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Aaron S. Williams, director of the Peace Corps, will deliver the address June 9 at the 147th Commencement ceremony of North Central College.
Emily "Em" Rademaker of Cary, Ill., was awarded the 2012 Outstanding Major in German Award and Outstanding Service to Student Life Award during Honors Day May 15 at North Central College.
Rademaker is a senior majoring in German, classical civilization and sociology with minors in history and anthropology at North Central College. After graduation, she will serve in the Republic of South Africa for a 27-month assignment with the Peace Corps. She is the daughter of Dana and Linnea Rademaker and is a 2008 graduate of Cary-Grove Community High School.
Gregory H. Wolf, North Central College professor of German, and a member of the Society of American Baseball Research (SABR) published the feature and lead article, "A Friend of Pirates History. From 42-112 to a World Series Championship," on April 6 in The Hardball Times, an Internet site focusing on the history of Major League Baseball and advanced sabermetric analysis.
Gerald Gems, North Central College professor of health and physical education, presented a paper, titled "Downfall of the Turner Movement in the United States," at the German American Studies Conference at the University of Kansas in Lawrence, Kan., on April 13.
North Central College will host two lectures April 2-3 by Michael Lunberg, Consistorial Councillor in Berlin and Brandenburg, Germany, about the power of political opposition.
Lunberg grew up in East Germany under a repressive communist state and political party and was active in the opposition movement in the late 1980s leading up to the fall of the Berlin Wall.
North Central College will host its 16th Annual International Festival on Feb. 12, featuring new performance groups and participating community organizations, authentic international cuisine, ethnic dancing, live music and more.
For the third consecutive year, a record number of students from North Central College will participate in the nation's leading conference on undergraduate research.
Forty-five students will represent North Central at the annual National Conference on Undergraduate Research (NCUR) March 29-31 at Weber State University in Ogden, Utah. No other college or university in Illinois will send more students to this prestigious conference.
Gregory H. Wolf, North Central College professor of German, is chair of the Small Undergraduate German Programs special interest group of the American Council on the Teaching of Foreign Languages (ACTFL). He organized a breakfast and presented "Keeping German Programs Visible" and co-organized two sessions with six presentations addressing language pedagogy, instructional technology and curricular development at the national meeting of the American Association for Teachers of German in Denver, Colo.
The opportunity to study German and play soccer attracted Nora to North Central. "I wanted to be involved with the sport and I liked the idea of classes with as few as 10 students. I love the environment a small school offers."
Her German classes were engaging and she got to know her classmates and professors on a personal level. She also enjoyed visiting Berlin, Potsdam, Wittenberg and Dresden as part of a D-Term course. "I had a great time immersing myself in the language and culture of Germany and noticed a difference in my ability to write and orally produce the German language."
Participating in athletics taught Nora many life lessons, which she hopes to incorporate as a future coach. "I'm grateful both the German and education departments have done such a great job preparing me for the real world."
Nora landed a full-time position teaching German at a suburban high school, where she also hopes to coach soccer.
North Central College prepares students to be informed,
involved, principled and productive citizens and leaders over their lifetime.


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What does AHTU stand for?
What does AHTU mean? This page is about the various possible meanings of the acronym, abbreviation, shorthand or slang term: AHTU.
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Anti-Human Trafficking Unit
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The amount invested by U.S. venture capital firms declined 12% in the first quarter compared with Q4, to $5.9 billion, according to the National Venture Capital Association and PricewaterhouseCoopers. Investment in software companies increased from $551 million in Q4 to $565 million in Q1.
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4 bedroom cottage for sale Main Road, Fenwick, Ayrshiresimply stunning 4 bedroom 6 apartment traditional terraced cottage. Dating back to 1760 being the the original weavers cottage, number 18 is steeped in history. From the front the property is extremely deceptive and extends to over 1500 sq ft. As you step inside this wonderful home you immediatel... More details ›
Reduced on 16/02/2015 by Clyde Property, Ayr. Call: 01292 262777 Local call rate
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1 bedroom flat for sale Main Road, Fenwick, KilmarnockWe are delighted to present to market this traditionally built ground floor flat set within the popular commuting village of Fenwick. Comprising entrance hallway, lounge/dining area, modern fitted kitchen, double bedroom with patio doors to rear garden and fitted wet room. GCH & Garden More details ›
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Errors boost Mets over Blue Jays in Dunedin
The St. Lucie Mets took advantage of three errors by Dunedin as they defeated the Blue Jays 4-3 on Wednesday at Florida Auto Exchange Stadium.
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This oxford is tailor-made for any wearing occasion with a classic rounded shaped cap toe. Get a custom fit with the Hush Puppies Dual Fit System½, turning a medium width into a wide simply by removing an insert. The lightweight outsole keeps you on your toes and loving it.
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Property Details
Villa, 2 Bedrooms, 2 Baths, 5 Sleeps
WELCOME! OCEAN VIEW Villa, 1204, in wonderful Hilton Head Resort on Hilton Head Island---a special holiday destination! This condo has a FUN, WELCOMING, TROPICAL ATMOSPHERE. Our desire is to give you CLEAN, COMFORTABLE, and WELL SUPPLIED accomodations where you can relax, have fun, and enjoy yourself.
In addition to the wonderful OCEAN and SALT MARSH VIEW we offer a KING bed in the master bedroom, a La Z Boy recliner in the family room, a glider on the balcony, many extras for the beach and pool, and more. We have tried to anticipate and to supply anything we think you might need for a great holiday.
One special feature we hope you will enjoy is the ample, comfortable ADULT SEATING in the family room. Enjoy the OCEAN/MARSH VIEW from the La Z Boy or from standing at the kitchen sink, or you can go outside to get a real panarama view from the balcony. Check out the pictures.
You can have great fun here at the resort! The resort itself has lots to offer! Two outdoor pools, an INDOOR pool, a kiddie pool, hot tub, sauna, indoor track, exercise room, 6 tennis courts, badmitten, deli and convenience store, bike rentals, Coco's On The Beach bar & grill, and more.
The resort is beachside...no streets to cross going to the ocean. Take the golf cart shuttle as scheduled during peak season or enjoy the 5 to 7 min walk on the boardwalk across the incredible wildlife salt marsh and tidal creek. The boardwalk has stations along the way to tell about the tides and describe the wildlife and vegetation you see, an eco educational adventure in itself and a nature lovers paradise.
This ocean view villa is in desirable BUILDING ONE. There are 4 buildings in the resort. Each building has an elevator in the corner where the buildings connect, and there are stairs in each of the other three corners. This 1204 villa is on the second floor which is actually the third level from the ground. This 2nd floor condo has a great view from both sitting inside or outside on the balcony. There is an elevator and nearby stairwells for walk up/down easily.
Your balcony is off the living area. You will be facing due east to enjoy a coastal sunrise or moonrise. You directly face the Folly Creek inlet and can see the area where paddle boarders and surfers gather or watch the shrimp boats especially in the late summer and fall. You will have the perfect view of the boardwalk and all the activity there. See the ebb and flow of the tides in the marsh as they change every 6 hours---a nature lover's paradise!
The master bedroom offers a KING bed and large chest of drawers and shelves for more storage in the closet. The 3 ceiling fans and overhead lights in the unit are remote controlled w/light dimming feature. The bathroom is adjacent and has a tub-shower. Both bathrooms offer vanities with drawers and seat height toilets.
The guest bedroom has two twin beds, a chair for reading or TV. a chest, and additional shelves in the closet . The guest bath offers a shower. There is also a third twin bed(sofa conversion) in the living area.
There is a TV and DVD in each room.
The kitchen has granite countertops and a smooth top range. There is a microwave, Ninja kitchen prep center, toaster, Foreman grill, coffeemaker, crock pot, and most anything else you might need for cooking.
The unit sleeps five: one KING bed and three twin beds. KING in the master, two singles in the guest, and a single in the living room (sofa converts to twin mattresss bed).
Occupancy: for 5 people with a maximum of four adults
EXTRAS FOR THE BEACH: 2 boogie boards and a Beachcomber Macwagon for carrying items to and from the beach. Please bring your own towels for beach and pool.
Recent Review
Wonderful Property!
About the Owner
6 Reviews
5 based on 6 traveler reviews
Wonderful Property!
July4th vacation
The condo had a view second to none of the sunset and we even had a rainbow! The swing on the balcony made for a relaxing setting after a long day at the beach or in one of the pools provided by the condo.
The kitchen provides a wonderful setting for cooking a meal instead of going to one of the many fun places to eat.
The beach was private and not very crowed, even for a holiday week. We had professional photos taken and this was the perfect stop!
We were very happy with our stay and we plan to return to HHI. We will stay here again!
Fantastic villa without a single complaint
With limited public access, the beach was pleasantly uncrowded. The beach is also very wide right there, which is great for bike riding and other activities.
We plan to stay here again if we come back to Hilton Head.
Outstanding villa
The owners made our reservation, check-in, and check-out processes very easy. And, they equipped the villa with virtually all of the amenaties of home, coffee filters & grinder, extra pillows/bedding, soaps, and much much more. We are luxury time-share owners of 4 annual weeks, and have enjoyed vacation stays throughout the USA and Europe. But, our luxury condos are never as well equipped as this villa!
We highly recommend this villa to everyone.
Beautiful Villa, wonderful owners!
Great Value for a Great Place
Activity and Interests
You name it and it's probably on the island:
BEACH-here at HHR it uncrowded with limited public access and 12 miles on the island
WATERSPORTS-all kinds-swimming,paddle boarding, kayaking, fishing, on and on
GOLF-two dozen golf courses or have fun with miniature golf
BIKING-50 miles of bike paths or choose to ride on the beach. The island is very, very bike friendly.
TENNIS anyone? 6 courts here on site
SHOPPING-Tanger outlets in Bluffton, many thrift and consignment shops on and off-island, shops of all types.
CHURCH-many denominations. Central Church of God (mile marker #10) is a good choice. You will feel right at home with lots of new friends.
SIGHT SEEING-Beaufort, Savannah, or maybe try Charleston. Lots to see and enjoy.
Rental rates
- Nightly Rate: $100 - $120
Weekly Rate: $600 - $820
Monthly Rate: $1014 - $1014
Vacation Rental Base Rates*:
Summer rate: 5/10 to 9/6 weekly only, sat to sat, $820/week*
Fall: 9/6 to 11/1 3nts. minimum @ $110/nt., $700/week*
Winter: 11/1 to 3/1 3nt. minimum @ $100/nt., $600/week*. Check for holiday rates!
Spring: 3/1 to 5/10 3nt. minimum @ $110/nt., $700/week*
*A 10% SC/local tax plus $100 departure linens/cleaning is added to your Base Rate.
Monthly: Nov 1, 2014 to Feb 28, 2015 $1014/month, add 10% SC/local taxes, $100 departure linens/cleaning, and $80 power(max), for $1295 total rent, all-inclusive.
Four (4) adults max, six (6) people total only, sleeps five (5).
Legal age required to rent.
A separate $100 security(damage) deposit will reserve your rental time. The security(damage) deposit is refundable after inspection and cleaning. PayPal deposit payments are preferred, but checks are acceptable. Deposit payments for nonrentals are not refundable, but reschedules within six(6) months are acceptable.
PayPal rent payments require a 3% service fee.
Total rent balances excluding the $100 security(damage) deposit are due 30 days prior to the visit by check, and partial payments are acceptable.
Frequent renter discounts are available.
Pets are NOT allowed by the resort. Our Villa is NON-Smoking
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Property Type
- villa
- Adventure
- Budget
- Family
- Luxury
- Romantic
- Spa
- Air Conditioning
- Internet
Pool / Spa
- Hot Tub
- Outdoor Pool
- children welcome
- non smoking only
- pets not allowed
- wheelchair accessible
Location Type
- Beach View
- Ocean View
- Resort
- bay/sound
- churches
- cinemas
- festivals
- forests
- library
- live theater
- marina
- museums
- playground
- pond
- recreation center
- restaurants
- ruins
Leisure Activities
- beachcombing
- bird watching
- eco tourism
- horseback riding
- horseshoes
- outlet shopping
- paddle boating
- photography
- scenic drives
- sight seeing
- walking
- whale watching
Local Services & Businesses
- ATM/bank
- fitness center
- groceries
- hospital
- laundromat
- massage therapist
- medical services
Sports & Adventure Activities
- basketball court
- cycling
- deepsea fishing
- fishing
- fly fishing
- freshwater fishing
- golf
- golf privileges optional
- hiking
- jet skiing
- paragliding
- sailing
- skiing
- sound/bay fishing
- surf fishing
- surfing
- swimming
- tennis
- water skiing
- wind-surfing
- 2 Bathrooms
- Bathroom 1
- Bathroom 2
- 2 Bedrooms, Sleeps 5
- Bedroom 1
- Bedroom 2
- Outdoor Grill
- HHR has many amenities on site: BUILDING 1: large outdoor pool, ISLAND DELI and convenience store, also bike rentals BUILDING 2: lovely garden, elevated sun deck in the middle where many like to go for sun bathing, and a badmitten court. BUILDING 3: "the atrium" (completely covered), large INDOOR pool, kiddie pool, hot tub, sauna, exercise room, indoor track, restrooms, showers. BUILDING 4: six lighted tennis courts and an outside pool. The resort is gated with 24/7 security. Pets are NOT allowed by the resort. The villa is NON SMOKING


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Chavez opponents, US rap plan for decree powers
CARACAS, Venezuela President Hugo Chavez is neutralizing efforts by Venezuela's opposition to impose checks on his power, using a friendly lame-duck congress to seek broad authority to enact laws by decree for the next year.
The plan drew strong criticism Wednesday from the U.S. government and Venezuelan opponents who called it a blow to democracy.
For almost five years, Chavez has enjoyed near total control of the National Assembly thanks to a strategic blunder by his foes, who boycotted 2005 elections. That untrammeled power comes to an end Jan. 5 when a new congress arrives, with enough opposition lawmakers to hinder some types of major legislation.
Critics accuse Chavez of trying to sidestep those limits by getting the outgoing congress to give him decree powers for 12 months - allowing him to impose laws on his own. They see it as a power grab by a president they say is steering Venezuela toward Cuba-style socialism.
Supporters say Chavez needs decree powers to swiftly approve disaster relief measures after severe floods and mudslides that left thousands homeless.
But the law goes beyond such emergency measures, allowing decrees affecting telecommunications, the banking system, information technology, the military, rural and urban land use, and the country's "socio-economic system."
Several thousand students marched to the National Assembly on Wednesday, chanting "Freedom!" to protest against a separate government bill that they fear would increase state controls over autonomous universities.
The demonstration broke up after a group of Chavez supporters hurled rocks and other objects at the marchers. At least one student was hit in the head with what appeared to be a rock.
Other government opponents warn that Chavez could try to decree laws clamping down on opposition media, free speech and human rights groups.
In a speech to the National Assembly, opposition lawmaker Ismael Garcia denounced what he called a "a package of laws that are a coup d'etat against the constitution."
In Washington, State Department spokesman P.J. Crowley noted Chavez has asked congress for decree powers four times in his presidency.
"He seems to be finding new and creative ways to justify autocratic powers. What he is doing here, we believe, is subverting the will of the Venezuelan people," Crowley told reporters.
September elections gave Venezuelans "the opportunity to send a clear message to the government," and the new legislature "should have the ability to contribute to the political process in Venezuela," Crowley said.
Chavez has repeatedly won elections since he first won the presidency in 1998 and insists he fully respects democratic principles. "All of these laws will be within the framework of the constitution," he said Tuesday.
His allies in the National Assembly gave initial approval to the so-called enabling law Tuesday night and are expected to give the final OK this week.
Chavez would likely not be granted decree powers by the incoming National Assembly, where 66 opposition lawmakers in the 165-seat congress form a bloc large enough to disrupt approval of some types of laws and Supreme Court appointments.


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The invention relates to a process for forming an integrated circuit device comprising (i) a substrate; (ii) metallic circuit lines positioned on the substrate and (iii) a dielectric material positioned on the circuit lines. The dielectric material comprises porous organic polyarylene ether.
1. A process for forming an integrated circuit comprising:
(a) positioning on a substrate a layer of dielectric composition, the composition comprising decomposable polymer and thermosetting resin;
(b) heating the composition to condense the thermosetting resin;
(c) decomposing the decomposable polymer
(d) lithographically patterning the dielectric layer;
(e) depositing a metallic film onto the patterned dielectric layer; and
(f) planarizing the film to form the integrated circuit.
2. The process of claim 1 wherein the decomposable polymer is decomposed by heating or exposure to radiation.
3. The process of claim 2 wherein the organic thermosetting resin comprises a polyarylene.
4. The process of claim 2 wherein the thermosetting resin is selected from the group consisting of a polyimide, a polyarylene, a polyarylene ether, a polybenzazole, a polyisocyanurate, and mixtures thereof.
5. The process of claim 2 wherein the decomposable polymer is a linear polymer selected from polyester, polystyrene, poly(a-methylstyrene), polyacrylate or polymethacrylate.
6. The process of claim 2 wherein the decomposable polymer is a cross-linked polymeric nanosphere.
7. The process of claim 2 wherein the decomposable polymer is hyperbranched polymer.
8. The process of claim 7 wherein the hyperbranched polymer is a polyester.
9. The process of claim 1 wherein the decomposable polymer is a star branched polymer.
10. The process of claim 1 wherein the decomposable polymer is selected from the group consisting of a block copolymer, a star block copolymer, a radial diblock polymer, a graft diblock copolymer, a comb grafted copolymer, a dendigraft copolymer, a tapered block copolymer, and mixtures thereof.
11. A process for forming an integrated circuit comprising:
(a) depositing a metallic film on a substrate;
(b) lithographically patterning the metallic film;
(c) depositing on the patterned metallic film, a layer of a dielectric composition comprising decomposable polymer and organic thermosetting resin;
(d) heating the composition to condense the organic thermosetting resin comprising a polyarylene ether; and
(e) decomposing the decomposable polymer.
12. The process of claim 11 wherein the decomposable polymer is decomposed by heating or exposure to radiation.
13. The process of claim 11 wherein the organic thermosetting resin comprises a polyarylene.
14. The process of claim 11 wherein the thermosetting resin is selected from the group consisting of a polyimide, a polyarylene, a polyarylene ether, polybenzazoles, a polyisocyanurate, and mixtures thereof.
15. A process of claim 12 wherein the decomposable polymer is a linear polymer selected from polyester, polystyrene, poly(a-methylstyrene), polyacrylate or polymethacrylate.
16. The process of claim 12 wherein the decomposable polymer is a cross-linked polymeric nanosphere.
17. The process of claim 11 wherein the decomposable polymer is hyperbranched polymer.
18. The process of claim 17 wherein the hyperbranched polymer is a polyester.
19. The process of claim 1 wherein the decomposable polymer is a star branched polymer.
20. The process of claim 11 wherein the decomposable polymer is selected from the group consisting of a block copolymer, a star block copolymer, a radial diblock copolymer, a graft diblock copolymer, a comb grafted copolymer, a dendigraft copolymer, a tapered block copolymer, and mixtures thereof.
The invention relates generally to a process for manufacturing an integrated circuit device. More specifically, the invention relates to processes for manufacturing integrated circuit devices using matrices of porous high temperature thermosets.
There is a continuing desire in the microelectronics industry to increase the circuit density in multilevel integrated circuit devices e.g., memory and logic chips, thereby increasing their performance and reducing their cost. In order to accomplish this goal, there is a desire to reduce the minimum feature size on the chip e.g., circuit line width, and also to decrease the dielectric constant of the interposed dielectric material to enable closer spacing of circuit lines without increase in crosstalk and capacitive coupling. Further, there is a desire to reduce the dielectric constant of the dielectric materials such as utilized in the back end of the line (BEOL) portion of integrated circuit devices, which contain input/output circuitry, to reduce the requisite drive current and power consumption for the device.
The present dielectric is silicon dioxide which has a dielectric constant of about 4.0. This material has the requisite mechanical and thermal properties to withstand processing operations and thermal cycling associated with semiconductor manufacturing. However, it is desired that dielectric materials for future integrated circuit devices exhibit a lower dielectric constant (e.g., <3.0) than exhibited by current silicon dioxide.
It is therefore an object of the present invention to provide an improved integrated circuit device comprising an improved dielectric material.
Other objects and advantages will be apparent from the following disclosure.
The invention relates to a process for forming an integrated circuit device comprising (i) a substrate; (ii) interconnecting metallic circuit lines positioned on the substrate and (iii) a dielectric material positioned contiguous to the circuit lines (over and/or between the circuit lines). The dielectric material comprises a porous high temperature thermosetting polymers such as polyimides, polycyanurates, polyarylenes, polyarylene ethers, polybenzazoles, and the like, formed by the process of the present invention. Preferably, the dielectric material has pore sizes less than 500 Å.
For on-chip semiconductor device insulator applications it is imperative that the heterogeneous domains be small with respect to current and future device minimum dimensions (<0.18 μm). This assures that the intrinsically heterogeneous insulators will look homogeneous to each individual device. Since polymers are usually incompatible, blending tends to result in unacceptable macroscopic phase separation. This phase separation can affect domain size. The key features in controlling the domain size in phase-separated polymer mixtures are (i) use of polymers or precursor polymers with functionality capable of interacting with the vitrifying matrix (e.g., dipolar interaction, strong hydrogen bonding, Van der Waals interactions, etc.) (ii) the presence of reactive functionality in the minor component which is incorporated (either transiently or permanently) during vitrification to restrict mobility and (iii) the transient presence of a solvent in the film which mediates the interaction between the components during the curing process.
Nanoporosity has been generated from phase-separated polyimide block copolymers by selective removal of thermally labile blocks. While the principle has been demonstrated, this technique requires the synthesis of complex block copolymers and careful control of the processing conditions so that the glass transition temperature Tg of the linear thermoplastic polyimide is not exceeded during the foaming process. A major problem with this technique is that the modulus drop around the Tg for thermoplastic materials is substantial leading to foam collapse either during processing or in high temperature applications.
This difficulty can be circumvented by the use of thermosetting rather than thermoplastic matrix materials. In the case of polyimides, pendant acetylenic functionality (either internal or as end caps) undergoes further reaction at elevated temperatures. In this manner, low molecular weight end-capped polyimides have been demonstrated to undergo efficient chain extension and insolubilization upon heating to elevated temperatures. The reaction is effective and produces no volatile by-products.
We have developed a new technique for the production of porous organic polymers of controlled pore shape, size and density. The technique involves the use of highly branched aliphatic esters which have recently been used to generate pores within a vitrifying organosilicate matrix. As porogens (i.e., a pore generator), the branched materials have reactive surface functionality which can be partially or completely substituted with derivatives containing reactive functionality such as substituted ethynyl or substituted o-diethynyl groups through reaction (esterification, urethane formation etc.) with aryl appropriately substituted carboxylic esters, isocyanates etc. The surface functionality is necessary to assure incorporation into the vitrifying organic polymer matrix, a feature which restricts mobility and hence restricts the size of the phase-separated domains. Specific examples include but are not limited to, 3,4-diphenylethynyl phenyl acetic and propionic acids; 3,4-phenylethynyl benzoic acids; 3,4-diphenyl ethynyl phenoxy acetic acids; as well as the isocyanato derivatives of such materials and other ethynyl substituents other than phenylethynyl as are available and useful. The extent of surface functionalization can be controlled to insure compatibility with the vitrifying resins.
Although substituted or vinylogous o-diethynyl functionality is preferred, this is not a limiting feature since any groups which are incorporated into the vitrifying matrix are acceptable. The reactive functionality is tailored to the vitrifying matrix selected. Since the includants are ultimately removed, thermal stability of the linkages in the foamed product is not an issue.
One other example of the invention is polyisocyanurates. Polyisocyanurates comprise a class of thermosetting materials that possess excellent mechanical properties, good thermal stability and high use temperatures. These materials are used as matrix resins for composite structures for boards and cards and for thin film dielectric insulators. In this invention, we describe a general methodology to nanoporous polycyanurates. Hydroxy functional branched, hyperbranched, star and dendritic polyesters are chemically incorporated into the uncured cyanate resin forming clear homogeneous solutions. Upon curing, the polyester component phase separates. The level of phase separation of the polyester is limited, due to the chemical incorporation either transiently or otherwise in the cyanate resin. The polyesters are thermally unstable and undergo rapid degradation at elevated temperatures, leaving behind a porous medium.
A more thorough disclosure of the invention is presented in the detailed description which follows and from the accompanying drawings.
FIG. 1 is a cross-sectional view of a portion of the integrated circuit device formed by the process of the present invention.
FIGS. 2-5 show a process for making the integrated circuit device of the present invention.
FIGS. 6-8 show an alternative process for making the integrated circuit device of the present invention.
An embodiment of the integrated circuit device formed by the process of the present invention is shown in FIG. 1. The device generally comprises substrate 2, metallic circuit lines 4 and dielectric material 6. The substrate 2 has vertical metallic studs 8 formed therein. The interconnected circuit lines function to distribute electrical signals in the device and to provide power input to and signal output from the device. Suitable integrated circuit devices will generally comprise multiple layers of circuit lines which are interconnected by vertical metallic studs.
Suitable substrates for the device of the invention comprise silicon, silicon dioxide, glass, silicon nitride, ceramics, aluminum, copper and gallium arsenide. Other suitable substrates will be known to those skilled in the art. In a multilayer integrated circuit device, an underlying layer of insulated, planarized circuit lines can also function as a substrate.
Suitable circuit lines generally comprise a metallic, electrically conductive, material such as copper, aluminum, tungsten, gold, silver, or alloys thereof. Optionally, the circuit lines may be coated with a metallic liner such as a layer of nickel, tantalum or chromium or other layers such as barrier or adhesion layers (e.g., SiN, TiN).
The key feature of the invention is forming the dielectric material which is positioned over the circuit lines and/or between the circuit lines and on the substrate. In multilevel integrated circuit devices, the dielectric material is often planarized to function as a substrate for lithographic formation of the next layer of circuit lines. The dielectric material comprises crosslinked porous thermosetting high-temperature polymers.
The porous thermosetting high temperature polymers (such as polyimides, polyarylenes, polyarylene ethers, polycyanurates, and the like), used in the invention preferably have desirable dielectric properties, are easily synthesized and applied and are miscible at the molecular level prior to curing with the fugitive copolymers with which they are mixed.
One exemplary class of thermosetting polymers is polyarylenes. These polyarylenes may be synthesized from precursors such as ethynyl aromatic compounds of the formula:
(R--C.tbd.C.paren close-st.n Ar--L.brket open-st.Ar.paren open-st.C.tbd.C--R)m ]q (I)
wherein each Ar is an aromatic group or inertly-substituted aromatic group: each R is independently hydrogen, an alkyl, aryl or inertly-substituted alkyl or aryl group; L is a covalent bond or a group which links one Ar to at least one other Ar; n and m are integers of at least 2; and q is an integer of at least 1. As such, the ethynyl aromatic compounds of the invention have four or more ethynyl groups (for example, tetraethynyl aromatic compounds) and are useful as monomers in the preparation of polymers, including their oligomeric precursors.
In another aspect, the polyarylenes used in the invention may comprise a polymer, including copolymers, which comprise units of: ##STR1## wherein Ar' is the residual of the reaction of product of (C═C.paren close-st.n Ar or Ar.paren open-st.C.tbd.C)m moieties and R and L are as defined above.
In one embodiment, the polyarylene copolymers of the invention comprise units of: ##STR2## wherein Ar' and R are as hereinbefore defined.
Representative examples of compounds of the structure of Formula (I) include: ##STR3## with Ar-L-Ar preferably being biphenyl such as biphenyl; 2,2-diphenyl propane; 9,9'-diphenyl fluorene; 2,2-diphenyl hexafluoro propane; diphenyl sulfide; oxydiphenylene; diphenyl ether; bis(phenylene)diphenylsilane; bis(phenylene) phosphine oxide; bis(phenylene)benzene; bis(phenylene)naphthalene; bis(phenylene)enthracene; thiodiphenylene; 1,1,1-triphenyleneethane; 1,3,5-triphenylenebenzene; 1,3,5-(2-phenylene-2-propyl)benzene; 1,1,1-triphenylenemethane; 1,1,2,2-tetraphenylene-1,2-diphenylethane; bis(1,1-diphenyleneethyl)benzene; 2,2'-diphenylene, 1,1,1,3,3,3-hexafluoropropane; 1,1-diphenylene-1-phenylethane; naphthalene; anthracene; or bis(phenylene)napthacene; more preferably biphenylene; naphthylene; p,p'(2,2-diphenylene propane) (--C6 H4 --C(CH3)2 --C6 H4 --); p,p'-(2,2-diphenylene-1,1,1,3,3,3hexafluoropropene) and (--C6 H4 --C(CF3)2 --C6 H4 --).
Useful bis-phenyl derivatives include 2,2-diphenyl propane; 9,9'-diphenyl fluorene; 2,2-diphenyl hexafluoro propane; diphenyl sulfide; diphenyl ether; bis(phenylene)diphenylsilane; bis(phenylene)phosphine oxide; bis(phenylene)benzene; bis(phenylene)naphthalene; bis(phenylene)anthracene; or bis(phenylene)napthacene.
The ethynyl groups on each Ar are either on adjacent carbon atoms or are vinylogously conjugated within the ring. It is believed that they dimerize upon application of heat to form an aromatic ring having a 1,4-diradical which serves to polymerize and/or cross-link the compound. While not being bound by theory, it is believed that this dimerization occurs via Bergman cyclization such as disclosed by Warner, et al. in Science, 268, Aug. 11, 1995, pp. 814-816, which is incorporated herein by reference.
The ethynyl aromatic monomer precursors to thermosetting polyarylenes are preferably bis(o-diethynyl) monomers (herein also referred to as BODA (bis(ortho-diacetylene)monomers)), which means there are at least two sets of adjacent substituted or vinylogously conjugated ethynyl groups on the monomer, that is, at least one set of ethynyl groups on each Ar group. Preferably, the ethynyl aromatic compound contains from 2 to 4, most preferably 2 or 3, diethynyl sets, most preferably, except when additional cross-linking is desired. Two sets (that is, four) of ethynyl groups.
The polyarylene precursor monomers of the invention are advantageously prepared by:
(a) selectively halogenating, preferably in a solvent, a polyphenol (preferably a bisphenol) to selectively halogenate, preferably brominate, each phenolic ring with on e halogen on one of the two positions ortho to the phenolic --OH group;
(b) converting the phenolic --OH on the resulting poly(ortho-halophenol), preferably in a solvent, to a leaving group such as a sulfonate ester (for example, a trifluoromethanesulfonate ester prepared from trifluoromethanesulfonyl halide or trifluoromethane sulfonic acid anhydride) which is reactive with and replaced by terminal ethynyl compounds; and
(c) reacting the reaction product of step (b) with an ethynyl-containing compound or an ethynyl synthon in the presence of an aryl ethynylation, preferably palladium, catalyst and an acid acceptor to simultaneously replace the halogen and the trifluoromethylsulfonate with an ethynyl-containing group (for example, acetylene, phenylacetylene, substituted phenylacetylene or substituted acetylene). Further explanation of this synthesis is provided in Babb, published PCT patent application WO 97/10193, published Mar. 20, 1997, which is incorporated herein by reference.
The ethynyl aromatic monomers of Formula (I) are useful to prepare polymers of either Formula (II) or (III). While not being bound by theory, it is believed that the ethynyl groups, specifically those of ortho orientation, on the aromatic ring cyclize upon heating, forming a dehydro aromatic ring which reacts to form a polymer chain. Monomers with more than two ortho ethynyl groups (that is, more than one set of ethynyl groups) are used to form thermoset polymers and depending on the concentration of monomer having more than one set of ortho-ethynyl groups may contain from almost none (that is, a polymer having essentially repeat units of Formula (II) only to substantial segments of linear polymer chain structure (that is, a polymer of Formula (III)).
The ethynyl aromatic monomers can be thermally polymerized. Polymerization can be detected by increasing viscosity or reaction exotherm. Polymerization will generally occur at a temperature more than 150� C., but polymerization temperatures are preferably at least 180� C., more preferably at least 210� C. The polymerization temperature preferably does not exceed that temperature which would result in undesirable degradation of the resulting polymer, which means polymerization is generally conducted at a temperature less than 300� C. for monomers having benzylic hydrogen atoms, and, for monomers not having a benzylic hydrogen, less than 450� C., preferably less than 400� C., more preferably less than 350� C. The polymerization temperature will vary with Ar-L-Ar and R, with smaller R groups like H generally requiring lower temperatures than larger R, and more conjugated Ar and R (when aromatic) groups requiring lower temperatures than less conjugated Ar and R groups. For instance, when R or Ar is anthracene, the polymerization is more advantageously conducted at a lower temperature than when Ar or R is phenyl.
While not being bound by theory, representative units of Formula (II) are believed to have the following structural formulae: ##STR4##
Polymerization is conveniently conducted at atmospheric pressure, but pressures higher or lower than atmospheric pressure can be employed.
The polymerization may be conducted in the presence of agents for controlling (accelerating) the cyclization reaction such as free radical initiators, or the chlorides disclosed by Warner, et al. in Science 269, pp. 814-816 (1995) can be employed in the polymerization reaction.
While not being bound by theory, it is believed that polymerization of the bis(ortho-diacethylene)-6F can be depicted as follows: ##STR5##
While the specific conditions of polymerization are dependent on a variety of factors including the specific ethynyl aromatic monomer(s) being polymerized and the desired properties of the resulting polymer, in general, the conditions of polymerization are detailed in Babb, published PCT application WO 97/10193 published Mar. 20, 1997, which is incorporated herein by reference.
Further examples of porous polyarylene copolymers may be found in Furuta, et al., U.S. Pat. No. 5,498,689 issued Mar. 12, 1996, which is incorporated herein by reference. Other thermosetting matrices which are useful in the invention include polyarylene ethers, polyimides, and polybenzazoles among others such as those disclosed in PCT application WO 97/01593 published Mar. 20, 1997; Burgoyne Jr. et al, U.S. Pat. No. 5,658,994, issued Aug. 19, 1997; Sovish, European Patent Specification No. 524,930, published Mar. 12, 1997; Burgoyne, European Patent Application No. 755,957, published Jan. 29, 1997, all of which are incorporated herein by reference.
Another useful class of thermosets include those thermosets which can be used to make nanoporous cyanate networks. In this instance, the cyanate resin is polymerized to form a vitrified network in the presence of a reactive polymer based on templated polymerization.
For example, a poly(ε-caprolactone) with a 6 arm star molecule architecture (V) prepared as shown below was used to modify the bisphenol-A-cyanate (bpacy) shown below (IV). Once melted, the bpacy dissolved the polymer template without the use of a mutual solvent. The use of a solvent to mediate deposition is useful. The miscibility of the two components at the early stages of the cure precludes phase separation with solvent evaporation. As the cyanate resin cures and builds in molecular weight, it is no longer a solvent for the polyester and expels the polymer. However, the phase separation is limited since the star polymer is chemically incorporated either transiently or permanently. Upon vitrification of the cyanate (250� C. cure for 2 hours), the polymer template can be decomposed at ˜350� C., leaving behind pores the same size and shape of which are identical to the initial hybrid morphology. ##STR6## Polyisocyanurate resins are high performance polymers and play an important role as insulating materials and structural resins in manufacturing microelectronic devices and components. The material requirements for these applications generally include high thermal and dimensional stability, low thermal expansion coefficient and low dielectric constant. A low dielectric constant is of particular importance since propagation delay of electronic signals varies with the inverse of the square root of the dielectric constant and allows for denser wiring at acceptable cross-talk levels. Highly crosslinked networks possess many of the requisite properties for these applications, and epoxy resins are among the most commonly used thermosetting polymers due to their cost, availability and ease of processing.
Cyanate ester resins, an emerging class of high performance thermosetting polymers, have a low dielectric constant (about 2.6 to 3.2), a high Tg and thermal stabilities. However, due to the highly crosslinked structure, they are inherently brittle, limiting their utility in applications requiring high mechanical strength or thermal cycle resistance.
Generally, polyisocyanurates are synthesized from cyanate esters. The unique chemistry of --OCN functionality and the aryl polycyanurate network formed after cure creates distinctive features, which can be further enhanced by altering the polyphenolic backbone structures. Representative monomers useful in making the polyisocyanurates of the invention include those provided below. ##STR7##
Preparation of the cyanate esters involves adding a base (e.g. triethylamine) slowly into the phenol-cyanogen halide (usually chloride in large scale preparation) solution at a temperature between -30 and 20� C. to give almost quantitative cyanation of most phenols. Exceptions are phenols bearing strong electron-withdrawing groups. Cyanation of aliphatic alcohols, on the other hand, cannot normally be done by the same procedure, due to instability of the aliphatic cyanates at ambient temperatures. Substitution of the β-hydrogen with fluorine in the precursors stabilizes the cyanate esters, thus making direct cyanation feasible. Both organic and inorganic bases can be used in cyanation. Triethylamine is preferred for its relatively high-boiling and low equivalent weight properties in scavenging the acid by-product. Insoluble inorganic bases such as NaOH possess the advantage of initiating the cyanation reaction without participating in other side reactions.
Cyanate-containing oligomers or polymers have been prepared by using the same cyanation method on the polymeric phenols. Polycarbonate dicyanate oligomers have been prepared by cyanation of the phenol-terminated polycarbonates. Poly(arylene-ether-sulfone) dicyanate have been synthesized by reacting the phenol-terminated poly(arylene-ether-sulfone) in chlorobenzene with BrCN and TEA. Cyanation of phenol-containing polymers provides an efficient means of access to cyanate macromonomers; poly(p-hydroxystyrene) for example, has been converted to poly(p-cyanatostyrene).
Other polyphenolic compounds such as the one produced by copolymerization and subsequent hydrolysis of the copolymer of p-isopropenylphenyl acetate and styrene have also been subjected to cyanation to produce atactic cyanate macromonomers. Copolymerization of cyanate-containing vinyl monomers such as p-isopropenylphenyl cyanate with long-chain acrylates provides an alternative to the hydrolysis-cyanation approach.
Oligomeric cyanate esters requiring temperatures above 60� C. to flow easily are usually recovered by precipitation from water-miscible solvents, e.g. acetone or tetrahydrofuran, by addition of water or ice. The hard resin products are either washed in water and dried in air or dissolved in low boiling solvents such as methylene chloride and spray dried. Additional monomers useful in synthesizing the cyanurate polymers of the invention include those provided below. ##STR8##
The porous thermosetting dielectric composition is formed in a three step process. The first step involves dissolving thermosetting polymers in a suitable high boiling solvent (e.g., mesitylene, o-dichlorobenzene, cyclopentanone, gamma-butyrolactone, PM-acetate, N-methyl-2-pyrrolidone, NMP etc.) at room temperature and then uniformly dispersing in the solution a suitable decomposable polymer. The decomposable polymer is radiation decomposable or preferably thermally decomposable. The radiation decomposable polymer decomposes upon exposure to radiation e.g., ultraviolet, x-ray, electron beam or the like. The thermally decomposable polymer undergoes thermal decomposition at a temperature above the condensation temperature of the organic thermosetting materials.
Suitable decomposable polymers include linear polymers, cross-linked polymeric nanospheres, and block copolymers and hyperbranched polymers. Suitable linear polymers are polyethers (such as polypropylene oxide), polyacrylates such as poly(methyl methacrylate), polyisocyanurates, aliphatic polycarbonates (e.g., α-polypropylene carbonate), polyethylene carbonate, polyesters, polysulfones and polystyrene or poly (α methyl styrene). The decomposable linear polymer will preferably have reactive end groups which will react (co-condense) with the organic thermosetting compounds.
Suitable cross-linked, insoluble nanospheres (prepared as nanoemulsions) are suitably comprised of polystyrene or poly(acrylates) and other vinyl polymers. Suitable block copolymers are poly(styrene-ethylene oxide), poly(ether-lactones), poly(ester-carbonates) and poly(lactone-lactide). These block copolymers self organize to form micelles.
Suitable decomposable polymers are also those which also actively promote templating of the vitrification reaction, those which control and define pore size, and those which are fugitive at the appropriate time in the processing. Polymers which have been found preferable include those having an architecture which provides a more three-dimensional structure including block copolymers such as diblock, triblock, and multiblock copolymers; star block copolymers; radial diblock copolymers; graft diblock copolymers; cografted copolymers; dendrigraft copolymers; tapered block copolymers; and combinations of these polymeric architectures; among others.
Suitable hyperbranched polymers are dendrimers, hyperbranched polyesters, e.g., hyperbranched poly(caprolactone), polyethers e.g., polyethylene oxide polypropylene oxide. Organic hyperbranched polymers are highly branched, three-dimensional, globular-shaped macromolecules which have reactive groups at the chain ends with a substantial number of reactive groups along the outer surface of the macromolecule. Preferably, the surface reactive groups are condensable either before or after functional group transformation with the organic thermosetting polymer. Hyperbranched polymers are formed by polycondensation of a multifunctional monomer (A) RBn wherein A is a coupling group which is reactive with B, R is nonreactive organic spacer and n>1 preferably n=2-5 and more preferably n=2-4.
Preferably the decomposable polymer comprises a copolymer having star architecture. Copolymers having star architecture are characterized by a nuclear configuration which is surrounded by an assortment of arms or branches radiating out from the nuclear center of the copolymer. The nuclear center of the copolymer may be an atom, a moiety, or a monomer unit, among other alternatives.
Star copolymers have been found preferred for a number of reasons. First, we have found copolymers with star architecture are easily processable in synthesis and application. However, more importantly, we have found that copolymers having star architecture provide superior correlation between the volume of copolymer charged into the systems and the ultimate pore size and pore density of the matrix. We have found that copolymers with star architectures form nanoscopic domain sizes allowing for an almost homogenous distribution. Additionally, copolymers with a star architecture tend to inhibit coalescence which would lead to macroscopic phase separation. As a result, the copolymer forms discrete isolated volumes throughout the matrix. Copolymers with a star architecture form the most regular discrete isolated volumes, providing the most predictable pore sizes.
A characteristic of these copolymers generally is controllable complex, compact molecular geometries. The domain size of the copolymer preferably can be correlated to the ultimate pore size obtained. That is the volume of copolymers charged combined with copolymer domain size correlates to the ultimate pore size. Preferably, the pore size is less than about 500 Å, more preferably less than about 100 Å, and most preferably about 30 Å to 80 Å. This smaller pore size allows the application of a more consistent environment from device to device.
Hyperbranched and dendrimeric polymers have low solution and melt viscosities, high chemical reactivity due to surface functionality, and enhanced solubility even at higher molecular weights. Suitable decomposable hyperbranched polymers and dendrimers for use in the present invention will be known to those skilled in the art such as disclosed in "Comprehensive Polymer Science", 2nd Supplement, Aggarwal, pages 71-132 (1996), the disclosure of which is incorporated herein by reference for all purposes.
In the second step of the process of the present invention, the mixture of the organic thermosetting resin and decomposable polymer is heated to an elevated temperature e.g., directly or in a step wise fashion (e.g., 200� C. for 2 hrs. and then ramped up (5� C./min.) to 300� C. and held for 2 hrs.) to cause condensation of the organic thermosetting resin and preferably cross condensation with the reactive groups of the thermally decomposable polymer. The heating in the second step is below the thermal decomposition temperature of the decomposable polymer. A catalyst may be utilized to lower the condensation temperature.
The last step of the process of the invention involves decomposing the decomposable polymer uniformly dispersed within the matrix of the condensed rigid organic thermosetting resin. Photochemical labile polymers can be decomposed by exposure of the composition to suitable radiation to cause photodecomposition. Thermally decomposable polymer is decomposed by heating the composition to a temperature at or above the thermal decomposition temperature of the polymer. (e.g., about 350-400� C.) to produce monomer and/or low molecular weight fragments.
The decomposable polymer decomposes to volatile fragments which diffuse out of the rigid thermosetting resin matrix leaving voids behind. The pore size in the thermosetting resin matrix will be generally the same size as the size of the domains of the decomposable polymer and the pore size and distribution can be altered by varying the molecular weight and the loading level of the decomposable polymer.
The pores generally comprise about 10 to 40 vol-%, preferably about 25 vol-% or less, and more preferably about 20 vol-% or less of the matrix. The molecular weight (Mn) of the decomposable polymer is about 20,000 or less, preferably about 10,000 or less, more preferably about 5,000 or less.
The dielectric composition of the invention has a dielectric constant less than 3.2 and preferably less than 2.8 at 25� C. The composition comprises about 10 to 40% by volume of pores and has pore sizes of less than 1000 Å, preferably less than 500 Å, which result in enhanced mechanical toughness and crack resistance and isotropic optical properties and improved dielectric properties. Generally polymers having a DP of about 4 to 6 provide domains of about 100 Å or less, DP's of 20 to 30 provide domains of about 250 Å to 750 Å, and DP's of 30 or greater provide macrophase separation.
Further the dielectric composition has mechanical properties that resist cracking and enable it to be chemically/mechanically planarized to facilitate lithographic formation of additional circuit levels in multilevel integrated circuit devices. The dielectric composition has a dielectric strength from 1-5 MV/cm. The dielectric composition is optically clear and adheres well to itself and other substrates. The dielectric composition undergoes minimal shrinkage after removal of the casting solvent during heating. The composition of the present invention can also be utilized as a protective coating for optical articles such as glasses, contact lens and solar reflectors and other articles used in outer space.
The invention relates to processes for manufacturing the integrated circuit device. Generally, the resin may be processed by conventionally mixing, spinning and heating for application. Referring to FIG. 2, the first step of one process embodiment involves disposing on a substrate 2, a layer 10 of the dielectric composition of the invention comprising organic thermosetting resin and decomposable polymer. The substrate 2 is shown with vertical metallic studs 8. The composition is dissolved in a suitable solvent such as PM-acetate, γ-butyrolactone, dimethyl propylene urea (DMPU), NMP or the like and is applied to the substrate by art known methods such as spin or spray coating or doctor blading.
The second step of the process involves heating the composition to an elevated temperature to cross condense the thermosetting resin reactive groups. The last step involves decomposing the decomposable polymer dispersed within the porous thermosetting resin matrix to form the porous organic polymer.
Referring to FIG. 3, the next step of the process involves lithographically patterning the layer 10 of dielectric composition to form trenches 12 (depressions) in the layer of composition. The trenches 12 shown in FIG. 3 extend to the substrate 2 and to the metallic stud 8. Lithographic patterning generally involves (i) coating the layer 10 of dielectric composition with a positive or negative photoresist such as those marketed by Shipley or Hoechst Celanese (AZ photoresist), (ii) imagewise exposing (through a mask) the photoresist to radiation such as electromagnetic e.g., visible UV or deep UV, (iii) developing the image in the resist e.g., with suitable basic developer and (iv) transferring the image through the layer 10 of dielectric composition to the substrate 2 with a suitable transfer technique such as reactive ion etching, (RIE). Suitable lithographic patterning techniques are well known to those skilled in the art such as disclosed in "Introduction to Microlithography", Thompson et al., (994), the disclosure which is incorporated herein by reference for all purposes.
Referring to FIG. 4, in the next step of the process for forming the integrated circuit of the present invention, a metallic film 14 and removing excess metal) is deposited onto the patterned dielectric layer 10. Preferred metallic materials include copper, tungsten and aluminum. The metal is suitably deposited onto the patterned dielectric layer by art known techniques such as chemical vapor deposition (CVD), plasma enhanced CVD, electro and electroless deposition, sputtering or the like.
Referring to FIG. 5, the last step of the process involves removal of excess metallic material (e.g., planarizing the metallic film 14) so that the features 14 are generally level with the patterned dielectric layer 10. Planarization can be accomplished using chemical/mechanical polishing or selective wet or dry etching. Suitable chemical/mechanical polishing techniques will be known to those skilled in the art.
Referring FIGS. 6-8, there is shown an alternative embodiment of the process of the present invention for making the integrated circuit devices. The first step of the process in this embodiment involves depositing a metallic film 16 onto a substrate 18. Substrate 18 is also provided with vertical metallic studs 20. Referring to FIG. 7, in the second step of the process, the metallic film is lithographically patterned through a mask to form trenches 22. Referring to FIG. 8, in the next step of the process, a layer 24 of dielectric composition of the present invention is deposited onto the patterned metallic film 16. In the last step of the process, the composition is heated first to condense the thermosetting material and then at a higher temperature to decompose the thermally decomposable polymer. Optionally, the dielectric layer may then be planarized for subsequent process in a multilayer integrated circuit.
The following examples are detailed descriptions of the process of the invention. The detailed preparations fall within the scope of, and serve to exemplify, the more generally described methods set forth above. The examples are presented for illustrative purposes only, and are not intended as a restriction on the scope of the invention.
A vitrifying matrix is produced from 9,9(bis-3',4'-phenylethynyl), fluorene either alone or in concert with other poly(phenylethynyl) substituted monomers, is normally B-staged to a soluble low molecular weight material before spin coating and final curing. Other candidates include polyarylene ethers derived from 2,2'-(bis-phenylethynyl)-5,5'-dihydroxybiphenyl as described as disclosed in PCT Patent Application WO 97/01593 published Jan. 16, 1997, which is incorporated herein by reference.
The candidates employing the described biphenyl derivative are not limited to fluorinated arylenes but can be extended to any other polyarylenes, polybenzazoles, polyquinolines, polyquinoxalines etc. which can be produced by aromatic nucleophilic condensation polymerization.
Alternatively polyarylene ethers can be prepared by metal-catalyzed coupling as reported in U.S. Pat. No. 5,658,994. The invention is not restricted to the biphenyl derivative but may be applied to any polyethynyl functionalized aromatic di-or poly-ol mercaptan-amine etc. The functionalized porogen can be mixed in solution with any polymers prepared as described above with thermosetting material prior to and after B-staging the resin. The only requirement is that the thermosetting reaction must be significantly advanced prior to the final decomposition of the porogen. Since the later occurs above 300� C. and often above 350� C. this is not viewed as a significant limitation.
Although this invention has been described with respect to specific embodiments, the details thereof are not to be construed as limitations for it will be apparent that various embodiments, changes, and modifications may be resorted to without departing from the spirit and scope thereof and it is understood that such equivalent embodiments are intended to be included within the scope of this invention.
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text:
Reviews for Dodge Stratus years:
Owners' Reviews
1998 Dodge Stratus Reviews and Owner Comments
8 ReviewsWrite Your Review
Overall Score (8 reviews)
1998 Dodge StratusRonnzo, Viola, AR, November 12, 2011 12:47217000 miles.This car has been a jewell!!! It had 60,000 when I bought it. The A/C pump went at 15000. Timing belt had never been replaced till 216000. Brakes, oil, lube, just regular maintainance. 32mpg on the hiway. The fan control switch only works on hi but for the miles, it's always been on. 2 years old when I bought it. You couldn't give me my money back for it now. I'll have it resprayed and completelly gone thru in the spring. Hoping for another quarter million miles. I add Dura Lube every 20,000 miles. No oil use between changes. I bought it 9-11-01, the day the towers went down. RonnzoRookie
1998 Dodge Stratusmanton4321, Northville, MI, February 22, 2011 06:54Knew original owner since they bought it new, I bought from them at 10 years old with low miles. Generally do not like Chrysler products, quality not that good but this car is ok for the $. Car is peppy, good gas mileage, cheap transportation. Body, rocker panels, rust pretty bad, keep clean and in garage to help reduce. Trans is a problem, rebuilding it is likely (this one done at 30,000out of warranty, if I had to pay the $2000 for the rebuild I would have been furious). Likely to leak engine oil when older from gaskets/seals/etc. Again, if you can buy one with lower miles, they are cheap used, get good mileage, and if you get the larger 4cyl engine it is fairly peppy.Rookie
1998 Dodge StratusVisitor, Brockway, PA, September 13, 2010 09:19havent had any problem with this vehicle except for the normal wear and tear
1998 Dodge StratusVisitor, San Juan, PR, May 08, 2010 04:09I got my car in 2005 it had about 90,ooo miles on it .Its been preetty realiable,besides the fact the brakes skweek even thou the pads are fine.I also have a problem with the tranny shifting roughly at 35 to 40 , during eccleration.Does anyone have any advice . Thank you
1998 Dodge Stratusrayray0850, Beverly Hills, CA, April 03, 2010 18:31my car has 252000 and still runs strongEnthusiast
1998 Dodge Stratustipple_1999, Apple Creek, OH, January 29, 2010 04:19I bought this car from a friend and it was great for the first month. it had 105,xxx miles when i purchased and within a month the fule pump went out and left me stranded. Then a few months later I had to replace all the bearings and tie rod ends. A week after that the piston rod started knocking and then a massive transmission leak! It always shifted bad and felt like it was always in second gear. Horrible turning radius for a small car and very little power. The body is completely shot due to rust and the suspention is rough. These cars are money pits and I have always kept up on regular oil changes/tune ups. They are known to throw a rod or the trani's go before they hit 150,000. I guess Im just used to my hondas, but this car is a nightmare!Enthusiast
1998 Dodge Stratusthe_shnook, Fort Worth, TX, October 21, 2009 21:03I have had this car for awhile now. Purchased used, 89K, and it seems to be a decent car for what its worth. It sometimes has a slightly rough gear shifting, and I need to replace 2 motor mounts, which could definitely contribute to this. But, other than that, I like it. Would consider re-buying.Enthusiast
1998 Dodge StratusSEXYCK, Lakewood, WA, June 07, 2009 22:43I bought this car 3 years ago. It ran pretty good up until the past year. I always do tune ups and my oil changes. It has only 70,000 miles on it and its had a major oil leak from head gasket, steering arm, tiers, ball joints have all had to be replaced. The brakes suck I've had them done 4 times. The car is as loud as a truck, the heater makes a whistling sound when on, loses power, and when it rains I get big puddles of water on the passenger floors front and back and my windshield sealing is perfect, and the list goes on. What the hell I swear everyday its something else. I would not recommend this vehicle to nobody.Rookie


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Adele has hit back at critics of her weight saying that she would only start losing weight if it interfered with her naughty time or health.
Adele is a size 14-16. Copyright: [wenn]
Speaking in her new tell all autobiography the new mum says how comments that you would think upset her just don't, and that she is perfectly happy with her shape.
Adele says: "I read a comment on YouTube that I thought would upset me — 'Test pilot for pies' — but I've always been fine with it."
[Related story: Adele features in Olympics Games opening ceremony]
[Related story: Adele is pregnant!]
"I would only lose weight if it affected my health or sex life, which it doesn't."
Earlier this year designer and fashion type, Karl Lagerfeld criticised Adele, saying: "She is a little too fat, but she has a beautiful face and a divine voice."
Adele has no plans on losing weight. Copyright: [Getty]
Our jaws pretty much dropped to the floor at this point.
Adele is a healthy size 14 to 16, which just so happens to be what the majority of women in the UK are also.
Meaning Adele is as pretty much as close to a normal woman as celeb land gets.
The singer rarely gives interviews so it was a bit of a treat to hear this all from the lady herself, and we can't wait to get our hands on the book itself.
Adele: The Biography' is out on sale now.


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SCAC announces Spring 2014 Student-Athlete Academic Honor Roll June 23, 2014 LAWRENCEVILLE, Ga. - The Southern Collegiate Athletic Conference (SCAC) announced its Student-Athlete Academic Honor Roll today for the 2014 spring term and 607 student-athletes made the list. Since its inception in 1997 just over 22,000 male and female student-athletes have been recognized for their contributions in the classroom. [read more]
Colorado College's Harris; Dallas' Jablonsky Selected SCAC Character & Community Student-Athletes of the Week May 23, 2014 LAWRENCEVILLE, Ga. -- Will Harris of Colorado College and Christine Jablonsky of the University of Dallas have been selected as the SCAC Male and Female Character & Community Student-Athletes of the Week, respectively, for the week ending Sunday, May 18. [read more]
Colorado College's Kreitler Earns USILA All-American Honors May 21, 2014 PERRY, N.Y. - Senior Jack Kreitler of the Colorado College men's lacrosse team was named to the 2014 United States Intercollegiate Lacrosse Association All-American Team on Wednesday afternoon. [read more]
SCAC Announces 2014 Spring All-Sportsmanship Teams May 16, 2014 LAWRENCEVILLE, Ga. - The Southern Collegiate Athletic Conference (SCAC) today announced its sixth annual spring All-Sportsmanship teams. A total of xx players were selected to the 2014 squad in the sports of baseball, men's golf, women's golf, men's lacrosse, softball, men's tennis, women's tennis, men's track & field and women's track & field. [read more]
Order Exclusive SCAC Spring Championship Winners Gear May 9, 2014 LAWRENCEVILLE, Ga. - Courtesy of a partnership with Advanced-Online, SCAC fans now have a chance to purchase exclusive championship winners gear honoring each of the league's nine spring sports champions. [read more]
/images/logos/scac_academic_honor_roll660.jpg?max_width=900&max_height=448 /awardsHonors/character_community/2013_2014/athletes_of_the_week/2013_14cc_week20.jpg?max_width=900&max_height=448 /images/mlax/kreitlerUSILA.jpg?max_width=900&max_height=448 /images/logos/scac_all_sportsmanship660x3.jpg?max_width=900&max_height=448 /images/2014springchamps_logos.jpg?max_width=900&max_height=448
2014 SCAC Men's Lacrosse Standings
|Colorado Col.
|Southwestern (Tex.)
|Centenary (LA)


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Balboa Park EIR offers 21 new choices
All alternatives would clear some cars, parking out of center but all have downsides, analysis says
Sought by the Save Our Heritage Organisation, an opponent of the Jacobs plan, the order by Superior Court Judge Judith F. Hayes said state environment law does not permit the city to agree with a development prior to approval of the environmental impact report. Hayes had signaled her intentions in a preliminary ruling last month.
Jacobs' committee issued a statement that despite the ruling, the environmental report was prepared and is now available.
"The City Council will decide whether to approve the project proposed by the Plaza de Panama Committee, an alternative to the project or no project at all."
Jacobs has previously said that he would not financially support an alternative unless it met most or all of his objectives.
Critics have said there are other ways to achieve his main goals of reducing cars and parking with his financial backing. But no one has stepped forward to replace Jacobs' role.


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Two Tier Boca Hexagon Garden Fountain on Pool
Create a setting in your garden with this unique two tiered Boca Hexagon fountain on large pool for a fantastic water display. Enjoy the soft shimmer and sensuous tone of the splashing water as this two tiered Boca hexagon water fountain takes its place as a magnificent centerpiece of your garden.
Price: $1,193.40
Joli Square Modern Garden Fountain
Enjoy the noise of this outdoor fountain and view the style from far away of this modern square shaped Joli garden fountain. You can turn the water on high or low, whatever best suits you. Another original piece in this collection, the Joli gives great water flow when adding river rock on the top of the piece.
Price: $1,090.00
36" Lady Justice Sculpture
The Lady Justice statue ranks as one of the most well known statues in the world. The statue dates it origins from ancient Roman times as the lady represented is Themis, the goddess of justice and law. Well known for her clear sightedness, she typically holds a sword in one hand and scales in the other.
Price: $295.00
Rottweiler Dog Sculpture Life-size
Our Rottweiler is a life-size replica of a garden cement statue is a large-scale sculpture for sale at a affordable price. Wonderful displayed at your entryway or purchase a pair to flank your doorway. This sculpture is hand painted in a detailed stain to bring to life this wonderful breed of dog.
Price: $636.80
Verona Straight Garden Bench 55.5" Long
This massive, heavyweight Verona straight bench held by two majestic decorative bases could easily be the focus of your garden. Reminiscent of a Parisian park or a grand European estate it will be your favorite place for outdoor entertaining, though it's generous enough to seat two .
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Grecian Woman Plumbed Rebecca Garden Statue
This is the water feature of Rebecca and has two ways for for water to flow from the top of the urn on her shoulder to the other vase she holds in her hand. Has a clamp to turn either one on or off depending how you wish to have the water flow or just leave them both on for a sympathy of water flow. The tubing size is 1/2 in 2 places.
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Tranquility Fountain 49.25" High
This show stopper fountain which is four tiered tranquility on modern pedestal is poured and finished with pride by using Old World techniques. Our fountain are the most meticulously crafted water garden fountain made in the world. Ready to install with easy-to-follow instructions, this heavyweight fountain is engineered for proper water flow with an indoor/outdoor UL-listed pump that uses normal household current. This fountain will take its place as a magnificent garden focal centerpiece in your garden and will be enjoyed for years to come.
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Fallen Soldier War Memorial Sculpture
New fallen soldier War Memorial for Veterans memorial. This soldier knees down with rifle and helmet used by soldiers to memorialize and remember fallen comrades in arms.
Price: $11,900.00
Blessed Mother Mary Garden Statue
Blessed Mother Mary Sculpture 25" High-Hand Painted in traditional colors. She is made of cast stone and made to withstand the elements, you will not be disappointed should you purchase her for yourself or as a gift. The Statue is 10.5" wide x 25" high. Base is "7 wide x 6.5" depths. This wonderful Madonna Statue is made in the USA.
Price: $253.00
Leonidas King of Sparta Sculpture Large
Leonidas Spartan statue replica of the was a fifth century Spartan military king whose stand against the invading Persian army at the pass of Thermopylae in central Greece is one of the enduring tales of Greek heroism, invoked throughout Western history as the epitome of bravery exhibited against overwhelming odds.
Price: $249.00
Lion Face Sculptural Wall Plaque Statue
This wonderful Lion head wall plaque can come with a 1/2 hole drilled as a water feature. This one is sold unpiped but for $15.00 more we can drill a 1/2" hole for you. Please call us toll free at 877-675-2634 to have piped. Easy to hang and makes a wonderful sculptural decorative lion wall hanging display.
Price: $135.00
Nostalgic Golfer Set Man & Woman Sculptures
Here a set of man and woman golfers who love the game of golf, these large scale nostalgic golfers are monumental garden sculptures. Made of durable cast stone and comes with an array of color choices.
Price: $672.00
Biscayne Urn Fountain with Light & Black Pebbles
Biscayne Urn Fountain with Light a high-end cast stone, style is contemporary to traditional! Biscayne Urn Fountain with Light comes with polished black pebble stones to enhance the sleek elegant of the classical to contemporary style fountain.
Price: $879.00
Blessed Mother Mary Life-size on Pedestal
Blessed Mother Mary Life-size With Pedestal - Mary stands with her arms stretched out blessing us as she stands over the serpent at her feet. Cast in quality Cast Stone by our artisans in the USA, our awe-inspiring seven-foot tall work is hand-painted with exquisite detail, a wonderful gift to yourself or a loved one or for your Memorial Garden.
Price: $2,009.60
The Kiss By August Rodin Marble Statue
The Kiss By August Rodin Statue is one of Rodin's most famous sculptures. This wonderful sculpture is made of alabaster dust mixed with a durable binding compound, each detail is finished with care by the artisans of Italy's Egregia Workshop. Mounted on a solid alabaster base.
Price: $122.00
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Get ready for another awesome Symphony of Science video! Yes, that's right, more auto-tuned scientists with cool music and video. (See previous videos: A Glorious Dawn, Our Place in the Cosmos, and We Are All Connected.)
In this installment, it's primarily David Attenborough and Carl Sagan, though about two-thirds of the way in, Jane Goodall makes a splendid appearance. Goodall is an awesome speaker -- if you ever have a chance to see her in person, please do so. I saw her at the United Nations in... READ ON
Here's a sweet song to end a long week. In 1979, Jim Henson (as Kermit the Frog) performed "The Rainbow Connection" in The Muppet Movie. The song reached #25 on the Billboard Hot 100 in November 1979, and remained in the Top 40 for seven weeks -- not too bad for a song sung by a puppet. (Sorry: muppet.) Writers Kenny Ascher and Paul Williams were nominated for an Oscar and a Golden Globe for the song, but lost both to rival song "It Goes Like It Goes" from the movie Norma Rae. Remember Norma Rae? Me... READ ON
In 1979, Philip Glass composed some music for Sesame Street; the music was used to back geometric animations showing how a simple circle could be subdivided and repeated to make more complex shapes and patterns (in much the same way that Glass's music uses patterns, repetition, and subtle alteration to create melody and complexity). It's hard to find the resulting work (entitled "Geometry of Circles") that was shown on Sesame Street three decades ago, though it has been re-aired a few times over the years... READ ON
So yesterday I posted The Late Movies: Rock On, Wesley Willis, featuring some of Wesley Willis's bizarre-but-awesome music. But the real treat comes today, when you can watch an entire documentary about Wesley Willis online -- this week only. (Later, you'll have to buy the DVD.) The new documentary is called Wesley Willis's Joy Rides, and I think you should watch it.
Surprise: Wesley Willis was a skilled visual artist. His drawings, featured in this film, have a powerful architectural style,... READ ON
"I make music, I sing my ass off." With these words, Wesley Willis opens a short documentary shown below. Willis was a bizarre musician -- a chronic schizophrenic, his music was crude and thus considered "punk," but in a way no one had heard before. Willis's songs generally consisted of spoken-word poetry over a keyboard's built-in "demo" track, with (generally off-key) choruses sung every now and then.
Because Willis was mentally ill, it was hard to be sure how to take him or his music -- was it... READ ON
Here's a little Friday silliness for you. Jonathan Coulton sings "Skullcrusher Mountain," a love song sung from the perspective of an evil genius to his muse/obsessive crush. Representative lyrics:
I made this half-pony/half-monkey monster to please you
But I get the feeling that you don't like it
What's with all the screaming?
You like monkeys, you like ponies...
Maybe you don't like monsters so much.
Maybe I used too many monkeys?
Isn't it enough to know that I ruined a pony making a gift... READ ON
Remember LPs? Well, I sure do -- over the past week I've been working on digitizing some LPs that haven't been (and perhaps never will be) released on CD. Below are two videos showing how records are made -- first, the laquer Master Disc, then the vinyl copies you and I buy at the store. I believe these videos are from the Canadian documentary series How It's Made (the other items from the same episode included "bagels" and "chains") shown on the Discovery Channel in most markets.
The Laquer Master... READ ON
Okay, this is just silly. I figured you might want to let off some steam before Thanksgiving. What follows are six American Budget Shopping Network clips. This "network" is basically comedian Andy Daly (best known for his part on the HBO show Eastbound and Down) trying to run a TV shopping show, and having a great time. Enjoy.
Fire & Knives
"We can't sell you fire, I don't know how we'd ship it! But we can sell you knives, and that's what we're doing right here!"
The American Budget Network... READ ON
On June 12, 2009, vocalist Bobby McFerrin participated in a panel discussion called "Notes & Neurons: In Search of a Common Chorus" at the World Science Festival. As part of the discussion, he performed an amazing feat -- he trained an audience, in mere seconds, to become a sort of human keyboard. In the video below, McFerrin points to the floor, sings a note, then makes the audience sing it. He steps to one side and sings the next note, and again, the audience sings it. The audience proceeds to sing... READ ON
Neurologist Oliver Sacks prefers Bach to Beethoven -- I'm just the opposite. But enough about me, let's talk Sacks. Dr. Sacks volunteered to have his brain scanned while listening to each composer's music. What's interesting is that listening to Bach has a visible effect on his brain, which isn't present when listening to Beethoven -- more regions of the brain "light up" to demonstrate his engagement with the Bach. What's particularly remarkable is that even when Sacks doesn't consciously know which... READ ON
In a 1917 letter to Winston Churchill, Admiral John Fisher used the phrase "O.M.G."


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Leon Williams
Leon Williams discusses return to team
Dec/10/12 08:47 AM
The Kansas City Chiefs signed linebacker Leon Williams to the team on Thursday after placing defensive end Allen Bailey on the injured reserve. The Chiefs originally signed Williams in the preseason, but the linebacker did not make the final roster cut.
Williams talked to the media on Thursday about his return to Kansas City. A reporter asked Williams how he had been spending his time since being cut, and Williams responded:
I've been home. I've been in New York, staying in shape, talking to teams, staying in touch with my agent - telling me to stay in shape and everything."
The Chiefs current situation is not a normal situation for any football team, and Williams is now a part of it. The linebacker discussed what it was like observing the situation as an outsider:
"It was hard watching. I kept up with everything and I know these guys out here work very hard to compete. And it's a hard league to compete in, but you go in every day and you give your best."
The media also asked Williams about his relationship with Jovan Belcher. Even though Williams only made a brief stop in Kansas City, he remembered Belcher:
"Oh yeah, I knew Jovan. He's a New York guy too. Me and him clicked really fast when I came here."
Williams has been in the NFL since 2006, and played under Romeo Crennel in Cleveland.
Chiefs Sign proCane LB Leon Williams
Dec/07/12 09:12 AM
The Kansas City Chiefs defensive line lost another young body this season with the news that Allen Bailey was being placed on Injured Reserve in Week 14. This means that the former third round choice will be out for the rest of the 2012 season. In his place, the team has signed linebacker Leon Williams to the team.
As for Williams, he is a familiar face for Romeo Crennel given his time with the Cleveland Browns from 2006-08. The 6'3 linebacker also spent the 2010 season with the Dallas Cowboys. If he sounds familiar, it's because he spent training camp with the Chiefs this summer before being cut.
Leon Williams Cut By Chiefs
Sep/03/12 10:09 PM
proCane LB Leon Williams was cut by the Chiefs on Friday. Williams was entering his 7th NFL season after being drafted in 4th round by the Cleveland Browns in 2006.
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Guillain-barre syndrome
Guillain-barre syndrome --> acute idiopathic polyneuritis
(Science: neurology, syndrome) acute infective polyneuritis that results in a form of peripheral neuropathy with temporary loss of movement and sensation due to inflammation of multiple nerves and loss of myelin.
The exact cause is unknown but has been associated with an abnormal immune response to viral infection, particularly cytomegalovirus infection, in which there is cell-mediated immunity to a component of myelin. The disease may be autoimmune in origin and complete recovery can take up to eight months.
Synonym: guillain-barre syndrome
Please contribute to this project, if you have more information about this term feel free to edit this page
This page was last modified on 13 November 2006, at 02:16. This page has been accessed 1,096 times.
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