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Ed Wiget PhotographyPhotographer Male Fort Mitchell, Kentucky, US My MM URL: http://www.modelmayhem.com/edwigetphotography
Mayhem # 783615
About Me
I'm no longer shooting ..... sorry.
Basically I enjoyed working with those I worked with. It was a fun run but I simply got tired of all of the drama and personal attacks by others in the area due to the style of photography I was shooting. The personal attacks began to affect my real job and I simply decided to call it quits.
MM Models - * indicates number of shoots
Andrea D ***
Amy Staggs **********
Ashlye Cobb *******
B-Sullivan **
Brooklyn Raye
Casey Noel
Char Rose *****
Chrisinda Nelson ***
Carolyn Dunn
Dani Lewis
Elli Fox ***********
Esmeralda Del Monte
Kaci B ***
Fatima ****
Felecia Marie **
Jasmine Pierce **
Jessica Elliott **
Jenalyn **
Kelly McGrady ***
Jacqueline JP ***
Jill Liebisch
Kells Frenchie Marie
Kenta Shalia
Lauren Royelle **
Lea Halliwell **
Lexifer Von Christ
Leya Siri
Lindsay Marie S **
Megan Rice****
Megan Symone
Miss Sierra **
MyLisha Love ***
NKY Ashley
Nova Baby *******
S Elaine C **********
Sammie Uecker ***
Sarah Karam ****
Sara Beth West *****
Shamika Pruitt
Stephanie Cleary **
Tiffany McCleery **
Vora Onique ***
Whitney Heldman **
Non-MM Models
Alexis *
Alyse **
Angie Bothman ***
Ashely French **
Billie Jo *****
Brittany Jefferson **
Brittany Johnson *
Chassidy Wallingford ***
Cortney Hackney *
Heather Lawson **
Jamie Poe ****
Jennifer Jackson **
Jill Holdren *
Katherine Rose **
Kimberly Longhauser *
Megan Manzi **
Melony Carroll *
Nikesha Lee **
Sarah Wilson **
Stephanie Jarvis ******
Taraterrific ****
Probably many others too many to mention
Makeup by Cassie
Miss Sierra
Rachel Marie
Danelle Whigham **
Celia Johnson
Hair Stylist
Bravissimo Segrare
Devon Allen
Wardrobe - I often work with models who are providing wardrobe for various designers, but I don't always know their names. I provide credits when I can though:
KMK Designs
Dawnamatrix Designs
Margaret May Designs
Noctis Designs
Jewelry - I only work with the best...and thats serket
Serket Jewelry
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Iraq Supplemental Spending Legislation
President Bush spoke to the press before meeting with Congressional leaders about the supplemental funding for the war in Iraq.
*The transcript for this program was compiled from uncorrected Closed Captioning.
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- George W. Bush U.S. President [R] United States
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July 7, 2015
OAKLAND, Calif. (AP) - Matthew Stafford threw touchdown passes on his first two drives for Detroit before Matt McGloin threw a 19-yard TD pass to Brice Butler with 6 seconds to go to give the Oakland Raiders a 27-26 victory over the Lions in an exhibition game Friday night.
McGloin came in after backup Derek Carr left with injured ribs earlier in the fourth quarter and led the game-winning 68-yard drive. The victory wasn't complete until Sebastian Janikowski kicked the 33-yard extra point.
That couldn't overshadow a sharp performance from Stafford, who connected on a 28-yard pass to Golden Tate on Detroit's second play from scrimmage and a 4-yard score to Kris Durham on the second drive.
Copyright 2015 Associated Press. All rights reserved. This material may not be published, broadcast, rewritten, or redistributed.
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Pronunciation: andre comte-sponville
Added on: 2011-11-01 Listened: 141 timesin: Add categories to andre comte-sponville
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Available formats: epub mobi pdf rtf lrf pdb txt html
I like to pretend I've never grown up. I teach English to kids in Japan, love playing at summer camps, and write stories intended for adolescent audiences--they really are the only real fountain of youth. Come check out what I'm about and get in touch with me on twitter for electronic food fights! Happy reading!
Review by:
Misti Wolanski
on April 05, 2011 :
I noticed _Inevitable_ for the cover. After reading it, I definitely think this book will appeal to readers who like sweet and emotional romances like those of Stephanie Meyer or Amanda Hocking. The writing style is different, though, so I recommend trying the preview before buying.
_Inevitable_ was an interesting blend of realistic with the ridiculous, but I don't mean that as an insult. A being charged with keeping all the possibilities of the parallel universes "fair" decides to give herself a body so she can improve a guy's last year of life. If the idea sounds ludicrous to you—well, it does to me, too, and I enjoyed the story.
Despite everything the girl knows—and despite her awareness that her ability to "see" possibilities suffers when she dons a body—she's caught off-guard even by certain things linked to plans she made before taking a body, which suggests she can't foresee events she's influenced, but I don't believe it ever said that outright. She's also remarkably emotional, but that does sorta make sense, since she's not used to having to deal with hormones.
Still, certain scenes didn't work for me, mostly towards the beginning. It's possible that's because I'm a fairly logical, rational girl and therefore don't have much frame of reference for understanding an emotion-ridden girl. Even though I do have a hormone disorder that sometimes screws up my moods for no reason beyond my hormones going bonkers.
Honestly, I wasn't planning to read any more in the series, but the last section really made the book for me, because it was perfect in the characters' imperfection. The ending line in particular makes me want to pick up book 2.
(reviewed within a week of purchase)


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Balance Travel Beverage to be available in the US via a new partnership with the Wyndham Hotel Group Bottles contain US alpine spring water and Australian flower essences whose acclaim aids with the physical and emotional fatigue issues of traveling such as jet lag, dehydration and poor rest. PR Newswire NEW YORK, April 16, 2013 NEW YORK, April 16, 2013 /PRNewswire/ --<via GourmetWire.com> Previously you had to fly 24hrs in business or first class to Australia on Qantas to drink Balance Travel. Upon arrival in Australia you might also see Balance Travel at an Intercontinental or Four Seasons Hotel. Now Balance Travel will be available in the US via a new partnership with the Wyndham Hotel Group. Balance Travel is a unique refreshing beverage that contains US alpine spring water and Australian flower essences to help with the physical and emotional fatigue issues of traveling such as jet lag, dehydration and poor rest. (Photo:http://photos.prnewswire.com/prnh/20130416/PH95231-a ) (Photo:http://photos.prnewswire.com/prnh/20130416/PH95231LOGO-b ) Wyndham Hotel Group will be offering Balance Travel to their Gold Status members upon check in at select Wyndham Hotels and Resorts, Wyndham Garden and the Wyndham Grand Collection properties as a way of showing appreciation for their loyalty. "Having an all-natural, and non-flavored beverage that helps with travel fatigue is important to a growing number of premium travel destinations" said Hilary Scott, Sales Director at Balance. "There is an increasing demand from today's travelers for alternatives to sugary beverages. They want beverages that are healthy, real and relevant to them and address their situation at the time. Groups such as the Wyndham Hotel Group are leading the way." Balance is expanding quickly in the travel industry. Balance Travel is now available at properties within the portfolios of Intercontinental Hotels Group, Four Seasons Hotels and Resorts, Wyndham Hotel Group, and Morgan Hotels Group along with many other boutique and premium properties worldwide. About Balance Water Balance Water is a small, fast growing, privately held company headquartered in New York with offices in Sydney, Australia and Cologne, Germany. Balance Water created the category of functional non-flavored by adding handpicked flowers growing wild in some of the most remote parts of Australia to spring water. In the US alpine spring water is sourced locally in Sierra Nevada, CA and the Catskill Mountains, NY. Balance Water is a strong supporter of health, environment and social justice organizations. Balance was voted Best Functional Water at the 2012 International Water awards in Barcelona. www.drinkbalance.com Media Contact: O212-564-0886 C203-981-4384 email@example.com This press release was distributed via GourmetWire.com. SOURCE Balance Travel Website: http://www.drinkbalance.com
Balance Travel Beverage to be available in the US via a new partnership with the Wyndham Hotel Group
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WIXOM, Mich., Sept. 19 /PRNewswire-FirstCall/ -- Rockwell Medical Technologies, Inc. (Nasdaq: RMTI), a leading, innovative manufacturer and developer of concentrates and specialty pharmaceuticals focused on the end- stage-renal-disease market (ESRD), announced today that it has commenced enrollment in its Phase IIb dose-ranging study for Soluble Ferric Pyrophosphate (SFP), a physiological iron-maintenance therapy drug.
The Phase IIb dose-ranging study is a nine-month, controlled multi-center, double-blind study consisting of up to 130 patients at multiple dialysis centers in the United States. Patients will receive SFP during their normal three times/week dialysis regimen. The primary objectives of this study are to evaluate both safety and efficacy of SFP at varying dosage levels and to determine the optimal concentration of SFP that will maintain iron balance within the target hemoglobin range, in patients undergoing hemodialysis. Secondary endpoints include evaluating efficacy for changes in hemoglobin levels over time, reticulocyte hemoglobin content, incidence of systemic infection episodes and to quantify the amount of SFP iron transferred from the dialysate directly to the blood during the dialysis session. Results of this Phase IIb study are expected by the end of 2008.
Robert L. Chioini, Chairman and CEO of Rockwell stated, "We are excited
to initiate this important step in our clinical development plan for SFP, a
key product in Rockwell's renal drug development pipeline. The completion
of this study will enable us to initiate our planned Phase III pivotal
study program for FDA market approval of SFP. Mr. Chioini also stated, "We
have assembled a team of top-tier investigators who will be conducti
|SOURCE Rockwell Medical Technologies, Inc.
Copyright©2007 PR Newswire.
All rights reserved


text:
Transform static artwork into interactive Flash-based content without writing code.
Shows how to use Illustrator CS5 to create graphics for use in web sites, video compositions, and mobile apps.
Demonstrates how to create and publish interactive Flash (SWF) content without writing code.
Every aspect of integrating Illustrator and Flash, such as using mobile applications and working with colors, symbols, and text.
Mordy Golding explains how to create Illustrator files that will work efficiently in Flash using Live Paint, Live Trace, and Live Effects.
"My colleagues and I decided to start our own graphic design business, but had no knowledge of how to build a credible website. Having learned After Effects through lynda.com in prior years, I logged on to learn HTML, CSS, and Dreamweaver. Finally we have a site that looks as good as the company we're trying to be." —John T.
more from our members »


text:
The SnapX 2x Switcher for Mac from Kanex helps you connect two Macs with one Apple Cinema Display. The SnapX is an all-in-one unit that connects with two mini display port cables, two USB connectors and one button to switch between the two machines.
Besides a video signal, the SnapX uses the USB cable to pass through data, audio and the images from your webcam. This has a clip to attach it to your Cinema Display.
- Mac Switching Made Easy
- With the SnapX on your desk, switching from your MacBook Air to your Mac mini is as easy as a snap. Toggle between the two by pressing the button on the top. No external power required.
- Cable Clutter Simplified
- SnapX hides all the wires neatly behind the display providing a clutter-free background on your desk. It also reduces stress on the connectors and prevents intermittent signal loss due to loose cable connections.
- USB Pass Through for iSight Camera, Audio and USB Ports
- Use your iSight camera and get full audio from the display's built-in speakers seamlessly with the use of USB pass through cables.
- Extend Beyond
- Cables are always too long and too short at the same time. Too short when you need that few inches of extra reach and too long for when they are just lying in your way. SnapX provides just the right length of 5ft (1.5m) of dual cables built-in to the unit, which allows continuous extension without unnecessary cables and adapters.
- Clip on Design for Secure Switching
- To meet optimum flexibility and ergonomics, SnapX clips on effortlessly by just sliding underneath your iMac or Apple LED Cinema Display stand. Stylish and smartly designed for any desktop or office application that requires secure switching and extending without compromise.


text:
The Steelers found a gem last season when they signed Jerricho Cotchery. Cotchery was always under rated by the Jets and let him go for the services of Plaxico Burress. Cotchery came to the Steelers as an injured commodity that people were afraid of. He knew his role and played hard for the team. He stepped in when others were injured and really played well.
Cotchery is not reportedly in talks with the Steelers about a new contract according to Scott Brown of the Pittsburgh Tribune Review. Talks have been called "productive" and Cotchery would like to return to the team. The Steelers feel the same way. The question will be how much Cotchery wants to stay. The Steelers are strapped for cap and Cotchery will be the fourth receiver on this squad if Mike Wallace stays. We just released Hines Ward for this reason. Cotchery has to know what that value is to remain with the team. Cotchery is hoping for a 4 year deal to finish his career with the team.
Cotchery has also been given endorsement from Ben Roethlisberger. With the loss of Ward Roethlsiberger is looking for a little bit of veteran presence. That will help keep the young guys grounded and in line. Cotchery also will not just be a veteran presence. He can play as well. He has the talent to stay on the field when the Steelers need him and the offense will not skip a beat.
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text:
7524 reviews
By installing you agree to the Terms of Use and other terms
PublisherPaytm Mobile Solutions Pvt. Ltd
Download size2 MB
Last updated5/5/2015
Works with
- Windows Phone 8.1
- Windows Phone 8
App requires
- contacts
- phone identity
- owner identity
- data services
- phone dialer
- push notification service
- web browser component
- HD720P (720x1280)
- WVGA (480x800)
- WXGA (768x1280)
Supported languages (1)
English (United States)
★★★★The Number 1 Shopping app on Google Play★★★★ ★★★★The Number 1 Utilities app on Apple Store★★★★ Now introducing the Windows App. Join millions of people who already use Paytm - the #1 mobile recharge app in India. It is the most trusted and secure app for your mobile recharges, bill payments and DTH recharges. We also bring you the BEST EVER repertoire of coupons in this country. In fact, we even pay for some of them to bring you the best benefits. It is truly the fastest way to do recharge, in under 10 seconds, via Paytm Cash; our virtual wallet. In addition to the awesome recharge experience, Paytm provides the best in class customer care service with unwavering trust and support to keep customers 100% satisfied and always charged. Download Paytm now and get the best mobile recharge and bill payment experience on your Windows phone. What we offer: * All payment options - credit card, debit card and net banking for all banks like ICICI, SBI, HDFC, Axis bank etc. * Prepaid recharge and Postpaid bill payment on ALL operators- Airtel, Vodafone, Idea, Reliance etc. * Data Card Payment available on ALL operators * DTH Payment on ALL service providers like Tata Sky, Airtel TV, Dish TV etc. * Toll Card Recharge service (Currently only for the Delhi-Gurgaon Expressway) * Latest prepaid and postpaid plan offers for Topups, SMS, Full talktime and Data (GPRS 2G and 3G) packs * Exciting discount coupons with each recharge! The best ever. Money stored securely in your Paytm Cash account is on a PCI DSS security certified commerce platform that uses VeriSign's trusted technology. Our Paytm promise to you is 'Your money is yours unless you get what you asked for.' With Paytm, enjoy a hassle free recharge and bill payment experience in the quickest and most reliable way. For any queries or concerns, please write in to firstname.lastname@example.com. We love to hear from you. Download Now and Experience the Awesomeness! What's New The latest update here is loaded with goodies that make recharging with Paytm a delight Paytm Automatic Recharge a number often? Tell us when and we will do it for you automatically! Add-on Plans Getting a top-up done? Now include a data plan or an SMS pack and do it all in one go! Friend in Need is a Friend Indeed Send & Receive money instantly in Paytm Wallet
7/2/2015Not so good as android.
7/2/2015Where is the shopping part of the app from google??? Really pay tm group has to think about it.
7/2/2015Just awesome
7/1/2015Easy n secure 🔐
7/1/2015Text on black backing gives a very 90s feeling. Make it something like the freecharge app on windows phone..
7/1/2015A great app.
7/1/2015Very slow. Most of the time recharge fails loss of money. Service is bad
7/1/2015Simply loved this app😊


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One person we haven't heard from throughout the trade speculation has been Darrelle Revis himself. However, it appears now that we may have finally gotten the chance to see what he thinks about the potential trade that will send him to the Bucs. From Total Access: According to someone who spoke to #Jets CB Darrelle Revis recently, he's "not optimistic" a deal with #Bucs gets done. — Ian Rapoport (@RapSheet) April 5, 2013 While it may not be a direct quote from Revis himself, this is the most we have seen/heard of/read about from his side. His comment can mean one of three things. First, it is a tactic to lure the Buccaneers into increasing their offer to the Jets. Second, it is a move to force New York's hand into agreeing to the Bucs offer. Or third, it can mean exactly how it reads. Surely their can be another possible reason for it, but the likelihood of it being some sort of a negotiating move fits more at this point. The post Darrelle Revis "not optimistic" a trade will happen appeared first on The Bay Cave.
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|© 2015 Yardbarker, Inc. All rights reserved. Use of this website (including any and all parts and components) constitutes your acceptance of these Terms of Use and Privacy Policy. (What's New?)


text:
Browse by UCL Departments and Centres
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Group by: Author | Type
Jump to: M
Number of items: 1.
|Michie, S.; Marteau, T.M.; (1995) Response to GIG's response to the UK Clinical Genetics Society report "the genetic testing of children". Journal of Medical Genetics , 32 (10) p. 838. 10.1136/jmg.32.10.838.


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1. Preheat the oven to 350 degrees F.
2. In the first bowl, sift together the flour, baking powder, spices, and salt.
3. In the second bowl, cream together the butter and sugar.
4. In the third bowl, soak the raisins in the tablespoon of vanilla.
5. Still staying with the second bowl, blend in the egg.
6. Begin sprinkling into the first bowl into the second bowl.
7. Finally, stir in the oats and raisins.
8. Bake the cookies for 12 – 15 minutes.
9. Serve the cookies with tea or coffee.


text: When the 3DS released, lackluster sales immediately caused the internet to struggle under the weight of thousands of articles proclaiming not only the end of the 3DS and Nintendo, but dedicated handheld consoles as a whole. One price-cut and a bunch of good games later, and the 3DS was outperforming the DS' launch sales. With the Vita now failing to sell well in Japan, doomsday predictions are happening all over again – but are the claims fair? - PSLS


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In recent months, the state of Minnesota was granted a waiver from the No Child Left Behind Act and has since developed its own system, based on multiple factors, for measuring achievement in Minnesota schools. Called the Multiple Measurement Rating (MMR), findings for Minnesota public schools inclu...Read More
By MaryHelen Swanson— Minnesota schools received an announcement last week that will change the way school districts work to reduce the achievement gap. The No Child Left Behind (NCLB) law is no longer in effect in this state, as Minnesota has received a waiver from the federal government. Last Th...Read More


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100% Cotton, 44'' Wide.Designed by Pillow & Maxfield for Michael Miller Fabrics, this cotton print fabric collection is perfect for quilt or craft projects, apparel and home décor accents. this collection features a country feel with gingham and bandana style prints with bold colors.
Description: Designed by Pillow and Maxfield for Michael Miller Fabrics, this floral cotton print fabric is perfect for quilts, home décor accents, craft projects and apparel. Colors include red, white, lime and fuchsia.
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Give the gift of creativity.
A Fabric.com gift certificate is the perfect gift! Gifts from $10 and up.
#MadeWithFabric #SewInLove


text:
14232 search results for No One
No one confuses Oprah
Type: Post | Date: Sunday, Feb 22, 2015
Stars - "No One Is Lost"
Type: Event | Date: Tuesday, Oct 14, 2014The latest from the Canadian Indie rock band
11 Great TV Shows from the '90s That No One Talks About Anymore
Type: Gallery | Date: Thursday, Jun 18, 2015Watching "Law & Order" and "The Newsroom," you might ...
Will 'Star Trek Beyond' take the Enterprise 'where no one has gone before'?
Type: Post | Date: Thursday, May 21, 2015That's the promise, and Simon Pegg explains just how tricky that will be
John Stamos visited the 'Full House' exterior and no one even recognized him :(
Type: Post | Date: Sunday, Mar 8, 2015
Various Artists- "While No One Was Looking: Toasting 20 Years of Bloodshot Records"
Type: Event | Date: Tuesday, Nov 18, 2014A 2 CD collection of 38 songs
'Game of Thrones' hid a Monty Python Easter egg in plain sight and no one caught it
Type: Post | Date: Tuesday, Apr 7, 2015Well played, HBO writers. Well played, indeed.
10 TV Gems of the 1990s That No One Talks About Anymore
Type: Article | Date: Thursday, Jan 29, 201510 TV Gems of the 1990s That No One Talks About Anymore
No One Lives
Type: Event | Date: Friday, May 10, 2013Anchor Bay is releasing this horror film from Ryuhei Kitamura.
Recap: 'Sleepy Hollow' - No one ever talks about their 'Mama' issues
Type: Post | Date: Monday, Nov 17, 2014Tarrytown is in desperate need of a building inspection.


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You can now invite anyone to meet at your favorite Starbucks.
Limited-time feature
31 year old man | Jersey City, NJ, USA | Seeking women 24-34 within 100 miles of Lincoln Park, NJ
Southern Gent that is truly a good man! I like to be silly as well as make sure you're happy!
I moved to New Jersey 5yrs ago after spending two years in Los Angeles. I lived in both places because of my current job. My job keeps me on the move and very busy which is why I'm trying Match to try and meet a good woman. I can be shy when I first meet you but once I get to know you I am the exact opposite. I like to think of myself as a renaissance man because I'm well rounded and can talk about pretty much anything. I've dealt with the mind games, manipulation and stupid drama. I'm looking for a woman that is motivated, likes to laugh, likes to go out on the town but can also be a homebody. I'd like to meet a woman that can hold a conversation, watch the game with me and laugh with me at my office events. She has to be honest, caring, and family oriented. I'm from the south and grew up in a Jamaican home. I am a laid back individual that likes to spend time with family and friends. I'm an Atliean to the heart but have spent enough time in the Northeast and out west to appreciate what each area has to offer. I enjoy sitting back listening to music and watching a good movie. I like to go out in the City and try different restaurants and take in the sites but I also enjoy relaxing at home and spending quality time with my significant other. I am everything football, and all my favorite sports teams are from Atlanta. If you are truly looking for a good man that won't cheat, and will always be there for you then there is no need to look at any other profiles.
Coffee and conversation , Cooking , Dining out , Movies/Videos , Museums and art , Music and concerts , Exploring new areas , Nightclubs/Dancing , Performing arts , Playing cards , Playing sports , Travel/Sightseeing , Video games , Watching sports , Wine tasting
Baseball, Basketball, Football
I exercise 1-2 times per week.
I like Dogs
Middle of the Road
Martin is my favorite Comedy Show of all time. T.I. is the best rapper alive and Jamaican food is number one on the menu. I have recently become a fan of Big Bang Theory and Game of Thrones should come on all year!
Movies, Music, Comedy Shows
Z{{Cta}} {{#if HasMoreInfo}} ?{{CtaSecondary}} {{/if}}
|What he is looking for
|5'9" (175cms)
|5'0" (152cms) to 6'0" (182cms)
|Body type:
|A few extra pounds
|Slender, Curvy, Athletic and toned, A few extra pounds
|Black, Blue, Brown, Grey, Green, Hazel
|Auburn / Red, Black, Light brown, Dark brown, Blonde, Salt and pepper, Dark blonde
|No Way
|No Way
|Social Drinker
|Sales / Marketing
|No preference
|$50,001 to $75,000
|No preference
|Never Married
|No preference
|Have kids:
|No preference
|Wants kids:
|No preference
|Black / African descent
|No preference
|Christian / Other
|Christian / Other
|Bachelors degree
|No preference


text:
Aberdeen adds innovative charge to popular funds
Existing investors in Aberdeen Asset Management's strongly-performing global emerging market strategies are set to benefit from the funds' popularity with the introduction of a novel fee imposed on new investors.
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text:
Environmental Science Companies in Albania
Category: Environmental Management ×
Subcategory: Environmental Science ×
Location: Europe ×
Location: Albania ×
MALÅ Geoscience
based in Malå, SWEDEN
MALÅ is the global leader in the design and manufacture of Ground Penetrating Radar (GPR) systems. We provide high quality, reliable and easy to use equipment to solve your subsurface investigation needs. With over 70-years of experience, we understand the needs of our customers and have developed a versatile range of products that offer solutions across a broad range of ...
Ocean Instruments, Inc.
based in San Diego, CALIFORNIA (USA)
Ocean Instruments, designs and manufactures marine biological and geological sampling equipment for hundreds of oceanographic applications between the surface and the seabed. For more than 50 years, our products have been used throughout the world by oceanographic research centers, major universities, industry and government water pollution control agencies. As one of the ...
DFGE – Institute for Energy, Ecology and Economy
based in Greifenberg, GERMANY
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text:
Blountsville, Alabama
|Blountsville, Alabama
Location in Blount County and the state of Alabama
|Coordinates: 34°4′54″N 86°35′19″W / 34.08167°N 86.58861°W
|United States
|• Total
|5.5 sq mi (14.2 km2)
|• Land
|5.4 sq mi (14.0 km2)
|• Water
|0.08 sq mi (0.2 km2)
|712 ft (217 m)
|Population (2010)
|• Total
|• Density
|311/sq mi (120.0/km2)
|Time zone
|Central (CST) (UTC-6)
|• Summer (DST)
|ZIP code
|Area code(s)
|FIPS code
|GNIS feature ID
Blountsville is a town in Blount County, Alabama, United States. As of the 2010 census it had a population of 1,684.[1]
Blount County was created by the Alabama territorial legislature on February 6, 1818, from land ceded to the federal government by the Creek Nation on August 9, 1814. It was named for Gov. Willie G. Blount of Tennessee, who provided assistance to settlers in Alabama during the Creek War of 1813-14. It lies in the northeastern section of the state, generally known as the mineral region.
What became Blountsville appears on an 1819 map as the mixed Creek/Cherokee Indian village of "Wassausey" (meaning Bear Meat Cabin, the name of an Indian translator who lived there). The town was established by Caleb Fryley and Johnny Jones in 1816 as Bear Meat Cabin. The post office was opened as Blountsville on October 20, 1825, and incorporated on December 13, 1827. It was the county seat until 1889 when the government was moved to Oneonta.
There were many schools in the town in the early years: The Academy, Blount College and the District Agricultural School, plus the public schools. The Blount County Courthouse and jail was built in 1833 and remained there until it was moved to Oneonta. A major crossroads in early Alabama, Blountsville became a Confederate depot for the cavalry. Confederate forces led by General Nathan Bedford Forrest and Union forces led by General Abel Streight skirmished briefly in the town on May 1, 1863, and Major General Lovell H. Rousseau and his Union cavalry occupied the town in July 1864. Blount College was in the building that was originally the courthouse. It was established in 1890. The beautiful Blountsville United Methodist Church was established in 1818 and is still in use today.
The oldest building in Blountsville was once known as the Barclift House. Built in 1834 as Hendricks Tavern, it is now owned and is being restored by the Ortiz family.
The Copeland-Bussey House, built c. 1835, is one of the oldest structures in northeast Alabama. The building has been stabilized by the Alabama Historic Preservation Alliance and the Blountsville Historical Society.
The Freeman House, built circa 1825, was damaged by a storm, and the two-story brick dwelling was rebuilt, using the same bricks, into a one story. The porches face the historic Meat Cabin Road, and the other porch faces U.S. Highway 231. An annual reenactment is held on the grounds. The structure has been renovated by the Blountsville Historical Society and now serves as a museum and visitors' center on a part-time basis. During the reenactment it is furnished with period furnishings and is open to the public for tours.
The Thomas Nation House, circa 1835, is now a ruin due to a storm that took all but one and one half walls down in 1998 before the house could be stabilized. The ruins can still be seen from U.S. Highway 231.
Blountsville is also home to the Spring Valley Beach Water Park, one of the few water parks in the lower Sand Mountain area. Spring Valley Beach contains one of the largest swimming pools in the South and seven water slides. It is also home to the 360 Rush water slide, the only one of its kind in the world.
Geography and transportation[edit]
Blountsville is located in northern Blount County, in the Blountsville Valley at the intersection of County Highway 26 and U.S. Highway 231. Route 231 leads south 6 miles (10 km) to Cleveland and 14 miles (23 km) to Oneonta, the county seat, and north 50 miles (80 km) to Huntsville. Alabama Highway 79 runs through the southern corner of Blountsville, leading northeast to Guntersville and southwest to Birmingham.
According to the U.S. Census Bureau, Blountsville has a total area of 5.5 square miles (14.2 km2), of which 5.4 square miles (14.0 km2) is land and 0.077 square miles (0.2 km2), or 1.27%, is water.[1]
J.B. Pennington High School (PHS) and Blountsville Elementary School (BES), the town's only two schools, are located in the center of Blountsville. They are both in the Blount County School District.
|Historical population
|Est. 2013
|U.S. Decennial Census[2]
2013 Estimate[3]
As of the census[4] of 2000, there were 1,768 people, 743 households, and 479 families residing in the town. The population density was 326.4 people per square mile (125.9/km2). There were 853 housing units at an average density of 157.5 per square mile (60.8/km2). The racial makeup of the town was 89.5% White, 0.8% Native American, 0.3% Asian, 0.1% Pacific Islander, 8.20% from other races, and 1.1% from two or more races. 16.2% of the population were Hispanic or Latino of any race.
There were 743 households out of which 29.7% had children under the age of 18 living with them, 47.8% were married couples living together, 12.0% had a female householder with no husband present, and 35.5% were non-families. 31.2% of all households were made up of individuals and 16.7% had someone living alone who was 65 years of age or older. The average household size was 2.38 and the average family size was 2.97.
In the town the population was spread out with 24.8% under the age of 18, 9.8% from 18 to 24, 27.0% from 25 to 44, 21.9% from 45 to 64, and 16.5% who were 65 years of age or older. The median age was 37 years. For every 100 females there were 95.4 males. For every 100 females age 18 and over, there were 88.2 males.
The median income for a household in the town was $24,432, and the median income for a family was $34,050. Males had a median income of $27,847 versus $18,869 for females. The per capita income for the town was $13,426. About 19.3% of families and 25.5% of the population were below the poverty line, including 30.4% of those under age 18 and 28.8% of those age 65 or over.
Historical studies[edit]
- Davis, Robert S. A Blountsville Picture Book. Blountsville: Blountsville Historical Society, 1999.
- "Blountsville, Alabama: a Case Study in the Use of the R. G. Dun & Company Credit Reports, 1847-1880." Alabama Review 56 (2003): 125-35.
- Owen, Thomas McAdory. History of Alabama and Dictionary of Alabama Biography. Chicago: S.J. Clarke Publishing Co., 1921.
Toulmin's Digest, 1823.
- ^ a b "Geographic Identifiers: 2010 Demographic Profile Data (G001): Blountsville town, Alabama". U.S. Census Bureau, American Factfinder. Retrieved September 17, 2013.
- ^ "U.S. Decennial Census". Census.gov. Retrieved June 6, 2013.
- ^ "Annual Estimates of the Resident Population: April 1, 2010 to July 1, 2013". Retrieved June 3, 2014.
- ^ "American FactFinder". United States Census Bureau. Retrieved 2008-01-31.
Coordinates: 34°04′55″N 86°35′20″W / 34.081911°N 86.588778°W


text:
About Schneider Optics
Schneider Optics is a leading manufacturer and distributor of photographic equipment. It provides the world's highest quality photographic optics, including Schneider professional cinema projection lenses, home cinema projection lenses, world-renowned Schneider filters for motion picture and television production, B+W filters, and a wide range of lenses and accessories for digital and film photography and video.
About The Schneider Group
The Schneider Group, founded in 1913 in Bad Kreuznach, Germany, is a worldwide market leader in high quality lenses for industrial applications, photographic lenses, filters, cinema projection lenses and optical accessories. In total, Schneider has manufactured more than 15 million lenses and has created thousands of optical designs. The Schneider Group has 600 employees worldwide. It's Industrial Optics Business Unit designs, develops, manufactures and markets optical and opto mechanical components and subassemblies for m
|Source: PRWeb
Copyright©2009 Vocus, Inc.
All rights reserved


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text:
Accurately altering a precisely located site on a substrate by: (a) providing a vacuum chamber; (b) providing an energy beam; (c) providing a source of a hydrocarbon and a conduit extending between the source and the chamber, the hydrocarbon being capable of being adsorbed in the substrate and of interacting with the energy beam to alter the substrate; (d) positioning the substrate in the chamber to be exposed to hydrocarbon delivered by the conduit; (e) introducing into the conduit a carrier having a vapor pressure above the vapor pressure of the hydrocarbon, the carrier being in vapor form under conditions existing in the conduit and having a bulk velocity that transports the hydrocarbon by molecular collisions into the chamber, the hydrocarbon being adsorbed on the surface of the substrate, free carrier molecules being drawn off sufficiently rapidly to maintain low pressure in the chamber; and (e) while maintaining the low chamber pressure, directing the energy beam to the site in the presence of the absorbed hydrocarbon, in a manner to convert the hydrocarbon to a coherent carbonaceous deposit of predetermined desired form, adherent to the substrate at the site to render the site opaque. Most preferably, a focused ion beam is used to repair an opaque defect in a photolithographic mask.
1. A method of accurately altering a precisely located site on a substrate, said method comprising
(a) providing a vacuum chamber,
(b) providing an energy beam,
(c) providing a source of a hydrocarbon and a conduit extending between said source and said chamber, said hydrocarbon being capable of being adsorbed on said substrate and of interacting with said energy beam to alter said substrate,
(d) positioning said substrate in said chamber to be exposed to hydrocarbon delivered by said conduit,
(e) introducing into said conduit a carrier having a vapor pressure above the vapor pressure of said hydrocarbon, said carrier being in vapor form under conditions existing in said conduit and having a bulk velocity that transports said hydrocarbon by molecular collisions into said chamber, said hydrocarbon being adsorbed on the surface of said substrate, free carrier molecules being drawn off sufficiently rapidly to maintain low pressure in said chamber, and,
(e) while maintaining said low chamber pressure, directing said energy beam to said site in the presence of said absorbed hydrocarbon, in a manner to convert said hydrocarbon to a coherent carbonaceous deposit of predetermined desired form, adherent to said substrate at said site in order to render said site opaque.
2. The method of claim 1 wherein said energy beam is a charged particle beam or a laser beam.
3. The method of claim 1 wherein said energy beam is focused to control the location of said conversion.
4. The method of claim 1 comprising forming an image of said site prior to depositing said layer, and directing said energy beam on the basis of said image.
5. The method of claim 3 wherein said energy beam is a charged particle beam and said chamber pressure is sufficiently low to allow said focused beam to reach said site.
6. The method of claim 5 wherein said beam is a focused ion beam.
7. The method of claim 5 or 6 wherein said beam is repeatedly directed at a given site location, with sufficient delay between said repetitions to permit said adsorbed hydrocarbon to be replenished from said conduit, said repetitions thereby increasing the thickness of said deposit.
8. The method of claim 1 characterized in that the ratio of the molar concentration of said hydrocarbon to the concentration of said carrier in said conduit is on the order of 0.8 or less.
9. The method of claim 1 characterized in that the pressure in said conduit is approximately 30-500 millitorr.
10. The method of claim 1 characterized in that said carrier compound and said hydrocarbon compound are provided in a single reservoir and are non-reactive with one another under said transporting conditions and under conditions in said reservoir.
11. The method of claim 1 wherein said carrier compound and said hydrocarbon are provided in separate reservoirs.
12. The method of claim 1 characterized in that said carrier has an equilibrium vapor pressure at room temperature on the order of 1-300 torr.
13. The method of claim 1 characterized in that said carrier is an organic compound comprising between one and ten carbon atoms.
14. The method of claim 1 characterized in that said carrier is a straight-chained, branched, or cyclic alkane, alkene, alcohol, aldehyde, ketone, or ether.
15. The method of claim 14 characterized in that said carrier is an alkane having between 5 and 9 carbon atoms.
16. The method of claim 14 wherein said carrier is pentane, hexane, heptane, octane, acetone, or benzene.
17. The method of claim 1 wherein said hydrocarbon has at least 10 carbon atoms.
18. The method of claim 17 wherein said hydrocarbon is an alkane or a mixture of alkanes.
19. The method of claim 1 wherein said hydrocarbon has an equilibrium vapor pressure at room temperature of below 1 torr.
20. The method of claim 1 wherein said hydrocarbon is selected from tetramethylpentadecane, squalene, pyrene, dodecane, vinylanthracene, and diesel fuel.
21. The method of claim 6 wherein said ion beam is provided by a liquid metal ion source.
22. The method of claim 1 characterized in that said chamber pressure is on the order of 10-4 to 10-6 torr.
23. The method of claim 1 or 5 characterized in that said site requiring alteration is a transparent defect in a pattern of a photolithographic mask.
24. The method of claim 6 characterized in that said ion beam energy is between about 10 and 70 keV.
25. The method of claim 3 characterized in that said focused beam resolution is on the order of 1 micron or less.
26. The method of claim 1 wherein said hydrocarbon is provided to said chamber through a directed gas inlet positioned to provide a localized supply of said compound at said site.
27. The method of claim 26 wherein said inlet is a small diameter tubing angled with respect to beam axis which ends a distance above the substrate a distance on the order of the tubing diameter.
28. The method of claim 5 or 6 characterized in that an said image of said site is formed by scanning said focused beam over said site and sensing charged particles emitted from said site.
29. A method of altering a precisely localized site on a substrate comprising a silicon oxide, said method comprising
placing said substrate in a vacuum chamber and forming an image of said site,
by means of a liquid metal ion source and associated focusing optics, providing a focused ion beam having a spot size smaller than said defect,
on the basis of said image, scanning the focused ion beam in the presence of hydrogen gas in a manner to reduce said silicon oxide and form an opaque silicon deposit adherent to said substrate at said site to render said site opaque.
30. A method of accurately altering precisely localized sites on a substrate, a first one of said sites being a site at which opaque material is to be deposited, and a second of said sites being a site at which opaque material is to be removed, said method comprising,
placing said substrate in a vacuum chamber,
forming an image of said first site,
by means of an ion source and associated focusing optics, providing a focused ion beam of predetermined energy sufficient to remove said opaque material at said first site,
introducing hydrocarbon gas in said chamber, localized in the region of said first site, and, simultaneously therewith, maintaining the pressure in said chamber low enough to allow said focused ion beam to pass substantially without gas-created dispersal and, on the basis of said image, scanning said focused ion beam over said first site in a manner to convert hydrocarbon that is provided at said site to a coherent, adherent, opaque carbonaceous deposit on the substrate of predetermined desired form, the rate of said conversion exceeding the rate of any sputtering of material from said substrate, and, at a different time,
scanning said ion beam over the second site in the absence of said hydrocarbon gas in a manner to remove opaque material.
31. The method of claim 30 wherein, during the deposition, the ion beam current density is at least 3�10-5 amps, and the ion beam spot size is less than 1.0 micron.
32. The method of claim 30 wherein, during the deposition, the ion beam is scanned over the first site at a rate allowing the hydrocarbon to be absorbed at the given beam location and thereby be replenished at that location before the ion beam returns.
33. The method of claim 32 wherein, during said deposition, said scanned beam dwells at a point for a period between 0.1 and 200 microseconds.
34. The method of claim 32 wherein, during said deposition, said scanned beam returns to a point in a period between 0.1 and 20 milliseconds.
35. A method of accurately altering a precisely located site on a substrate, said method comprising
(a) providing a vacuum chamber,
(b) providing an energy beam,
(c) providing a source of a depositable gas and a conduit extending between said source and said chamber, said depositable gas being capable of being adsorbed on said substrate and of interacting with said energy beam to alter said substrate,
(d) positioning said substrate in said chamber to be exposed to the depositable gas delivered by said conduit,
(e) introducing into said conduit a carrier having a vapor pressure above the vapor pressure of said depositable gas, said carrier being in vapor form under conditions existing in said conduit and having a bulk velocity that transports said depositable gas by molecular collisions into said chamber, said depositable gas being absorbed on the surface of said substrate, free carrier molecules being drawn off sufficiently rapidly to maintain low pressure in said chamber, and,
(e) while maintaining said low chamber pressure, directing said energy beam to said site in the presence of said absorbed depositable gas, in a manner to convert said depositable gas to a coherent deposit of predetermined desired form, adherent to said substrate at said site in order to render said site opaque.
This application is a continuation-in-part of the earlier application of Edwin M. Kellogg, Ser. No. 655,251, filed Oct. 26, 1984, now abandoned which is hereby incorporated by reference and the subject matter of which, as it relates to this application, was commonly owned with the subject matter of this application at the time of the respective inventions.
This invention relates to introducing substances into a vacuum, for example, for alteration of a precisely localized site on a substrate such as a transparent defect site in a photolithographic mask.
Photolithographic masks are used to pass light (usually ultraviolet light) to a workpiece in a specified pattern. Such masks often consist of a clear substrate such as glass or quartz onto which a pattern of an opaque material such as chrome has been deposited. For various reasons, a mask may develop or be manufactured with small defects or imperfections, for example pinholes in the chrome layer, that allow exposure of the workpiece in undesired locations. Also, it may be desirable to alter the pattern on the mask, by rendering a previously transparent site opaque. Mask alteration should be rapid, automated, effective and durable without complex processing steps that can introduce contaminants or cause further defects.
One way to repair mask imperfections involves a lift-off procedure using a positive photoresist. The resist is applied to the affected area, exposed, and developed, after which any resist that was applied to a transparent imperfection is removed. An opaque layer, e.g., of aluminum, is deposited over the area, and any of the deposited layer that overlies photoresist is lifted off using a solvent that dissolves the resist.
Laser beams are also used to repair photolithographic mask defects, particularly opaque defects, by removing the undesired opaque material.
Three publications [Gamo et al. (1984) Intern. Conf. on Solid State Devices and Materials (Kobe 9/1/84); Gamo et al. (1984) Japanese J. Appl. Physics 23(5): L293-L295; and Takahura et al. "Maskless Deposition Using Focused Ion Beam" 15th Symposium On Ion Implantation and Sub-micron Fabrication, February 1984] disclose the use of a focused or broad argon or gold ion beam in an atmosphere of trimethyl aluminum. The resulting deposited film contains oxygen, carbon, and aluminum in varying ratios. The technique is reported to be promising for mask repair or mask fabrication for optical, ion, or X-ray lithography. It is further reported that inclusion of C and O in the film may be decreased by using other metallo-compounds (tungsten hexafluoride is suggested) and reducing the background pressure. Finally, the rate of film deposition reportedly is increased if the molecules resulting from the bombardment are not volatile.
Osias et al. (1984) Kodak Microelectronics Seminar, San Diego, October 29-30, Abstract, discloses mask repair using an ion flood beam to convert a previously applied layer of photoresist into a vitreous carbon film. "The resultant material is an excellent hard mask fabrication or repair material having scratch resistance and UV optical density comparable to that of chrome and having chemical resistance and substrate adhesion superior to that of chrome." The disclosed method involves wet processing of a negative photoresist to create a layer of resist at the site of transparent imperfections.
Kellogg, Ph.D. thesis, University of Pennsylvania, November 1965, discloses a method of making a self-supporting carbon target for helium bombardment by heating a nickel foil substrate in an atmosphere of methyl iodide to deposit a carbon film on the nickel. Hydrogen is released as a gas, and iodine is deposited as an amorphous layer on the walls of the chamber. The nickel is dissolved later to leave a carbon target.
Moller et al. (1981) Nuclear Instruments and Methods Vol. 182/183, pp. 297-203 discloses ion-induced carbon buildup on a nickel surface in various hydrocarbon atmospheres at pressures in the 10-6 millibar (7.5�10-7 torr) range; for example, unwanted buildup from vacuum pump oil occurs when performing ion implantation, ion beam analysis, or experimental nuclear physics. Methane, benzene, roughing pump oil, and squalene were bombarded with ion beams of hydrogen, helium, and lithium ions at between 100 and 400 keV. The gases were provided as controlled atmospheres (10-7 to 10-5 mbar) by means of a needle valve or by means of a small liquid container installed in a vacuum chamber; the container temperature could be varied between -30� C. and 40� C., depending on the gas. The residual gas consists mainly of water, nitrogen, carbon dioxide, and argon. The amount of deposited material increases with increasing molecular weight of the gas and with dose rate (between 1.5�1013 and 1�10.sup. 15 cm-2 seconds-1). The authors conclude that deposition is controlled by ion-induced polymerization in an adsorbed layer.
Venkatesan et al., (1983) J. Applied Phys. Letters 54: 3150-3153 disclose irradiating polymer films (e.g., positive photoresists) with high electron or ion beam doses causing the resist layer to become conductive and to behave as a negative resist as a result of carbonization--i.e., creation of a highly cross-linked carbon structure. The Raman spectra of such films resemble, but are consistently different from, the spectra of amorphous carbon films.
Calcagno et al., (1984) J. Applied Phys. Letters 44: 761-763 disclose ion bombardment of frozen benzene to produce a stable polymeric film. The resulting film has a carbon-to-hydrogen ratio of between 1:2 and 1:3 as compared to 1:1 for benzene.
Lincoln et al. (1983) J. Vac. Sci. Techn. B1(No. 4): 1043-1046; and Geis et al. (1981) J. Vac. Sci. Techn. 19(4): 1390-1393 disclose etching a substrate with a reactive gas such as chlorine, using an Ar+ flood beam to assist the etching. Etching takes place in a vacuum chamber and Cl2 gas is introduced through a gas inlet shown in FIG. 1 of each article, positioned approximately 3.5 cm from the substrate.
Aisenberg U.S. Pat. No. 3,961,103 discloses thin film deposition apparatus having an ion source (10 in FIG. 1) to generate ionized plasma (Ar, H, He, N, or O). A constrictor electrode 26 and an extraction electrode 24 have small apertures to permit differential pumping to maintain a good vacuum in deposition chamber 20, while a somewhat higher pressure is maintained in plasma ion source 10 (4: 4-9). The use of a hydrocarbon gas in chamber 10 permits the deposition of carbon films since ions exiting from the ion source will consist of carbon ions and hydrogen ions (5: 61-65).
Holland U.S. Pat. No. 4,382,100 discloses applying a layer of carbonaceous material to a surface by exposing the surface to a plasma generated in a hydrocarbon gas. Conditions may be controlled to select a polymeric layer, an amorphous layer, or a graphite layer.
Wolfe, U.S. Pat. No. 4,085,330 discloses a liquid metal ion source and a gaseous ion source for removal of areas of a mask. The liquid metal ion source is said to be advantageous because there is no need for a pressure differential between the source and the deposition chamber (4: 21-36).
Japan 53-135276 discloses repairing a photomask by irradiating vacuum pump oil with an electron beam.
Japan 58-6133 discloses repairing a mask pattern by electron beam irradiation of a carbon-containing gas to bake carbon molecules to the mask surface.
Japan 57-32630 discloses repairing a photo-mask by applying powdered carbon dissolved in albumin and sintering with a laser beam.
Japan 57-102019 discloses ion-beam irradiation to remove undesired material from an X-ray adsorbing mask pattern and ion injection to correct pin holes in the pattern.
Miyauchi U.S. Pat. No. 4,463,073 discloses an optical system for viewing repair of a mask defect.
In a first aspect, the invention features accurately altering a precisely located site on a substrate by: (a) providing a vacuum chamber; (b) providing an energy beam; (c) providing a source of a hydrocarbon and a conduit extending between the source and the chamber, the hydrocarbon being capable of being adsorbed on the substrate and of interacting with the energy beam to alter the substrate; (d) positioning the substrate in the chamber to be exposed to hydrocarbon delivered by the conduit; (e) introducing into the conduit a carrier having a vapor pressure above the vapor pressure of the hydrocarbon, the carrier being in vapor form under conditions existing in the conduit and having a bulk velocity that transports the hydrocarbon by molecular collisions into the chamber, the hydrocarbon being adsorbed on the surface of the substrate, free carrier molecules being drawn off sufficiently rapidly to maintain low pressure in the chamber; and (e) while maintaining the low chamber pressure, directing the energy beam to the site in the presence of the adsorbed hydrocarbon, in a manner to convert the hydrocarbon to a coherent carbonaceous deposit of predetermined desired form, adherent to the substrate at the site in order to render the site opaque.
The energy beam may be a charged particle beam (e.g., an electron beam or other charged particle beam) or a laser beam; most preferably, it is an ion beam. Also preferably, the beam is focused to control the location of the conversion. As used in this application, "focused beams" are beams that have been focused to a shaped, relatively broad (e.g., for ion beams, 5μ to 10μ) beam with high resolution at the beam edge, as well as Gaussian beams focused to a small spot. For either type of focused beam, the beam has a high resolution; e.g., for ion beams, the shaped beam edge resolution is about 1μ or less, and, for the Gaussian beam, the spot size has a diameter of about 1μ or less. The term "low chamber pressure" means that the pressure is sufficiently low to substantially avoid any gas-created contaminants, and, in the case of a charged particle beam, the pressure is sufficiently low to avoid gas-created dispersal; e.g., the beam remains focused as it passes through the vacuum chamber. For ion beams, a pressure on the order of 10-4 to 10-6 torr in the chamber is satisfactory for this purpose.
The invention provides a coherent, adherent, and durable opaque hydrocarbon coating layer, specifically and accurately positioned at the site that is to be altered, e.g., the transparent mask defect, without the need for wet processing steps that can create particulates and damage mask surfaces. The focused ion beam in particular provides accuracy, a high energy-loss rate, and resolution to control the deposition of the layer. The layer provides good adherence to both the mask substrate and the mask opaque layer surrounding the site. The layer is sufficiently hard or resistant to withstand abrasion encountered in the course of ordinary photolithographic processing. Potentially troublesome materials that could contaminate extremely pure semiconductor workpieces are avoided because non-carbonaceous products preferably are removed as a gas. Dangerous or poisonous materials can also be avoided; or, if they are used, such materials can be better controlled.
It is also important to provide a relatively thick solid hydrocarbon layer, notwithstanding the need for extremely low pressure along the beam line in the chamber. Such a thick solid coating requires delivery of a substantial amount of hydrocarbon that, in vapor form, could exert substantial pressure and/or occupy substantial volume. The dilemma is how to provide such a substantial amount of material at the site while maintaining low enough pressures along the beam line. A relatively heavy hydrocarbon is selected to enhance its ability to adsorb, first in a monolayer by chemadsorption to the substrate, and then by physical adsorption to build layers on that monolayer. The relatively higher van der Waals forces exerted by low vapor pressure substances are beneficial in this regard, so as to provide relatively rapid adsorption and enable shorter repeat cycle times as described below. This same characteristic makes it difficult to deliver the compound in vapor form. The use of the carrier vapor is particularly advantageous in this regard to avoid time-dependent instabilities that could arise from undesired hydrocarbon condensation.
The ability to provide localized thick-layer adsorption while maintaining relatively low chamber pressure is also important, because it reduces the time required to evacuate the chamber after performing the deposition, e.g., to introduce a new substrate or to correct opaque defects by sputtering away unwanted material by beam bombardment in a vacuum. In this way, the invention increases throughput.
The ion beam is simultaneously converting adsorbed hydrocarbon to a solid carbonaceous deposit, and sputtering away the deposit. If the beam dwells long enough at a single site to deplete the adsorbed hydrocarbon, then the sputtering will begin to reduce the layer thickness. To avoid this problem, the beam is preferably cycled (e.g. by moving it from site to site or scanning it in a raster scan) to a new location while adsorbed hydrocarbon is replenished at the original site; when the beam returns to the original site, it converts the adsorbed hydrocarbon to an additional solid layer, thus increasing layer thickness. The invention is also advantageous because hydrocarbon is supplied to be adsorbed at the substrate quickly so that the beam can recycle quickly. Thus the beam is directed to the site repeatedly, with sufficient delay between repetitions to permit the hydrocarbon to be readsorbed after it is depleted, so that the repetitions increase the thickness of the cabon layer that is deposited.
Also in preferred embodiments: the ratio of the molar concentration of the ion-interactive hydrocarbon to the concentration of the carrier in the conduit is on the order of 0.8 or less; the vapor pressure in the conduit is approximately 30-500 millitorr; the hydrocarbon and the carrier are provided in a single pressurized reservoir and are non-reactive with one another under the transporting conditions and under conditions in the reservoir. Preferably, the carrier is selected to have an equilibrium vapor pressure at room temperatue on the order of 1-300 torr, and it is an organic compound comprising between 1 and 10 carbon atoms, e.g. a straight-chained, branched or cyclic alkane, alkene, alcohol, aldehyde, ketone, or ether. Most preferably, the carrier has between 5 and 9 carbon atoms and is pentane, hexane, heptane, octane, acetone, or benzene; the carrier can be a single compound or a mixture of compounds.
The ion-interactive hydrocarbon has at least 10 carbon atoms, and has a vapor pressure at room temperature less than 1 torr; the hydrocarbon may be a mixture of compounds, e.g. alkanes; most preferably it is selected from pyrene, squalene, tetramethylpentadecane, dodecane, and vinylanthracene.
Also in preferred embodiments the ion beam source is a liquid metal source focused to a resolution of at least 1μ, and the beam energy is between about 10 and 70 keV. To direct the beam, an image of the site is formed before making the deposit, e.g. by sensing charged particles emitted from said site when it is bombarded by the beam. The site requiring alteration is a transparent defect in a pattern of a photolithographic mask and the deposit is one which renders the defect opaque to photolithographic light, such as a carbon deposit on a substrate comprised predominantly of compounds of silicon and oxygen. Also preferably, the apparatus comprises means for forming an image of the site and means for positioning the site in the beam path, and a beam deflector for scanning the beam in a scan pattern over the area of the site on the basis of the image. The beam deflector is also adapted to scan the defect site repeatedly to overcome localized depletion of the gas as described above. The apparatus further comprises a means for imaging said site comprising a detector providing a signal representative of charged particles emitted in response to bombardment of the mask by said beam.
To increase pressures locally at the site to be altered, a directed gas inlet is positioned to provide a localized supply of the compound at the site. For example, the inlet is a small diameter tubing angled with respect to the beam axis which ends a distance above the substrate on the order of the tubing diameter.
Another way to enhance pressure locally at the substrate is to provide baffles defining a series of adjacent chamber regions along the path of the focused ion beam beginning at the mask, and maintain differential pressures of the ion-depositable compound in the chamber regions, the greatest pressure being maintained in the region containing the site, the pressure at the site being great enough to cause the hydrocarbon to be adsorbed at the site. Specifically, the chamber comprises at least two baffles defining a series of adjacent chamber regions along the path of the ion beam beginning at the mask, each baffle defining an opening positioned along the beam path to allow the beam to pass therethrough; (4) a gas inlet adapted to introduce hydrocarbon into a first chamber region for deposition at the site, the first chamber region containing the site; and (5) an outlet from a second chamber region, the outlet communicating with a vacuum pump, the second chamber region being spaced upwardly along the beam path from the first chamber region, the pressure in the first chamber region thereby being relatively greater than the pressure in the second chamber region. Preferably, the first baffle and the second baffle each comprises a horizontal member defining the opening, the horizontal member of the first baffle being spaced a distance below the horizontal member of the second baffle, the distance being at least two times the diameter of either of the openings in the baffles.
In a second aspect, the invention generally features accurately altering a precisely localized site on a substrate by: (1) placing the substrate in a vacuum chamber; (2) forming an image of the site; (3) by means of an ion source and associated focusing optics, providing a focused ion beam; (4) introducing hydrocarbon in the chamber, localized and adsorbed at the substrate; (5) simultaneously therewith maintaining the pressure in the chamber low enough to allow the focused beam to pass substantially without gas-created dispersal; and (6) on the basis of the image, directing the beam to the site, so that the scanning beam converts the adsorbed hydrocarbon to a coherent carbonaceous opaque deposit of predetermined desired form, adherent to the substrate at the site, to render the site opaque.
In a third aspect, the invention features a method in which hydrogen gas is used in order to reduce a silicon compound in the mask substrate to form a coherent opaque silicon deposit of predetermined desired form, adherent to the mask at the site.
Other features and advantages of the invention will be apparent from the following description of the preferred embodiment thereof and from the claims.
Specific preferred embodiments of the invention directed to repair of opaque masks using a focued ion beam are described below, without limitation on the following claims.
FIG. 1 is a highly diagrammatic sectional representation of apparatus for repairing a mask.
FIG. 2 is a greatly enlarged diagrammatic representation of the mask repair process.
FIG. 3 is a sectional, diagrammatic view of a portion of one embodiment of apparatus for repairing a mask.
FIG. 4 is a sectional, diagrammatic view of another embodiment of apparatus for repairing a mask.
FIG. 5 is a diagrammatic representation of one two-fluid transport system.
FIG. 6 is a diagrammatic representation of a second two-fluid transport system.
FIGS. 7A-7C are diagrammatic representations of different stages in a mask repair process.
In FIG. 1, apparatus 5 for repairing a photolithographic mask includes, in general, ion beam source 10 and beam focusing column 20 arranged to deliver a focused ion beam 24 to vacuum chamber 30 through opening 32. Within chamber 30 is an X-Y stage table 40 adapted to hold mask 35 in the path of ion beam 24. A gas delivery system includes an inlet tube 50 (broken away in FIG. 1) extending through the wall of chamber 30. A vacuum pump 60 communicates with chamber 30 through port 62 to evacuate the chamber. These various components of the mask repair apparatus and the functioning of that apparatus are discussed in greater detail below.
Ion source 10 is a liquid metal ion source for generating a stable focusable ion beam. For example, suitable ion sources are disclosed in Clampitt et al., U.S. Pat. No. 4,088,919, Jergenson, U.S. Pat. No. 4,318,029, and Jergenson, U.S. Pat. No. 4,318,030, each of which is hereby incorporated by reference. The source includes a tip 12 from which metal ions are emitted under the action of extractor electrode 14 in a continuous and stable beam that can be focused by column 20. Electrode 14 is insulated from tip 12 by electrical insulation 13.
Focusing column 20 includes lens 22 to deliver a focused ion beam through opening 32 in chamber 30. Specifically, an axial electric field between conductive elements 28 and 29 creates an electrostatic immersion lens 22. Insulation 85 electrically insulates chamber 30 from focusing column 20. A suitable focusing column is described in Wang et al. J. Vac. Sci. Tech. 19(4): 1158-1163 (1981) which is hereby incorporated by reference.
Repair apparatus 5 is able to control the point on the mask that is bombarded by the ion beam and to ensure that the resulting deposit completely covers the mask defect. To achieve this, the apparatus includes an X-Y stage table 40 controlled by stage drive motor 42 connected thereto by a transmission shaft 44 through a sealed bearing in the wall of chamber 30. Alternatively, the motor may be positioned inside the vacuum chamber. Motor 42 is controlled by stage drive electronics 45, which in turn are connected to computer pattern generator and image display 46. Display 46 is supplied by electron detector 48 with a signal representative of electrons generated by the collision of beam 24 with the mask to indicate the position of the beam on the mask as described in more detail below. Alternatively, detector 48 can be used to detect ions emitted from the mask during beam bombardment. An electron source (not shown) also can be provided to neutralize charge build-up during ion bombardment for imaging. Apparatus 5 also includes a means for controlling the beam direction. Specifically, a time-variable voltage is supplied to an electrostatic beam deflector 26 positioned inside chamber 30 at opening 32 to enable deflection of the beam according to a desired pattern as described below.
By selecting conditions and apparatus to enhance local gas concentrations, it is possible to achieve a deposition rate that exceeds the rate of material loss due to ion beam sputtering, and thus to provide a coherent opaque deposit that is carefully limited to the site to be altered, e.g., the defect site.
Specifically, the gas delivery system includes a pressurized gas bottle 52, a regulator 54 and micro-leak valve 56 to deliver extremely low gas pressures (e.g. between about 10-2 and 10-6 torr) to inlet tube 50. This gas pressure should be low enough to avoid destabilizing the ion source or dispersing the beam as it travels through the vacuum chamber; at the same time, the pressure should be high enough to provide a deposition rate that overcomes sputtering.
To repair a mask such as chrome/glass mask 35, the mask is placed on X-Y table 40 and chamber 30 is pumped down e.g., to 3�10-5 Torr. Source 10 and column 20 are activated to direct a focused gallium ion beam 24 at mask 35. When beam 24 strikes mask 35, electrons are emitted and detected by detector 48 (for example, a channel electron multiplier such as one manufactured by Galileo Electrooptics Corp., Sturbridge Mass.), generating a signal to computer display 46 to generate a display in much the same manner as occurs in an electron microscope display. The signal generated will depend upon the characteristics of the specific region of mask 35 under bombardment by beam 24. Thus it is possible, by means of feedback from computer display 46 and knowledge of the desired mask pattern, to use electronics 45 to move table 40 to position a mask defect in the path of beam 24, with an accuracy of �0.05 microns.
Ion source 10 and column 20 are capable of delivering a high-energy focused liquid-metal ion beam 24, e.g., a gallium or gold ion beam of densities of at least 10-3 amp/cm2 and up to about 1 amp/cm2 over a spot size that provides the desired accuracy and resolution to control the carbon deposited, e.g. a spot size of 0.1 to 1.0 microns (micrometers). Non-liquid-metal ion sources generally do not provide dose rates in excess of 3�10-5 amps cm-2. Ion beam energy should be great enough to enable focusing (at least 10 keV). A preferred range of operation is 10 to 70 keV, most preferably 25-50 keV. Advantageously, such energies are satisfactory for removing opaque defects, so that both types of defects can be repaired by the same piece of apparatus.
Once beam 24 is generally centered in the mask defect, hydrocarbon gas from bottle 52 is introduced into the defect region in a manner described in more detail below. Since the size of a pin-hole defect may be upwards from about 0.25 microns to about 100 microns or more, which is much greater (e.g. over 10 times greater) than the beam spot size, beam deflector 26 is activated by computer display 46 to scan the beam to cover the entire defect. For example, a raster scan can be generated to cover a polygon that covers the entire site with some overlap of the chrome layer.
Alternatively, the beam can be positioned and moved from point to point according to predetermined computer-controlled positions; the term "scan" is used herein to include such point-to-point movement.
When repairing the defect, carbon is locally deposited as described elsewhere herein, momentarily depleting the hydrocarbon supply at the beam spot. By repeatedly scanning the beam over a defect site, while controlling the repeat rate to allow the hydrocarbon to absorb from the gaseous environment and thus replenish each scanned spot before the beam spot returns to the point, the carbon deposit can be increased over the area until the designed thickness is achieved. The "dwell time" (the time that the beam dwells at a given point) as well as the repeat rate (or "loop time") can be selected to allow the above to allow the above replenishment while generally minimizing the time needed to perform the repair. For example the dwell time can be between 0.1-200 microseconds, and the loop time can be between 0.1-20 milliseconds.
FIG. 2 depicts in a very diagrammatic way a general description of interaction between beam 24, hydrocarbon above the substrate, and mask 35. Specifically, at the left side of the figure, the chrome layer 81 on mask 35 ends at the perimeter of a transparent defect that is being repaired. The far side of that deflect is not shown. Beam 24, represented by broken lines, is scanning from left to right. Beam 24 is between 0.1 and 10 microns in diameter. As a result of beam particle energy, hydrogen-carbon bonds are broken. Hydrogen is formed and carbon atoms combine either with each other and preferably with atoms or compounds in the mask. Specifically, the carbon atoms may combine with the silicon of the silicon dioxide in the glass or quartz, releasing oxygen gas and forming a silicon carbide transition layer. On top of that transition layer, tenacious, hard, opaque, intimately bound, carbon layers are deposited, probably in amorphous (vitreous) form, and hydrogen gas is released.
FIGS. 7A-C depict the interaction of absorbed hydrocarbon with the ion beam as the beam is recycled over a specific site. Specifically, in FIG. 7A, the beam 201 is scanning from left to right to convert absorbed hydrocarbon layer 202 to carbonaceous deposit 203, and thus repair the defect in chrome layer 204 on substrate 205. After the scan shown in FIG. 7A is complete, the beam does not return to the precise location depicted for a period that allows the absorbed hydrocarbon layer to reform on top of the carbonaceous layer (FIG. 7B). Then, the beam is returned to again scan from left to right (FIG. 7C), converting the replenished absorbed hydrocarbon layer to additional carbonaceous deposit.
The choice of hydrocarbon for any particular application depends inter alia upon the particular deposition apparatus employed, and upon the requirements for thin layer adsorption of hydrocarbon monolayers at the substrate surface site. To provide sufficient hydrocarbon concentration at the surface, it is generally desirable to use a hydrocarbon whose vapor pressure is high enough to be absorbed rapidly upon the substrate under the temperature and pressure conditions prevailing at the surface.
In certain cases, it is further desirable to provide relatively high gas pressure in the gas delivery tube. In order to maintain a relatively high concentration of hydrocarbon at the deposition site while at the same time avoiding unstable operation of the focussing column, or beam dispersal as the beam travels through chamber 30, it is desirable to maintain different hydrocarbon pressures in the two regions, i.e., a very low pressure along the beam line in chamber 30, and a relatively higher pressure in the region immediately adjacent the site. Apparatus for helping to accomplish these goals is shown in FIGS. 3-6 (described later herein) which depict features that can be combined with each other, or can be used individually, with the apparatus diagrammed in FIG. 1.
It is found that the interaction of the beam with the absorbed hydrocarbon may be inadequate to provide a useful deposit or a sufficient rate of deposit. It is therefore desirable to (a) select as the hydrocarbon that will primarily interact with the ion beam, a relatively large molecule that is capable of substantial adsorption at the deposit site under pressure and temperature conditions that exist at the site and (b) provide a carrier substance that is more volatile than the hydrocarbon, to physically act upon the hydrocarbon to deliver it to the site in the vacuum chamber, where the larger hydrocarbon is effective absorbed and interacts with the beam to produce a deposit in an augmented way. The carrier is chosen (a) not to interfere with the deposit process, (b) preferably, to contribute to the deposit, to the extent it is also adsorbed, and (c) to the extent not adsorbed, to be removed by the associated vacuum pump.
This sytem enables the interactive hydrocarbon substance to reach the site under pressure and temperature conditions that are favorable to the desired treatment. For example, it is undesirable for the interactive substance to condense in the delivery system under the pressure conditions that exist there, as this may cause, over time, undesirable variation in the concentration of the interactive substance delivered to the site as well as other time dependent instabilities. On the other hand, heating of the substance to avoid such condensation is undesirable because if the substance arrives at the site at temperatures too different from that of the site itself, it can cause such thermal distortion of the substrate that the accuracy of the finely focused deposit can be impaired. The multiple component system just described can deliver the interactive substance without substantial condensation in the delivery system and at substantially the same temperature as the substrate, in condition to be readily absorbed upon the substrate as it arrives, thus to augment the deposit process in a satisfactory way.
The interactive hydrocarbon species may be a condensible hydrocarbon carried through a delivery tube by a larger concentration of a more volatile carrier, which may also be, but need not be, a hydrocarbon. In such an arrangement, the molecules of carrier vapor are propelled along the tube with a directed bulk velocity sufficient to act by collision upon the interactive gas molecules, to carry them to the site.
The mixture of carrier and interactive hydrocarbon substance may emanate from a container holding a solution of the two species in liquid phase, and connected by a delivery tube to the site within the container vacuum chamber. By appropriate selection of the species, the evaporation rate of the two species can be predetermined to achieve the desired carrier effect.
The carrier should have a high enough vapor pressure so that it will carry the hydrocarbon and will not condense on the substrate: for example, a vapor pressure of at least 1 torr at room temperature. Preferably, the carrier is a liquid at room temperature. The carrier should be chemically compatible with the interactive substance so that it does not undergo chemical reaction that could destroy the interactive substance. The carrier may, but need not in all instances, be soluble with the interactive substance.
The carrier may be a light volatile organic liquid such as pentane, hexane, heptane, octane, gasoline, acetone or benzene. Two specific carriers that can be used are octane and acetone. In some respects, octane works better as a carrier vapor than acetone because it has a lower vapor pressure than acetone and therefore does not evaporate from the reservoir as quickly, allowing longer run times. Octane has an effective vapor pressure of about 5 millitorr under conduit conditions, as determined by pumping a small open vessel containing octane with a turbopump.
The interactive hydrocarbon species should have a low enough vapor pressure to be physically absorbed on the substrate at pressures created by the jet. It should be chemically compatible with the carrier and have a critical temperature above the substrate temperature so that it its local concentration at the substrate surface can be enhanced by a process of adsorption. It is desirable that the hydrocarbon exist as a liquid at standard temperature and pressure (STP). Finally, the hydrocarbon should have a relatively high carbon content to form a carbonaceous layer as rapidly as possible. One effective hydrocarbon is tetramethylpentadecane (TMPD), for example 2,6,10,14-TMPD.
It is possible to operate the system with the local pressure at the point of beam impact on the substrate in the range so the TMPD is generally physically absorbed on the surface and the octane generally evaporates away. The pressure in the work chamber when there is no vapor coming out through the jet (described in more detail below) is less than 5�10-6 torr. At that pressure little if any carrier or TMPD would be physically absorbed on the surface of the substrate. The jet provides pressure enhancement at the point of beam impact, i.e., it enables a relatively high local concentration of hydrocarbon at the deposition site, while permitting there to a low pressure in the ion optics column.
The use of the above-described transport system inhibits condensation of the hydrocarbon on the walls of the delivery tube, but once the two components exit from the jet, most of the carrier vapor will evaporate away and the interactive hydrocarbon loses its bulk velocity and will absorb at the region surrounding the impact point of the beam.
FIG. 5 is a diagram of one specific apparatus for two-fluid transport. Vacuum chamber 110 contains ion source and optics 112 which emits focused Ga ion beam 113 that strikes substrate 114 at impact point 115. Gas delivery tube 116 terminates close to point 115. Chamber 110 is pumped by vacuum pump 117. The two-component fluid (e.g. TMPD and octane) is contained in reservoir 118, and its gaseous flow is regulated by leak valve 119, which may be either an on/off valve or a combination of on/off and flow regulating valves.
FIG. 6 is a diagram of an alternative apparatus for two-fluid transport having a separate reservoir for each of the two fluids. Reservoir 120 holds carrier fluid 122, whose flow rate is controlled by flow regulating valve 123. Reservoir 124 holds ion-depositable gas 125 whose flow rate is controlled by flow regulating valve 126. Reservoir 127 holds the two-fluid mixture, whose flow is controlled by flow regulating valve 128. The exit port of 128 in this figure is connected to the input port of apparatus such as is described in FIG. 5 for example at leak valve 119.
Vents in reservoirs 120 and 124 communicate atmospheric pressure to the fluids therein to drive liquid into reservoir 127 under the influence of the reduced pressure of chamber 110 communicated through port 128. The apparatus of FIG. 6 is useful to provide a continuing supply of carrier and hydrocarbon to reservoir 127, so that adequate amounts of both are available continuously and a run is not curtailed, e.g. because the carrier has been depleted. Other systems may be possible in which separate reservoirs of hydrocarbon and carrier are maintained, the vapor of each component being provided separately to a single conduit leading to the vacuum chamber, so that mixing of the components in the liquid phase is avoided.
In FIG. 3, mask 35 is surrounded by a plurality of rectangular baffles 37, 38, and 39, each of which has a central opening 33 and is aligned with respect to beam 24 and mask 35 to allow the beam to bombard the mask. The outer baffles 37 and 38 define respectively, two chambers 70 and 72, each communicating with an outlet 64 to a vacuum pump. The inner baffle defines a chamber 74 over the operative site of mask 35. Gas inlet 53 provides hydrocarbon to chamber 74. At the junction between the baffles and the mask 35 are graded differential pressure seals 84 that allow horizontal movement of the mask relative to the nest of baffles, while maintaining a pressure seal.
The vapor pressure is greatest in inner chamber 74 and lowest in outer chamber 70 so that some flow occurs from chamber 74, through chambers 72 and 70, to chamber 30. This flow should be minimized to maintain a relatively high pressure in the region immediately adjacent the mask without causing excessive beam scattering from gas molecules in the beam path in chamber 30.
Due to the low pressures involved, the flow from chamber to chamber will be, in effect, close to a molecular straight-line flow so that there will be angular spread at the orifice. By arranging the spacing between baffles to be at least 3-4 times the diameter d of the central openings 33, the predominant gas flow through an orifice will be deflected by the next baffle. Thus it is possible to maintain pressures in chamber 30 which are low enough (about 3�10-5 torr) to avoid excessive beam scattering and unstable column operation, while the pressure in chamber 74 is high enough (about 3�10-2 torr) to allow significant carbon deposition. The diameter of openings 33 should be established to allow satisfactory scanning of the defect site. If the defect encountered is likely to be about 20 microns, for example, openings 33 should be about 21/2 times that distance or 50 microns.
To operate according to the augmentation system described above, the hydrocarbon/carrier mixture may be introduced by a supply tube whose exit is in chamber 74, gnerally directed toward the deposit site on the substrate.
FIG. 4 shows another device for enhancing localized pressure at the substrate. A carefully, closely positioned gas inlet 55 (e.g., a hypodermic needle or other small diameter tubing) angled slightly to direct the gas flow to the spot of impact of beam 24 on mask 35. As noted above, the molecular gas flow will exit inlet 55 at a diverging angle. Inlet 55 is spaced a distance f above mask 35 on the order of (most preferably approximately equal to) the diameter of the opening of inlet 55, which has a diameter of between 125μ and 250μ. Distance f may be adjusted to optimize deposition, and it is preferably between 0.02 and 0.2 mm. Gas pressure at the sample is about 3�10-2 torr. In that way, the gas concentration at the surface of the mask site is enhanced to allow deposition to proceed more rapidly than sputtering away of the deposited layer; at the same time the gas is localized so that it does not cause excessive scattering of the ion beam. To further contain the gas, the substrate may be contained in a differentially pumped chamber having an opening designed to transmit the ion beam. Again, the augmentation process described above is an important consideration to make the jet effective when used, e.g. with a hydrocarbon interactive gas. The application of Edwin M. Kellogg and John Melngailis, Ser. No. 769,370, filed Aug. 26, 1985 is hereby incorporated by reference.
Other embodiments are within the following claims.
Other liquid metal ion beams may be used, such as a gallium, boron, or gold beam. The ion source can be selected to have a higher or lower sputtering rate, depending on whether it is desirable to enhance the rate of deposit or the rate of removal of material.
Gases other than hydrocarbons can be used in the featured differentially pumped apparatus. For example, dangerous or poisonous gases can be used with the apparatus of FIG. 3 and such gases will be trapped largely in the outflow of outlets 64, thus allowing improved control of the gas. Hydrogen gas may be used to reduce the silicon dioxide in the mask substrate, forming an opaque silicon deposit and water vapor. The differentially pumped chambers may be arranged in other ways; for example, all of the chambers may enclose the substrate entirely, so that there is no seal between the substrate and the chamber walls.
In one alternative embodiment, it may be possible to enhance the hydrocarbon concentration at the substrate surface is enhanced by electrostatic interaction. Specifically, the hydrocarbon is provided as a beam of negative ions, attracted to the hydrocarbon beam; the hydrocarbon beam is then electrostatically attracted to the substrate site, which is positively charged from the metal ion beam.
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