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You are responsible for effort, not for the result
Every new reality is crafted by investing energy/effort. Not over-effort or strain, but just the right amount of investment. Put energy into something and you get a result back. Effort invested can take many shapes – gathering resources, studying, manual work, time, concentration, talk, thought, acting. The nugget of wisdom I wish to teach today is that you are responsible for the effort, not for the result.
What does that mean and why do I say it?
It's so that you focus attention on what you can control, rather than what you have no control of. You have full creative control of your efforts. That is under your jurisdiction. The statement helps you stop wasting your time with factors outside of your conscious and deliberate control.
Furthermore, the connection between effort and result is not always apparent. You may have invested into A but received back from B.. You may have worked many, many years on one thing, but reap rewards in an entirely different area. This is where it gets metaphysical: Energy is not linear and sometimes your investment into A gets you back rewards in B, C or E!
The fallacy is to think that investing all of those hard efforts into A was for nothing. Metaphysics relates to the invisible forces shaping your reality and it pays off to know some metaphysics/spiritual-science if you wish to make sense of life. That means our efforts will always be rewarded – without exception, ever! – but that sometimes the reward comes from somewhere else than you think it "should".
Case in point: I have been writing books for many years, but these books don't really make any money for me – at least not enough to survive. However, I am making plenty of money elsewhere. So normal thinking would say: "Then quit writing books and instead do more of what works!". But no, that is not how reality works. Would I quit following my Bliss by stopping to write books, the other sources of income – even if they have nothing to do with my books – would also decline. Why? Because joy generates energy and energy generates abundance. Optimism is not the result of abundance, abundance is the result of optimism. Its all an "energy thing".
"You are responsible for effort, not for result" also releases you from the burden of being responsible for others. You can give your best efforts to others – if they don't return the favor, that is not your fault. You will be rewarded from elsewhere.
"You are responsible for effort, not for result" teaches you the art of "letting go" – you do not "let go" of the effort, you "let go" of exaggerated attachment to the result, let go of the "how, when and where" of its manifestation and instead focus on what can be orchestrated today.


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IzzyRate Izzy: Do you like this name?
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Izzy meaning and name origin
Izzy \i(z)-zy\ as a girl's name (also used as boy's name Izzy), has the meaning "God is my oath" and is a variant of Isabel (Hebrew): Spanish variant of Elizabeth.
Izzy has 4 variant forms: Isa, Issie, Issy, Izzie.
Popularity of Izzy
Izzy is not a popular first name for females and an equally uncommon surname or last name for all people (2000 U.S. Census).
Displayed below is the baby names popularity of Izzy name for girls (2012 statistics). Compare Izzy with its variant forms and related girl baby names.
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text:
Andante – [2'46]
Allegro vivace [5'14]
Adagio – Tempo d'andante – [3'15]
Allegro vivace [4'30]
Other recordings available for download
|Melvyn Tan (fortepiano), Anthony Pleeth (cello)
|Steven Isserlis (cello), Robert Levin (fortepiano)
The two Sonatas of Op 102, which can perhaps be regarded as the first works of Beethoven's so-called 'late' period, were composed in 1815, the first completed, according to the wording on the manuscript, 'towards the end of July', and the second at the 'beginning of August'. The inspiration behind them came from the cellist Josef Linke, another of Beethoven's devoted musicians. Linke was a member of the house string quartet of Prince Rasumovsky, the former Russian Ambassador in Vienna, when at the end of December 1814 the Prince's palace, laid out for an enormous royal banquet, burned to the ground. The quartet had to be disbanded and Linke was taken on by the Erdödys – Countess Anne Marie (to whom the Op 102 Sonatas are dedicated) and Count Peter, with whom he spent the summer at their retreat in Jedlersee am Marchfelde, east of Vienna. Beethoven, an affectionate friend of the couple, took every opportunity to escape from the city to visit them and his favourite cellist. A letter from Beethoven to the Countess, promising to visit her at Jedlersee, makes play on Linke's name (meaning 'left' in German):
Let the violoncello apply himself, starting on the left bank of the Danube he is to play until everyone has crossed from the right bank of the Danube. What's more, I am confident of the route over the Danube I have already set; with courage one may gain any objective if righteous.
The C major Sonata, despite the development by this stage of a piano closer to the more sonorous instrument of today, again eschews a full slow movement, but Beethoven this time preludes each of the two movements with a slow introduction. Of these the Andante is the more substantial, opening, rather in the manner of Op 69, with the cello alone, followed by a complementary phrase on the piano, both extended gently and rhapsodically until interrupted by the fortissimo arrival of the first Allegro vivace, which is actually in A minor. The argument is far more concentrated than in the earlier sonatas – Beethoven had by now moved away from the expansiveness of his middle period. The second movement opens with a short improvisatory Adagio which, before making way for the main part of the movement, allows a brief recall of the first movement's Andante material. The finale proper is a terse sonata-form movement dominated by the short rising figure of the first few bars (perhaps derived from the theme of the Andante) and rapid semiquaver movement. But twice this movement is interrupted by pauses and still, open fifths on cello. At the end the tension winds down before the tempo is picked up again for the last couple of bars.
from notes by Matthew Rye © 1996
Other albums featuring this work
Beethoven: Cello Sonatas
Studio Master: CDA67981/2 2CDs Best of 2014 Studio Master FLAC & ALAC downloads available
Beethoven: Complete Cello Music
CDD22004 2CDs Dyad (2 for the price of 1) — Archive Service


text: I would think that the attraction for the latest and greatest is something that has always been present. The girls in New York at the turn of the century and before were always clamoring for the latest fashions from Paris. The girls on the plains were clamoring for the latest fashions from New York. I think it is just human nature to want something different/better/shinier/newer. I would think it would be the same for food...however, there is only so much you can do with chicken or pigs...I think I'll cut it this way instead of that way. I would think that someone bringing in a new product such as tomatoes would first be eyed cautiously but eventually it would be embraced. That being said, when I lived in Germany they still shopped the old fashioned way for the most part. They would shop for a day or two at a time so they would have the freshest products. The town we lived in had a grocery store and some people shopped there but you would also see people making the rounds down on main street. They would go to the vegetable store, the meat store and the bakery. On the weekends, they would sometimes go to the bigger markets in the next town over. However, it has a whole culture to support that kind of thing. Women receive kindergeld when they have children to stay at home for the first few years. That gives them the time to spend shopping that a working mom in the States wouldn't have. Also, the dwellings are smaller and the appliances are smaller. They can't store a week's worth of groceries in their refrigerator like we do in the States. That is part of the reason we were told that it was impolite to just "show up" at someone's house. You needed to give them the opportunity to entertain you and that means going to the store to get food to offer you. Many of the businesses have long lunch hours (2 or more hours) when they shut down to allow people to go do their shopping. I've noticed that there really are people in the world who don't like change. I remember reading about it in history books about how people were suspicious of change and saw it as bad. As an adult, I've met people who are resistant to change and always have a doom and gloom response to it. It has always surprised me when I run into that attitude but it had to have existed as well. However, there had to have been more people who embraced change or else we never would have made it out of the dark ages. Just my random thoughts on a stormy yucky day while trying to avoid doing real work, Ysabeau On 3/30/07, Anne-Marie Rousseau <dailleurs at liripipe.com> wrote: > > > > On Fri Mar 30 10:15 , "Martha Oser" sent: > > > bring things back to topic, how do you think this mindset applies to our > medieval game? did joe- > medieval-dude trust his local butcher more than the big shiney guy from > out of town? or was the > appeal of the new and shiney as appealing to him as it is to most of the > folks nowadays? > > > --Anne-Marie, who is eco-groovy and socially hip in her own slightly geeky > way :) > _______________________________________________ > Sca-cooks mailing list > Sca-cooks at lists.ansteorra.org > http://lists.ansteorra.org/listinfo.cgi/sca-cooks-ansteorra.org >


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Heat Comes to Terms With Free Agent Swingman Mike Miller
The Miami Heat has taken another major step forward in its attempt to build out its championship-caliber roster, agreeing to a five-year, $29 million contract with Wizards free agent swingman Mike Miller.
Miller, 30, is one of only two NBA players (Steve Nash) who shot better than 50% from the field, 40% from beyond the arc and 80% from the line while averaging at least 30 minutes of playing time this past season. He has quietly developed into one of the most versatile and efficient offensive players in the game today. Miller is a multi-faceted offense threat: he can shoot, he can drive, he can pass and he can rebound. He often plays more than one position during the course of a game, including a point-forward type role in some stretches. Miller is best suited as a complementary piece, where his overall floor game can benefit his team greatest.
Miller, perhaps the game's ultimate floor-spacing wing player, figures to get big minutes alongside LeBron James, Dwyane Wade, Chris Bosh and an as-yet undetermined center. If the Heat elect for a small-ball approach, Bosh could slide over to center and James to power forward, allowing Mario Chalmers onto the floor at the point. That could produce some of the greatest offensive basketball this game has ever seen.
Wade and James need little else beyond just the floor space with which to maneuver. Chalmers, Miller and Bosh could provide them just that. Simply by camping out along the perimeter, these players present their defenders with the following dilemma: should they sag into the paint and prevent Wade or James' penetration and risk a kickout, or should they stick to their men and leave the driving player unattended?
That's a tricky proposition made nearly impossible by the fact that James and Wade are perhaps the two best finishers at the rim in the game, and Miller and Bosh are two of the best perimeter jump shooters in the league. Chalmers, despite his regression last season, is advancing in his role as a three-point threat and could be in line for a breakout season.
Miller was reportedly seeking a multi-year contract above the mid-level exception valued at $5.8 million a year for up to five seasons. The 6'8″ ten-year veteran was being courted by several teams, including the Los Angeles Clippers and New York Knicks, each of which stood to offer him substantially more money. Miller now becomes the fourth Heat player who has taken fewer total dollars in exchange for the prospect of winning multiple NBA titles.
The contract status of Wade, James and Bosh can now be finalized. Miller's contract will start at $5.0 million, with 8.0% annual non-compounding raises. That would leave enough room under the $58.044 million salary cap for each member of the trifecta to sign a contract with a 2010-11 starting salary of $15,423,364, a $1,145,544 discount from the max.
After they do, Miami will have five players under contract – Wade, Miller, James, Bosh and Chalmers – and no additional room under the salary cap with which to operate.
A Miami Heat dynasty is currently in formation.


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November 20, 2014
Posted: Friday, March 15, 2013 -- 5:01 a.m.
MADISON, Wis. (AP) -- Here's a sure sign of spring -- Frank Lloyd Wright's Taliesin is set to re-open in a few weeks.
The architect's private 600-acre estate just outside Spring Green will open for pre-season tours on April 6. The two-hour tours include a shuttle bus ride past a number of structures and a walking tour through Taliesin's courtyards, orchard, water garden and Wright's newly restored personal studio.
The tours will run on Saturdays and Sundays in April at 10:30 a.m. and 1:30 p.m. Tickets cost $20 for adults and $10 for children under 12.
Full tours will begin on May 1.
Copyright: Associated Press 2013
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Spears is all suited up at the last rehearsal before her Vegas show opening. Plus: Joe Manganiello, Kim & Kanye & more!
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Trombata Sotto La doccia
Nicole Graves Gets Fucked In The Bath
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dick hungry japanese woman - SALLY YOSHINO
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Upper: Leather Textile, Lining: Textile, Outsole: Rubber Phylon
November 20, 2014
Well made shoe's that are comfortable and good support in them
November 09, 2014
Like walking on air
November 06, 2014
Not the waterproof shoe i was looking for but the assistant was helpful in suggesting alternatives
November 04, 2014
These were really good value for money as not only are they sturdy but are waterproof.
November 03, 2014
Shoes came up to my expectations, am considering buying a second pair now for when thee wear out.
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I bought this dog pendant for my sister for her birthday because she is a Veterinarian and I thought she would just love a pendant w/ a puppy and in black diamonds to boot! I knew there would be very small diamonds but the pendant itself is very very tiny. This would really be better for a child not an adult.
I ordered a black diamond puppy necklace and also a white diamond puppy necklace and I absolutely love them both!!!!!!
I dont find it appealing in actual. It is not too visible when I wear it.
I love my new little "black doggie" necklace! The pose of the charm is delightful, and I have received many "Awwww" comments as I have worn the necklace!
Cute necklace purchased for our granddaughter. Was aware that it was small but, didn't realize how really tiny it was.
I have a black Great Dane and loved the looks of this. It doesnt turn on the neck when you wear it, it lays flat. Just the perfect size
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text:
A central element of good governance is the responsiveness of policies and public institutions to the needs of all citizens. Policies and institutions must represent the interests of women and men and promote equal access to resources, rights, and voice.
Economic Policy and Gender: Public Expenditure
Economic Policy and Gender: Public Sector Downsizing
Governance & Gender Equality Briefing Notes
Downsizing has different impacts on men and women. Negative distributional consequences can be minimized using The Downsizing Options Simulation Exercise (DOSE) developed by the World Bank.


text:
Florida Championship Wrestling 89
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Past Halfway
Learning to break kayfabe
Join Date: Aug 2012
Posts: 17
Re: Florida Championship Wrestling 89
Gang, Khan and Humperdink leave and we go to the back with Larry Zbyszko talking to the camera. Larry says he has big plans and defending the AWA World title tonight against Barry Windham is just the start.
Back to the ring and its the first semifinal match in the Florida heavyweight title tournament. Dick Slater comes out to a big roar from the sold out crowd and Gordon explains how the title was stolen from him by his opponent tonight, Eddie Gilbert, with the help of a chain.
Gilbert is out next with Hot Stuff blaring throughout the stadium to heavy boos. Missy Hyatt is not with him and Gordon is not surprised after Gilbert pushed her down on this mornings FCW television program.
Start of the match and Gilbert goes after Slater quickly instead of his usual stalling but it backfires. Slater blocks a wild punch and takes the fight outside the ring. The wrestlers battle at ringside and Eddie nearly gets a cheap win, thrown back into the ring at the 8-count before Slater jumps back in. Slater continues to brawl, just pounding the hated Gilbert, until an eye rake gives Gilbert the advantage. Standing drop kick gets a few cheers from the crowd but most are still really booing Gilbert hard.
Gilbert has slowed down the pace after his aggressive start and its paid off. He whips Slater into the ropes, setting him up for a hot shot, but Slater forearms him in the head after the catch and both wrestlers fly over the top. Referee Bill Alfonso rules neither man meant for it to happen and begins his 10-count, while down to the ring area runs (to the best of her ability) Missy Hyatt.
Hyatt tells Gilbert shes sorry for everything and Gilbert is more concerned about getting into the ring. He wants nothing to do with her and again pushes her down! Slaters first instinct is to see if shes okay and while he does so, Gilbert gets back into the ring while Slater is counted out. Slater gets on the mic and tells Gilbert he knew he was a low-life but didnt know he was this low. Gilbert shrugs and Missy starts to walk with him and he orders her to get away, and by this time Slater is gone too leaving her alone to cry in the ring.
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Kona Grill - Richmond
- Address:
11221 West Broad Street
Glen Allen, VA 23060Neighborhood:
- Cuisine:
Contemporary AmericanPrice: $30 and under
Kona Grill - Richmond
- Dining Style: Casual Elegant
- Website: http://www.konagrill.com/
- Phone: (804) 364-5660
- Hours of Operation:
Lunch: Daily: 11:00am - 4:00pm Dinner: Sunday - Thursday: 4:00pm - 11:00pm, Friday - Saturday: 4:00pm - 12:00am
- Payment Options: AMEX,Diners Club,Discover,MasterCard,Visa
- Cuisine: Sushi, Contemporary American
- Executive Chef: Brian Janowak
- Dress Code: Casual Dress
- Accepts Walk-Ins: Yes
- Additional Details: Bar Dining, Beer, Full Bar, Happy Hour, Late Night, Patio/Outdoor Dining, Takeout, Wheelchair Access, Wine
- Catering: Please call for details.
A word from Kona Grill - Richmond
Kona Grill offers diners freshly prepared food, personalized service, and a warm contemporary ambiance that creates an exceptional, yet affordable dining experience. The diverse menu includes a wide variety of mainstream American dishes, as well as a variety of entrees and appetizers with an international influence. Specialties include Baked Sea Bass in a miso-sake marinade, Filets, Almond Crusted Pork Tenderloin, and Kona Grill's signature dish - Macadamia Nut Chicken. Kona Grill also features an award-winning sushi menu containing all of the traditional favorites plus several unique dishes created by talented sushi chefs.Continued
Foodspotting photosSee all photos
Awards voted by OpenTable diners
- Diners' Choice WinnerGreat for Lunch
- Diners' Choice WinnerVibrant Bar Scene
Kona Grill - Richmond - Best Restaurants in Richmond ›
Kona Grill - Richmond reviews from OpenTable diners
39 reviews since July 31, 2014
- Food4.3Service4.2
- Ambiance4.1Noise LevelModerate
good for groups (19)special occasion (17)neighborhood gem (14)great for lunch (11)fit for foodies (11)romantic (9)great for outdoor dining (8)hot spot (8)vibrant bar scene (8)late-night find (8)great for brunch (3)kid-friendly (2)notable wine list (1)scenic view (1)Show More
- so-soOpenTable Diner Since 2011Dined on 11/15/2014The food was great but the service was not so good this time.I would recommend this to a friend.
- Great food, service okOpenTable Diner Since 2009Dined on 11/1/2014Food was fantastic!! We got 3 different kinds of sushi. My kids got sushi kids meal and cheeseburger and were absolutely delighted in presentation! The bear made out of an orange was really nice touch. I think our waiter was overwhelmed! Had to wait 10 minutes for a drink refill. Had to wait for ketchup for my son's hamburger and ranch dressing for salad. Just very slow service!!Special Features:I would recommend this to a friend.
- great foodWayneDined on 10/31/2014Food is great. Sushi is standard pricing. Some entre's. A bit pricey but the food is excellentSpecial Features:I would recommend this to a friend.
- DiscriminateVIPDined on 10/28/2014Had wonderful evening with a fantastic waiter and food!Special Features:
- FranchinoDined on 10/25/2014I don't need to make any remark. It's a restaurant as many of them in the area,nothing that keep me to go back to it.Special Features:
- Was a surpriseRobinsReviewDined on 10/17/2014Great place for all kinds of food, including sushi!!! Pleased everyone at our table. Nice findSpecial Features:
- LuvKonaluvKonaDined on 10/9/2014Excellent food and atmosphere. The staff from door to table were extremely friendly and attentive. I am looking forward to my next visit.Special Features:I would recommend this to a friend.
- Great ServiceGoodtoeatDined on 9/27/2014I would recommend this restaurant to anyone as the food was great and the service was prompt.Special Features:I would recommend this to a friend.
- 10 out of 10!properfoodieDined on 9/26/2014Amazing experience! Kona was recommended to me by a friend who claimed it was "The best restaurant ever!". She was right! The food was superb, service was excellent, decor was intimate, and to top it all off the managers were walking around interacting with their guests. Our server seemed well pleased to be serving us and was always checking on us, even though it was VERY busy. Great place for any occasion! This was my first and wont be my last!Special Features:I would recommend this to a friend.
- Food is Good, Service is AverageOpenTable Diner Since 2014Dined on 9/20/2014The food was good but it was difficult to get the waitress's attention. The manager was very friendly and ended up taking care of us. Overall I would go back to this restaurant. Notes this establishment has a nice ambiance and you pay for it.Special Features:
- Enjoyable dinnersbcgraceDined on 9/20/2014Met 2 friends for a girls dinner and had a great time. At Kona Grill you can either eat light or go all out. They have gorgeous looking desserts too! I had to stop myself from getting the carrot cake but it looked amazing! Sushi is really good here!Special Features:
- Girl's Dinner Night was amazing!Twhite23Dined on 9/13/2014In a few weeks I will be getting married, so what better way to celebrate then to meeting my most favorite girl friends out for a dinner and drinks. We had a group of 7 people and our server handled us with ease. The food was amazing, there wasn't a complaint from anyone and the drinks came quickly. This was my first visit to Kona, but I will definitely be back!Special Features:I would recommend this to a friend.
- Decent, Pricey SushidcfoodieVIPDined on 9/10/2014The sashimi combo cost over $30 which I thought to be high, but I found its quality to be fine. The server was attentive.I would recommend this to a friend.
- OpenTable Diner Since 2013Dined on 8/14/2014Met friends for dinner. Great variety of entrees. Excellent service and food.Special Features:I would recommend this to a friend.
- The following 477 reviews are from the Kona Grill - Richmond reviews archive.
- OpenTable Diner Since 2010VIPDined on 6/20/2014Food was very good and service was great. Very noisy when we were there.Special Features:I would recommend this to a friend.
- Cool Asian FusionMarcelaDined on 6/3/2014Kona Grill has an interesting mix of styles on its menu; there's bound to be something to please everyone. I had the potstickers and the crunch crab roll. The potstickers were very good; delicate and flavorful, the perfect appetizer. The crunch crab roll is good, but not necessarily outstanding. The service was top notch though, and it was the service what brought a good dining experience up to a very good one.Special Features:
- Great food/server needs trainingshrimpgirlDined on 5/31/2014My salad was excellent and so was the sea bass. Our server was very nice, and I'll take a nice server, but inexperienced server over a rude one any day. However, I suggest that he could use a little more training. Most notably, he placed his hands on the table and sort of leaned on the table while he was talking with us. I think he was just a little nervous and inexperienced, but it was a little off-putting. However, he was just the right amount of "attentive" (not bothersome, and we didn't feel like we were wondering where he was). Also, my husband ordered the lobster/tuna flat bread as an entree (he asked if that was ok) - but it came as an appetizer. Also, he asked that the tuna be cooked through, but it came raw in the middle.Special Features:I would recommend this to a friend.
- It's a chainpreferhomegrownDined on 5/24/2014We've come here a few times; bar snacks are good, but, dinner menu is less than stellar. It's ordinary food in a good atmosphere.Special Features:
- good and fun atmosphereclinewaltDined on 5/11/2014The only negative was that the restaurant was out of salmon at 6:30 - this was the one dish I was certain one of my children would like...we made it work, but surprising to be out of salmon at 6:30...on Mother's Day.Special Features:I would recommend this to a friend.
- Kona is the name.LovefunDined on 5/11/2014I have been to Kona's before and as always I was not disappointed. Good food, great place to take a date.Special Features:I would recommend this to a friend.
- Gluten Friendly?LoudandaverageDined on 5/11/2014Even though there was a GF menu we were not certain about some foods and our waiter didn't really sense our concern. Family has Celiac disease, we are not fad dieters, so having a knowledgeable wait staff is essential. Also, the specialty sushi rolls were only average and the basic ones bland. We got seated right at the kitchen even though we had reservations and the place was 1/2 empty and it was LOUD. My family's first time there and they were not impressed. Sorry
- SandiSandiDined on 5/11/2014Impeccable service and food is second to none!!!. It is always abandoned total treat to come here!Special Features:I would recommend this to a friend.
- Surprisingly great for Kids tooLuvMyFamDined on 5/10/2014The food is really great with pricing make it easy to budget a meal or go all out! The kids menu has sushi as a choice, which my kids LOVED! And at $6 totally a place I'd bring the family back to again. Great atmosphere to look at but was loud ( they were packed and it has high ceilings). We look forward to coming again.Special Features:I would recommend this to a friend.
- Great SushiTravelingdinnersDined on 5/9/2014We go for the sushi. They have other great food on the menu as well. They have a lot of different Sushi rolls on the menu, maybe 30 different kinds. We usually order two Sushi rolls at a time and share them. Four Sushi rolls is about all we need. They have good wine on the wine list just not a lot of choices.Special Features:
- Great Place!!!LUVKONADined on 5/6/2014Food are awesome!! The place is clean the services are great.Special Features:I would recommend this to a friend.
- It could be the South...DieselDadsVIPDined on 5/6/2014I am sure that the bartender/server thought that he was doing a great job, however he didn't give me the feeling that he wanted me sitting at his bar. Perhaps it was the busy Happy Hour crowd, or the GM observing bar operations, but I was never notified that there were Happy Hour drink and food specials while other patrons who came to the bar after me were. Unfortunately, it was after I had already ordered my food. I've been to the Kona in Baltimore and I've felt much better, however here I recieved my food...edible as it may have been...and nothing else. No warm and fuzzy here.
- Great for girls night!OpenTable Diner Since 2014Dined on 4/25/2014A few girlfriends and myself went to Kona Grill on Friday night. We had great food and wine. We shared the potstickers for an appetizer which were delicious. The place was packed but service was still great. We all enjoyed our dinner as well. Kong Grill has a great happy hour (food and drink specials) but it is only allowed in the bar area which we did not sit at. We definitely will return (hopefully for happy hour next time)!Special Features:I would recommend this to a friend.
- Nice change of paseHelpinghandVAVIPDined on 4/25/2014The menu had items that were different. Soft shell sliders>... VERY Good. The sushi was just soso But would go back again. not just a burger and fry joint Very goodSpecial Features:
- SatisfiedSeeYouSoonDined on 4/24/2014Had a wonderful first experience! Will definitely return myself & recommended to others!!Special Features:I would recommend this to a friend.
- I love Kona!jessDined on 4/12/2014Everything was great! The service was awesome. We were celebrating my parents 40th wedding anniversary. Everyone had an awesome time!!!!Special Features:I would recommend this to a friend.
- loved itfliggityDined on 3/21/2014always go here for a special occasion. Great menu and amazing food. Great specialty drinks.Special Features:
- Almost always a good choiceOpenTable Diner Since 2012Dined on 3/2/2014Kona Grill is a fairly expensive but always delicious dining experience. I have been 5 times in the last year for various special occasions and with the exception of my most recent trip it was an excellent experience. Like any restaurant server quality can vary which led to a sub par experience in my last visit.Special Features:I would recommend this to a friend.
- Good Birthday CelebrationOpenTable Diner Since 2012Dined on 2/27/2014The only complaint I have is that Happy Hour is not offered to anyone seated in the dining room and that would cause me to go elsewhere during that time of the day. We had a party of 10 and it wouldn't have been easy to change tables. This is unfair to the dining room patrons. We spent a lot of money and should have been afforded the same specials no matter where seated.I would recommend this to a friend.
- Excellent Pan Asian - HawaiianjeannetteyvonneDined on 2/25/2014Kona grill has an awesome delicious menu......hard to choose so must return. The Pad Thai was wonderful and I had a chile lime shrimp salad with macadamia nuts terrific.........one had the pork sliders with sweet potato fries and loved that too..........we all shared the shrimp/chicken lettuce wraps and are really good ENJOY the décor and food; great place to eat and free parking garage behind if the lot is full YOU SHOULD GO..........Glen Allen/Short Pump areaSpecial Features:
- fantastic!amandaDined on 2/21/2014My husband & I had lunch with his parents & sister. It was delicious! No one had any complaints and our server was very knowledgable and gave great recommendations and we ordered his suggestions and were very happy with the selections. Seafood ceviche was over the top! Please make it permanent to your menu.Special Features:I would recommend this to a friend.
- loved itOpenTable Diner Since 2014Dined on 2/20/2014We really loved it ....the only thing I would have liked is to have known the prices when our server announced them yo us...otherwise I'm sure well be back.Special Features:
- Great!OpenTable Diner Since 2014Dined on 2/15/2014My girlfriend and I had a great time. Great server, and great food! Definitely will be back. :)Special Features:
- Ambiance and food is great !OpenTable Diner Since 2014Dined on 2/14/2014Liked the restaurant very much. Will definitely go there again.Special Features:
- Good night, but...MikeHDined on 2/14/2014Very nice restaurant with excellent food. Very impressed. Went on a busy night, and it was very noisy! Actual pain on the eardrums. Told the hostess, and we were reseated in the dining room. Much better, though still loud. Service was so-so, but the waitress was pleasant and eager to please. Pick a night other than Valentine's Day or Friday (unless you like the noise), and you will probably enjoy yourself very much. Sea bass and pork tenderloin are recommended.Special Features:
- Visited on 2-14-14guaporeyDined on 2/14/2014I decided to spend Valentine's Day with my special someone and the overall experience was great!!! It was my first time and I glad I made reservations because like expected this place was packed. Now the menu had a variety of items which is good. I tried sushi for the first time and I have to say it was not bad at all. Afterwards I tried one of there recommened dishes which was the Sea Bass and oh man was it good. This dish was big enough to split and at a price of 25 bucks thats a good look. Now don't ask me why but I've been on a get dessert just for the heck of it kick lately so I did and once again I was amazed. My date and I was intimidated by the size of this dessert which probably sounds crazy but hey see for yourself.Special Features:


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MSU punt trickery fools Northwestern
BY RICK MORRISSEY email@example.com
Michigan State's Aaron Bates heaves a pass on a fake punt that went for 23 yards and set up a fourth-quarter touchdown.
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It was all there in front of Northwestern. The chance to beat a highly ranked, undefeated team. The opportunity to wipe away the pain of losing to middling Purdue two weeks before. The pride in being bowl-eligible so early in the season.
Maybe that was the problem as Michigan State lined up for a punt in the fourth quarter Saturday. The Wildcats were looking at all the possibilities ahead instead of the blatantly obvious in front of them.
And when that fake punt came, when that wounded duck of a pass wobbled into the wind at Ryan Field, it appeared as if the Cats were the only ones in the stadium who didn't see it coming.
But that was impossible. Michigan State had taken a delay-of-game penalty the previous play, which is football code for, "We need more time to discuss the fake punt we're about to spring on our unsuspecting opponent.''
A gutsy fake field goal had fueled the Spartans' overtime victory over Notre Dame earlier in the season. The mild heart attack Michigan State coach Mark Dantonio had suffered after the game had further nudged the day toward unforgettable.
So Northwestern had to be ready for the possibility of trickery, deceit and all-around chicanery on fourth-and-11 from its own 36-yard line, correct-
''I wasn't really thinking [fake] punt,'' said NU cornerback Jordan Mabin, who was lined up against the Spartans' Bennie Fowler.
''We certainly had our antennas up,'' linebacker Bryce McNaul said.
''We talked all week that there was going to be a fake punt where they're probably going to throw it, but did we expect that fake punt- No,'' coach Pat Fitzgerald said.
Confused- Get in line with the Cats.
Mousetrap catches NU
So here came the fake like an on-time arrival, with punter Aaron Bates throwing a shaky pass to Fowler for 23 yards and a first down.
What was it former NU coach Ara Parseghian had told the Wildcats the day before- Something about being focused for all 60 minutes of a football game-
''It was a mousetrap,'' Dantonio said of the fake after his team's 35-27 victory. ''We had to get them to take the cheese.''
It led to a touchdown on the next play, and whatever momentum the Cats had before the play was gone. The 10-point lead they had carried into the fourth quarter was now a 24-21 NU lead that didn't seem like a lead at all.
What you saw Saturday with Northwestern is what you got: a gritty team without scads of talent. It was a wonderfully entertaining game in which the team with the better athletes prevailed. Maybe that's what makes it so painful for the Wildcats: They still had the lead halfway through the fourth quarter. Brains appeared to be on their way to beating brawn.
And then brainlock set in on that fake punt.
There is no shame in losing to the Spartans, especially in a close game. Afterward, NU players weren't in the mood to discuss the gradations of pain they've felt in their last two losses. If the Purdue loss was an amputation, what was this one-
They both hurt -- the Purdue game for its senselessness and the Michigan State game for its self-infliction.
Mirror time
''Guys are going to have to swallow a pretty heavy pill,'' Fitzgerald said. ''You look at yourself in the mirror, me included. Did I do the right things to get the guys ready to go- Did I say the right things at halftime- ''
A few lapses in concentration did in Northwestern on Saturday. You can't fumble at the opponent's 1-yard line, as Jacob Schmidt did in the first quarter. A touchdown would have given the Wildcats a 14-0 lead. You can't get dumb penalties. You can't be blind to the possibility of a fake punt.
You can't do any of that against a ranked team and expect to avoid a reckoning.
The Cats played soft in pass coverage Saturday, which helps explain how Michigan State quarterback Kirk Cousins was 29-for-43 for 329 yards and two touchdowns. NU's strategy was sound: Stop running backs Edwin Baker and Le'Veon Bell. But nothing in that approach says to give receivers enough room to park a stretch limo.
It was too bad because it wiped out another tough performance by Northwestern quarterback Dan Persa, who rushed for three touchdowns. He's as tough as they come, but if he continues to get hit the way he was Saturday, he's not going to last. It won't be long before he's referred to as Persa-cuted in headlines.
The sideshow going into the game was the exact location of Dantonio. Would he be on the field for the first time since his heart attack Sept. 18, or would he be coaching from the press box again- It was sort of a ''Where's Waldo- '' if Waldo wore a headset. Dantonio coached from the sideline. It seemed to work.
There was no cheese left.


text:
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text:
An abbreviation of donkey used to define a person who listens to Donk music. Given as a name to total mosh heads with no taste in music, Those who listen to Donk NEED to be stoned as they would'nt listen to it otherwise
"lets get stoned and listen to some donk!"
автор: angelj 22 августа 2006
The sound of a pistol whip to the back of the face. Could also be followed by kadead.
Kyle: What the heck?!
Dave: I just donked you on the back of your face! Kadead!
Dave: I just donked you on the back of your face! Kadead!
автор: Darin Number 2 18 апреля 2007
The sound supposedly made when inserting something into ones ass.
I think I'll do something with this random object. Eh... *donk*
автор: Bleach Injected 11 мая 2003
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text:
Posted previously. Updated below.
with Noam Chomsky
June 29, 2009 Continue reading
Filed under: Anarchism, Capitalism, Corporations Really Suck, Dandelion Salad Posts News Politics and-or Videos 2, Dandelion Salad Videos, History, Labor, Politics, Revolution | Tagged: Activism - Protests - Boycotts, Capitalism on Dandelion Salad, David Buccola, International Workers' Day, Labor Day, Labor Unions, May Day, Noam Chomsky, Noam Chomsky on Dandelion Salad | 8 Comments »


text:
Web site: http://www.farbiflora.com/
Episode description: Peaceful and serene is this white swan gliding across the sparkling water. Tall grasses in the foreground set the swan back into the distance. Gary shows how to paint this calming and very easy painting.
Rating: [TV-G] (General Audience)
Series Information: The Beauty of Oil Painting with Gary and Kathwren Jenkins
TV Schedule
No Upcoming Airdates.
Past Airdates:
- KET2: Monday, July 29, 2013 at 10:30 am EDT
- KET2: Monday, January 3, 2011 at 10:30 am EST
- KET2: Monday, January 4, 2010 at 10:30 am EST
- KET2: Monday, June 29, 2009 at 10:30 am EDT
First aired: Monday, June 29, 2009 (excluding any air dates prior to June 1999)
Official web site: http://www.farbiflora.com/
AtlasBooks Distribution
(800) 247-6553
30 Amberwood Parkway
Ashland, OH 44805
AtlasBooks Distribution
(800) 247-6553
30 Amberwood Parkway
Ashland, OH 44805


text:
November 28, 2014
PHILADELPHIA (AP) -- A federal drug plea has been postponed for a Philadelphia abortion provider already serving life in the deaths of three babies.
Defense lawyer Jack McMahon says he needs more time to consult with Dr. Kermit Gosnell about the plea. Gosnell is due back in court on June 26.
Prosecutors say the 72-year-old Gosnell ran a "pill mill" by day and a rogue "abortion mill" by night.
He is serving life without parole after he was convicted this year of killing three babies born alive at his abortion practice.
Federal authorities say he sold prescriptions for OxyContin and other painkillers to people who lined up at his Philadelphia clinic.
McMahon has said Gosnell plans to plead guilty to the drug charges, given the outcome of the murder case.
Click Here to access the online Public Inspection File
Viewers with disabilities can get assistance accessing this station's FCC Public Inspection File by contacting the station with the information listed below. Questions or concerns relating to the accessibility of the FCC's online public file system should be directed to the FCC at 888-225-5322, 888-835-5322 (TTY), or firstname.lastname@example.com.


text:
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Simply connect with Facebook and kiss those password blues away,
or go here to reset your password.
All the songs from your favorite artists are on my iPhone ɔLıIsFnEɯ #Capricorn #TeamShady #USMC Followed by @amiamiley @ericVdunn


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text:
The ThinkPad Port Replicator Series 3 (433610W) offers convenient, one-step connection to the devices you use every day. You can access your LAN or Internet connection, VGA analog monitor, and USB attach peripherals with one simple click.
Features and benefits:
Physical specifications:
Operating environment:
Storage environment:
1 year Customer Replaceable Unit (CRU)
Note: The ThinkPad Port Replicator Series does not include a power adapter. Requires the power adapter provided with the system or one of the following:
FCC, CE, C-Tick, VCCI, BSMI, MIC (Korea), CB, UL + cUL, NOM
Ved å bruke dette nettstedet tillater du oss å plassere informasjonskapsler på datamaskinen. De er harmløse og vil aldri identifisere deg.


text:
- POSTED: 03 Sep 2014 03:58
US oil prices fell more than US$3 on Tuesday (Sep 2) following weak manufacturing data from China and Europe and amid generous supplies around the world.
NEW YORK: US oil prices fell more than US$3 on Tuesday (Sep 2) following weak manufacturing data from China and Europe and amid generous supplies around the world.
US benchmark West Texas Intermediate for October delivery sank US$3.08 to US$92.88 a barrel on the New York Mercantile Exchange, its lowest level since January. NYMEX was closed on Monday due to the Labour Day holiday in the US.
European benchmark Brent oil for October delivery fell US$2.45 to US$100.34 a barrel. Earlier on Tuesday, Brent had gotten as low as US$100.17, its lowest level since May 2013.
China, the world's second-biggest oil consumer after the US, said on Monday that its official purchasing managers' index (PMI) of manufacturing activity slipped to 51.1 last month, down from 51.7 in July and the first decline since February. A reading above 50 indicates growth, while below that level suggests contraction.
In Europe, Markit's PMI of output in the 18-nation eurozone's manufacturing sector fell to a 13-month low of 50.7 in August from 51.8 in July.
In the US, the PMI for manufacturing jumped to 59.0 in August, according to the Institute for Supply Management, but that was no help for gas prices.
"Geopolitical tensions persist across the globe, but for now prices focus on the prospect of softer fundamentals going forward," said Matt Smith, analyst at Schneider Electric.
"The oil markets are coming under renewed selling pressure that reflects a dominant bearish market sentiment that combines worry over demand and indications of amply current supply," said Tim Evans, energy analyst at Citi Futures.
Analysts said the stronger dollar was also a factor in Tuesday's big drop in oil prices. Because oil is denominated in dollars, the commodity becomes more costly outside the US when the greenback strengthens against other currencies, hitting demand.
- AFP/de


text:
"… the coolly sexy Caitlin McKechney is clearly the show's star." Click HERE to read the rest of Lawrence Budman's piece for the South Florida Classical Review.
"As Inez, mezzo Caitlin McKechney nearly stole the show." To read the rest of Jack Gardner's review for Edge Miami, click HERE.
For other reviews, see "Press"
Caitlin returns to Florida Grand Opera in this Puccini classic.
Caitlin is featured on Thomas Sleeper's collection of one act operas, set to be released on Albany Records in the fall of 2014.
"Powerhouse Mezzo" - Albert Williams, Chicago Reader


text:
"Now You Know" Spotlights ReStores on Norwalk TV
We are thrilled to share this video produced by Now You Know about our ReStores. This was filmed at our Norwalk ReStore, however we have another location in Gardena and we will be opening our third location in Bellflower this summer. Find out more info about our ReStore used material operations. Related Posts: Don't Dump It, Donate It & Deduct It Discovering Hidden Treasures at ReStores Deconstructing with Ed Begley, Jr.
Habitat For Humanity of Greater Los Angeles' ReStores & Deconstruction & Reuse Network Team up for 10th Annual Alt Build Expo
The Non-Profits will showcase the environmental and humanitarian benefits of the reuse of building materials in Booths #52 & #53 Santa Monica, CA – May 10, 2013: Habitat For Humanity of Greater Los Angeles' ReStores and Deconstruction & Reuse Network (DRN) will be joining forces at this year's Alt Build Expo in Santa Monica to show what the community can gain from their collaboration. There is a direct benefit to the environment and community through the efforts of deconstruction and reuse of building materials, including supporting the building of affordable homes and ensuring materials are repurposed and diverted from local landfills. Through its deconstruction and reuse services, DRN provides a consistent flow of building materials and home fixtures for HFH GLA's ReStores located in Gardena and Norwalk. DRN, an environmental and social benefit organization develops programs for property owners to ensure materials from structures slated for remodel or tear ...


text:
Search engines changed how we discover information about the world around us forever — not to mention how we shop. Amazon's new Firefly technology embedded in the new Fire Phone, exclusively on AT&T, is primed to flip the script once again. At its core, Firefly is designed to help users easily identify everything from web addresses and phone numbers to over 100 million products including various forms of media like movies, TV episodes and songs.
Ask and you shall receive
Meet the Only Smartphone with Firefly Technology
The mobile interface of the future, today
Meet the Only Smartphone with Dynamic Perspective
Sci-fi movies have teased us with the power and convenience of 3D interfaces for years. But Amazon's newly launched Fire Phone, available exclusively at AT&T, proves that the wait for an advanced smartphone interface that harnesses the full potential of 3D is finally over. So-called Dynamic Perspective is powered by four front-facing infrared cameras that constantly track the position of the user's head in relation to the phone's screen — even in the dark. The result is a persistent 3D viewing experience that doesn't require special glasses or a fancy 3D display.
Goodbye, Net Neutrality
Decrypted: What AT&T's $42.5 Billion Dollar Purchase Means For You
Just over 30 years ago, the U.S. Department of Justice mandated the breakup of the Bell System in order to prevent AT&T from essentially gaining control over all of America's telephony services. Later this year, AT&T will likely be allowed to join hands with the largest satellite television provider in the United States. As they say, what goes around usually comes around.
Goodbye Wifi
Novatel MiFi Liberate
Gadgets of all shapes and sizes are shipping with cellular data connectivity options these days, but if you've still got tech that's stuck off the grid, the Novatel MiFi Liberate can help. It's the first LTE mobile hotspot to sport a 2.8-inch touch screen, which is truthfully more nifty than necessary, but does make checking…
Souped Up Super AMOLED
Samsung Infuse 4G
About a year ago, the Samsung Galaxy S created a stir on the Android block when it pranced out with its 4-inch Super AMOLED display. While there's plenty of tech chatter surrounding its successor, the Samsung Galaxy S II, the Samsung Infuse 4G ($200) is essentially the same phone, and it's coming to AT&T on…
@Win @A @Phone @From @Gear Patrol
LG Vu from AT&T – We have a winnner!
After conducting extensive scientific research, we've come to an important conclusion. Not a one of you told us that you don't like it when Gear Patrol gives away free stuff. Thus, we've teamed up with AT&T to offer you the LG Vu ($349), an outstanding phone-u-tainment gadget. So, here's the deal; normally, Gear Patrol giveaways…
AT&T Palm Centro
Those of you who've been pining for a Palm Centro untethered from Sprint will be glad to know that your GSM precious is here and it's available in a smooth looking Glacier White. The Palm Centro from AT&T operates off a next generation version of the Palm OS (5.4.9). It's a quad band phone with…


text:
Methods and apparatus for preparing a low-resistivity tungsten film on a substrate are provided. Methods involve the formation of a tungsten nucleation layer on a substrate using pulsed nucleation layer (PNL) techniques and depositing a bulk tungsten layer thereon. Methods for forming the tungsten nucleation layer involve the use of a boron-containing species, a tungsten-containing precursor, and optionally, a silane. The methods described are particularly useful for applications where thin, low resistivity films are desired, such as interconnect applications.
1. A method of forming tungsten film on a substrate in a reaction chamber, the method comprising:
(a) positioning the substrate in the reaction chamber;
(b) exposing the substrate to a boron-containing species to form a boron-containing layer;
(c) contacting the boron-containing layer with a tungsten-containing precursor to form a tungsten nucleation layer;
(d) depositing a bulk tungsten layer over the tungsten nucleation layer to form the tungsten film;
wherein at least one of the boron-containing species and the tungsten containing precursor reactants is provided to the reaction chamber by stabilizing a flow of the reactant by diverting the flow to an exhaust port without passing through the reaction chamber; and then
pressurizing a gas line leading to the reaction chamber by flowing the reactant to the gas line prior to allowing the reactant to enter the reaction chamber.
2. The method of
3. The method of
4. The method of
5. The method of
6. The method of
7. The method of
8. The method of
9. The method of
10. The method of
11. The method of
12. The method of
13. The method of
14. The method of
15. The method of
16. The method of
17. The method of
18. The method of
19. The method of
20. The method of
21. The method of
22. A method of forming tungsten film on a substrate in a reaction chamber, the method comprising the following sequence:
(a) positioning the substrate in the reaction chamber;
(b) exposing the substrate to a silane;
(c) contacting the substrate with a tungsten-containing precursor to form a portion of the tungsten nucleation layer;
(d) exposing the substrate to a boron-containing species to form a boron-containing layer;
(e) contacting the boron-containing layer with a second tungsten-containing precursor to form a tungsten nucleation layer; and
(f) depositing a bulk tungsten layer over the tungsten nucleation layer to form the tungsten film.
23. The method of
24. The method of
25. The method of
26. The method of
27. The method of
28. The method of
29. The method of
stabilizing a flow of the silane by diverting the flow to an exhaust port without passing through the reaction chamber; and then
pressurizing a gas line leading to the reaction chamber by flowing the silane to the gas line prior to allowing the silane to enter the reaction chamber.
30. The method of
31. The method of
stabilizing a flow of the second tungsten-containing precursor by diverting the flow to an exhaust port without passing through the reaction chamber; and then
pressurizing a gas line leading to the reaction chamber by flowing the second tungsten-containing precursor to the gas line prior to allowing the second tungsten-containing precursor to enter the reaction chamber.
32. The method of
This application is a continuation-in-part of U.S. patent application Ser. No. 10/649,351, filed on Aug. 26, 2003, titled �Method for Reducing Tungsten Film Roughness and Improved Step Coverage,� by Sang-Hyeobet Lee, et al., which is in turn a continuation-in-part of U.S. patent application Ser. No. 09/975,074 (now U.S. Pat. No. 6,635,965) filed Oct. 9, 2001, which in turn claims priority from U.S. Provisional Patent Application No. 60/292,917, file May 22, 2001; and this application is also continuation-in-part of U.S. patent application Ser. No. 10/690,492, filed on Oct. 20, 2003, titled �Deposition of Tungsten Nitride,� by Karl B. Levy, et al, which claims priority from prior U.S. Provisional Patent Application No. 60/441,834 filed Jan. 21, 2003. This application is also related to U.S. patent application Ser. No. 10/435,010, filed on May 9, 2003, titled �Selective Refractory Metal and Nitride Capping,� by Havemann, Robert H., et al. Each of these applications is incorporated herein by reference in its entirety for all purposes.
This invention relates to methods for preparing tungsten films on integrated circuits, for example. The invention is particularly useful for applications that require thin tungsten films having low electrical resistance.
The deposition of tungsten films using chemical vapor deposition (CVD) techniques is an integral part of many semiconductor fabrication processes. The tungsten films may be used to produce low resistivity electrical connections in the form of horizontal interconnects, vias between adjacent metal layers, and contacts between a first metal layer and the devices on the silicon substrate. In a conventional tungsten deposition process, the wafer is heated to the process temperature in a vacuum chamber, and then a very thin portion of tungsten film, which serves as a seed or nucleation layer, is deposited. Thereafter, the remainder of the tungsten film (the bulk layer) is deposited on the nucleation layer. Conventionally, the bulk layer is formed by the reduction of tungsten hexafluoride (WF6) with hydrogen (H2) on the growing tungsten layer. The bulk layer is generally deposited more rapidly than the nucleation layer, but cannot be produced easily and reliably without first forming the nucleation layer.
Various deposition methods can be used to form a thin tungsten nucleation layer. These include a CVD technique and a pulsed nucleation layer (PNL) technique. In a CVD technique, the WF6 and reducing gas (e.g., SiH4 and/or H2) are simultaneously introduced into the reaction chamber. This produces a continuous chemical reaction of mixed reactant gases that continuously forms tungsten film on the substrate surface. In a typical example, CVD nucleation layers are deposited from WF6-SiH4 with an argon carrier gas. In some instances, CVD nucleation performance is enhanced by the presence of H2 in carrier gas mixture. Note that the WF6-SiH4 reaction is much faster than the WF6-H2 reaction due to lower activation energy and greater reactivity.
In a PNL technique, pulses of the reducing agent, purge gases, and tungsten-containing precursors are sequentially injected into and purged from the reaction chamber. The process is repeated in a cyclical fashion until the desired thickness is achieved. PNL is similar to atomic layer deposition techniques reported in the literature. PNL is generally distinguished from atomic layer deposition (ALD) by its higher operating pressure range (greater than 1 Torr) and its higher growth rate per cycle (greater than 1 monolayer film growth per cycle). In the context of this invention, PNL broadly embodies any cyclical process of sequentially adding reactants for reaction on a semiconductor substrate. Thus, the concept embodies techniques conventionally referred to as ALD.
Tungsten processes should also produce films with low resitivity. Advancing technology requires that tungsten electrical connects be increasing thin yet maintain very low resistance. Hence, it is critical that tungsten deposition process provide tungsten having very low resistivity. For many semiconductor fabrication applications, the tungsten film should have a resistivity of about 30 μΩ-cm or less. It is also essential that the deposited tungsten integrate well with other components of the device. Hence it should have good adhesion to underlying materials in the device.
What are therefore needed are improved methods for forming low resistivity tungsten films.
The present invention addresses this need by providing improved methods for preparing a low resistivity tungsten film. In particular, methods involve (a) positioning the substrate in a reaction chamber, (b) exposing the substrate to a boron-containing species to form a boron-containing layer, (c) contacting the boron-containing layer with a tungsten-containing precursor to form a tungsten nucleation layer and (d) depositing a bulk tungsten layer over the tungsten nucleation layer to form the tungsten film. Methods following this sequence can produce tungsten films with a sheet resistance (resistivity) of 15 μΩ-cm or less. In many applications, the resultant tungsten film has a total thickness of between about 20 Angstroms and about 1,000 Angstroms, with many applications requiring a film no greater than about 500 Angstroms. Typically, the thickness of the tungsten nucleation layer is between about 10 Angstroms and about 30 Angstroms. In some embodiments, (b) and (c) are repeated one or more times prior to (d) to achieve a desired tungsten nucleation layer thickness.
In certain specific embodiments, methods include purging the reaction chamber between exposures of the substrate to reactant species, in particular after (b) and before (c), and after (c) and before (d). Purging the reaction chamber typically involves flowing a carrier gas, such as argon, hydrogen, nitrogen and/or helium, through the reaction chamber (without flowing the reactant gas). In a typical example, the substrate temperature during (b) and (c) is maintained between about 200 degrees Celsius and about 475 degrees Celsius and the reaction chamber pressure during (b) and (c) is maintained between about 1 Torr and about 350 Torr.
Various boron-containing species may be used in (b). In many embodiments, the borane is diborane (B2H6). The boron-containing layer that is formed in (b) typically has a thickness of between about 1.5 and 30 Angstroms, and preferably between about 3 and 15 Angstroms. Any suitable tungsten-containing precursor may be used in (c). In many embodiments, the tungsten-containing precursor is WF6, WCl6, W(CO)6, or a combination of thereof. The tungsten-containing precursor is preferably provided to contact the boron-containing layer for a time period sufficient to consume substantially all of the boron in the boron-containing layer.
In some embodiments, a �dual divert� method is used to provide one or more of the reactant gases into the reaction chamber. Such methods involve stabilizing a flow of the reactant species (e.g., diborane or tungsten hexafluoride) by diverting the flow to an exhaust port without passing through the reaction chamber and then pressurizing a gas line leading to the reaction chamber by flowing the reactant species to the gas line prior to allowing the species to enter the reaction chamber. Typically, the reactant gases are provided in a dilution gas, which may vary in type depending upon the reactant gas being used.
Once the tungsten nucleation layer is formed, a bulk tungsten layer is deposited to form the tungsten film. Typically, this bulk tungsten deposition is accomplished using a CVD process. Frequently, though not necessarily, the same tungsten-containing precursor is used for depositing the nucleation layer and the bulk layer.
In some embodiments, forming the nucleation layer involves exposing the substrate to additional reactants prior to (b). In one preferred embodiment, the method involves exposing the substrate to a silane and thereafter contacting the substrate with a tungsten-containing precursor to form a portion of the tungsten nucleation layer, prior to (b). Thus, the overall nucleation layer deposition involves exposing the substrate to a silane, a tungsten precursor, a boron-containing compound, and a second tungsten precursor. The tungsten-containing precursor used for the preliminary step can be the same chemical compound as the tungsten-containing precursor in (c). Typically, the reaction chamber is purged prior to the addition of each new reactant gas. Examples of suitable silanes include silane (SiH4), disilane, and tetrasilane.
In embodiments, it may desirable to form a thicker tungsten nucleation layer by repeating the entire sequence of exposures (a silane, a tungsten precursor, a boron-containing compound, and a tungsten-precursor). In other cases, only the first two operations are repeated (exposure to a silane and a tungsten precursor) prior to the final operations of boron deposition and exposure to a tungsten precursor.
These and other features and advantages of the invention will be described in more detail below with reference to the associated drawings.
The following detailed description can be more fully understood when considered in conjunction with the drawings in which:
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, which pertains to forming thin tungsten films. Preferred methods involve pulsed nucleation layer (PNL) deposition techniques, which will be described in detail below. Modifications, adaptations or variations of specific methods and or structures shown and discussed herein will be apparent to those skilled in the art and are within the scope of this invention.
The present invention involves forming a tungsten film by way of a tungsten nucleation layer. In general, a nucleation layer is a thin conformal layer which serves to facilitate the subsequent formation of a bulk material thereon. PNL techniques involve cycles of substrate exposure in which reactants are sequentially injected into and removed from a reaction chamber. The nucleation layer may be formed using one or more PNL cycles. Additional discussion regarding PNL type processes can be found in the related U.S. patent applications Ser. Nos. 10/649,351 and 10/690,492, which were previously incorporated herein by reference.
While efficient tungsten deposition processes require tungsten nucleation layers, these layers typically have higher electrical resistivities than the bulk tungsten layers. Thus, to keep the electrical resistance of the overall tungsten film (tungsten nucleation layer and bulk tungsten) low, the tungsten nucleation layer should be kept as thin as possible. On the other hand, the tungsten nucleation should be sufficiently thick to fully cover the underlying substrate to support high quality bulk deposition. So, to achieve an optimal thickness, the tungsten nucleation layer may be formed in one or more PNL deposition cycles. It has been found that the tungsten nucleation layer should typically have a thickness of between about 10 and 30 Angstroms.
Generally in methods of this invention the substrate is exposed to a boron-containing species, and then exposed to a tungsten-containing precursor to form the tungsten nucleation layer. For some applications the tungsten nucleation layer is not thick enough after one such PNL cycle and another cycle can be performed before the bulk tungsten layer is deposited. That is, the substrate is exposed again to a boron-containing species, followed by exposure to a tungsten-containing precursor to form another portion of tungsten nucleation layer. Any number of PNL cycles can be performed in this manner as needed prior to the bulk tungsten deposition.
In another preferred approach, the substrate is initially exposed to a silane (e.g., SiH4), followed by a tungsten-containing precursor to form a portion of the tungsten nucleation layer. Thereafter the partial nucleation layer is exposed to a boron-containing species and then to a tungsten-containing precursor to form the remaining portion of the tungsten nucleation layer (a four step PNL cycle). This entire four-step PNL cycle can also be repeated to form a desired tungsten nucleation layer thickness. In a variation of the process, the first two steps of the cycle (sequential exposure to silane and the tungsten-containing precursor) are repeated one or more time prior to contact with boron-containing compound. In another variation, the last two steps of the cycle (sequential exposure to the boron-containing compound and the tungsten-containing precursor) can be repeated one or more times after the first two steps are completed. Of course, the first two steps could be repeated and then the second two steps could be repeated. In short, any combination of these PNL cycle steps can be performed to achieve a desired tungsten nucleation layer thickness prior to bulk tungsten deposition. Aspects of some of these embodiments will now be described in more detail.
Initially, a substrate is provided and positioned in a reaction chamber as indicated by a process block 101. As mentioned previously, in many embodiments the substrate is a partially fabricated electronic device (e.g., a partially fabricated integrated circuit). Some specific applications of the invention will be described later.
Next, as indicated by a process block 103, the substrate is exposed to a silane. Silane and related compounds have been found to adsorb well to metal nitride surfaces such as titanium nitride and tungsten nitride used as barrier layer materials in some integrated circuit applications. Any suitable silane or silane derivative may be used, including organic derivative of silanes. In some preferred embodiments, the silane is SiH4. It is generally understood that silanes adsorb on the substrate surface in a self-limiting manner so as to create nominally a monolayer of silane species. Thus, the amount of adsorbed species is largely independent of the silane dosage. Substrate temperatures are generally within the allowed ranges for integrated circuit manufacturing processes; i.e., preferably between about 200 and 475 degrees Celsius. Chamber pressure can vary broadly, between about 1 and 350 Torr. In a particular application, for example, chamber pressures were fixed around 40 Torr Exposure time will vary depending in part upon dosages and chamber conditions. Preferably, the substrate is exposed until the surface is sufficiently and evenly covered with at least a saturated layer of silane species. Note that the silane may be provided alone or with a carrier gas. Examples of carrier gases include argon and argon-hydrogen mixtures.
Once the substrate is sufficiently covered with silane species, the flow of silane species to the reaction chamber is stopped and the reaction chamber is purged with a carrier gas such as argon, hydrogen, nitrogen or helium. The gas purge clears the regions near the substrate surface of residual gas reactants that could react with fresh gas reactants for the next reaction step.
Referring back to
The resulting portion of tungsten nucleation layer is typically between about 5 and 40 Angstroms. As described previously, the tungsten nucleation layer should be sufficiently thin so as to not unduly increase the overall tungsten film, but sufficiently thick so as to support a high quality bulk tungsten deposition. It has been demonstrated for purposes of many semiconductor wafer applications that an appropriate thickness of the tungsten nucleation layer is between about 10 and 30 Angstroms, more preferably between about 20 and 30 Angstroms. If the is tungsten deposited any thinner the wafer may have a �splotchy� appearance from the uneven tungsten distribution. While the thickness of the nucleation layer can be controlled by many different mechanisms, one approach involves repeating operations 103 and 105, one or more times. Note that this repetition is shown only implicitly in
Referring again to
Since the boron-containing layer formation is not of a self-limiting nature, dosage, exposure time and substrate temperatures should be adjusted correspondingly. The boron-containing species is typically provided in a dilution gas, such as argon, nitrogen, hydrogen, silane or a combination thereof. In a typical chamber setup for a six-wafer processing (200 mm each), the substrate temperature is between about 200 and 475 degrees Celsius and the chamber pressure is between about 1 and 350 Torr. Frequently,. diborane is provided from a diluted source (e.g., 5% diborane and 95% nitrogen). Diborane may be delivered the reaction chamber using other or additional carrier gases such as nitrogen, argon, hydrogen, and/or silane.
Once the boron-containing layer is deposited to a sufficient thickness, the flow of boron-containing species to the reaction chamber is stopped and the reaction chamber is purged with a carrier gas such as argon, hydrogen, nitrogen or helium.
Returning again to
Once the boron is sufficiently consumed and another portion of the tungsten nucleation layer is formed, the flow of tungsten-containing precursor to the reaction chamber is stopped and the reaction chamber is purged with a carrier gas such as argon, hydrogen, nitrogen or helium.
Referring back to
If at decision 111 the tungsten nucleation layer has reached the desired thickness, the tungsten nucleation layer is fully formed and next a bulk tungsten layer is deposited thereon. See process block 113. In many embodiments the bulk tungsten is deposited using a CVD process since CVD has been found to rapidly produce low resistivity films. Any suitable CVD process may be used with any suitable tungsten-containing precursor. In some embodiments the same tungsten-containing precursor used in the PNL processes for forming the tungsten nucleation layer is use�typically one of WF6, WCl6 and W(CO)6. Frequently, the CVD process is performed using a mixture of molecular hydrogen and one or more of these precursors. In other embodiments, the CVD process may employ a tungsten precursor together with silane or a mixture of hydrogen and silane or a mixture of hydrogen and borane (such as diborane). Non-CVD process can also be employed to form the bulk layer. These include ALD/PNL and physical vapor deposition (PVD).
The bulk tungsten can be deposited to any thickness. Tungsten interconnect lines for integrated circuit applications may have a total thickness (tungsten nucleation layer and bulk tungsten) of between about 20 and 1,000 Angstroms. For a typical bit line, the total tungsten film thickness is typically no greater than about 500 Angstroms. The resulting tungsten film will preferably have a resistivity of no greater than about 30 μΩ-cm (more preferably no greater than about 15 μΩ-cm and most preferably not greater than about 10 μΩ-cm), depending upon the number and type of PNL cycles used.
After the tungsten film is deposited to a sufficient thickness, the process flow of
It is also worth noting that when hydrogen is used with tungsten hexafluoride, the process of applying tungsten hexafluoride to the substrate surface is not self-limiting. That is, tungsten and hydrogen will continue to react in a manner of a CVD process and the tungsten will continually build to thicker and thicker proportions. Thus, some care should be chosen in determining how much tungsten hexafluoride to deliver to the substrate when it is mixed with hydrogen gas. The same is true of the borane material, regardless of whether or not it is mixed with hydrogen. As indicated, the boranes will continue to react to the surface to build thicker and thicker layers of borane. So to summarize, when a borane is delivered to the substrate and when tungsten hexafluoride together with hydrogen is delivered to the substrate, the quantities of the borane and the tungsten hexafluoride must be carefully controlled to ensure that the amount of deposited material is not too great. Because the nucleation layer is formed via PNL process, each successive component delivered to the reaction chamber is generally delivered free of other reactants used in subsequent steps of a PNL cycle�except as indicated above (e.g., silane may be provided with diborane in some embodiments).
In a variation of the above process, a partial or complete tungsten nucleation layer is treated with a plasma after one of the dose operations, e.g., after dosing with a tungsten precursor. In one example, the plasma is generated from hydrogen, helium, nitrogen, argon, or a mixture of two or more of these components. The purge operation typically follows the plasma treatment. A plasma treatment may help to drive impurity out of the film (e.g., silicon or fluorine) that could reduce resistivity.
In some cases, a purpose of the plasma treatment is to introduce carbon, nitrogen or a specified dopant atom into the tungsten nucleation layer. In such situations, a nitrided or carbided tungsten nucleation layer can result. A nitrided nucleation layer can provide improved barrier properties. Carbon can be provided from various sources including, for example, carbon tetrafluoride and hexafluoroethane. The presence of carbon in the nucleation layer can further reduce resistivity of the tungsten film. In this process, various plasma conditions can be employed. In one example, the plasma is generated from a single radio frequency source (e.g., 13.56 MHz applied to a showerhead or pedestal in the deposition reactor). In another example, a multiple source system is employed; e.g., a 13.56 MHz source provides power to the showerhead and a 450 kHz source provides power to the pedestal, or vice-versa. Typically, the applied frequency range will be between about 450 kHz and 100 MHz.
Other variations of the above process involve rearrangement of certain steps. For example, as explained in U.S. patent application Ser. No. 10/649,351 (previously incorporated by reference), the tungsten nucleation process flow may proceed in the following order: (a) boron precursor, (b) tungsten precursor, (c) a silane, and (d) tungsten precursor. And of course the process can repeated as necessary to form a nucleation layer of the desired thickness. In another variation, the process begins with a exposure to a tungsten precursor. For example, the nucleation process flow may proceed in the following order: (a) tungsten precursor, (b) a silane, (c) a tungsten precursor, (d) a boron precursor, and (e) a tungsten precursor (e.g., WF6, SiH4, WF6, B2H6, WF6).
The methods of the invention may be carried out in various types of deposition apparatus available from various vendors. Examples of suitable apparatus include a Novellus Concept-1 Altus, a Concept 2 Altus, a Concept-2 ALTUS-S, a Concept 3 Altus deposition system, or any of a variety of other commercially available CVD tools. In some cases, the process can be performed on multiple deposition stations sequentially. See, e.g., U.S. Pat. No. 6,143,082, which is incorporated herein by reference for all purposes. In some embodiments, the pulsed nucleation process is performed at a first station that is one of two, five or even more deposition stations positioned within a single deposition chamber. Thus, the reducing gases and the tungsten-containing gases are alternately introduced to the surface of the semiconductor substrate, at the first station, using an individual gas supply system that creates a localized atmosphere at the substrate surface.
In one example, after a first thickness of tungsten deposited, the wafer is moved to a second deposition station and a new wafer is moved into place on the first station. The wafers may be indexed from one deposition station to the next to enable parallel wafer processing after one or more repetitions of the cycle. The full thickness of the tungsten film is achieved by additional cycles with alternating reducing gases and tungsten-containing gases at one or more of the other deposition stations. This is repeated until all substrates are coated to the desired thickness. It is the sum of these individual depositions that forms the total amount of tungsten nucleation layer deposited. Any number of deposition stations, each capable of having a localized atmosphere isolated from adjacent stations, is possible within the single chamber.
The invention also provides for a deposition chamber in which alternating deposition stations are dedicated to deliver either tungsten-containing gases or reducing gases. More specifically, the deposition stations in the chamber are separated into two groups with the first group dedicated to delivery of the reducing gases and the second group for introducing tungsten-containing gas. These stations also can provide for the simultaneous delivery of carrier gases and/or hydrogen with the dedicated gases. Thus, tungsten is deposited by moving wafers from station to station such that the wafer is sequentially exposed to the reducing gases and then the tungsten-containing gases until the desired thickness of tungsten is obtained.
The flow of reactant and purge gases may be carefully controlled to provide pulses of a desired duration, flow rate, and sequence.
Initially in a preferred process, the flow from the mass flow controller is stabilized by opening the valve to the exhaust and allowing the gas to flow out of the system and thereby create a stable uniform flow pattern. This is sometimes referred to as a �divert� stage because the gas is actually diverted from the chamber to the exhaust. In this stage, the valve on the exhaust line is opened and the valve on the delivery line is closed. The next operation in the process involving this apparatus comprises charging a line to the chamber with the reactant in question. In this operation, the valves to both the chamber and the exhaust are closed in order to pressurize or charge the delivery line. After the line has been sufficiently charged, the valve on the line to the chamber is open and the reactant is swept into the chamber using a carrier gas such as argon or argon together with hydrogen. See carrier gas sources 220, 222, and 224 for the diborane, silane, and tungsten precursor delivery lines respectively. This is referred to as the pulse step of the process. When it is completed, the valve to the chamber is closed while the carrier gas is allowed to continue to flow. This effectively purges the chamber of the reactant.
In an alternative approach, the reactant may be delivered without the aid of a carrier gas. In this arrangement, there is a separate valve for the line providing the carrier gas. It is turned off during the pulse step so that only the reactant and no carrier gas is delivered to the chamber.
As shown, the overall nucleation layer deposition process is divided into four basic pulse phases: silane, tungsten precursor, boron precursor, and tungsten precursor. Each of these pulse phases is, in turn, divided into three separate sub-stages (as provided by the apparatus described above): divert/charge, pulse, and purge.
The present invention may be used to deposit thin, low resistivity tungsten layers for many different applications. One preferred application is for interconnects in integrated circuits such as memory chips and microprocessors. Interconnects are current lines found on a single metallization layer and are generally long thin flat structures. These may be formed by a blanket deposition of a tungsten layer (by a process as described above), followed by a patterning operation that defines the location of current carrying tungsten lines and removal of the tungsten from regions outside the tungsten lines.
A primary example of an interconnect application is a bit line in a memory chip. Of course, the invention is not limited to interconnect applications and extends to vias, contacts and other tungsten structures commonly found in electronic devices. In general, the invention finds application in any environment where thin, low-resistivity tungsten layers are required.
The invention is also focuses on low resistivity, tungsten layers having relatively thin proportions, typically on the order of 500 angstroms or less, preferably, 300 angstroms or less. But more generally, the invention applies to a broader range of tungsten layers, including those with thicknesses of between about 5 angstroms to 1000 angstroms.
Another parameter of interest for many applications is a relatively low roughness of the ultimately deposited tungsten layer. Preferably, the roughness of the tungsten layer is not greater than about 10% of the total thickness of the deposited tungsten layer, and more preferably not greater than about 5% of the total thickness of the deposited tungsten layer. The roughness of a tungsten layer can be measured by various techniques such as atomic force microscopy.
The film stack of
Experimental Data
Both the �traditional W-CVD� film (open rectangle symbol) and �optimized W-CVD� film (filled triangle symbol) were deposited using WF6/SiH4, at pressures of about 40 Torr, for about 3 seconds to form a tungsten nucleation layer having a thickness of about 100 Angstroms each. The difference between the �traditional W-CVD� and �optimized W-CVD� films were the deposition temperature as describe above and the gas flow concentrations.
The �original W-PNL� films (filled diamond symbol) were deposited using 1 PNL cycle of B2H6�WF6 and four PNL cycles of SiH4�WF6 at about 300 degree Celsius to form a tungsten nucleation layer having a thickness of about 30 Angstroms and subsequently deposited with bulk tungsten using a CVD method identical to that of the �W-CVD� films described above. The �modified W-PNL� films (filled rectangle symbol) were deposited using one PNL cycle of the method described in the flow chart of
As shown by the graph of
Other Embodiments
While this invention has been described in terms of several embodiments, there are alterations, modifications, permutations, and substitute equivalents, which fall within the scope of this invention. It should also be noted that there are many alternative ways of implementing the methods and apparatuses of the present invention. It is therefore intended that the following appended claims be interpreted as including all such alterations, modifications, permutations, and substitute equivalents as fall within the true spirit and scope of the present invention. The use of the singular in the claims does not mean �only one,� but rather �one or more,� unless otherwise stated in the claims.
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Photos and Description of this 2 bedroom holiday apartment in Krakow - Staromostowa
2 bedroom self catering apartment near centre of attractions in Krakow
Our property is based nearby to the upcoming trendy part of Kazimierz and has panoramic views of the Staro Bridge over the River Wisla. A short walk takes you to the Wawel and into the centre of Krakow. Suitable for families and friends of all ages, it offers excellent facilities for a relaxing holiday or weekend of sightseeing. Shops and restaurants are nearby and a short walk along the river will take you to the Galeria Kazimierz. The newly constructed footbridge takes you nearer to the Kazimierz where there are lovely restaurants and museums. For those who drive, there is plenty of car parking spaces outside the apartment.
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The BBC reports that the first cloned detection dogs are being trained in South Korea. That country's customs service paid a biotechnology company to reproduce a Canadian Labrador Retriever that was known to be a good detection dog. The process yielded seven puppies that have shown themselves to be as good at sniffing out designated substances as the original dog. (What they are sniffing is not specified.)
"Only about 30% of naturally-born sniffer dogs make the grade, but South Korean scientists believe that could rise to 90% using the cloning method," reports the BBC.
In the United States, the Scientific Working Group on Dog and Orthogonal detector Guidelines (SWGDOG) continues to work on developing guidelines for various detection dogs. SWGDOG is a partnership of local, state, federal, and international agencies including private vendors, law enforcement and first responders. They post guidelines that are under development and open for comment at their Web site.
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text: Bobby's Buddies View full-size image < previous next > Is this photo a winner? "The was for a suicide prevention walk my family and friends did. We lost a member of our family to suicide. We were able to raise a good amount of money in hopes that lives can be spared from suicide" - Mary (Oct 19, 2013) Share this photo on: Twitter Facebook Pinterest Similar Photos: charity | participant teams | suicide prevention | small group | suicide prevention walk Feeling inspired? Visit the CustomInk Design Lab to start your own group order. Design Your Own


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I'm a modern day gypsy, currently residing in Alabama with my husband and four kiddos. We are passionate about hospitality and love to share gospel-centered fellowship and a table full of real food with anyone who comes our way. Click to meet our family and learn more about my own real food journey.
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