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Amine functionalization by initiated chemical vapor deposition (iCVD) for interfacial adhesion and film cohesion
E-Print Network [OSTI]
Amine functional polymer thin films provide a versatile platform for subsequent functionalization because of their diverse reactivity. Initiated chemical vapor deposition (iCVD) is a polymer chemical vapor deposition ...
Xu, Jingjing, Ph. D. Massachusetts Institute of Technology
Method and apparatus for removing and preventing window deposition during photochemical vapor deposition (photo-CVD) processes
DOE Patents [OSTI]
Unwanted build-up of the film deposited on the transparent light-transmitting window of a photochemical vacuum deposition (photo-CVD) chamber is eliminated by flowing an etchant into the part of the photolysis region in the chamber immediately adjacent the window and remote from the substrate and from the process gas inlet. The respective flows of the etchant and the process gas are balanced to confine the etchant reaction to the part of the photolysis region proximate to the window and remote from the substrate. The etchant is preferably one that etches film deposit on the window, does not etch or affect the window itself, and does not produce reaction by-products that are deleterious to either the desired film deposited on the substrate or to the photolysis reaction adjacent the substrate. 3 figs.
Tsuo, S.; Langford, A.A.
Unwanted build-up of the film deposited on the transparent light-transmitting window of a photochemical vacuum deposition (photo-CVD) chamber is eliminated by flowing an etchant into the part of the photolysis region in the chamber immediately adjacent the window and remote from the substrate and from the process gas inlet. The respective flows of the etchant and the process gas are balanced to confine the etchant reaction to the part of the photolysis region proximate to the window and remote from the substrate. The etchant is preferably one that etches film deposit on the window, does not etch or affect the window itself, and does not produce reaction by-products that are deleterious to either the desired film deposited on the substrate or to the photolysis reaction adjacent the substrate.
Tsuo, Simon (Lakewood, CO); Langford, Alison A. (Boulder, CO)
Chemical vapor deposition of mullite coatings
This invention is directed to the creation of crystalline mullite coatings having uniform microstructure by chemical vapor deposition (CVD). The process comprises the steps of establishing a flow of reactants which will yield mullite in a CVD reactor, and depositing a crystalline coating from the reactant flow. The process will yield crystalline coatings which are dense and of uniform thickness.
Sarin, Vinod (Lexington, MA); Mulpuri, Rao (Boston, MA)
Chemical vapor deposition of antimicrobial polymer coatings
There is large and growing interest in making a wide variety of materials and surfaces antimicrobial. Initiated chemical vapor deposition (iCVD), a solventless low-temperature process, is used to form thin films of polymers ...
Martin, Tyler Philip, 1977-
Chemical vapor deposition of epitaxial silicon
A single chamber continuous chemical vapor deposition (CVD) reactor is described for depositing continuously on flat substrates, for example, epitaxial layers of semiconductor materials. The single chamber reactor is formed into three separate zones by baffles or tubes carrying chemical source material and a carrier gas in one gas stream and hydrogen gas in the other stream without interaction while the wafers are heated to deposition temperature. Diffusion of the two gas streams on heated wafers effects the epitaxial deposition in the intermediate zone and the wafers are cooled in the final zone by coolant gases. A CVD reactor for batch processing is also described embodying the deposition principles of the continuous reactor.
Berkman, Samuel (Florham Park, NJ)
Oxidative chemical vapor deposition of conductive polymers for use in novel photovoltaic device architectures
The conductive polymer poly(3,4-ethylenedioxythiophene), (PEDOT), deposited via oxidative chemical vapor deposition (oCVD) has been investigated for use in organic electronic devices. The oCVD process as well as the ...
Howden, Rachel M. (Rachel Mary)
CVD CNT CNT (Vapor-grown carbon fiber, VGCF)
CNT CNT CVD CNT CNT (Vapor-grown carbon fiber, VGCF) 10001300 CNT CVD Smalley CO 24 CCVD 1 #12; 27 mm 3% 200 sccm 800 10 10 Torr 300 sccm Ethanol tank Hot bath boat Ar/H2 Ar or Ethanol tank Hot bath Ethanol tank Hot bath Pressure gauge Maindraintube Subdraintube
Maruyama, Shigeo
Initiated chemical vapor deposition of functional polyacrylic thin films
Initiated chemical vapor deposition (iCVD) was explored as a novel method for synthesis of functional polyacrylic thin films. The process introduces a peroxide initiator, which can be decomposed at low temperatures (<200?C) ...
Mao, Yu, 1975-
Enabling integration of vapor-deposited polymer thin films
Initiated Chemical Vapor Deposition (iCVD) is a versatile, one-step process for synthesizing conformal and functional polymer thin films on a variety of substrates. This thesis emphasizes the development of tools to further ...
Petruczok, Christy D. (Christy Danielle)
Synthesis and Characterization of Magnetic Nanowires Prepared by Chemical Vapor Deposition.
??Various metal silicide and germanide magnetic nanowires were synthesized using a home-built CVD [chemical vapor deposition] system. The morphology, composition, and magnetic properties of the� (more)
Tang, Siwei
Initiated chemical vapor deposition of polymeric thin films : mechanism and applications
Initiated chemical vapor deposition (iCVD) is a novel technique for depositing polymeric thin films. It is able to deposit thin films of application-specific polymers in one step without using any solvents. Its uniqueness ...
Chan, Kelvin, Ph. D. Massachusetts Institute of Technology
Unusual thermopower of inhomogeneous graphene grown by chemical vapor deposition
SciTech Connect (OSTI)
We report on thermopower (TEP) and resistance measurements of inhomogeneous graphene grown by chemical vapor deposition (CVD). Unlike the conventional resistance of pristine graphene, the gate-dependent TEP shows a large electron-hole asymmetry. This can be accounted for by inhomogeneity of the CVD-graphene where individual graphene regions contribute with different TEPs. At the high magnetic field and low temperature, the TEP has large fluctuations near the Dirac point associated with the disorder in the CVD-graphene. TEP measurements reveal additional characteristics of CVD-graphene, which are difficult to obtain from the measurement of resistance alone.
Nam, Youngwoo, E-mail: email@example.com [Department of Physics and Astronomy, Seoul National University, Seoul 151-747 (Korea, Republic of); Department of Microtechnology and Nanoscience, Chalmers University of Technology, SE-412 96 Gothenburg (Sweden); Sun, Jie; Lindvall, Niclas; Yurgens, August [Department of Microtechnology and Nanoscience, Chalmers University of Technology, SE-412 96 Gothenburg (Sweden); Jae Yang, Seung; Rae Park, Chong [Department of Materials Science and Engineering, Seoul National University, Seoul 151-747 (Korea, Republic of); Woo Park, Yung [Department of Physics and Astronomy, Seoul National University, Seoul 151-747 (Korea, Republic of)
Development of a spatially controllable chemical vapor deposition reactor with combinatorial processing capabilities
Development of a spatially controllable chemical vapor deposition reactor with combinatorial these limitations, a novel CVD reactor system has been developed that can explicitly control the spatial profile flexibility, we introduced a new CVD reactor concept that enables control of film deposition characteristics
Rubloff, Gary W.
Iron (III) Chloride doping of large-area chemical vapor deposition graphene
Chemical doping is an effective method of reducing the sheet resistance of graphene. This thesis aims to develop an effective method of doping large area Chemical Vapor Deposition (CVD) graphene using Iron (III) Chloride ...
Song, Yi, S.M. Massachusetts Institute of Technology
Initiated chemical vapor deposition of fluoropolymer coatings for the surface modification of complex geometries
Initiated chemical vapor deposition (iCVD) is a one-step, soventless process that can be used to produce polymeric thin films. The iCVD technique has been used to polymerize a wide variety of vinyl monomers such as glycidyl ...
Gupta, Malancha, 1980-
Chemical Vapor Deposition-Derived Graphene with Electrical Performance of Exfoliated Graphene
Chemical Vapor Deposition-Derived Graphene with Electrical Performance of Exfoliated Graphene a scalable method to produce large-area graphene, CVD-grown graphene has heretofore exhibited inferior of CVD-grown graphene in which two important sources of disorder, namely grain boundaries and processing
Hone, James
Polymer electrolyte fuel cell electrodes grown by vapor deposition techniques Pascal Brault*
Polymer electrolyte fuel cell electrodes grown by vapor deposition techniques Pascal Brault Abstract: Polymer fuel cell electrode growth using vapor deposition techniques is reviewed. The supports process: sputtering, CVD, PECVD, MOCVD. In each case, up-to-date fuel cell performances are highlighted
Paris-Sud XI, Universit� de
Low temperature chemical vapor deposition of Co thin films from Co2(CO)8
Low temperature chemical vapor deposition of Co thin films from Co2(CO)8 D.-X. Yea,*, S. Pimanpanga chemical vapor deposition with a metallorganic Co2(CO)8 precursor. After Ar sputtering of the surface, Co2(CO)8, has been extensively used in cobalt CVD and is attractive, since Co is in its elemental
Wang, Gwo-Ching
Computational Analysis and Optimization of a Chemical Vapor Deposition Reactor with
Computational Analysis and Optimization of a Chemical Vapor Deposition Reactor with Large and optimization of a three- dimensional model of a horizontal chemical vapor deposition (CVD) reactor used National Laboratories February 9, 2004 Abstract A computational analysis and optimization is presented
Vapor deposition of hardened niobium
A method of coating ceramic nuclear fuel particles containing a major amount of an actinide ceramic in which the particles are placed in a fluidized bed maintained at ca. 800.degree. to ca. 900.degree. C., and niobium pentachloride vapor and carbon tetrachloride vapor are led into the bed, whereby niobium metal is deposited on the particles and carbon is deposited interstitially within the niobium. Coating apparatus used in the method is also disclosed.
Blocher, Jr., John M. (Columbus, OH); Veigel, Neil D. (Columbus, OH); Landrigan, Richard B. (Columbus, OH)
Chemical Vapor Deposited Zinc Sulfide. SPIE Press Monograph
Zinc sulfide has shown unequaled utility for infrared windows that require a combination of long-wavelength infrared transparency, mechanical durability, and elevated-temperature performance. This book reviews the physical properties of chemical vapor deposited ZnS and their relationship to the CVD process that produced them. An in-depth look at the material microstructure is included, along with a discussion of the material's optical properties. Finally, because the CVD process itself is central to the development of this material, a brief history is presented.
McCloy, John S.; Tustison, Randal W.
Vapor deposition of thin films
A highly pure thin metal film having a nanocrystalline structure and a process of preparing such highly pure thin metal films of, e.g., rhodium, iridium, molybdenum, tungsten, rhenium, platinum, or palladium by plasma assisted chemical vapor deposition of, e.g., rhodium(allyl).sub.3, iridium(allyl).sub.3, molybdenum(allyl).sub.4, tungsten(allyl).sub.4, rhenium(allyl).sub.4, platinum(allyl).sub.2, or palladium(allyl).sub.2 are disclosed. Additionally, a general process of reducing the carbon content of a metallic film prepared from one or more organometallic precursor compounds by plasma assisted chemical vapor deposition is disclosed.
Smith, David C. (Los Alamos, NM); Pattillo, Stevan G. (Los Alamos, NM); Laia, Jr., Joseph R. (Los Alamos, NM); Sattelberger, Alfred P. (Los Alamos, NM)
Validating optical emission spectroscopy as a diagnostic of microwave activated CH4/Ar/H2 plasmas used for diamond chemical vapor deposition
chemical vapor deposition of polycrystalline diamond. Several tracer species are monitored in order to gain used for diamond chemical vapor deposition Jie Ma,1 Michael N. R. Ashfold,1,a and Yuri A. Mankelevich2 spectroscopic methods used to diagnose microwave MW plasmas used for diamond chemical vapor deposition CVD . Zhu
Bristol, University of
Combustion chemical vapor deposited coatings for thermal barrier coating systems
The new deposition process, combustion chemical vapor deposition, shows a great deal of promise in the area of thermal barrier coating systems. This technique produces dense, adherent coatings, and does not require a reaction chamber. Coatings can therefore be applied in the open atmosphere. The process is potentially suitable for producing high quality CVD coatings for use as interlayers between the bond coat and thermal barrier coating, and/or as overlayers, on top of thermal barrier coatings. In this report, the evaluation of alumina and ceria coatings on a nickel-chromium alloy is described.
Hampikian, J.M.; Carter, W.B. [Georgia Institute of Technology, Atlanta, GA (United States). School of Materials Science and Engineering
Chemical vapor deposition of functionalized isobenzofuran polymers
This thesis develops a platform for deposition of polymer thin films that can be further tailored by chemical surface modification. First, we explore chemical vapor deposition of functionalized isobenzofuran films using ...
Olsson, Ylva Kristina
Chemical vapor deposition of aluminum oxide
An aluminum oxide film is deposited on a heated substrate by CVD from one or more alkylaluminum alkoxide compounds having composition R.sub.n Al.sub.2 (OR').sub.6-n, wherein R and R' are alkyl groups and n is in the range of 1 to 5.
Gordon, Roy (Cambridge, MA); Kramer, Keith (Cleveland, OH); Liu, Xinye (Cambridge, MA)
Synthesis of high-quality monolayer and bilayer graphene on copper using chemical vapor deposition
exfoliation of graphite [1], sublimation of epitaxial SiC [4], and catalyst-assisted chemical vapor deposition (CVD) [5�9]. However, mechanical exfoliation of graphite can only supply small-size graphene (see Fig than that of graphene obtained via exfoli- ation of graphite as summarized in Fig. 1. While many
Self-Limiting Chemical Vapor Deposition Growth of Monolayer Graphene from Ethanol
carbide,8 to chemical vapor deposition (CVD) of hydrocarbon precursors on transition metals,9-13 economic up to wafer scale,14,15 nickel and copper are the two most commonly used metal substrates. DueC) restricts the growth of graphene to the metal surface.12,17 The uniformity and high quality of the resultant
The development of chemically vapor deposited mullite coatings for the corrosion protection of SiC
Crystalline mullite coatings have been chemically vapor deposited onto SiC substrates to enhance the corrosion and oxidation resistance of the substrate. Current research has been divided into three distinct areas: (1) Development of the deposition processing conditions for increased control over coating`s growth rate, microstructure, and morphology; (2) Analysis of the coating`s crystal structure and stability; (3) The corrosion resistance of the CVD mullite coating on SiC.
Auger, M.; Hou, P.; Sengupta, A.; Basu, S.; Sarin, V. [Boston Univ., MA (United States)
Photoinitiated chemical vapor depostion [sic] : mechanism and applications
Photoinitiated chemical vapor deposition (piCVD) is developed as a simple, solventless, and rapid method for the deposition of swellable hydrogels and functional hydrogel copolymers. Mechanistic experiments show that piCVD ...
Baxamusa, Salmaan Husain
E-Print Network 3.0 - assisted cvd reactor Sample Search Results
Broader source: All U.S. Department of Energy (DOE) Office Webpages (Extended Search)
CONTROL ID: 427251 CONTACT (NAME ONLY): Suguru Noda Summary: of single-walled carbon nanotubes (SWNTs) in minutes by water-assisted chemical vapor deposition (CVD) 1......
Selective charge doping of chemical vapor deposition-grown graphene by interface modification
The doping and scattering effect of substrate on the electronic properties of chemical vapor deposition (CVD)-grown graphene are revealed. Wet etching the underlying SiO{sub 2} of graphene and depositing self-assembled monolayers (SAMs) of organosilane between graphene and SiO{sub 2} are used to modify various substrates for CVD graphene transistors. Comparing with the bare SiO{sub 2} substrate, the carrier mobility of CVD graphene on modified substrate is enhanced by almost 5-fold; consistently the residual carrier concentration is reduced down to 10{sup 11}?cm{sup ?2}. Moreover, scalable and reliable p- and n-type graphene and graphene p-n junction are achieved on various silane SAMs with different functional groups.
Wang, Shengnan, E-mail: email@example.com; Suzuki, Satoru; Furukawa, Kazuaki; Orofeo, Carlo M.; Takamura, Makoto; Hibino, Hiroki [NTT Basic Research Laboratories, NTT Corporation, Atsugi, Kanagawa 243-0198 (Japan)] [NTT Basic Research Laboratories, NTT Corporation, Atsugi, Kanagawa 243-0198 (Japan)
Improving chemical vapor deposition graphene conductivity using molybdenum trioxide: An in-situ field effect transistor study
By using in situ field effect transistor characterization integrated with molecular beam epitaxy technique, we demonstrate the strong surface transfer p-type doping effect of single layer chemical vapor deposition (CVD) graphene, through the surface functionalization of molybdenum trioxide (MoO{sub 3}) layer. After doping, both the hole and electron mobility of CVD graphene are nearly retained, resulting in significant enhancement of graphene conductivity. With coating of 10 nm MoO{sub 3}, the conductivity of CVD graphene can be increased by about 7 times, showing promising application for graphene based electronics and transparent, conducting, and flexible electrodes.
Han, Cheng [Department of Physics and Institute for Advanced Study, Nanchang University, 999 Xue Fu Da Dao, Nanchang (China) [Department of Physics and Institute for Advanced Study, Nanchang University, 999 Xue Fu Da Dao, Nanchang (China); Department of Physics, National University of Singapore, 2 Science Drive 3, Singapore 117542 (Singapore); Lin, Jiadan; Xiang, Du [Department of Physics, National University of Singapore, 2 Science Drive 3, Singapore 117542 (Singapore)] [Department of Physics, National University of Singapore, 2 Science Drive 3, Singapore 117542 (Singapore); Wang, Chaocheng; Wang, Li [Department of Physics and Institute for Advanced Study, Nanchang University, 999 Xue Fu Da Dao, Nanchang (China)] [Department of Physics and Institute for Advanced Study, Nanchang University, 999 Xue Fu Da Dao, Nanchang (China); Chen, Wei [Department of Physics, National University of Singapore, 2 Science Drive 3, Singapore 117542 (Singapore) [Department of Physics, National University of Singapore, 2 Science Drive 3, Singapore 117542 (Singapore); Department of Chemistry, National University of Singapore, 3 Science Drive 3, Singapore 117543 and Graphene Research Centre, National University of Singapore, 2 Science Drive 3, Singapore 117542 (Singapore)
Process for the preparation of fiber-reinforced ceramic composites by chemical vapor deposition
A chemical vapor deposition (CVD) process for preparing fiber-reinforced ceramic composites. A specially designed apparatus provides a steep thermal gradient across the thickness of a fibrous preform. A flow of gaseous ceramic matrix material is directed into the fibrous preform at the cold surface. The deposition of the matrix occurs progressively from the hot surface of the fibrous preform toward the cold surface. Such deposition prevents the surface of the fibrous preform from becoming plugged. As a result thereof, the flow of reactant matrix gases into the uninfiltrated (undeposited) portion of the fibrous preform occurs throughout the deposition process. The progressive and continuous deposition of ceramic matrix within the fibrous preform provides for a significant reduction in process time over known chemical vapor deposition processes.
Lackey, Jr., Walter J. (Oak Ridge, TN); Caputo, Anthony J. (Knoxville, TN)
Growth of graphene underlayers by chemical vapor deposition
We present a simple and very convincing approach to visualizing that subsequent layers of graphene grow between the existing monolayer graphene and the copper catalyst in chemical vapor deposition (CVD). Graphene samples were grown by CVD and then transferred onto glass substrates by the bubbling method in two ways, either direct-transfer (DT) to yield poly (methyl methacrylate) (PMMA)/graphene/glass or (2) inverted transfer (IT) to yield graphene/PMMA/glass. Field emission scanning electron microscopy (FE-SEM) and atomic force microscopy (AFM) were used to reveal surface features for both the DT and IT samples. The results from FE-SEM and AFM topographic analyses of the surfaces revealed the underlayer growth of subsequent layers. The subsequent layers in the IT samples are visualized as 3D structures, where the smaller graphene layers lie above the larger layers stacked in a concentric manner. The results support the formation of the so-called �inverted wedding cake� stacking in multilayer graphene growth.
Fabiane, Mopeli; Khamlich, Saleh; Bello, Abdulhakeem; Dangbegnon, Julien; Momodu, Damilola; Manyala, Ncholu, E-mail: firstname.lastname@example.com [Department of Physics, Institute of Applied Materials, SARChI Chair in Carbon Technology and Materials, University of Pretoria, Pretoria 0028 (South Africa)] [Department of Physics, Institute of Applied Materials, SARChI Chair in Carbon Technology and Materials, University of Pretoria, Pretoria 0028 (South Africa); Charlie Johnson, A. T. [Department of Physics and Astronomy, University of Pennsylvania, Philadelphia, Pennsylvania 19104 (United States)] [Department of Physics and Astronomy, University of Pennsylvania, Philadelphia, Pennsylvania 19104 (United States)
Effect of e-beam irradiation on graphene layer grown by chemical vapor deposition
We have grown graphene by chemical vapor deposition (CVD) and transferred it onto Si/SiO{sub 2} substrates to make tens of micron scale devices for Raman spectroscopy study. The effect of electron beam (e-beam) irradiation of various doses (600 to 12 000 {mu}C/cm{sup 2}) on CVD grown graphene has been examined by using Raman spectroscopy. It is found that the radiation exposures result in the appearance of the strong disorder D band attributed the damage to the lattice. The evolution of peak frequencies, intensities, and widths of the main Raman bands of CVD graphene is analyzed as a function of defect created by e-beam irradiation. Especially, the D and G peak evolution with increasing radiation dose follows the amorphization trajectory, which suggests transformation of graphene to the nanocrystalline and then to amorphous form. We have also estimated the strain induced by e-beam irradiation in CVD graphene. These results obtained for CVD graphene are in line with previous findings reported for the mechanically exfoliated graphene [D. Teweldebrhan and A. A. Balandin, Appl. Phys. Lett. 94, 013101 (2009)]. The results have important implications for CVD graphene characterization and device fabrication, which rely on the electron microscopy.
Iqbal, M. Z.; Kumar Singh, Arun; Iqbal, M. W.; Seo, Sunae; Eom, Jonghwa [Department of Physics and Graphene Research Institute, Sejong University, Seoul 143-747 (Korea, Republic of)
E-Print Network 3.0 - atmospheric plasma deposition Sample Search...
plasma enhanced chemical vapor deposition CVD . Both processes gave films... and optoelectronics.3 Recently, the low temperature 400 C atmospheric pressure chemical vapor...
Apparatus and method for photochemical vapor deposition
A photochemical vapor deposition apparatus includes a reactor housing having a window in one wall above a reaction chamber in the housing. A transparent curtain divides the reaction chamber into a reaction zone and a flush zone. At least one substrate is mounted in the reaction zone in light communication with the window so that ultraviolet radiation may penetrate through the window into the reaction zone. The window is kept clear by a gas flowing through the flush zone.
Jackson, Scott C. (Wilmington, DE); Rocheleau, Richard E. (Wilmington, DE)
Design of a compact ultrahigh vacuum-compatible setup for the analysis of chemical vapor deposition processes
Optimizing thin film deposition techniques requires contamination-free transfer from the reactor into an ultrahigh vacuum (UHV) chamber for surface science analysis. A very compact, multifunctional Chemical Vapor Deposition (CVD) reactor for direct attachment to any typical UHV system for thin film analysis was designed and built. Besides compactness, fast, easy, and at the same time ultimately clean sample transfer between reactor and UHV was a major goal. It was achieved by a combination of sample manipulation parts, sample heater, and a shutter mechanism designed to fit all into a NW38 Conflat six-ways cross. The present reactor design is versatile to be employed for all commonly employed variants of CVD, including Atomic Layer Deposition. A demonstration of the functionality of the system is provided. First results of the setup (attached to an Omicron Multiprobe x-ray photoelectron spectroscopy system) on the temperature dependence of Pulsed Spray Evaporation-CVD of Ni films from Ni acetylacetonate as the precursor demonstrate the reactor performance and illustrate the importance of clean sample transfer without breaking vacuum in order to obtain unambiguous results on the quality of CVD-grown thin Ni films. The widely applicable design holds promise for future systematic studies of the fundamental processes during chemical vapor deposition or atomic layer deposition.
Weiss, Theodor; Nowak, Martin; Zielasek, Volkmar, E-mail: email@example.com; B�umer, Marcus [Institut f�r Angewandte und Physikalische Chemie, Universit�t Bremen, Leobener Stra�e UFT, D-28359 Bremen (Germany); Mundloch, Udo; Kohse-H�inghaus, Katharina [Physikalische Chemie I, Fakult�t f�r Chemie, Universit�t Bielefeld, Universit�tsstra�e 25, D-33615 Bielefeld (Germany)
Chemical vapor deposition of group IIIB metals
Coatings of Group IIIB metals and compounds thereof are formed by chemical vapor deposition, in which a heat decomposable organometallic compound of the formula given in the patent where M is a Group IIIB metal, such as lanthanum or yttrium and R is a lower alkyl or alkenyl radical containing from 2 to about 6 carbon atoms, with a heated substrate which is above the decomposition temperature of the organometallic compound. The pure metal is obtained when the compound of the formula 1 is the sole heat decomposable compound present and deposition is carried out under nonoxidizing conditions. Intermetallic compounds such as lanthanum telluride can be deposited from a lanthanum compound of formula 1 and a heat decomposable tellurium compound under nonoxidizing conditions.
Erbil, A.
Infrared sensor for CVD deposition of dielectric films
Infrared emission (IRE) spectra were obtained from two borophosphosilicate glass (BPSG) thin-film sample sets. The first set consisted of 21 films deposited on undoped silicon wafers, and the second set consisted of 9 films deposited on patterned and doped (product) wafers. The IRE data were empirically modeled using partial least-squares calibration to simultaneously quantify four BPSG thin-film properties. The standard errors of the determinations when modeling the 21 monitor wafers were
Niemczyk, T.M.; Franke, J.E.; Zhang, S. [New Mexico Univ., Albuquerque, NM (United States). Dept. of Chemistry; Haaland, D.M. [Sandia National Labs., Albuquerque, NM (United States)
Niemczyk, T.M.; Franke, J.E.; Zhang, S. [New Mexico Univ., Albuquerque, NM (United States). Dept. of Chemistry; Haaland, D.M. [Sandia National Labs., Albuquerque, NM (United States)
In-situ deposition of high-k dielectrics on III-V compound semiconductor in MOCVD system
In situ deposition of high-k materials to passivate the GaAs in metal organic chemical vapor deposition (MOCVD) system was well demonstrated. Both atomic layer deposition (ALD) and chemical vapor deposition (CVD) methods ...
Cheng, Cheng-Wei, Ph.D. Massachusetts Institute of Technology
Deposition of CVD diamond onto GaN P.W. May a,*, H.Y. Tsai b
of the polycrystalline diamond surface would prevent light from leaking out of the GaN layer and channel it to the endsDeposition of CVD diamond onto GaN P.W. May a,*, H.Y. Tsai b , W.N. Wang c , J.A. Smith a a School performed to deposit continuous layers of CVD diamond onto epitaxial GaN films. Such diamond coatings would
Ceramic-metallic coatings by electron beam physical vapor deposition (EB-PVD) process
Electron Beam Physical Vapor Deposition (EB-PVD) process is considered to be a technology that has overcome some of the difficulties or problems associated with the chemical vapor deposition (CVD), physical vapor deposition (PVD) and metal spray processes. The EB-PVD process offers many desirable characteristics such as relatively high deposition rates (up to 100-150 {mu}m/minute with an evaporation rate {approx}10-15 Kg/hour,) dense coatings, precise compositional control, columnar and poly-crystalline microstructure, low contamination, and high thermal efficiency. Various metallic and ceramic coatings (oxides, carbides, nitrides) can be deposited at relatively low temperatures. Even elements with low vapor pressure such as molybdenum, tungsten, and carbon are readily evaporated by this process. In addition, EB-PVD is capable of producing multi-layered laminated metallic/ceramic coatings on large components by changing the EB-PVD processing conditions such as ingot composition, part manipulation, and electron beam energy. Attachment of an ion assisted beam source to the EB-PVD offers additional benefits such as dense coatings with improved adhesion. In addition, textured coatings can be obtained that are desirable in many applications such as cutting tools. This laboratory has started a new thrust in the coating area by the EB-PVD process. The microstructure of thermal barrier ceramic coatings (i.e., yttria stabilized zirconia) developed by the EB-PVD process will be presented.
Wolfe, D.E.; Singh, J. [Pennsylvania State Univ., State College, PA (United States)
Chemical vapor deposited diamond-on-diamond powder composites (LDRD final report)
Densifying non-mined diamond powder precursors with diamond produced by chemical vapor infiltration (CVI) is an attractive approach for forming thick diamond deposits that avoids many potential manufacturability problems associated with predominantly chemical vapor deposition (CVD) processes. The authors developed techniques for forming diamond powder precursors and densified these precursors in a hot filament-assisted reactor and a microwave plasma-assisted reactor. Densification conditions were varied following a fractional factorial statistical design. A number of conclusions can be drawn as a result of this study. High density diamond powder green bodies that contain a mixture of particle sizes solidify more readily than more porous diamond powder green bodies with narrow distributions of particle sizes. No composite was completely densified although all of the deposits were densified to some degree. The hot filament-assisted reactor deposited more material below the exterior surface, in the interior of the powder deposits; in contrast, the microwave-assisted reactor tended to deposit a CVD diamond skin over the top of the powder precursors which inhibited vapor phase diamond growth in the interior of the powder deposits. There were subtle variations in diamond quality as a function of the CVI process parameters. Diamond and glassy carbon tended to form at the exterior surface of the composites directly exposed to either the hot filament or the microwave plasma. However, in the interior, e.g. the powder/substrate interface, diamond plus diamond-like-carbon formed. All of the diamond composites produced were grey and relatively opaque because they contained flawed diamond, diamond-like-carbon and glassy carbon. A large amount of flawed and non-diamond material could be removed by post-CVI oxygen heat treatments. Heat treatments in oxygen changed the color of the composites to white.
Panitz, J.K.; Hsu, W.L.; Tallant, D.R.; McMaster, M.; Fox, C.; Staley, D.
All graphene electromechanical switch fabricated by chemical vapor deposition
We demonstrate an electromechanical switch comprising two polycrystalline graphene films; each deposited using ambient pressure chemical vapor deposition. The top film is pulled into electrical contact with the bottom film ...
Milaninia, Kaveh M.
Preparation of amorphous electrochromic tungsten oxide and molybdenum oxide by plasma enhanced chemical vapor deposition
Preliminary experiments have been performed to probe the feasibility of using plasma enhanced chemical vapor deposition (PE--CVD) to prepare electrochromic thin films of tungsten oxide and molybdenum oxide by plasma reaction of WF/sub 6/, W(CO)/sub 6/, and Mo(CO)/sub 6/ with oxygen. Thin films produced in a 300 W, electrodeless, radio-frequency (rf), capacitive discharge were found to be electrochromic when tested with either liquid or solid electrolytes. Optical spectroscopy was performed on two electrochromic coatings after Li/sup +/ ion insertion from a propylene carbonate liquid electrolyte. Broad absorption peaks at --900 nm for WO/sub 3/ and 600 nm for MoO/sub 3/ were observed. Optical results for PE--CVD MoO/sub 3/ films differ from those reported for evaporated MoO/sub 3/ films which have an absorption peak at --800 nm. The shorter wavelength absorption in the PE--CVD MoO/sub 3/ films offers the potential for fabricating electrochromic devices with higher contrast ratios and less color change. Optical emission spectroscopy, Auger, and x-ray diffraction analyses indicate these thin film deposits to be predominantly amorphous tungsten and molybdenum oxides.
Tracy, C.E.; Benson, D.K.
Development of Single Crystal Chemical Vapor Deposition Diamonds for Detector Applications
With the LHC upgrades in 2013, and further LHC upgrades scheduled in 2018, most LHC experiments are planning for detector upgrades which require more radiation hard technologies than presently available. At present all LHC experiments now have some form of diamond detector. As a result Chemical Vapor Deposition (CVD) diamond has now been used extensively in beam conditions monitors as the innermost detectors in the highest radiation areas of all LHC experiments. Moreover CVD diamond is now being discussed as an alternative sensor material for tracking very close to the interaction region of the HL-LHC where the most extreme radiation conditions will exist. Our work addressed the further development of the new material, single-crystal Chemical Vapor Deposition diamond, towards reliable industrial production of large pieces and new geometries needed for detector applications. Our accomplishments include: � Developed a two U.S.companies to produce electronic grade diamond, � Worked with companies and acquired large area diamond pieces, � Performed radiation hardness tests using various proton energies: 70 MeV (Cyric, Japan), 800 MeV (Los Alamos), and 24 GeV (CERN).
Kagan, Harris; Kass, Richard; Gan, K.K.
CVD POLYCRYSTALLINE DIAMOND HIGH-Q MICROMECHANICAL RESONATORS Jing Wang, James E. Butler*, D. S. Y. Hsu*, and Clark T.-C. Nguyen
CVD POLYCRYSTALLINE DIAMOND HIGH-Q MICROMECHANICAL RESONATORS Jing Wang, James E. Butler*, D. S. Y one variant of approach (3), in which CVD polycrystalline diamond material, with an acoustic firstname.lastname@example.com ABSTRACT Chemical Vapor Deposited (CVD) polycrystalline dia- mond material, with an acoustic velocity
Nguyen, Clark T.-C.
Formation of Nickel Silicide from Direct-liquid-injection Chemical-vapor-deposited Nickel Nitride Films
Smooth, continuous, and highly conformal nickel nitride (NiN{sub x}) films were deposited by direct liquid injection (DLI)-chemical vapor deposition (CVD) using a solution of bis(N,N{prime}-di-tert-butylacetamidinato)nickel(II) in tetrahydronaphthalene as the nickel (Ni) source and ammonia (NH{sub 3}) as the coreactant gas. The DLI-CVD NiNx films grown on HF-last (100) silicon and on highly doped polysilicon substrates served as the intermediate for subsequent conversion into nickel silicide (NiSi), which is a key material for source, drain, and gate contacts in microelectronic devices. Rapid thermal annealing in the forming gas of DLI-CVD NiNx films formed continuous NiSi films at temperatures above 400 C. The resistivity of the NiSi films was 15{mu}{Omega} cm, close to the value for bulk crystals. The NiSi films have remarkably smooth and sharp interfaces with underlying Si substrates, thereby producing contacts for transistors with a higher drive current and a lower junction leakage. Resistivity and synchrotron X-ray diffraction in real-time during annealing of NiNx films showed the formation of a NiSi film at about 440 C, which is morphologically stable up to about 650 C. These NiSi films could find applications in future nanoscale complementary metal oxide semiconductor devices or three-dimensional metal-oxide-semiconductor devices such as Fin-type field effect transistors for the 22 nm technology node and beyond.
Li, Z.; Gordon, R; Li, H; Shenai, D; Lavoie, C
Massively parallel computation of 3D flow and reactions in chemical vapor deposition reactors
Computer modeling of Chemical Vapor Deposition (CVD) reactors can greatly aid in the understanding, design, and optimization of these complex systems. Modeling is particularly attractive in these systems since the costs of experimentally evaluating many design alternatives can be prohibitively expensive, time consuming, and even dangerous, when working with toxic chemicals like Arsine (AsH{sub 3}): until now, predictive modeling has not been possible for most systems since the behavior is three-dimensional and governed by complex reaction mechanisms. In addition, CVD reactors often exhibit large thermal gradients, large changes in physical properties over regions of the domain, and significant thermal diffusion for gas mixtures with widely varying molecular weights. As a result, significant simplifications in the models have been made which erode the accuracy of the models` predictions. In this paper, the authors will demonstrate how the vast computational resources of massively parallel computers can be exploited to make possible the analysis of models that include coupled fluid flow and detailed chemistry in three-dimensional domains. For the most part, models have either simplified the reaction mechanisms and concentrated on the fluid flow, or have simplified the fluid flow and concentrated on rigorous reactions. An important CVD research thrust has been in detailed modeling of fluid flow and heat transfer in the reactor vessel, treating transport and reaction of chemical species either very simply or as a totally decoupled problem. Using the analogy between heat transfer and mass transfer, and the fact that deposition is often diffusion limited, much can be learned from these calculations; however, the effects of thermal diffusion, the change in physical properties with composition, and the incorporation of surface reaction mechanisms are not included in this model, nor can transitions to three-dimensional flows be detected.
Salinger, A.G.; Shadid, J.N.; Hutchinson, S.A.; Hennigan, G.L.; Devine, K.D.; Moffat, H.K.
Chemical vapor deposition thin films as biopassivation coatings and directly patternable dielectrics
Organosilicon thin films deposited by pulsed plasma-enhanced chemical vapor deposition (PPECVD) and hot-filament chemical vapor deposition (HFCVD) were investigated as potential biopassivation coatings for neural probes. ...
Pryce Lewis, Hilton G. (Hilton Gavin), 1973-
Mass densification and defect restoration in chemical vapor deposition silicon dioxide film using Ar plasma excited by microwave
Silicon dioxide (SiO{sub 2}) films formed by chemical vapor deposition (CVD) have been treated with Ar plasma excited by microwave. The changes of the mass densities, carrier trap densities, and thicknesses of the CVD-SiO{sub 2} films with the Ar plasma treatments were investigated. The mass density depth profiles were estimated with X-Ray Reflectivity (XRR) analysis using synchrotron radiation. The densities of carrier trap centers due to defects of Si-O bond network were estimated with X-ray Photoelectron Spectroscopy (XPS) time-dependent measurement. The changes of the thicknesses due to the oxidation of Si substrates were estimated with the XRR and XPS. The mass densities of the CVD-SiO{sub 2} films are increased by the Ar plasma treatments. The carrier trap densities of the films are decreased by the treatments. The thicknesses of the films are not changed by the treatments. It has been clarified that the mass densification and defect restoration in the CVD-SiO{sub 2} films are caused by the Ar plasma treatments without the oxidation of the Si substrates.
Kawase, Kazumasa, E-mail: email@example.com; Motoya, Tsukasa; Uehara, Yasushi [Advanced Technology R and D Center, Mitsubishi Electric Corporation, 8-1-1 Tsukaguchi-honmachi, Amagasaki, Hyogo 661-8661 (Japan); Teramoto, Akinobu; Suwa, Tomoyuki; Ohmi, Tadahiro [New Industry Creation Hatchery Center, Tohoku University, 6-6-10 Aoba Aramaki, Aoba-ku, Sendai, Miyagi 980-8579 (Japan)
E-Print Network 3.0 - arc vapor deposition Sample Search Results
has been produced... al Vaporization and melting of materials in fusion devices 325 ENERGY DEPOSITED (Jcm21 Figure 3... VAPORIZATION AND MELTING OF MATERIALS IN FUSION...
Fabrication of solid oxide fuel cell by electrochemical vapor deposition
In a high temperature solid oxide fuel cell (SOFC), the deposition of an impervious high density thin layer of electrically conductive interconnector material, such as magnesium doped lanthanum chromite, and of an electrolyte material, such as yttria stabilized zirconia, onto a porous support/air electrode substrate surface is carried out at high temperatures (/approximately/1100/degree/ /minus/ 1300/degree/C) by a process of electrochemical vapor deposition. In this process, the mixed chlorides of the specific metals involved react in the gaseous state with water vapor resulting in the deposit of an impervious thin oxide layer on the support tube/air electrode substrate of between 20--50 microns in thickness. An internal heater, such as a heat pipe, is placed within the support tube/air electrode substrate and induces a uniform temperature profile therein so as to afford precise and uniform oxide deposition kinetics in an arrangement which is particularly adapted for large scale, commercial fabrication of SOFCs.
Riley, B.; Szreders, B.E.
In a high temperature solid oxide fuel cell (SOFC), the deposition of an impervious high density thin layer of electrically conductive interconnector material, such as magnesium doped lanthanum chromite, and of an electrolyte material, such as yttria stabilized zirconia, onto a porous support/air electrode substrate surface is carried out at high temperatures (approximately 1100.degree.-1300.degree. C.) by a process of electrochemical vapor deposition. In this process, the mixed chlorides of the specific metals involved react in the gaseous state with water vapor resulting in the deposit of an impervious thin oxide layer on the support tube/air electrode substrate of between 20-50 microns in thickness. An internal heater, such as a heat pipe, is placed within the support tube/air electrode substrate and induces a uniform temperature profile therein so as to afford precise and uniform oxide deposition kinetics in an arrangement which is particularly adapted for large scale, commercial fabrication of SOFCs.
Brian, Riley (Willimantic, CT); Szreders, Bernard E. (Oakdale, CT)
DIAMOND CHEMICAL VAPOR DEPOSITION Nucleation and Early Growth Stages
a reality. Epi- taxial diamond has been grown on diamond and cubic-BN. Polycrystalline diamond films haveDIAMOND CHEMICAL VAPOR DEPOSITION Nucleation and Early Growth Stages by Huimin Liu David S. Dandy of high-quality diamond coatings on preshaped parts and synthesis of free-standing shapes of diamond
Dandy, David
Metalorganic chemical vapor deposition of carbon-free ZnO using...
Metalorganic chemical vapor deposition of carbon-free ZnO using the bis(2,2,6,6-tetramethyl-3,5-heptanedionato)zinc precursor. Metalorganic chemical vapor deposition of carbon-free...
CVD of refractory amorphous metal alloys
In this work, a novel process is described for the fabrication of multi-metallic amorphous metal alloy coatings using a chemical vapor deposition (CVD) technique. Of special interest in this work are amorphous metal alloys containing Mo and/or Cr which have high crystallization temperatures and readily available low decomposition temperature metal-bearing precursors. The conditions for amorphous alloy formation via CVD are described as well as the chemical properties of these materials. High temperature, aqueous corrosion tests have shown these materials (especially those containing Cr) are among the most corrosion resistant metal alloys known.
Tenhover, M. [The Carborundum Co., Niagara Falls, NY (United States). Technology Div.
Environmentally focused patterning and processing of polymer thin films by initiated chemical vapor deposition (iCVD) and oxidative chemical vapor deposition (oCVD)
The new millennium has brought fourth many technological innovations made possible by the advancement of high speed integrated circuits. The materials and energy requirements for a microchip is orders of magnitude higher ...
Trujillo, Nathan J. (Nathan Jeffrey)
Mat. Res. Soc. Symp. Proc. Vol. 612 2000 Materials Research Society VOLATILE LIQUID PRECURSORS FOR THE CHEMICAL VAPOR DEPOSITION
. These tungsten oxide films can be used as part of electrochromic windows, mirrors or displays. Physical in microelectronics.5 CVD using both W(CO)6 vapor and oxygen gas, O2, has produced electrochromic films of tungsten
Robofurnace: A semi-automated laboratory chemical vapor deposition system for high-throughput nanomaterial synthesis and process discovery
Laboratory research and development on new materials, such as nanostructured thin films, often utilizes manual equipment such as tube furnaces due to its relatively low cost and ease of setup. However, these systems can be prone to inconsistent outcomes due to variations in standard operating procedures and limitations in performance such as heating and cooling rates restrict the parameter space that can be explored. Perhaps more importantly, maximization of research throughput and the successful and efficient translation of materials processing knowledge to production-scale systems, relies on the attainment of consistent outcomes. In response to this need, we present a semi-automated lab-scale chemical vapor deposition (CVD) furnace system, called �Robofurnace.� Robofurnace is an automated CVD system built around a standard tube furnace, which automates sample insertion and removal and uses motion of the furnace to achieve rapid heating and cooling. The system has a 10-sample magazine and motorized transfer arm, which isolates the samples from the lab atmosphere and enables highly repeatable placement of the sample within the tube. The system is designed to enable continuous operation of the CVD reactor, with asynchronous loading/unloading of samples. To demonstrate its performance, Robofurnace is used to develop a rapid CVD recipe for carbon nanotube (CNT) forest growth, achieving a 10-fold improvement in CNT forest mass density compared to a benchmark recipe using a manual tube furnace. In the long run, multiple systems like Robofurnace may be linked to share data among laboratories by methods such as Twitter. Our hope is Robofurnace and like automation will enable machine learning to optimize and discover relationships in complex material synthesis processes.
Oliver, C. Ryan; Westrick, William; Koehler, Jeremy; Brieland-Shoultz, Anna; Anagnostopoulos-Politis, Ilias; Cruz-Gonzalez, Tizoc [Department of Mechanical Engineering, University of Michigan, Ann Arbor, Michigan 48109 (United States)] [Department of Mechanical Engineering, University of Michigan, Ann Arbor, Michigan 48109 (United States); Hart, A. John, E-mail: firstname.lastname@example.com [Department of Mechanical Engineering, University of Michigan, Ann Arbor, Michigan 48109 (United States); Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139 (United States)
Thermodynamic analysis and growth of ZrO2 by chloride chemical vapor deposition
reaction [9�12], and simple chamber designs (e.g., vertical, cold-wall, axisymmetric chamber) to deposit flow injector can be used. A stagnation plane flow injector (for vertical, cold-wall CVD chambers homogeneous nucleation and/ or reactor wall deposition. For example, Holstein [17] de- monstrated that at high
Anderson, Timothy J.
Method of physical vapor deposition of metal oxides on semiconductors
A process for growing a metal oxide thin film upon a semiconductor surface with a physical vapor deposition technique in a high-vacuum environment and a structure formed with the process involves the steps of heating the semiconductor surface and introducing hydrogen gas into the high-vacuum environment to develop conditions at the semiconductor surface which are favorable for growing the desired metal oxide upon the semiconductor surface yet is unfavorable for the formation of any native oxides upon the semiconductor. More specifically, the temperature of the semiconductor surface and the ratio of hydrogen partial pressure to water pressure within the vacuum environment are high enough to render the formation of native oxides on the semiconductor surface thermodynamically unstable yet are not so high that the formation of the desired metal oxide on the semiconductor surface is thermodynamically unstable. Having established these conditions, constituent atoms of the metal oxide to be deposited upon the semiconductor surface are directed toward the surface of the semiconductor by a physical vapor deposition technique so that the atoms come to rest upon the semiconductor surface as a thin film of metal oxide with no native oxide at the semiconductor surface/thin film interface. An example of a structure formed by this method includes an epitaxial thin film of (001)-oriented CeO.sub.2 overlying a substrate of (001) Ge.
Norton, David P. (Knoxville, TN)
Controlled incorporation of mid-to-high Z transition metals in CVD diamond
We report on a general method to fabricate transition metal related defects in diamond. Controlled incorporation of Mo and W in synthetic CVD diamond was achieved by adding volatile metal precursors to the diamond chemical vapor deposition (CVD) growth process. Effects of deposition temperature, grain structure and precursor exposure on the doping level were systematically studied, and doping levels of up to 0.25 at.% have been achieved. The metal atoms are uniformly distributed throughout the diamond grains without any indication of inclusion formation. These results are discussed in context of the kinetically controlled growth process of CVD diamond.
Biener, M M; Biener, J; Kucheyev, S O; Wang, Y M; El-Dasher, B; Teslich, N E; Hamza, A V; Obloh, H; Mueller-Sebert, W; Wolfer, M; Fuchs, T; Grimm, M; Kriele, A; Wild, C
Real-time growth rate metrology for a tungsten chemical vapor deposition process by acoustic sensing
to a production-scale tungsten chemical vapor deposition cluster tool for in situ process sensing. Process gasesReal-time growth rate metrology for a tungsten chemical vapor deposition process by acoustic to achieve run-to-run process control of the deposited tungsten film thickness. � 2001 American Vacuum
Role of gas phase reactions in subatmospheric chemical-vapor deposition ozone/TEOS processes for oxide deposition
-vapor deposition. Our results for oxide deposition show optimum process window around 200 Torr for producing films a po- tentially optimum process window in which film properties, deposition rates, film uniformity requires high quality dielectric films that can be deposited rapidly and conformally on high aspect ratio
Chemical vapor deposition of organosilicon composite thin films for porous low-k dielectrics
Pulsed plasma enhanced chemical vapor deposition has produced organosilicon thin films with the potential use as low dielectric constant interconnect materials in microelectronic circuits. Both diethylsilane and ...
Ross, April Denise, 1977-
Current induced annealing and electrical characterization of single layer graphene grown by chemical vapor deposition for future interconnects in VLSI circuits
Single layer graphene (SLG) grown by chemical vapor deposition (CVD) has been investigated for its prospective application as horizontal interconnects in very large scale integrated circuits. However, the major bottleneck for its successful application is its degraded electronic transport properties due to the resist residual trapped in the grain boundaries and on the surface of the polycrystalline CVD graphene during multi-step lithographic processes, leading to increase in its sheet resistance up to 5 M?/sq. To overcome this problem, current induced annealing has been employed, which helps to bring down the sheet resistance to 10?k?/sq (of the order of its initial value). Moreover, the maximum current density of ?1.2?�?10{sup 7?}A/cm{sup 2} has been obtained for SLG (1?�?2.5??m{sup 2}) on SiO{sub 2}/Si substrate, which is about an order higher than that of conventionally used copper interconnects.
Prasad, Neetu, E-mail: firstname.lastname@example.com, E-mail: firstname.lastname@example.com; Kumari, Anita; Bhatnagar, P. K.; Mathur, P. C. [Department of Electronic Science, University of Delhi South Campus, Benito Juarez Road, New Delhi 110021 (India); Bhatia, C. S. [Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576 (Singapore)
Toward epitaxially grown two-dimensional crystal hetero-structures: Single and double MoS{sub 2}/graphene hetero-structures by chemical vapor depositions
Uniform large-size MoS{sub 2}/graphene hetero-structures fabricated directly on sapphire substrates are demonstrated with layer-number controllability by chemical vapor deposition (CVD). The cross-sectional high-resolution transmission electron microscopy (HRTEM) images provide the direct evidences of layer numbers of MoS{sub 2}/graphene hetero-structures. Photo-excited electron induced Fermi level shift of the graphene channel are observed on the single MoS{sub 2}/graphene hetero-structure transistors. Furthermore, double hetero-structures of graphene/MoS{sub 2}/graphene are achieved by CVD fabrication of graphene layers on top of the MoS{sub 2}, as confirmed by the cross-sectional HRTEM. These results have paved the possibility of epitaxially grown multi-hetero-structures for practical applications.
Lin, Meng-Yu [Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan (China); Research Center for Applied Sciences, Academia Sinica, Nankang, Taipei, Taiwan (China); Chang, Chung-En [Department of Photonics, National Chiao-Tung University, Hsinchu, Taiwan (China); Wang, Cheng-Hung [Institute of Display, National Chiao-Tung University, Hsinchu, Taiwan (China); Su, Chen-Fung; Chen, Chi [Research Center for Applied Sciences, Academia Sinica, Nankang, Taipei, Taiwan (China); Lee, Si-Chen [Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan (China); Lin, Shih-Yen, E-mail: firstname.lastname@example.com [Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan (China); Research Center for Applied Sciences, Academia Sinica, Nankang, Taipei, Taiwan (China); Department of Photonics, National Chiao-Tung University, Hsinchu, Taiwan (China)
Analysis of gallium arsenide deposition in a horizontal chemical vapor deposition reactor using massively parallel computations
A numerical analysis of the deposition of gallium from trimethylgallium (TMG) and arsine in a horizontal CVD reactor with tilted susceptor and a three inch diameter rotating substrate is performed. The three-dimensional model includes complete coupling between fluid mechanics, heat transfer, and species transport, and is solved using an unstructured finite element discretization on a massively parallel computer. The effects of three operating parameters (the disk rotation rate, inlet TMG fraction, and inlet velocity) and two design parameters (the tilt angle of the reactor base and the reactor width) on the growth rate and uniformity are presented. The nonlinear dependence of the growth rate uniformity on the key operating parameters is discussed in detail. Efficient and robust algorithms for massively parallel reacting flow simulations, as incorporated into our analysis code MPSalsa, make detailed analysis of this complicated system feasible.
Salinger, A.G.; Shadid, J.N.; Hutchinson, S.A. [and others
Plasma Enhanced Chemical Vapor Deposition on Living Substrates: Development, Characterization, and Biological Applications
This dissertation proposed the idea of �plasma-enhanced chemical vapor deposition on living substrates (PECVD on living substrates)� to bridge the gap between the thin film deposition technology and the biological and living substrates. This study...
Tsai, Tsung-Chan 1982-
Strain relaxation in graphene grown by chemical vapor deposition
The growth of single layer graphene by chemical vapor deposition on polycrystalline Cu substrates induces large internal biaxial compressive strain due to thermal expansion mismatch. Raman backscattering spectroscopy and atomic force microscopy were used to study the strain relaxation during and after the transfer process from Cu foil to SiO{sub 2}. Interestingly, the growth of graphene results in a pronounced ripple structure on the Cu substrate that is indicative of strain relaxation of about 0.76% during the cooling from the growth temperature. Removing graphene from the Cu substrates and transferring it to SiO{sub 2} results in a shift of the 2D phonon line by 27?cm{sup ?1} to lower frequencies. This translates into additional strain relaxation. The influence of the processing steps, used etching solution and solvents on strain, is investigated.
Troppenz, Gerald V., E-mail: email@example.com; Gluba, Marc A.; Kraft, Marco; Rappich, J�rg; Nickel, Norbert H. [Helmholtz-Zentrum Berlin f�r Materialien und Energie GmbH, Institut f�r Silizium Photovoltaik, Kekul�str. 5, D-12489 Berlin (Germany)
Field emission properties of chemical vapor deposited individual graphene
Here, we report field emission (FE) properties of a chemical vapor deposited individual graphene investigated by in-situ transmission electron microscopy. Free-standing bilayer graphene is mounted on a cathode microprobe and FE processes are investigated varying the vacuum gap of cathode and anode. The threshold field for 10?nA current were found to be 515, 610, and 870?V/?m for vacuum gap of 400, 300, and 200?nm, respectively. It is observed that the structural stability of a high quality bilayer graphene is considerably stable during emission process. By contacting the nanoprobe with graphene and applying a bias voltage, structural deformation and buckling are observed with significant rise in temperature owing to Joule heating effect. The finding can be significant for practical application of graphene related materials in emitter based devices as well as understanding the contact resistance influence and heating effect.
Zamri Yusop, Mohd [Department of Frontier Materials, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, 466-8555 Nagoya (Japan); Department of Materials, Faculty of Mechanical Engineering, Universiti Teknologi Malaysia, 81310 UTM Skudai, Johor (Malaysia); Kalita, Golap, E-mail: firstname.lastname@example.com [Department of Frontier Materials, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, 466-8555 Nagoya (Japan); Center for Fostering Young and Innovative Researchers, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, 466-8555 Nagoya (Japan); Yaakob, Yazid; Takahashi, Chisato; Tanemura, Masaki [Department of Frontier Materials, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, 466-8555 Nagoya (Japan)
Prevention of biofouling in seawater desalination via initiated chemical vapor deposition (iCVD)
Biofouling, the undesirable settlement and growth of organisms, occurs immediately when a clean surface is immersed in natural seawater. It is a universal problem and the bottleneck for seawater desalination, which reduces ...
Yang, Rong, Ph. D. Massachusetts Institute of Technology
Lithium phosphorous oxynitride films synthesized by a plasma-assisted directed vapor deposition approach
Lithium phosphorous oxynitride films synthesized by a plasma-assisted directed vapor deposition vapor deposition approach has been explored for the synthesis of lithium phosphorous oxynitride Lipon the ionic transport properties of these films. This enabled the synthesis of electrolyte films with lithium
Wadley, Haydn
Tunneling characteristics in chemical vapor deposited graphene hexagonal boron nitride graphene junctions
1 Tunneling characteristics in chemical vapor deposited graphene hexagonal boron nitride graphene junctions T. Roy1 , L. Liu2 , S. de la Barrera,3 B. Chakrabarti1,4 , Z. R. Hesabi1 , C. A. Joiner1 Abstract: Large area chemical vapor deposited graphene and hexagonal boron nitride was used to fabricate
Feenstra, Randall
OPTIMAL DESIGN OF A HIGH PRESSURE ORGANOMETALLIC CHEMICAL VAPOR DEPOSITION REACTOR K.J. BACHMANN of computer simulations as an optimal design tool which lessens the costs in time and effort in experimental vapor deposition (HPOMCVD) reactor for use in thin film crystal growth. The advantages of such a reactor
On the optimization of a dc arcjet diamond chemical vapor deposition reactor
On the optimization of a dc arcjet diamond chemical vapor deposition reactor S. W. Reevea) and W. A precursor in our dc arcjet reactor.1 Based on conclusions drawn from that work, an optimization strategy diamond film growth in a dc arcjet chemical vapor deposition reactor has been developed. Introducing
Researchers develop electrodeposition process to deposit coatings on substrates, eliminate the expensive physical vapor
the expensive physical vapor deposition step, and improve device quality. CuIn1-xGaxSe2 (CIGS) solar cells have composition was adjusted by physical vapor deposition method. At present, we are fabricating CIGS-based solar). 2 R. N. Bhattacharya, W. Batchelor, J. F. Hiltner, and J. R. Sites, Appl. Phys. Lett., 75, 1431
Plasma and Ion Assistance in Physical Vapor Deposition: AHistorical Perspective
Deposition of films using plasma or plasma-assist can betraced back surprisingly far, namely to the 18th century for arcs and tothe 19th century for sputtering. However, only since the 1960s thecoatings community considered other processes than evaporation for largescale commercial use. Ion Plating was perhaps the first importantprocess, introducing vapor ionization and substrate bias to generate abeam of ions arriving on the surface of the growing film. Ratherindependently, cathodic arc deposition was established as an energeticcondensation process, first in the former Soviet Union in the 1970s, andin the 1980s in the Western Hemisphere. About a dozen various ion-basedcoating technologies evolved in the last decades, all characterized byspecific plasma or ion generation processes. Gridded and gridless ionsources were taken from space propulsion and applied to thin filmdeposition. Modeling and simulation have helped to make plasma and ionseffects to be reasonably well understood. Yet--due to the complex, oftennon-linear and non-equilibrium nature of plasma and surfaceinteractions--there is still a place for the experience plasma"sourcerer."
Anders, Andre
Comparative evaluation of CVD diamond technologies
Chemical vapor deposition (CVD) of diamonds occurs from hydrogen-hydrocarbon gas mixtures in the presence of atomic hydrogen at subatmospheric pressures. Most CVD methods are based on different means of generating and transporting atomic hydrogen in a particular system. Evaluation of these different techniques involves their capital costs, material costs, energy costs, labor costs and the type and quality of diamond that they produce. Currently, there is no universal agreement on which is the best technique and technique selection has been largely driven by the professional background of the user as well as the particular application of interest. This article discusses the criteria for evaluating a process for low-pressure deposition of diamond. Next, a brief history of low-pressure diamond synthesis is reviewed. Several specific processes are addressed, including the hot filament process, hot filament electron-assisted chemical vapor deposition, and plasma generation of atomic hydrogen by glow discharge, microwave discharge, low pressure radio frequency discharge, high pressure DC discharge, high pressure microwave discharge jets, high pressure RF discharge, and high and low pressure flames. Other types of diamond deposition methods are also evaluated. 101 refs., 15 figs.
Anthony, T.R. [General Electric Corporate Research & Development Center, Schenectady, NY (United States)
MOVPE growth of semipolar III-nitride semiconductors on CVD graphene Priti Gupta n
MOVPE growth of semipolar III-nitride semiconductors on CVD graphene Priti Gupta n , A.A. Rahman pressure metalorganic vapor phase epitaxy B1. Graphene B1. Nitrides B2. Semiconducting III�V materials a b on graphene grown by chemical vapour deposition. GaN, AlGaN alloys, and InN layers are grown using an Al
Deshmukh, Mandar M.
Reduced Order Model Compensator Control of Species Transport in a CVD Reactor
Reduced Order Model Compensator Control of Species Transport in a CVD Reactor G.M. Kepler, H for computation of feedback controls and compensators in a high pressure chemical vapor deposition (HPCVD) reactor, through openloop optimization [6, 21, 34]. However, because of process variability and the in creasing
Annual report, April 1981 - May 1982 : laser induced deposition of thin films
A new chemical vapor deposition (CVD) process has been demonstrated with Si thin films. In this process, reactant gases are heated by absorbing light energy emitted from an IR laser. No other surfaces are heated by the ...
Gattuso, Todd Richard
Understanding the Nanotube Growth Mechanism: A Strategy to Control Nanotube Chirality during Chemical Vapor Deposition Synthesis
during chemical vapor deposition synthesis must focus on controlling the structure of the nucleated nanotube seeds. DFT and RMD simulations demonstrate the viability of using the structures of catalyst particles over which nanotube growth proceeds...
Gomez Gualdron, Diego Armando 1983-
The concept of co-catalytic layer structures for controlled laser-induced chemical vapor deposition of carbon nanotubes is established, in which a thin Ta support layer chemically aids the initial Fe catalyst reduction. This enables a significant...
Michaelis, F.B.; Weatherup, R.S.; Bayer, B.C.; Bock, M.C.D; Sugime, H.; Caneva, S.; Robertson, J.; Baumberg, J.J.; Hofmann, S.
Bilayer graphene growth by low pressure chemical vapor deposition on copper foil
Successfully integrating graphene in standard processes for applications in electronics relies on the synthesis of high-quality films. In this work we study Low Pressure Chemical Vapor Deposition (LPCVD) growth of bilayer ...
Fang, Wenjing, S.M. Massachusetts Institute of Technology
Atmospheric pressure chemical vapor deposition of TiN from tetrakis(dimethylamido)titanium and ammonia
pressure chemical vapor deposition. Experiments were conducted in a belt furnace; static experiments, in particular, is used for tool coating, solar-control films, and micro- electronic applications. Optically
Single- and few-layer graphene by ambient pressure chemical vapor deposition on nickel
An ambient pressure chemical vapor deposition (APCVD) process is used to fabricate graphene based films consisting of one to several graphene layers across their area. Polycrystalline Ni thin films are used and the graphene ...
Reina Ceeco, Alfonso
Optimization of the chemical vapor deposition process for carbon nanotubes fabrication
Optimization of the chemical vapor deposition process for carbon nanotubes fabrication M. Grujicica-phase chemistry and surface chemistry model is developed to analyze, at the reactor length scale, chemical vapor (carrier gas) in the presence of cobalt catalytic particles in a cylindrical reactor. The model allows
Grujicic, Mica
Solar-induced chemical vapor deposition of diamond-type carbon films
An improved chemical vapor deposition method for depositing transparent continuous coatings of sp[sup 3]-bonded diamond-type carbon films, comprises: (a) providing a volatile hydrocarbon gas/H[sub 2] reactant mixture in a cold wall vacuum/chemical vapor deposition chamber containing a suitable substrate for said films, at pressure of about 1 to 50 Torr; and (b) directing a concentrated solar flux of from about 40 to about 60 watts/cm[sup 2] through said reactant mixture to produce substrate temperatures of about 750 C to about 950 C to activate deposition of the film on said substrate. 11 figs.
Pitts, J.R.; Tracy, C.E.; King, D.E.; Stanley, J.T.
An improved chemical vapor deposition method for depositing transparent continuous coatings of sp.sup.3 -bonded diamond-type carbon films, comprising: a) providing a volatile hydrocarbon gas/H.sub.2 reactant mixture in a cold wall vacuum/chemical vapor deposition chamber containing a suitable substrate for said films, at pressure of about 1 to 50 Torr; and b) directing a concentrated solar flux of from about 40 to about 60 watts/cm.sup.2 through said reactant mixture to produce substrate temperatures of about 750.degree. C. to about 950.degree. C. to activate deposition of the film on said substrate.
Pitts, J. Roland (Lakewood, CO); Tracy, C. Edwin (Golden, CO); King, David E. (Lakewood, CO); Stanley, James T. (Beaverton, OR)
Preparation of membranes using solvent-less vapor deposition followed by in-situ polymerization
A system of fabricating a composite membrane from a membrane substrate using solvent-less vapor deposition followed by in-situ polymerization. A first monomer and a second monomer are directed into a mixing chamber in a deposition chamber. The first monomer and the second monomer are mixed in the mixing chamber providing a mixed first monomer and second monomer. The mixed first monomer and second monomer are solvent-less vapor deposited onto the membrane substrate in the deposition chamber. The membrane substrate and the mixed first monomer and second monomer are heated to produce in-situ polymerization and provide the composite membrane.
O'Brien, Kevin C. (San Ramon, CA); Letts, Stephan A. (San Ramon, CA); Spadaccini, Christopher M. (Oakland, CA); Morse, Jeffrey C. (Pleasant Hill, CA); Buckley, Steven R. (Modesto, CA); Fischer, Larry E. (Los Gatos, CA); Wilson, Keith B. (San Ramon, CA)
Evaluation of CVD silicon carbide for synchrotron radiation mirrors
Chemical vapor deposited silicon carbide (CVD SiC) is a recent addition to the list of materials suitable for use in the harsh environment of synchrotron radiation (SR) beam lines. SR mirrors for use at normal incidence must be ultrahigh vacuum compatible, must withstand intense x-ray irradiation without surface damage, must be capable of being polished to an extremely smooth surface finish, and must maintain surface figure under thermal loading. CVD SiC exceeds the performance of conventional optical materials in all these areas. It is, however, a relatively new optical material. Few manufacturers have experience in producing optical quality material, and few opticians have experience in figuring and polishing the material. The CVD material occurs in a variety of forms, sensitively dependent upon reaction chamber production conditions. We are evaluating samples of CVD SiC obtained commercially from various manufacturers, representing a range of deposition conditions, to determine which types of CVD material are most suitable for superpolishing. At the time of this writing, samples are being polished by several commercial vendors and surface finish characteristics are being evaluated by various analytical methods.
Takacs, P.Z.
Fabrication of nanostructure by physical vapor deposition with glancing angle deposition technique and its applications
A nanostructural thin film is one of the highly exploiting research areas particularly in applications in sensor, photocatalytic, and solar-cell technologies. In the past two decades, the integration of glancing-angle deposition (GLAD) technique to physical vapor deposition (PVD) process has gained significant attention for well-controlled multidimensional nanomorphologies because of fast, simple, cost-effective, and mass-production capability. The performance and functional properties of the coated thin films generally depend upon their nanostructural compositions, i.e., large aspect ratio, controllable porosity, and shape. Such structural platforms make the fabricated thin films very practical for several realistic applications. We therefore present morphological and nanostructural properties of various deposited materials, which included metals, i.e., silver (Ag), and oxide compounds, i.e., tungsten oxide (WO{sub 3}), titanium dioxide (TiO{sub 2}), and indium tin oxide (ITO). Different PVD techniques based on DC magnetron sputtering and electron-beam evaporation, both with the integrated GLAD component, were discussed. We further explore engineered nanostructures which enable controls of optical, electrical, and mechanical properties. These improvements led to several practical applications in surface-enhanced Raman, smart windows, gas sensors, self-cleaning materials and transparent conductive oxides (TCO)
Horprathum, M., E-mail: email@example.com; Eiamchai, P., E-mail: email@example.com; Patthanasettakul, V.; Limwichean, S.; Nuntawong, N.; Chindaudom, P. [Optical Thin-Film Laboratory National Electronics and Computer Technology Center, Pathumthani, 12120 (Thailand); Kaewkhao, J. [Center of Excellence in Glass Technology and Materials Science (CEGM), Nakhon Pathom Rajabhat University, Nakhon Pathom 73000 (Thailand); Chananonnawathorn, C. [Department of Physics, Faculty of Science and Technology, Thammasat University, Pathumthani, 12121 (Thailand)
As-deposited low-strain LPCVD (low-pressure, chemical-vapor-deposition) polysilicon
As-deposited polysilicon films with very low residual strain (lower than 5 x 10/sup -5/) are obtained by a low-pressure, chemical-vapor-deposition (LPCVD) process. Straight polysilicon bridges 300 ..mu..m long, 1.2 ..mu..m thick, and 2 to 20 ..mu..m wide, made using this process. No buckling has been observed in any of the nearly one thousand bridges of this type made in two separate process runs. In addition, no problems of sticking between the bridges and the substrate were encountered with these structures. The polysilicon films from which the beams were fabricated were deposited by pyrolyzing silane at 605/degree/C on a phosphosilicate-glass (PSG) layer (8 wt % P). The PSG layer serves as a sacrificial layer to be subsequently etched away to free the bridge. Our research is aimed at obtaining an understanding of these relationships through consideration of the role of interfacial stresses and the kinetics of initial crystalline nucleation. The technique for producing these low-strain films is significant, however, because no high-temperature annealing steps are required to produce them. 4 refs., 4 figs.
Fan, L.S.; Muller, R.S.
SPIN (Version 3. 83): A Fortran program for modeling one-dimensional rotating-disk/stagnation-flow chemical vapor deposition reactors
In rotating-disk reactor a heated substrate spins (at typical speeds of 1000 rpm or more) in an enclosure through which the reactants flow. The rotating disk geometry has the important property that in certain operating regimes{sup 1} the species and temperature gradients normal to the disk are equal everywhere on the disk. Thus, such a configuration has great potential for highly uniform chemical vapor deposition (CVD),{sup 2--5} and indeed commercial rotating-disk CVD reactors are now available. In certain operating regimes, the equations describing the complex three-dimensional spiral fluid motion can be solved by a separation-of-variables transformation{sup 5,6} that reduces the equations to a system of ordinary differential equations. Strictly speaking, the transformation is only valid for an unconfined infinite-radius disk and buoyancy-free flow. Furthermore, only some boundary conditions are consistent with the transformation (e.g., temperature, gas-phase composition, and approach velocity all specified to be independent of radius at some distances above the disk). Fortunately, however, the transformed equations will provide a very good practical approximation to the flow in a finite-radius reactor over a large fraction of the disk (up to {approximately}90% of the disk radius) when the reactor operating parameters are properly chosen, i.e, high rotation rates. In the limit of zero rotation rate, the rotating disk flow reduces to a stagnation-point flow, for which a similar separation-of-variables transformation is also available. Such flow configurations ( pedestal reactors'') also find use in CVD reactors. In this report we describe a model formulation and mathematical analysis of rotating-disk and stagnation-point CVD reactors. Then we apply the analysis to a compute code called SPIN and describe its implementation and use. 31 refs., 4 figs.
Coltrin, M.E. (Sandia National Labs., Albuquerque, NM (United States)); Kee, R.J.; Evans, G.H.; Meeks, E.; Rupley, F.M.; Grcar, J.F. (Sandia National Labs., Livermore, CA (United States))
Pulsed chemical vapor deposition of Cu{sub 2}S into a porous TiO{sub 2} matrix
Chalcocite (Cu{sub 2}S) has been deposited via pulsed chemical vapor deposition (PCVD) into a porous TiO{sub 2} matrix using hydrogen sulfide and a metal-organic precursor. The precursor used is similar to the more common Cu(hfac)(tmvs) precursor, but it is fluorine free and exhibits increased thermal stability. The simultaneous exposure of the substrate to the copper precursor and hydrogen sulfide resulted in nonuniform Cu{sub 2}S films with a temperature independent deposition rate implying gas phase reaction kinetics. The exposure of mesoporous TiO{sub 2} and planar ZnO to alternating cycles of the copper precursor and hydrogen sulfide resulted in a PCVD film that penetrated fully into the porous TiO{sub 2} layer with a constant deposition rate of 0.08 nm/cycle over a temperature range of 150-400 deg. C The chalcocite (Cu{sub 2}S) stoichiometry was confirmed with extended x-ray absorption fine structure measurements (EXAFS) and x-ray photoelectron spectroscopy. Calculations of the EXAFS spectrum for different Cu{sub x}S phases show that EXAFS is sensitive to the different phase stoichiometries. Optical absorption measurements of CVD thin films using photothermal deflection spectroscopy show the presence of a metallic copper-poor phase for gas phase nucleated films less than 100 nm thick and a copper-rich semiconducting phase for thicknesses greater than 100 nm with a direct band gap of 1.8 eV and an indirect bandgap of 1.2 eV.
Carbone, I.; Zhou, Q.; Vollbrecht, B.; Yang, L.; Medling, S.; Bezryadina, A.; Bridges, F.; Alers, G. B.; Norman, J. T.; Kinmen, T. [Department of Physics, University of California at Santa Cruz, 1156 High St., Santa Cruz, California 95064 (United States); Air Products Inc., 1969 Palomar Oaks Way, Carlsbad, California 92011 (United States); Department of Physics, Colorado School of Mines, 1500 Illinois St., Golden, Colorado 80401 (United States)
Step-coverage simulation for tetraethoxysilane and ozone atmospheric pressure chemical vapor deposition
A simulation model for atmospheric pressure (AP) CVD has bee developed using one-dimensional diffusion and mass conservation equations. The model was applied to trench step-coverage of the tetraethoxysilane (TEOS) and O[sub 3] CVD, in which it was not necessary to consider lateral diffusion because of narrow (and deep) trenches. For nondoped silicate glass (NSG), the step-coverage of a 4.5 aspect ratio trench showed a good fit if a sticking probability of 0.0039 was assumed for the 0.6% ozone (in oxygen) deposition and of 0.0026 for the 6% ozone deposition (both 400 C). The reaction rate constant was compared with the diffusion mass-transfer coefficient, and the reaction proved to be limited by diffusion of the reactant, TEOS, which directly participated in the CVD reaction. For the 2 m/o phosphosilicate glass (PSG) step-coverage, which had a slight overhang, the model matched the obtained results well only when an active growth species with a high sticking probability of 1.0 was added to the growth species of nondoped oxide. This analytical simulation method satisfactorily explains the experimental data.
Fujino, K. (Semiconductor Process Lab., Toyko (Japan)); Egashira, Y.; Shimogaki, Y.; Komiyama, H. (Univ. of Tokyo, (Japan). Dept. of Chemical Engineering)
Chemical vapor deposition of W-Si-N and W-B-N
A method of depositing a ternary, refractory based thin film on a substrate by chemical vapor deposition employing precursor sources of tungsten comprising WF.sub.6, either silicon or boron, and nitrogen. The result is a W--Si--N or W--B--N thin film useful for diffusion barrier and micromachining applications.
Fleming, James G. (Albuquerque, NM); Roherty-Osmun, Elizabeth Lynn (Albuquerque, NM); Smith, Paul M. (Albuquerque, NM); Custer, Jonathan S. (Albuquerque, NM); Jones, Ronald V. (Albuquerque, NM); Nicolet, Marc-A. (Pasadena, CA); Madar, Roland (Eybens, FR); Bernard, Claude (Brie et Angonnes, FR)
A method of depositing a ternary, refractory based thin film on a substrate by chemical vapor deposition employing precursor sources of tungsten comprising WF[sub 6], either silicon or boron, and nitrogen. The result is a W-Si-N or W-B-N thin film useful for diffusion barrier and micromachining applications. 10 figs.
Fleming, J.G.; Roherty-Osmun, E.L.; Smith, P.M.; Custer, J.S.; Jones, R.V.; Nicolet, M.; Madar, R.; Bernard, C.
Low temperature junction growth using hot-wire chemical vapor deposition
A system and a process for forming a semi-conductor device, and solar cells (10) formed thereby. The process includes preparing a substrate (12) for deposition of a junction layer (14); forming the junction layer (14) on the substrate (12) using hot wire chemical vapor deposition; and, finishing the semi-conductor device.
Wang, Qi; Page, Matthew; Iwaniczko, Eugene; Wang, Tihu; Yan, Yanfa
Chemical Vapor Deposition of Silicon Dioxide by Direct-Current Corona Discharges in Dry Air
Chemical Vapor Deposition of Silicon Dioxide by Direct-Current Corona Discharges in Dry Air, Si4O4(CH3)8) widely used as additives in personal care products. In both photocopiers and air in indoor air, the gas-phase processes limit the rate of deposition. KEY WORDS: Corona plasma; corona
Chen, Junhong
Formation of amorphous metal alloys by chemical vapor deposition
Amorphous alloys are deposited by a process of thermal dissociation of mixtures or organometallic compounds and metalloid hydrides, e.g., transition metal carbonyl such as nickel carbonyl, and diborane. Various sizes and shapes of deposits can be achieved, including near-net-shape free standing articles, multilayer deposits, and the like. Manipulation or absence of a magnetic field affects the nature and the structure of the deposit.
Mullendore, Arthur W. (Sandia Park, NM)
Improved process for the preparation of fiber-reinforced ceramic composites by chemical vapor deposition
A specially designed apparatus provides a steep thermal gradient across the thickness of fibrous preform. A flow of gaseous ceramic matrix material is directed into the fibrous preform at the cold surface. The deposition of the matrix occurs progressively from the hot surface of the fibrous preform toward the cold surface. Such deposition prevents the surface of the fibrous preform from becoming plugged. As a result thereof, the flow of reactant matrix gases into the uninfiltrated (undeposited) portion of the fibrous preform occurs throughout the deposition process. The progressive and continuous deposition of ceramic matrix within the fibrous preform provides for a significant reduction in process time over known chemical vapor deposition processes.
Lackey, W.J. Jr.; Caputo, A.J.
The Effect of High Temperature Annealing on the Grain Characteristics of a Thin Chemical Vapor Deposition Silicon Carbide Layer.
The unique combination of thermo-mechanical and physiochemical properties of silicon carbide (SiC) provides interest and opportunity for its use in nuclear applications. One of the applications of SiC is as a very thin layer in the TRi-ISOtropic (TRISO) coated fuel particles for high temperature gas reactors (HTGRs). This SiC layer, produced by chemical vapor deposition (CVD), is designed to withstand the pressures of fission and transmutation product gases in a high temperature, radiation environment. Various researchers have demonstrated that macroscopic properties can be affected by changes in the distribution of grain boundary plane orientations and misorientations [1 - 3]. Additionally, various researchers have attributed the release behavior of Ag through the SiC layer as a grain boundary diffusion phenomenon [4 - 6]; further highlighting the importance of understanding the actual grain characteristics of the SiC layer. Both historic HTGR fission product release studies and recent experiments at Idaho National Laboratory (INL) [7] have shown that the release of Ag-110m is strongly temperature dependent. Although the maximum normal operating fuel temperature of a HTGR design is in the range of 1000-1250�C, the temperature may reach 1600�C under postulated accident conditions. The aim of this specific study is therefore to determine the magnitude of temperature dependence on SiC grain characteristics, expanding upon initial studies by Van Rooyen et al, [8; 9].
Isabella J van Rooyen; Philippus M van Rooyen; Mary Lou Dunzik-Gougar
Thermal Decomposition of Molecules Relevant to Combustion and Chemical Vapor Deposition by Flash Pyrolysis Time-of-Flight Mass Spectrometry
of Small Molecules by Flash Pyrolysis, University ofwas performed using flash pyrolysis vacuum-ultraviolet time-Vapor Deposition by Flash Pyrolysis Time-of-Flight Mass
Lemieux, Jessy Mario
Research on fundamental aspects of inorganic vapor and particle deposition in coal-fired systems
Parallel research studies are underway on the following interrelated and fundamental subjects; Geometrical Approach to Determining the Sticking Probability of Particles Impacting on Convex Solid Surfaces; Correlations for High Schmidt Number Particle Deposition From Dilute Flowing Rational Engineering Suspensions; Average Capture Probability of Arriving Particles Which Are Distributed With ResPect to ImPact VelocitY and Incidence Angle (Relative to Deposit Substrate); Experimental and Theoretical Studies of Vapor Infiltration of Non-isothermal Granular Deposits; Effective Area/Volume of Populations of 'MicroPorous' Aerosol Particles (Compact and 'Fractal' Quasispherical Aggregates); Effects of Radiative Heat Transfer on the Coagulation Rates of Combustion-Generated Particles; Structure-Sensitivity of Total Mass Deposition Rates from Combustion Product Streams containing Coagulation-Aged Populations of Aggregated Primary Particles; and Na[sub 2]SO[sub 4] Chemical Vapor Deposition From Chlorine-containing Coal-Derived Gases.
Rosner, D.E.
surfaces by functionalization through two methods: (i) electroless method of creating a porous Nickel 50-80 nm thin nickel film can be obtained by electroless deposition on the pary
Demirel, Melik C.
Effects of pressure, temperature, and hydrogen during graphene growth on SiC(0001) using propane-hydrogen chemical vapor deposition
Graphene growth from a propane flow in a hydrogen environment (propane-hydrogen chemical vapor deposition (CVD)) on SiC differentiates from other growth methods in that it offers the possibility to obtain various graphene structures on the Si-face depending on growth conditions. The different structures include the (6{radical}3 Multiplication-Sign 6{radical}3)-R30 Degree-Sign reconstruction of the graphene/SiC interface, which is commonly observed on the Si-face, but also the rotational disorder which is generally observed on the C-face. In this work, growth mechanisms leading to the formation of the different structures are studied and discussed. For that purpose, we have grown graphene on SiC(0001) (Si-face) using propane-hydrogen CVD at various pressure and temperature and studied these samples extensively by means of low energy electron diffraction and atomic force microscopy. Pressure and temperature conditions leading to the formation of the different structures are identified and plotted in a pressure-temperature diagram. This diagram, together with other characterizations (X-ray photoemission and scanning tunneling microscopy), is the basis of further discussions on the carbon supply mechanisms and on the kinetics effects. The entire work underlines the important role of hydrogen during growth and its effects on the final graphene structure.
Michon, A.; Vezian, S.; Roudon, E.; Lefebvre, D.; Portail, M. [CNRS-CRHEA, Rue Bernard Gregory, 06560 Valbonne (France)] [CNRS-CRHEA, Rue Bernard Gregory, 06560 Valbonne (France); Zielinski, M.; Chassagne, T. [NOVASiC, Savoie Technolac, Arche Bat 4, BP267, 73375 Le Bourget du Lac (France)] [NOVASiC, Savoie Technolac, Arche Bat 4, BP267, 73375 Le Bourget du Lac (France)
Kinetic control of catalytic CVD for high quality graphene at low temperatures
Kinetic control of catalytic CVD for high quality graphene at low temperatures Robert S. Weatherup1, Bruno Dlubak1, Stephan Hofmann1,* 1Dept. of Engineering, University of Cambridge, Cambridge CB3 0FA, UK ABSTRACT Low temperature (~600�C... ), scalable chemical vapor deposition of high quality, uniform mono-layer graphene is demonstrated with a mapped Raman 2D/G ratio of >3.2, D/G ratio ? 0.08 and carrier mobilities of ? 3000cm2V-1s-1 on SiO2 support. A kinetic growth model for graphene CVD...
Weatherup, Robert S.; Dlubak, Bruno; Hofmann, Stephan
Diamond growth on WC-Co substrates by hot filament chemical vapor deposition: Effect of filamentsubstrate separation
Polycrystalline diamond films have been grown by hot filament (HF) chemical vapor deposition on WC-Co bar is an established technique for growing hard, wear- resistant polycrystalline diamond films on a range of substratesDiamond growth on WC-Co substrates by hot filament chemical vapor deposition: Effect of filament
Influence of gas composition on wafer temperature in a tungsten chemical vapor deposition reactor: Experimental measurements, model
Influence of gas composition on wafer temperature in a tungsten chemical vapor deposition reactor-wafer, lamp-heated chemical vapor deposition system were used to study the wafer temperature response to gas composition. A physically based simulation procedure for the process gas and wafer temperature was developed
Direct chemical vapor deposition of graphene on dielectric surfaces
A substrate is provided that has a metallic layer on a substrate surface of a substrate. A film made of a two dimensional (2-D) material, such as graphene, is deposited on a metallic surface of the metallic layer. The metallic layer is dewet and/or removed to provide the film on the substrate surface.
Zhang, Yuegang; Ismach, Ariel
Z .Thin Solid Films 392 2001 231 235 Atmospheric pressure chemical vapor deposition of
of electrochromic tungsten oxide films Roy G. Gordona,U , Sean Barryb , Jeffrey T. Bartona , Randy N.R. Broomhall oxide, WO , is a coloring layer commonly used in electrochromic windows and displays. Successful: Chemical vapor deposition; Tungsten; Oxides; Electrochromism 1. Introduction Tungsten oxide is a key
Formation of Nickel Silicide from Direct-Liquid-Injection Chemical-Vapor-Deposited Nickel Nitride Films
. Published April 28, 2010. Metal silicides such as TiSi2 and CoSi2 have been commonly used as the contactsFormation of Nickel Silicide from Direct-Liquid-Injection Chemical-Vapor-Deposited Nickel Nitride as the intermediate for subsequent conversion into nickel silicide NiSi , which is a key material for source, drain
Vapor Deposition of Ruthenium from an Amidinate Precursor Huazhi Li,a
Vapor Deposition of Ruthenium from an Amidinate Precursor Huazhi Li,a Damon B. Farmer,b Roy G School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138, USA October 11, 2007. Thin films of ruthenium have many current and potential appli- cations. They can be used
Vapor Deposition of Ruthenium from an Amidinate Precursor Huazhi Li,a Damon B. Farmer,b Roy G. Gordon* ,a Youbo Lin,b Joost Vlassakb a Department of Chemistry and Chemical Biology and b School and potential applications. They can be used as electrodes for capacitors, in which their high work function
Vapor phase deposition of oligo,,phenylene ethynylene... molecules for use in molecular electronic devices
, many groups have made headway fab- ricating molecular electronic test devices.118 These devices exceptions,22,23 the field of mo- lecular electronics is plagued by problems including a lack of deviceVapor phase deposition of oligo,,phenylene ethynylene... molecules for use in molecular electronic
Bean, John C.
Field emission properties of phosphorus doped microwave plasma chemical vapor deposition diamond films by ion implantation
2002; published 5 February 2003 Phosphorus doped polycrystalline diamond films were grown using ion the electrical char- acteristics of diamond FEAs to lower the operating voltage. Polycrystalline diamond hasField emission properties of phosphorus doped microwave plasma chemical vapor deposition diamond
Lee, Jong Duk
An atomic-scale analysis of catalytically-assisted chemical vapor deposition of carbon nanotubes
An atomic-scale analysis of catalytically-assisted chemical vapor deposition of carbon nanotubes M Growth of carbon nanotubes during transition-metal particles catalytically-assisted thermal decomposition of various nanotube surface and edge reactions (e.g. adsorption of hydrocarbons and hydrogen onto the surface
High-rate chemical vapor deposition of nanocrystalline silicon carbide films by radio frequency thermal plasma
High-rate chemical vapor deposition of nanocrystalline silicon carbide films by radio frequency Semiconductor, Eden Prairie, MN, USA Received 10 July 2002; accepted 14 July 2002 Abstract Silicon carbide films; Nanomaterials; Silicon carbide; Thermal plasmas; Thin films; Si tetrachlorine precursor Silicon carbide has
Zachariah, Michael R.
Epitaxial graphene prepared by chemical vapor deposition on single crystal thin iridium films on sapphire
Epitaxial graphene prepared by chemical vapor deposition on single crystal thin iridium films Cedex 9, France (Dated: 15 March 2011) Uniform single layer graphene was grown on single-crystal Ir. These graphene layers have a single crystallographic orientation and a very low density of defects, as shown
Boyer, Edmond
Compensator Control For Chemical Vapor Deposition Film Growth Using Reduced Order Design Models
in a high pressure chemical vapor deposition (HPCVD) reactor that in cludes multiple species and controls optoelectronic integrated circuits. This can sometimes be addressed, in part, through openloop optimization [7 reactor with realtime sensing and control as an innovative feature of this proto type reactor. Previous
Ionized physical vapor deposition of integrated circuit interconnects* J. Hopwood,a)
Ionized physical vapor deposition of integrated circuit interconnects* J. Hopwood,a) Northeastern University, Boston, Massachusetts 02115 Received 19 November 1997; accepted 25 November 1997 Interconnects to the interconnection of semiconductor devices while the remaining 10 percent is due to transistor-related delay
Cobalt Ultrathin Film Catalyzed Ethanol Chemical Vapor Deposition of Single-Walled Carbon Nanotubes
Cobalt Ultrathin Film Catalyzed Ethanol Chemical Vapor Deposition of Single-Walled Carbon Nanotubes (SWNTs) using a cobalt ultrathin film (1 nm) as the catalyst and ethanol as carbon feedstock flow during the growth. The trace amount of self-contained water (0.2-5 wt %) in ethanol may act
The Effect of Excess Carbon on the Crystallographic, Microstructural, and Mechanical Properties of CVD Silicon Carbide Fibers
Silicon carbide (SiC) fibers made by chemical vapor deposition (CVD) are of interest for organic, ceramic, and metal matrix composite materials due their high strength, high elastic modulus, and retention of mechanical properties at elevated processing and operating temperatures. The properties of SCS-6{trademark} silicon carbide fibers, which are made by a commercial process and consist largely of stoichiometric SiC, were compared with an experimental carbon-rich CVD SiC fiber, to which excess carbon was added during the CVD process. The concentration, homogeneity, and distribution of carbon were measured using energy dispersive x-ray spectroscopy (SEM/EDS). The effect of excess carbon on the tensile strength, elastic modulus, and the crystallographic and microstructural properties of CVD silicon carbide fibers was investigated using tensile testing, x-ray diffraction, scanning electron microscopy (SEM), and transmission electron microscopy (TEM).
Marzik, J V; Croft, W J; Staples, R J; MoberlyChan, W J
Conjugate heat transfer and particle transport in outside vapor deposition process
A numerical study of conjugate heat transfer and particle transport has been carried out for the outside vapor deposition process. A buoyant jet flow impinging on a two-layered cylinder has been analyzed including heat conduction occurring through the two-layered cylinder, which consists of the original target rod and the deposited porous layers. Temperature and flow fields have been obtained by an iterative method, and thermophoretic particle deposition has been studied. Of particular interest are the effects of the thickness of deposited layers, the torch speed, the rotation speed of the cylinder, and the distance between the torch and the cylinder on the heat transfer and particle deposition. Effects of variable properties and tube rotation are also included.
Choi, M.; Song, Y.; Kang, S.H. [Seoul National Univ., Seoul (Korea, Republic of). Dept. of Mechanical Engineering
CVD diamond - fundamental phenomena
This compilation of figures and diagrams addresses the basic physical processes involved in the chemical vapor deposition of diamond. Different methods of deposition are illustrated. For each method, observations are made of the prominent advantages and disadvantages of the technique. Chemical mechanisms of nucleation are introduced.
Yarbrough, W.A. [Pennsylvania State Univ., University Park (United States)
Aerosol chemical vapor deposition of metal oxide films
A process of preparing a film of a multicomponent metal oxide including: forming an aerosol from a solution comprised of a suitable solvent and at least two precursor compounds capable of volatilizing at temperatures lower than the decomposition temperature of said precursor compounds; passing said aerosol in combination with a suitable oxygen-containing carrier gas into a heated zone, said heated zone having a temperature sufficient to evaporate the solvent and volatilize said precursor compounds; and passing said volatilized precursor compounds against the surface of a substrate, said substrate having a sufficient temperature to decompose said volatilized precursor compounds whereby metal atoms contained within said volatilized precursor compounds are deposited as a metal oxide film upon the substrate is disclosed. In addition, a coated article comprising a multicomponent metal oxide film conforming to the surface of a substrate selected from the group consisting of silicon, magnesium oxide, yttrium-stabilized zirconium oxide, sapphire, or lanthanum gallate, said multicomponent metal oxide film characterized as having a substantially uniform thickness upon said substrate.
Ott, K.C.; Kodas, T.T.
Pore evolution during high pressure atomic vapor deposition D. D. Hass Y. Y. Yang H. N. G. Wadley
The development of physical vapor deposition systems that employ inert gas jets to entrain and deposit atomic conditions can contain a higher volume fraction of porosity and a different pore morphology to coatings created by conventional, low pressure (\\10-4 Pa) deposition processes. A recent direct simulation Monte
Development of Nb{sub 3}Sn Cavity Vapor Diffusion Deposition System
Nb{sub 3}Sn is a BCS superconductors with the superconducting critical temperature higher than that of niobium, so theoretically it surpasses the limitations of niobium in RF fields. The feasibility of technology has been demonstrated at 1.5 GHz with Nb{sub 3}Sn vapor deposition technique at Wuppertal University. The benefit at these frequencies is more pronounced at 4.2 K, where Nb{sub 3}Sn coated cavities show RF resistances an order of magnitude lower than that of niobium. At Jefferson Lab we started the development of Nb{sub 3}Sn vapor diffusion deposition system within an R\\&D development program towards compact light sources. Here we present the current progress of the system development.
Eremeev, Grigory V.; Macha, Kurt M.; Clemens, William A.; Park, HyeKyoung; Williams, R. Scott
Continuous growth of single-wall carbon nanotubes using chemical vapor deposition
The invention relates to a chemical vapor deposition process for the continuous growth of a carbon single-wall nanotube where a carbon-containing gas composition is contacted with a porous membrane and decomposed in the presence of a catalyst to grow single-wall carbon nanotube material. A pressure differential exists across the porous membrane such that the pressure on one side of the membrane is less than that on the other side of the membrane. The single-wall carbon nanotube growth may occur predominately on the low-pressure side of the membrane or, in a different embodiment of the invention, may occur predominately in between the catalyst and the membrane. The invention also relates to an apparatus used with the carbon vapor deposition process.
Grigorian, Leonid; Hornyak, Louis; Dillon, Anne C; Heben, Michael J
Grigorian, Leonid (Raymond, OH); Hornyak, Louis (Evergreen, CO); Dillon, Anne C (Boulder, CO); Heben, Michael J (Denver, CO)
Metal organic chemical vapor deposition of 111-v compounds on silicon
Expitaxial composite comprising thin films of a Group III-V compound semiconductor such as gallium arsenide (GaAs) or gallium aluminum arsenide (GaAlAs) on single crystal silicon substrates are disclosed. Also disclosed is a process for manufacturing, by chemical deposition from the vapor phase, epitaxial composites as above described, and to semiconductor devices based on such epitaxial composites. The composites have particular utility for use in making light sensitive solid state solar cells.
Vernon, Stanley M. (Wellesley, MA)
The Sixth International Conference on HotWire Chemical Vapor Deposition (CatCVD) Process will be held
coatings, nanostructured carbon, carbon nanotubes, transition metal oxide nanoparticles, and polymers researchers working on different materials (semiconductors, metal oxides, organics, etc...) and addressing), silicon alloys (nitrides, oxides, carbides), passivation coatings, thin film diamond, hard
van Tiggelen, Bart
Multi-length Scale Modeling of CVD of Diamond Films
) of single-- crystalline and polycrystalline diamond films in acrystalline and polycrystalline diamond filmsMulti-length Scale Modeling of CVD of Diamond Films M. Grujicic and S. G. LaiM. Grujicic and S. G-scale Modeling of CVD Deposition of Diamond Films RotatingRotating--disk Hotdisk Hot--filament CVD
Plasma-enhanced chemical vapor deposition of graphene on copper substrates
A plasma enhanced vapor deposition process is used to synthesize graphene from a hydrogen/methane gas mixture on copper samples. The graphene samples were transferred onto SiO{sub 2} substrates and characterized by Raman spectroscopic mapping and atomic force microscope topographical mapping. Analysis of the Raman bands shows that the deposited graphene is clearly SLG and that the sheets are deposited on large areas of several mm{sup 2}. The defect density in the graphene sheets is calculated using Raman measurements and the influence of the process pressure on the defect density is measured. Furthermore the origin of these defects is discussed with respect to the process parameters and hence the plasma environment.
Woehrl, Nicolas, E-mail: email@example.com; Schulz, Stephan [Faculty of Chemistry and CENIDE, University Duisburg-Essen, Carl-Benz-Stra�e 199, 47057 Duisburg (Germany)] [Faculty of Chemistry and CENIDE, University Duisburg-Essen, Carl-Benz-Stra�e 199, 47057 Duisburg (Germany); Ochedowski, Oliver; Gottlieb, Steven [Faculty of Physics and CENIDE, University Duisburg Essen, Lotharstra�e 1, 47057 Duisburg (Germany)] [Faculty of Physics and CENIDE, University Duisburg Essen, Lotharstra�e 1, 47057 Duisburg (Germany); Shibasaki, Kosuke [Institute of Materials Science, Graduate School of Pure and Applied Sciences, University of Tsukuba, Tsukuba, Ibaraki 305-8573 (Japan)] [Institute of Materials Science, Graduate School of Pure and Applied Sciences, University of Tsukuba, Tsukuba, Ibaraki 305-8573 (Japan)
Corrosion protection of SiC-based ceramics with CVD mullite coatings
SiC based ceramics have been identified as the leading candidate materials for elevated temperature applications in harsh oxidation/corrosion environments. It has been established that a protective coating can be effectively used to avoid problems with excessive oxidation and hot corrosion. However, to date, no coating configuration has been developed that can withstand the rigorous requirements imposed by such applications. Chemical vapor deposited (CVD) mullite coatings due to their desirable properties of toughness, corrosion resistance, and good coefficient of thermal expansion match with SiC are being developed as a potential solution. Formation of mullite on ceramic substrates via chemical vapor deposition was investigated. Thermodynamic calculations performed on the AlCl{sub 3}- SiCl{sub 4}-CO{sub 2}-H{sub 2} system were used to construct equilibrium CVD phase diagrams. Through process optimization, crystalline CVD mullite coatings have been successfully grown on SiC and Si{sub 3}N{sub 4} substrates. Results from the thermodynamic analysis, process optimization, and effect of various process parameters on deposition rate and coating morphology are discussed.
Sarin, V.; Mulpuri, R.; Auger, M. [Boston University, Boston, MA (United States) Manufacturing Engineering
Thermal conductivity of ultra-thin chemical vapor deposited hexagonal boron nitride films
Thermal conductivity of freestanding 10?nm and 20?nm thick chemical vapor deposited hexagonal boron nitride films was measured using both steady state and transient techniques. The measured value for both thicknesses, about 100?�?10?W m{sup ?1} K{sup ?1}, is lower than the bulk basal plane value (390?W m{sup ?1} K{sup ?1}) due to the imperfections in the specimen microstructure. Impressively, this value is still 100 times higher than conventional dielectrics. Considering scalability and ease of integration, hexagonal boron nitride grown over large area is an excellent candidate for thermal management in two dimensional materials-based nanoelectronics.
Alam, M. T.; Haque, M. A., E-mail: firstname.lastname@example.com [Mechanical and Nuclear Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802 (United States); Bresnehan, M. S.; Robinson, J. A. [Materials Science and Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802, USA and The Center for Two-Dimensional and Layered Materials, The Pennsylvania State University, University Park, Pennsylvania 16802 (United States)] [Materials Science and Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802, USA and The Center for Two-Dimensional and Layered Materials, The Pennsylvania State University, University Park, Pennsylvania 16802 (United States)
Tunable carbon nanotube-tungsten carbide nanoparticles heterostructures by vapor deposition
A simple, versatile route for the synthesis of carbon nanotube (CNT)-tungsten carbide nanoparticles heterostructures was set up via vapor deposition process. For the first time, amorphous CNTs (?-CNTs) were used to immobilized tungsten carbide nanoparticles. By adjusting the synthesis and annealing temperature, ?-CNTs/amorphous tungsten carbide, ?-CNTs/W{sub 2}C, and CNTs/W{sub 2}C/WC heterostructures were prepared. This approach provides an efficient method to attach other metal carbides and other nanoparticles to carbon nanotubes with tunable properties.
Xia, Min; Guo, Hongyan; Ge, Changchun [Institute of Special Ceramics and Powder Metallurgy, University of Science and Technology Beijing, 30 Xueyuan Road, Haidian District, Beijing (China); Institute of Powder Metallurgy and Advanced Ceramics, Southwest Jiaotong University, 111, 1st Section, Northern 2nd Ring Road, Chengdu (China); Yan, Qingzhi, E-mail: firstname.lastname@example.com; Lang, Shaoting [Institute of Special Ceramics and Powder Metallurgy, University of Science and Technology Beijing, 30 Xueyuan Road, Haidian District, Beijing (China)
III-nitride quantum cascade detector grown by metal organic chemical vapor deposition
Quantum cascade (QC) detectors in the GaN/Al{sub x}Ga{sub 1?x}N material system grown by metal organic chemical vapor deposition are designed, fabricated, and characterized. Only two material compositions, i.e., GaN as wells and Al{sub 0.5}Ga{sub 0.5}N as barriers are used in the active layers. The QC detectors operates around 4??m, with a peak responsivity of up to ?100??A/W and a detectivity of up to 10{sup 8} Jones at the background limited infrared performance temperature around 140?K.
Song, Yu, E-mail: email@example.com; Huang, Tzu-Yung; Badami, Pranav; Gmachl, Claire [Department of Electrical Engineering, Princeton University, Princeton, New Jersey 08540 (United States); Bhat, Rajaram; Zah, Chung-En [Corning Incorporated, Corning, New York 14831 (United States)
Tunneling characteristics in chemical vapor deposited graphene�hexagonal boron nitride�graphene junctions
Large area chemical vapor deposited graphene and hexagonal boron nitride was used to fabricate graphene�hexagonal boron nitride�graphene symmetric field effect transistors. Gate control of the tunneling characteristics is observed similar to previously reported results for exfoliated graphene�hexagonal boron nitride�graphene devices. Density-of-states features are observed in the tunneling characteristics of the devices, although without large resonant peaks that would arise from lateral momentum conservation. The lack of distinct resonant behavior is attributed to disorder in the devices, and a possible source of the disorder is discussed.
Roy, T.; Hesabi, Z. R.; Joiner, C. A.; Vogel, E. M. [School of Materials Science and Engineering, Georgia Institute of Technology, 771 Ferst Drive, Atlanta, Georgia 30332 (United States); Liu, L.; Gu, G. [Department of Electrical Engineering and Computer Science, University of Tennessee, 1520 Middle Drive, Knoxville, Tennessee 37996 (United States); Barrera, S. de la; Feenstra, R. M. [Department of Physics, Carnegie Mellon University, 5000 Forbes Ave., Pittsburgh, Pennsylvania 15213 (United States); Chakrabarti, B. [School of Materials Science and Engineering, Georgia Institute of Technology, 771 Ferst Drive, Atlanta, Georgia 30332 (United States); Department of Materials Science and Engineering, University of Texas at Dallas, 800 West Campbell Rd., Richardson, Texas 75080 (United States)
Development of hybrid organic-inorganic light emitting diodes using conducting polymers deposited by oxidative chemical vapor deposition process
Difficulties with traditional methods of synthesis and film formation for conducting polymers, many of which are insoluble, motivate the development of CVD methods. Indeed, conjugated polymers with rigid linear backbones ...
Chelawat, Hitesh
Low temperature atmospheric pressure chemical vapor deposition of group 14 oxide films
Depositions of high quality SiO{sub 2} and SnO{sub 2} films from the reaction of homoleptic amido precursors M(NMe{sub 2})4 (M = Si,Sn) and oxygen were carried out in an atmospheric pressure chemical vapor deposition r. The films were deposited on silicon, glass and quartz substrates at temperatures of 250 to 450C. The silicon dioxide films are stoichiometric (O/Si = 2.0) with less than 0.2 atom % C and 0.3 atom % N and have hydrogen contents of 9 {plus_minus} 5 atom %. They are deposited with growth rates from 380 to 900 {angstrom}/min. The refractive indexes of the SiO{sub 2} films are 1.46, and infrared spectra show a possible Si-OH peak at 950 cm{sup {minus}1}. X-Ray diffraction studies reveal that the SiO{sub 2} film deposited at 350C is amorphous. The tin oxide films are stoichiometric (O/Sn = 2.0) and contain less than 0.8 atom % carbon, and 0.3 atom % N. No hydrogen was detected by elastic recoil spectroscopy. The band gap for the SnO{sub 2} films, as estimated from transmission spectra, is 3.9 eV. The resistivities of the tin oxide films are in the range 10{sup {minus}2} to 10{sup {minus}3} {Omega}cm and do not vary significantly with deposition temperature. The tin oxide film deposited at 350C is cassitterite with some (101) orientation.
Hoffman, D.M. [Houston Univ., TX (United States); Atagi, L.M. [Houston Univ., TX (United States)]|[Los Alamos National Lab., NM (United States); Chu, Wei-Kan; Liu, Jia-Rui; Zheng, Zongshuang [Houston Univ., TX (United States); Rubiano, R.R. [Massachusetts Inst. of Tech., Cambridge, MA (United States); Springer, R.W.; Smith, D.C. [Los Alamos National Lab., NM (United States)
Study of plasma enhanced chemical vapor deposition of boron-doped hydrogenated amorphous silicon thin films and the application to p-channel thin film transistor
The material and process characteristics of boron doped hydrogenated amorphous silicon (a-Si:H) thin film deposited by plasma enhanced chemical vapor deposition technique (PECVD) have been studied. The goal is to apply the high quality films...
Nominanda, Helinda
Interaction of Polycrystalline CVD
Interaction of Polycrystalline CVD Diamond Thin Films with Atomic Oxygen Ze'ev Shpilman #12;#12;Interaction of Polycrystalline CVD Diamond Thin Films with Atomic Oxygen Research thesis In Partial.................................................................... 6 1.2.1 Polycrystalline CVD diamond films: growth and structure 7 1.3. Interaction of carbon
Adler, Joan
Volatile organometallic complexes suitable for use in chemical vapor depositions on metal oxide films
Novel ligated compounds of tin, titanium, and zinc are useful as metal oxide CVD precursor compounds without the detriments of extreme reactivity yet maintaining the ability to produce high quality metal oxide coating by contact with heated substrates.
Giolando, Dean M.
Carbon nanowalls grown by microwave plasma enhanced chemical vapor deposition during the carbonization of polyacrylonitrile fibers
We used microwave plasma enhanced chemical vapor deposition (MPECVD) to carbonize an electrospun polyacrylonitrile (PAN) precursor to form carbon fibers. Scanning electron microscopy, Raman spectroscopy, and Fourier transform infrared spectroscopy were used to characterize the fibers at different evolution stages. It was found that MPECVD-carbonized PAN fibers do not exhibit any significant change in the fiber diameter, whilst conventionally carbonized PAN fibers show a 33% reduction in the fiber diameter. An additional coating of carbon nanowalls (CNWs) was formed on the surface of the carbonized PAN fibers during the MPECVD process without the assistance of any metallic catalysts. The result presented here may have a potential to develop a novel, economical, and straightforward approach towards the mass production of carbon fibrous materials containing CNWs.
Li Jiangling; Su Shi; Kundrat, Vojtech; Abbot, Andrew M.; Ye, Haitao [School of Engineering and Applied Science, Aston University, Birmingham B4 7ET (United Kingdom); Zhou Lei [Department of Metallurgy and Materials, University of Birmingham, Birmingham B15 2TT (United Kingdom); Mushtaq, Fajer [Department of Mechanical Engineering, ETH Zurich, Zurich 8092 (Switzerland); Ouyang Defang [School of Life and Health Science, Aston University, Birmingham B4 7ET (United Kingdom); James, David; Roberts, Darren [Thermo Fisher Scientific, Stafford House, Hemel Hempstead HP2 7GE (United Kingdom)
Bifacial solar cell with SnS absorber by vapor transport deposition
The SnS absorber layer in solar cell devices was produced by vapor transport deposition (VTD), which is a low-cost manufacturing method for solar modules. The performance of solar cells consisting of Si/Mo/SnS/ZnO/indium tin oxide (ITO) was limited by the SnS layer's surface texture and field-dependent carrier collection. For improved performance, a fluorine doped tin oxide (FTO) substrate was used in place of the Mo to smooth the topography of the VTD SnS and to make bifacial solar cells, which are potentially useful for multijunction applications. A bifacial SnS solar cell consisting of glass/FTO/SnS/CdS/ZnO/ITO demonstrated front- and back-side power conversion efficiencies of 1.2% and 0.2%, respectively.
Wangperawong, Artit [Stanford University, Stanford, California 94305 (United States); Department of Electrical Engineering, Faculty of Engineering, King Mongkut's University of Technology Thonburi, Bangkok 10140 (Thailand); Hsu, Po-Chun; Yee, Yesheng; Herron, Steven M.; Clemens, Bruce M.; Cui, Yi; Bent, Stacey F., E-mail: firstname.lastname@example.com [Stanford University, Stanford, California 94305 (United States)
Life cycle cost study for coated conductor manufacture by metal organic chemical vapor deposition
The purpose of this report is to calculate the cost of producing high temperature superconducting wire by the Metal Organic Chemical Vapor Deposition (MOCVD) process. The technology status is reviewed from the literature and a plant conceptual design is assumed for the cost calculation. The critical issues discussed are the high cost of the metal organic precursors, the material utilization efficiency and the capability of the final product as measured by the critical current density achieved. Capital, operating and material costs are estimated and summed as the basis for calculating the cost per unit length of wire. Sensitivity analyses of key assumptions are examined to determine their effects on the final wire cost. Additionally, the cost of wire on the basis of cost per kiloampere per meter is calculated for operation at lower temperatures than the liquid nitrogen boiling temperature. It is concluded that this process should not be ruled out on the basis of high cost of precursors alone.
Chapman, J.N.
A study of heat transfer and particle motion relative to the modified chemical vapor deposition process
Heat transfer and particle motion relative to the modified chemical vapor deposition process have been studied for general values of the torch speed. Three-dimensional temperature fields have been obtained over the entire cross section of the tube and the effects of tube rotation and localized torch heating in the axial and circumferential directions have been studied. The particle trajectories have been calculated from a formulation that includes the contributions from forced flow, i.e., Poiseuille flow in the axial direction, rigid body rotation about the tube axis, and thermophoretic contributions in the axial, radial, and angular directions. The particle trajectories are helices and are shown to be strongly dependent on the tube rotation.
Choi, M.; Greif, R. (Univ. of California, Berkeley (United States)); Baum, H.R. (National Inst. of Standards and Technology, Gaithersburg, MD (United States))
Carbon impurities on graphene synthesized by chemical vapor deposition on platinum
We report nanocrystalline carbon impurities coexisting with graphene synthesized via chemical vapor deposition on platinum. For certain growth conditions, we observe micron-size island-like impurity layers which can be mistaken for second graphene layers in optical microscopy or scanning electron microscopy. The island orientation depends on the crystalline orientation of the Pt, as shown by electron backscatter diffraction, indicating growth of carbon at the platinum surface below graphene. Dark-field transmission electron microscopy indicates that in addition to uniform single-crystal graphene, our sample is decorated with nanocrystalline carbon impurities with a spatially inhomogeneous distribution. The impurity concentration can be reduced significantly by lowering the growth temperature. Raman spectra show a large D peak, however, electrical characterization shows high mobility (?8000?cm{sup 2}/Vs), indicating a limitation for Raman spectroscopy in characterizing the electronic quality of graphene.
Ping, Jinglei; Fuhrer, Michael S., E-mail: email@example.com [Center for Nanophysics and Advanced Materials, University of Maryland, College Park, Maryland 20742-4111, USA and School of Physics, Monash University, 3800 Victoria (Australia)
Vapor deposition of platinum alloyed nickel aluminide coatings Z. Yu , K.P. Dharmasena, D.D. Hass, H.N.G. Wadley
Vapor deposition of platinum alloyed nickel aluminide coatings Z. Yu , K.P. Dharmasena, D.D. Hass at high temperature. It requires the chemical vapor deposition of aluminum on a nickel rich superalloy substrate that has been pre-coated with several microns of electrodeposited platinum. Here, we show
The aging of tungsten filaments and its effect on wire surface kinetics in hot-wire chemical vapor deposition
desorption kinetics. In particular, the Si signal exhibits a high temperature activation energy consistent vapor deposition growth have been measured by quadrupole mass spectrometry. New wires produce Si with previous measurements; the activation energy for the SiH3 signal suggests its formation is catalyzed. Aged
Atwater, Harry
Growth of crystalline X-Sic on Si at reduced temperatures by chemical vapor deposition from `silacycllobutane
, and TPS resulted in single crystal layer" on Si ( 111) only up to a thickness of 2000 h;. Highly orientedGrowth of crystalline X-Sic on Si at reduced temperatures by chemical vapor deposition from grown by SCB at a temperature of 800 "C. The progress of SiC/Si heterojunction devices has been C3HsSiH2
Steckl, Andrew J.
Gas jet assisted vapor deposition of yttria stabilized zirconia D. D. Hass and H. N. G. Wadleya
Gas jet assisted vapor deposition of yttria stabilized zirconia D. D. Hass and H. N. G. Wadleya February 2009 A gas jet assisted electron beam evaporation process for synthesizing yttria stabilized zirconia YSZ coatings has recently been reported. The process uses a rarefied inert gas jet to entrain
Reactor design for uniform chemical vapor deposition-grown films without substrate rotation
A reactor vessel is described for chemical vapor deposition of a uniform semiconductor film on a substrate, comprising: a generally cylindrical reaction chamber for receiving a substrate and a flow of reaction gas capable of depositing a film on the substrate under the conditions of the chamber, the chamber having upper and lower portion and being oriented about a vertical axis; a supporting means having a substrate support surface generally perpendicular to the vertical axis for carrying the substrate within the lower portion of the reaction chamber in a predetermined relative position with respect to the upper portion of the reaction chamber, the upper portion including a cylindrically shaped confinement chamber. The confinement chamber has a smaller diameter than the lower portion of the reaction chamber and is positioned above the substrate support surface; and a means for introducing a reaction gas into the confinement chamber in a nonaxial direction so as to direct the reaction gas into the lower portion of the reaction chamber with a non-axial flow having a rotational component with respect to the vertical axis. In this way the reaction gas defines an inward vortex flow pattern with respect to the substrate surface.
Wanlass, M.
Synthesis of multiferroic Er-Fe-O thin films by atomic layer and chemical vapor deposition
R-Fe-O (R?=?rare earth) compounds have recently attracted high interest as potential new multiferroic materials. Here, we report a method based on the solid-state reaction between Er{sub 2}O{sub 3} and Fe layers, respectively grown by atomic layer deposition and chemical vapor deposition, to synthesize Er-Fe-O thin films. The reaction is induced by thermal annealing and evolution of the formed phases is followed by in situ grazing incidence X-ray diffraction. Dominant ErFeO{sub 3} and ErFe{sub 2}O{sub 4} phases develop following subsequent thermal annealing processes at 850?�C in air and N{sub 2}. Structural, chemical, and morphological characterization of the layers are conducted through X-ray diffraction and reflectivity, time-of-flight secondary ion-mass spectrometry, and atomic force microscopy. Magnetic properties are evaluated by magnetic force microscopy, conversion electron M�ssbauer spectroscopy, and vibrating sample magnetometer, being consistent with the presence of the phases identified by X-ray diffraction. Our results constitute a first step toward the use of cost-effective chemical methods for the synthesis of this class of multiferroic thin films.
Mantovan, R., E-mail: email@example.com; Vangelista, S.; Wiemer, C.; Lamperti, A.; Tallarida, G. [Laboratorio MDM IMM-CNR, I-20864 Agrate Brianza (MB) (Italy); Chikoidze, E.; Dumont, Y. [GEMaC, Universit� de Versailles St. Quentin en Yvelines-CNRS, Versailles (France); Fanciulli, M. [Laboratorio MDM IMM-CNR, I-20864 Agrate Brianza (MB) (Italy); Dipartimento di Scienza dei Materiali, Universit� di Milano Bicocca, Milano (Italy)
Characterization of diamond-like nanocomposite thin films grown by plasma enhanced chemical vapor deposition
Diamond-like nanocomposite (DLN) thin films, comprising the networks of a-C:H and a-Si:O were deposited on pyrex glass or silicon substrate using gas precursors (e.g., hexamethyldisilane, hexamethyldisiloxane, hexamethyldisilazane, or their different combinations) mixed with argon gas, by plasma enhanced chemical vapor deposition technique. Surface morphology of DLN films was analyzed by atomic force microscopy. High-resolution transmission electron microscopic result shows that the films contain nanoparticles within the amorphous structure. Fourier transform infrared spectroscopy (FTIR), Raman spectroscopy, and x-ray photoelectron spectroscopy (XPS) were used to determine the structural change within the DLN films. The hardness and friction coefficient of the films were measured by nanoindentation and scratch test techniques, respectively. FTIR and XPS studies show the presence of C-C, C-H, Si-C, and Si-H bonds in the a-C:H and a-Si:O networks. Using Raman spectroscopy, we also found that the hardness of the DLN films varies with the intensity ratio I{sub D}/I{sub G}. Finally, we observed that the DLN films has a better performance compared to DLC, when it comes to properties like high hardness, high modulus of elasticity, low surface roughness and low friction coefficient. These characteristics are the critical components in microelectromechanical systems (MEMS) and emerging nanoelectromechanical systems (NEMS).
Santra, T. S.; Liu, C. H. [Institute of Nanoengineering and Microsystems (NEMS), National Tsing Hua University, Hsinchu, Taiwan 30043 (China); Bhattacharyya, T. K. [Department of Electronics and Electrical Communication Engineering, Indian Institute of Technology, Kharagpur 721302, West Bengal (India); Patel, P. [Department of Electrical and Computer Engineering, University of Illinois at Urbana Champaign, Urbana, Illinois 61801 (United States); Barik, T. K. [School of Applied Sciences, Haldia Institute of Technology, Haldia 721657, Purba Medinipur, West Bengal (India)
Optical coatings of variable refractive index and high laser-resistance from physical-vapor-deposited perfluorinated amorphous polymer
Variable index optical single-layers, optical multilayer, and laser-resistant coatings were made from a perfluorinated amorphous polymer material by physical vapor deposition. This was accomplished by physically vapor depositing a polymer material, such as bulk Teflon AF2400, for example, to form thin layers that have a very low refractive index (.about.1.10-1.31) and are highly transparent from the ultra-violet through the near infrared regime, and maintain the low refractive index of the bulk material. The refractive index can be varied by simply varying one process parameter, either the deposition rate or the substrate temperature. The thus forming coatings may be utilized in anti-reflectors and graded anti-reflection coatings, as well as in optical layers for laser-resistant coatings at optical wavelengths of less than about 2000 nm.
Chow, Robert (Livermore, CA); Loomis, Gary E. (Livermore, CA); Thomas, Ian M. (Livermore, CA)
Variable index optical single-layers, optical multilayer, and laser-resistant coatings were made from a perfluorinated amorphous polymer material by physical vapor deposition. This was accomplished by physically vapor depositing a polymer material, such as bulk Teflon AF2400, for example, to form thin layers that have a very low refractive index (ca. 1.10--1.31) and are highly transparent from the ultra-violet through the near infrared regime, and maintain the low refractive index of the bulk material. The refractive index can be varied by simply varying one process parameter, either the deposition rate or the substrate temperature. The thus forming coatings may be utilized in anti-reflectors and graded anti-reflection coatings, as well as in optical layers for laser-resistant coatings at optical wavelengths of less than about 2000 nm. 2 figs.
Chow, R.; Loomis, G.E.; Thomas, I.M.
Rapid assessment of mid-infrared refractive index anisotropy using a prism coupler: chemical vapor deposited ZnS
A state-of-the-art mid-infrared prism coupler was used to study the refractive index properties of forward-looking-infrared (FLIR) grade zinc sulfide samples prepared with unique planar grain orientations and locations with respect to the CVD growth axis. This study was motivated by prior photoluminescence and x-ray diffraction measurements that suggested refractive index may vary according to grain orientation. Measurements were conducted to provide optical dispersion and thermal index (dn/dT) data at discrete laser wavelengths between 0.633 and 10.591 {mu}m at two temperature set points (30 C and 90 C). Refractive index measurements between samples exhibited an average standard deviation comparable to the uncertainty of the prism coupler measurement (0.0004 refractive index units), suggesting that the variation in refractive index as a function of planar grain orientation and CVD deposition time is negligible, and should have no impact on subsequent optical designs. Measured dispersion data at mid-infrared wavelengths was found to agree well with prior published measurements.
Qiao, Hong (Amy) [Amy; Lipschultz, Kristen A.; Anheier, Norman C.; McCloy, John S.
Growth of magnesium oxide thin lms using single molecular precursors by metalorganic chemical vapor deposition
Growth of magnesium oxide thin ®lms using single molecular precursors by metal±organic chemical precursors; Silicon; Sapphire 1. Introduction Magnesium oxide (MgO) thin ®lms have attracted much attention MgO ®lms on Si(100) above 6508C by thermal CVD. Murayama and Shionoya [12] used magnesium 2
Boo, Jin-Hyo
High-temperature stress measurement on chemical-vapor-deposited tungsten silicide and tungsten films
Stresses in chemical-vapor-deposited tungsten silicide and tungsten films at high temperatures were measured. Tungsten silicide films were formed from WF/sub 6/ and SiH/sub 4/ or Si/sub 2/H/sub 6/. Tungsten films were formed from WF/sub 6/ and H/sub 2/. The stress in tungsten silicide films is tensile and in the order of 10/sup 9/--10/sup 10/ dynes/cm/sup 2/. For a composition ratio of Si/Wless than or equal to2.6, the stress of a film of more than 1000 A has a maximum at about 500 /sup 0/C. On the other hand, for a composition Si/W>2.9, the stress has no maximum. The maximum of the stress is caused by crystallization of the film. The stress has two components. One component is related to the difference of the thermal expansion coefficients between the film and the Si substrate. Another is related to the film crystallization. It was found that the stress concentrates in the portion of the film nearest the substrate. The stress in tungsten films also reaches a maximum at 550 /sup 0/C, similar to the tungsten silicide films. However, the cause of this behavior is not clear.
Shioya, Y.; Ikegami, K.; Maeda, M.; Yanagida, K.
Cooperative Island Growth of Large Area Single-Crystal Graphene by Chemical Vapor Deposition on Cu
We describe a two-step approach for suppressing nucleation of graphene on Cu using chemical vapor deposition. In the first step, as received Cu foils are oxidized in air at temperatures up to 500 C to remove surface impurities and to induce the regrowth of Cu grains during subsequent annealing in H2 flow at 1040 C prior to graphene growth. In the second step, transient reactant cooling is performed by using a brief Ar pulse at the onset of growth to induce collisional deactivation of the carbon growth species. The combination of these two steps results in a three orders of magnitude reduction in the graphene nucleation density, enabling the growth of millimeter-size single crystal graphene grains. A kinetic model shows that suppressing nucleation promotes a cooperative island growth mode that favors the formation of large area single crystal graphene, and it is accompanied by a roughly 3 orders of magnitude increase in the reactive sticking probability of methane compared to that in random nucleation growth.
Regmi, Murari [Oak Ridge National Laboratory (ORNL); Rouleau, Christopher [Oak Ridge National Laboratory (ORNL); Puretzky, Alexander A [ORNL; Ivanov, Ilia N [ORNL; Geohegan, David B [ORNL; Chen, Jihua [ORNL; Eastman, Jeffrey [Argonne National Laboratory (ANL); Eres, Gyula [ORNL
Nitrogen doping of chemical vapor deposition grown graphene on 4H-SiC (0001)
We present optical, electrical, and structural properties of nitrogen-doped graphene grown on the Si face of 4H-SiC (0001) by chemical vapor deposition method using propane as the carbon precursor and N{sub 2} as the nitrogen source. The incorporation of nitrogen in the carbon lattice was confirmed by X-ray photoelectron spectroscopy. Angle-resolved photoemission spectroscopy shows carrier behavior characteristic for massless Dirac fermions and confirms the presence of a graphene monolayer in the investigated nitrogen-doped samples. The structural and electronic properties of the material were investigated by Raman spectroscopy. A systematical analysis of the graphene Raman spectra, including D, G, and 2D bands, was performed. In the case of nitrogen-doped samples, an electron concentration on the order of 5�10 � 10{sup 12}?cm{sup ?2} was estimated based upon Raman and Hall effect measurements and no clear dependence of the carrier concentration on nitrogen concentration used during growth was observed. This high electron concentration can be interpreted as both due to the presence of nitrogen in graphitic-like positions of the graphene lattice as well as to the interaction with the substrate. A greater intensity of the Raman D band and increased inhomogeneity, as well as decreased electron mobility, observed for nitrogen-doped samples, indicate the formation of defects and a modification of the growth process induced by nitrogen doping.
Urban, J. M.; Binder, J.; Wysmo?ek, A. [Faculty of Physics, University of Warsaw, ul. Ho?a 69, 00-681 Warsaw (Poland); D?browski, P.; Strupi?ski, W. [Institute of Electronic Materials Technology, ul. W�lczy?ska 133, 01-919 Warsaw (Poland); Kopciuszy?ski, M.; Ja?ochowski, M. [Institute of Physics, Maria Curie-Sk?odowska University, pl. M. Curie-Sk?odowskiej 1, 20-031 Lublin (Poland); Klusek, Z. [Faculty of Physics and Applied Informatics, University of ?�d?, ul. Pomorska 149/153, 90-236 ?�d? (Poland); Baranowski, J. M. [Faculty of Physics, University of Warsaw, ul. Ho?a 69, 00-681 Warsaw (Poland); Institute of Electronic Materials Technology, ul. W�lczy?ska 133, 01-919 Warsaw (Poland)
On-line coating of glass with tin oxide by atmospheric pressure chemical vapor deposition.
Atmospheric pressure chemical vapor deposition (APCVD) of tin oxide is a very important manufacturing technique used in the production of low-emissivity glass. It is also the primary method used to provide wear-resistant coatings on glass containers. The complexity of these systems, which involve chemical reactions in both the gas phase and on the deposition surface, as well as complex fluid dynamics, makes process optimization and design of new coating reactors a very difficult task. In 2001 the U.S. Dept. of Energy Industrial Technologies Program Glass Industry of the Future Team funded a project to address the need for more accurate data concerning the tin oxide APCVD process. This report presents a case study of on-line APCVD using organometallic precursors, which are the primary reactants used in industrial coating processes. Research staff at Sandia National Laboratories in Livermore, CA, and the PPG Industries Glass Technology Center in Pittsburgh, PA collaborated to produce this work. In this report, we describe a detailed investigation of the factors controlling the growth of tin oxide films. The report begins with a discussion of the basic elements of the deposition chemistry, including gas-phase thermochemistry of tin species and mechanisms of chemical reactions involved in the decomposition of tin precursors. These results provide the basis for experimental investigations in which tin oxide growth rates were measured as a function of all major process variables. The experiments focused on growth from monobutyltintrichloride (MBTC) since this is one of the two primary precursors used industrially. There are almost no reliable growth-rate data available for this precursor. Robust models describing the growth rate as a function of these variables are derived from modeling of these data. Finally, the results are used to conduct computational fluid dynamic simulations of both pilot- and full-scale coating reactors. As a result, general conclusions are reached concerning the factors affecting the growth rate in on-line APCVD reactors. In addition, a substantial body of data was generated that can be used to model many different industrial tin oxide coating processes. These data include the most extensive compilation of thermochemistry for gas-phase tin-containing species as well as kinetic expressions describing tin oxide growth rates over a wide range of temperatures, pressures, and reactant concentrations.
Allendorf, Mark D.; Sopko, J.F. (PPF Industries, Pittsburgh, PA); Houf, William G.; Chae, Yong Kee; McDaniel, Anthony H.; Li, M. (PPF Industries, Pittsburgh, PA); McCamy, J.W. (PPF Industries, Pittsburgh, PA)
Oxide Dispersion Strengthened Iron Aluminide by CVD Coated Powders
This I &I Category2 program developed chemical vapor deposition (CVD) of iron, aluminum and aluminum oxide coated iron powders and the availability of high temperature oxidation, corrosion and erosion resistant coating for future power generation equipment and can be used for retrofitting existing fossil-fired power plant equipment. This coating will provide enhanced life and performance of Coal-Fired Boilers components such as fire side corrosion on the outer diameter (OD) of the water wall and superheater tubing as well as on the inner diameter (ID) and OD of larger diameter headers. The program also developed a manufacturing route for readily available thermal spray powders for iron aluminide coating and fabrication of net shape component by powder metallurgy route using this CVD coated powders. This coating can also be applid on jet engine compressor blade and housing, industrial heat treating furnace fixtures, magnetic electronic parts, heating element, piping and tubing for fossil energy application and automotive application, chemical processing equipment , heat exchanger, and structural member of aircraft. The program also resulted in developing a new fabrication route of thermal spray coating and oxide dispersion strengthened (ODS) iron aluminide composites enabling more precise control over material microstructures.
Asit Biswas Andrew J. Sherman
E-Print Network 3.0 - atomic vapor deposited Sample Search Results
S. S. - School of Nuclear Engineering, Purdue University Collection: Plasma Physics and Fusion 8 Influence of substrate temperature on the stability of glasses prepared by vapor...
Towards improved spinnability of chemical vapor deposition generated multi-walled carbon nanotubes
P. J. F. 1999 Carbon nanotubes and related structures: newof vapor grown carbon nanotubes and single wall nanotubes, Eto Carbon Materials in Carbon Nanotubes: Preparation and
McKee, Gregg Sturdivant Burke
Characteristics of ultra low-k nanoporous and fluorinated silica based films prepared by plasma enhanced chemical vapor deposition
Low dielectric constant (low-k) silica based films were deposited on p-type silicon and polycarbonate substrates by radio frequency (RF) plasma enhanced chemical vapor deposition method at low temperature. A mixture of tetraethoxysilane vapor, oxygen, and tetrafluoromethane (CF{sub 4}) was used for the deposition of the films in forms of two structures called as SiO{sub x}C{sub y} and SiO{sub x}C{sub y}F{sub z}. Properties of the films were controlled by amount of porosity and fluorine content in the film matrix. The influence of RF power and CF{sub 4} flow on the elemental composition, deposition rate, surface roughness, leakage current, refractive index, and dielectric constant of the films were characterized. Moreover, optical emission spectroscopy was applied to monitor the plasma process at the different parameters. Electrical characteristics of SiO{sub x}C{sub y} and SiO{sub x}C{sub y}F{sub z} films with metal-oxide-semiconductor structure were investigated using current-voltage analysis to measure the leakage current and breakdown field, as well as capacitance-voltage analysis to obtain the film's dielectric constant. The results revealed that SiO{sub x}C{sub y} films, which are deposited at lower RF power produce more leakage current, meanwhile the dielectric constant and refractive index of these films decreased mainly due to the more porosity in the film structure. By adding CF{sub 4} in the deposition process, fluorine, the most electronegative and the least polarized atom, doped into the silica film and led to decrease in the refractive index and the dielectric constant. In addition, no breakdown field was observed in the electrical characteristics of SiO{sub x}C{sub y}F{sub z} films and the leakage current of these films reduced by increment of the CF{sub 4} flow.
Abbasi-Firouzjah, M. [Laser and Plasma Research Institute, Shahid Beheshti University G.C., Evin, Tehran 1983963113 (Iran, Islamic Republic of)] [Laser and Plasma Research Institute, Shahid Beheshti University G.C., Evin, Tehran 1983963113 (Iran, Islamic Republic of); Shokri, B. [Laser and Plasma Research Institute, Shahid Beheshti University G.C., Evin, Tehran 1983963113 (Iran, Islamic Republic of) [Laser and Plasma Research Institute, Shahid Beheshti University G.C., Evin, Tehran 1983963113 (Iran, Islamic Republic of); Physics Department, Shahid Beheshti University G.C., Evin, Tehran (Iran, Islamic Republic of)
In-situ observations during chemical vapor deposition of hexagonal boron nitride on polycrystalline copper
-characterised the Cu catalyst exposed to ammonia (NH3, i.e. a nitrogen and hydrogen source without B) instead of borazine under similar pressures. For this ammonia exposure no expansion in the Cu lattice constant is found. As ammonia is known to dissociate on Cu... 1s (Figure 5a,b,c) and valence band (Supporting Figure S4) regions.12 We find that before CVD the as loaded Cu foil surface is heavily oxidized due to storage and transportation in ambient air (before step 1).12 Following an anneal (step 2) in H2...
Kidambi, Piran R.; Blume, Raoul; Kling, Jens; Wagner, Jakob B.; Baehtz, Carsten; Weatherup, Robert S.; Schl�gl, Robert; Bayer, Bernhard C.; Hofmann, Stephan
The influence of convective heat transfer on flow stability in rotating disk chemical vapor deposition reactors
Flow and heat transfer of NH{sub 3} and He were studied in a rotating disk system with applications to chemical vapor deposition reactors. Flow field and disk heat flux were obtained over a range of operating conditions. Comparisons of disk convective heat transfer were made to infinite rotating disk results to appraise uniformity of transport to the disk. Important operating variables include disk spin rate, disk and enclosure temperatures, flow rate, composition, pressure, and gas mixture temperature at the reactor inlet. These variables were studied over ranges of the spin Reynolds number, Re{omega}; disk mixed convection parameter, MCP{sub w}; and wall mixed convection parameter, MCP{sub w}. Results obtained for NH{sub 3} show that increasing Re{omega} from 314.5 to 3145 increases the uniformity of rotating disk heat flux and results in thinner thermal boundary layers at the disk surface. At Re{omega}=314.5, increasing MCP{sub d} to 15 leads to significant departure from the infinite disk result with nonuniform disk heat fluxes and recirculating flow patterns; flow becomes increasingly complex at larger values of MCP{sub d}. At Re{omega} of 3145, results are closer to the infinite disk for MCP{sub d} up to 15. For large negative (hot walls) and positive (cold walls) values of MCP{sub w}, flow recirculates and there is significant deviation from the infinite disk result; nonuniformities occur at both values of Re{omega}. The influence of MCP{sub w} on flow stability is increased at larger MCP{sub d} and lower Re{omega}. To determine the influence of viscosity and thermal conductivity variation with temperature, calculations were made with He and NH{sub 3}; He transport property variation is low relative to NH{sub 3}. Results show that the flow of NH{sub 3} is less stable than that of He as MCP{sub d} is increased for MCP{sub w}=0 and Re{omega}=314.5. 16 refs., 15 figs., 1 tab.
Winters, W.S.; Evans, G.H. [Sandia National Labs., Livermore, CA (United States); Grief, R. [Univ. of California, Berkeley, CA (United States). Mechanical Engineering Dept.
GaN nanorod light emitting diodes with suspended graphene transparent electrodes grown by rapid chemical vapor deposition
Ordered and dense GaN light emitting nanorods are studied with polycrystalline graphene grown by rapid chemical vapor deposition as suspended transparent electrodes. As the substitute of indium tin oxide, the graphene avoids complex processing to fill up the gaps between nanorods and subsequent surface flattening and offers high conductivity to improve the carrier injection. The as-fabricated devices have 32% improvement in light output power compared to conventional planar GaN-graphene diodes. The suspended graphene remains electrically stable up to 300?�C in air. The graphene can be obtained at low cost and high efficiency, indicating its high potential in future applications.
Xu, Kun; Xu, Chen, E-mail: firstname.lastname@example.com; Deng, Jun; Zhu, Yanxu; Guo, Weiling; Mao, Mingming; Xun, Meng; Chen, Maoxing; Zheng, Lei [Key Laboratory of Optoelectronics Technology, Beijing University of Technology, Ministry of Education, Beijing 100124 (China)] [Key Laboratory of Optoelectronics Technology, Beijing University of Technology, Ministry of Education, Beijing 100124 (China); Xie, Yiyang [State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductor, Chinese Academy of Sciences, Beijing 100083 (China)] [State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductor, Chinese Academy of Sciences, Beijing 100083 (China); Sun, Jie, E-mail: firstname.lastname@example.com [Key Laboratory of Optoelectronics Technology, Beijing University of Technology, Ministry of Education, Beijing 100124 (China) [Key Laboratory of Optoelectronics Technology, Beijing University of Technology, Ministry of Education, Beijing 100124 (China); Mikroteknologi och Nanovetenskap, Chalmers Tekniska H�gskola AB, G�teborg 41296 (Sweden)
Photoresponse properties of large-area MoS{sub 2} atomic layer synthesized by vapor phase deposition
Photoresponse properties of a large area MoS{sub 2} atomic layer synthesized by vapor phase deposition method without any catalyst are studied. Scanning electron microscopy, atomic force microscopy, Raman spectrum, and photoluminescence spectrum characterizations confirm that the two-dimensional microstructures of MoS{sub 2} atomic layer are of high quality. Photoelectrical results indicate that the as-prepared MoS{sub 2} devices have an excellent sensitivity and a good reproducibility as a photodetector, which is proposed to be ascribed to the potential-assisted charge separation mechanism.
Luo, Siwei; Qi, Xiang, E-mail: firstname.lastname@example.com, E-mail: firstname.lastname@example.com; Ren, Long; Hao, Guolin; Fan, Yinping; Liu, Yundan; Han, Weijia; Zang, Chen; Li, Jun; Zhong, Jianxin, E-mail: firstname.lastname@example.com, E-mail: firstname.lastname@example.com [Hunan Key Laboratory for Micro-Nano Energy Materials and Devices, People's Republic of China Laboratory for Quantum Engineering and Micro-Nano Energy Technology, and Faculty of Materials and Optoelectronic Physics, Xiangtan University, Hunan 411105 (China)
Graphene chemical vapor deposition at very low pressure: The impact of substrate surface self-diffusion in domain shape
The initial stages of graphene chemical vapor deposition at very low pressures (<10{sup ?5?}Torr) were investigated. The growth of large graphene domains (?up to 100??m) at very high rates (up to 3??m{sup 2} s{sup ?1}) has been achieved in a cold-wall reactor using a liquid carbon precursor. For high temperature growth (>900?�C), graphene grain shape and symmetry were found to depend on the underlying symmetry of the Cu crystal, whereas for lower temperatures (<900?�C), mostly rounded grains are observed. The temperature dependence of graphene nucleation density was determined, displaying two thermally activated regimes, with activation energy values of 6?�?1?eV for temperatures ranging from 900?�C to 960?�C and 9?�?1?eV for temperatures above 960?�C. The comparison of such dependence with the temperature dependence of Cu surface self-diffusion suggests that graphene growth at high temperatures and low pressures is strongly influenced by copper surface rearrangement. We propose a model that incorporates Cu surface self-diffusion as an essential process to explain the orientation correlation between graphene and Cu crystals, and which can clarify the difference generally observed between graphene domain shapes in atmospheric-pressure and low-pressure chemical vapor deposition.
Cunha, T. H. R.; Ek-Weis, J.; Lacerda, R. G.; Ferlauto, A. S., E-mail: email@example.com [Department of Physics, Federal University of Minas Gerais, Belo Horizonte 31270-901 (Brazil)
Simulation of chemical vapor infiltration and deposition based on 3D images: a local scale approach
infiltration of ceramic matrix composites is presented. This computational model requires a 3D representation/reaction problems; Random walks; 3D image-based modeling 1. Introduction Ceramic Matrix Composites and Carbon with a matrix. One of the most efficient ones is Chemical Vapor Infiltration (CVI), by which gaseous precursors
Semi-insulating crystalline silicon formed by oxygen doping during low-temperature chemical vapor deposition
Semi-insulating crystalline silicon formed by oxygen doping during low-temperature chemical vapor) In this letter we demonstrate the use of oxygen as a dopant in silicon to create semi-insulating, crystalline of the films exhibit classical characteristics of space-charge-limited current associated with insulators
Distributed Porosity as a Control Parameter for Oxide Thermal Barriers Made by Physical Vapor Deposition
Anthony G. Evans* Materials Institute, Princeton University, Princeton, New Jersey 08544 Thermal barrier and generating new thermal resistance solutions, as appropri- ate. A continuum heat flow analysis is usedDistributed Porosity as a Control Parameter for Oxide Thermal Barriers Made by Physical Vapor
Research on fundamental aspects of inorganic vapor and particle deposition in coal-fired systems. Seventh quarterly technical report, March 6, 1992--June 5, 1992
Parallel research studies are underway on the following interrelated and fundamental subjects; Geometrical Approach to Determining the Sticking Probability of Particles Impacting on Convex Solid Surfaces; Correlations for High Schmidt Number Particle Deposition From Dilute Flowing Rational Engineering Suspensions; Average Capture Probability of Arriving Particles Which Are Distributed With ResPect to ImPact VelocitY and Incidence Angle (Relative to Deposit Substrate); Experimental and Theoretical Studies of Vapor Infiltration of Non-isothermal Granular Deposits; Effective Area/Volume of Populations of `MicroPorous` Aerosol Particles (Compact and `Fractal` Quasispherical Aggregates); Effects of Radiative Heat Transfer on the Coagulation Rates of Combustion-Generated Particles; Structure-Sensitivity of Total Mass Deposition Rates from Combustion Product Streams containing Coagulation-Aged Populations of Aggregated Primary Particles; and Na{sub 2}SO{sub 4} Chemical Vapor Deposition From Chlorine-containing Coal-Derived Gases.
Vapor-Phase Metalation by Atomic Layer Deposition in a Metal-Organic Framework
encompass deposition onto micro- and nanopowders14 and coating of nanoparticle films15 as well as aerogel coating of porous materials that exhibit ultrahigh-aspect ratios.12,13 To date, some striking examples
In September 1990 DOE-PETC initiated at the Yale HTCRE Laboratory a systematic three-year research program directed toward providing engineers with the fundamentally-based design/optimization 'tools' for economically predicting the dynamics of net deposit growth*, and thermophysical properties of the resulting microparticulate deposits in coal-fired systems. In light of the theoretical 'program' based on the notion of self-regulation'' set forth in Rosner and Nagarajan (1987), this Task includes investigation of the effects of particle material properties and possible liquid phases on the capture properties of particulate deposits. For this purpose we exploit dynamical 'many-body' computer simulation techniques. This approach will provide the required parametric dependencies (on such quantities as incident kinetic energy and angle, mechanical and thermophysical properties of the particles,[hor ellipsis]) of a dimensionless ensemble-averaged particle capture fraction, relegating the role of direct laboratory experiment to verifying (or rejecting) some crucial features/consequences of the simulation route followed. Our ultimate goal is recommend 'sticking' and 'erosion' laws of mechanistic origin. The availability of such laws could dramatically increase the reliability of predicted deposition rates of inertially delivered particles, in the simultaneous presence of a condensed liquid phase within the growing particulate, deposit. Equally important, one could also rationally select conditions to avoid. troublesome deposition subject to other operational requirements.
In September 1990 DOE-PETC initiated at the Yale HTCRE Laboratory a systematic three-year research program directed toward providing engineers with the fundamentally-based design/optimization tools'' foreconomically predicting the dynamics of net deposit growth, and thermophysical properties of the resulting microparticulate deposits in coal-fired systems. The goal of our research in the area of mineral mattertransport is to advance the capability of making reliable engineering predictions of the dynamics of net deposit growth for surfaces exposed to the particle-laden products of coal combustion. To accomplish thisfor a wide variety of combustor types, coal types, and operating conditions, this capability must be based on a quantitative understanding of each of the important mechanisms of mineral matter transport, as well as the nature of the interactions between these substances and the prevailing fireside'' surface of deposits. This level of understanding and predictive capability could be translated into very significant cost reductions for coal-fired equipment design, development and operation. It is also expected that this research activity will not only directly benefit the ash deposition R D community -- but also generically closely related technologies of importance to DOE (e.g. hot-gas clean-up, particulate solids handling,...).
Epitaxial growth of CdTe thin film on cube-textured Ni by metal-organic chemical vapor deposition
CdTe thin film has been grown by metalorganic chemical vapor deposition (MOCVD) on Ni(100) substrate. Using x-ray pole figure measurements we observed the epitaxial relationship of {111}CdTe// {001}Ni with [110]CdTe//[010]Ni and [112] CdTe//[100]Ni. The 12 diffraction peaks in the (111) pole figure of CdTe film and their relative positions with respect to the four peak positions in the (111) pole figure of Ni substrate are consistent with four equivalent orientational domains of CdTe with three to four superlattice match of about 0.7% in the [110] direction of CdTe and the [010] direction of Ni. The electron backscattered diffraction (EBSD) images show that the CdTe domains are 30 degrees orientated from each other.
GIARE, C [Rensselaer Polytechnic Institute (RPI); RAO, S [Rensselaer Polytechnic Institute (RPI); RILEY, M [Rensselaer Polytechnic Institute (RPI); CHEN, L [Rensselaer Polytechnic Institute (RPI); Goyal, Amit [ORNL; BHAT, I [Rensselaer Polytechnic Institute (RPI); LU, T [Rensselaer Polytechnic Institute (RPI); WANG, G [Rensselaer Polytechnic Institute (RPI)
ZnO light-emitting diode grown by plasma-assisted metal organic chemical vapor deposition
We report a breakthrough in fabricating ZnO homojunction light-emitting diode by metal organic chemical vapor deposition. Using NO plasma, we are able to grow p-type ZnO thin films on n-type bulk ZnO substrates. The as-grown films on glass substrates show hole concentration of 10{sup 16}-10{sup 17} cm{sup -3} and mobility of 1-10 cm{sup 2} V{sup -1} s{sup -1}. Room-temperature photoluminescence spectra reveal nitrogen-related emissions. A typical ZnO homojunction shows rectifying behavior with a turn-on voltage of about 2.3 V. Electroluminescence at room temperature has been demonstrated with band-to-band emission at I=40 mA and defect-related emissions in the blue-yellow spectrum range.
Xu, W.Z.; Ye, Z.Z.; Zeng, Y.J.; Zhu, L.P.; Zhao, B.H.; Jiang, L.; Lu, J.G.; He, H.P.; Zhang, S.B. [State Key Laboratory of Silicon Materials, Zhejiang University, Hangzhou 310027 (China); National Renewable Energy Laboratory, Golden, Colorado 80401 (United States)
Vapor deposition of water on graphitic surfaces: Formation of amorphous ice, bilayer ice, ice I, and liquid water
Carbonaceous surfaces are a major source of atmospheric particles and could play an important role in the formation of ice. Here we investigate through molecular simulations the stability, metastability, and molecular pathways of deposition of amorphous ice, bilayer ice, and ice I from water vapor on graphitic and atomless Lennard-Jones surfaces as a function of temperature. We find that bilayer ice is the most stable ice polymorph for small cluster sizes, nevertheless it can grow metastable well above its region of thermodynamic stability. In agreement with experiments, the simulations predict that on increasing temperature the outcome of water deposition is amorphous ice, bilayer ice, ice I, and liquid water. The deposition nucleation of bilayer ice and ice I is preceded by the formation of small liquid clusters, which have two wetting states: bilayer pancake-like (wetting) at small cluster size and droplet-like (non-wetting) at larger cluster size. The wetting state of liquid clusters determines which ice polymorph is nucleated: bilayer ice nucleates from wetting bilayer liquid clusters and ice I from non-wetting liquid clusters. The maximum temperature for nucleation of bilayer ice on flat surfaces, T{sub B}{sup max} is given by the maximum temperature for which liquid water clusters reach the equilibrium melting line of bilayer ice as wetting bilayer clusters. Increasing water-surface attraction stabilizes the pancake-like wetting state of liquid clusters leading to larger T{sub B}{sup max} for the flat non-hydrogen bonding surfaces of this study. The findings of this study should be of relevance for the understanding of ice formation by deposition mode on carbonaceous atmospheric particles, including soot.
Lupi, Laura; Kastelowitz, Noah; Molinero, Valeria, E-mail: firstname.lastname@example.com [Department of Chemistry, The University of Utah, 315 South 1400 East, Salt Lake City, Utah 84112-0850 (United States)
Study on plasma assisted metal-organic chemical vapor deposition of Zr,,C,N... and Ti,,C,N... thin films and in situ plasma diagnostics with optical
films and in situ plasma diagnostics with optical emission spectroscopy S. J. Cho, S.-H. Nam, C.-K. JungStudy on plasma assisted metal-organic chemical vapor deposition of Zr,,C,N... and Ti,,C,N... thin C,N films were synthesized by pulsed dc plasma assisted metal-organic chemical vapor deposition
The Progress on Low-Cost, High-Quality, High-Temperature Superconducting Tapes Deposited by the Combustion Chemical Vapor Deposition Process
The innovative Combustion Chemical Vapor Deposition (CCVD) process is a non-vacuum technique that is being investigated to enable next generation products in several application areas including high-temperature superconductors (HTS). In combination with the Rolling Assisted Biaxially Textured Substrate (RABiTS) technology, the CCVD process has significant promise to provide low-cost, high-quality lengths of YBCO coated conductor. Over 100 meter lengths of both Ni and Ni-W (3 at. Wt.%) substrates with a surface roughness of 12-18 nm were produced. The CCVD technology has been used to deposit both buffer layer coatings as well as YBCO superconducting layers. Buffer layer architecture of strontium titanate (SrTiO{sub 3}) and ceria (CeO{sub 2}) have been deposited by CCVD on textured nickel substrates and optimized to appropriate thicknesses and microstructures to provide templates for growing PLD YBCO with a J{sub c} of 1.1 MA/cm{sup 2} at 77 K and self-field. The CCVD buffer layers have been scaled to meter plus lengths with good epitaxial uniformity along the length. A short sample cut from one of the lengths enabled high critical current density PLD YBCO. Films of CCVD YBCO superconductors have been grown on single crystal substrates with critical current densities over 1 MA/cm{sup 2}. In addition, superconducting YBCO films with an I{sub c} of 60 A/cm-width (J{sub c} = 1.5 MA/cm{sup 2}) were grown on ORNL RABiTS (CeO{sub 2}/YSZ/Y{sub 2}O{sub 3}/Ni/Ni-3W) using CCVD process.
Shoup, S.S.; White, M.K.; Krebs, S.L.; Darnell, N.; King, A.C.; Mattox, D.S.; Campbell, I.H.; Marken, K.R.; Hong, S.; Czabaj, B.; Paranthaman, M.; Christen, H.M.; Zhai, H.-Y. Specht, E.
Simple method for the calculation and use of CVD phase diagrams with applications to the Ti-B-Cl-H system, 1200 to 800/sup 0/K
A simple method for calculating multi-component gas-solid equilibrium phase diagrams for chemical vapor deposition (CVD) systems is presented. The method proceeds in three steps: dtermination of stable solid assemblages, evaluation of gas-solid stability relations, and calcuation of conventional phase diagrams using a new free energy minimization technique. The phase diagrams can be used to determine (1) bulk compositions and phase fields accessible by CVD techniques; (2) expected condensed phases for various starting gas mixtures; and (3) maximum equilibrium yields for specific CVD process variables. The three step thermodynamic method is used to calcuate phase diagrams for the example CVD system Ti-B-Cl-H at 1200 and 800/sup 0/K. Examples of applications of the diagrams for yield optimization and experimental accessibility studies are presented and discussed. Experimental verification of the TiB/sub 2/ + Gas/Gas phase field boundary at 1200/sup 0/K, H/Cl = 1 confirms the calculated boundary and indicates that equilibrium is nearly and rapidly approached under laboratory conditions.
Randich, E.; Gerlach, T. M.
Characterization of amorphous hydrogenated carbon nitride films prepared by plasma-enhanced chemical vapor deposition using a helical resonator discharge
Amorphous hydrogenated carbon nitride thin films (a-CN{sub x}:H) have been prepared by plasma-enhanced chemical vapor deposition of N{sub 2} and CH{sub 4} gases using a helical resonator discharge. The structural and optical properties of the deposited a-CN{sub x}:H films have been systematically studied as a function of the substrate temperature and radio frequency (rf) substrate bias. The chemical structure and elemental composition of the a-CN{sub x}:H films were characterized by Fourier transform infrared spectroscopy (FT-IR), x-ray photoelectron spectroscopy (XPS), and Raman spectroscopy. The optical properties of the films were evaluated using transmission ultraviolet{endash}visible spectroscopy. The morphology of the films was investigated by scanning electron microscopy and atomic force microscopy. The FT-IR and XPS studies demonstrate the presence of carbon{endash}nitrogen bonds with hydrogenated components in the films. The film composition ratio N/C was found to vary from 0.127 to 0.213 depending on the deposition conditions. The Raman spectra, showing the G and D bands, indicate that the a-CN{sub x}:H films have a graphitic structure. It can be found that the optical band-gap E{sub g} of a-CN{sub x}:H films is associated with graphitic clusters, while the decrease in E{sub g} is correlated with an increase in the size and number of graphitic clusters. Combining the results of Raman and optical measurements, it can be concluded that a progressive graphitization of the films occurs with increasing the substrate temperature and rf substrate bias power, corresponding to bias voltage. {copyright} {ital 1997 American Institute of Physics.}
Kim, J.H.; Ahn, D.H. [LG Electronics Research Center, 16 Woomyeon-Dong, Seocho-Gu, Seoul 137-140 (Korea)] [LG Electronics Research Center, 16 Woomyeon-Dong, Seocho-Gu, Seoul 137-140 (Korea); Kim, Y.H.; Baik, H.K. [Department of Metallurgical Engineering, Yonsei University, 134 Shinchon-dong, Seodaemun-ku, Seoul 120-749 (Korea)] [Department of Metallurgical Engineering, Yonsei University, 134 Shinchon-dong, Seodaemun-ku, Seoul 120-749 (Korea)
Multiwalled Carbon Nanotube Forest Grown via Chemical Vapor Deposition from Iron Catalyst Nanoparticles, by XPS
Carbon nanotubes (CNTs) have unique chemical and physical properties. Herein, we report an XPS analysis of a forest of multiwalled CNTs using monochromatic Al K? radiation. Survey scans show only one element: carbon. The carbon 1s peak is centered 284.5 eV. The C 1s envelope also shows the expected ? ? ?* shake-up peak at ca. 291 eV. The valence band and carbon KVV Auger signals are presented. When patterned, the CNT forests can be used as a template for subsequent deposition of metal oxides to make thin layer chromatography plates.1-3
Jensen, David S.; Kanyal, Supriya S.; Madaan, Nitesh; Vail, Michael A.; Dadson, Andrew; Engelhard, Mark H.; Linford, Matthew R.
Simulation and analysis of particle-aided CVD
This report describes particle-aided chemical vapor deposition. It is the goal to produce various composites of silicon carbides and to theoretically analyze the process.
Plasma-enriched chemical vapor deposition of silicon nitride on silicon carbide fibers
Near stoichiometric Si:N coatings were deposited by means of PECVD on SCS-6 SiC fibers which contained a carbon-rich coating. Weight loss associated with oxidation of the outer carbon-rich coating of the as-received SiC fibers was greatly reduced for the Si:N coated SiC fibers even after 10 h heat-treatment in oxygen at 800{degrees}C. Auger Electron Spectroscopy (AES) was used to obtain elemental compositions of the as-received and Si:N coated SiC fibers after heat-treatment. Negligible amounts of oxygen were found at the carbon-rich coating of the heat-treated Si:N coated SiC fiber. These results clearly prove the effectiveness of PECVD silicon nitride coating as an oxygen diffusion barrier.
Stinespring, C.D.; Collazos, D.F.; Gupta, R.K. [West Virginia Univ., Morgantown, WV (United States)] [and others
Studies of n-type doping and surface modification of CVD diamond for use
strategy in chemical vapour deposition (CVD) of polycrystalline diamond films. Lithium nitride (Li3NStudies of n-type doping and surface modification of CVD diamond for use in thermionic applications-type dopants in diamond, the work has examined the use of Li-N codoping as a possible alternative doping
Analysis of buoyancy and tube rotation relative to the modified chemical vapor deposition process
The secondary flows resulting from buoyancy effects in respect to the MCVD process have been studied in a rotating horizontal tube using a perturbation analysis. The three-dimensional secondary flow fields have been determined at several axial locations in a tube whose temperature varies in both the axial and circumferential directions for different rotational speeds. For small rotational speeds, buoyancy and axial convection are dominant and the secondary flow patterns are different in the regions near and far from the torch. For moderate rotational speeds, the effects of buoyancy, axial and angular convection are all important in the region far from the torch where there is a spiraling secondary flow. For large rotational speeds, only buoyancy and angular convection effects are important and no spiraling secondary motions occurs far downstream. Compared with thermophoresis, the important role of buoyancy in determining particle trajectories in MCVD is presented. As the rotational speed increases, the importance of the secondary flow decreases and the thermophoretic contribution vecomes more important. It is noted that thermophoresis is considered to be the main cause of particle deposition in the MCVD process.
Choi, M.; Lin, Y.T.; Greif, R. (Univ. of California, Berkeley (USA))
Activity and Evolution of Vapor Deposited Pt-Pd Oxygen Reduction Catalysts for Solid Acid Fuel Cells
The performance of hydrogen fuel cells based on the crystalline solid proton conductor CsH2PO4 is circumscribed by the mass activity of platinum oxygen reduction catalysts in the cathode. Here we report on the first application of an alloy catalyst in a solid acid fuel cell, and demonstrate an activity 4.5 times greater than Pt at 0.8 V. These activity enhancements were obtained with platinum-palladium alloys that were vapor-deposited directly on CsH2PO4 at 210 C. Catalyst mass activity peaks at a composition of 84 at% Pd, though smaller activity enhancements are observed for catalyst compositions exceeding 50 at% Pd. Prior to fuel cell testing, Pd-rich catalysts display lattice parameter expansions of up to 2% due to the presence of interstitial carbon. After fuel cell testing, a Pt-Pd solid solution absent of lattice dilatation and depleted in carbon is recovered. The structural evolution of the catalysts is correlated with catalyst de-activation.
Papandrew, Alexander B [ORNL; Chisholm, Calum R [ORNL; Zecevic, strahinja [LiOx, Inc., Pasadena, California 91106, United States; Veith, Gabriel M [ORNL; Zawodzinski, Thomas A [ORNL
Step-edge-induced resistance anisotropy in quasi-free-standing bilayer chemical vapor deposition graphene on SiC
The transport properties of quasi-free-standing (QFS) bilayer graphene on SiC depend on a range of scattering mechanisms. Most of them are isotropic in nature. However, the SiC substrate morphology marked by a distinctive pattern of the terraces gives rise to an anisotropy in graphene's sheet resistance, which may be considered an additional scattering mechanism. At a technological level, the growth-preceding in situ etching of the SiC surface promotes step bunching which results in macro steps ?10?nm in height. In this report, we study the qualitative and quantitative effects of SiC steps edges on the resistance of epitaxial graphene grown by chemical vapor deposition. We experimentally determine the value of step edge resistivity in hydrogen-intercalated QFS-bilayer graphene to be ?190???m for step height h{sub S}?=?10?nm and provide proof that it cannot originate from mechanical deformation of graphene but is likely to arise from lowered carrier concentration in the step area. Our results are confronted with the previously reported values of the step edge resistivity in monolayer graphene over SiC atomic steps. In our analysis, we focus on large-scale, statistical properties to foster the scalable technology of industrial graphene for electronics and sensor applications.
Ciuk, Tymoteusz [Institute of Electronic Materials Technology, Wolczynska 133, 01-919 Warsaw (Poland); Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warsaw (Poland); Cakmakyapan, Semih; Ozbay, Ekmel [Department of Electrical and Electronics Engineering, Department of Physics, Nanotechnology Research Center, Bilkent University, 06800 Bilkent, Ankara (Turkey); Caban, Piotr; Grodecki, Kacper; Pasternak, Iwona; Strupinski, Wlodek, E-mail: email@example.com [Institute of Electronic Materials Technology, Wolczynska 133, 01-919 Warsaw (Poland); Krajewska, Aleksandra [Institute of Electronic Materials Technology, Wolczynska 133, 01-919 Warsaw (Poland); Institute of Optoelectronics, Military University of Technology, Gen. S. Kaliskiego 2, 00-908 Warsaw (Poland); Szmidt, Jan [Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warsaw (Poland)
Properties of chemical vapor deposited tungsten silicide films using reaction of WF/sub 6/ and Si/sub 2/H/sub 6/
Tungsten silicide films were formed by the chemical vapor deposition method using the reaction WF/sub 6/ and Si/sub 2/H/sub 6/. The deposition rate, resistivity, composition, stress, crystal structure, and content of impurities were studied and compared with tungsten silicide films deposited by reaction of WF/sub 6/ and SiH/sub 4/. The tungsten silicide films made using Si/sub 2/H/sub 6/ have a higher deposition rate and higher Si concentration than those made by using SiH/sub 4/ at the same substrate temperature. For these reasons, the tungsten silicide films made by using Si/sub 2/H/sub 6/ were found to have a resistivity that is a little higher and, after annealing, a stress that is smaller than that made by SiH/sub 4/.
Shioya, Y.; Ikegami, K.; Kobayashi, I.; Maeda, M.
Elemental diffusion during the droplet epitaxy growth of In(Ga)As/GaAs(001) quantum dots by metal-organic chemical vapor deposition
Droplet epitaxy is an important method to produce epitaxial semiconductor quantum dots (QDs). Droplet epitaxy of III-V QDs comprises group III elemental droplet deposition and the droplet crystallization through the introduction of group V elements. Here, we report that, in the droplet epitaxy of InAs/GaAs(001) QDs using metal-organic chemical vapor deposition, significant elemental diffusion from the substrate to In droplets occurs, resulting in the formation of In(Ga)As crystals, before As flux is provided. The supply of As flux suppresses the further elemental diffusion from the substrate and promotes surface migration, leading to large island formation with a low island density.
Chen, Z. B.; Chen, B.; Wang, Y. B.; Liao, X. Z., E-mail: firstname.lastname@example.com [School of Aerospace, Mechanical and Mechatronic Engineering, The University of Sydney, Sydney, NSW 2006 (Australia); Lei, W. [School of Electrical, Electronic and Computer Engineering, The University of Western Australia, Perth, WA 6009 (Australia); Tan, H. H.; Jagadish, C. [Department of Electronic Materials Engineering, Research School of Physics and Engineering, The Australian National University, Canberra, ACT 0200 (Australia); Zou, J. [Materials Engineering and Centre for Microscopy and Microanalysis, The University of Queensland, Brisbane, QLD 4072 (Australia); Ringer, S. P. [School of Aerospace, Mechanical and Mechatronic Engineering, The University of Sydney, Sydney, NSW 2006 (Australia); Australian Centre for Microscopy and Microanalysis, The University of Sydney, Sydney, NSW 2006 (Australia)
E-Print Network 3.0 - adherent cvd diamond Sample Search Results
Search Sample search results for: adherent cvd diamond Page: << < 1 2 3 4 5 > >> 1 Thin Film Diamond by Chemical Vapour Deposition Methods M. N. R. Ashfold, P. W. May, and C. A....
Calibrated vapor generator source
A portable vapor generator is disclosed that can provide a controlled source of chemical vapors, such as, narcotic or explosive vapors. This source can be used to test and calibrate various types of vapor detection systems by providing a known amount of vapors to the system. The vapor generator is calibrated using a reference ion mobility spectrometer. A method of providing this vapor is described, as follows: explosive or narcotic is deposited on quartz wool, placed in a chamber that can be heated or cooled (depending on the vapor pressure of the material) to control the concentration of vapors in the reservoir. A controlled flow of air is pulsed over the quartz wool releasing a preset quantity of vapors at the outlet. 10 figs.
Davies, J.P.; Larson, R.A.; Goodrich, L.D.; Hall, H.J.; Stoddard, B.D.; Davis, S.G.; Kaser, T.G.; Conrad, F.J.
Growth of Large-Area Aligned Molybdenum Nanowires by High Temperature Chemical Vapor Deposition: Synthesis, Growth Mechanism, and Device Application
, thermogravimetry, and differential scanning calorimetry analysis, as well as structure analysis by electron on the decomposition of MoO2 vapors through condensation of its vapor at high substrate temperatures. The aligned nanowires with H2 gas.6d-f However, the reduction process degrades the crystal- linity of the nanowires
Wang, Zhong L.
Atmospheric Pressure Chemical Vapor Deposition of High Silica SiO2-TiO2 Antireflective Thin Films for Glass Based Solar Panels
The atmospheric pressure chemical vapor deposition (APCVD) of SiO2-TiO2 thin films employing [[(tBuO)3Si]2O-Ti(OiPr)2], which can be prepared from commercially available materials, results in antireflective thin films on float glass under industrially relevant manufacturing conditions. It was found that while the deposition temperature had an effect on the SiO2:TiO2 ratio, the thickness was dependent on the time of deposition. This study shows that it is possible to use APCVD employing a single source precursor containing titanium and silicon to produce thin films on float glass with high SiO2:TiO2 ratios.
Klobukowski, Erik R [ORNL; Tenhaeff, Wyatt E [ORNL; McCamy, James [PPG; Harris, Caroline [PPG; Narula, Chaitanya Kumar [ORNL
Development of nanodiamond foils for H- stripping to Support the Spallation Neutron Source (SNS) using hot filament chemical vapor deposition
Thin diamond foils are needed in many particle accelerator experiments regarding nuclear and atomic physics, as well as in some interdisciplinary research. Particularly, nanodiamond texture is attractive for this purpose as it possesses a unique combination of diamond properties such as high thermal conductivity, mechanical strength and high radiation hardness; therefore, it is a potential material for energetic ion beam stripper foils. At the ORNL Spallation Neutron Source (SNS), the installed set of foils must be able to survive a nominal five-month operation period, without the need for unscheduled costly shutdowns and repairs. Thus, a small foil about the size of a postage stamp is critical to the operation of SNS and similar sources in U.S. laboratories and around the world. We are investigating nanocrystalline, polycrystalline and their admixture films fabricated using a hot filament chemical vapor deposition (HFCVD) system for H- stripping to support the SNS at Oak Ridge National Laboratory. Here we discuss optimization of process variables such as substrate temperature, process gas ratio of H2/Ar/CH4, substrate to filament distance, filament temperature, carburization conditions, and filament geometry to achieve high purity diamond foils on patterned silicon substrates with manageable intrinsic and thermal stresses so that they can be released as free standing foils without curling. An in situ laser reflectance interferometry tool (LRI) is used for monitoring the growth characteristics of the diamond thin film materials. The optimization process has yielded free standing foils with no pinholes. The sp3/sp2 bonds are controlled to optimize electrical resistivity to reduce the possibility of surface charging of the foils. The integrated LRI and HFCVD process provides real time information on the growth of films and can quickly illustrate growth features and control film thickness. The results are discussed in the light of development of nanodiamond foils that will be able to withstand a few MW proton beam and hopefully will be able to be used after possible future upgrades to the SNS to greater than a 3MW beam.
Vispute, R D [Blue Wave Semiconductors; Ermer, Henry K [Blue Wave Semiconductors; Sinsky, Phillip [Blue Wave Semiconductors; Seiser, Andrew [Blue Wave Semiconductors; Shaw, Robert W [ORNL; Wilson, Leslie L [ORNL
Synthesis of SiO{sub 2}/?-SiC/graphite hybrid composite by low temperature hot filament chemical vapor deposition
?-SiC thin films were synthesized directly on graphite by hot filament chemical vapor deposition at low temperature. SiH{sub 4} diluted in hydrogen was employed as the silicon source, while graphite was functioned as both substrate and carbon source for the as-grown ?-SiC films. X-ray diffraction and Fourier transform infrared analysis indicate that SiO{sub 2}/?-SiC/graphite hybrid composite was formed after post annealing treatment, and its crystalline quality can be remarkably improved under optimized annealing conditions. The possible growth mechanism was proposed based on in situ etching of graphite by reactive hydrogen radicals at the atomic level.
Zhang, Zhikun; Bi, Kaifeng; Liu, Yanhong; Qin, Fuwen; Liu, Hongzhu [School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024 (China)] [School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024 (China); Bian, Jiming, E-mail: firstname.lastname@example.com [School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024 (China) [School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024 (China); Key Laboratory of Inorganic Coating Materials, Chinese Academy of Sciences, Shanghai 200050 (China); Zhang, Dong [New Energy Source Research Center of Shenyang Institute of Engineering, Shengyang 110136 (China)] [New Energy Source Research Center of Shenyang Institute of Engineering, Shengyang 110136 (China); Miao, Lihua [School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024 (China) [School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024 (China); Department of Computer and Mathematical Basic Teaching, Shenyang Medical College, Shenyan 110034 (China)
The optimization of interfaces in InAsSb/InGaAs strained-layer superlattices grown by metal-organic chemical vapor deposition
We have prepared InAsSb/InGaAs strained-layer superlattice (SLS) semiconductors by metal-organic chemical vapor deposition (MOCVD) under a variety of conditions. Presence of an InGaAsSb interface layer is indicated by x-ray diffraction patterns. Optimized growth conditions involved the use of low pressure, short purge times, and no reactant flow during the purges. MOCVD was used to prepare an optically pumped, single heterostructure InAsSb/InGaAs SLS/InPSb laser which emitted at 3.9 {mu}m with a maximum operating temperature of approximately 100 K.
Biefeld, R.M.; Baucom, K.C.; Kurtz, S.R.
Diode-laser-based atomic absorption monitor using frequency-modulation spectroscopy for physical vapor deposition process control
Diode-laser-based atomic absorption monitor using frequency-modulation spectroscopy for physical, and the dynamic events occur- ring as vapors condense on a substrate. Atomic absorption AA spectroscopy also been measured by means of the Doppler frequency shifts of the atomic absorption with respect
Fejer, Martin M.
Measurement and modeling of Ar/H2/CH4 arc jet discharge chemical vapor deposition reactors. I. Intercomparison
of thin, polycrystalline diamond films, and the results of a two-dimensional r,z computer model domains. dc arc jets offer considerable advantages as a route to deposition of polycrystalline diamond
A three-dimensional analysis of the flow and heat transfer for the modified chemical vapor deposition process including buoyancy, variable properties, and tube rotation
A study has been made of the heat transfer, flow, and particle deposition relative to the modified chemical vapor deposition (MCVD) process. The effects of variable properties, buoyancy, and tube rotation have been included in the study. The resulting three-dimensional temperature and velocity fields have been obtained for a range of conditions. The effects of buoyancy result in asymmetric temperature and axial velocity profiles with respect to the tube axis. Variable properties cause significant variations in the axial velocity along the tube and in the secondary flow in the region near the torch. Particle trajectories are shown to be strongly dependent on the tube rotation and are helices for large rotational speeds. The component of secondary flow in the radial direction is compared to the thermophoretic velocity, which is the primary cause of particle deposition in the MCVD process. Over the central portion of the tube the radial component of the secondary flow is most important in determining the motion of the particles.
Lin, Y.T.; Choi, M.; Greif, R. (Univ. of California, Berkeley (USA))
Co-Pt core-shell nanostructured catalyst prepared by selective chemical vapor pulse deposition of Pt on Co as a cathode in polymer electrolyte fuel cells
A new type of PtCo/C catalyst for use as a cathode in polymer electrolyte fuel cells was prepared by selective chemical vapor pulse deposition (CVPD) of Pt on the surface of Co. The activity of the prepared catalyst for oxygen reduction was higher than that of a catalyst prepared by sequential impregnation (IMP) with the two metallic components. This catalytic activity difference occurs because the former catalyst has smaller Pt crystallites that produce stronger Pt-Co interactions and have a larger Pt surface area. Consequently, the CVPD catalyst has a great number of Co particles that are in close contact with the added Pt. The Pt surface was also electronically modified by interactions with Co, which were stronger in the CVPD catalyst than in the IMP catalyst, as indicated by X-ray diffraction, X-ray photoemission spectroscopy, and cyclic voltammetry measurements of the catalysts.
Seo, Sang-Joon; Chung, Ho-Kyoon [SKKU Advanced Institute of Nanotechnology (SAINT) and Center for Human Interface Nanotechnology (HINT), Sungkyunkwan University, Suwon, Gyeonggi 440-746 (Korea, Republic of); Yoo, Ji-Beom [SKKU Advanced Institute of Nanotechnology (SAINT) and Center for Human Interface Nanotechnology (HINT), Sungkyunkwan University, Suwon, Gyeonggi 440-746, Korea and School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746 (Korea, Republic of); Chae, Heeyeop; Seo, Seung-Woo; Min Cho, Sung, E-mail: email@example.com [School of Chemical Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746 (Korea, Republic of)
Optimization of InAsSb/InGaAs strained-layer superlattice growth by metal-organic chemical vapor deposition for use in infrared emitters
We have prepared InAsSb/InGaAs strained-layer superlattices (SLSs) by metal-organic chemical vapor deposition using a variety of growth conditions. Presence of an InGaAsSb interface layer was indicated by x-ray diffraction. This interface effect was minimized by optimizing the purge times, reactant flows, and growth conditions. The optimized growth conditions involved the use of low pressure, short purge times between the growth of the layers, and no reactant flow during the purges. Electron diffraction indicates that CuPt-type compositional ordering occurs in InAs{sub 1{minus}x}Sb{sub x} alloys and SLSs which explains an observed bandgap reduction from previously accepted alloy values.
Biefeld, R.M.; Baucom, K.C.; Follstaedt, D.M.; Kurtz, S.R.
Inversion by metalorganic chemical vapor deposition from N- to Ga-polar gallium nitride and its application to multiple quantum well light-emitting diodes
We demonstrate a metalorganic chemical vapor deposition growth approach for inverting N-polar to Ga-polar GaN by using a thin inversion layer grown with high Mg flux. The introduction of this inversion layer allowed us to grow p-GaN films on N-polar GaN thin film. We have studied the dependence of hole concentration, surface morphology, and degree of polarity inversion for the inverted Ga-polar surface on the thickness of the inversion layer. We then use this approach to grow a light emitting diode structure which has the MQW active region grown on the advantageous N-polar surface and the p-layer grown on the inverted Ga-polar surface.
Hosalli, A. M.; Van Den Broeck, D. M.; Bedair, S. M. [Department of Electrical and Computer Engineering, NCSU, Raleigh, North Carolina 27695 (United States)] [Department of Electrical and Computer Engineering, NCSU, Raleigh, North Carolina 27695 (United States); Bharrat, D.; El-Masry, N. A. [Department of Material Science and Engineering, NCSU, Raleigh, North Carolina 27695 (United States)] [Department of Material Science and Engineering, NCSU, Raleigh, North Carolina 27695 (United States)
Direct growth of few-layer graphene on 6H-SiC and 3C-SiC/Si via propane chemical vapor deposition
We propose to grow graphene on SiC by a direct carbon feeding through propane flow in a chemical vapor deposition reactor. X-ray photoemission and low energy electron diffraction show that propane allows to grow few-layer graphene (FLG) on 6H-SiC(0001). Surprisingly, FLG grown on (0001) face presents a rotational disorder similar to that observed for FLG obtained by annealing on (000-1) face. Thanks to a reduced growth temperature with respect to the classical SiC annealing method, we have also grown FLG/3C-SiC/Si(111) in a single growth sequence. This opens the way for large-scale production of graphene-based devices on silicon substrate.
Michon, A.; Vezian, S.; Portail, M. [CNRS-CRHEA, Rue Bernard Gregory, 06560 Valbonne (France); Ouerghi, A. [CNRS-LPN, Route de Nozay, 91460 Marcoussis (France); Zielinski, M.; Chassagne, T. [NOVASiC, Savoie Technolac, Arche Bat 4, BP267, 73375 Le Bourget du Lac (France)
Epitaxial growth of BaTiO3 thin films at 600 C by metalorganic chemical vapor deposition
with an a-axis perpendicular to the substrate plane. Nanoscale energy dispersive x-ray spectrometry processes include deposition over large areas, high throughput, and uniform coverage of nonplanar shapes by a plasma-enhanced MOCVD pro- cess. It is not known if the added energy from the plasma generates structural
Self-assembled Fe nanowires using organometallic chemical vapor deposition and CaF2 masks on stepped Si,,111...
using other methods, such as pyrolysis.7 After the first Fe monolayer is deposited, the selective are created by growing 12 monolayers of CaF2 at a substrate temperature of 600 °C, flashing to 830 °C a few
Himpsel, Franz J.
Pulsed Laser CVD Investigations of Single-Wall Carbon Nanotube Growth Dynamics
The nucleation and rapid growth of single-wall carbon nanotubes (SWNTs) were explored by pulsed-laser assisted chemical vapor deposition (PLA-CVD). A special high-power, Nd:YAG laser system with tunable pulse width (> 0.5 ms) was implemented to rapidly heat (>30,000 C/s) metal catalyst-covered substrates to different growth temperatures for very brief (sub-second) and controlled time periods as measured by in situ optical pyrometry. Utilizing growth directly on transmission electron microscopy grids, exclusively SWNTs were found to grow under rapid heating conditions, with a minimum nucleation time of >0.10 s. By measuring the length of nanotubes grown by single laser pulses, extremely fast growth rates (up to 100 microns/s) were found to result from the rapid heating and cooling induced by the laser treatment. Subsequent laser pulses were found not to incrementally continue the growth of these nanotubes, but instead activate previously inactive catalyst nanoparticles to grow new nanotubes. Localized growth of nanotubes with variable density was demonstrated through this process, and was applied for the reliable direct-write synthesis of SWNTs onto pre-patterned, catalyst-covered metal electrodes for the synthesis of SWNT field-effect transistors.
Geohegan, David B [ORNL] [ORNL; Liu, Zuqin [ORNL] [ORNL; Styers-Barnett, David J [ORNL] [ORNL; Puretzky, Alexander A [ORNL] [ORNL; Rouleau, Christopher M [ORNL] [ORNL; Yuan, Dongning [Duke University] [Duke University; Ivanov, Ilia N [ORNL] [ORNL; Xiao, Kai [ORNL] [ORNL; Liu, Jie [Duke University] [Duke University
Characterization of thick 4H-SiC hot-wall CVD layers
Epitaxial 4H-SiC layers suitable for high power devices have been grown in a hot-wall chemical-vapor deposition (CVD) system. These layers were subsequently characterized for many parameters important in device development and production. The uniformity of both thickness and doping is presented. Doping trends vs. temperature and growth rate is shown for the p-type dopant used. The n-type dopant drops in concentration with increasing temperature or increasing growth rate. In contrast, the p-type dopant increases in concentration with decreasing temperature or increasing growth rate. A simple descriptive model for this behavior is presented. The outcome from capacitance-voltage and SIMS measurements demonstrate that transitions from n to n{sup {minus}}, or p to p{sup {minus}}, and even n to p levels can be made quickly without adjustment to growth conditions. The ability to produce sharp transitions without process changes avoids degrading the resulting surface morphology or repeatability of the process. Avoiding process changes is particularly important in growth of thick layers since surface roughness tends to increase with layer thickness. Device results from diodes producing two different blocking voltages in excess of 5 kV is also shown. The higher voltage diodes exhibited a breakdown behavior which was near the theoretical limit for the epitaxial layer thickness and doping level grown.
Paisley, M.J.; Irvine, K.G.; Kordina, O.; Singh, R.; Palmour, J.W.; Carter, C.H. Jr.
Metalorganic chemical vapor deposition of GaN on Si(111): Stress control and application to field-effect transistors
Two schemes of nucleation and growth of gallium nitride on Si(111) substrates are investigated and the structural and electrical properties of the resulting films are reported. Gallium nitride films grown using a 10{endash}500 nm-thick AlN buffer layer deposited at high temperature ({similar_to}1050{degree}C) are found to be under 260{endash}530 MPa of tensile stress and exhibit cracking, the origin of which is discussed. The threading dislocation density in these films increases with increasing AlN thickness, covering a range of 1.1 to {gt}5.8{times}10{sup 9}cm{sup {minus}2}. Films grown using a thick, AlN-to-GaN graded buffer layer are found to be under compressive stress and are completely crack free. Heterojunction field effect transistors fabricated on such films result in well-defined saturation and pinch-off behavior with a saturated current of {similar_to}525 mA/mm and a transconductance of {similar_to}100 mS/mm in dc operation. {copyright} 2001 American Institute of Physics.
Marchand, H.; Zhao, L.; Zhang, N.; Moran, B.; Coffie, R.; Mishra, U. K.; Speck, J. S.; DenBaars, S. P.; Freitas, J. A.
Nanocrystalline-Si-dot multi-layers fabrication by chemical vapor deposition with H-plasma surface treatment and evaluation of structure and quantum confinement effects
100-nm-thick nanocrystalline silicon (nano-Si)-dot multi-layers on a Si substrate were fabricated by the sequential repetition of H-plasma surface treatment, chemical vapor deposition, and surface oxidation, for over 120 times. The diameter of the nano-Si dots was 5�6 nm, as confirmed by both the transmission electron microscopy and X-ray diffraction analysis. The annealing process was important to improve the crystallinity of the nano-Si dot. We investigated quantum confinement effects by Raman spectroscopy and photoluminescence (PL) measurements. Based on the experimental results, we simulated the Raman spectrum using a phenomenological model. Consequently, the strain induced in the nano-Si dots was estimated by comparing the experimental and simulated results. Taking the estimated strain value into consideration, the band gap modulation was measured, and the diameter of the nano-Si dots was calculated to be 5.6 nm by using PL. The relaxation of the q ? 0 selection rule model for the nano-Si dots is believed to be important to explain both the phenomena of peak broadening on the low-wavenumber side observed in Raman spectra and the blue shift observed in PL measurements.
Kosemura, Daisuke, E-mail: email@example.com; Mizukami, Yuki; Takei, Munehisa; Numasawa, Yohichiroh; Ogura, Atsushi [School of Science and Technology, Meiji University, Kawasaki 214-8571 (Japan)] [School of Science and Technology, Meiji University, Kawasaki 214-8571 (Japan); Ohshita, Yoshio [Toyota Technological Institute, Nagoya 468-8511 (Japan)] [Toyota Technological Institute, Nagoya 468-8511 (Japan)
Direct Growth Graphene on Cu Nanoparticles by Chemical Vapor Deposition as Surface-Enhanced Raman Scattering Substrate for Label-Free Detection of Adenosine
We present a graphene/Cu nanoparticle hybrids (G/CuNPs) system as a surface-enhanced Raman scattering (SERS) substrate for adenosine detection. The Cu nanoparticles wrapped around a monolayer graphene shell were directly synthesized on flat quartz by chemical vapor deposition in a mixture of methane and hydrogen. The G/CuNPs showed an excellent SERS enhancement activity for adenosine. The minimum detected concentration of the adenosine in serum was demonstrated as low as 5 nM, and the calibration curve showed a good linear response from 5 to 500 nM. The capability of SERS detection of adenosine in real normal human urine samples based on G/CuNPs was also investigated and the characteristic peaks of adenosine were still recognizable. The reproducible and the ultrasensitive enhanced Raman signals could be due to the presence of an ultrathin graphene layer. The graphene shell was able to enrich and fix the adenosine molecules, which could also efficiently maintain chemical and optical stability of G/CuNPs. Based...
Xu, Shicai; Jiang, Shouzhen; Wang, Jihua; Wei, Jie; Xu, Shida; Liu, Hanping
Structural, compositional, and photoluminescence characterization of thermal chemical vapor deposition-grown Zn{sub 3}N{sub 2} microtips
The catalytic growth of Zn{sub 3}N{sub 2} using guided-stream thermal chemical vapor deposition has been investigated within the parameter range of acicular growth to obtain uniform microtips with a high crystalline quality. The cubic anti-bixbyite crystal structure of Zn{sub 3}N{sub 2} microtips and its related phonon mode are revealed by X-ray diffraction and Raman spectroscopy, respectively. The surface morphologies of pure and surface-oxidized Zn{sub 3}N{sub 2} microtips are depicted by scanning electron microscopy and show the crack formation on the surface-oxidized Zn{sub 3}N{sub 2} microtips. The spatial element distribution map confirms the VLS growth mechanism for Zn{sub 3}N{sub 2} microtips and reveals the depth profile of zinc, nitrogen, oxygen, and nickel elements. Photoluminescence (PL) spectra of Zn{sub 3}N{sub 2} microtips show a sharp infrared band-to-band emission peak at 1.34?eV with a full width at half maximum of ?100?meV and a very broad oxygen-related defect band emission peak centered at ?0.85?eV.
Wei, Pai-Chun, E-mail: firstname.lastname@example.com, E-mail: firstname.lastname@example.com; Chang, Chung-Chieh; Hsu, Chia-Hao [Institute of Physics, Academia Sinica, Taipei 11529, Taiwan (China); Tong, Shih-Chang; Shen, Ji-Lin [Department of Physics, Chung Yuan Christian University, Chung-Li 32023, Taiwan (China); Tseng, Chuan-Ming, E-mail: email@example.com, E-mail: firstname.lastname@example.com [Institute of Physics, Academia Sinica, Taipei 11529, Taiwan (China); Institute of Materials Science and Engineering, National Central University, Tao-Yuan 32001, Taiwan (China)
Raman and Photoluminescence Spectroscopy of Nanocrystalline Diamond Films grown by Hot Filament CVD
H4 flow-rate ratio of standard polycrystalline diamond deposition parameters on formationRaman and Photoluminescence Spectroscopy of Nanocrystalline Diamond Films grown by Hot Filament CVD of Physics, University of Malaya, 50603 Kuala Lumpur, Malaysia b,c Diamond Research Laboratory, School
Characterization of metal oxide layers grown on CVD graphene
Growth of a fully oxidized aluminum oxide layer with low surface roughness on graphene grown by chemical vapor deposition is demonstrated. This is accomplished by the deposition of a 0.2 nm thick titanium seed layer on the graphene prior to the deposition of the aluminum under ultra high vacuum conditions, which was subsequently oxidized. The stoichiometry and surface roughness of the oxide layers were measured for a range of titanium and aluminum depositions utilizing ex situ x-ray photoelectron spectrometry and atomic force microscopy. These fully oxidized films are expected to produce good dielectric layers for use in graphene based electronic devices.
Matsubayashi, Akitomo; Abel, Joseph; Prasad Sinha, Dhiraj; Lee, Ji Ung; LaBella, Vincent P. [College of Nanoscale Science and Engineering, University at Albany, SUNY, Albany, New York 12203 (United States)
Gas-phase transport of WF6 through annular nanopipes in TiN during chemical vapor deposition of W on TiN/Ti/SiO2 structures for integrated
Gas-phase transport of WF6 through annular nanopipes in TiN during chemical vapor deposition of W through the 106-nm-thick TiN film. W piles up at the TiN/Ti interface, while F rapidly saturates the TiN-sectional and scanning transmission electron microscopy analyses demonstrate that WF6 penetrates into the TiN layer
Allen, Leslie H.
Silver transport in CVD silicon carbide
Ion implantation and diffusion couple experiments were used to study silver transport through and release from CVD silicon carbide. Results of these experiments show that silver does not migrate via classical diffusion in ...
MacLean, Heather J. (Heather Jean), 1974-
Apparatus for depositing hard coating in a nozzle orifice
The present invention is directed to a process for coating the interior surfaces of an orifice in a substrate that forms a slurry fuel injection nozzle. In a specific embodiment, the nozzle is part of a fuel injection system for metering a coal-water slurry into a large, medium-speed, multi-cylinder diesel engine. In order to retard erosion of the orifice, the substrate is placed in a chemical vapor deposition (CVD) reaction chamber. A reaction gas is passed into the chamber at a gas temperature below its reaction temperature and is directed through the orifice in the substrate. The gas reaction temperature is a temperature at and above which the reaction gas deposits as a coating, and the reaction gas is of a composition whereby improved resistance to erosion by flow of the particulates in the slurry fuel is imparted by the deposited coating. Only the portion of the substrate in proximity to the orifice to be coated is selectively heated to at least the gas reaction temperature for effecting coating of the orifice's interior surfaces by the vapor deposited coating formed from the reaction gas.
Flynn, Paul L. (Fairview, PA); Giammarise, Anthony W. (Erie, PA)
The present invention is directed to a process for coating the interior surfaces of an orifice in a substrate that forms a slurry fuel injection nozzle. In a specific embodiment, the nozzle is part of a fuel injection system for metering a coal-water slurry into a large, medium-speed, multi-cylinder diesel engine. In order to retard erosion of the orifice, the substrate is placed in a chemical vapor deposition (CVD) reaction chamber. A reaction gas is passed into the chamber at a gas temperature below its reaction temperature and is directed through the orifice in the substrate. The gas reaction temperature is a temperature at and above which the reaction gas deposits as a coating, and the reaction gas is of a composition whereby improved resistance to erosion by flow of the particulates in the slurry fuel is imparted by the deposited coating. Only the portion of the substrate in proximity to the orifice to be coated is selectively heated to at least the gas reaction temperature for effecting coating of the orifice`s interior surfaces by the vapor deposited coating formed from the reaction gas. 2 figs.
Flynn, P.L.; Giammarise, A.W.
Process for depositing hard coating in a nozzle orifice
The present invention is directed to a process for coating the interior surfaces of an orifice in a substrate that forms a slurry fuel injection nozzle. In a specific embodiment, the nozzle is part of a fuel injection system for metering a coal-water slurry into a large, medium-speed, multi-cylinder diesel engine. In order to retard erosion of the orifice, the substrate is placed in a chemical vapor deposition (CVD) reaction chamber. A reaction gas is passed into the chamber at a gas temperature below its reaction temperature and is directed through the orifice in the substrate. The gas reaction temperature is a temperature at and above which the reaction gas deposits as a coating, and the reaction gas is of a composition whereby improved resistance toerosion by flow of the particulates in the slurry fuel is imparted by the deposited coating. Only the portion of the substrate in proximity to the orifice to be coated is selectively heated to at least the gas reaction temperature for effecting coating of the orifice's interior surfaces by the vapor deposited coating formed from the reaction gas.
Flynn, Paul L. (5139 Fox Park Dr., Fairview, PA 16415); Giammarise, Anthony W. (527 Lincoln Ave., Erie, PA 16505)
The present invention is directed to a process for coating the interior surfaces of an orifice in a substrate that forms a slurry fuel injection nozzle. In a specific embodiment, the nozzle is part of a fuel injection system for metering a coal-water slurry into a large, medium-speed, multi-cylinder diesel engine. In order to retard erosion of the orifice, the substrate is placed in a chemical vapor deposition (CVD) reaction chamber. A reaction gas is passed into the chamber at a gas temperature below its reaction temperature and is directed through the orifice in the substrate. The gas reaction temperature is a temperature at and above which the reaction gas deposits as a coating, and the reaction gas is of a composition whereby improved resistance to erosion by flow of the particulates in the slurry fuel is imparted by the deposited coating. Only the portion of the substrate in proximity to the orifice to be coated is selectively heated to at least the gas reaction temperature for effecting coating of the orifice's interior surfaces by the vapor deposited coating formed from the reaction gas. 2 figures.
High-Quality Epitaxy of Ruthenium Dioxide, RuO2, on Rutile Titanium Dioxide, TiO2, by Pulsed Chemical Vapor Deposition
of rutile TiO2, a material with a high dielectric constant. Therefore, capacitors with high capacitance per these capacitors have low leakage current. Due to its good redox properties, RuO2 has been made into electrodes films have been made by CVD, such as wide-gap semiconductors ZnO23,25 and SnO2,26,27 super- conducting
Using X-Rays to Test CVD Diamond Detectors for Areal Density Measurement at the National Ignition Facility
At the National Ignition Facility (NIF), 192 laser beams will compress a target containing a mixture of deuterium and tritium (DT) that will release fusion neutrons, photons, and other radiation. Diagnostics are being designed to measure this emitted radiation to infer crucial parameters of an ignition shot. Chemical Vapor Deposited (CVD) diamond is one of the ignition diagnostics that will be used as a neutron time-of-flight detector for measuring primary (14.1 MeV) neutron yield, ion temperature, and plasma areal density. This last quantity is the subject of this study and is inferred from the number of downscattered neutrons arriving late in time, divided by the number of primary neutrons. We determine in this study the accuracy with which this detector can measure areal density, when the limiting factor is detector and electronics saturation. We used laser-produced x-rays to reproduce NIF signals in terms of charge carriers density, time between pulses, and amplitude contrast and found that the effect of the large pulse on the small pulse is at most 8.4%, which is less than the NIF accuracy requirement of {+-} 10%.
Dauffy, L S; Koch, J A; Tommasini, R; Izumi, N
Ion beam assisted deposition of thermal barrier coatings
Methods and apparatus for depositing thermal barrier coatings on gas turbine blades and vanes using Electron Beam Physical Vapor Deposition (EBPVD) combined with Ion Beam Assisted Deposition (IBAD).
Youchison, Dennis L. (Albuquerque, NM); McDonald, Jimmie M. (Albuquerque, NM); Lutz, Thomas J. (Albuquerque, NM); Gallis, Michail A. (Albuquerque, NM)
Characterization of photoluminescent (Y{sub 1{minus}x}Eu{sub x}){sub 2}O{sub 3} thin-films prepared by metallorganic chemical vapor deposition
Europium doped yttrium oxide, (Y{sub 1{minus}x}Eu{sub x}){sub 2}O{sub 3}, thin-films were deposited on silicon and sapphire substrates by metallorganic chemical vapor deposition (MOCVD). The films were grown in a MOCVD chamber reacting yttrium and europium tris(2,2,6,6-tetramethyl-3,5,-heptanedionates) precursors in an oxygen atmosphere at low pressures (5 Torr) and low substrate temperatures (500--700 C). The films deposited at 500 C were flat and composed of nanocrystalline regions of cubic Y{sub 2}O{sub 3}, grown in a textured [100] or [110] orientation to the substrate surface. Films deposited at 600 C developed from the flat, nanocrystalline morphology into a plate-like growth morphology oriented in the [111] with increasing deposition time. Monoclinic Y{sub 2}O{sub 3}:Eu{sup 3+} was observed in x-ray diffraction for deposition temperatures {ge}600 C on both (111) Si and (001) sapphire substrates. This was also confirmed by the photoluminescent emission spectra.
McKittrick, J.; Bacalski, C.F.; Hirata, G.A. [Univ. of California, San Diego, La Jolla, CA (United States); Hubbard, K.M.; Pattillo, S.G.; Salazar, K.V.; Trkula, M. [Los Alamos National Lab., NM (United States). Materials Science and Technology Div.
Fabrication of AlN/BN bishell hollow nanofibers by electrospinning and atomic layer deposition
Aluminum nitride (AlN)/boron nitride (BN) bishell hollow nanofibers (HNFs) have been fabricated by successive atomic layer deposition (ALD) of AlN and sequential chemical vapor deposition (CVD) of BN on electrospun polymeric nanofibrous template. A four-step fabrication process was utilized: (i) fabrication of polymeric (nylon 6,6) nanofibers via electrospinning, (ii) hollow cathode plasma-assisted ALD of AlN at 100?�C onto electrospun polymeric nanofibers, (iii) calcination at 500?�C for 2 h in order to remove the polymeric template, and (iv) sequential CVD growth of BN at 450?�C. AlN/BN HNFs have been characterized for their chemical composition, surface morphology, crystal structure, and internal nanostructure using X-ray photoelectron spectroscopy, scanning electron microscopy, transmission electron microscopy, energy dispersive X-ray spectroscopy, and selected area electron diffraction. Measurements confirmed the presence of crystalline hexagonal BN and AlN within the three dimensional (3D) network of bishell HNFs with relatively low impurity content. In contrast to the smooth surface of the inner AlN layer, outer BN coating showed a highly rough 3D morphology in the form of BN nano-needle crystallites. It is shown that the combination of electrospinning and plasma-assisted low-temperature ALD/CVD can produce highly controlled multi-layered bishell nitride ceramic hollow nanostructures. While electrospinning enables easy fabrication of nanofibrous template, self-limiting reactions of plasma-assisted ALD and sequential CVD provide control over the wall thicknesses of AlN and BN layers with sub-nanometer accuracy.
Haider, Ali; Kayaci, Fatma; Uyar, Tamer; Biyikli, Necmi, E-mail: firstname.lastname@example.com [National Nanotechnology Research Center (UNAM), Bilkent University, Bilkent, Ankara 06800 (Turkey); Institute of Materials Science and Nanotechnology, Bilkent University, Bilkent, Ankara 06800 (Turkey); Ozgit-Akgun, Cagla [National Nanotechnology Research Center (UNAM), Bilkent University, Bilkent, Ankara 06800 (Turkey); Okyay, Ali Kemal [National Nanotechnology Research Center (UNAM), Bilkent University, Bilkent, Ankara 06800 (Turkey); Institute of Materials Science and Nanotechnology, Bilkent University, Bilkent, Ankara 06800 (Turkey); Department of Electrical and Electronics Engineering, Bilkent University, Bilkent, Ankara 06800 (Turkey)
Effect of doping on electronic states in B-doped polycrystalline CVD diamond films This article has been downloaded from IOPscience. Please scroll down to see the full text article.
Effect of doping on electronic states in B-doped polycrystalline CVD diamond films This article has-doped polycrystalline CVD diamond films O S Elsherif1,4, K D Vernon-Parry1, J H Evans-Freeman2 and P W May3 1 Materials the effect of boron (B) concentration on the electronic states in polycrystalline chemical vapour deposition
Oxidation of Slurry Aluminide Coatings on Cast Stainless Steel Alloy CF8C-Plus at 800oC in Water Vapor
A new, cast austenitic stainless steel, CF8C-Plus, has been developed for a wide range of high temperature applications, including diesel exhaust components, turbine casings and turbocharger housings. CF8C-Plus offers significant improvements in creep rupture life and creep rupture strength over standard CF8C steel. However, at higher temperatures and in more aggressive environments, such as those containing significant water vapor, an oxidation-resistant protective coating will be necessary. The oxidation behavior of alloys CF8C and CF8C-Plus with various aluminide coatings were compared at 800oC in air plus 10 vol% water vapor. Due to their affordability, slurry aluminides were the primary coating system of interest, although chemical vapor deposition (CVD) and pack cementation coatings were also compared. Additionally, a preliminary study of the low cycle fatigue behavior of aluminized CF8C-Plus was conducted at 800oC. Each type of coating provided substantial improvements in oxidation behavior, with simple slurry aluminides showing very good oxidation resistance after 4,000 h testing in water vapor. Preliminary low cycle fatigue results indicated that thicker aluminide coatings degraded high temperature fatigue properties of CF8C-Plus, whereas thinner coatings did not. Results suggest that appropriately designed slurry aluminide coatings are a viable option for economical, long-term oxidation protection of austenitic stainless steels in water vapor.
Haynes, James A [ORNL; Armstrong, Beth L [ORNL; Dryepondt, Sebastien N [ORNL; Kumar, Deepak [ORNL; Zhang, Ying [Tennessee Technological University
E-Print Network 3.0 - ag zr system Sample Search Results
5 > >> 1 Journal of Crystal Growth 307 (2007) 302308 Equilibrium analysis of zirconium carbide CVD growth Summary: C films grown by chemical vapor deposition (CVD). The equilibrium...
1ESHCuCVD.CEBSMTeleSeminar.100401 Integrated ESH Assessment
1ESHCuCVD.CEBSMTeleSeminar.100401 Integrated ESH Assessment: Cu CVD Unit Process Gary W. Rubloff of Maryland CEBSM TeleSeminar Oct. 4, 2001 #12;2ESHCuCVD.CEBSMTeleSeminar.100401 ESH infrastructure Factory or site Global Primary research areas of the Center Aggregate ESH impact metrics to upper levels Aggregate
Transport studies on CVD-grown graphene
In this thesis, we report transport studies performed on CVD-grown graphene. We perform resistivity and hall measurements on a large-area sample at 4' K. We measure the carrier mobility of the sample and find it to be on ...
Huntley, Miriam Hanna
Residual Stress in CVD-grown 3C-SiC Films on Si Substrates Alex A. Volinsky1
on 50 mm (100) and (111) Si substrates in a hot-wall CVD reactor. The film tensile residual stress was non-uniform, having a linear profile along the growth direction. This presented a challenge of using to deposit SiC on Si wafers due to their high quality and low cost, in comparison to SiC substrates. However
Volinsky, Alex A.
Apparatus and process for depositing hard coating in a nozzle orifice
Organic-vapor-liquid-solid deposition with an impinging gas jet Daniel W. Shaw, Kevin Bufkin, Alexandr A. Baronov, Brad L. Johnson, and David L. Patrick
and David L. Patrick1,a) 1 Department of Chemistry, Western Washington University, 516 High St., Bellingham tetracene were deposited by sublimation into a flow of argon carrier gas directed at an indium
Patrick, David L.
Research on fundamental aspects of inorganic vapor and particle deposition in coal-fired systems. Eighth quarterly technical progress report, June 6, 1992--September 5, 1992
In September 1990 DOE-PETC initiated at the Yale HTCRE Laboratory a systematic three-year research program directed toward providing engineers with the fundamentally-based design/optimization `tools` for economically predicting the dynamics of net deposit growth*, and thermophysical properties of the resulting microparticulate deposits in coal-fired systems. In light of the theoretical `program` based on the notion of ``self-regulation`` set forth in Rosner and Nagarajan (1987), this Task includes investigation of the effects of particle material properties and possible liquid phases on the capture properties of particulate deposits. For this purpose we exploit dynamical `many-body` computer simulation techniques. This approach will provide the required parametric dependencies (on such quantities as incident kinetic energy and angle, mechanical and thermophysical properties of the particles,{hor_ellipsis}) of a dimensionless ensemble-averaged particle capture fraction, relegating the role of direct laboratory experiment to verifying (or rejecting) some crucial features/consequences of the simulation route followed. Our ultimate goal is recommend `sticking` and `erosion` laws of mechanistic origin. The availability of such laws could dramatically increase the reliability of predicted deposition rates of inertially delivered particles, in the simultaneous presence of a condensed liquid phase within the growing particulate, deposit. Equally important, one could also rationally select conditions to avoid. troublesome deposition subject to other operational requirements.
Research on fundamental aspects of inorganic vapor and particle deposition in coal-fired systems. Quarterly technical report, December 6, 1991--March 5, 1992
In September 1990 DOE-PETC initiated at the Yale HTCRE Laboratory a systematic three-year research program directed toward providing engineers with the fundamentally-based design/optimization ``tools`` foreconomically predicting the dynamics of net deposit growth, and thermophysical properties of the resulting microparticulate deposits in coal-fired systems. The goal of our research in the area of mineral mattertransport is to advance the capability of making reliable engineering predictions of the dynamics of net deposit growth for surfaces exposed to the particle-laden products of coal combustion. To accomplish thisfor a wide variety of combustor types, coal types, and operating conditions, this capability must be based on a quantitative understanding of each of the important mechanisms of mineral matter transport, as well as the nature of the interactions between these substances and the prevailing ``fireside`` surface of deposits. This level of understanding and predictive capability could be translated into very significant cost reductions for coal-fired equipment design, development and operation. It is also expected that this research activity will not only directly benefit the ash deposition R&D community -- but also generically closely related technologies of importance to DOE (e.g. hot-gas clean-up, particulate solids handling,...).
Electrical and thermal conductivity of low temperature CVD graphene...
and thermal conductivity of low temperature CVD graphene: the effect of disorder This article has been downloaded from IOPscience. Please scroll down to see the full text article....
Process sensing and metrology in gate oxide growth by rapid thermal chemical vapor deposition from SiH4 and N2O
SiO2 film. An optimal process window had been previously identified at a total pressure of 5 Torr, but also quantitative metrology for the film deposition process. © 1999 American Vacuum Society. S0734-211X the wafer. Radiative heating of the wafer was achieved through a quartz window by an array of halogen lamps
Measurement and modeling of Ar/H2/CH4 arc jet discharge chemical vapor deposition reactors II: Modeling of the spatial dependence of expanded
and used to deposit thin films of polycrystalline diamond. This reactor has been the subject of many prior of micro- and nanocrystalline diamond and diamondlike carbon films. The model incorporates gas activation-containing radical species incident on the growing diamond surface C atoms and CH radicals within this reactor
Real-time process sensing and metrology in amorphous and selective area silicon plasma enhanced chemical vapor deposition using in situ
Real-time process sensing and metrology in amorphous and selective area silicon plasma enhanced Materials Processing, North Carolina State University, Raleigh, North Carolina 27695 Received 11 July 1996 silicon deposition. The ability of mass spectrometry to observe process faults in real time is also
From Ultrananocrystalline Diamond to Single Crystal Diamond Growth in Hot Filament and Microwave Plasma-Enhanced CVD Reactors: a Unified Model for Growth Rates and
From Ultrananocrystalline Diamond to Single Crystal Diamond Growth in Hot Filament and Microwave, Moscow State UniVersity, 119991 Moscow, Russia ReceiVed: April 29, 2008 CVD Diamond can now be deposited either in the form of single crystal homoepitaxial layers, or as polycrystalline films with crystal sizes
CVD facility electrical system captor/dapper study
Project W-441, CVD Facility Electrical System CAPTOWDAPPER Study validates Meier's hand calculations. This study includes Load flow, short circuit, voltage drop, protective device coordination, and transient motor starting (TMS) analyses.
Gigahertz Ambipolar Frequency Multiplier Based on Cvd Graphene
Ambipolar transport in graphene offers great opportunities for novel device and circuit applications. This paper discusses the RF performance of CVD grown graphene transistors for the first time. Then, a new graphene ...
Wang, Han
The Parameter Space of Graphene CVD on Polycrystalline Cu
Society. However, no copyright claim is made to original U.S. Government works, or works produced by employees of any Commonwealth realm Crown government in the course of their duties. Article The Parameter Space of Graphene CVD on Polycrystalline Cu Piran... for errors or consequences arising from the use of information contained in these �Just Accepted� manuscripts. 1 The Parameter Space of Graphene CVD on Polycrystalline Cu Piran R. Kidambi1, Caterina Ducati2, Bruno Dlubak1, Damian Gardiner1, Robert S...
Kidambi, Piran Ravichandran; Ducati, Caterina; Dlubak, Bruno; Gardiner, Damian; Weatherup, Robert S.; Martin, Marie-Blandine; Seneor, Pierre; Coles, Harry; Hofmann, Stephan
Annealed CVD molybdenum thin film surface
Molybdenum thin films deposited by pyrolytic decomposition of Mo(CO).sub.6 attain, after anneal in a reducing atmosphere at temperatures greater than 700.degree. C., infrared reflectance values greater than reflectance of supersmooth bulk molybdenum. Black molybdenum films deposited under oxidizing conditions and annealed, when covered with an anti-reflecting coating, approach the ideal solar collector characteristic of visible light absorber and infrared energy reflector.
Carver, Gary E. (Tucson, AZ); Seraphin, Bernhard O. (Tucson, AZ)
Resonance enhanced multiphoton ionization probing of H atoms and CH3 radicals in a hot lament chemical vapour deposition reactor
- lished route for forming polycrystalline diamond �lms, which are �nding ever increasing roles reactor used for diamond chemical vapour deposition (CVD). Parameters varied include the hydrocarbon (CH4 to reinforce the consensus view that H atom production during diamond CVD in a hot �lament reactor arises
E-Print Network 3.0 - arc deposition technology Sample Search...
role in the Summary: deposition 2 and filtered cathodic vacuum arc 3.such as optical window coatings, scratch resistive... by different types of vapor deposition...
E-Print Network 3.0 - asssited chemical vapor Sample Search Results
nitride, chemical vapor ... Source: Dandy, David - Department of Chemical Engineering, Colorado State University Collection: Materials Science 14 DEPOSITION OF ELECTRON BEAM...
E-Print Network 3.0 - all-hot-wire chemical vapor Sample Search...
nitride, chemical vapor ... Source: Dandy, David - Department of Chemical Engineering, Colorado State University Collection: Materials Science 10 DEPOSITION OF ELECTRON BEAM...
Sandia National Laboratories: chemical vapor deposition
AFDC Printable Version Share this resource Send a link to EERE: Alternative Fuels Data Center Home Page to someone by E-mail Share EERE: Alternative Fuels Data Center Home Page on Facebook Tweet about EERE: Alternative Fuels Data Center Home Page on Twitter Bookmark EERE:1 First Use of Energy for All Purposes (Fuel and Nonfuel),Feet) Year Jan Feb Mar Apr MayAtmosphericNuclear Security Administration the1development Sandia, NREL Release Wavearc-faultbestmonoxidefacility inflowchemical
Unravelling aspects of the gas phase chemistry involved in diamond chemical vapour deposition
of thin �lms of polycrystalline diamond by chemi- cal vapour deposition (CVD) methods,2h4 since which timeUnravelling aspects of the gas phase chemistry involved in diamond chemical vapour deposition been used to unravel details of the gas phase chemistry involved in diamond chemical vapour deposition
Nanoscale Growth Twins in Sputtered Copper Films
.............................................................. 7 I.1.3. Chemical vapor deposition (CVD) .................................... 8 I.2. Fabrication of copper thin films .................................................... 12... to the exposure of the film growth surface to the solution, impurities may be introduced. I.1.3. Chemical vapor deposition (CVD) CVD is a chemical process used to produce high-purity, high-performance thin films and often used in the semiconductor industry...
Anderoglu, Osman
Simulation-Based Design and Experimental Evaluation of a Spatially Controllable CVD Reactor
Simulation-Based Design and Experimental Evaluation of a Spatially Controllable CVD Reactor Jae CVD reactor system has been developed that can explicitly control the spatial profile of gas, opening the door to a new class of flexible and highly controllable CVD reactor designs. © 2005 American
A facile process for soak-and-peel delamination of CVD graphene from substrates using water
A facile process for soak-and-peel delamination of CVD graphene from substrates using water Priti Ulm, Germany (Dated: 31 July 2013) We demonstrate a simple technique to transfer CVD-grown graphene deionized water. The lack of chemical etchants results in cleaner CVD graphene films minimizing
Supporting Information: A facile process for soak-and-peel delamination of CVD graphene from
Supporting Information: A facile process for soak-and-peel delamination of CVD graphene from equally to this work. 1 #12;I. CVD growth of graphene (a) Continuous graphene layer growth Continuous lms of CVD graphene were grown on 1 cm � 1 cm sized Cu and Pt substrates. Cu foils (Alfa Aesar, 25 �m thick
atmospheric dry deposition: Topics by E-print Network
water vapor, and we confirm such predictions in a numerical model. There have been a number 38 Dual nitrate isotopes in dry deposition: Utility for partitioning NOx source...
Structures and Energetics of Some Potential Intermediates in Titanium Nitride Chemical Vapor Deposition: TiClm(NH2)n, TiClm(NH2)nNH, and TiClm(NH2)nN. An ab Initio
Structures and Energetics of Some Potential Intermediates in Titanium Nitride Chemical Vapor with these basis sets augmented by multiple sets of polarization and diffuse functions using the B3LYP optimized geometries. Bond dissociation energies, heats of atomization, heats of formation, and entropies have been
Schlegel, H. Bernhard
CVD apparatus and process for the preparation of fiber-reinforced ceramic composites
An apparatus and process for the chemical vapor deposition of a matrix into a preform having circumferentially wound ceramic fibers, comprises heating one surface of the preform while cooling the other surface thereof. The resulting product may have fibers that are wound on radial planes or at an angle from the radial planes. The fibers can also be precoated with pyrolytic carbon before application of the matrix. The matrix is applied by passing reactant gas through the preform thereof to the other side thereof for the initial deposition of matrix near such other surface of the preform. The matrix fills in the preform from the other side surface thereof to the surface of the side of application thereof until a desired amount of matrix has been deposited. 6 figs.
Caputo, A.J.; Devore, C.E.; Lowden, R.A.; Moeller, H.H.
An apparatus and process for the chemical vapor deposition of a matrix into a preform having circumferentially wound ceramic fibers, comprises heating one surface of the preform while cooling the other surface thereof. The resulting product may have fibers that are wound on radial planes or at an angle from the radial planes. The fibers can also be precoated with pyrolytic carbon before application of the matrix. The matrix is applied by passing reactant gas through the preform thereof to the other side thereof for the initial deposition of matrix near such other surface of the preform. The matrix fills in the preform from the other side surface thereof to the surface of the side of application thereof until a desired amount of matrix has been deposited.
Caputo, Anthony J. (Knoxville, TN); Devore, Charles E. (Knoxville, TN); Lowden, Richard A. (Powell, TN); Moeller, Helen H. (Concord, VA)
Vapor spill monitoring method
Method for continuous sampling of liquified natural gas effluent from a spill pipe, vaporizing the cold liquified natural gas, and feeding the vaporized gas into an infrared detector to measure the gas composition. The apparatus utilizes a probe having an inner channel for receiving samples of liquified natural gas and a surrounding water jacket through which warm water is flowed to flash vaporize the liquified natural gas.
Bianchini, Gregory M. (Livermore, CA); McRae, Thomas G. (Livermore, CA)
Graphene and its Hybrid Nanostructures for Nanoelectronics and Energy Applications.
??This dissertation focuses on investigating the synthesis of graphene and its hybrid nanostructures by chemical vapor deposition (CVD) process, as well as their applications in� (more)
Yield Optimization of Nitrogen Vacancy Centers in Diamond
Atomic Force Microscopy APD Avalanche Photodiode CCD Charge Coupled Device CVD Chemical Vapor Deposition DC Direct Current ESR... CHAPTER I INTRODUCTION ................................................................................ �. .1 II THEORY .................................................................................................... .3 A. Diamond...
Chen, Jeson
E-Print Network 3.0 - as-synthesized nicual ternary Sample Search...
vapor deposition (CVD) synthesis of ... Source: Prieto, Amy L. - Department of Chemistry, Colorado State University Collection: Materials Science ; Chemistry 13 Data & Knowledge...
E-Print Network 3.0 - atmospheric pressure cvd Sample Search...
atmospheric pressure cvd Page: << < 1 2 3 4 5 > >> 1 Growth Termination of Carbon Nanotubes at Millimeter Thickness Due to Structural Change in Catalyst Summary: at atmospheric...
Effect of Temperature and Charged Particle Fluence on the Resistivity of Polycrystalline CVD Diamond Sensors
The resistivity of polycrystalline chemical vapor deposition diamond sensors is studied in samples exposed to fluences relevant to the environment of the High Luminosity Large Hadron Collider. We measure the leakage current for a range of bias voltages on samples irradiated with 800 MeV protons up to 1.6\\times 10^{16} p/cm^2. The proton beam at LANSCE, Los Alamos National Laboratory, was applied to irradiate the samples. The devices' resistivity is extracted for temperatures in the -10^\\circC to +20^\\circC range.
Rui Wang; Martin Hoeferkamp; Sally Seidel
Wang, Rui; Seidel, Sally
Microwave plasma assisted supersonic gas jet deposition of thin film materials
An apparatus for fabricating thin film materials utilizing high speed gas dynamics relies on supersonic free jets of carrier gas to transport depositing vapor species generated in a microwave discharge to the surface of a prepared substrate where the vapor deposits to form a thin film. The present invention generates high rates of deposition and thin films of unforeseen high quality at low temperatures.
Schmitt, III, Jerome J. (New Haven, CT); Halpern, Bret L. (Bethany, CT)
A Study of the Grain Boundaries and Hydrogen in HF-CVD Diamond Films
composition of grain boundaries in polycrystalline diamond lms by transmission electron microscopy and highA Study of the Grain Boundaries and Hydrogen in HF-CVD Diamond Films Israel Yoel Koenka #12;A Study of the Grain Boundaries and Hydrogen in HF-CVD Diamond Films Research Thesis In partial fulllment
Simulations of polycrystalline CVD diamond film growth using a simplified Monte Carlo model
Simulations of polycrystalline CVD diamond film growth using a simplified Monte Carlo model P online 6 November 2009 Keywords: CVD diamond growth Modelling Nucleation Nanodiamond A simple 1) of a diamond (100) surface. The model considers adsorption, etching/desorption, lattice incorporation
FIRST SOLAR CELLS ON SILICON RIBBONS OBTAINED BY FAST CVD FROM SILANE C. R. Pinto, J. M. Serra, M Lisboa Campo Grande, 1749-016 Lisboa, Portugal ABSTRACT: : In this paper we report our first results on solar cells made on silicon ribbons obtained by a two-step process: pre-ribbons obtained by CVD followed
Lisbon, University of
The role of inert gas in MW-enhanced plasmas for the deposition of nanocrystalline diamond thin films
in polycrystalline diamond film CVD [3,4]. While the mechanical, thermal and acoustic properties of MCD films haveThe role of inert gas in MW-enhanced plasmas for the deposition of nanocrystalline diamond thin diamond Nanocrystalline Inert gas Growth Nanocrystalline diamond thin films have been deposited using
Gasoline vapor recovery
In a gasoline distribution network wherein gasoline is drawn from a gasoline storage tank and pumped into individual vehicles and wherein the gasoline storage tank is refilled periodically from a gasoline tanker truck, a method of recovering liquid gasoline from gasoline vapor that collects in the headspace of the gasoline storage tank as the liquid gasoline is drawn therefrom, said method comprising the steps of: (a) providing a source of inert gas; (b) introducing inert gas into the gasoline storage tank as liquid gasoline is drawn therefrom so that liquid gasoline drawn from the tank is displaced by inert gas and gasoline vapor mixes with the inert gas in the headspace of the tank; (c) collecting the inert gas/gasoline vapor mixture from the headspace of the gasoline storage tank as the tank is refilled from a gasoline tanker truck; (d) cooling the inert gas/gasoline vapor mixture to a temperature sufficient to condense the gasoline vapor in the mixture to liquid gasoline but not sufficient to liquify the inert gas in the mixture; (e) separating the condensed liquid gasoline from the inert gas; and delivering the condensed liquid gasoline to a remote location for subsequent use.
Lievens, G.; Tiberi, T.P.
Creating CZTS Thin Films Via Stacked Metallic CVD and Sulfurization
Research, Thin-Film Photovoltaic (PV) Cells Market Analysiscost of photovoltaic systems (such as solar cells) due tosolar cells are created by depositing layers of photovoltaic
Bielecki, Anthony
Evaporation monitoring and composition control of alloy systems with widely differing vapor pressures
Lawrence Livermore National Laboratory is developing sensors and controls to improve and extend electron beam materials processing technology to alloy systems with constituents of widely varying vapor pressure. The approach under development involves using tunable lasers to measure the density and composition of the vapor plume. A laser based vaporizer control system for vaporization of a uranium-iron alloy has been previously demonstrated in multi-hundred hour, high rate vaporization experiments at LLNL. This paper reviews the design and performance of the uranium vaporization sensor and control system and discusses the extension of the technology to monitoring of uranium vaporization. Data is presented from an experiment in which titanium wire was fed into a molten niobium pool. Laser data is compared to deposited film composition and film cross sections. Finally, the potential for using this technique for composition control in melting applications is discussed.
Anklam, T.M.; Berzins, L.V.; Braun, D.G.; Haynam, C.; McClelland, M.A.; Meier, T.
Lawrence Livermore National Laboratory is developing sensors and controls to improve and extend electron beam materials processing technology to alloy systems with constituents of widely varying vapor pressure. The approach under development involves using tunable lasers to measure the density and composition of the vapor plume. A laser based vaporizer control system for vaporization of a uranium-iron alloy has been previously demonstrated in multi-hundred hour, high rate vaporization experiments at LLNL. This paper reviews the design and performance of the uranium vaporization sensor and control system and discusses the extension of the technology to monitoring of titanium vaporization. Data is presented from an experiment in which titanium wire was fed into a molten niobium pool. Laser data is compared to deposited film composition and film cross sections. Finally, the potential for using this technique for composition control in melting applications is discussed.
Anklam, T.M.; Berzins, L.V.; Braun, D.G.; Haynam, C.; McClelland, M.A.; Meier, T. [Lawrence Livermore National Lab., CA (United States)
Electrolyte vapor condenser
A system is disclosed for removing electrolyte from a fuel cell gas stream. The gas stream containing electrolyte vapor is supercooled utilizing conventional heat exchangers and the thus supercooled gas stream is passed over high surface area passive condensers. The condensed electrolyte is then drained from the condenser and the remainder of the gas stream passed on. The system is particularly useful for electrolytes such as phosphoric acid and molten carbonate, but can be used for other electrolyte cells and simple vapor separation as well. 3 figs.
Sederquist, R.A.; Szydlowski, D.F.; Sawyer, R.D.
A system is disclosed for removing electrolyte from a fuel cell gas stream. The gas stream containing electrolyte vapor is supercooled utilizing conventional heat exchangers and the thus supercooled gas stream is passed over high surface area passive condensers. The condensed electrolyte is then drained from the condenser and the remainder of the gas stream passed on. The system is particularly useful for electrolytes such as phosphoric acid and molten carbonate, but can be used for other electrolyte cells and simple vapor separation as well.
Sederquist, Richard A. (Newington, CT); Szydlowski, Donald F. (East Hartford, CT); Sawyer, Richard D. (Canton, CT)
Vacuum arc deposition devices
The vacuum arc is a high-current, low-voltage electrical discharge which produces a plasma consisting of vaporized and ionized electrode material. In the most common cathodic arc deposition systems, the arc concentrates at minute cathode spots on the cathode surface and the plasma is emitted as a hypersonic jet, with some degree of contamination by molten droplets [known as macroparticles (MPs)] of the cathode material. In vacuum arc deposition systems, the location and motion of the cathode spots are confined to desired surfaces by an applied magnetic field and shields around undesired surfaces. Substrates are mounted on a holder so that they intercept some portion of the plasma jet. The substrate often provides for negative bias to control the energy of depositing ions and heating or cooling to control the substrate temperature. In some systems, a magnetic field is used to guide the plasma around an obstacle which blocks the MPs. These elements are integrated with a deposition chamber, cooling, vacuum gauges and pumps, and power supplies to produce a vacuum arc deposition system.
Boxman, R.L.; Zhitomirsky, V.N. [Electrical Discharge and Plasma Laboratory, Faculty of Engineering, Tel Aviv University, P.O. Box 39040, Tel Aviv 69978 (Israel)
Organic vapor jet printing system
An organic vapor jet printing system includes a pump for increasing the pressure of an organic flux.
Forrest, Stephen R
ALD and Pulsed CVD of Ruthenium and Ruthenium Dioxide Thin Films From an Amidinate Precursor
Narrow window of O2 exposure (e.g. 0.02~0.04 Torr·s @ 325ºC) to obtain high quality pure Ru filmALD and Pulsed CVD of Ruthenium and Ruthenium Dioxide Thin Films From an Amidinate Precursor Xinwei, China Introduction Experimental ALD with O2 Ru metal film Pulsed CVD with NH3+H2 Ru metal film Pulsed
Enthalpies of Vaporization and Vapor Pressures of Some Deuterated Hydrocarbons. Liquid-Vapor Pressure Isotope Effects
* Department of Chemistry and Biochemistry, University of MissourisSt. Louis, St. Louis, Missouri 63121 Liquid vapor pressure isotope effects have generally been observed, pD > pH.12 Vapor pressure and sublimation
Chickos, James S.
Pitting Corrosion in CVD SiC at 300?C in Deoxygenated High-Purity Water
SiC is a candidate for nuclear applications at elevated temperatures but has not been fully studied under typical light-water reactor operating conditions, such as moderate temperatures and high pressures. Coupons of high-purity chemical vapor deposited SiC were exposed to deoxygenated, pressurized water at 573K and 100 Bar for up to 4000 hours. Ceramographic examination of the exposed SiC surfaces revealed both embryonic and large, d > 300 �m, pits on the surface. The pits were characterized using scanning electron microscopy for structure and chemistry analysis. Pit densities were also determined by standard counting methods. The chemical analysis revealed that the pits are associated with the formation of silica and subsequent loss of Si, which is expected due to several suggested reactions between SiC and water.
Henager, Charles H.; Schemer-Kohrn, Alan L.; Pitman, Stan G.; Senor, David J.; Geelhood, Ken J.; Painter, Chad L.
Do CVD grown graphene films have antibacterial activity on metallic substrates?
Accurate assessment of the antibacterial activity of graphene requires consideration of both the graphene fabrication method and, for supported films, the properties of the substrate. Large-area graphene films produced by chemical vapor deposition were grown directly on copper substrates or transferred on a gold substrate and their effect on the viability and proliferation of the Gram-positive bacteria Staphylococcus aureus and the Gram-negative bacteria Escherichia coli were assessed. The viability and the proliferation of both bacterial species were not affected when they were grown on a graphene film entirely covering the gold substrate, indicating that conductivity plays no role on bacterial viability and graphene has no antibacterial activity against S. aureus and E. coli. On the other hand, antibacterial activity was observed when graphene coated the copper substrates, resulting from the release of bactericidal cupric ions in inverse proportion to the graphene surface coverage.
Dellieu, Louis; Reckinger, Nicolas; Didembourg, Christian; Letesson, Jean-Jacques; Sarrazin, Michael; Deparis, Olivier; Matroule, Jean-Yves; Colomer, Jean-Fran�ois
Method for deposition of a conductor in integrated circuits
A method is described for fabricating integrated semiconductor circuits and, more particularly, for the selective deposition of a conductor onto a substrate employing a chemical vapor deposition process. By way of example, tungsten can be selectively deposited onto a silicon substrate. At the onset of loss of selectivity of deposition of tungsten onto the silicon substrate, the deposition process is interrupted and unwanted tungsten which has deposited on a mask layer with the silicon substrate can be removed employing a halogen etchant. Thereafter, a plurality of deposition/etch back cycles can be carried out to achieve a predetermined thickness of tungsten. 2 figs.
Creighton, J.R.; Dominguez, F.; Johnson, A.W.; Omstead, T.R.
A method is described for fabricating integrated semiconductor circuits and, more particularly, for the selective deposition of a conductor onto a substrate employing a chemical vapor deposition process. By way of example, tungsten can be selectively deposited onto a silicon substrate. At the onset of loss of selectivity of deposition of tungsten onto the silicon substrate, the deposition process is interrupted and unwanted tungsten which has deposited on a mask layer with the silicon substrate can be removed employing a halogen etchant. Thereafter, a plurality of deposition/etch back cycles can be carried out to achieve a predetermined thickness of tungsten.
Creighton, J. Randall (Albuquerque, NM); Dominguez, Frank (Albuquerque, NM); Johnson, A. Wayne (Albuquerque, NM); Omstead, Thomas R. (Albuquerque, NM)
Stratified vapor generator
A stratified vapor generator (110) comprises a first heating section (H.sub.1) and a second heating section (H.sub.2). The first and second heating sections (H.sub.1, H.sub.2) are arranged so that the inlet of the second heating section (H.sub.2) is operatively associated with the outlet of the first heating section (H.sub.1). A moisture separator (126) having a vapor outlet (164) and a liquid outlet (144) is operatively associated with the outlet (124) of the second heating section (H.sub.2). A cooling section (C.sub.1) is operatively associated with the liquid outlet (144) of the moisture separator (126) and includes an outlet that is operatively associated with the inlet of the second heating section (H.sub.2).
Bharathan, Desikan (Lakewood, CO); Hassani, Vahab (Golden, CO)
ARM - Water Vapor
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This project had as its main focus the determination of vapor pressures of coal pyrolysis tars. It involved performing measurements of these vapor pressures and from them, developing vapor pressure correlations suitable for use in advanced pyrolysis models (those models which explicitly account for mass transport limitations). This report is divided into five main chapters. Each chapter is a relatively stand-alone section. Chapter A reviews the general nature of coal tars and gives a summary of existing vapor pressure correlations for coal tars and model compounds. Chapter B summarizes the main experimental approaches for coal tar preparation and characterization which have been used throughout the project. Chapter C is concerned with the selection of the model compounds for coal pyrolysis tars and reviews the data available to us on the vapor pressures of high boiling point aromatic compounds. This chapter also deals with the question of identifying factors that govern the vapor pressures of coal tar model materials and their mixtures. Chapter D covers the vapor pressures and heats of vaporization of primary cellulose tars. Chapter E discusses the results of the main focus of this study. In summary, this work provides improved understanding of the volatility of coal and cellulose pyrolysis tars. It has resulted in new experimentally verified vapor pressure correlations for use in pyrolysis models. Further research on this topic should aim at developing general vapor pressure correlations for all coal tars, based on their molecular weight together with certain specific chemical characteristics i.e. hydroxyl group content.
Eric M. Suuberg; Vahur Oja
Effect of plasma CVD operating temperature on nanomechanical properties of TiC nanostructured coating investigated by atomic force microscopy
Highlights: ? The TiC{sub x} nanostructure coatings have been deposited by PACVD method. ? Dominant mechanism of growth structure at 490 �C is island-layer type. ? TiC{sub x} nanostructure coating applied at 490 �C, exhibits lowest friction coefficient. ? Young's moduli are 289.9, 400 and 187.6 GPa for 470, 490 and 510 �C, respectively. ? This higher elastic modulus and higher hardness of nanocoating obtain at 490 �C. -- Abstract: The structure, composition, and mechanical properties of nanostructured titanium carbide (TiC) coatings deposited on H{sub 11} hot-working tool steel by pulsed-DC plasma assisted chemical vapor deposition at three different temperatures are investigated. Nanoindentation and nanoscratch tests are carried out by atomic force microscopy to determine the mechanical properties such as hardness, elastic modulus, surface roughness, and friction coefficient. The nanostructured TiC coatings prepared at 490 �C exhibit lower friction coefficient (0.23) than the ones deposited at 470 and 510 �C. Increasing the deposition temperature reduces the Young's modulus and hardness. The overall superior mechanical properties such as higher hardness and lower friction coefficient render the coatings deposited at 490 �C suitable for wear resistant applications.
Shanaghi, Ali, E-mail: firstname.lastname@example.com [Materials Engineering Department, Faculty of Engineering, Malayer University, P.O. Box: 95863-65719, Malayer (Iran, Islamic Republic of)] [Materials Engineering Department, Faculty of Engineering, Malayer University, P.O. Box: 95863-65719, Malayer (Iran, Islamic Republic of); Rouhaghdam, Ali Reza Sabour, E-mail: email@example.com [Surface Engineering Laboratory, Materials Engineering Department, Faculty of Engineering, Tarbiat Modares University, P.O. Box: 14115-143, Tehran (Iran, Islamic Republic of); Ahangarani, Shahrokh, E-mail: email@example.com [Advanced Materials and Renewable Energies Department, Iranian Research Organization for Science and Technology, P.O. Box 15815-3538, Tehran (Iran, Islamic Republic of)] [Advanced Materials and Renewable Energies Department, Iranian Research Organization for Science and Technology, P.O. Box 15815-3538, Tehran (Iran, Islamic Republic of); Chu, Paul K., E-mail: firstname.lastname@example.com [Department of Physics and Materials Science, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong (China)
Robust Numerical Simulation of Porosity Evolution in Chemical Vapor In ltration II: Two Dimensional
-solid reactions with solid deposition are exempli#12;ed by the fabrication of ceramic matrix composites through #3) process, during which a matrix of ceramic #12;bers is chemically vapor deposited within a porous preform practical approach to fabricate ceramic composites. Among these composites, #12;ber-reinforced composites
Jin, Shi
Variable temperature semiconductor film deposition
A method of depositing a semiconductor material on a substrate is disclosed. The method sequentially comprises (a) providing the semiconductor material in a depositable state such as a vapor for deposition on the substrate; (b) depositing the semiconductor material on the substrate while heating the substrate to a first temperature sufficient to cause the semiconductor material to form a first film layer having a first grain size; (c) continually depositing the semiconductor material on the substrate while cooling the substrate to a second temperature sufficient to cause the semiconductor material to form a second film layer deposited on the first film layer and having a second grain size smaller than the first grain size; and (d) raising the substrate temperature, while either continuing or not continuing to deposit semiconductor material to form a third film layer, to thereby anneal the film layers into a single layer having favorable efficiency characteristics in photovoltaic applications. A preferred semiconductor material is cadmium telluride deposited on a glass/tin oxide substrate already having thereon a film layer of cadmium sulfide.
Li, X.; Sheldon, P.
ARM Water Vapor IOP
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Water Vapor Experiment Concludes
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To estimate vapor pressure easily
Vapor pressures as functions of temperature for approximately 700 major organic chemical compounds are given. The tabulation also gives the temperature range for which the data are applicable. Minimum and maximum temperatures are denoted by TMIN and TMAX. The Antoine equation that correlates vapor pressure as a function of temperature is described. A representative comparison of calculated and actual data values for vapor pressure is shown for ethyl alcohol. The coefficient tabulation is based on both literature (experimental data) and estimated values.
Yaws, C.L.; Yang, H.C. (Lamar Univ., Beaumont, TX (USA))
Vaporization of zinc from scrap
The rate of zinc vaporization from galvanized scrap was measured using a thermogravimetric apparatus along with chemical analysis. It is found that the rate of zinc vaporization is very fast in nitrogen and carbon monoxide atmospheres at temperatures higher than 950 C. At lower temperature rate decreases with decreasing temperature and is controlled by the gas phase mass transport. The simultaneous oxidation and vaporization of zinc occurs when the samples were heated in carbon dioxide and air. The current experimental results indicate that almost all of the zinc from scrap vaporizes during the heating process in a very short period of time after the temperature reaches above 850 C.
Ozturk, B.; Fruehan, R.J. [Carnegie Mellon Univ., Pittsburgh, PA (United States)
Vapor spill pipe monitor
The invention is a method and apparatus for continually monitoring the composition of liquefied natural gas flowing from a spill pipe during a spill test by continually removing a sample of the LNG by means of a probe, gasifying the LNG in the probe, and sending the vaporized LNG to a remote ir gas detector for analysis. The probe comprises three spaced concentric tubes surrounded by a water jacket which communicates with a flow channel defined between the inner and middle, and middle and outer tubes. The inner tube is connected to a pump for providing suction, and the probe is positioned in the LNG flow below the spill pipe with the tip oriented partly downward so that LNG is continuously drawn into the inner tube through a small orifice. The probe is made of a high thermal conductivity metal. Hot water is flowed through the water jacket and through the flow channel between the three tubes to provide the necessary heat transfer to flash vaporize the LNG passing through the inner channel of the probe. The gasified LNG is transported through a connected hose or tubing extending from the probe to a remote ir sensor which measures the gas composition.
Bianchini, G.M.; McRae, T.G.
Cold Vacuum Dryer (CVD) Facility Fire Protection System Design Description (SYS 24)
This system design description (SDD) addresses the Cold Vacuum Drying (CVD) Facility fire protection system (FPS). The primary features of the FPS for the CVD are a fire alarm and detection system, automatic sprinklers, and fire hydrants. The FPS also includes fire extinguishers located throughout the facility and fire hydrants to assist in manual firefighting efforts. In addition, a fire barrier separates the operations support (administrative) area from the process bays and process bay support areas. Administrative controls to limit combustible materials have been established and are a part of the overall fire protection program. The FPS is augmented by assistance from the Hanford Fire Department (HED) and by interface systems including service water, electrical power, drains, instrumentation and controls. This SDD, when used in conjunction with the other elements of the definitive design package, provides a complete picture of the FPS for the CVD Facility.
An apparatus for fabricating thin film materials utilizing high speed gas dynamics relies on supersonic free jets of carrier gas to transport depositing vapor species generated in a microwave discharge to the surface of a prepared substrate where the vapor deposits to form a thin film. The present invention generates high rates of deposition and thin films of unforeseen high quality at low temperatures. 5 figures.
Schmitt, J.J. III; Halpern, B.L.
Ultrashort pulse laser deposition of thin films
Short pulse PLD is a viable technique of producing high quality films with properties very close to that of crystalline diamond. The plasma generated using femtosecond lasers is composed of single atom ions with no clusters producing films with high Sp.sup.3 /Sp.sup.2 ratios. Using a high average power femtosecond laser system, the present invention dramatically increases deposition rates to up to 25 .mu.m/hr (which exceeds many CVD processes) while growing particulate-free films. In the present invention, deposition rates is a function of laser wavelength, laser fluence, laser spot size, and target/substrate separation. The relevant laser parameters are shown to ensure particulate-free growth, and characterizations of the films grown are made using several diagnostic techniques including electron energy loss spectroscopy (EELS) and Raman spectroscopy.
Perry, Michael D. (Livermore, CA); Banks, Paul S. (Livermore, CA); Stuart, Brent C. (Fremont, CA)
785 nm Raman Spectroscopy of CVD Diamond Films Paul William May, James A Smith, and Keith N Rosser
. Here, we report that when using 785 nm excitation, the Raman spectra from thin polycrystalline diamond785 nm Raman Spectroscopy of CVD Diamond Films Paul William May, James A Smith, and Keith N Rosser Raman spectroscopy is a powerful technique often used to study CVD diamond films, however, very little
785 nm Raman spectroscopy of CVD diamond films P.W. May , J.A. Smith, K.N. Rosser
using 785 nm excitation with 1 �m spot size, the Raman spectra from thin polycrystalline diamond films785 nm Raman spectroscopy of CVD diamond films P.W. May , J.A. Smith, K.N. Rosser School is a powerful technique often used to study CVD diamond films, however, very little work has been reported
ulvacsim.paper.doc 08/20/99 p. 1 of 23 Dynamic Simulation of a Multichamber CVD Cluster Tool
ulvacsim.paper.doc 08/20/99 p. 1 of 23 Dynamic Simulation of a Multichamber CVD Cluster Tool N-level dynamic simulator for an 8" CVD cluster tool (ULVAC-ERA1000). The simulator incorporates models, and volumes to reflect actual behavior, validated against experiments on the Ulvac tool. The process simulator
Investigation of Thermal Stability and Delivery of Cobalt Amidinates and Novel Cobalt Formamidinates for Metallic Cobalt by ALD/CVD
Investigation of Thermal Stability and Delivery of Cobalt Amidinates and Novel Cobalt Si nanowire devices[2]. The Co precursor selection for CVD and ALD is primarily based on good thermal Liquid Injection process (DLI). ¾ For CVD and ALD of cobalt, various sources such as Co2(CO)8, (tert
Fuel vapor control device
A fuel vapor control device is described having a valve opening and closing a passage connecting a carburetor and a charcoal canister according to a predetermined temperature. A first coil spring formed by a ''shape memory effect'' alloy is provided to urge the valve to open the passage when the temperature is high. A second coil spring urges the valve to close the passage. A solenoid is provided to urge an armature against the valve to close the passage against the force of the first coil spring when the engine is running. The solenoid heats the first coil spring to generate a spring force therein when the engine is running. When the engine is turned off, the solenoid is deactivated, and the force of the first spring overcomes the force of the second spring to open the passage until such time as the temperature of the first spring drops below the predetermined temperature.
Ota, I.; Nishimura, Y.; Nishio, S.; Yogo, K.
Vapor etching of nuclear tracks in dielectric materials
A process involving vapor etching of nuclear tracks in dielectric materials for creating high aspect ratio (i.e., length much greater than diameter), isolated cylindrical holes in dielectric materials that have been exposed to high-energy atomic particles. The process includes cleaning the surface of the tracked material and exposing the cleaned surface to a vapor of a suitable etchant. Independent control of the temperatures of the vapor and the tracked materials provide the means to vary separately the etch rates for the latent track region and the non-tracked material. As a rule, the tracked regions etch at a greater rate than the non-tracked regions. In addition, the vapor-etched holes can be enlarged and smoothed by subsequent dipping in a liquid etchant. The 20-1000 nm diameter holes resulting from the vapor etching process can be useful as molds for electroplating nanometer-sized filaments, etching gate cavities for deposition of nano-cones, developing high-aspect ratio holes in trackable resists, and as filters for a variety of molecular-sized particles in virtually any liquid or gas by selecting the dielectric material that is compatible with the liquid or gas of interest.
Musket, Ronald G. (Danville, CA); Porter, John D. (Berkeley, CA); Yoshiyama, James M. (Fremont, CA); Contolini, Robert J. (Lake Oswego, OR)
Micro Chemical Vapor Deposition for the Synthesis of Nanomaterials
image in Figure 2.17(c) (FLIR� A320 Camera, the emissivitysame from the IR camera (FLIR� A320) and the thermal couple.thermal cameras (for example, FLIR� systems). However, the
Zhou, Qin
Air-gap sacrificial materials by initiated chemical vapor deposition
P(neopentyl methacrylate-co-ethylene glycol dimethacrylate) copolymer, abbreviated as P(npMAco-EGDA), was selected as the potential air-gap sacrificial material among possible combination of twenty monomers and four ...
Lee, Long Hua
Vapor-Wall Deposition in Chambers: Theoretical Considerations
aerosol size distribution changes continuously as particles grow by condensation and are lost by coagulation
McVay, Renee C; Cappa, Christopher D; Seinfeld, John H
Vapor deposited samarium zirconate thermal barrier coatings Hengbei Zhao a,
Thermal barrier coatings The rare earth zirconates (M2Zr2O7, M=LaGd) have a low intrinsic thermal conductivity and high temperature phase stability making them attractive candidates for thermal barrier coating conditions and the coating composition, structure, texture, pore morphology, and thermal conductivity
Compositional Variations in Vapor Deposited Samarium Zirconate Coatings
) and a low thermal conductivity. Zirconia stabilized with 7-8 wt % yttria (7YSZ) is currently the industry 7YSZ, as they possess a low thermal conductivity, have a very high melting point, and are phase of the requirements for the Degree Master of Science (Materials Science and Engineering) by Toni Kember December 2011
Journal of MicroElectroMechanical Systems, vol. 20, pp. 9-Chair MEMS (Microelectromechanical Systems) technologiesby MEMS (Microelectromechanical Systems) technologies many
Graphene growth with giant domains using chemical vapor deposition
N. Martensson, Controlling graphene corrugation on lattice-in patterned epitaxial graphene, Science, 2006, 312(5777), 92009, 4(6), 17 A. K. Geim, Graphene: Status and Prospects,
Yong, Virginia; Hahn, H. Thomas
Hot-Wire Chemical Vapor Deposition (HWCVD) technologies - Energy Innovation
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Sandia National Laboratories: metal organic chemical vapor deposition
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Passive vapor extraction feasibility study
Demonstration of a passive vapor extraction remediation system is planned for sites in the 200 West Area used in the past for the disposal of waste liquids containing carbon tetrachloride. The passive vapor extraction units will consist of a 4-in.-diameter pipe, a check valve, a canister filled with granular activated carbon, and a wind turbine. The check valve will prevent inflow of air that otherwise would dilute the soil gas and make its subsequent extraction less efficient. The granular activated carbon is used to adsorb the carbon tetrachloride from the air. The wind turbine enhances extraction rates on windy days. Passive vapor extraction units will be designed and operated to meet all applicable or relevant and appropriate requirements. Based on a cost analysis, passive vapor extraction was found to be a cost-effective method for remediation of soils containing lower concentrations of volatile contaminants. Passive vapor extraction used on wells that average 10-stdft{sup 3}/min air flow rates was found to be more cost effective than active vapor extraction for concentrations below 500 parts per million by volume (ppm) of carbon tetrachloride. For wells that average 5-stdft{sup 3}/min air flow rates, passive vapor extraction is more cost effective below 100 ppm.
Rohay, V.J.
Electron Transport Properties of CVD Graphene on h-BN Flakes Mahmut Tosun, Prof. Andras Kis
Electron Transport Properties of CVD Graphene on h-BN Flakes LANES Mahmut Tosun, Prof. Andras Kis and Objective 3. Experimental 3. Experimental 4. Results and Discussion 5. Conclusion Graphene has been studied graphene showed charged carrier mobility as high as 200.000 cm2 /Vs when it is suspended [2]. Several
Candea, George
Reduced Order Based Compensator Control of Thin Film Growth in a CVD Reactor
of the reactor so that control and sensing are a basic component of the optimal design e#orts for the reactor. WeReduced Order Based Compensator Control of Thin Film Growth in a CVD Reactor H.T. Banks and H processing approaches with ad vanced mathematical modeling, optimization, and control theory to guide
of the reactor so that control and sensing are a basic component of the optimal design efforts for the reactorReduced Order Based Compensator Control of Thin Film Growth in a CVD Reactor H.T. Banks and H processing approaches with ad- vanced mathematical modeling, optimization, and control theory to guide
In situ analysis of ash deposits from black liquor combustion
Aerosols formed during combustion of black liquor cause a significant fire-side fouling problem in pulp mill recovery boilers. The ash deposits reduce heat transfer effectiveness, plug gas passages, and contribute to corrosion. Both vapors and condensation aerosols lead to the formation of such deposits. The high ash content of the fuel and the low dew point of the condensate salts lead to a high aerosol and vapor concentration in most boilers. In situ measurements of the chemical composition of these deposits is an important step in gaining a fundamental understanding of the deposition process. Infrared emission spectroscopy is used to characterize the composition of thin film deposits resulting from the combustion of black liquor and the deposition of submicron aerosols and vapors. New reference spectra of Na{sub 2}SO{sub 4}, K{sub 2}SO{sub 4}, Na{sub 2}CO{sub 3} and K{sub 2}CO{sub 3} pure component films were recorded and compared with the spectra of the black liquor deposit. All of the black liquor emission bands were identified using a combination of literature data and ab initio calculations. Ab initio calculations also predict the locations and intensities of bands for the alkali vapors of interest. 39 refs., 9 figs.
Bernath, P. [Sandia National Labs., Livermore, CA (United States). Combustion Research Facility]|[Univ. of Toronto, Ontario (Canada); Sinquefield, S.A. [Sandia National Labs., Livermore, CA (United States). Combustion Research Facility]|[Oregon State Univ., Eugene, OR (United States); Baxter, L.L.; Sclippa, G.; Rohlfing, C. [Sandia National Labs., Livermore, CA (United States). Combustion Research Facility; Barfield, M. [Sandia National Labs., Livermore, CA (United States). Combustion Research Facility]|[Univ. of Arizona, Tucson, AZ (United States)
Crystal Silicon Heterojunction Solar Cells by Hot-Wire CVD: Preprint
Hot-wire chemical vapor deposition (HWCVD) is a promising technique for fabricating Silicon heterojunction (SHJ) solar cells. In this paper we describe our efforts to increase the open circuit voltage (Voc) while improving the efficiency of these devices. On p-type c-Si float-zone wafers, we used a double heterojunction structure with an amorphous n/i contact to the top surface and an i/p contact to the back surface to obtain an open circuit voltage (Voc) of 679 mV in a 0.9 cm2 cell with an independently confirmed efficiency of 19.1%. This is the best reported performance for a cell of this configuration. We also made progress on p-type CZ wafers and achieved 18.7% independently confirmed efficiency with little degradation under prolong illumination. Our best Voc for a p-type SHJ cell is 0.688 V, which is close to the 691 mV we achieved for SHJ cells on n type c-Si wafers.
Wang, Q.; Page, M. R.; Iwaniczko, E.; Xu, Y. Q.; Roybal, L.; Bauer, R.; To, B.; Yuan, H. C.; Duda, A.; Yan, Y. F.
Portable vapor diffusion coefficient meter
An apparatus for measuring the effective vapor diffusion coefficient of a test vapor diffusing through a sample of porous media contained within a test chamber. A chemical sensor measures the time-varying concentration of vapor that has diffused a known distance through the porous media. A data processor contained within the apparatus compares the measured sensor data with analytical predictions of the response curve based on the transient diffusion equation using Fick's Law, iterating on the choice of an effective vapor diffusion coefficient until the difference between the predicted and measured curves is minimized. Optionally, a purge fluid can forced through the porous media, permitting the apparatus to also measure a gas-phase permeability. The apparatus can be made lightweight, self-powered, and portable for use in the field.
Ho, Clifford K. (Albuquerque, NM)
Laser induced thermophoresis and particulate deposition efficiency
The interaction of laser radiation and an absorbing aerosol in a tube flow has been considered. The aerosol is produced by external heating of reactants as in the MCVD (Modified Chemical Vapor Deposition) process to produce submicron size particles in the manufacture of optical fiber preforms. These are subsequently deposited by thermophoretic forces on the inner wall of the tube as they are convected by a Poiseuille velocity profile. Axial laser radiation in the tube interacts with the absorbing particles, and the laser heating of the gas induces additional thermophoretic forces that markedly increase the efficiency of particulate deposition. A particle concentration dependent absorption coefficient that appears in the energy equation couples the energy equation to the equation of particle conservation, so that a non-linear set of coupled partial integrodifferential equations must be solved. Numerical solutions for aerosol particle trajectories, and thus deposition efficiencies, have been obtained. It is shown that laser enhanced thermophoresis markedly improves the deposition efficiency.
Cipolla, J.; Morse, T.F.; Wang, C.Y.
Tribology Letters Vol. 10, No. 3, 2001 179 Activation of the SiC surface for vapor phase lubrication
above 500 C [2,3,11,12]. Since liquid lubricants cannot withstand such extreme conditions, a number deposition 1. Introduction The lubrication of ceramic surfaces working at extremely high temperatures has lubrication by Fe chemical vapor deposition from Fe(CO)5 Daxing Ren, Dougyong Sung and Andrew J. Gellman
Gellman, Andrew J.
The Vaporization Enthalpies and Vapor Pressures of Some Primary Amines of Pharmaceutical Importance by Correlation Gas
by Correlation Gas Chromatography Chase Gobble, Nigam Rath, and James Chickos* Department of Chemistry Information ABSTRACT: Vapor pressures, vaporization, and sublimation enthalpies of several pharmaceuticals and boiling temperatures when available. Sublimation enthalpies and vapor pressures are also evaluated for 1
Control of pyrophoricity in deposits produced by electron beam evaporation of uranium
A description is given of an apparatus for reducing the pyrophoricity of deposits of a material evaporated within a chamber comprising: a sealed chamber defined by an enclosure; means for providing within said chamber an atmosphere of generally non-reactive nature; a reservoir of a material to ve evaporated; means for directing a vapor of said material from said reservoir into said chamber; at least one surface within said chamber in the path of the directed vapor and on which at least portions of the vaporized material deposits; means for cooling said enclosure to a temperature at which said vapor deposits at a relatively low pyrophoric density; and means for maintaining a temperature for said collection surfaces higher than the enclosure temperature to promote deposition of said material at a relatively higher density.
Clifford, J.
Physica A 314 (2002) 192199 www.elsevier.com/locate/physa
Sivashinsky equation; Moving boundary problem; Noise; Ion-beam sputtering; Chemical vapor deposition; Electrochemical, such as electrochemical deposition (ECD), chemical vapor deposition (CVD), and erosion by ion-beam sputtering. We moreover constant, and Á(r; t) is an uncorrelated Gaussian noise represent- ing uctuations, e.g., in a ux
Cuerno, Rodolfo
VAPORIZATION THERMODYNAMICS OF KCl. COMBINING VAPOR PRESSURE AND GRAVIMETRIC DATA
.B. Department of Chemistry, Moscow State University, Moscow, 119899, Russia Bonnell D.W., Hastie J.W. National temperature chemistry situations, vapor pressures are typically less than 100 kPa. The molar volume is p = 101325 Pa). The subscript trs denotes that the changeisfor a transition, typically sublimation
Rudnyi, Evgenii B.
The vaporization of tungsten from the APT spallation target dominates the radiological source term for unmitigated target overheating accidents. Chemical reactions of tungsten with steam which persist to tungsten temperatures as low as 800 C result in the formation of a hydrated tungsten-oxide which has a high vapor pressure and is readily convected in a flowing atmosphere. This low-temperature vaporization reaction essentially removes the oxide film that forms on the tungsten-metal surface as soon as it forms, leaving behind a fresh metallic surface for continued oxidation and vaporization. Experiments were conducted to measure the oxidative vaporization rates of tungsten in steam as part of the effort to quantify the MT radiological source term for severe target accidents. Tests were conducted with tungsten rods (1/8 inch diameter, six inches long) heated to temperatures from approximately 700 C to 1350 C in flowing steam which was superheated to 140 C. A total of 19 experiments was conducted. Fifteen tests were conducted by RF induction heating of single tungsten rods held vertical in a quartz glass retort. Four tests were conducted in a vertically-mounted tube furnace for the low temperature range of the test series. The aerosol which was generated and transported downstream from the tungsten rods was collected by passing the discharged steam through a condenser. This procedure insured total collection of the steam along with the aerosol from the vaporization of the rods. The results of these experiments revealed a threshold temperature for tungsten vaporization in steam. For the two tests at the lowest temperatures which were tested, approximately 700 C, the tungsten rods were observed to oxidize without vaporization. The remainder of the tests was conducted over the temperature range of 800 C to 1350 C. In these tests, the rods were found to have lost weight due to vaporization of the tungsten and the missing weight was collected in the downstream condensate system. The aerosol formed a fine white smoke of tungsten-oxide which was visible to the eye as it condensed in the laminar boundary layer of steam which flowed along the surface of the rod. The aerosol continued to flow as a smoke tube downstream of the rod, flowing coaxially along the centerline axis of the quartz glass tube and depositing by impaction along the outside of a bend and at sudden area contractions in the piping. The vaporization rate data from the 17 experiments which exceeded the vaporization threshold temperature are shown in Figure 5 in the form of vaporization rates (g/cm{sup 2} s) vs. inverse temperature (K{sup {minus}1}). Two correlations to the present data are presented and compared to a published correlation by Kilpatrick and Lott. The differences are discussed.
Deposition of dopant impurities and pulsed energy drive-in
A semiconductor doping process which enhances the dopant incorporation achievable using the Gas Immersion Laser Doping (GILD) technique. The enhanced doping is achieved by first depositing a thin layer of dopant atoms on a semiconductor surface followed by exposure to one or more pulses from either a laser or an ion-beam which melt a portion of the semiconductor to a desired depth, thus causing the dopant atoms to be incorporated into the molten region. After the molten region recrystallizes the dopant atoms are electrically active. The dopant atoms are deposited by plasma enhanced chemical vapor deposition (PECVD) or other known deposition techniques.
Wickboldt, Paul (Walnut Creek, CA); Carey, Paul G. (Mountain View, CA); Smith, Patrick M. (San Jose, CA); Ellingboe, Albert R. (Malahide, IE)
Wickboldt, Paul (Walnut Creek, CA); Carey, Paul G. (Mountain View, CA); Smith, Patrick M. (San Ramon, CA); Ellingboe, Albert R. (Fremont, CA)
A semiconductor doping process which enhances the dopant incorporation achievable using the Gas Immersion Laser Doping (GILD) technique is disclosed. The enhanced doping is achieved by first depositing a thin layer of dopant atoms on a semiconductor surface followed by exposure to one or more pulses from either a laser or an ion-beam which melt a portion of the semiconductor to a desired depth, thus causing the dopant atoms to be incorporated into the molten region. After the molten region recrystallizes the dopant atoms are electrically active. The dopant atoms are deposited by plasma enhanced chemical vapor deposition (PECVD) or other known deposition techniques. 2 figs.
Wickboldt, P.; Carey, P.G.; Smith, P.M.; Ellingboe, A.R.
Source replenishment device for vacuum deposition
A material source replenishment device for use with a vacuum deposition apparatus is described. The source replenishment device comprises an intermittent motion producing gear arrangement disposed within the vacuum deposition chamber. An elongated rod having one end operably connected to the gearing arrangement is provided with a multiarmed head at the opposite end disposed adjacent the heating element of the vacuum deposition apparatus. An inverted U-shaped source material element is releasably attached to the outer end of each arm member whereby said multiarmed head is moved to locate a first of said material elements above said heating element, whereupon said multiarmed head is lowered to engage said material element with the heating element and further lowered to release said material element on the heating element. After vaporization of said material element, second and subsequent material elements may be provided to the heating element without the need for opening the vacuum deposition apparatus to the atmosphere.
Hill, R.A.
Chemical deposition methods using supercritical fluid solutions
A method for depositing a film of a desired material on a substrate comprises dissolving at least one reagent in a supercritical fluid comprising at least one solvent. Either the reagent is capable of reacting with or is a precursor of a compound capable of reacting with the solvent to form the desired product, or at least one additional reagent is included in the supercritical solution and is capable of reacting with or is a precursor of a compound capable of reacting with the first reagent or with a compound derived from the first reagent to form the desired material. The supercritical solution is expanded to produce a vapor or aerosol and a chemical reaction is induced in the vapor or aerosol so that a film of the desired material resulting from the chemical reaction is deposited on the substrate surface. In an alternate embodiment, the supercritical solution containing at least one reagent is expanded to produce a vapor or aerosol which is then mixed with a gas containing at least one additional reagent. A chemical reaction is induced in the resulting mixture so that a film of the desired material is deposited.
Sievers, Robert E. (Boulder, CO); Hansen, Brian N. (Boulder, CO)
Hydrogen Cars and Water Vapor
misidentified as "zero-emissions vehicles." Fuel cell vehicles emit water vapor. A global fleet could have, with discernible effects on people and ecosystems. The broad environmental effects of fuel cell vehicles. This cycle is currently under way with hydrogen fuel cells. As fuel cell cars are suggested as a solution
Colorado at Boulder, University of
Vapor phase modifiers for oxidative coupling
Volatilized metal compounds retard vapor phase alkane conversion reactions in oxidative coupling processes that convert lower alkanes to higher hydrocarbons.
Warren, Barbara K. (Charleston, WV)
Vapor explosion in the RIA-ST-4 experiment. [BWR
A concern in assuring the safety of commercial light water reactors (LWRs) is whether core overheating, during which molten fuel is produced, can lead to massive vaporization of the coolant and shock pressurization of the system due to an energetic molten fuel-coolant interaction (MFCI). The RIA-ST-4 experiment was one of four scoping tests in the Reactivity Initiated Accident (RIA) Test Series which is being conducted in the Power Burst Facility (PBF) to define an energy deposition failure threshold and to determine modes and consequences of fuel rod failure during a postulated boiling water reactor (BWR) control rod drop accident.
El-Genk, M.S.
Synthesis and characterization of carbon nanotubes using scanning probe based nano-lithographic techniques
A novel process which does not require the traditional Chemical Vapor Deposition (CVD) synthesis techniques and which works at temperatures lower than the conventional techniques was developed for synthesis of carbon nanotubes (CNT). The substrates...
Gargate, Rohit Vasant
Single-crystalline silicon lift-off films for metaloxidesemiconductor devices on arbitrary substrates
foils using plasma- enhanced chemical-vapor deposition CVD of hydrogen- passivated, amorphous silicon (a-Si:HGaAs/GaAs heterojunction bipolar transistors on silicon,10 and high electron mobility transistors on quartz and sapphire11
Ludwig-Maximilians-Universität, München
the electrical properties of chemical vapor deposition graphene and micromechanical exfoliated graphene the same trend, and defects of CVD graphene as well as the micromechanical exfoliate ones, follow certain
Catalyst proximity effects on the growth rate of Si nanowires S. T. Boles,1,a
and a silane precursor in a cold-wall chemical vapor deposition CVD system, where the precursor decomposition and experimental design, we have identified a fundamental aspect of growth of Si nanowires using the VLS mechanism
Growth of Large-Area Single- and Bi-Layer Graphene by Controlled Carbon Precipitation on Polycrystalline Ni Surfaces
We report graphene films composed mostly of one or two layers of graphene grown by controlled carbon precipitation on the surface of polycrystalline Ni thin films during atmospheric chemical vapor deposition (CVD). Controlling ...
Reina, Alfonso
Molybdenum enhanced low-temperature deposition of crystalline silicon nitride
A process for chemical vapor deposition of crystalline silicon nitride is described which comprises the steps of: introducing a mixture of a silicon source, a molybdenum source, a nitrogen source, and a hydrogen source into a vessel containing a suitable substrate; and thermally decomposing the mixture to deposit onto the substrate a coating comprising crystalline silicon nitride containing a dispersion of molybdenum silicide. 5 figures.
Lowden, R.A.
Vapor canister heater for evaporative emissions systems
Automotive evaporative emissions systems use a charcoal canister to store evaporative hydrocarobn emissions. These stored vapors are later purged and burned during engine operation. Under certain conditions the engine cannot completely purge the canister of the stored fuel vapors, which results in a decreased vapor storage capacity in the canister. A self-regulating PTC (Positive Temperature Coefficient) heater has been developed to warm the purge air as it enters the canister, in order to provide thermal energy for increased release of the vapors from charcoal sites. This paper describes the construction and operation of the vapor canister heater as it relates to improved evaporative emission system performance.
Bishop, R.P.; Berg, P.G.
Long coherence time of spin qubits in $^{12}$C enriched polycrystalline CVD diamond
Single defects in diamond and especially negatively charged nitrogen vacancy (NV) centers are very promising quantum systems with wide applications in physics and biology. It was shown that their coherence properties can be strongly improved by growing ultrapure diamond with low concentration of parasitic spins associated with nitrogen electron spins and nuclear spins related to $^{13}$C carbon isotope. Here we report a high quality $^{12}$C-enriched polycrystalline CVD diamond material with properties comparable with single crystals. We find single NVs in the grains of this material, which show extremely long electron spin coherence time $T_2 > 2\\,ms$.
K. D. Jahnke; B. Naydenov; T. Teraji; S. Koizumi; T. Umeda; J. Isoya; F. Jelezko
Ambipolar silicon nanowire FETs with stenciled-deposited metal gate Davide Sacchetto
Ambipolar silicon nanowire FETs with stenciled-deposited metal gate Davide Sacchetto , Veronica Keywords: Schottky barrier Ambipolarity Si nanowire Stencil lithography FET Silicide a b s t r a c t We chemical vapor deposition (LPCVD) of amorphous Si (a-Si) and SiO2 layers as well as metal gate patterning
De Micheli, Giovanni
Atomic absorption monitor for deposition process control of aluminum at 394 nm using frequency-doubled diode laser
Atomic absorption monitor for deposition process control of aluminum at 394 nm using frequency November 1995 A monitor for Al vapor density based on atomic absorption AA using a frequency of atomic absorption AA as a monitor for thickness and composition control in physical vapor deposi- tion
Hybrid deposition of thin film solid oxide fuel cells and electrolyzers
The use of vapor deposition techniques enables synthesis of the basic components of a solid oxide fuel cell (SOFC); namely, the electrolyte layer, the two electrodes, and the electrolyte-electrode interfaces. Such vapor deposition techniques provide solutions to each of the three critical steps of material synthesis to produce a thin film solid oxide fuel cell (TFSOFC). The electrolyte is formed by reactive deposition of essentially any ion conducting oxide, such as defect free, yttria stabilized zirconia (YSZ) by planar magnetron sputtering. The electrodes are formed from ceramic powders sputter coated with an appropriate metal and sintered to a porous compact. The electrolyte-electrode interface is formed by chemical vapor deposition of zirconia compounds onto the porous electrodes to provide a dense, smooth surface on which to continue the growth of the defect-free electrolyte, whereby a single fuel cell or multiple cells may be fabricated. 8 figs.
Jankowski, A.F.; Makowiecki, D.M.; Rambach, G.D.; Randich, E.
CVD Growth of Mono-and Bi-Layer Graphene from Ethanol Xiao Chen, Pei Zhao, Bo Hou, Erik Einarsson, Shohei Chiashi and Shigeo Maruyama
CVD Growth of Mono- and Bi-Layer Graphene from Ethanol Xiao Chen, Pei Zhao, Bo Hou, Erik Einarsson precursors have been employed to synthesize graphene, such as methane [6], ethane [7] and ethanol [8]. Here we report a systematic study on CVD growth of graphene on Cu and Ni substrates from ethanol. Ethanol
Effect of flow rate of ethanol on growth dynamics of VA-SWNT -Transition from no-flow CVD to normal ACCVD
Effect of flow rate of ethanol on growth dynamics of VA-SWNT - Transition from no-flow CVD a growth model [2]. In this study, the flow rate of ethanol during the CVD was controlled precisely. Figure 1 shows the growth curve of VA-SWNT film for various ethanol flow rates. In the figure, "No
Journal of Materials Synthesis and Processing, Vol. 8, No. 2, 2000 1064-7562/00/0300-0073$18.00/0 2000 Plenum Publishing Corporation
-7562/00/0300-0073$18.00/0 2000 Plenum Publishing Corporation 73 Grain-Scale Modeling of CVD of Polycrystalline Diamond Films M of polycrystalline diamond films is performed by carrying out a series of two-dimensional computer simulations: Chemical vapor deposition (CVD); diamond films; modeling. 1. INTRODUCTION Many factors, such as surface
Effective mobility of single-layer graphene transistors as a function of channel dimensions
thickness for both exfoliated and chemical vapor deposited (CVD) graphene is presented. The mobility. The mobility of CVD grown graphene is slightly lower than that of exfoliated graphene but shows similar trends and dielec- tric types on graphene mobility. There are many papers reporting on the mobility of exfoliated
Control of flow through a vapor generator
In a Rankine cycle system wherein a vapor generator receives heat from exhaust gases, provision is made to avoid overheating of the refrigerant during ORC system shut down while at the same time preventing condensation of those gases within the vapor generator when its temperature drops below a threshold temperature by diverting the flow of hot gases to ambient and to thereby draw ambient air through the vapor generator in the process. In one embodiment, a bistable ejector is adjustable between one position, in which the hot gases flow through the vapor generator, to another position wherein the gases are diverted away from the vapor generator. Another embodiment provides for a fixed valve ejector with a bias towards discharging to ambient, but with a fan on the downstream side of said vapor generator for overcoming this bias.
Radcliff, Thomas D.
Wick for metal vapor laser
An improved wick for a metal vapor laser is made of a refractory metal cylinder, preferably molybdenum or tungsten for a copper laser, which provides the wicking surface. Alternately, the inside surface of the ceramic laser tube can be metalized to form the wicking surface. Capillary action is enhanced by using wire screen, porous foam metal, or grooved surfaces. Graphite or carbon, in the form of chunks, strips, fibers or particles, is placed on the inside surface of the wick to reduce water, reduce metal oxides and form metal carbides.
Duncan, David B. (Livermore, CA)
Overview of chemical vapor infiltration
Chemical vapor infiltration (CVI) is developing into a commercially important method for the fabrication of continuous filament ceramic composites. Current efforts are focused on the development of an improved understanding of the various processes in CVI and its modeling. New approaches to CVI are being explored, including pressure pulse infiltration and microwave heating. Material development is also proceeding with emphasis on improving the oxidation resistance of the interfacial layer between the fiber and matrix. This paper briefly reviews these subjects, indicating the current state of the science and technology.
Besmann, T.M.; Stinton, D.P.; Lowden, R.A.
Volatilized metal compounds are described which are capable of retarding vapor phase alkane conversion reactions in oxidative coupling processes that convert lower alkanes to higher hydrocarbons.
Warren, B.K.
Near real time vapor detection and enhancement using aerosol adsorption
A vapor sample detection method where the vapor sample contains vapor and ambient air and surrounding natural background particles. The vapor sample detection method includes the steps of generating a supply of aerosol that have a particular effective median particle size, mixing the aerosol with the vapor sample forming aerosol and adsorbed vapor suspended in an air stream, impacting the suspended aerosol and adsorbed vapor upon a reflecting element, alternatively directing infrared light to the impacted aerosol and adsorbed vapor, detecting and analyzing the alternatively directed infrared light in essentially real time using a spectrometer and a microcomputer and identifying the vapor sample.
Novick, Vincent J.; Johnson, Stanley A.
A vapor sample detection method is described where the vapor sample contains vapor and ambient air and surrounding natural background particles. The vapor sample detection method includes the steps of generating a supply of aerosol that have a particular effective median particle size, mixing the aerosol with the vapor sample forming aerosol and adsorbed vapor suspended in an air stream, impacting the suspended aerosol and adsorbed vapor upon a reflecting element, alternatively directing infrared light to the impacted aerosol and adsorbed vapor, detecting and analyzing the alternatively directed infrared light in essentially real time using a spectrometer and a microcomputer and identifying the vapor sample. 13 figs.
Novick, V.J.; Johnson, S.A.
Novick, Vincent J. (Downers Grove, IL); Johnson, Stanley A. (Countryside, IL)
CVD Growth of Self-Organized Micro-Honeycomb Network Structure of Single-Walled Carbon Nanotubes for Photovoltaic Devices
CVD Growth of Self-Organized Micro-Honeycomb Network Structure of Single-Walled Carbon Nanotubes of dye-sensitized solar cells. Here, we propose a self-organized micro-honeycomb network structure performance. The SWNT/n-Si heterojunction solar cell was built by placing the micro-honeycomb SWNTs network
Generation of SWNTs on Si Wafer by Alcohol Catalytic CVD Shigeo Maruyama, Shohei Chiashi and Yuhei Miyauchi
Generation of SWNTs on Si Wafer by Alcohol Catalytic CVD Shigeo Maruyama, Shohei Chiashi and Yuhei ACCVD technique, lower temperature generation of SWNTs on Al patterned Si surface should be principally possible. We tried to generate SWNTs on Si wafer by ACCVD technique. Zeolite particles supporting Fe
Title: Decomposition of ethanol and dimethyl-ether during CVD synthesis of single-walled carbon nanotubes
of ethanol and dimethyl-ether during CVD synthesis of single-walled carbon nanotubes Author list: Bo Hou (single-walled carbon nanotubes) was investigated. Gas-phase thermal decomposition of ethanol and DME ethanol and DME decomposition, confirming expected reaction trends and primary byproducts. Peak
Tropospheric water vapor and climate sensitivity
Estimates are made of the effect of changes in tropospheric water vapor on the climate sensitivity to doubled carbon dioxide (CO{sub 2}) using a coarse resolution atmospheric general circulation model coupled to a slab mixed layer ocean. The sensitivity of the model to doubled CO{sub 2} is found as the difference between the equilibrium responses for control and doubled CO{sub 2} cases. Clouds are specified to isolate the water vapor feedback. Experiments in which the water vapor distribution is specified rather than internally calculated are used to find the contribution of water vapor in various layers and latitude belts to the sensitivity. The contribution of water vapor in layers of equal mass to the climate sensitivity varies by about a factor of 2 with height, with the largest contribution coming from layers between 450 and 750 mb, and the smallest from layers above 230 mb. The positive feedback on the global mean surface temperature response to doubled CO{sub 2} from water vapor above 750 mb is about 2.6 times as large as that from water vapor below 750 mb. The feedback on global mean surface temperature due to water vapor in the extratropical free troposphere is about 50% larger than the feedback due to the lower-latitude free troposphere water vapor. Several important sources of nonlinearity of the radiative heating rates were identified in the process of constructing the specified cloud and water vapor fields. These are (1) the interaction of clouds and solar radiation, which produces much more reflection of solar radiation for time mean clouds than for the instantaneous clouds; (2) the correlation of clouds and water vapor, which produces less downward longwave radiation at the ground for correlated clouds and water vapor than when these fields are independent; and (3) the interaction of water vapor with long wave radiation, which produces less downward longwave radiation at the ground of the average over instantaneous water vapor distributions than of the time mean water vapor distribution.
Schneider, E.K.; Kirtman, B.P.; Lindzen, R.S. [Center for Ocean-Land-Atmosphere Studies, Calverton, MD (United States)] [Center for Ocean-Land-Atmosphere Studies, Calverton, MD (United States)
Channeling Effect in Polycrystalline Deuterium-Saturated CVD Diamond Target Bombarded by Deuterium Ion Beam
At the ion accelerator HELIS at the LPI, the neutron yield is investigated in DD reactions within a polycrystalline deuterium-saturated CVD diamond, during an irradiation of its surface by a deuterium ion beam with the energy less than 30 keV. The measurements of the neutron flux in the beam direction are performed in dependence on the target angle, \\b{eta}, with respect to the beam axis. These measurements are performed using a multichannel detector based on He3 counters. A significant anisotropy in neutron yield is observed, it was higher by a factor of 3 at \\b{eta}=0 compared to that at \\b{eta} = +-45{\\deg}. The possible reasons for the anisotropy, including ion channeling, are discussed.
Bagulya, A V; Negodaev, M A; Rusetskii, A S; Chubenko, A P; Ralchenko, V G; Bolshakov, A P
A. V. Bagulya; O. D. Dalkarov; M. A. Negodaev; A. S. Rusetskii; A. P. Chubenko; V. G. Ralchenko; A. P. Bolshakov
Spent Nuclear Fuel (SNF) Project Cold Vacuum Drying (CVD) Facility Operations Manual
This document provides the Operations Manual for the Cold Vacuum Drying Facility (CVDF). The Manual was developed in conjunction with HNF-SD-SNF-SAR-002, Safety Analysis Report for the Cold Vacuum Drying Facility, Phase 2, Supporting Installation of the Processing Systems (Garvin 1998) and, the HNF-SD-SNF-DRD-002, 1997, Cold Vacuum Drying Facility Design Requirements, Rev. 3a. The Operations Manual contains general descriptions of all the process, safety and facility systems in the CVDF, a general CVD operations sequence, and has been developed for the spent nuclear fuel project (SNFP) Operations Organization and shall be updated, expanded, and revised in accordance with future design, construction and startup phases of the CVDF until the CVDF final ORR is approved.
Spent Nuclear Fuel (SNF) Cold Vacuum Drying (CVD) Facility Operations Manual
This document provides the Operations Manual for the Cold Vacuum Drying Facility (CVDF). The Manual was developed in conjunction with HNF-553, Spent Nuclear Fuel Project Final Safety Analysis Report Annex B--Cold Vacuum Drying Facility. The HNF-SD-SNF-DRD-002, 1999, Cold Vacuum Drying Facility Design Requirements, Rev. 4, and the CVDF Final Design Report. The Operations Manual contains general descriptions of all the process, safety and facility systems in the CVDF, a general CVD operations sequence and references to the CVDF System Design Descriptions (SDDs). This manual has been developed for the SNFP Operations Organization and shall be updated, expanded, and revised in accordance with future design, construction and startup phases of the CVDF until the CVDF final ORR is approved.
Observation of photoluminescence from Al1 xInxN heteroepitaxial films grown by metalorganic vapor phase epitaxy
Observation of photoluminescence from Al1 xInxN heteroepitaxial films grown by metalorganic vapor have observed photoluminescence of Al1 xInxN films. The films were grown on GaN by atmospheric pressure-temperature deposited AlN buffer layer. Photoluminescence, absorption, and x-ray diffraction measurements have shown
Wetzel, Christian M.
Quantitative organic vapor-particle sampler
A quantitative organic vapor-particle sampler for sampling semi-volatile organic gases and particulate components. A semi-volatile organic reversible gas sorbent macroreticular resin agglomerates of randomly packed microspheres with the continuous porous structure of particles ranging in size between 0.05-10 .mu.m for use in an integrated diffusion vapor-particle sampler.
Gundel, Lara (Berkeley, CA); Daisey, Joan M. (Walnut Creek, CA); Stevens, Robert K. (Cary, NC)
Thermophilic Biotrickling Filtration of Ethanol Vapors
Thermophilic Biotrickling Filtration of Ethanol Vapors H U U B H . J . C O X , T H O M A S S E X of ethanol vapors in biotrickling filters for air pollution control was investigated. Two reactors were adaptation phase, the removal of ethanol was similar in both reactors. At a bed contact time of 57 s
LNG fire and vapor control system technologies
This report provides a review of fire and vapor control practices used in the liquefied natural gas (LNG) industry. Specific objectives of this effort were to summarize the state-of-the-art of LNG fire and vapor control; define representative LNG facilities and their associated fire and vapor control systems; and develop an approach for a quantitative effectiveness evaluation of LNG fire and vapor control systems. In this report a brief summary of LNG physical properties is given. This is followed by a discussion of basic fire and vapor control design philosophy and detailed reviews of fire and vapor control practices. The operating characteristics and typical applications and application limitations of leak detectors, fire detectors, dikes, coatings, closed circuit television, communication systems, dry chemicals, water, high expansion foam, carbon dioxide and halogenated hydrocarbons are described. Summary descriptions of a representative LNG peakshaving facility and import terminal are included in this report together with typical fire and vapor control systems and their locations in these types of facilities. This state-of-the-art review identifies large differences in the application of fire and vapor control systems throughout the LNG industry.
Konzek, G.J.; Yasutake, K.M.; Franklin, A.L.
Development of chemical vapor composites, CVC materials. Final report
Industry has a critical need for high-temperature operable ceramic composites that are strong, non-brittle, light weight, and corrosion resistant. Improvements in energy efficiency, reduced emissions and increased productivity can be achieved in many industrial processes with ceramic composites if the reaction temperature and pressure are increased. Ceramic composites offer the potential to meet these material requirements in a variety of industrial applications. However, their use is often restricted by high cost. The Chemical Vapor composite, CVC, process can reduce the high costs and multiple fabrication steps presently required for ceramic fabrication. CVC deposition has the potential to eliminate many difficult processing problems and greatly increase fabrication rates for composites. With CVC, the manufacturing process can control the composites` density, microstructure and composition during growth. The CVC process: can grow or deposit material 100 times faster than conventional techniques; does not require an expensive woven preform to infiltrate; can use high modulus fibers that cannot be woven into a preform; can deposit composites to tolerances of less than 0.025 mm on one surface without further machining.
Chemical vapor emissions from underground hazardous waste storage tanks on the Hanford site in eastern Washington State are a potential concern because workers enter the tank farms on a regular basis for waste retrievals, equipment maintenance, and surveillance. Tank farm contractors are in the process of retrieving all remaining waste from aging single-shell tanks, some of which date to World War II, and transferring it to newer double-shell tanks. During the waste retrieval process, tank farm workers are potentially exposed to fugitive chemical vapors that can escape from tank headspaces and other emission points. The tanks are known to hold more than 1,500 different species of chemicals, in addition to radionuclides. Exposure assessments have fully characterized the hazards from chemical vapors in half of the tank farms. Extensive sampling and analysis has been done to characterize the chemical properties of hazardous waste and to evaluate potential health hazards of vapors at the ground surface, where workers perform maintenance and waste transfer activities. Worker concerns. risk communication, and exposure assessment are discussed, including evaluation of the potential hazards of complex mixtures of chemical vapors. Concentrations of vapors above occupational exposure limits-(OEL) were detected only at exhaust stacks and passive breather filter outlets. Beyond five feet from the sources, vapors disperse rapidly. No vapors have been measured above 50% of their OELs more than five feet from the source. Vapor controls are focused on limited hazard zones around sources. Further evaluations of vapors include analysis of routes of exposure and thorough analysis of nuisance odors.
Quantitative Infrared Intensity Studies of Vapor-PhaseGlyoxal...
Infrared Intensity Studies of Vapor-Phase Glyoxal,Methylglyoxal, and 2,3-Butanedione (Diacetyl) with Quantitative Infrared Intensity Studies of Vapor-Phase Glyoxal,Methylglyoxal,...
Absolute integrated intensities of vapor-phase hydrogen peroxide...
Absolute integrated intensities of vapor-phase hydrogen peroxide (H202) in the mid-infrared at atmospheric pressure. Absolute integrated intensities of vapor-phase hydrogen...
Vapor Pressure measurements for dichlorosilane
with applications requiring precise control of the placement and thickness of layers of pure silicon. Chlorosilanes are a group of silanes that contain chlorine. Some of the more common chlorosilanes are dichlorosilane (SiH, Cl, ), uichlorosilane (SiHC1... applications is manufactured by reaction of silanes or chlorosilanes to deposit pure silicon. The stringent purity requirements of the semiconductor industry require extremely high purity levels in the manufactured silicon and, as a prerequisite...
Morris, Tony Knimbula
Oxygen-assisted room-temperature deposition of CoPt3 films with perpendicular magnetic anisotropy
Oxygen-assisted room-temperature deposition of CoPt3 films with perpendicular magnetic anisotropy B Jolla, California 92093 Received 23 July 2002; accepted 30 September 2002 Trace amounts of oxygen CoPt3 grown by vapor deposition at or slightly above room temperature. Oxygen is known to act
Hellman, Frances
Low-temperature CVD of iron, cobalt, and nickel nitride thin films from bis[di(tert-butyl)amido]metal(II) precursors and ammonia
Thin films of late transition metal nitrides (where the metal is iron, cobalt, or nickel) are grown by low-pressure metalorganic chemical vapor deposition from bis[di(tert-butyl)amido]metal(II) precursors and ammonia. These metal nitrides are known to have useful mechanical and magnetic properties, but there are few thin film growth techniques to produce them based on a single precursor family. The authors report the deposition of metal nitride thin films below 300?�C from three recently synthesized M[N(t-Bu){sub 2}]{sub 2} precursors, where M?=?Fe, Co, and Ni, with growth onset as low as room temperature. Metal-rich phases are obtained with constant nitrogen content from growth onset to 200?�C over a range of feedstock partial pressures. Carbon contamination in the films is minimal for iron and cobalt nitride, but similar to the nitrogen concentration for nickel nitride. X-ray photoelectron spectroscopy indicates that the incorporated nitrogen is present as metal nitride, even for films grown at the reaction onset temperature. Deposition rates of up to 18?nm/min are observed. The film morphologies, growth rates, and compositions are consistent with a gas-phase transamination reaction that produces precursor species with high sticking coefficients and low surface mobilities.
Cloud, Andrew N.; Abelson, John R., E-mail: email@example.com [Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, 201 Materials Science and Engineering Building, 1304 W. Green St., Urbana, Illinois 61801 (United States); Davis, Luke M.; Girolami, Gregory S., E-mail: email@example.com [School of Chemical Sciences, University of Illinois at Urbana-Champaign, 600 S. Mathews Ave., Urbana, Illinois 61801 (United States)
Cold Vacuum Drying (CVD) Facility General Service Helium System Design Description
The purpose of this System Design Description (SDD) is to describe the characteristics of the Cold Vacuum Drying (CVD) Facility general service helium system. The general service helium system is a general service facility process support system, but does include safety-class structures, systems and components (SSCs) providing protection to the offsite public. The general service helium system also performs safety-significant functions that provide protection to onsite workers. The general helium system essential function is to provide helium (He) to support process functions during all phases of facility operations. General service helium is used to purge the cask and the MCO in order to maintain their internal atmospheres below hydrogen flammability concentrations. The general service helium system also supplies helium to purge the process water conditioning (PWC) lines and components and the vacuum purge system (VPS) vacuum pump. The general service helium system, if available following an Safety Class Instrument and Control System (SCIC) Isolation and Purge (IS0 and PURGE) Trip, can provide an alternate general service helium system source to supply the Safety-Class Helium (SCHe) System.
Optical monitor for water vapor concentration
A system for measuring and monitoring water vapor concentration in a sample uses as a light source an argon discharge lamp, which inherently emits light with a spectral line that is close to a water vapor absorption line. In a preferred embodiment, the argon line is split by a magnetic field parallel to the direction of light propagation from the lamp into sets of components of downshifted and upshifted frequencies of approximately 1575 Gauss. The downshifted components are centered on a water vapor absorption line and are thus readily absorbed by water vapor in the sample; the upshifted components are moved away from that absorption line and are minimally absorbed. A polarization modulator alternately selects the upshifted components or downshifted components and passes the selected components to the sample. After transmission through the sample, the transmitted intensity of a component of the argon line varies as a result of absorption by the water vapor. The system then determines the concentration of water vapor in the sample based on differences in the transmitted intensity between the two sets of components. In alternative embodiments alternate selection of sets of components is achieved by selectively reversing the polarity of the magnetic field or by selectively supplying the magnetic field to the emitting plasma.
Kebabian, Paul (Acton, MA)
Structure and high-temperature stability of compositionally graded CVD mullite coatings
C (Carborundum, Niagara Falls, NY). The coatings were deposited using the AlCl3± SiCl4±CO2±H2 system in a hot
Basu, Soumendra N.
Etude cin\\'etique de CVD de pyrocarbone obtenu par pyrolyse de propane
High temeperature (900-1000\\degree C) low pressure (propane yields a pyrocarbon deposit, but also mainly hydrogen and hydrocarbons from methane to polyaromatics. 30 reaction products were exeperimentally quantified at different operating conditions. A detailed kinetic pyrolysis model (600 reactions) has been developed and validated based on the totality of experiments. This model includes a homogeneous model (describing the gas phase pyrolysis of propane) coupled with a heterogeneous model describing the pyrocarbon deposit.
Ziegler-Devin, Isabelle; Marquaire, Paul-Marie
JOURNAL DE PHYSIQUE IV C2-625 Colloque C2, suppl. au Journal de Physique 11, Vol. 1, septembre 1991
satisfactory deposition rates are responsible for many drawbacks such as: residual stresses, grain growth of vaporization in a cold wall CVD reactor. The deposits observed by SEM and characterized by EPMA are related resistance, titanium carbide has been used as wear protective coating for many years. Initially deposited
Paris-Sud XI, Université de
Particle deposition in ventilation ducts
and An Evaluation of Thermophoretic Deposition Rates C.1of estimated thermophoretic deposition velocities, v th+ ,of estimated thermophoretic deposition velocities, v th+ ,
Sippola, Mark R.
Vapor Pressures and Vaporization, Sublimation, and Fusion Enthalpies of Some Fatty Acids
Vapor Pressures and Vaporization, Sublimation, and Fusion Enthalpies of Some Fatty Acids Joe A. Wilson and James S. Chickos* Department of Chemistry and Biochemistry, University of MissouriSt. Louis, St. Louis, Missouri 63121, United States *S Supporting Information ABSTRACT: Sublimation enthalpies
Vapor Pressures and Vaporization Enthalpies of a Series of Dialkyl Phthalates by Correlation Gas Chromatography
Chromatography Chase Gobble and James Chickos* Department of Chemistry and Biochemistry University of Missouri-St. Louis, St. Louis Missouri 63121, United States Sergey P. Verevkin Department of Physical Chemistry: Experimental vapor pressures, vaporization, fusion and sublimation enthalpies of a number of dialkyl
Vapor scavenging by atmospheric aerosol particles
Particle growth due to vapor scavenging was studied using both experimental and computational techniques. Vapor scavenging by particles is an important physical process in the atmosphere because it can result in changes to particle properties (e.g., size, shape, composition, and activity) and, thus, influence atmospheric phenomena in which particles play a role, such as cloud formation and long range transport. The influence of organic vapor on the evolution of a particle mass size distribution was investigated using a modified version of MAEROS (a multicomponent aerosol dynamics code). The modeling study attempted to identify the sources of organic aerosol observed by Novakov and Penner (1993) in a field study in Puerto Rico. Experimentally, vapor scavenging and particle growth were investigated using two techniques. The influence of the presence of organic vapor on the particle`s hydroscopicity was investigated using an electrodynamic balance. The charge on a particle was investigated theoretically and experimentally. A prototype apparatus--the refractive index thermal diffusion chamber (RITDC)--was developed to study multiple particles in the same environment at the same time.
Andrews, E.
Vapor characterization of Tank 241-C-103
The Westinghouse Hanford Company Tank Vapor Issue Resolution Program has developed, in cooperation with Northwest Instrument Systems, Inc., Oak Ridge National Laboratory, Oregon Graduate Institute of Science and Technology, Pacific Northwest Laboratory, and Sandia National Laboratory, the equipment and expertise to characterize gases and vapors in the high-level radioactive waste storage tanks at the Hanford Site in south central Washington State. This capability has been demonstrated by the characterization of the tank 241-C-103 headspace. This tank headspace is the first, and for many reasons is expected to be the most problematic, that will be characterized (Osborne 1992). Results from the most recent and comprehensive sampling event, sample job 7B, are presented for the purpose of providing scientific bases for resolution of vapor issues associated with tank 241-C-103. This report is based on the work of Clauss et al. 1994, Jenkins et al. 1994, Ligotke et al. 1994, Mahon et al. 1994, and Rasmussen and Einfeld 1994. No attempt has been made in this report to evaluate the implications of the data presented, such as the potential impact of headspace gases and vapors to tank farm workers health. That and other issues will be addressed elsewhere. Key to the resolution of worker health issues is the quantitation of compounds of toxicological concern. The Toxicology Review Panel, a panel of Pacific Northwest Laboratory experts in various areas, of toxicology, has chosen 19 previously identified compounds as being of potential toxicological concern. During sample job 7B, the sampling and analytical methodology was validated for this preliminary list of compounds of toxicological concern. Validation was performed according to guidance provided by the Tank Vapor Conference Committee, a group of analytical chemists from academic institutions and national laboratories assembled and commissioned by the Tank Vapor Issue Resolution Program.
Huckaby, J.L. [Westinghouse Hanford Co., Richland, WA (United States); Story, M.S. [Northwest Instrument Systems, Inc. Richland, WA (United States)
Method and Apparatus for Concentrating Vapors for Analysis
An apparatus and method are disclosed for pre-concentrating gaseous vapors for analysis. The invention finds application in conjunction with, e.g., analytical instruments where low detection limits for gaseous vapors are desirable. Vapors sorbed and concentrated within the bed of the apparatus can be thermally desorbed achieving at least partial separation of vapor mixtures. The apparatus is suitable, e.g., for preconcentration and sample injection, and provides greater resolution of peaks for vapors within vapor mixtures, yielding detection levels that are 10-10,000 times better than for direct sampling and analysis systems. Features are particularly useful for continuous unattended monitoring applications.
Grate, Jay W. (West Richland, WA); Baldwin, David L. (Kennewick, WA); Anheier, Jr., Norman C. (Richland, WA)
Deposition of WNxCy thin films for diffusion barrier application using the dimethylhydrazido (2-
thickness to the barrier scheme as well as an additional processing step. Binary transition metal compounds 13 April 2009 Available online xxxx Keywords: Chemical vapor deposition Metallization Tungsten nitride carbide Diffusion barrier X-ray diffraction Auger electron spectroscopy Tungsten nitride carbide
Thermal electric vapor trap arrangement and method
A technique for trapping vapor within a section of a tube is disclosed herein. This technique utilizes a conventional, readily providable thermal electric device having a hot side and a cold side and means for powering the device to accomplish this. The cold side of this device is positioned sufficiently close to a predetermined section of the tube and is made sufficiently cold so that any condensable vapor passing through the predetermined tube section is condensed and trapped, preferably within the predetermined tube section itself. 4 figs.
Alger, T.
Research on thermophoretic and inertial aspects of ash particle deposition on heat exchanger surfaces in coal-fired equipment: Quarterly technical report, June 1, 1987-August 31, 1987
Our emphasis in the present program is on experimentally validating and developing rational, theoretical methods of predicting the role of inertia and ash particle thermophoresis in determining net deposition rates. We also wish to quantify how simultaneous vapor deposition (e.g., alkali sulfate) can influence the sticking and erosion associated with impacting particles. 6 refs., 2 figs.
ZnO/Cu(InGa)Se2 solar cells prepared by vapor phase Zn doping
A process for making a thin film ZnO/Cu(InGa)Se2 solar cell without depositing a buffer layer and by Zn doping from a vapor phase, comprising: depositing Cu(InGa)Se2 layer on a metal back contact deposited on a glass substrate; heating the Cu(InGa)Se2 layer on the metal back contact on the glass substrate to a temperature range between about 100.degree. C. to about 250.degree. C.; subjecting the heated layer of Cu(InGa)Se2 to an evaporant species from a Zn compound; and sputter depositing ZnO on the Zn compound evaporant species treated layer of Cu(InGa)Se2.
Ramanathan, Kannan; Hasoon, Falah S.; Asher, Sarah E.; Dolan, James; Keane, James C.
Vapor intrusion modeling : limitations, improvements, and value of information analyses
Vapor intrusion is the migration of volatile organic compounds (VOCs) from a subsurface source into the indoor air of an overlying building. Vapor intrusion models, including the Johnson and Ettinger (J&E) model, can be ...
Friscia, Jessica M. (Jessica Marie)
Moisture Durability of Vapor Permeable Insulating Sheathing (Fact Sheet)
In this project, Building America team Building Science Corporation researched some of the ramifications of using exterior, vapor permeable insulation on retrofit walls with vapor permeable cavity insulation. Retrofit strategies are a key factor in reducing exterior building stock consumption.
Not Available
Desalination Using Vapor-Compression Distillation
and MSF, this research investigates a high-efficiency mechanical vapor-compression distillation system that employs an improved water flow arrangement. The incoming salt concentration was 0.15% salt for brackish water and 3.5% salt for seawater, whereas...
Lubis, Mirna R.
Reductive Dehalogenation of Trichloroethene Vapors in an
to treat trichloroethene (TCE) from waste gases generated by soil vapor extraction or dual-phase extraction through the recirculating liquid as a source of hydrogen, the electron donor for Dehalococcoides strains (DPE) (4). However, these techniques result in a waste gas stream that needs further treatment. Several
Advancing Explosives Detection Capabilities: Vapor Detection
ScienceCinema (OSTI)
A new, PNNL-developed method provides direct, real-time detection of trace amounts of explosives such as RDX, PETN and C-4. The method selectively ionizes a sample before passing the sample through a mass spectrometer to detect explosive vapors. The method could be used at airports to improve aviation security.
Atkinson, David
Vaporization of synthetic fuels. Final report. [Thesis
The problem of transient droplet vaporization in a hot convective environment is examined. The main objective of the present study is to develop an algorithm for the droplet vaporization which is simple enough to be feasibly incorporated into a complete spray combustion analysis and yet will also account for the important physics such as liquid-phase internal circulation, unsteady droplet heating and axisymmetric gas-phase convection. A simplified liquid-phase model has been obtained based on the assumption of the existence of a Hill's spherical vortex inside the droplet together with some approximations made in the governing diffusion equation. The use of the simplified model in a spray situation has also been examined. It has been found that droplet heating and vaporization are essentially unsteady and droplet temperature is nonuniform for a significant portion of its lifetime. It has also been found that the droplet vaporization characteristic can be quite sensitive to the particular liquid-phase and gas-phase models. The results of the various models are compared with the existing experimental data. Due to large scattering in the experimental measurements, particularly the droplet diameter, no definite conclusion can be drawn based on the experimental data. Finally, certain research problems which are related to the present study are suggested for future studies.
Sirignano, W.A.; Yao, S.C.; Tong, A.Y.; Talley, D.
Instrument Series: Deposition and Microfabrication Sputter Deposition
Sensors thin film growth of functional material systems for developing highly sensitive and portable chemical and biological sensors Energy sources development of thin film materials systems for research and solid oxide fuel cells and solar cells for energy generation Microfabrication deposition
Radionuclide deposition control
The deposition of radionuclides manganese-54, cobalt-58 and cobalt-60 from liquid sodium coolant is controlled by providing surfaces of nickel or high nickel alloys to extract the radionuclides from the liquid sodium, and by providing surfaces of tungsten, molybdenum or tantalum to prevent or retard radionuclide deposition.
Brehm, William F. (Richland, WA); McGuire, Joseph C. (Richland, WA)
Industrial Heat Pumps Using Solid/Vapor Working Fluids
INDUSTRIAL HEAT PUMPS USING SOLID/VAPOR WORKING FLUIDS Uwe Rockenfeller, Desert Research Institute, Boulder City, Nevada ABSTRACT Industrial heat pumps have the potential to reduce the operating costs of chemical and heat treating processes... with vapor re-compression recovery systems. The state-of-the-art heat pump equipment employing liquid/vapor working fluids fulfills the requirements only in some applications. The employment of solid/vapor complex compounds leads to 'nore cost effective...
Rockenfeller, U.
Solution deposition assembly
Methods and devices are provided for improved deposition systems. In one embodiment of the present invention, a deposition system is provided for use with a solution and a substrate. The system comprises of a solution deposition apparatus; at least one heating chamber, at least one assembly for holding a solution over the substrate; and a substrate curling apparatus for curling at least one edge of the substrate to define a zone capable of containing a volume of the solution over the substrate. In another embodiment of the present invention, a deposition system for use with a substrate, the system comprising a solution deposition apparatus; at heating chamber; and at least assembly for holding solution over the substrate to allow for a depth of at least about 0.5 microns to 10 mm.
Roussillon, Yann; Scholz, Jeremy H; Shelton, Addison; Green, Geoff T; Utthachoo, Piyaphant
Biomimetic thin film deposition
Biological mineral deposition for the formation of bone, mollusk shell and other hard tissues provides materials scientists with illustrative materials processing strategies. This presentation will review the key features of biomineralization and how these features can be of technical importance. We have adapted existing knowledge of biomineralization to develop a unique method of depositing inorganic thin films and coating. Our approach to thin film deposition is to modify substrate surfaces to imitate the proteins found in nature that are responsible for controlling mineral deposition. These biomimetic surfaces control the nucleation and growth of the mineral from a supersaturated aqueous solution. This has many processing advantages including simple processing equipment, environmentally benign reagents, uniform coating of highly complex shapes, and enhanced adherence of coating. Many different types of metal oxide, hydroxide, sulfide and phosphate materials with useful mechanical, optical, electronic and biomedical properties can be deposited.
Rieke, P.R.; Graff, G.E.; Campbell, A.A.; Bunker, B.C.; Baskaran, S.; Song, L.; Tarasevich, B.J.; Fryxell, G.E.
Modeling engine oil vaporization and transport of the oil vapor in the piston ring pack on internal combustion engines
A model was developed to study engine oil vaporization and oil vapor transport in the piston ring pack of internal combustion engines. With the assumption that the multi-grade oil can be modeled as a compound of several ...
Cho, Yeunwoo, 1973-
Water, Vapor, and Salt Dynamics in a Hot Repository
The purpose of this paper is to report the results of a new model study examining the high temperature nuclear waste disposal concept at Yucca Mountain using MULTIFLUX, an integrated in-drift- and mountain-scale thermal-hydrologic model. The results show that a large amount of vapor flow into the drift is expected during the period of above-boiling temperatures. This phenomenon makes the emplacement drift a water/moisture attractor during the above-boiling temperature operation. The evaporation of the percolation water into the drift gives rise to salt accumulation in the rock wall, especially in the crown of the drift for about 1500 years in the example. The deposited salts over the drift footprint, almost entirely present in the fractures, may enter the drift either by rock fall or by water drippage. During the high temperature operation mode, the barometric pressure variation creates fluctuating relative humidity in the emplacement drift with a time period of approximately 10 days. Potentially wet and dry conditions and condensation on salt-laden drift wall sections may adversely affect the storage environment. Salt accumulations during the above-boiling temperature operation must be sufficiently addressed to fully understand the waste package environment during the thermal period. Until the questions are resolved, a below-boiling repository design is favored where the Alloy-22 will be less susceptible to localized corrosion. (authors)
Bahrami, Davood; Danko, George [Department of Mining Engineering, University of Nevada, Reno, 1664 N. Virginia St., Reno, NV, 89557 (United States); Walton, John [Department of Civil Engineering, University of Texas at El Paso, 500 W. University, El Paso, TX, 79968 (United States)
Ash deposit workshop: Class outline
Ash deposits formed from the combustion of coal and other fuels have plagued the steam production industry from the start. The ash fusion test has been around for over eighty years. As steam plant size increased, so have the problems associated with ash deposits. This workshop is designed to cover: (1) The basic types of deposits. (2) Causes of deposits. (3) Analytical procedures for resolving, or at least providing information about deposits and fuels, and (4) Deposit removal and reduction techniques.
Hatt, R. [Commercial Testing & Engineering Co., Lexington, KY (United States)
DuPont Chemical Vapor Technical Report
DuPont Safety Resources was tasked with reviewing the current chemical vapor control practices and providing preventive recommendations on best commercial techniques to control worker exposures. The increased focus of the tank closure project to meet the 2024 Tri-Party Agreement (TPA) milestones has surfaced concerns among some CH2MHill employees and other interested parties. CH2MHill is committed to providing a safe working environment for employees and desires to safely manage the tank farm operations using appropriate control measures. To address worker concerns, CH2MHill has chartered a ''Chemical Vapors Project'' to integrate the activities of multiple CH2MHill project teams, and solicit the expertise of external resources, including an independent Industrial Hygiene expert panel, a communications consultant, and DuPont Safety Resources. Over a three-month time period, DuPont worked with CH2MHill ESH&Q, Industrial Hygiene, Engineering, and the independent expert panel to perform the assessment. The process included overview presentations, formal interviews, informal discussions, documentation review, and literature review. DuPont Safety Resources concluded that it is highly unlikely that workers in the tank farms are exposed to chemicals above established standards. Additionally, the conventional and radiological chemistry is understood, the inherent chemical hazards are known, and the risk associated with chemical vapor exposure is properly managed. The assessment highlighted management's commitment to addressing chemical vapor hazards and controlling the associated risks. Additionally, we found the Industrial Hygiene staff to be technically competent and well motivated. The tank characterization data resides in a comprehensive database containing the tank chemical compositions and relevant airborne concentrations.
Copper vapor laser modular packaging assembly
A modularized packaging arrangement for one or more copper vapor lasers and associated equipment is disclosed herein. This arrangement includes a single housing which contains the laser or lasers and all their associated equipment except power, water and neon, and means for bringing power, water, and neon which are necessary to the operation of the lasers into the container for use by the laser or lasers and their associated equipment.
Alger, Terry W. (Tracy, CA); Ault, Earl R. (Dublin, CA); Moses, Edward I. (Castro Valley, CA)
Modeling of LNG Pool Spreading and Vaporization
..................................................................................... 15 Figure 5: 90 mol% Methane 10mol% Ethane mixture VLE phase envelope .................. 18 Figure 6: Boiling temperature and vapor composition of 90 mol% methane 10mol% ethane mixture... process of natural gas allows a 600 fold reduction in the volume of the gas being transported at ambient pressure. The resulting liquid which is mainly composed of methane presents some hazardous properties linked to its flammable nature and its...
Basha, Omar 1988-
Vapor-phase heat-transport system
A vapor-phase heat-transport system is being tested in one of the passive test cells at Los Alamos. The system consists of one selective-surface collector and a condenser inside a water storage tank. The refrigerant, R-11, can be returned to the collector by gravity or with a pump. Results from several operating configurations are presented, together with a comparison with other passive systems. A new self-pumping concept is presented.
Hedstrom, J.C.
Oxide vapor distribution from a high-frequency sweep e-beam system
Oxide vapor distributions have been determined as a function of operating parameters of a high frequency sweep e-beam source combined with a programmable sweep controller. We will show which parameters are significant, the parameters that yield the broadest oxide deposition distribution, and the procedure used to arrive at these conclusions. A design-of-experimental strategy was used with five operating parameters: evaporation rate, sweep speed, sweep pattern (pre-programmed), phase speed (azimuthal rotation of the pattern), profile (dwell time as a function of radial position). A design was chosen that would show which of the parameters and parameter pairs have a statistically significant effect on the vapor distribution. Witness flats were placed symmetrically across a 25 inches diameter platen. The stationary platen was centered 24 inches above the e-gun crucible. An oxide material was evaporated under 27 different conditions. Thickness measurements were made with a stylus profilometer. The information will enable users of the high frequency e-gun systems to optimally locate the source in a vacuum system and understand which parameters have a major effect on the vapor distribution.
Chow, R.; Tassano, P.L.; Tsujimoto, N.
Combined rankine and vapor compression cycles
An organic rankine cycle system is combined with a vapor compression cycle system with the turbine generator of the organic rankine cycle generating the power necessary to operate the motor of the refrigerant compressor. The vapor compression cycle is applied with its evaporator cooling the inlet air into a gas turbine, and the organic rankine cycle is applied to receive heat from a gas turbine exhaust to heat its boiler within one embodiment, a common condenser is used for the organic rankine cycle and the vapor compression cycle, with a common refrigerant, R-245a being circulated within both systems. In another embodiment, the turbine driven generator has a common shaft connected to the compressor to thereby eliminate the need for a separate motor to drive the compressor. In another embodiment, an organic rankine cycle system is applied to an internal combustion engine to cool the fluids thereof, and the turbo charged air is cooled first by the organic rankine cycle system and then by an air conditioner prior to passing into the intake of the engine.
Radcliff, Thomas D.; Biederman, Bruce P.; Brasz, Joost J.
A Design Study for Thermal Control of a CVD Reactor for YBCO Martha A. Gallivan, David G. Goodwin, and Richard M. Murray
A Design Study for Thermal Control of a CVD Reactor for YBCO Martha A. Gallivan, David G. Goodwin, CA 91125 Email: firstname.lastname@example.com Abstract Active thermal control of a reactor for YBa2Cu3O7-x, and linear feedback control methods are used to assess the reactor's thermal re- sponse. Performance
Gallivan, Martha A.
CVD Growth of Mono-and Bi-Layer Graphene from Ethanol Xiao Chen, Pei Zhao, Bo Hou, Shohei Chiashi and Shigeo Maruyama
CVD Growth of Mono- and Bi-Layer Graphene from Ethanol Xiao Chen, Pei Zhao, Bo Hou, Shohei Chiashi substrates has been provn effective in the synthesis of graphene. But before application in graphene electronics, the quality of the synthesized graphene needs to be improved. Therefore a reliable method to grow
Deposition of thin silicon layers on transferred large area graphene
Physical vapor deposition of Si onto transferred graphene is investigated. At elevated temperatures, Si nucleates preferably on wrinkles and multilayer graphene islands. In some cases, however, Si can be quasi-selectively grown only on the monolayer graphene regions while the multilayer islands remain uncovered. Experimental insights and ab initio calculations show that variations in the removal efficiency of carbon residuals after the transfer process can be responsible for this behavior. Low-temperature Si seed layer results in improved wetting and enables homogeneous growth. This is an important step towards realization of electronic devices in which graphene is embedded between two Si layers.
Lupina, Grzegorz, E-mail: email@example.com; Kitzmann, Julia; Lukosius, Mindaugas; Dabrowski, Jarek; Wolff, Andre; Mehr, Wolfgang [IHP, Im Technologiepark 25, 15236 Frankfurt (Oder) (Germany)] [IHP, Im Technologiepark 25, 15236 Frankfurt (Oder) (Germany)
Oxidative chemical vapor deposition of semiconducting polymers and their use In organic photovoltaics
Organic photovoltaics (OPVs) have received significant interest for their potential low cost, high mechanical flexibility, and unique functionalities. OPVs employing semiconducting polymers in the photoactive layer have ...
Borrelli, David Christopher
Desktop systems for manufacturing carbon nanotube films by chemical vapor deposition
Carbon nanotubes (CNTs) exhibit exceptional electrical, thermal, and mechanical properties that could potentially transform such diverse fields as composites, electronics, cooling, energy storage, and biological sensing. ...
Kuhn, David S. (David Scott)
Chemical vapor deposition of conjugated polymeric thin films for photonic and electronic applications
(cont.) Conjugated polymers have delocalized electrons along the backbone, facilitating electrical conductivity. As thin films, they are integral to organic semiconductor devices emerging in the marketplace, such as flexible ...
Lock, John P
Evaluating the In Vitro Corrosion Behavior and Cytotoxicity of Vapor Deposited Magnesium Alloys.
??Magnesium alloys are emerging as a promising class of bioabsorbable implant materials due to magnesium�s biocompatibility and propensity for corrosion. These alloys are useful for� (more)
Petrilli, John
Low Temperature Direct Growth of Graphene Films on Transparent Substrates by Chemical Vapor Deposition
graphene in fields like electronics and optoelectronics.useful for electronics, optoelectronics and photovoltaic
Antoine, Geoffrey Sandosh Jeffy
Metalorganic Chemical Vapor Deposition Route to GaN Nanowires with Triangular
-free environment at atmospheric pressure. TMG was kept cool in a -10 �C temperature bath. Nitrogen, used a total nitrogen flow rate of 250 sccm. These were supplied via a 4-mm i.d. quartz tube. Hydrogen and ammonia sources were supplied via a 22-mm i.d. outer quartz tube at a total flow rate of 155 sccm
Yang, Peidong
Oxidative and initiated chemical vapor deposition for application to organic electronics
Since the first discovery of polymeric conductors in 1977, the research area of "organic electronics" has grown dramatically. However, methods for forming thin films comprised solely of conductive polymers are limited by ...
Im, Sung Gap
A kinetic model of diamond nucleation and silicon carbide interlayer formation during chemical vapor deposition
A kinetic model of diamond nucleation and silicon carbide interlayer formation during chemical February 2005 Available online 7 April 2005 Abstract The presence of thin silicon carbide intermediate of carbon atoms into the silicon carbide layer and the morphology and orientation of the diamond film
The Vapor Deposition and Oxidation of Platinum-and Yttria-Stabilized Zirconia Multilayers
rates by disrupting thermal transport processes. Novel metalceramic multilayer's combining thin metal layers with low thermal conductivity oxide ceramics offer a potential approach for impeding both200-mm-thick low thermal conductivity ceramic outer layer (the top coat), a 1020-mm-thick, aluminum
A conformal nano-adhesive via initiated chemical vapor deposition for microfluidic devices
(ethylene terephthalate) (PET), polycarbonate (PC), and poly(tetrafluoro ethylene) (PTFE). Introduction Microfluidic consumption of reagents and analytes, low cost of manufacture, low consumption of power, high throughput
Doyle, Patrick S.
Chemical Vapor Deposition Based Synthesis of Carbon Nanotubes and Nanofibers Using a Template Method
of battery electrodes.5,10 These microtubular TiS2 electrodes show higher capacities, lower resistance,19 including electrochemistry.20 The use of metal catalysts such as Ni, Fe, Fe-Cu, and Pt has been, and lower susceptibility to slow electron- transfer kinetics than thin film TiS2 electrodes. In the present
Polymers via chemical vapor deposition and their application to organic photovoltaics
There is emerging interest in the ability to fabricate organic photovoltaics (OPVs) on flexible, lightweight substrates, which could lower the cost of installation and enable new form factors for deployment. However, ...
Barr, Miles Clark
Control of carbon nanotube growth directions and morphology by direct current plasma enhanced chemical vapor deposition
Pierard, A. Fonseca, Z. Konya, I. Willems, G. Van Tendeloo,D. Mehn, G. Galbaes, Z. Konya, I. Kiricsi, Catal. Today 76,
AuBuchon, Joseph Francis
A quartz reactor vessel for growth of uniform semiconductor films includes a vertical, cylindrical reaction chamber in which a substrate-supporting pedestal provides a horizontal substrate-supporting surface spaced on its perimeter from the chamber wall. A cylindrical confinement chamber of smaller diameter is disposed coaxially above the reaction chamber and receives reaction gas injected at a tangent to the inside chamber wall, forming a helical gas stream that descends into the reaction chamber. In the reaction chamber, the edge of the substrate-supporting pedestal is a separation point for the helical flow, diverting part of the flow over the horizontal surface of the substrate in an inwardly spiraling vortex.
Wanlass, Mark (Golden, CO)
Lithium manganese oxide films fabricated by electron beam directed vapor deposition
material for high energy den- sity battery applications.7,8 Lithiumtransition metal oxide films can.2. After annealing in air at 700 °C, thin films grown with a low jet speed had a cubic spinel structure Li/Li-ion batteries. © 2008 American Vacuum Society. DOI: 10.1116/1.2823488 I. INTRODUCTION Thin film
60 188.8.131.52 Unaligned Ceramic Matrix10 wt%. 126.96.36.199 Unaligned Ceramic Matrix Composites Ceramic-ceramic with approximate composition of 55% fluorophlogopite mica in a borosilicate glass matrix,
Epitaxial growth of aligned AlGalnN nanowires by metal-organic chemical vapor deposition
Highly ordered and aligned epitaxy of III-Nitride nanowires is demonstrated in this work. <1010> M-axis is identified as a preferential nanowire growth direction through a detailed study of GaN/AlN trunk/branch nanostructures by transmission electron microscopy. Crystallographic selectivity can be used to achieve spatial and orientational control of nanowire growth. Vertically aligned (Al)GaN nanowires are prepared on M-plane AlN substrates. Horizontally ordered nanowires, extending from the M-plane sidewalls of GaN hexagonal mesas or islands demonstrate new opportunities for self-aligned nanowire devices, interconnects, and networks.
Han, Jung (Woodbridge, CT); Su, Jie (New Haven, CT)
Selective Chemical Vapor Deposition of Manganese Self-Aligned Capping Layer for Cu Interconnections
could not be broken apart. This Mn-enhanced binding strength of Cu to insulators is observed for all and nitrides. An adhesive tape is usually sufficient to remove copper films from these surfaces. Quantitative reliability because cobalt on the dielectric can increase leakage and lower the breakdown voltage.4 Cobalt
Titanium Diboride Thin Films by Low-Temperature Chemical Vapor Deposition from the Single Source Precursor
metallic ceramic whose properties surpass those of transition metal nitride and carbide counterparts:1, and excellent corrosion resistance toward molten metals. In addition, it has a low electrical resistivity of 6 µ
Girolami, Gregory S.
Volatilities of Actinide and Lanthanide N,NDimethylaminodiboranate Chemical Vapor Deposition
,§ Gregory S. Girolami,*,§ Christopher J. Cramer, and Laura Gagliardi*, Department of Chemistry volatile forms during sublimation. INTRODUCTION Lanthanide-containing materials, such as lanthanide oxides
Porous GaN nanowires synthesized using thermal chemical vapor deposition
Seo a , Jeunghee Park a,*, Hyunik Yang b , Bongsoo Kim c a Department of Chemistry, Korea University-791, Republic of Korea c Department of Chemistry, Korea Advanced Institute of Science and Technology, Daejeon nanotube-confined reaction [4], arc discharge [5], laser ablation [6], sublimation [7], pyrolysis [8
Kim, Bongsoo
Microbridge testing of plasma-enhanced chemical-vapor deposited silicon oxide films on silicon wafers
that is typically encountered in applications involving microelectromechanical systems (MEMS.016212 PACS number(s): 05.45.-a, 85.85.+j, 62.25.-g, 47.52.+j I. INTRODUCTION Microelectromechanical systems
Graphene-on-Insulator Transistors Made Using C on Ni Chemical-Vapor Deposition
Graphene transistors are made by transferring a thin graphene film grown on Ni onto an insulating SiO[subscript 2] substrate. The properties and integration of these graphene-on-insulator transistors are presented and ...
Keast, Craig L.
Low Temperature Chemical Vapor Deposition of Zirconium Nitride in a Fluidized Bed
thick) on uranium-molybdenum (UMo) particulate fuel. Plate-type fuel with U-xMo (x = 3 to 10 wt.%) particle fuel dispersed in an aluminum matrix is under development at Idaho National Laboratory (INL) for the Reduced Enrichment for Research and Test...
Arrieta, Marie
In-situ formation of multiphase electron beam physical vapor deposited barrier coatings for turbine components
A turbine component (10), such as a turbine blade, is provided which is made of a metal alloy (22) and a base columnar thermal barrier coating (20) on the alloy surface, where a heat resistant ceramic oxide sheath material (32' or 34') covers the columns (28), and the sheath material is the reaction product of a precursor ceramic oxide sheath material and the base thermal barrier coating material.
Subramanian, Ramesh (Oviedo, FL)
Chemical vapor deposition and functionalization of fluorocarbon-organosilicon copolymer thin films
Neural prostheses are micron-scale integrated circuit devices that are under development for the treatment of brain and spinal cord injuries. A key challenge in the fabrication of these silicon- based devices is the ...
Murthy, Shashi Krishna, 1977-
Perfluorooctane Sulfonyl Fluoride as an Initiator in Hot-Filament Chemical Vapor Deposition of Fluorocarbon
of Fluorocarbon Thin Films Hilton G. Pryce Lewis, Jeffrey A. Caulfield, and Karen K. Gleason*, Department pathways available via HFCVD makes it possible to produce polymeric fluorocarbon films spectroscopically
Gleason, Karen K.
System and Method for Sealing a Vapor Deposition Source - Energy Innovation
AFDC Printable Version Share this resource Send a link to EERE: Alternative Fuels Data Center Home Page to someone by E-mail Share EERE: Alternative Fuels Data Center Home Page on Facebook Tweet about EERE: Alternative Fuels Data Center Home Page on Twitter Bookmark EERE:1 First Use of Energy for All Purposes (Fuel and Nonfuel),Feet) Year Jan Feb Mar Apr MayAtmosphericNuclear Security AdministrationcontrollerNanocrystallineForeign Object Damage 3Nationalmimic key
Metalorganic chemical vapor deposition of carbon-free ZnO using the
AFDC Printable Version Share this resource Send a link to EERE: Alternative Fuels Data Center Home Page to someone by E-mail Share EERE: Alternative Fuels Data Center Home Page on Facebook Tweet about EERE: Alternative Fuels Data Center Home Page on Twitter Bookmark EERE:1 First Use of Energy for All Purposes (Fuel and Nonfuel),Feet) Year Jan Feb Mar Apr MayAtmospheric Optical Depth7-1D: VegetationEquipment Surfaces andMapping theEnergy StorageAdvanced
NREL: Awards and Honors - High-Rate Vapor Transport Deposition for CdTe PV
AFDC Printable Version Share this resource Send a link to EERE: Alternative Fuels Data Center Home Page to someone by E-mail Share EERE: Alternative Fuels Data Center Home Page on Facebook Tweet about EERE: Alternative Fuels Data Center Home Page on Twitter Bookmark EERE:1 First Use of Energy for All Purposes (Fuel and Nonfuel),Feet) Year Jan Feb Mar Apr MayAtmosphericNuclear Security Administration the Contributions and Achievements of Women |hits 21Species.4Electroexploded
Parallel Reacting Flow Calculations for Chemical Vapor Deposition Reactor Design 1
, memory, and scalability of distributed memory parallel computers. An unstructured finite element transport from the fluid mechanics and heat transfer. Both works used solution procedures that require the reacting flow model and numerical method and summarize representative calculations using MPSalsa
Devine, Karen
Thermally induced dispersion mechanisms for aluminum-based plate-type fuels under rapid transient energy deposition
A thermally induced dispersion model was developed to analyze for dispersive potential and determine onset of fuel plate dispersion for Al-based research and test reactor fuels. Effect of rapid energy deposition in a fuel plate was simulated. Several data types for Al-based fuels tested in the Nuclear Safety Research Reactor in Japan and in the Transient Reactor Test in Idaho were reviewed. Analyses of experiments show that onset of fuel dispersion is linked to a sharp rise in predicted strain rate, which futher coincides with onset of Al vaporization. Analysis also shows that Al oxidation and exothermal chemical reaction between the fuel and Al can significantly affect the energy deposition characteristics, and therefore dispersion onset connected with Al vaporization, and affect onset of vaporization.
Georgevich, V.; Taleyarkham, R.P.; Navarro-Valenti, S.; Kim, S.H.
Method and apparatus for concentrating vapors for analysis
A pre-concentration device and a method are disclosed for concentrating gaseous vapors for analysis. Vapors sorbed and concentrated within the bed of the pre-concentration device are thermally desorbed, achieving at least partial separation of the vapor mixtures. The pre-concentration device is suitable, e.g., for pre-concentration and sample injection, and provides greater resolution of peaks for vapors within vapor mixtures, yielding detection levels that are 10-10,000 times better than direct sampling and analysis systems. Features are particularly useful for continuous unattended monitoring applications. The invention finds application in conjunction with, e.g., analytical instruments where low detection limits for gaseous vapors are desirable.
Vapor port and groundwater sampling well
A method and apparatus has been developed for combining groundwater monitoring wells with unsaturated-zone vapor sampling ports. The apparatus allows concurrent monitoring of both the unsaturated and the saturated zone from the same well at contaminated areas. The innovative well design allows for concurrent sampling of groundwater and volatile organic compounds (VOCs) in the vadose (unsaturated) zone from a single well, saving considerable time and money. The sample tubes are banded to the outer well casing during installation of the well casing.
Hubbell, Joel M. (Idaho Falls, ID); Wylie, Allan H. (Idaho Falls, ID)
Storing images in warm atomic vapor
Reversible and coherent storage of light in atomic medium is a key-stone of future quantum information applications. In this work, arbitrary two-dimensional images are slowed and stored in warm atomic vapor for up to 30 $\\mu$s, utilizing electromagnetically induced transparency. Both the intensity and the phase patterns of the optical field are maintained. The main limitation on the storage resolution and duration is found to be the diffusion of atoms. A techniqueanalogous to phase-shift lithography is employed to diminish the effect of diffusion on the visibility of the reconstructed image.
M. Shuker; O. Firstenberg; R. Pugatch; A. Ron; N. Davidson
A method and apparatus have been developed for combining groundwater monitoring wells with unsaturated-zone vapor sampling ports. The apparatus allows concurrent monitoring of both the unsaturated and the saturated zone from the same well at contaminated areas. The innovative well design allows for concurrent sampling of groundwater and volatile organic compounds (VOCs) in the vadose (unsaturated) zone from a single well, saving considerable time and money. The sample tubes are banded to the outer well casing during installation of the well casing. 10 figs.
Hubbell, J.M.; Wylie, A.H.
Mercury Vapor (Kooten, 1987) | Open Energy Information
Open Energy Info (EERE)
AFDC Printable Version Share this resource Send a link to EERE: Alternative Fuels Data Center Home Page to someone by E-mail Share EERE: Alternative Fuels Data Center Home Page on Facebook Tweet about EERE: Alternative Fuels Data Center Home Page on Twitter Bookmark EERE: Alternative Fuels Data Center Home Page on Google Bookmark EERE: Alternative Fuels Data CenterFranconia, Virginia: Energy Resources Jump to:46 - 429Lacey,(MonasterLowellisMcDonald isMelletteEnclosed andEnergySolar SystemsVapor
Review of enhanced vapor diffusion in porous media
Vapor diffusion in porous media in the presence of its own liquid has often been treated similar to gas diffusion. The gas diffusion rate in porous media is much lower than in free space due to the presence of the porous medium and any liquid present. However, enhanced vapor diffusion has also been postulated such that the diffusion rate may approach free-space values. Existing data and models for enhanced vapor diffusion, including those in TOUGH2, are reviewed in this paper.
Webb, S.W.; Ho, C.K.
Recovery of benzene in an organic vapor monitor
solid adsorbents available (silica gel, activated alumina, etc. ), activated charcoal is most frequently utilized. Activated charcoal has retentivity for sorbed vapors several times that of silica gel and it displays a selectivity for organic vapors... (diffusion rate) of the vapor molecules to the sur- face of the adsorbent. The adsorption process determine how effective the adsorbent collects and holds the contam- inant on the surface of the activated charcoal. Recovery of the contaminant from...
Krenek, Gregory Joel
Vaporizer design criteria for ethanol fueled internal combustion engines
. Stout (Member) L r x ge Edwa d A. Hiler (Head of Department) May 1985 ABSTRACT Vaporizer Design Criteria For Ethanol Fueled Internal Combustion Engines. (May 1985) Arachchi Rallage Ariyaratne, B. S. , University of Sri Lanka Chairman... VAPORIZATION LENGTH WITH UNIFORM HEAT FLUX 8 POLYNOMIAL FUNCTIONS FOR EVALUATING PARAMETERS C VARIATION OF HEAT FLUX AND AVERAGE SURFACE TEMPARATURE D PROGRAM FOR PREDICTING VAPORIZATION LENGTH 73 75 78 80 VITA 87 LIST OF TABLES TABLE Page 1...
Ariyaratne, Arachchi Rallage
Method for controlling corrosion in thermal vapor injection gases
An improvement in the method for producing high pressure thermal vapor streams from combustion gases for injection into subterranean oil producing formations to stimulate the production of viscous minerals is described. The improvement involves controlling corrosion in such thermal vapor gases by injecting water near the flame in the combustion zone and injecting ammonia into a vapor producing vessel to contact the combustion gases exiting the combustion chamber.
Sperry, John S. (Houston, TX); Krajicek, Richard W. (Houston, TX)
Mercury Vapor At Lassen Volcanic National Park Area (Varekamp...
Jump to: navigation, search GEOTHERMAL ENERGYGeothermal Home Exploration Activity: Mercury Vapor At Lassen Volcanic National Park Area (Varekamp & Buseck, 1983) Exploration...
The control of confined vapor phase explosions
The probability of, for example, a fire or explosion occurring during a process operation is related both to the fire-related properties of the materials used, such as flash point, flammable limits etc., i.e. the material or intrinsic factors, and the nature of the operation and the equipment used, i.e. the extrinsic factors. The risk, or frequency of occurrence, of other hazards such as reaction runaway, major toxic release etc. can be determined in a similar manner. For a vapor phase explosion (and a fire) the probability of the event is the product of the probability of generating a flammable atmosphere and the probability of ignition. Firstly, materials may be coded using properties that are relevant to the hazard in question. Secondly, different operations have different degrees of risk and these risks are assigned as Low, Medium, High etc. according to criteria outlined here. Combination of these two factors will then be a measure of the overall risk of the operation with the specified material and may be used to define operating standards. Currently, the hazard/risk of a vapor phase explosions is examined by this method but in due course dust explosions, fires, condensed phase explosions, reaction runaways, physical explosions, major toxic releases and incompatibility will be included.
Scilly, N.F. [Laporte plc, Widnes (United Kingdom); Owen, O.J.R. [Fine Organics, Ltd., Middlesborough (United Kingdom); Wilberforce, J.K. [Solvay SA, Brussels (Belgium)
Vapor and gas sampling of Single-Shell Tank 241-T-111 using the vapor sampling system
This document presents sampling data resulting from the January 20, 1995, sampling of SST 241-T-111 using the vapor sampling system.
Caprio, G.S.
Vapor and gas sampling of single-shell tank 241-BY-112 using the vapor sampling system
This document presents sampling data from the November 18, 1994, sampling of SST 241-BY-112 using the vapor sampling system.
Vapor and gas sampling of Single-Shell Tank 241-A-101 using the Vapor Sampling System
This document presents sampling data resulting from the June 8, 1995, sampling of SST 241-A-101 using the Vapor Sampling System.
Glass softening, crystallization, and vaporization of nano-aggregates of Amorphous Solid Water: Fast Scanning Calorimetry studies
Fast scanning calorimetry (FSC) was employed to investigate glass softening dynamics in amorphous solid water (ASW) nano-aggregates with thicknesses ranging from 2 to 20 nm. ASW nano-aggregates were prepared by vapor-deposition on the surface of a tungsten filament near 141 K and then heated at a rate of 100 kK/s. The resulting thermogram complex endo- and exothermal features were analyzed using a simple model. The results of the analysis show that glass softening of ASW nano-aggregates takes place at 160 K and vaporization of ASW nano-aggregates can take place at temperatures as low as 185 K. The results of these studies are discussed in conjunction with results of past studies of glass softening dynamics in water in various confining geometries.
Deepanjan Bhattacharya; Liam OReilly; Vlad Sadtchenko
RESONANT FARADAY ROTATION IN A HOT LITHIUM VAPOR By SCOTT RUSSELL WAITUKAITIS A Thesis Submitted: #12;Abstract I describe a study of Faraday rotation in a hot lithium vapor. I begin by dis- cussing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 2.3 The Lithium Oven and Solenoid . . . . . . . . . . . . . . . . . 7 3 Theoretical Framework
Cronin, Alex D.
Isotopic composition of stratospheric water vapor: Measurements and photochemistry
of magnitude between the surface and the tropopause, and isotopically heavy water is pref- erentially removedIsotopic composition of stratospheric water vapor: Measurements and photochemistry David G. Johnson composition of stratospheric water vapor that result from methane oxidation and reactions with O( ¢¡ ). We
Chemical vapor detection with a multispectral thermal imager
Chemical vapor detection with a multispectral thermal imager Mark 1. G. Aithouse, MEMBER SPIE U.S. Army Chemical Research Development and Engineering Center SMCCR-DDT Aberdeen Proving Ground, Maryland algorithm 7. Conclusions 8. Acknowledgments 9. References 1. INTRODUCTION Detection of chemical vapor clouds
Chang, Chein-I
Informal Report . VAPOR DETECTION OF TRAFFICKING OF CONTRABAND MONEY-
I BNL- 62834 Informal Report . VAPOR DETECTION OF TRAFFICKING OF CONTRABAND MONEY-· [D VAPOR DETECTION OF TRAFFICKING OF CONTRABAND MONEY- A DISCUSSION OF TECHNICAL FEASIBILITY Concept MONEY --A DISCUSSION OF TECHNICAL FEASffiILITY Russell N. Dietz, Head Tracer Technology Center
Temperature dependent vapor pressures of chlorinated catechols, syringols, and syringaldehydes
The vapor pressures of nine chlorinated catechols, syringols, and syringaldehydes were determined as a function of temperature with a gas chromatographic retention time technique. The vapor pressures at 298.15 K were in the range of 0.02--1 Pa, and the enthalpies of vaporization, between 68 and 82 kJ/mol. The validity of the technique was established by a calibration involving four chlorinated phenols with well-known vapor pressures. Using these data and previously reported solubility data, Henry`s law constants for these substances and some chlorinated guaiacols and veratrols were estimated. The vapor pressure of these substances tends to decrease with increasing polarity and an increasing number of chlorine atoms. Henry`s law constants decrease sharply with increasing polarity, suggesting that methylation can result in a significant increase in a chemical`s potential for volatilization from water.
Lei, Y.D.; Shiu, W.Y.; Boocock, D.G.B. [Univ. of Toronto, Ontario (Canada). Dept. of Chemical Engineering and Applied Chemistry] [Univ. of Toronto, Ontario (Canada). Dept. of Chemical Engineering and Applied Chemistry; Wania, F. [WECC Wania Environmental Chemists Corp., Toronto, Ontario (Canada)] [WECC Wania Environmental Chemists Corp., Toronto, Ontario (Canada)
Analysis of electron-beam vaporization of refractory metals
An electron beam is focussed onto a small area on the surface of a refractory metal to locally raise the temperature and vaporize metal. At high vaporization rates the hot area is on the surface of a churning liquid-metal pool contained in a solid-metal skull which sits in a cooled crucible. Inner workings of the process are revealed by analysis of momentum, energy, and mass transfer. At the surface high temperature causes high vaporization rate and high vapor thrust, depressing the vapor/liquid surface. In the liquid pool surface-tension gradients and thermal buoyancy drive a (typically) chaotic flow. In the solid skull thermal conductivity and contact resistance regulate the rate of heat transfer from pool to crucible. Analyses of these phenomena together reveal process performance sensitivities - e.g., to depression size or to magnitude of surface-tension gradients. 12 refs., 3 figs.
Kheshgi, H.S.; Gresho, P.M.
Monitoring of vapor phase polycyclic aromatic hydrocarbons
An apparatus for monitoring vapor phase polycyclic aromatic hydrocarbons in a high-temperature environment has an excitation source producing electromagnetic radiation, an optical path having an optical probe optically communicating the electromagnetic radiation received at a proximal end to a distal end, a spectrometer or polychromator, a detector, and a positioner coupled to the first optical path. The positioner can slidably move the distal end of the optical probe to maintain the distal end position with respect to an area of a material undergoing combustion. The emitted wavelength can be directed to a detector in a single optical probe 180.degree. backscattered configuration, in a dual optical probe 180.degree. backscattered configuration or in a dual optical probe 90.degree. side scattered configuration. The apparatus can be used to monitor an emitted wavelength of energy from a polycyclic aromatic hydrocarbon as it fluoresces in a high temperature environment.
Vo-Dinh, Tuan; Hajaligol, Mohammad R.
Kinetics of wet sodium vapor complex plasma
In this paper, we have investigated the kinetics of wet (partially condensed) Sodium vapor, which comprises of electrons, ions, neutral atoms, and Sodium droplets (i) in thermal equilibrium and (ii) when irradiated by light. The formulation includes the balance of charge over the droplets, number balance of the plasma constituents, and energy balance of the electrons. In order to evaluate the droplet charge, a phenomenon for de-charging of the droplets, viz., evaporation of positive Sodium ions from the surface has been considered in addition to electron emission and electron/ion accretion. The analysis has been utilized to evaluate the steady state parameters of such complex plasmas (i) in thermal equilibrium and (ii) when irradiated; the results have been graphically illustrated. As a significant outcome irradiated, Sodium droplets are seen to acquire large positive potential, with consequent enhancement in the electron density.
Mishra, S. K., E-mail: email@example.com [Institute for Plasma Research (IPR), Gandhinagar 382428 (India); Sodha, M. S. [Centre of Energy Studies, Indian Institute of Technology Delhi (IITD), New Delhi 110016 (India)] [Centre of Energy Studies, Indian Institute of Technology Delhi (IITD), New Delhi 110016 (India)
Hybrid Vapor Compression Adsorption System: Thermal Storage Using Hybrid Vapor Compression Adsorption System
HEATS Project: UTRC is developing a new climate-control system for EVs that uses a hybrid vapor compression adsorption system with thermal energy storage. The targeted, closed system will use energy during the battery-charging step to recharge the thermal storage, and it will use minimal power to provide cooling or heating to the cabin during a drive cycle. The team will use a unique approach of absorbing a refrigerant on a metal salt, which will create a lightweight, high-energy-density refrigerant. This unique working pair can operate indefinitely as a traditional vapor compression heat pump using electrical energy, if desired. The project will deliver a hot-and-cold battery that provides comfort to the passengers using minimal power, substantially extending the driving range of EVs.
Gas Separation Using Organic-Vapor-Resistent Membranes In Conjunctin With Organic-Vapor-Selective Membranes
A process for treating a gas mixture containing at least an organic compound gas or vapor and a second gas, such as natural gas, refinery off-gas or air. The process uses two sequential membrane separation steps, one using membrane selective for the organic compound over the second gas, the other selective for the second gas over the organic vapor. The second-gas-selective membranes use a selective layer made from a polymer having repeating units of a fluorinated polymer, and demonstrate good resistance to plasticization by the organic components in the gas mixture under treatment, and good recovery after exposure to liquid aromatic hydrocarbons. The membrane steps can be combined in either order.
Baker, Richard W. (Palo Alto, CA); Pinnau, Ingo (Palo Alto, CA); He, Zhenjie (Fremont, CA); Da Costa, Andre R. (Menlo Park, CA); Daniels, Ramin (San Jose, CA); Amo, Karl D. (Mountain View, CA); Wijmans, Johannes G. (Menlo Park, CA)
Uranium deposits of Brazil
Brazil is a country of vast natural resources, including numerous uranium deposits. In support of the country`s nuclear power program, Brazil has developed the most active uranium industry in South America. Brazil has one operating reactor (Angra 1, a 626-MWe PWR), and two under construction. The country`s economic challenges have slowed the progress of its nuclear program. At present, the Pocos de Caldas district is the only active uranium production. In 1990, the Cercado open-pit mine produced approximately 45 metric tons (MT) U{sub 3}O{sub 8} (100 thousand pounds). Brazil`s state-owned uranium production and processing company, Uranio do Brasil, announced it has decided to begin shifting its production from the high-cost and nearly depleted deposits at Pocos de Caldas, to lower-cost reserves at Lagoa Real. Production at Lagoa Real is schedules to begin by 1993. In addition to these two districts, Brazil has many other known uranium deposits, and as a whole, it is estimated that Brazil has over 275,000 MT U{sub 3}O{sub 8} (600 million pounds U{sub 3}O{sub 8}) in reserves.
Simultaneous fog formation and thermophoretic droplet deposition in a turbulent pipe flow
Simultaneous aerosol formation by equilibrium condensation and the migration of the resulting droplets to the cold surface by thermophoresis is studied theoretically for a turbulent pipe flow. The problem is one in which a mixture of a vapor and noncondensable gas flows into a section of pipe where the pipe wall is cooled to below the dew point of the vapor. Because the temperature gradient at the pipe wall decays to zero once the gas travels far enough into the pipe, only some fraction of the droplets formed will deposit on the pipe wall. The equations of energy and diffusion suggest that turbulence leads to a discontinuity in the aerosol (fog) concentration at the boundary between the fog and clear regions. Numerical solutions are obtained for CsOH fog formation and deposition in steam flow, a particular case of current practical interest in water reactor safety. The axial and radial variations of the aerosol and vapor concentrations are displayed graphically, as are the location of the fog boundary as a function of axial distance and the efficiency of deposition as a function of the pipe wall temperature.
Epstein, M.; Hauser, G.M. (Fauske and Associates, Inc., Burr Ridge, IL (USA))
M. Bahrami ENSC 461 (S 11) Vapor Power Cycles 1 Vapor Power Cycles
is not a suitable model for steam power cycle since: The turbine has to handle steam with low quality which steam is condensed in the condenser 4 3 1 2 s T 1 2 34 s #12;M. Bahrami ENSC 461 (S 11) Vapor Power = 0 qin = h3 h2 Turbine q = 0 wturbine,out = h3 h4 Condenser w = 0 qout = h4 h1 The thermal
Bahrami, Majid
Thermal chemistry of the Cu-KI5 atomic layer deposition precursor on a copper surface
The thermal chemistry of a Cu(I) ketoiminate complex, Cu-KI5, resulting from the modification of the known Air Products CupraSelect{sup �} copper CVD precursor Cu(hfac)(tmvs) designed to tether the two ligands via an isopropoxide linker, was studied under ultrahigh vacuum on a Cu(110) single-crystal surface by using a combination of temperature programmed desorption (TPD) and x-ray photoelectron spectroscopy. Adsorption at low temperatures was determined to take place via the displacement of the vinyl ligand by the surface. Molecular desorption was seen at 210?K, and the evolution of Cu(II)-KI5{sub 2} was established to take place at 280?K, presumably from a disproportionation reaction that also leads to the deposition of Cu(0). Other sets of desorption products were seen at 150, 250, and 430?K, all containing copper atoms and small organic moieties with molecular masses below 100 amu. The latter TPD peak in particular indicates significant fragmentation of the ligands, likely at the C�N bond that holds the vinylsilane-isopropoxide moiety tethered to the ketoimine fragment, and possibly also at the union between the vinylsilane and the alkoxide linker. The 430?K temperature measured for this chemistry may set an upper limit for clean Cu film deposition, but since reactivity on the surface was also found to be inhibited at higher surface coverages, it may be delayed to higher temperatures under atomic layer deposition conditions.
Ma, Qiang; Zaera, Francisco, E-mail: firstname.lastname@example.com [Department of Chemistry, University of California, Riverside, California 92521 (United States)
E-Print Network 3.0 - aerosol-assisted chemical vapor Sample...
Work to Prevent Chemical Warfare Agent Vapor Infiltration? John H. Sorensen Barbara M. Vogt Date... protection strategies to reduce exposure to vapors from chemical warfare...
E-Print Network 3.0 - atomic vapor laser Sample Search Results
with the exception of pagination. IEEE TRANSACTIONS ON PLASMA SCIENCE 1 Summary: vapor, atomic physics and vapor ionization, absorption reflection in a heated plasma layer, and...
E-Print Network 3.0 - atom vapor cells Sample Search Results
rotation in the vapor cell due to inten- sity-induced birefringence in the rubidium atomic vapor. While... Super efficient absorption filter for quantum memory using atomic...
Deposition and Microfabrication | EMSL
AFDC Printable Version Share this resource Send a link to EERE: Alternative Fuels Data Center Home Page to someone by E-mail Share EERE: Alternative Fuels Data Center Home Page on Facebook Tweet about EERE: Alternative Fuels Data Center Home Page on Twitter Bookmark EERE:1 First Use of Energy for All Purposes (Fuel and Nonfuel),Feet) Year Jan Feb Mar Apr May Jun Jul(Summary)morphinanInformation Desert Southwest Region service area. The Desert Southwest RegionInsideDeposition and
Preliminary assessment of halogenated alkanes as vapor-phase tracers
New tracers are needed to evaluate the efficiency of injection strategies in vapor-dominated environments. One group of compounds that seems to meet the requirements for vapor-phase tracing are the halogenated alkanes (HCFCs). HCFCs are generally nontoxic, and extrapolation of tabulated thermodynamic data indicate that they will be thermally stable and nonreactive in a geothermal environment. The solubilities and stabilities of these compounds, which form several homologous series, vary according to the substituent ratios of fluorine, chlorine, and hydrogen. Laboratory and field tests that will further define the suitability of HCFCs as vapor-phase tracers are under way.
Adams, Michael C.; Moore, Joseph N.; Hirtz, Paul
Enhanced Attenuation Technologies: Passive Soil Vapor Extraction
Passive soil vapor extraction (PSVE) is an enhanced attenuation (EA) approach that removes volatile contaminants from soil. The extraction is driven by natural pressure gradients between the subsurface and atmosphere (Barometric Pumping), or by renewable sources of energy such as wind or solar power (Assisted PSVE). The technology is applicable for remediating sites with low levels of contamination and for transitioning sites from active source technologies such as active soil vapor extraction (ASVE) to natural attenuation. PSVE systems are simple to design and operate and are more cost effective than active systems in many scenarios. Thus, PSVE is often appropriate as an interim-remedial or polishing strategy. Over the past decade, PSVE has been demonstrated in the U.S. and in Europe. These demonstrations provide practical information to assist in selecting, designing and implementing the technology. These demonstrations indicate that the technology can be effective in achieving remedial objectives in a timely fashion. The keys to success include: (1) Application at sites where the residual source quantities, and associated fluxes to groundwater, are relatively low; (2) Selection of the appropriate passive energy source - barometric pumping in cases with a deep vadose zone and barrier (e.g., clay) layers that separate the subsurface from the atmosphere and renewable energy assisted PSVE in other settings and where higher flow rates are required. (3) Provision of sufficient access to the contaminated vadose zones through the spacing and number of extraction wells. This PSVE technology report provides a summary of the relevant technical background, real-world case study performance, key design and cost considerations, and a scenario-based cost evaluation. The key design and cost considerations are organized into a flowchart that dovetails with the Enhanced Attenuation: Chlorinated Organics Guidance of the Interstate Technology and Regulatory Council (ITRC). The PSVE flowchart provides a structured process to determine if the technology is, or is not, reasonable and defensible for a particular site. The central basis for that decision is the expected performance of PSVE under the site specific conditions. Will PSVE have sufficient mass removal rates to reduce the release, or flux, of contamination into the underlying groundwater so that the site can meet it overall remedial objectives? The summary technical information, case study experiences, and structured decision process provided in this 'user guide' should assist environmental decision-makers, regulators, and engineers in selecting and successfully implementing PSVE at appropriate sites.
Vangelas, K.; Looney, B.; Kamath, R.; Adamson, D.; Newell, C.
Catalytic Reactor For Oxidizing Mercury Vapor
A catalytic reactor (10) for oxidizing elemental mercury contained in flue gas is provided. The catalyst reactor (10) comprises within a flue gas conduit a perforated corona discharge plate (30a, b) having a plurality of through openings (33) and a plurality of projecting corona discharge electrodes (31); a perforated electrode plate (40a, b, c) having a plurality of through openings (43) axially aligned with the through openings (33) of the perforated corona discharge plate (30a, b) displaced from and opposing the tips of the corona discharge electrodes (31); and a catalyst member (60a, b, c, d) overlaying that face of the perforated electrode plate (40a, b, c) opposing the tips of the corona discharge electrodes (31). A uniformly distributed corona discharge plasma (1000) is intermittently generated between the plurality of corona discharge electrode tips (31) and the catalyst member (60a, b, c, d) when a stream of flue gas is passed through the conduit. During those periods when corona discharge (1000) is not being generated, the catalyst molecules of the catalyst member (60a, b, c, d) adsorb mercury vapor contained in the passing flue gas. During those periods when corona discharge (1000) is being generated, ions and active radicals contained in the generated corona discharge plasma (1000) desorb the mercury from the catalyst molecules of the catalyst member (60a, b, c, d), oxidizing the mercury in virtually simultaneous manner. The desorption process regenerates and activates the catalyst member molecules.
Helfritch, Dennis J. (Baltimore, MD)
Low Level Heat Recovery Through Heat Pumps and Vapor Recompression
The intent of this paper is to examine the methods and economics of recovering low level heat through heat pumps and vapor recompression. Actual commercially available equipment is considered to determine the near-term and future economic viability...
Gilbert, J.
Applications of Mechanical Vapor Recompression to Evaporation and Crystallization
there is no boiler plant available or when electrical power is priced competitively in comparison to steam. Vapor recompression is accomplished using centrifugal, axial-flow, or positive displacement compressors and these compressors can be powered by electricity...
Outland, J. S.
Melt and vapor characteristics in an electron beam evaporator
We compare the free surface temperatures T{sub s}, calculated by two methods, in cerium or copper evaporation experiments. The first method considers properties of the melt: by an empirical law we take into account turbulent thermal convection, instabilities and craterization of the free surface. The second method considers the vapor flow expansion and connects T{sub s} to the measured terminal parallel temperature and the terminal mean parallel velocity of the vapor jet, by Direct Simulation Monte Carlo calculations including an atom-atom inelastic collision algorithm. The agreement between the two approaches is better for cerium than for copper in the high craterization case. The analysis, from the point of view of the properties of the melt, of the terminal parameters of the vapor jet for the high beam powers shows that T{sub s} and the Knudsen number at the vapor source reach a threshold when the beam power increases.
Blumenfeld, L.; Fleche, J.L.; Gonella, C. [DCC/DPE/SPEA Centre d`Etudes de Saclay, Gif-sur-Yvette (France)
Hyperfine Studies of Lithium Vapor using Saturated Absorption Spectroscopy
the frequency of a laser with respect to an atomic spectral feature.[20] As such, saturated absorptionHyperfine Studies of Lithium Vapor using Saturated Absorption Spectroscopy? . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14 3.3 Broadening Mechanisms . . . . . . . . . . . . . . . . . . . . . 15 3.4 Saturated Absorption
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