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Product Information
Once a Gambler by Lightnin' Hopkins - Digital Sheet Music
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Once a Gambler digital sheet music. Contains printable sheet music plus an interactive, downloadable digital sheet music file.
* This arrangement contains complete lyrics
* This product is available worldwide
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text: I have a 8 month contract. My mom is having medical issues and i need to take care of her so i was going to find something local I could use my license for and I have only been there 2 months and the BS is unbelievable. I am starving, get no miles to drive and have a oportunity to work for a different company that treats there employees like they should. only reason I know they are a good company is my friend has worked for them for a few years. At first I didnt think the 8 months would be that bad but everything I am going through with my mom, have experienced and heard so far about CRST is scary. Can anyone tell me what happens if i quit and get a job with a different company. And is there any way out of this contract.

subset: commoncrawl


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Originally written on Fox Sports | Last updated 12/31/12
Life has been easy for Indiana since it was handed its first loss two weeks ago. That could change Monday as it opens play in the conference that many consider to be the best in the country. In their first true road contest of the season, the fifth-ranked Hoosiers begin their Big Ten schedule at Iowa on New Year's Eve. Indiana (12-1) has lost in its last four trips to Iowa City, but has won three straight games by 34 points or more since an 88-86 overtime loss to Butler on Dec. 15. With leading scorer Cody Zeller limited due to foul trouble in Friday's game against Jacksonville, the Hoosiers turned to Jordan Hulls, who scored 17 of a season-high 20 points in the first half of a 93-59 victory. Hulls, who averages 11.8 points, went 6 of 9 from 3-point range. "I've been pretty passive and they've been telling me to shoot more," said Hulls, one of the nation's top 3-point shooters at 54.5 percent. "Growing up I was always a pass-first guy, but I felt good today and I felt good all t...
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Product-Service Modes of Working
Operations Management Implications
(If any tax is payable it will be calculated and shown at checkout.)
Preview (read now) Add to my own site Give this ebook to a friend Add to my wishlist Author's page Publisher's page
moreFor many years, those in the operations management community have debated the boundaries between manufacturing and service, recognising that the distinctions between them are becoming increasingly blurred. In business, this blurring is becoming more pronounced, especially with the emergence of new forms of contracting, often enabled by developments in information technology. Here we can see trends to offer a complete product and a one-off service (as in design and build in construction), and the trend to design/develop/make and operate a product, facility or service through-life (as in power by the hour contracts in aerospace). In each of the papers in this e-book the challenges inherent in operationalising the product-service construct are explored, and strategies for enacting the approach are identified or constructed. less
Emerald Group Publishing Limited; May 2009
141 pages; ISBN 9781848557055
Read online, or download in secure PDF format
Title: Product-Service Modes of Working
Author: Adrian Wilkinson
141 pages; ISBN 9781848557055
Read online, or download in secure PDF format
Title: Product-Service Modes of Working
Author: Adrian Wilkinson
Buy, download and read Product-Service Modes of Working (eBook) by Adrian Wilkinson today!
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Grant's OT goal earns B-Sens a victory
Binghamton, NY (WBNG Binghamton) The Binghamton Senators continued its overtime dominance with a 5-4 win over the visiting Hershey Bears.
Hoffman named to AHL All-Star First Team
Binghamton, NY (WBNG Binghamton) Binghamton Senators forward Mike Hoffman has been named to the 2013-14 AHL All-Star First Team.
Goalie decision looms over B-Sens (Web Extra Video)
Binghamton, NY (WBNG Binghamton) A frustrating Saturday night left the Binghamton Senators with more questions than answers at the goalie position.
First period barrage sends B-Sens past Pens
BINGHAMTON (WBNG BINGHAMTON) The Binghamton Senators returned to the top of the East Division with a 6-2 route of the visiting Wilkes-Barre/Scranton Penguins. Binghamton rode a five-goal first period and a solid defensive effort after to beat the Penguins for the fourth time in six games this season.
Third period flurry pushes Norfolk past B-Sens
BINGHAMTON (WBNG BINGHAMTON) Binghamton fell 6-3 on home ice to the Norfolk Admirals despite tying the game at 3-3 just before the end of the second period. The Admirals rallied off three straight goals less than six minutes apart to take the victory and push the B-Sens to second place behind Wilkes-Barre/Scranton in the East Division.
B-Sens outlasted by the Amerks
Rochester, NY (WBNG Binghamton) Despite outshooting the Rochester Americans 40-25, Binghamton fell 4-3 in regulation following Kevin Porter's game-winning goal with 10:19 remaining.
Playoffs begin now for the B-Sens
Binghamton, NY (WBNG Binghamton) The playoffs may not begin for another couple of weeks in the AHL, but for the Binghamton Senators, they may as well start now.
New additions hope to plug holes in B-Sens offense (Web Exra Video)
Binghamton, NY (WBNG Binghamton) Coming off a five-point weekend, the B-Sens have lost several offensive weapons to call-ups and injuries. But help came in the form of two new additions on Wednesday.
Pageau recalled by the Senators
(WBNG Binghamton) The Ottawa Senators have recalled forward Jean-Gabriel Pageau on emergency basis from the Binghamton Senators.
BSens lose in shootout at Albany, 3-2
ALBANY (WBNG BINGHAMTON) Binghamton fell 3-2 in a shootout to the Albany Devils despite holding a 2-1 lead heading into the final period of play. Despite the loss, the B-Sens gained a point to increase their lead in the AHL's East Division to two points over Wilkes-Barre/Scranton.
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Richardson returning to B-Sens on one-year deal


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text: It took extra innings, but the Forest Lake VFW baseball team extended its winning streak to seven with a 5-4 win at Anoka on Sunday. Sam Bredenbeck provided the game-winning hit the ninth inning. The Rangers trailed 4-2 in the seventh but rallied to force the extra frames. Zach Voss hurled five good...Read More


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I'm looking forward to tomorrow's (12th June 2008) DesignIT 2008 Roundtable discussion. Neville Hobson's blog post titled blog as an art form at DesignIT 08 describes the event really well.
I'm taking a Microsoft RoundTable device with me as a creative means of recording both the audio and video of the discussion itself - I'll publish it online via my blog assuming each of the speakers are happy for me to do so - the recording will be released some time after Stephen Prichard's podcast covering the event. As you can see in my earlier post titled Microsoft RoundTable a cool way to collaborate by video the recording will include a panoramic view of the room together with a window that will highlight the active speaker.
The roundtable will be comprised of the following people:
The idea behind the debate is to engage both the art and technical communities in a constructive discussion around the use of new media.
If you'd like to join the discussion remotely both to pick up the key points and to contribute your own input then try following the live twitter feed which is being run by the organisers bearing in mind that the discussion is scheduled to take place between 13:30 and 15:00 British Summer Time (GMT + 1).
As I mentioned in my earlier post DesignIT: a mashup of charity, art and technology we held a debate


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Photo by Romulo Yanes
YIELD: Makes 4 main-course servings
ACTIVE TIME: 45 min
TOTAL TIME: 2 hr
Bring 3 cups water and bay leaf to a boil in a 2- to 3-quart saucepan, then add lentils and simmer, uncovered, 2 minutes. Remove pan from heat and let lentils soak 1 hour. Drain lentils in a colander.
Cook pork fat in a 6-quart heavy pot over moderate heat, stirring occasionally, until deep golden and some fat is rendered, 6 to 8 minutes, then discard solids. (If using bacon, transfer with a slotted spoon to paper towels to drain and reserve for garnish.)
Add oil to fat in pot and heat over moderately high heat until hot but not smoking, then fry bread, turning once, until golden, about 1 minute total. Transfer toasts to paper towels to drain and lightly season with salt. Add potatoes to fat in pot and sauté, stirring, until golden, 7 to 8 minutes. Transfer with a slotted spoon to fresh paper towels to drain.
Add onion and garlic to pot and sauté, stirring, until golden, 6 to 8 minutes. Stir in lentils, tomatoes with their juice, sugar, salt, pepper, and remaining 5 cups water and simmer, uncovered, stirring occasionally, until lentils are just tender and stew is thickened, 40 to 45 minutes. Discard bay leaf and stir in potatoes, basil, oregano, and salt and pepper to taste. Thin stew with water if desired, then serve over toasts or with toasts on the side. Sprinkle with bacon if using.
*Available at specialty foods shops and natural foods stores.


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or The First Martyrs of the See of Rome
If you have already recited the Invitatory Psalm today, you should use the alternative opening.
|Invitatory Psalm
|Psalm 66 (67)
* If you are reciting this on your own, you can choose to say the antiphon once only at the start of the psalm and not repeat it.
|Psalm 9B (10)
|Psalm 9B (10)
|Psalm 11 (12)
A prayer against the proud
|First Reading
|2 Samuel 2:1-11,3:1-5 ©
|Second Reading
|From a sermon by Saint Augustine
|If I wanted to please men, I would not be a servant of Christ
The psalms and canticles here are our own translation. The Grail translation of the psalms, which is used liturgically in most of the English-speaking world, cannot be displayed on the Web for copyright reasons. The Universalis downloads do contain the Grail translation of the psalms.
You can also view this page in Latin and English.
Copyright © 1996-2015 Universalis Publishing Limited: see www.universalis.com. Scripture readings from the Jerusalem Bible are published and copyright © 1966, 1967 and 1968 by Darton, Longman & Todd, Ltd and Doubleday, a division of Random House, Inc, and used by permission of the publishers.
|This web site © Copyright 1996-2015 Universalis Publishing Ltd (contact us)


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12th March 2014
Comment: The Church of England must stop its persecution of gay priests 8
3:49 PM — The Chair of LGBT+ Liberal Democrats, Ed Fordham, writes for PinkNews.co.uk on his dismay at the latest attempts by the Church of England to suppress equality among its own ranks.
28th February 2014
UK Minister: Taking a 'subtle approach' failed to stop Uganda's 'abhorrent' anti-gay law 10
3:12 PM — Lynne Featherstone says events in Uganda show taking a "subtle approach" on LGBT rights "clearly didn't work" and won't deter similar legislation in other parts of Africa.
27th February 2014
Comment: Young LGBT people need greater support on issues around sex and relationships 7
6:43 PM — Meghan Lewis from the WiSE Project writes for PinkNews on how LGBT young people need greater support when it comes to making decisions about sex and relationships.
26th February 2014
Peter Tatchell: Travel ban should be imposed on Uganda's homophobic leaders 18
4:36 PM — Peter Tatchell writes on how the world should respond to the President of Uganda's decision to sign the country's Anti-Homosexuality Bill
14th February 2014
Comment: What the trans community could learn about labels from the Piers Morgan controversy 8
5:42 PM — Writing for PinkNews, the vice chair of LGBTory, Zoe Kirk-Robinson, suggests that the trans community could learn from a recent controversy around Piers Morgan, to use correct labels, and educate others to do the same.
12th February 2014
Tory MP Crispin Blunt calls for travel ban against backers of Ugandan anti-gay bill 9
2:51 PM — Conservative MP Crispin Blunt says Britain should impose a travel ban on Uganda's politicians if President Museveni passes the Anti-Homosexuality Bill.
10th February 2014
Scottish Tory leader: I wept with relief when Holyrood passed equal marriage 3
11:59 AM — Scottish Tory leader Ruth Davidson writes of how she cried "deep sobbing tears" of relief and joy when the Scottish Parliament legalised equal marriage last week.
7th February 2014
Comment: Sochi shows the fight for LGBT equality continues for all of us 2
4:14 PM — Writing for PinkNews.co.uk, Will Harris says it's wrong for commentators to assume the battle for equality has been won with equal marriage.
6th February 2014
Green Party: The UK has failed to protect LGBT asylum seekers 7
11:09 AM — Green Party MEP candidate Caroline Allen writes for PinkNews.co.uk on how the government has failed those fleeing homophobic and transphobic persecution.
5th February 2014
Comment: Scotland's passing of equal marriage is an important moment for trans and intersex people 4
11:10 AM — Writing for PinkNews.co.uk, Scottish Transgender Alliance Development Officer Nathan Gale says Scotland's decision to legalise equal marriage will benefit trans and intersex people.
29th January 2014
National AIDS Trust: Making sex education optional hampers the fight against HIV 3
5:08 PM — Tom Perry from the National AIDS Trust says Tuesday's House of Lords vote against compulsory sex education represents a missed opportunity in the fight against HIV.
27th January 2014
Holocaust Memorial Day: The lessons we should learn from the Nazi persecution of gay people 33
10:18 AM — PinkNews publisher Benjamin Cohen reflects on the persecution of gay people by the Nazis as Britain marks Holocaust Memorial Day.
23rd January 2014
Comment: Stonewall does great work for gay kids but what about anti-trans bullying? 27
7:21 PM — Transgender broadcaster and journalist Paris Lees writes on trans bullying in schools, and asks why Stonewall campaigns only against anti-gay bullying, and not anti-trans.
22nd January 2014
Comment: The EU has made strides towards LGBT equality but discrimination and isolation remain common 7
2:24 PM — Lib Dem European Parliamentary candidate for South East England Giles Goodall writes for PinkNews on the EU as a force for good in the fight for equality, but says discrimination and isolation are still rife for LGBT people and momentum needs to be maintained.
17th January 2014
Comment: What would happen if a gay premiership star came out and continued playing football? 5
7:16 PM — Following the recent decision of retired player Thomas Hitzlsperger to come out as gay, Stonewall FC footballer and employment lawyer Jamie Feldman looks at the potential ramifications of a current gay premiership star coming out and staying in the game.
Comment: Jeremy Clarkson's 'gay c*nt' photo shouldn't be aligned with real hate speech 18
5:52 PM — Karl Arbuthnot writes for PinkNews on Jeremy Clarkson's "gay c*nt" controversy to say that it should not be confused for more damaging hate speech and warns that giving too much attention might make the Top Gear presenter think his opinion matters more than it does.
Comment: We should honour the life of Vlad Tornovoi by standing up for gay rights in Russia 8
4:02 PM — Writing for PinkNews.co.uk, Tom Hayes says last year's homophobic murder of Vlad Tornovoi should galvanise Britain into raising Russia's appalling LGBT rights violations at next month's Winter Olympics.
16th January 2014
Comment: Spousal veto amendment is a victory for trans equality in Scotland 7
11:48 AM — Tom French, of the Equality Network, says the decision to remove the spousal veto from Scotland's equal marriage bill is a crucial victory for trans and intersex people.
Comment: Removing the spousal veto will make Scotland's equal marriage bill fairer
10:00 AM — Scottish National Party MSP Linda Fabiani writes for PinkNews.co.uk on why Scotland's same-sex marriage bill needs to remove the spousal veto
9th January 2014
Comment: Channel 4 Secrets of the Living Dolls was little more than a freak show 31
11:19 AM — Writing for PinkNews.co.uk, Helen Belcher says the recent screening of Channel 4's Secrets of the Living Dolls was a backward step for the network and that it did a disservice for trans people by broadcasting the programme.


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Search engine tactics have been subject to constant change during the last decade or so, and these fluctuations have definitely affected website rankings and traffic flow of most website. However, those who have adapted to these changes seem to have survived the turmoil. So how do you make sure that your website ranking is not affected by another Google update, the short answer to this is "Quality SEO".
It is only through a dedicated and determined SEO services that you would be able to guarantee your website ranking on the that crucial first page search. This is exactly what we do, we are on a constant lookout for any change in the search engine behaviors and adapt to counter these changes by providing topnotch SEO services to our clients.
Quality SEO Services at Affordable Prices
The next Big Question that comes to ones mind is, are these SEO services affordable? Well honestly taking into consideration the amount of effort which goes into making websites rank good and maintain their status the cost of quality SEO we provide is quite nominal.
Hiring our services means peace of mind. We have the expertise and knowhow necessary to best rank your website and make sure that you get massive traffic and your customers keep coming back. You do not have to worry about any search engine update affecting your online business, you just have rely on our services and that is it. Let us do our job of driving customers to your website while you can stick to providing quality services to your clients which they deserve.
Post Penguin & Panda SEO
After Penguin and Panda updates a lot has changed in the SEO industry, things are not as they used to be. In fact the updates have made most SEO companies take a u-turn on their SEO strategies. Ranking websites prior to Penguin and Panda update wase relatively easier, now without the proper understanding of how search engine algorithms work you simply cannot provide Quality SEO to your clients.
We have been in the business long enough to understand how these updates have evolved overtime and how they affect your website ranking. In addition to this we constantly research and make the required changes to improve our SEO strategies, making sure that our clients get the best results always.


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Munich. The application containing all the product information on the new BMW X3 has been available in the App Store since the beginning of December 2010, offering the chance to experience the vehicle via iPad.
The application combines the advantages of the classic product catalogue, the website and the interactive possibilities of the iPad.
The BMW X3 App not only provides plenty of information and video material, but also gives users the chance to configure their ideal vehicle individually and to order product literature by operating the touchscreen. … CONTINUED
BMW sends another Merry Christmas message, this time featuring St. Nick having some wintertime sliding fun in the all new 2011 BMW X3.
Automobile has published its first drive review of the all new 2011 BMW X3. As with most other reviews and first impressions, the 2011 X3 is considered a vast improvement upon the first generation X3. Automobile calls it swifter, more agile, and significantly more refined than its predecessor.
Still no accessories brochure available on the .co.uk site (dealer says they havent had any yet either) but you can download the brochure from the .com site (see copy attached)
I will order (will post prices when I hear from the dealer)
Titanium Grille (hopefully a DIY fit or it will be expensive)
Chrome Exhaust Trim (definatley a DIY push on fit)
Snap in adaptor for Blackberry
Ipod Cable
Thinking about interior chrome package … CONTINUED
Alpina GB have announced the release of 20" Wheels for the new X3…
More member's X3 test drive impressions have been posted. Lexxeech attended the 2011 X3 unveiling in Latvia, which was followed by his test drive. He has posted his review, photos, and test drive video.
Site member Palbay shares a great photo set of an assortment of 2011 X3 colors (mineral silver metallic, deep sea blue metallic, alpine white, space gray metallic) and against its direct competitors – the Q5, GLK, and RX300.
The all new 2011 X3 has hit dealer floors and are now available for test drives. The first member test drive reviews have started coming in and member T89 shares some great feedback from his test drive of the F25 X3 xDrive20d and xDrive35i. Read on inside…
The introduction of the 2nd edition of the BMW X3 is more than just an update of an "old" model, because the new X3 has clearly more to offer than its predecessor. In fact it's really in a class of its own. Everything is new, better, bigger and more beautiful.
We're delighted to welcome the latest addition to the BMW family, and – punctually for the official launch – we can already offer a wealth of AC Schnitzer wheel and tyre combinations and some further accessories.
Even the … CONTINUED
BMW has released this short promotional teaser of its first ever user-generated iAD to promote the launch of the all-new BMW X3. Details and clip inside.
Members are reporting that BMW X3s have started hitting US dealership floors this weekend, with some having their official launch events on Monday, November 15. If you haven't yet checked out the X3 in person, now's the time.
Palbay brings us some photos of the New 2011 X3 navigating the Off Road Course at the BMW Performance Center in Spartanburg. This also provide some good looks at some of the different colors the X3 is offered in.
MotorAuthority shares their first drive impressions of the 2011 BMW X3, calling it sturdy in feel, amazingly quick on its feet, and finally un-punishing on everyday roads.
BMWNA has launched the first-ever user-generated iAD to promote the launch of the all-new BMW X3. iAd is Apple's new mobile advertising network, reaching millions of iPhone and iPod touch users. The iAD's focus is on BMW's built-to-order program that allows customers to create an entirely customized BMW X3. The iAd, the primary mobile component of the X3's marketing campaign, allows an individual to go from dreaming about a new custom-built X3 to having it delivered to their driveway in just a few weeks.
The Los Angeles Auto Show will take place in two weeks (11/19-28) and two new BMW cars will be making their North American debuts – the all new 2011 BMW X3 and the BMW 6-series Coupe Concept. Also previewed will be BMW ConnectedDrive, which will showcase technology for integrating BlackBerry smartphones in the car, new Bluetooth interface technology created for the Apple iOS 4 operating system and allows the new Apple iPhone 4 to be integrated, among other devices. Also on show is the iPod … CONTINUED
Here is a great set of photos showing the 2011 X3 assembly process as well as photos of BMW's South Carolina Spartanburg plant after its $1 billion expansion to 1.2 million square feet.
Here are a series of new videos just released of the X3 xDrive35i and 20d in various environments and showing off new features. Just navigate to the Videos tab and then scroll down for the new videos and enjoy!
The US 2011 X3 configurator just went live! No word yet on the Canadian configurator yet, but just follow the attached link to the USA configurator and enjoy!


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ARCHOS Bluetooth Keyboard for iPad
Last summer we put Archos bold ARCHOS Gen 10 tablet through the GR meat grinder. It came out the other end a bit worse for the wear but otherwise was a solid product. Easily the standout feature on the Gen 10 was the creative yet blissfully simple detachable keyboard that doubled as a protective cover. It seems the cunning minds at ARCHOS realize they've captured a bit of lightning in the proverbial bottle.
Today ARCHOS has announced the Bluetooth Keyboard for iPad and it is wholly inspired by the Gen 10 tablet. The PR states a news division is responsible for this gem. This division will be focused on sharing ARCHOS designs with other brands. Well that's swell! Back the pad.
The Bluetooth Keyboard for iPad is noticeably thin. It's easily the thinnest iPad keyboard on the block at 0.2". Like the one on the Gen 10 it features an adjustable kickstand, magnetic bonding for easy quick coverage that remains in place. iPad will also turn on and off based on attaching or removing the keyboard. The battery life isn't outlined but is said to be "long" due to the keyboard's Bluetooth connection.
Shawn Sanders
Shawn loves gadgets, literature, history and games. For 10yrs+ he's straddled both the comic book & video game industries, as a writer, editor, marketing officer & producer. Shawn got his start in tech & games as an editor & Hardware Director for GameRevolution.com. More notable accomplishments include Executive Producer on mobile games Geometry Wars: Retro Evolved & The Shroud.


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Gang-Related News Articles
Check out the latest
National Gang Center
Welcome to the Gang-Related News Articles page. This page provides a list of articles pertaining to gangs and gang-related activities from various U.S. and Canadian news sources. A link to the source of each article is provided. The list of articles can be refined by date and limited to a specific state or Canadian province or territory using the control below.
City forbids suspected gang members from meeting in public (Escondido, CA): Police served dozens of suspected gang members with court orders forbidding them to congregate in public spaces, flash gang signs or wear certain clothes.
Source: KGTV 10 News Date: March 7, 2007
Proposals designed to crack down on growing gang violence (Tallahassee, FL): County authorities picked up lawmakers' support Wednesday in a bid to crack down on growing gang violence across Florida.
Source: The Ledger Date: March 7, 2007
Lawmakers pushing gang measures (Indiana): Indiana lawmakers are trying to get tougher on gangs. They've proposed a bill that changes the definition of a gang to a group of 3, instead of 5.
Source: South Bend Tribune Date: March 7, 2007
Gang members, allies beware: Tougher laws target activity (Bakersfield, CA): Think twice. That's the message Supervising Deputy District Attorney Michael J. Vendrasco is sharing with anyone who's thinking of joining a gang or even trying to help a gang member.
Source: The Bakersfield Californian Date: March 7, 2007
Graffiti: A reminder of a gang's presence (Visalia, CA): To some it's just an eyesore — letters on a wall behind a central Visalia apartment building. But to those who live daily with the problem of street gangs in their neighborhoods, the spray-painted letters - "NSVL" - carry a powerful message with life-and-death consequences.
Source: Visalia Times-Delta Date: March 6, 2007
Man slain on street was walking with son (Salinas, CA): A man gunned down in Salinas on Sunday was out walking with his 10-year-old son when someone ran up and began shooting, said police investigators.
Source: Monterey County Herald Date: March 6, 2007
A mayor cracks down on gangs (Los Angeles, CA): Mayor Antonio Villaraigosa introduced in February an aggressive initiative to combat the surge of gang-related violence in his city.
Source: CNN Date: March 6, 2007
Gang activity rattles Rondo library (St. Paul, MN): St. Paul neighborhood leaders said Monday they're worried that a suspected gang shooting last weekend put yet another stain on the new Rondo library, even though the confrontation happened more than a mile away.
Source: Pioneer Press Date: March 6, 2007
Suspected gang shooting leaves three injured near high school (Lake Worth, FL): Authorities on Tuesday were investigating possible gang ties to a shooting near Lake Worth High School that injured two teenagers and a 20-year-old man.
Source: The Herald-Tribune Date: March 6, 2007
Ice cream purchase leads to alleged gang-member arrest (Los Angeles, CA): Police Chief William J. Bratton today announced details of the arrest of a second member of the Los Angeles Police Department's list of the 10 most-wanted gang members -- the takedown of a murder suspect after he bought ice cream in Rosarito Beach, Mexico.
Source: Los Angeles Times Date: March 6, 2007
Gang member and associate arrested on drug charges (Monticello, NY): A Bronx man, who is a reputed member of the Bloods street gang, was arrested Monday by deputies from the Sullivan County Sheriff's Office and members of the US Marshals Service.
Source: Mid-Hudson News Date: March 6, 2007
L.A. Bridges anti-gang effort scrutinized (Los Angeles, CA): Los Angeles has spent $100 million over the last decade on a gang-prevention program, even though it doesn't track how many youths it keeps out of gangs and has been repeatedly criticized for not adequately coordinating with schools and police.
Source: Los Angeles Times Date: March 6, 2007
Schwarzenegger calls for coordinated attack on gangs (Monterey Park, CA): Gov. Arnold Schwarzenegger called Monday on mayors and law enforcement officials across California to join with him in forging a counterattack on street gangs blamed for much of the state's violent crime.
Source: Los Angeles Times Date: March 6, 2007
Shooting adds to gang violence wave (Pasadena, CA): A wave of violence continues to confound authorities this week as a gang "peace rally" Saturday was followed hours later by the sixth gang-related shooting this year, leaving a man wounded in the leg.
Source: Whittier Daily News Date: March 5, 2007
New battle against gangs (Cleveland, OH): A violent gang that terrorized a Cleveland neighborhood for years has lost its stronghold, and residents feel optimistic for the first time in years.
Source: The Plain Dealer Date: March 5, 2007
Cities are answering the scrawl (Los Angeles, CA): The 15-year-old boy who scrawled graffiti on the window of a bus carrying Mayor Antonio Villaraigosa made headlines because he was photographed in the act.
Source: Los Angeles Times Date: March 5, 2007
Five charged in stabbing of cop outside Lincoln Park bar (Chicago, IL): Five men have been charged with the stabbing and beating of an off-duty police officer outside a Lincoln Park bar early Sunday.
Source: WLS 7 News Date: March 5, 2007
Gangs go online, with cops in pursuit (San Diego County, CA): When a San Marcos gang member was shot in a drive-by, it didn't take long for threats of retaliation to hit MySpace.
Source: The San Diego Union-Tribune Date: March 5, 2007
Bills would close gang loopholes (Lancaster, CA): A crime-bill package announced by Republican state lawmakers last week includes provisions that its proponents say would close legal loopholes allowing criminal street gangs to exploit the juvenile justice system.
Source: The Daily News of Los Angeles Date: March 4, 2007
Virginia Beach gangs up on gang activities (Virginia Beach, VA): For the past year, the Virginia Beach Gang Strategy Task Force has worked on a plan to curtail growing gang activity.
Source: The Virginian-Pilot Date: March 4, 2007
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text:
A solid immersion lens integrated on a flexible support such as a cantilever or membrane is described, together with a method of forming the integrated structure.
1. A supported solid immersion lens for use in a near field optical scanning system comprising:
a thin flexible silicon or silicon nitride support, and
a silicon or silicon nitride solid immersion lens having a curved surface and integral tip integral with the flexible support for focusing incident optical radiation to a point opposite the curved surface.
2. A method of performing lithography on photoresist on the surface of a substrate comprising the steps of:
bringing an array of the supported solid immersion lenses as recited in
controlling the distance between the tips and substrate surface so that the surface is within the near field distance of light emerging from the tips, and
scanning the surface relative to the tips while applying light intermittently to the solid immersion lens to expose a predetermined pattern of photoresist.
3. A supported solid immersion lens as in
4. A supported solid immersion lens as in
5. A supported solid immersion lens as in
6. A supported solid immersion lens as in
7. A supported solid immersion lens as in claims 1 or 3 in which the solid immersion lens is between 1 and 400 microns in diameter.
8. A supported solid immersion lens as in claims 1 or 3 in which the cantilever arm, the tip, and the solid immersion lens are formed by masking and etching steps.
9. A supported solid immersion lens as in
10. A supported solid immersion lens as in
11. A solid immersion lens as in
12. A method of performing lithography on a substrate using a layer of photoresist which comprises the steps of:
providing an array of the supported solid immersion lens as recited in
mounting on the substrate opposite the tips within the near field of light emerging from the ends of the tips,
moving the substrate and supported solid immersion lens relative to one another in first and second directions which are generally perpendicular to one another,
applying modulated light to each of said solid immersion lenses whereby to selectively illuminate pixels in selected lithographic patterns.
13. The method of
14. The method of
15. The method of
16. The method of
17. A near field optical scanning system for optically scanning an object comprising:
a flexible silicon or silicon nitride cantilever arm having a free end and a fixed end,
a solid immersion lens made of material having a high refractive index for focusing light onto an integral tip, said solid immersion lens and tip being formed integral with said flexible silicon or silicon nitride cantilever arm,
a light source for projecting light into said solid immersion lens whereby it emerges from the end of the tip, focused by the solid immersion lens,
means for holding the object opposite the tip within the near field of focused light emerging from the solid immersion lens, and
a scanner for moving the object relative to the tip whereby the emerging light scans the object.
18. A near field optical system as in
19. A near field optical scanning system as in
means for detecting the distance of the tip from the object,
a control system connected to the detection means and providing a distance control signal, and
means for altering the distance of the tip from the object in response to the control signal.
20. A near field optical scanning system as in
21. A near field optical system as in
22. A near field optical system as in
23. A near field optical scanning system as in
24. The near field optical scanning system of
25. An optical scanning system for scanning an object comprising:
a plurality of cantilevers formed in a wafer, each cantilever including:
a flexible cantilever arm having a free end and a fixed end,
an integral transparent tip comprising a sharp end and a solid immersion lens for focusing light into the sharp end of the tip, said tip carried at the free end of said cantilever arm with the sharp end extending perpendicular to the longitudinal axis of the cantilever arm,
an aperture at the sharp end of the tip,
a piezoelectric transducer means on said arm for positioning the free end of the arm to position the sharp end so that near field from the sharp end impinges on the object, and
means for controllably applying light to said solid immersion lens.
26. The optical scanning system as in
27. An optical scanning system as in
means for moving the object relative to the cantilevers to scan the surface of the object with the light.
28. The optical scanning system of
29. The optical scanning system as in
30. A cantilever for use in an optical scanner, the cantilever comprising:
a flexible cantilever member made of silicon or silicon nitride having a free end and a fixed end,
a solid immersion lens formed integral with and near the free end of the cantilever member, the solid immersion lens having a curved surface for receiving light and a tip opposite the curved surface for receiving light transiftted through the solid immersion lens.
31. The cantilever of
32. The cantilever of
33. The cantilever of
34. The cantilever of
35. A method of fabricating a solid immersion lens integrated with a cantilever, the method comprising the steps of:
forming a cavity in a layer of silicon material,
applying a layer of high refractive index material on the surface of said silicon layer to fill said cavity and form a layer on the surface of said first layer,
forming a tip in said high refractive index material on a side opposite said hemispherical cavity, and
etching away said first layer to release said high refractive index material to provide a cantilever with an integral solid immersion lens.
36. The method of fabricating a solid immersion lens integrated with a cantilever, as in
37. A method of fabricating a solid immersion lens integrated with a cantilever, the method comprising the steps of:
forming a cavity in a substrate layer to define a solid immersion lens,
filling said cavity and coating the surface of said substrate with a high refractive index material,
planarizing said high refractive index material to remove a conformal depression,
forming a tip in said high refractive index material on a side of said high refractive index material opposite said cavity,
removing part of said coating of high refractive index material to define a cantilever, and
etching said silicon substrate layer to release said cantilever and the solid immersion lens defined by said cavity.
38. The method of
39. The method of
40. The method of
applying a positive voltage to said tip,
contacting said tip to an insulating layer of an insulator-metal composite at ground potential, thereby oxidizing said metal at an apex of said tip.
41. The method of
conformally depositing a layer of silicon nitride over said tip,
selectively depositing a masking layer, keeping an apex of said tip free of said masking layer,
performing a timed etch to completely remove said silicon nitride and said metal at said apex of said tip, thereby creating an aperture at said apex.
42. The method of
depositing a protective layer over said tip,
planarizing said protective layer to expose the apex of said tip,
etching said metal at said apex of said tip, thereby creating an aperture at said apex.
43. The method of fabricating a solid immersion lens and tip integrated with a cantilever which comprises:
forming a layer of high refractive index material,
forming a lens shaped member of material which resists etching on the surface of said layer,
etching the layer whereby to transfer the lens shape to the high refractive index material,
forming a tip-shaped member of material which resists etching on the surface of the high refractive index material opposite the transferred lens shape etching the layer whereby to form at tip, and
selectively etching the high refractive index material to define a cantilever with the lens at one end of the cantilever.
This application claims priority to Provisional Application Ser. No. 60/104,901 filed Oct. 20, 1998.
This invention was made with Government support under Contract Nos. JSEP/ONR N00014-91-J-1050 awarded by the United States Department of the Navy, and Department of Energy Contract No. DEFG03-90ER14157. The Government has certain rights to this invention.
This invention relates generally to a scanning system employing near field optics, and more particularly to a system which includes solid immersion lenses mounted on cantilevers and to methods of fabricating the cantilevers with integral solid immersion lens.
Near field optical scanning has in recent years been applied to optical imaging, magneto-optic (MO) storage and lithography. In near field optical scanning, light pixels of sub-wavelength dimensions are achieved by scanning an aperture of sub-wavelength dimensions or by scanning a solid immersion lens very close to a sample.
A photolithography system employing near field optics is described in U.S. Pat. No. 5,517,280 which is incorporated herein in its entirety by reference. The photolithography system described in the '280 patent includes an array of cantilevers, preferably formed in a silicon wafer. Each cantilever includes a transparent pyramidical or conical tip located near the free end of the cantilever.
The array of cantilevers is positioned adjacent a wafer which is to be lithographed, in the manner of an atomic force microscope operating in the attractive mode. Each cantilever is a compound structure, including a thick portion and a thin portion, the latter having a preselected mechanical resonant frequency. The cantilevers are caused to vibrate at their resonant frequency and the actual frequency of vibration is detected and used to maintain a uniform spacing between the tip of the cantilever and the surface of a photoresist layer which is to be exposed. Both the vibrational motion and the control of the tip-photoresist spacing are effected by means of a capacitive plate located adjacent the cantilever.
The cantilever array is scanned over a photoresist layer on the wafer, preferably in a raster pattern, and the individual light switches are operated so as to expose individual pixels on the photoresist layer to pattern the photoresist.
Another approach for high resolution lithography, optical microscopy or MO storage is to use near field optical imaging techniques for forming the spot or pixel. In near field optical imaging techniques, a sharp tip (usually an optical fiber) is raster scanned across a surface and is used to collect or deliver light. With sharp tips, resolutions of 12 nm have been obtained. These fibers are typically made by stretching and heating an optical fiber to narrow it and then cleaving it. The tapered tip of the fiber is then coated with metal (to prevent light from leaking out the sides) except at the very end of the tip to form an aperture.
Tapered fibers do not propagate waves in the region where the diameter of the waveguide is less than approximately λ/2n where n is the refractive index of the fiber, so in this tapered region the waveguide is cut off and the losses are exponential with distance. Hence, optical fiber probes with 100 nm apertures typically have transmission efficiencies of 10−5 to 10−6. Thus, tapered optical fiber probes typically have very poor efficiency, making them unsuitable for high speed lithography, scanned imaging, microscopy or optical storage. Furthermore, the probes are usually manufactured singly and are difficult to integrate into arrays, which prevents their use for parallel imaging, lithography or optical storage.
An enhancement of the near-field technique involves the addition of a solid immersion lens (SIL) to the optical system. The use of an SIL in a lithographic application has been discussed by T. R. Corle, G. S. Kino, and S. M. Mansfield in U.S. Pat. No. 5,121,256 (issued Jun. 9, 1992). The SIL in that arrangement has a hemispherical surface on one side of the lens to improve the coupling of light into the lens, and a flat surface on an opposing side of the lens facing the sample. Evanescent fields just outside the flat surface of the SIL improve the resolution by a factor of 1/nSIL, where nSIL is the index of refraction of the material from which the lens was made. For typical materials, nSIL=1 to 2.5, so that a microlithography system which was capable of 0.5 μm resolution will be capable of 0.2 to 0.25 μm resolution with an SIL.
Solid immersion lenses may be used in applications other than lithography. The addition of an SIL to a microscopic imaging system has been described by G. S. Kino and S. M. Mansfield in U.S. Pat. No. 5,004,307 (issued Apr. 2, 1991). The addition of an SIL to an optical recording system has been disclosed by T. R. Corle, G. S. Kino, and S. M. Mansfield in U.S. Pat. No. 5,125,750 (issued Jun. 30, 1992).
It is an object of the present invention to provide an optical scanning system which includes one or more cantilevers. Each cantilever includes a tip near its free end which comprises a solid immersion lens and a conical or pyramidical tip which may be sharp or flat at its end. The tip efficiently guides impinging electromagnetic energy to the aperture. The electromagnetic energy can be in the form of ultraviolet (UV), infrared or visible light. The light impinging on the tip is digitally controlled whereby to form pixels on an associated surface for lithography, storage or microscopy. In operation, the tip of the cantilever(s) is brought very close to the surface to be scanned and the tips and surface are moved relative to one another whereby to scan a plurality of electromagnetic pixels or spots on the surface. A feedback control controls the distance between the surface and the tip to assure that the tip is operated in the near field mode.
It is a general object of the present invention to provide a cantilever with a tip including a solid immersion lens with a conical or pyramidical tip and to a method of fabrication.
It is another object of the present invention to provide an array of tips with optical near field apertures integrated on cantilevers and to a method of fabrication.
It is a further object of the present invention to provide a method of fabricating extremely small lenses of a few microns diameter for use in multiple lens arrays.
It is another object of the present invention to provide an extremely small aspheric solid immersion lens and to a method of fabrication.
The foregoing and other objects of the invention are achieved by a method of micromachining a solid immersion lens using chemical and plasma etching techniques. The micromachining method is extended to provide a cantilever or array of cantilevers each with a solid immersion lens at the tip. The invention also includes incorporating an array of such cantilevers into an optical scanning system.
The fabrication and operation of a solid immersion lens, cantilever and optical scanning system in accordance with this invention will be more clearly understood by reference to the following drawings in which:
FIG. 1 is a block diagram of a control system for controlling the position of a tip on a single cantilever with respect to an object.
FIG. 2 is a perspective view of a cantilever with solid immersion lens in accordance with the invention.
FIG. 3, is a cross-sectional view of the cantilever of FIG. 2.
FIG. 4 is a top plan view of a wafer including a plurality of cantilevers.
FIG. 5 is an enlarged view of the free end of the cantilever showing the tip.
FIG. 6 shows a solid immersion lens with a beam focused into a wide angle tip.
FIG. 7 shows a hemispherical solid immersion lens with a beam focused into a small tip.
FIG. 8 is an enlarged view of a hemispherical solid immersion lens and an objective lens.
FIG. 9 is an enlarged view of an aplanatic focused solid immersion lens.
FIGS. 10A-10C show the point spread functions for solid immersion lenses of three diameters.
FIGS. 11.1-11.14 illustrate the cavity method of forming a cantilever with solid immersion lens tip.
FIGS. 12.1-12.13 illustrate the reflow method of forming a cantilever with solid immersion lens tip.
FIG. 13 is a block diagram of another system for controlling the cantilevers.
FIGS. 14.1-14.4 show the final steps of forming a membrane supported solid immersion lens tip.
FIG. 15 is a top plan view of the membrane supported solid immersion lens tip.
It will become apparent that the micromachined solid immersion lens and cantilever support of the present invention are useful in photolithography systems, optical scanning microscope systems, magneto-optic information storage and retrieval systems, etc. To better appreciate the invention, a lithography system employing the invention is first generally described. The system includes an array of cantilevers with each cantilever in the array having a tip integrated into the end of the cantilever which is typically made of the same material as the cantilever, such as silicon for infrared use or SiN for use in the ultraviolet or optical range. The tip includes a solid immersion lens and preferably a tip such as a pyramidical or conical tip. During the exposure process, the tip is maintained close to the substrate. The tip to sample distance is controlled by an optical lever deflection system. During exposure the sample is scanned by a scanning stage, and the light intensity at each lens is modulated so that a desired pixel pattern is exposed. The basic system, the cantilevers, and the cantilever array are schematically shown in FIGS. 1-5.
Referring to the Figures, cantilever 11 extends from the body 12 with its end 13 spaced from a sample or wafer 14 which is to be illuminated with the near field projecting from the end of the pyramidical tip 18 integral with solid immersion lens 19. The tip may be coated with a metal coating 21 of aluminum or titanium to form a small aperture 16. The aperture can be on the order of 50 nm in diameter. However, such a coating is not usually required. The beam passing through the SIL is focused on the tip 17, which is chosen to have a wide enough angle so that the beam does not hit its sides, as shown in FIG. 6. For a large numerical aperture of 0.8 or 0.9, this implies a taper with a half angle of 65� or more, as shown already for macroscopic machined lenses by Ghislain et al. [L. P. Ghislain, V. B. Elings, K. B. Crozier, S. R. Manalis, S. C. Minne, K. Wilder, G. S. Kino, and C. F. Quate, "Near-field photolithography with a solid immersion lens", Appl. Phys. Lett., 74(4), 501 (1999).]. The end of the tip typically has a radius of the order of 500 nm. This small radius enables the tip to be placed very close to even a rough surface and to be scanned in close proximity to an integrated circuit in which topography is not flat. However, the radius is chosen to be much larger than that typically used in a near-field scanning optical microscope (NSOM). This has the advantage that the tip does not get as easily damaged as in an NSOM and lasts for a time many orders of magnitude longer than does an NSOM tip. It is not always easy to micromachine such a wide angle tip as that illustrated in FIG. 6. Instead, it is adequate only to have the tip very small near its end. As an example, a configuration which is very simple to manufacture is illustrated in FIG. 7. In this case, the tip 17 a is made in the same way as will be described for the SIL, and can be spherical in shape, but much smaller than the SIL. Since the SIL is only a few micrometers in diameter, the tip will be extremely small, of the order of 1 μm or less in diameter.
The sample is scanned by a suitable scanning stage such as a piezoelectric motion control stage 22. A collimated light beam 23 impinges upon an objective lens 24 and is focused onto the solid immersion lens 19. The light may for example be modulated by controlling the deflection of a micromachined mirror 26 associated with each of the cantilevers. That is the light may be directed into the lenses 24 or deflected as shown by dotted rays 27. By controlling the motion of the stage 22, and the modulation of the light beam 23, a selected pattern of light pixels are formed on the sample. In the case of photolithography, this forms the appropriate resist pattern. The light beam applied to each solid inmmersion lens in an array may be modulated by a micromachined mirror assembly such as sold by Texas Instruments, Inc., Dallas, Tex., under the name "Digital Micromirror Device".
The distance between the tip and the surface is maintained by a feedback cantilever bending system. Such control systems are well known and described in conjunction with atomic force microscopes, U.S. Pat. No. 5,883,705, near field scanning optical and ion microscopes, U.S. Pat. No. 5,354,985, and lithography systems employing cantilevers, U.S. Pat. No. 5,666,190, all of which patents are incorporated herein by reference. Referring to FIG. 1, cantilever 11 includes a piezoresistor (not shown) whose terminal are connected to lines 31 and 32. Lines 31 and 32 lead to a bridge circuit 33, which has terminals connected between a voltage V and ground, respectively. The remaining terminals V1, V2, of bridge circuit 33 are connected via lines 36 and 37 and to a controller 38.
Bridge circuit 33 is used to detect the resistance of the piezoresistor within cantilever 11. Assuming that the resistance of the piezoresistor and each of the resistors in bridge circuit 33 is equal to R, V1=V2 when the cantilever is undeflected. When it is deflected so that the resistance of the piezoresistor becomes R+ΔR, the difference between V1 and V2 is expressed as follows:
Thus, as cantilever 11 vibrates, the voltage difference V1−V2 oscillates at the same frequency, and this differential voltage is used to detect the frequency at which cantilever 11 is vibrating. This signal is delivered to controller 38 via lines 36 and 37.
Cantilever 11 is positioned with its tip extremely close to a substrate 14 to be imaged. The top of the substrate may be coated with photoresist after lithography or may be a magneto-optic material covered with a transparent protective layer for optical storage. A gap g, which is less than the diameter of the aperture, separates the tip from the surface of the wafer 14.
Piezoelectric actuator 39 is positioned on cantilever 11. Controller 38 delivers an AC signal to the actuator 39 that causes the outer portion of cantilever 11 (i.e. the "vibrating" section) to vibrate.
As the gap g varies, the resonant frequency of cantilever 11 also varies due to variations in the attractive forces between the tip of cantilever 11 and wafer 14. Using the output of bridge circuit 38, a rectifier (not shown) within controller 33 converts the vibrational frequency of cantilever 11 into a DC voltage, and a comparator (not shown) within controller 38 compares the DC voltage to a known reference voltage. The difference between these voltages constitutes an error voltage, and controller 38 sends a corresponding DC error signal over line 41 to piezoelectric actuator 39. This causes the cantilever to flex. Cantilever 11 continues to flex until the gap g is adjusted to the proper level, indicating the correct spacing for proper exposure of the photoresist on the surface of wafer 14. The signal sent by controller 38 over line 41 is an AC-DC signal, the AC component causing cantilever 11 to vibrate, and the DC component representing an error signal which adjusts the bending of cantilever 11.
Controller 38 actuates the piezoelectric scanning stage 22 via a line 43, causing wafer 14 to oscillate back and forth, and to step across the tip 18. The combined oscillatory and stepping motion creates a raster scanning pattern.
Controller 38 controls the light input to cantilever 11 by providing a signal over line 44 to scanning mirror 26, which controls the light applied to the solid immersion lens. The operation of the mirror 26 is coordinated with the movement of the scanning stage 22, in a known manner, so that each pixel on the surface of wafer 14 is either exposed or not exposed, as necessary to create the desired photolithographic pattern on the photoresist coating the surface of wafer 14. It is apparent that a similar system can be used for magneto-optic recording or for optical microscopy.
The resolution of any system depends upon the spot size of the light which strikes the surface. The spot or pixel size in an optical imaging, magneto-optic storage or lithography system is given by the diffraction limit to be approximately λ/2 NA. This is the distance between half power points when light of wavelength λ is focused by an optical system of numerical aperture NA. Therefore the resolution may be improved by reducing the wavelength or by increasing the numerical aperture. The numerical aperture (NA) is given by nsin θ0, where n is the refractive index of the material and θ is the half angle that the light beam subtends at the focal point. The Solid Immersion Lens (SIL) improves the resolution of an imaging, lithography or data storage system by increasing the refractive index of the material into which the light is focused. For example, in the case of a silicon nitride SIL, the refractive index is approximately 2.0 (compared to n=1.0 for air), so that the spot size is decreased by a factor of 2.0.
In the foregoing example, the SIL 19 was placed between the objective lens 24 and the sample of interest. In FIGS. 8 and 9, two types of SILs in which the SIL lens surfaces are spherical are shown. For the hemisphere SIL, FIG. 8, the center of the sphere is at the focal point of the objective. Therefore, rays enter the SIL along its radii and converge at its center. As discussed earlier, the effective numerical aperture of the lens system is increased by a factor of n, the refractive index of the lens material. The system is a near field system because normally the large angle rays are totally internally reflected at the lower surface of the SIL and the fields associated with these rays fall off with distance from this surface. Hence the gap between the surface and the substrate must be very small, on the order of 50 nm.
The second form of the SIL shown in FIG. 9 makes use of aplanatic focusing into the sphere of radius a. The incident beam is focused to a point a distance na from the center of the sphere and due to refraction at the surface of the SIL, perfect focus is obtained inside the SWL at a point a distance a/n from the center of the spherical surface. Therefore, the numerical aperture of the system is increased by n2, allowing the use of a relatively low aperture objective. The input beam must be incident on the SIL at a point on the spherical surface above the focal point on the sphere where the angle θT to the axis of the refracted ray is π/2. Thus, the maximum angle of incidence θi is given by sin θi=1/n and the maximum effective numerical aperture that can be obtained is NAeff=n.
A third form of the SIL is when the curved surface of the lens is of an aspheric shape. If the shape of the SIL is chosen to be elliptical in shape, then it is not necessary to use an objective lens 24. The SIL focuses a parallel input beam, removing the spacing tolerance between the objective lens and the SIL. Alternatively, a weakly focused beam from a low aperture objective can be used with the correct shape of aspheric lens.
To summarize, in all three forms of the SIL, the spot size (here defined as the distance between half power points) is given by λ/2 NAeff. For the hemisphere SIL, NAeff=n sin θ. For the supersphere, NAeff=n2 sin θ and the maximum NAeff is n. For the asphere, with the shape chosen to be elliptical and to focus a parallel beam, the
Further improvements to the resolution can be made by coating the bottom surface of the pyramid 18 with an optically opaque film (e.g. a metal) that has a small aperture 16 at the focal point. The spot size will then be approximately equal to the size of the aperture, as long as the sample is very close. to the aperture, usually less than the diameter. The conventional diffraction limit does not apply here because in this case the sample is in the optical near field of the aperture (i.e. it is very close to it).
In the present invention, the SIL is formed by micromachining techniques. It is monolithically integrated with a cantilever. By shrinking the size of the SWL through the use of micromachining, lens aberrations are significantly reduced. For a π/2 wave aberration, the tolerance on the length of the hemisphere SIL is given by
The ratio of the length tolerance Δzmax to the radius of the lens a is therefore proportional to 1/a. Hence by decreasing the radius a, the length tolerance will be easier to satisfy (S. M. Mansfield, "Solid Immersion Microscopy", PhD Dissertation, Department of Applied Physics, Stanford University (March 1992)).
In the case of the supersphere SIL, the length tolerance is given by the approximate formula:
This shows that the length tolerance remains the same in value as the lens is scaled in size. Hence for a smaller lens, the length tolerance Δzmax represents a larger proportion of the radius of the lens and hence is easier to satisfy.
As a further example of the advantages of using microlenses for eliminating aberrations, we have calculated with the optical design program ZEMAX the point spread function (PSF) of an imperfect hemispherical lens. We took the lens to be a hemisphere of radius a minus a parabola, r=0.04z 2. The calculated point spread functions (PSFs) for three different values of the hemisphere radius a, 3.5 μm, 35 μm and 3.5 mm, with λ=325 nm and n=2, are shown in FIGS. 10A-10C. It will be seen that the PSF of the smallest lens has very low sidelobes, but as the radius of the hemisphere is increased, the sidelobes get worse. With the largest lens, the effect of the nonsphericity is to ruin the PSF. Furthermore, we observe that even though the lens is nonspherical, aberrations are negligible. We conclude that the requirement for a perfect spherical shape becomes less critical as the lens size is reduced to the microscopic dimensions of the order of a few microns proposed here.
Because the dimensions of the SIL cantilever are small, the cantilever has superior performance: higher resonance frequency, lower spring constant and the ability to operate the cantilever in tapping mode. The small size of SIL cantilevers allows them to be integrated into parallel array as schematically illustrated in FIG. 4. Parallel arrays of SIL cantilevers allow imaging, lithography and data storage to be done faster than with a single SIL cantilever.
Two method are proposed for photolithographically fabricating by chemical etching SILs from deposited films or the bulk substrates. The fabrication approaches, called the cavity method and the reflow method, differ mainly in the formation of the lens surface. The cavity method involves making a mold (e.g. on low-temperature oxide (LTO) which has the desired shape and then depositing the lens material onto the mold. The reflow method involves patterning a film (e.g. photoresist) on top of the lens material into the desired shape and then transferring the shape by etching into the underlying lens material.
The cavity fabrication process used for the SIL cantilevers can be used to make hemisphere, supersphere or aspheric SILs. The process can be used to make SILs of any material that can be deposited and etched. The basic process involves etching a cavity into which the lens material is deposited, etching the tip and cantilever and then releasing the cantilever so that it is freestanding.
FIGS. 11.1 through 11.14 show the steps for forming a cantilever 11 with integral tip 17 which includes a pyramidical tip 18 and SIL 19. The starting material is a silicon wafer 51. Because the process for the hemisphere SIL includes later planarization steps (steps 11.6 and 11.7), it is necessary to etch alignment marks 53 into the silicon (step 11.1). The second step is to deposit by low pressure chemical vapor deposition (LPCVD) a film of low temperature oxide (LTO) 52 on wafer 51. Following this, a film 54 of polysilicon is deposited by LPCVD (step 11.3). Pinholes 56 are then etched in the polysilicon film (step 11.4) by masking 55 and plasma etching. In step 11.5, the wafer is immetsed in diluted hydrofluoric acid (HF), allowing the LTO to be etched by the HF through the pinhole. If the etch is isotropic (i.e. the same rate in all directions), then a hemispherical cavity 57 will result if the pinhole is narrow compared to the final diameter of the cavity. Therefore the pinhole should be made as small as the lithographic technique will allow. Steps 11.6 and 11.7 are used for making a hemisphere SIL. If a supersphere SIL is being made, then steps 11.6 and 11.7 should be omitted. In step 11.6, the film 54 of step 11.5 is removed by plasma etching or wet (chemical) etching. In step 11.7, the wafer is immersed in hydrofluoric acid which etches the LTO isotropically. Therefore, the radius of curvature of the spherical depression is increased, but the height of the depression remains the same. Hence, the depression is no longer a hemisphere, i.e. the center of the sphere is actually at a point above the top surface of the LTO. In step 11.8, the lens material 59 is deposited. This could for example be silicon nitride deposited by plasma enhanced chemical vapor deposition (PECVD). For the applications of imaging, lithography and data storage, it is desirable that the SIL be able to transmit light with good efficiency at UV wavelengths. For silicon nitride deposited by PECVD, the deposition should be made ammonia rich to ensure good UV transparency (Kiermasz and Beekman, "Plasma CVD of Silicon Nitride: Process Design for Increased Flexibility", Semiconductor International, vol. 13, no. 7, June 1990, pp. 108-128). In step 11.9 the pyramidical tip 18 is defined by lithography to form mask 60, and in step 11.10 the tip is etched. In step 11.10, the process parameters of the etch should be chosen so that the etching is angular dependent. In the first part of the etching process, the photoresist circle or mask 60 serves as a mask and the result is a raised pedestal of silicon nitride. The photoresist is etched away itself during this process by the O2 in the plasma. During the next part of the etch, the comers of the pedestal become faceted, at an angle equal to that at which the etch rate is fastest. As the pedestal is etched further, it becomes a tip, with a half angle equal to that at which the etch rate is fastest. For etching silicon nitride with CHF3+O2, it has been documented that, by varying the flow rates of the gases and the pressure, the maximum etch rate angle can be varied (A. M. Barklund and H. O. Blom, "Influence of different etching mechanisms on the angular dependence of silicon nitride etching", J. Vac. Sci. Tech., A 11(4), Jul/Aug 1993). The etch is timed to leave the desired cantilever thickness 61 of silicon nitride. In step 11.11 the cantilevers are defined by photolithography 62 and etched. Step 11.12 involves spinning on a thick layer of polyimide 63 to protect the front side. Step, 11.13 involves lithography on the backside of the wafers, followed by etching in ethylene diamine pyrocatechol (EDP) to release the cantilever. The wafer is immersed in hydrofluoric acid to remove the LTO. In step 11.14, the polyimide is removed by dry etching (oxygen plasma). This leaves the cantilever 11 with integral solid immersion lens and tip supported by the body 12.
There are several ways in which the process described above may be modified. One would be to use a SOI wafer. Also, instead of LTO, any other material (amorphous or crystalline) for which isotropic etching is possible may be used. For example, silicon may be used. In this case, the etching would be done by a combination of acetic, hydrofluoric and nitric acids (HNA). Instead of using silicon nitride as the masking layer for the pinhole etch, a metal may be used. The SIL lens material may be another material that is possible to deposit in a thin film instead of silicon nitride. For example, silicon dioxide, polysilicon, silicon oxynitride, germanium, strontium titanate, lead sulfide and gallium phosphide. A separate series of steps may be added if it is desired that the cantilever be made of a different material to the SIL lens. Instead of using EDP. to release the cantilever, potassium hydroxide (KOH) or tetramethyl ammonium hydroxide (TMAH) may be used.
As described above, another method of forming the SIL in a cantilever is the reflow process. The reflow method uses the curved surface formed by reflowing photoresist to create the SIL or other lens on a cantilever. Pillars or other shapes formed in photoresist are reflowed thermally or in an acetone vapor environment to form a mask for the lens. The SIL is formed on a lens material, which can be the bulk substrate or a deposited film, by transferring the mask into the lens material with reactive ion etching (RIE). The selectivity (lens material : photoresist) of the etch process and the reflow conditions can be used to control the shape of the lens. A thin film is deposited or grown to form an etch stop for a later step. The lens material with SILs is then bonded to a support wafer with pits etched to protect the lens by anodic or other bonding methods. The bulk of the lens wafer is removed, leaving a thin layer of the lens material in which the lens tip and cantilever will be formed. If the lenses are made in silicon on an SOI wafer, the bulk substrate and buried oxide layers are removed, leaving only the top silicon layer. If the lenses are made in SiN deposited on Si, the bulk Si is removed leaving only the SiN layer. Tips are then formed with RIE opposite the lens in the layer of lens material held by the support wafer. Deposition of an opaque layer and creation of an aperture on the tip would take place at this stage if apertures are desired. Next, the cantilevers are masked and etched into the lens material with RIE, stopping on the thin film or other etch stop previously deposited or grown on the lens material. Finally, the thin film or other etch stop is removed with wet or dry etching and the cantilevers held by the support wafer are released by backside etching, wafer sawing, or other method.
An example of the above described reflow method process flow is given in FIGS. 12.1-12.13 for the case of Si lens material and Pyrex support material. In step 12.1, pillars 64 of photoresist are defined by depositing a photoresist film or layer on a SOI wafer 66 and masking and etching. In step 12.2, the photoresist pillars are reflowed by heating or placing them in an acetone environment so that they reflow under surface tension to form the hemisphere 67, step 12.3. The hemisphere shape is then transferred to the lens material (either the bulk substrate or a deposited layer) by dry etching the film hemispheres and underlying lens material with predetermined etch rates and degree of anisotropy. For example, if the etch rate of the film is the same as that of the lens material, and the etching is completely anisotropic, the precise shape of the hemisphere will be transferred to the lens material. If the etch rates are not equal, the lenses will be aspheric after transfer. Variations in dry etching parameters allow control of the lens shapes. In step 12.4 a thermal oxide layer 68 is grown on the surface to serve as an etch stop for backside processing. A cantilever support structure 69 is separately fabricated as for example from Pyrex. In steps 12.5 and 12.6 the Pyrex wafer is patterned by applying and patterning a photoresist 71 and then etching pits 72. In step 12.7, the Pyrex wafer is anodically bonded to the SOI wafer step 12.7 and the bulk silicon and the buried oxide removed to expose the backside of the lens, step 12.8. The pyramidical lens tip is then formed by defining the tip with photoresist 73, step 12.9, and etching, step 12.10 to form tip 74. In steps 12.11 and 12.12 the cantilevers are defined by patterning photoresist 76 and etching using the thermal oxide 68 as an etch stop. Finally, the exposed thermal oxide 68 is etched away and the Pyrex sawed to provide the cantilever 11 with tip 13.
If the SIL tip is metal coated, the aperture at the end of the metal-coated SIL tip may be formed in a number of ways among which are: i) focussed ion beam milling (FIB), ii) oxidation, iii) dry etching of a conformal masking layer, and iv) photoresist etchback.
In the focused beam technique, the SIL tip is coated with metal. Then the FIB tool would be is used to selectively remove the metal from the end of the tip to form the aperture. The ability of the FIB tool to both image and remove materials allows the aperture to be aligned to the end of the pyramidical tip 18.
An optically transparent aperture at the end of the tip of the solid immersion lens may be formed by oxidizing the metal coating. This increases the optical transparency. Furthermore, the metal oxide formed may be soluble in chemicals in which the metal itself is not (e.g. CrO3 dissolves in water). Hence, oxidation of the metal may allow it to be selectively removed. In this method, a metal film is evaporated onto the pyramidical tip. Then the solid immersion lens cantilever is fitted into an AFM mechanism and the tip is brought into contact with a conducting sample, such as a heavily doped silicon wafer. The tip is biased positively (e.g. 12 V) for a sufficient time that the metal at the very end of the tip is oxidized. The force between the tip and the sample is controlled by the AFM mechanism to keep the tip and sample in contact, but is small enough to prevent the tip from being damaged. The humidity of the environment is controlled to allow the oxidation to proceed at the desired rate.
In the dry etching method, the tips are coated with the metal layer and then a conformal layer of silicon nitride is deposited. A protective layer of photoresist is then spun onto the tip to a thickness of approximately 1 μm. Following this, an anisotropic etch is performed and this step is timed so that the nitride will be etched at the apex of the tip to reveal the metal layer. This method relies on the curvature of the apex of the tip being less than at the sides of the tip. The smaller curvature of the tip means that the vertical thickness of the nitride will be less at the apex of the tip than on the sides. Hence, an anisotropic etch will etch through the nitride to the metal at the apex of the tip, but not all the way through at the sides of the tip. At the base of the tip, the curvature is smaller than at the sides, and hence these areas will need to be protected. The layer of photoresist will serve this purpose. Following the nitride etch, the next step is to etch the metal and the masking provided by the nitride layer will ensure that only the metal at the apex of the tip is etched.
The photoresist etchback differs from the second technique in that a protective layer of photoresist is spun on and baked and then etched anisotropically (e.g. oxygen plasma) so that the apexes of the tips protrude above the protective layer. The protruding metal is then etched away, thus forming the aperture. The final step is to strip away the protective layer.
Batch fabrication of micro-SILs with lithographic techniques will improve production efficiency, reduce lens aberrations, and enable integration onto scanning probes. In previous applications, SILs have been shaped with traditional lens-making techniques that are time consuming, labor intensive, and expensive. Microfabrication would enable hundreds of SILs to be made in parallel with precise and repeatable micromachining techniques. Lenses with diameters as small as 5 μm can be fabricated using standard lithographic tools, while mechanical grinding techniques have been used to make SILs down to only 1 mm. Micromachined lenses can be integrated onto MEMS structures such as scanning probes to create high-resolution tools for microscopy and other applications. An SIL fabricated on the end of an AFM could be scanned above the surface of a sample held within its near field, concentrating light on or collecting light from the sample. Such a device made of silicon or germanium, for instance, could be used for collecting light at near-infrared wavelengths. Similar SILs operating in the UV made of silicon nitride or SiO2, ZrO2 for instance, could be used for photolithography or microscopy, and SILs operating in the visible range or near UV made of glass, silica or zirconia could also be used for optical storage and microscopy.
As previously described, damage to the tip and sample are prevented by maintaining a gap between the tip and sample to prevent contact. The aperture-sample distance must be less than the wavelength of illuminating light source. Beyond this distance, diffraction effects would degrade the system resolution. A preferred method for maintaining the gap is based on the interference between light beams that is reflected at the base of the tip (i.e. at the silicon nitride—air interface) and light that is reflected by the sample. Referring to FIG. 13, the optical path length difference is equal to twice the aperture-sample distance. When the tip-sample distance is zero, there will be constructive interference and the intensity recorded by a photodetector 75 which detects these light beams will be a maximum. When the distance is equal to a quarter wavelength, the interference will be destructive and the detected intensity will be a minimum.
The signal generated by the interference pattern will be used as a feedback signal in a closed loop controller 77 to control the aperture-sampling spacing via the piezoelectric actuator 78. The actuator bends the cantilever in a response to an electrical signal and the piezoresistor 79 measures the strain, or force on the cantilever. The signal from the sensor is used in a feedback loop to the actuator to maintain constant force on the tip during the scanning operation. In the present example, the optical interference signal is used to drive the feedback loop to the actuator in such a way to control the tip-sample spacing at a constant level.
In the preferred embodiment described above, the solid immersion lens support has been described as an integrally formed cantilever. However, the processes described can be slightly modified to provide a solid immersion lens supported on an integral membrane. This membrane can be electrostatically deflected by applying voltages between the membrane and an adjacent surface. FIGS. 14.1-14.4 and 15 show the steps in forming a membrane-supported solid immersion lens. FIG. 14.1 shows the structure of FIG. 11. 10. The masking, FIG. 14.2, is such as to define a membrane rather than a cantilever. FIG. 14.3 shows the application of a protective polyimide coating 63. The structure is then masked and etched to form a support frame 81 and membrane 82 supporting a solid immersion lens and tip 83.
There has been described a solid immersion lens to focus light down to a small spot, flexibly supported by a cantilever or membrane, and a method of fabricating a cantilevered solid immersion lens of small diameter, on the order of a few micrometers. The definition between half power points is
where θ0 is the maximum ray angle at the focus, and n the refractive index.
For infrared use as an efficient thermal detector of temperature variations in integrated circuits, we consider as an example working at a wavelength of 5 μm with a silicon SIL, which has a refractive index of 3.4. With sin θ0=0.8, this gives a definition of d=0.92 μm.
For lithography in the near UV range, we consider the use of a nitrogen rich SiN lens to make it transparent at this wavelength. In this case, the attenuation of the light through the lens will be small and its refractive index about 1.9. So with sin θ0=0.8, we find that the spot size is d=107 nm at a wavelength of 325 nm. To decrease the spot size still further we can work at a shorter wavelength or use metal coating with a pinhole at the same wavelength. The advantage of using the SIL in this case is that the incident power density at the pinhole will already be high, and so the efficiency will be high unlike the near-field scanning optical microscope. The present formula for nitrogen rich SiN yields a lens which is transparent to 325 nm. By making the SiN still more nitrogen rich or by using silicon oxynitride, it should be possible to work at 244 or 266 nm wavelength. In this case, the refractive index would be about 1.8, and with sin θ0=0.8, the spot size would be 92 nm at a wavelength of 266 nm and 85 nm at a wavelength of 244 nm. Another possibility is to make the lens out of fused silica with a refractive index of 1.5. In this case, the spot size would be 102 nm at a wavelength of 244 nm.
In most cases the lens and tip are made of the same material as the cantilever. Thus, with the cavity method, SiN is deposited on the LTO, at the same time as the lens is being deposited in the cavity, to form the cantilever. For the Si lens, the silicon cantilever is formed at the same time. Likewise, in the reflow method the lens and cantilever are formed of the same material.
The foregoing descriptions of specific embodiments of the present invention are presented for the purposes of illustration and description. They are not intended to be exhaustive or to limit the invention to the precise forms disclosed; obviously many modifications and variations are possible in view of the above teachings. The embodiments were chosen and described in order to best explain the principles of the invention and its practical applications, to thereby enable others skilled in the art to best utilize the invention and various embodiments with various modifications as are suited to the particular use contemplated. It is intended that the scope of the invention be defined by the following claims and their equivalents.
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text:
A Very Korra ChristmasTwas the night before short light,A Very Korra Christmas by Jasiono
And Republic City was dark.
The apartments were lit up.
Candles burned with a spark.
Couples settled down in their bedrooms.
Lovers settled down in their bed.
Friends sat down around the coffee table
To share a pint of beer instead.
Now where, do you ask, is Korra and their gang?
And what is short light, are you mentally insane?
Well settle down children, and I'll tell you two tales.
One of Korra and her friends, and one of a gale.
Back, when the spirit world and physical were one,
A spirit of wind existed for fun.
As the year dragged on, he would scream across the land,
bringing in snow where there would be sand.
So humans, being smart,
Brought their fire inside.
They kept warm through the winter.
Their lives, they did hide.
And now, to remember those days,
they exchange gifts to the ones they hold dear
And to celebrate their ancient ways
We laugh, instead of Fear.
In Future Industries, two girls hold hands.
Sleeping soundly, a blanket on their lap,


text:
DNA from the 40,000-year-old bones of a modern human found in Europe contains Neanderthal genes.
Mobile Microbiome
June 26, 2014|
Cell phones are populated with many bacteria commonly found on users' hands.
June 26, 2014|
Cell phones are populated with many bacteria commonly found on users' hands.
June 23, 2014|
Determining which critters are present in an infected wound could aid in treatment, particularly of soldiers injured in combat.
June 23, 2014|
Fungi that digest wood in novel ways could fuel new avenues of research on cellulosic ethanol, and suggest a need to move beyond traditional classification systems.
June 23, 2014|
Starvation suspends cellular activity in C. elegans larvae and extends their lifespan.
June 12, 2014|
A study implicates the breaking up of bacterial biofilms on fatty plaques in arteries as causing stroke or heart attack following stress.
June 5, 2014|
A new plan to protect the Great Lakes from the invasive species is set in motion.
June 4, 2014|
A study documents boys with autism who were exposed to elevated levels of testosterone, cortisol, and other hormones in utero.
June 1, 2014|
Assistant Professor, Department of Food Science, Purdue University, Age: 32
June 1, 2014|
Meet the peptide-covered microcantilever device capable of differentiating subtypes of Salmonella.
June 1, 2014|
As rich sources of genetic diversity, the progenitors and kin of today's food crops hold great promise for improving production in agriculture's challenging future.


text:
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The application deadlines are determined by the individual programs. The following deadlines have been established:
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All trademarks are registered property of the University. Used by permission only.


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This plugin inserts pagination to your blog, archives and search results based on logarithmic calculation for a more evenly distributed link-juice.
A very interesting plugin, intelligent and not common. But presentation is not very sexy so it looses one star.
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16 Angel Crafts to Make: Homemade Christmas Ornaments & Decorations
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Swizzle Snowflake Mosaic Ornament
By: Dayton Allen for Diamond Tech
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Help the light glisten off your Christmas tree with this Swizzle Snowflake Mosaic Ornament from Diamond Tech. This colorful homemade Christmas decoration is a great way to add some color to your tree or liven up a packaged gift. You could even attach a photo to the center of the snowflake to make a lovely hanging frame for grandma or grandpa. The best thing about snowflakes is that they can be out on display for all to enjoy throughout the winter!
- 2 Wooden Snowflake Ornaments (Purchased at Local Craft Store)
- 1 pkg. Jennifer's Mosaics™ Glass Mirror Red
- 1 pkg. Jennifer's Mosaics™ Glass Mirror Green
- 1 pkg. Jennifer's Mosaics™ Glass Mirror Gold Tapestry
- 1 pkg. Jennifer's Mosaics™ Glass Mirror Silver or Silver Tapestry
- 1 Variety pkg. Jennifer's Mosaics™ Glass Wiggles
- Jennifer's Mosaics™ White Grout
- Jennifer's Mosaics™ Wheeled Glass Nippers
- E-6000® or any other mosaic adhesive
- Hot glue gun & glue stick
- 1 Sheet Foam Core
- Bowl
- Mixing Spoon or Small Plastic Spatula
- Soft Cloth
- 2 Cup Measure
To protect work area, cover with newspaper.
Collect all supplies needed for the project and place them on your work surface.
Place both snowflake panels on top of each other so that the branches of the snowflake are not overlapping.
Use a pencil and mark on the back panel all junctions were the snowflake branches meet the body. The area above the marks will be filled with mosaic pieces; the area below will not.
Work on one panel at a time. Start with the top facing panel. Place glass wiggles on the surface, arrange using the photo or to your desired liking. Glue into place using a small amount of adhesive.
Next, using a wheeled glass nipper, nip red, green and silver tapestry (or silver) mirror into small pieces.
Mosaic a small section at a time by applying adhesive to the back of the mirror and positioning it on the surface. Leave 1/8" space between each piece and from the edge of the snowflake. Use the image for placement and position mirror around wiggles to cover the surface of the top panel. Set aside and allow drying.
Working on the back snowflake panel, begin nipping the gold tapestry mirror into small pieces.
Work above the pencil marks on the back snowflake panel. Apply a small amount of adhesive to each piece of mirror and glue into place leaving 1/8" between mirror pieces and from the snowflake edge.
PLEASE NOTE: Leave center of the back panel free of any glass.
Allow both snowflake panels to dry, following the drying times recommended by the adhesive manufacturer.
When dry, pour 10 oz. of white grout into a mixing bowl. Adding a small amount of water at a time, mix with a plastic spoon or spatula until the grout reaches a thick "fudge" consistency. It is best to add small amounts of water at a time as you can always add more water, but you can't take it out! If grout becomes too watery, add more dry grout, a small amount at a time until the consistency is corrected.
Spread the grout into all of the spaces between the mirror and glass pieces, smoothing all inner and outer edges. Wait about 15 minutes for grout to set.
PLEASE NOTE: For the back panel, be sure to leave the center grout free to make room for the joint attachment.
Begin to wipe away the excess grout using a moist sponge. It is very important to remove any grout on the glass before grout is completely dry. Allow to set for 10 minutes.
Using the soft cloth, buff the glass on both panels to a shine. Allow 24 hours for the panels to dry thoroughly.
To create the center joint attachment, use foam core and cut two 2" circles. Glue together using a hot glue gun. If the ornament does not have a hole for hanging, insert a long ornament hook, wire or paper clip in between the two circles before gluing, for hanging purposes. Take the foam attachment and glue it to the center of the rear snowflake panel, allow drying.
Apply hot glue to the front of the 2" disk and press the top snowflake panel onto the disk. Make sure the branches of the snowflake offset to the branches of the rear snowflake panel. Allow to dry.
- Hang to add sparkle and glitz to your holiday gatherings.
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