (Lt. Col.) Mark Smith. "The characters change each season, but the premise remains the same."
Smith is part of the 10th Combat Support Hospital based at Ibn Sina Hospital in the International Zone here. The previous unit at Ibn Sina - the 86th Combat Support Hospital - is featured in an HBO documentary "Baghdad ER," which premiers on the cable network May 21. The show depicts the way Army medics care for, treat and save servicemembers wounded in Iraq.
The 10th receives about 20 people a day, and treats coalition servicemembers, Iraqi soldiers and Iraqi civilians. The staff also gives medical care to wounded insurgents.
Smith, the hospital's deputy commander for clinical services, said the 10th treats more than half of the trauma victims in Iraq.
"The effects of (improvised explosive devices) and gunshots produce most of the casualties," he said. "IEDs have developed to an extent that they are delivering devastating injuries: amputations, puncturing body cavities, blast (injuries) and now burns." Still, the American survival rate is the best for any war, at 94 percent.
U.S. casualties come in groups, Smith observed. "Americans tend to stick with their vehicles," said the doctor, who served 12 years as a field artilleryman. "Iraqis conduct more dismounted operations, so their wounds are more gunshot (wounds)."
Army Dr. (Capt.) David R. Steinbruner, a trauma specialist in the emergency room, said the teamwork among the doctors, nurses and medics in the ER is a sight to behold. Everyone involved in medical care, "from the buddy using combat life-saving techniques, to the medics and the battalion surgeons" have a part to play in the survival rate, he said.
Army Lt. Col. Patrick Ahearne is the chief of nursing at the hospital. He said the 10th's young nurses, many of them fresh out of college, really came through during their deployment.
"I am so proud of the way our 'baby nurses' have learned and behaved," he said. "The work they have done in the past year, for people new to the field, is incredible."
The hospital staff is constantly seeking ways to improve its survival record, Smith said, consulting with battalion surgeons and giving immediate feedback to units that have sent patients to the hospital.
The hospital uses lots of whole blood products when treating the patients. Smith said medics have found this is better than the saline solutions medical experts recommended in the past. The doctors, nurses and medics continually share procedures and techniques, not only among themselves, but also with personnel back in the United States, he added.
Smith said he's hopeful for a long-term push to capture data from medical experiences in Iraq. He said this process during World War I, World War II, Korea and Vietnam saved countless lives, both military and civilian. "We should be able to do the same now," he said.


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text:
Who is Mr. Isaacs in "The Picture of Dorian Gray"? How does Dorian describe him?
1 Answer | Add Yours
Mr. Isaacs was Sibyl Vane's manager and producer of the theatre. He is described as "fat" and "stereotypically Jewish". Mr. Isaacs greets Gray at the door to the theatre and takes them to their box seats.
Dorian despises Mr. Isaacs. Their relationship was strained at best. At one point in the story, Dorian refers to Isaacs as a Caliban. (A caliban is not man - not beast and is described as evil, crude, but not vulgar in Shakespeare's The Tempest.)
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Island Lake's finance committee will meet Tuesday to discuss the proposed 2015 fiscal year budget. Details of the municipal spending plan have not yet been made public. The session is set for 1 p.m. at village hall, 3720 Greenleaf Ave. The new fiscal year begins May 1.
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Excerpt from Congress Provides Litigation-Type Review of Patents Signed into law by President Obama on September 16, 2011, the Leahy-Smith America Invents Act ("the Act") is the most sweeping change in U.S. patent law in more than a century. Over the course of the next year, the Act will introduce a number of changes, large and small, to established U.S. patent law. For those companies who find themselves frequent targets of patent infringement allegations but would prefer to avoid lengthy federal court litigation, the Act expands the currently available Patent Office procedures for post-grant review of issued patents. Given the extent of the Act's changes to U.S. patent practice, the changes are being implemented in multiple phases. Some provisions of the Act significantly impact the course of federal litigation. For example, the Act eliminates a defendant's "best mode" defense to a charge of patent infringement, and significantly restricts a patent holder's ability to sue many defendants at once in a single patent infringement lawsuit. Both of these changes have been in effect for six months. The most sweeping of the Act's changes—those converting the United States from a patent system where patents are awarded to the first to invent to one where patents are awarded (under most circumstances) to the first to file an application—are set to go into effect with final implementation of the Act on February 16, 2013. Please see full issue below for more information.
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Hard-hitting gun control video demonstrates impeccable directorial skill
Now and again we come across work that our name doesn't quite do justice to; calling it nice doesn't cut it, and now and again is perhaps even a little misleading. In this particular instance that's definitely the case – there's nothing nice about this advert from Grey NYC. Nevertheless you can't fault the execution of this 30 second piece of film that manages to be provocative, shocking and flawlessly communicative with little more than a simple message, clear direction and well-considered copy. Whichever side of the gun control discussion you're on (and it's a more nuanced debate than most comments sections on the web would have you believe) it's impossible to deny the directorial skill at play here.


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Croissant Neuf Summer Party
From: 2015.08.10 To: 2015.08.12
Official website:
For those of you who don't already know, Croissant Neuf are one of the most original, innovative and creative constants on the U.K artistic festivals scene! Originally starting out as a skiffle band in East Anglia, playing pubs, folk festivals and village halls the Croissant Neuf of today was just a dream. All six founder members had a keen interest in performance: music, theatre and circus and 1986 saw the first Croissant Neuf tent being used as a café/venue at shows around the region. The café originally specialized in selling croissants and coffee and it quickly assumed its distinctive name. In the late eighties the collective toured the steam fair circuit, fusing together circus performance and live music. Soon after, the troupe dispersed. As a result of this, Sally and Andy made the decision to continue with Croissant Neuf alone and the late eighties saw them buy their first new tent; the predecessor to what you see today. The original Croissant Neuf family often worked together even after the split and continue to do so to this day. Already keen environmentalists they made the conscious decision to buy solar panels and wind turbines instead of diesel generators. In the early nineties Croissant Neuf gave birth to the Green Roadshow a traveling environmental education centre, with the circus big top at its focal point. Music was the original raison d'être for its being and the balance began to shift in its favor once again. At the turn of the millennium a massive solar generating unit was built to create enough power to drive a 10kilowatt P.A system, a feat of modern technological engineering representative of its grandiose name.
Main album


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About Second Chance Used Furniture.
Second Chance Used Furniture is a small family run business, located in Sheffield, South Yorkshire. We aim to deliver a professional and friendly service and provide you with the best quality used furniture available, to sell to you, the public at reasonable prices. We can deliver your purchase to any location within the UK mainland. We can quote you a delivery price at time of purchase, or pass your details to a professional courier who may be able to offer a more competitive pricing for long distances.We also offer a house clearance service and man and van service.
Where is the Second Chance Used Furniture store located?
Our store is located on the edge of the City of Sheffield, South Yorkshire, in the busy shopping area of Crookes. Crookes is primarily a residential area, it is located just minutes away from The University of Sheffield and the City centre. As the area is well known and frequently visited, we are easily accessible via most main bus routes. For further information please visit our Location Page.


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Today my contact at FMV sent some pictures of the S/280 and the disk he has in storage and that they will donate for free to me. The guy is extremely friendly and helpful and so is his boss. The world would be a much better place if people were like these guys and I owe them a big "thank you"! Will work out with FMV how to ship the equipment to me.
The Soul of a Great Machine
Just received some pictures of the S/280
- No comments yet.


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A music video I directed for my musician friend, Ry Cook. I liked the song because it told a story. I thought it would be funny if I used children instead of adults.
Directors website: dbhefner.com
Musicians website: rycook.com
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About This Page
This page displays information about the major you selected and helps you identify the community colleges where you can fulfill major preparation requirements.
University Majors
Open fall term only. All applicants must have a minimum 3.0. gpa at the time of application. The UCLA Department of Design| Media Arts offers an undergraduate program which focuses on visual communication design with an emphasis on digital media. This uniquely challenging program invites students to balance aesthetic sensibility with logical reasoning, formal theories with practical application, and contemporary thought with historical perspective.
to read more about this major on the campus web site.
ASSIST Home | Exploring Majors Home | Majors | UC Campuses | CSU Campuses | Community Colleges | Course Articulation


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Looking to get iOS style icons on lion dock
I'm looking to get iOS style icons on my lion dock.
Any ideas. Like to have the uniform look of iOS icons.
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bob carr performing arts center
Michelle Williams Talks About The Play "What My Husband Doesn't Know"
The David E. Talbert stage play "What My Husband Doesn't Know" stars [lastfm link_type="artist_info"]Destiny's Child [/lastfm]memeber [lastfm link_type="artist_info"]Michelle Williams[/lastfm]. And she took some time out her rehearsal schedule to do an interview with me.
Mike Epps Hits Us Up On The Jamzline!!
Don't miss the hilarious Mike Epps and his friends performing live Valentines night at the Bob Carr Performning Arts Center. Tickets sold so fast, they had to add another show!! Don't miss out!!


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Please leave your current contact information. I promise we wont use it for anything other than possibly to send you information about this study and the NNIN REU program.
If you would like to share a paragraph or so about your current postition with others, please send an email to Melanie ( firstname.lastname@example.com) and we will put it in the next REU research accomplishments in our "history" section. thanks again.
Lynn Rathbun
NNIN Program Manager


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Conquering Infertility: Dr. Alice Domar's Mind/Body Guide to Enhancing Fertility and Coping with Infertility
Authors:Alice D. Domar, Alice Lesch Kelly,
Publisher: Penguin (Non-Classics)
Keywords: infertility, enhancing, fertility, coping, guide, mind, alice, domar, conquering
Number of Pages: 320
Published: 2004-02-24
List price: $16.00
Infertility is a heartbreaking condition that affects nine million American couples each year. It causes tremendous stress, can trigger debilitating sadness and depression, and can tear a marriage to shreds. In Conquering Infertility, Harvard psychologist Alice Domar—whom Vogue calls the "Fertility Goddess"—provides infertile couples with what they need most: stress relief, support, and hope. Using the innovative mind/body techniques she has perfected at her clinic, Domar helps infertile women not only regain control over their lives but also boost their chances of becoming pregnant.
Authors:Alice Turner Curtis, Alice Turner Curtis, Alice Curt
Publisher: Applewood Books
Keywords: valley, mohawk, maid, little
Number of Pages: 192
Published: 1999-04-15
List price: $12.95
In May 1777, little Joanne Clarke and her friend Nancy Wagner are taken captive by a Native American, an ally of the British army. They are left in the woods where they find the Indian's pouch containing a letter with valuable information to the American Army at Albany.
Author: Alice Steinbach
Publisher: Random House Trade Paperbacks
Keywords: woman, curious, adventures, alice, educating
Number of Pages: 320
Published: 2005-04-12
List price: $14.95
This funny and tender book combines three of Alice Steinbach's greatest passions: learning, traveling, and writing. After chronicling her European journey of self-discovery in Without Reservations, this Pulitzer Prize—winning columnist for the Baltimore Sun quit her job and left home again. This time she roamed the world, taking lessons and courses in such things as French cooking in Paris, Border collie training in Scotland, traditional Japanese arts in Kyoto, and architecture and art in Havana. With warmth and wit, Steinbach guides us through the pleasures and perils of discovering how t
Author: Carol Felsenthal
Publisher: St. Martin's Griffin
Keywords: alice, longworth, roosevelt, life, princess, times
Number of Pages: 340
Published: 2003-12-31
List price: $21.99
Known as the "other Washington monument, " Alice Roosevelt Longworth knew personally every president from Benjamin Harrison to Jimmy Carter, and for over 70 years reigned as Washington's grandest grande dame. Here is both the delightful and the dark sides of her life.
Author: Susan E. Gunter
Publisher: University of Nebraska Press
Keywords: alice, james, gibbens, story, jamesland, howe
Number of Pages: 464
Published: 2009-03-01
List price: $50.00
Alice in Jamesland, the first biography of Alice Howe Gibbens Jameswife of the psychologist and philosopher William James, and sister-in-law of novelist Henry Jameswas made possible by the rediscovery of hundreds of her letters and papers thought to be destroyed in the 1960s. Encompassing European travel, Civil War profiteering, suicide, a stormy courtship, séances, psychedelic mushrooms, the death of a child, and an enduring love story, Alice in Jamesland is a portrait of a nineteenth-century upper-middle-class marriage, told often through Alice's own letters and made all the more dyna
What To Do About Alice?: How Alice Roosevelt Broke the Rules, Charmed the World, and Drove Her Father Teddy Crazy!
Author: Barbara Kerley
Publisher: Scholastic Press
Keywords: alice, father, teddy, crazy, drove, charmed, roosevelt, broke, rules, world
Number of Pages: 48
Published: 2008-03-01
List price: $16.99
Theodore Roosevelt had a small problem. Her name was Alice. Alice Lee Roosevelt was hungry to go places, meet people, do things. Father called it running riot. Alice called it eating up the world. Whether she was entertaining important White House visitors with her pet snake or traveling the globe, Alice bucked convention and turned every new experience into an adventure! Brimming with affection and wit, this spirited biography gives readers a peek family life inside the White House. Prose and pictures spring, gambol, and two-step across the pages to celebrate a maverick American heroine.
Authors:Robert E. Litan, Alice M. Rivlin, Alice M. Rivlin,
Publisher: Brookings Institution Press
Keywords: internet, promise, economic, coms, dot
Number of Pages: 120
Published: 2001-11
List price: $22.95
In just a few years, the Internet has had a visible impact on the daily lives of many Americans. But the recent demise of many of the "dot coms" that symbolized the Internet revolution has raised warning flags about its future. Until now, discussion of the impact of the Internet on the economy has been mostly speculation. In Beyond the Dot.coms, two of the nation's most respected economists articulate the anticipated economic impact of the Internet over the next five years. Drawing from detailed research conducted by the Brookings Task Force on the Internet and the Berkeley Roundtabl


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Refinery allows you to get a fully content managed website up and running in just minutes. Install it, add in your design and extend it with any custom functionality you might need.
Refinery delivers the easiest possible end-user experience, without compromising functionality and extendibility. Numerous existing users running Refinery website have shaped it to work the way it does today.
Collect inquires, post news or even manage a whole portfolio of images. There is an engine for each of those!


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Posted at: 04/15/2013 9:28 AM
Updated at: 04/15/2013 9:43 AM
Nicole Cuaron of The Home Depot shows you easy tips to re-potting a plant.
The Home Depot
Do-It-Herself Workshop for Small Space
Thursday, April 18
6:30 - 8 p.m.
This Good Day New Mexico segment may include paid advertising content. It is not affiliated with KOB-TV's News Department.


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Don't feel like going to work today? You're not alone. "According to a new CareerBuilder survey, 32% of professional adults called in sick when they weren't actually ill at least once this year. But instead of simply telling their managers, 'I can't make it in today because I'm not feeling well,' they offered much more colorful excuses" — Jacquelyn Smith. Read The Most Ridiculous Excuses For Calling In Sick This Year.
"Yesterday Condé Nast announced it was shutting down its internship program. A spokeswoman for the company, Patti Rockenwagner, confirmed the news this morning, but declined to elaborate on the reasons behind the decision or even say how many of the company's magazines have been relying on interns" — Susan Adams. Read Why Condé Nast Felt It Had To Stop Using Interns.
"Why does news on Facebook often feel so random, repetitive and over-filtered? Maybe it's because so few people are going there for news in the first place. Only 22% of people who consume news on Facebook say they actually consider the social site a good place for reading about what's going on in the world, according to a new study by Pew Research Center and the Knight Foundation" — Jeff Bercovicic. Read Facebook: An Important News Source For People Who Don't Care About News.
"Carl Icahn, fresh off a victory lap at Netflix, is turning up the burners on his effort at getting Apple to shell out more cash to shareholders" — Steve Schaefer. Read Icahn To Apple's Tim Cook: Buy Back $150B In Stock, Now.
"Ford Motor's continued strong performance in North America, plus improved results in other regions of the world, combined to generate a record $2.6 billion in pre-tax profit in the third quarter, prompting the U.S. automaker to raise its earnings guidance for 2012″ — Joann Muller. Read Ford Raises Profit Outlook As Global Business Takes Off.


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Lady Matadors win Region I Division I Volleyball ChampionshipNovember 1, 2012
Straight-set win over Eastern Arizona earns AWC first region volleyball title since 2007
Yuma, Arizona – October 31, 2012 – Arizona Western College is proud to announce that the AWC Volleyball team has officially won the 2012 Region I Division I Volleyball Championship after defeating the 2nd-seeded Lady Gila Monsters of Eastern Arizona College, 25-19, 28-26, 25-23, earlier tonight in the 2012 Region I Division I Volleyball Finals at 'The House' on the AWC campus in Yuma. The win sends the Matadors to the District C Championship, which will be played November 6th at the site of the Region II Champions.
After dominating the Lady Gila Monsters in three sets a week ago but then losing two matches (in one night) two nights later against Yavapai College in the regular season finale, Matador fans wondered which of those Matador performances they would see tonight. From the opening serve, the Lady Matadors showed that their confidence wasn't shaken from Friday's losses as they broke out to an early 9-5 lead in Game 1. They would gradually extend the lead throughout the game, leading by as many as 8 points on four different occasions, and behind Amber Graham's five kills, took the first game, 25-19.
Knowing that they were facing the possibility of having their four-year string of consecutive Region I titles snapped with a loss, Eastern Arizona came roaring back to build an 11-5 lead in Game 2. 2012 ACCAC Player of the Year Annalyn Sanders' 5 kills in Game 2 helped pace the Gila Monsters as they extended their lead to 7 points. However, the Matadors showed their resolve, battling back with 5 straight points to tie the set at 19 apiece. After EAC took the lead back, 21-20, the Matadors recorded the next 3 points to take a 23-21 lead. Eastern wouldn't take the lead again in the game, although they tied the Matadors at 23, 24, 25, and 26 apiece before the Matadors finally outlasted them to win it, 28-26.
The Lady Matadors used that momentum to take the lead, 9-3, early in Game 3. The Gila Monsters battled back with 6 points in a row to tie the score at 9 before AWC gradually began building the lead again. The Matadors bumped the edge back to five points at 17-12 before the Gila Monsters made one last major surge, scoring 11 of the game's next 15 points, and seemed poised to send the match to a fourth game. Once again, though, the Matadors wouldn't let the possible sweep slip away, scoring the match's final four points, punctuated by Paula Rosa's eighth and final kill to end the match. Graham finished the match with a team-high 15 kills and 14 digs (along with one ace and two blocks), and was named the 2012 Region I Finals Most Valuable Player. Rosa finished with 12 digs and 3 big aces to go along with her 8 kills. Matadors' setter Kylee Chun dished out 19 assists to go along with her 12 digs.
The win gives the Lady Matadors their first Region I Championship since 2007, the 9th Region I title in the history of the program, and ends Eastern Arizona's four-year reign at the top. The victory also sends the Lady Matadors to the NJCAA District C Championship against the champions of Region II (either Northern Oklahoma-Enid, Redlands (OK) or Seminole State (OK)), who will also host the match on Tuesday night, November 6th. The Region II Championship will be decided this Saturday in Oklahoma, and Matador fans should check the AWC Athletics website (www.azwestern.edu/athletics) or the Matador Sports Network's Twitter page (@thevoiceyuma) for updates on who the Matadors will face next Tuesday. The winner of the NJCAA District C Championship will advance to the NJCAA Division I Volleyball Tournament in West Plains, Missouri, November 15th through the 17th.


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Strong leadership and guidance is provided to Tourism Vancouver by its 15-member Board of Directors, representing a broad spectrum of Greater Vancouver's tourism industry. These board members volunteer their time and contribute extensive knowledge and experience to ensure that the organization is accountable and performance-driven.
Bob Lindsay
Lift Bar Grill View
Past Chair:
R. Gordon Johnson
Regional VP & General Manager
Delta Hotels & Resorts
First Deputy Chair (Chair 2015-2016)
Michael Cameron
General Manager
Grouse Mountain Resorts
George Bartel
Cantrav Services
Ken Cretney
President & CEO (Interim)
BC Pavilion Corporation
Marion Harper Treskin
General Manager
The Westin Bayshore, Vancouver
Nicholas Gandossi
General Manager
Opus Hotel Vancouver
Catherine Runnals
brand.LIVE Management Group
Peggie Terry
WHERE Vancouver
Nancy Stibbard
Capilano Suspension Bridge
Philip M. Barnes
Regional Vice President, Pacific Northwest
General Manager, Fairmont Pacific Rim
Fairmont Hotels & Resorts
Hal Wake
Artistic Director
Vancouver Writers Fest
Johnny Tsang
General Manager
Empire Landmark Hotel
Stephen Geddes
Soaring Attractions LP
Kari Koskla
General Manager
Shangri-La Hotel Vancouver
Support to Board of Directors:
Ty Speer
President, CEO
Tourism Vancouver
Suite 210, 200 Burrard Street
Vancouver, BC V6C 3L6
Email: firstname.lastname@example.com
> View a list of past GMs, CEOs, Board members, and association names


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Taking a lesson from Patiala and Sangrur incidents, the Ludhiana police have deputed female officials in all police stations to deal with the complaints filed by women. The female officials will listen to the complaints of the women and would take appropriate action.
In the first phase, two female officials have been deputed in all police stations. Besides, the police would also appoint a female official holding the rank of an ASI to inspector as the zone in charge.
The female officials deputed in the police stations would report to the zone in charge.
Haryana health officials crack sex-determination racket


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Routen Chaplin, Nottingham, is a long established insurance broker providing commercial and personal insurance. We are committed to delivering the highest levels of expertise and service.
As an independent broker and financial services provider, our loyalty is to our customers and we believe in offering a range of cost-effective insurance and investment solutions, providing maximum value, via our friendly, service-orientated team.
Routen Chaplin has the strong belief that we are large enough to cope, but small enough to care.
Inval Holdings Ltd registered in England No. 847184 trading as Routen Chaplin is authorised and regulated by the Financial Conduct Authority for general insurance business. FCA number 304376. You can check this on the FCA's register by visiting the FCA's website www.fca.org.uk. To contact the FCA you can telephone 0845 606 9966 or email firstname.lastname@example.com.


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Get Stormy, winner of three Grade 1's, retired
Get Stormy, a speedy turf specialist who won three Grade 1 events, has been retired, trainer Tom Bush announced Monday.
Bred and owned by Mary Sullivan, Get Stormy won 11 of 31 career starts and earned $1,606,812. His last start resulted in a third-place finish in the Aug. 11 Fourstardave at Saratoga.
"We'd actually been thinking about it for a few days," Bush said from New York. "We need to get to work on finding him a new job."
Get Stormy, a 6-year-old Kentucky-bred horse by Stormy Atlantic, won nine stakes, most notably back-to-back wins at Saratoga in 2010 in the Grade 2 Fourstardave and Grade 2 Bernard Baruch, and in 2011 in Kentucky in the Grade 1 Maker's Mark Mile and Grade 1 Woodford Reserve Turf Classic. His third Grade 1 score also was his final career victory, coming last February in the Gulfstream Park Turf Handicap.
"He was the best horse I ever trained," said Bush. "He really was a special horse, gave us a lot of thrills. He doesn't owe us anything, so we're happy to retire him."
Bush said he hopes to field a satisfactory offer soon to get Get Stormy to stud starting in 2013.
What a beauty! Why is he being retired? Anyway, at least he's in good health. Wishing Stormy and his connections all the best. Thanks for taking good care of him.
What a lovely horse Get Stormy is. He retires with a wonderful, stakes race filled history. He is marvelously talented and has done a great job for his connections. He now gets to go, enjoy himself, romance beautiful mares, and help create gorgeous foals. I hope he has lots of fun doing all of that. Have a happy life, Get Stormy.
I'm looking forward to seeing Clyde's babies! Here is a horse who had a complete career, great success, and is being retired sound, just having gone a bit off form. I hope he can pass on his markings!
Owner/breeder/ and Trainer are all as classy as they come. There is no better Horseman than Tom Bush anywhere. Thanks Marty... This story is a breath of fresh air.
One of the handsomest horses around....has that look about him that says, yeah, I know I'm special. And he certainly has been. Hope he has a wonderful retirement and that we get to see some little "stormies" soon!
I think the connections pulled the trigger a little too early. With hiis speed and tenacity, they should try stretching out to 10 to 12 furlongs which many have done successfully as they age. Win recent years, we have Rahy's Attorney, Keertana, Brass Hat, Cloudys Knight and more.
Get Stormy is a big horse with conformation of a dirt horse. I think he will be successful at stud adding size to the typical speedy and tenacious Stormy Atlantic runners.
Horse racing needs more horses like this and less being retired by the end of their 3 yo season. This horse always tries hard, and glad to see him being retired after a nice career.
heard he has been searching for a stud offer for some time,if he was one of those flashy fragile 2yos that won 2 races then retired with all manner of injuries the breeders would be knocking each other over to stand him.but he was a warrior who ran until age 6 won 11 of 31 starts and earned 1.6 mil and he had speed.therefore hes overlooked ,crazy. i know his dam was not much but his grand dam produced a slew of tough usefull runners.
Great to see a horse have a complete career and retire as a sound adult animal. Hope he's supported by the fashionable set in the breeding shed.


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iPad 2 cameras hands-on
The iPad 2 is equipped with two cameras, a front-facing VGA camera and a rear facing 720p HD camera. Check out the video above for example footage with both cameras.
Recording video on the iPad 2 is a little awkward given it's large size, but it gets the job done. Another thing that takes some getting used to is that when using the front-facing camera to record yourself in landscape mode, the camera is positioned to the far left (or right). It feels strange looking so far from the center of the screen because I have grown accustomed to looking at the top of a device or just the screen while recording video. It's clear that you are not looking at the camera if you stare at the screen while recording.
The quality of video taken with the VGA and HD cameras are as expected. In well-lit situations, the HD camera produces excellent results and the VGA camera gives acceptable quality. Both cameras do an ok job in bad lighting situations, but admittedly do better than I was expecting. In fact, while taking footage in my daughter's poorly lit bedroom, the video looked pretty bad; but after uploading it to YouTube and watching on a computer, it didn't look too shabby.
Taking still photographs with the iPad 2 is not nearly as rewarding as video. The photographs come out mediocre even in excellent light conditions. With that said, I was actually rather impressed with the close-up photograph I took of a bush. Digital zoom with the rear-facing camera, however, is awful. It's not even worth your time to test it out.
Considering the fact that the iPad 2 is not, and should not be, regarded as a primary camera, I am content with the quality of the video and photographs obtained with the iPad 2. Of course, I would love to see better cameras, but they do a good enough job for my needs.
To check out the photos taken with the iPad 2, follow along after the break!
Side note: the video above was edited with iMovie on the iPad 2.
Related Posts
- Photo Booth on iPad 2
- FaceTime on iPad 2
- iMovie now universal app for iPhone 4, iPad 2, and iPod touch 4
- Real Racing 2 HD updated with 1080p video-out
- App Giveaway: Spy Mouse HD for iPad
- Real Racing 2 HD hits the App Store just in time for iPad 2
- Apple gives us iMovie for iPad
- Apple shows off iPad 2 Smart Covers
- Real Racing 2 HD for iPad 2 to provide 1080p, full screen video out to TV
- Daily Tip: How to connect your iPhone or iPad to your TV
This entry was posted by iPad Pus on December 20, 2011 at 3:08 am, and is filed under iPad News Report. Follow any responses to this post through RSS 2.0. You can leave a response or trackback from your own site.
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The merchants in downtown Barrington will host a Holiday Wine Walk from 2 to 6 p.m. Saturday, Nov. 23 from 2 to 6 p.m. More than 30 shops and restaurants are participating in this enjoyable event. There will be free wine tastings and other tasty treats at each of the merchant stops. Customers can begin the walk at any participating business by picking up a location map for the tastings. Sponsors of the event are Heinen's Fine Foods, Near Restaurant, McGonigal's Pub, The Annex, Grassroots, Ciao Baby!, Jewel-Osco, Cooper's of Barrington, Vin Chicago and Chessie's.
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"If any radiation were to make it here, it would be merely background levels," said Jere Jenkins, the director of Radiation Laboratories at Purdue University in West Lafayette, Ind. "Nothing for people on the West Coast or people in the United States to be concerned about."
Higley said she has been spending a lot of time over the last few days urging calm.
"We have monitoring capability here in the U.S. that is extraordinarily sensitive. We can detect radiation that is like a hundred-thousandth of what you get from a regular X-ray, and we don't expect to see even that.
"For the stuff to travel, it has to be picked up by the wind," she said, "higher-level winds that have global distribution. And that's just not happening. This is a little like a campfire -- the smoke is all near the ground."
The worry remained acute, of course, along the Japanese coast, where even outside the 12-mile evacuation zone, people were urged to stay indoors if they lived within 18 miles of the Daiichi plant.
"We are all-out urging the Japanese to get more people back in there to do emergency operation there, that the next 24 to 48 hours are critical," an American official told ABC News. If cesium and other radioactive elements with long half-lives get into the air, "that could be deadly for decades," the official said.
But Jeff Masters, a former meteorologist at the National Weather Service who now works at Wunderground.com, ran a computer model and concluded that radiation would not get very far.
"Ground-level releases of radioactivity are typically not able to be transported long distances in significant quantities, since most of the material settles to the ground a few kilometers from the source," he wrote.
"Given that the radioactivity has to travel 3,000 miles to reach Anchorage, Alaska, and 5,000 miles to reach California, a very large amount of dilution will occur, along with potential loss due to rain-out.
"Any radiation at current levels of emission that might reach these places may not even be detectable," he said, "much less be a threat to human health."


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London Markets Open in:
Huge California fire jumped 20,000 acres overnight
The secret to a happier, healthier life: Just retire
Did Congress just make it easier for car dealers to discriminate against you?
The next 'Grease' for high school musicals is ...
FBI says hackers are shaking down big banks
10 surprising myths about gas mileage
This is what you should be paying your babysitter These are the best places to raise a family
• Why stay-at-home spouses are so resentful
The 5 cars everybody wants to buy this year The 5 cars nobody wants to buy this year
• 10 surprising myths about gas mileage
• Trump sees double-digit gains in WSJ/NBC poll
• Biden 'actively' exploring presidential run: NYT
• More debris found on Réunion Island
• Iran to buy planes from Airbus, Boeing
• Clintons earned $28 million last year
• KKR founder Jerome Kohlberg dies at 90
• Boss of Mt. Gox bitcoin exchange arrested
• Can algorithms replace mom's home cooking?
• China factory data point to more sluggishness
• Week's top stories, China to crude to Corvette
Cecil the lion's 'brother' Jericho killed
• Zimbabwe suspends some lion hunting
Kraft recalls 36,000 cases of cheese
7 cruises for people who hate cruises
This is what raising Social Security tax would do
Mozilla CEO's beef with Windows 10
• Windows 10 won't save the PC, but this might
Why media punishes Trump and Sanders: Delamaide
10 things married couples won't tell you
• 500,000 people are paying for love on Tinder
This is Bill Gates's idea of a summer reading list
Gates and Buffett need to hit grand slams: Farrell
An easy way to keep an airline from losing your bag
Most won't take paid parental leave
• Zuckerberg takes to Facebook with baby news
The gold crash might have a silver lining, literally
• Forget $100 silver — how about $1,000?
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A process for removing residue from the interior of a semiconductor process chamber using molecular fluorine gas (F2) as the principal precursor reagent. In one embodiment a portion of the molecular fluorine is decomposed in a plasma to produce atomic fluorine, and the resulting mixture of atomic fluorine and molecular fluorine is supplied to the chamber whose interior is to be cleaned. In another embodiment the molecular fluorine gas cleans the semiconductor process chamber without any plasma excitation. Molecular fluorine gas has the advantage of not being a global warming gas, unlike fluorine-containing gas compounds conventionally used for chamber cleaning such as NF3, C2F6 and SF6.
1. A process for removing amorphous silicon residue from at least one surface of one or more chamber components exposed to the interior of a semiconductor or flat panel display process chamber, comprising:
supplying a gas consisting of molecular fluorine to the process chamber; and
elevating the temperature of said at least one surface sufficiently for removal of at least a portion of said amorphous silicon residue from said at least one surface;
wherein said amorphous silicon residue is removed in the absence of any plasma in the chamber.
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3. A process according to
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7. A process for removing amorphous silicon residue from a flat panel display process chamber, comprising:
supplying a gas consisting of molecular fluorine to the flat panel display process chamber; and
elevating the temperature of said chamber sufficiently for removal of at least a portion of said amorphous silicon residue therefrom;
wherein said amorphous silicon residue is removed in the absence of any plasma in the flat panel display process chamber.
8. A process according to
9. A process according to
10. A process according to
11. A process according to
12. A process according to
This patent application is a divisional of application Ser. No. 09/535,692 filed Mar. 27, 2000, now abandoned.
The invention relates to processes for cleaning or removing residue from the interior surfaces of a vacuum chamber used for fabricating electronic devices. More specifically, the invention relates to the use of fluorine gas in such a process.
Processes for fabricating electronic devices containing semiconductors generally include steps in which layers or features of material are deposited or patterned (i.e., etched) within a vacuum chamber, generally called a semiconductor process chamber. The chemical byproducts and unused reagents of such deposition or etch processes are mostly exhausted from the chamber by an exhaust pump, but some residue unavoidably deposits on the chamber wall and on other surfaces within the chamber. Such residue must be cleaned or removed periodically in order to maintain consistent process conditions and to prevent the residue from flaking off and contaminating the electronic device being fabricated.
A conventional method of cleaning residue from the interior surfaces of the chamber is to supply to the chamber interior a gas mixture containing radicals produced by the plasma decomposition of fluorine-containing gas compounds. The plasma may be produced inside the chamber or in a remote plasma source. In particular, such fluorine-containing gas compounds conventionally are used to remove residue containing silicon, silicon oxide, or silicon nitride. Such residue commonly is produced by processes for depositing silicon, silicon oxide, or silicon nitride on a substrate, or by processes for sputter etching or reactive ion etching of such materials on a substrate.
One disadvantage of cleaning processes using such fluorine-containing gas compounds is that such gases are believed to contribute to global warming if they are released to the earth's atmosphere after use. Government regulations are expected to impose increasing restrictions on the use of global warming gases, so there is a need to develop alternative gas chemistries.
The invention is a process for cleaning or removing residue from the interior of a semiconductor process chamber using molecular fluorine gas (F2) as the principal precursor reagent. Molecular fluorine gas has the advantage of not being a global warming gas, unlike other fluorine-containing gas compounds conventionally used for chamber cleaning such as NF3, C2F6 and SF6.
I discovered that fluorine atoms and radicals produced by plasma decomposition of molecular fluorine gas effectively remove silicon, silicon oxide, and silicon nitride residues. In addition, I discovered that molecular fluorine gas effectively removes silicon residues without any plasma.
The chamber cleaning processes of the invention were tested in a conventional, commercially available vacuum chamber for performing CVD processes for depositing films on large substrates or workpieces such as the glass substrates used for fabricating thin film transistor (TFT) flat panel displays.
In the commercial production of such displays, it often is desirable to deposit different films in succession while the substrate remains in the chamber. Therefore, a process for cleaning the interior of the chamber preferably should be capable of removing all the residues created by all of the different deposition processes performed in the chamber.
I discovered that a mixture of atomic fluorine (F) and molecular fluorine gas (F2) produced by plasma decomposition of molecular fluorine gas (F2) would successfully clean any of the three films commonly deposited in a plasma CVD chamber for fabricating TFT displays or other silicon-based semiconductor devices—silicon nitride, silicon oxide, and amorphous silicon films—as well as the residue produced by the processes for chemical vapor deposition (CVD) of any of these three films. This was tested using a conventional microwave remote plasma source chamber (RPSC) to supply a mixture of atomic and molecular fluorine to the conventional CVD chamber that was to be cleaned.
Processes for sputter etching or reactive ion etching of silicon nitride, silicon oxide, and silicon films generally deposit some of the material of the film being etched onto interior surfaces of the etch process chamber. Therefore, the cleaning processes of my invention should be effective for cleaning etch process chambers as well as CVD process chambers.
Experimental Results
Essentially pure molecular fluorine gas was supplied to a plasma chamber distinct from the CVD chamber to be cleaned. Such a chamber commonly is identified as a "remote" plasma chamber. The molecular fluorine within the remote chamber was excited to a plasma state by microwave energy coupled to the remote chamber from a microwave electrical power supply. The exhaust port of the remote microwave plasma chamber was connected to a gas inlet port of the CVD chamber to be cleaned, so that a mixture of atomic fluorine and molecular fluorine produced in the remote plasma chamber was pumped into the CVD chamber. An exhaust pump connected to the CVD chamber established a pressure in the range of 250 to 600 mT in the CVD chamber during cleaning.
First, the amount of microwave power required to decompose the molecular fluorine into atomic fluorine was determined. Fluorine gas was supplied to a conventional microwave remote plasma chamber at flow rates of 1000 sccm and 2000 sccm. Microwave energy at a frequency of 2.4 GHz was coupled to the remote chamber at power levels ranging from 2000 to 4000 watts. The ratio of atomic fluorine to molecular fluorine was measured at the chamber exhaust port. The measured ratio was about 3 to 2 (i.e., 60% atomic fluorine and 40% molecular fluorine) at any power from 2500 W to 4000 W. This data indicates that 2500 W would be sufficient. Nevertheless, 4000 W of microwave power was used in the cleaning process tests described below.
To test the cleaning processes, three different plasma CVD processes were separately performed in the CVD chamber. The three plasma CVD processes were: (1) depositing 1 micron of SiNx using a gas mixture provided by 110 sccm SiH4, 550 sccm NH3 and 3500 sccm N2; (2) depositing 1 micron of SiOx (primarily SiO2) using 330 sccm SiH4 and 8000 sccm N2O; and (3) depositing 0.25 micron of amorphous silicon (a-Si) using 50 sccm SiH4 and 1400 sccm H2. In all cases the specified film thickness was deposited on a 40�50 cm glass substrate. Each of the three CVD processes produced a different residue on the walls of the chamber.
After performing each CVD process, I compared the time required to clean the resulting residue from the chamber walls using a conventional process using plasma decomposition of NF3, and using the process of the present invention using plasma decomposition of molecular fluorine gas (F2).
The residue produced by the SiNx CVD process was cleaned in the same time by either 3000 sccm F2 or 2000 sccm NF3. Therefore, the present invention was just as effective as the conventional NF3 process.
The cleaning rate was a linear function of the flow rate of F2 into the remote plasma chamber. Reducing the F2 flow rate to 2000 sccm and 1000 sccm, respectively, reduced the cleaning rate (i.e., increased the cleaning time) by 36% and 72%, respectively.
Adding nitrogen or hydrogen gas to the molecular fluorine gas supplied to the remote plasma chamber did not affect the cleaning rate. Specifically, with a F2 flow rate of 1000 sccm, adding either 200 sccm H2 or 500 to 1000 sccm N2 did not affect the cleaning rate.
Supplying to the remote plasma chamber a gas mixture having equal molecular molar concentrations of F2 and NF3 resulted in a cleaning time halfway between the cleaning times using the same total flow rate of either F2 or NF3 alone. This result indicates that the two reagents are linearly additive, and that the cleaning process using F2 will work with a cleaning gas mixture including at least a 50% molecular molar concentration of F2. Nevertheless, to maximize the benefits of the invention, the molar concentration of F2 in the reagent gas mixture preferably should be at least 70%, more preferably at least 80%, and most preferably at least 90%. Mixing the molecular fluorine with a nonreactive carrier gas such as helium should not affect the process other than to reduce the etch rate in proportion to the reduction in the flow rate of molecular fluorine.
The residue produced by the SiOx CVD process was cleaned by either 3000 sccm F2 or 2000 sccm NF3 at about the same rate as the residue produced by the SiNx CVD process. Therefore, the present invention was just as effective as the conventional NF3 process. Reducing the flow rate of F2 to 2000 sccm reduced the cleaning rate (i.e., increased the cleaning time) by 28%.
While the F2 process of the present invention required a higher gas flow rate than the conventional NF3 process, F2 gas is not considered a global warming gas. Therefore, the present invention is an improvement over the NF3 process.
The residue produced by the amorphous silicon CVD process was cleaned in 59 seconds by 1000 sccm F2 at 370 mT chamber pressure (within the CVD chamber), and it was cleaned in 32 seconds by 2000 sccm F2 at 570 mT chamber pressure. The comparative cleaning rate using NF3 was not tested.
I also tested whether the cleaning rate could be increased by producing a plasma within the CVD chamber whose walls were to be cleaned. The metal gas distribution plate (or "anode" electrode), through which the gases from the remote microwave plasma chamber are dispensed into the CVD chamber, was connected to an RF power supply (the "anode" power supply). The walls of the chamber and all other metal components of the chamber were electrically grounded. The RF power excited the gases within the CVD chamber to a plasma state.
The effect of adding anode power was tested by first producing residue on the walls of the CVD chamber by depositing 1 micron of SiOx on a substrate within the CVD chamber using the SiOx CVD process described above. Then, the residue was cleaned by either of two processes: (1) the previously described process in which pure molecular fluorine was supplied to the remote microwave plasma chamber with no anode power in the CVD chamber, or (2) an otherwise identical cleaning process with 400 watts of 13.56 MHz RF power applied to the gas distribution plate of the CVD chamber. The anode power increased the cleaning rate (reduced the cleaning time) by 21%.
Conventional Hardware for Implementing the Cleaning Process
The cleaning process of the invention is useful for cleaning any kind of vacuum chamber whose interior surfaces accumulate residue as a result of deposition or patterning processes performed within the chamber. The design and operation of conventional CVD and etch chambers are described in the following commonly-assigned U.S. patents, the entire content of each of which is hereby incorporated by reference in this patent specification: U.S. Pat. No. 4,854,263 issued Aug. 8, 1989 to Chang et al.; U.S. Pat. No. 5,000,113 issued Mar. 19, 1991 to Wang et al.; U.S. Pat. No. 5,366,585 issued Nov. 22, 1994 to Robertson et al.; and U.S. Pat. No. 5,844,205 issued Dec. 1, 1998 to White et al.
The cleaning process of the invention requires some apparatus for dissociating at least a portion of the molecular fluorine (F2) reagent to produce atomic fluorine. In all the tests described above, this dissociation was accomplished by means of a conventional remote microwave plasma source, i.e., a remote plasma chamber coupled to receive energy from a microwave electrical power supply. Remote microwave plasma sources are described in more detail in the following US patents, the entire contents of each of which are hereby incorporated into this patent specification: U.S. Pat. No. 5,780,359 issued Jul. 14, 1998 to Brown et al.; U.S. Pat. No. 5,788,778 issued Aug. 4, 1998 to Shang et al.; and U.S. Pat. No. 5,812,403 issued Sep. 22, 1998 to Fong et al. U.S. Pat. No. 5,780,359 shows a remote microwave plasma source used in combination with RF power applied to the susceptor of a magnetically enhanced reactive ion etching (MERIE) chamber.
Alternatively, any other conventional means can be used to dissociate at least a portion of the molecular fluorine reagent to produce atomic fluorine.
For example, the remote plasma source could be excited by (i.e., coupled to receive energy from) a source of electromagnetic energy other than a microwave power supply. More specifically, an RF electrical power supply can be inductively or capacitively coupled to the remote plasma chamber. An experimental test fixture in which 14 MHz RF power was capacitively coupled to a remote plasma source in order to decompose molecular fluorine to atomic fluorine is described in D. L. Flamm et al., "Reaction of fluorine atoms with SiO2", J. Appl. Phys., vol. 50, no. 10, pages 6211-6213 (October 1979), the entire contents of which is hereby incorporated by reference into this patent specification. However, expected advantages of excitation by microwave frequencies (over 1 GHz) over RF frequencies (less than 1 GHz) is that the higher frequencies typically can sustain a plasma at higher chamber pressures, and higher frequencies may require less power to dissociate a given percentage of the molecular fluorine.
As another example, instead of using a remote plasma source, the molecular fluorine gas can be supplied directly to the process chamber that is to be cleaned, and at least a portion of the gas can be dissociated by producing a plasma within the process chamber ("in situ" plasma) by any conventional plasma excitation means such as microwave power or inductively or capacitively coupled RF power. U.S. Pat. No. 5,620,526 issued Apr. 15, 1997 to Watatani et al. describes a conventional electron cyclotron resonance apparatus for coupling microwave power via a microwave waveguide to a plasma chamber. Commonly-assigned U.S. Pat. No. 5,454,903 issued Oct. 3, 1995 to Redeker et al. discloses an RF power supply inductively coupled to a CVD or etch vacuum chamber to produce an in situ plasma for cleaning the chamber. An RF power supply capacitively coupled to a semiconductor process chamber for producing an in situ plasma for cleaning the chamber is disclosed in U.S. Pat. No. 5,632,821 issued May 27, 1997 to Doi and in commonly-assigned U.S. Pat. Nos. 4,960,488 issued Oct. 2, 1990 to Law et al. and U.S. Pat. No. 5,756,400 issued May 26, 1998 to Ye et al. The entire contents of each of the patents listed in this paragraph is incorporated by reference into this patent specification.
A disadvantage of using an in situ plasma instead of a remote plasma source is that an in situ plasma can increase corrosion of the chamber components by ion bombardment. However, in situ plasma has the advantage of avoiding the expense of a remote plasma chamber.
Cleaning Process without Plasma
I also tested whether molecular fluorine (F2) gas would remove from a surface any of the three films discussed above—silicon nitride (SiNx), silicon oxide (SiOx), and amorphous silicon (a-Si)—without producing any plasma during the cleaning process. Instead of using a plasma to decompose the F2, the temperature of the surface to be cleaned was elevated sufficiently to cause the F2 to react with the film to be removed from the surface.
For these tests, rather than cleaning actual residue from a chamber wall, I tested whether the fluorine gas would remove any of these three films from a heated substrate mounted within the chamber. Specifically, I mounted on a susceptor three 80�80 mm glass substrates respectively coated with these three films. The susceptor was heated to 450� C. in an attempt to cause the F2 to react with the film to be removed from the substrate. The fluorine did not etch the silicon nitride or silicon oxide, but it did remove the amorphous silicon. Using a fluorine gas flow rate of 1000 sccm, the amorphous silicon was etched at a rate of 5000 Å/min. Alternatively, the amorphous silicon can be etched from chamber surfaces with gas mixtures containing at least fifty percent, preferably at least seventy percent, molecular fluorine.
This demonstrates that molecular fluorine gas, without plasma excitation (i.e., without plasma-assisted decomposition of the F2), can clean amorphous silicon. Amorphous silicon would be the principal residue produced on a chamber wall by a thermal or plasma-enhanced process for depositing silicon on a substrate, or by a process for removing silicon from a substrate by sputter etching or reactive ion etching. Therefore, this thermal (non-plasma) cleaning process should be effective for cleaning residue from the interior surfaces of chambers used for any of such silicon deposition or silicon etch processes.
Although the thermal cleaning process was tested only at a susceptor temperature of 450� C., it is predictable that the temperature of the surface from which the silicon is to be cleaned need not be so high. It is a matter of routine experimentation to determine the minimum temperature to which the surface to be cleaned must be elevated in order to cause the F2 gas to react with and remove any silicon material on such surface.
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