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A Sneak Peek at the Next-Gen Exascale Operating System
There are several scattered pieces in the exascale software stack being developed and clicked together worldwide. Central to that jigsaw effort is the eventual operating system to power such machines.
This week the Department of Energy snapped in a $9.75 million investment to help round out the picture of what such as OS will look like. The grant went to Argonne National Lab for a multi-institutional project (including Pacific Northwest and Lawrence Livermore labs, as well as other universities) aimed at developing a prototype exascale operating system and associated runtime software.
To better understand"Argo", the exascale OS effort, we spoke with Pete Beckman, Director of the Exascale Technology and Computing Institute and chief architect of the Argo project. Beckman says that as we look forward to the features of these ultra-scale machines, power management, massive concurrency and heterogeneity, as well as overall resiliency, can all be addressed at the OS level.
These are not unfamiliar concerns, but attacking them at the operating system lends certain benefits, argues Beckman. For instance, fine-tuning power control and management at the core operational and workload level becomes possible with a pared-down, purpose-built and HPC-optimized OS.
Outside of power, the team describes the "allowance for massive concurrency, [met by] a hierarchical framework for power and fault management, as well as a "beacon" mechanism that allows resource managers and optimizers to communicate and control the platform.
Beckman and team describe this hierarchy as an "enclave"–in this model the OS is more hierarchical in nature than we traditionally think of it as. In other words, it's easy to think of a node-level OS–with Argo, there is a global OS that runs across the machine. This, combined with the platform-neutral design of Argo, will make it flexible enough to change with architectures and manageable at both a system and workload level–all packaged in familiar Linux wrappings.
As shown above, these "enclaves," are defined as a set of resources dedicated to a particular service, and capable of introspection and autonomic response. As Argonne describes, "They can shape-shift the system configuration of nodes and the allocation of power to different nodes or to migrate data or computations from one node to another." On the reliability front, the enclaves that tackle failure can do so "by means of global restart and other enclaves supporting finer-level recovery."
The recognizable Linux core of Argo will have been enhanced and modified to meet the needs of more dynamic, next-gen applications. While development on those prototype applications are ongoing, Beckman and the distributed team plan to test Argo's ability to dive into a host of common HPC applications. Again, all of this will be Linux-flavored, but with an HPC shell that narrows the focus on the problems at hand.
As a side note, leveraging the positive elements of Linux and building into it a robustness and eye on taking on critical power management, concurrency and resiliency features seems like a good idea. If the trend holds, Linux itself will continue to enjoy the lion's share (by far–96% according to reporting from yesterday) of the OS market on the Top500.
It's more about refining the role of Linux versus rebuilding it, Beckman explains. While Linux currently is tasked with managing a multi-user, multi-program balancing act with its resources, doling them out fairly, the Argo approach would hone in on the parts of code that need to blaze–wicking away some of the resource balancing functions. "We can rewrite some of those pieces and design runtime systems that are specifically adapted to run those bits of code fast and not try to deal with the balancing of many users ad many programs."
The idea is to have part of the chip be capable of running the Linux kernel for the basics; things like control systems, booting, command and interface functions, debugging and the like–but as Beckman says, "for the HPC part, we can specialize and have a special component that lives in the chip."
In that case, there are some middleware pieces that are hidden inside Argo. Beckman said that that software will move closer to the OS. And just as that happens, more software will be tied to the chips–whatever those happen to look like in the far-flung future (let's say 2020 to be fair). This is all Argonne's domain–they've been one of the leading labs that have worked on the marriage between processor and file systems, runtimes, message passing and other software workings. Beckman expects a merging between many lines–middleware and OS, and of course, both of those with the processor.
"Bringing together these multiple views and the corresponding software components through a whole-system approach distinguishes our strategy from existing designs," said Beckman. "We believe it is essential for addressing the key exascale challenges of power, parallelism, memory hierarchy, and resilience."
As of now, numerous groups are working on various pieces of the power puzzle in particular. This is an especially important issue going forward. Although power consumption has always been a concern, Beckman says that the approach now is to optimize systems in advance, "turn the power on, and accept that they will draw what they're going to draw." In addition to the other work being done inside the stack to create efficient supers, there is a role for the operating system to play in orchestrating "smart" use of power for certain parts of the computation or parts of the machine.
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November 20, 2014
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Playstation All-Stars Battle Royale (PS3) Review
Sony took a large gamble with Playstation All-Stars Battle Royale. Like I said in the start, they didn't have the same roster of loveable characters as Nintendo have to pick from with Smash Brothers. They managed to create a...
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Fugitive lip biter arrested in California
Nov 6, 2014
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Home » News » Crime
Addison's case first time court ruling on NH death sentence
"They have approved essentially the standards that the (death penalty) statute described; that it is not unconstitutional to have a death penalty in New Hampshire under the state constitution," said Albert Scherr, a professor at the University of New Hampshire School of Law.
But Addison has another round in state court before taking his appeal to the federal courts.
The justices did not rule a mandatory "proportionality review" of the sentence, which is a look, required by state law, at whether the death penalty for Addison is out of proportion with penalties in similar cases elsewhere.
New Hampshire's old mandatory death penalty was repealed in response to the 1972 U.S. Supreme Court decision in a Georgia case that led to a moratorium on executions.
Last week's ruling was unanimous and issued "per curiam," Latin for "by the court," meaning it effectively spoke with one voice, since it was without dissent and without ascribing its words to an individual justice.
"They certainly intended to bring as much clarity to the issues that were in front of them so that going forward the same issues were not relitigated again," Scherr said. "It dealt with some of the basic issues; it's going to take something dramatically different to be relitigated."
"To the extent that you have cases where there are unanimous views, there is an idea it is a stronger precedent," Corcoran said. "I think the court was able to come to a place where they all agree you have a sense the decision carries more weight."
That ruling means the court has said it will not compare the murder of Briggs to the murder-for-hire conviction of businessman John Brooks a few years ago. Brooks escaped the death penalty and was sentenced to life in one of only two other capital cases in New Hampshire since the new law was adopted.
In sentencing Addison to die, jurors unanimously found that the murder of officer Briggs was not premeditated and was not intentional. If the penalty is upheld, Addison could seek to have a federal court rule his case should have been compared to cases in which no death penalty was imposed because the killer lacked premeditation, since the jury decided there was no premeditation in the murder of Briggs.
- Robbery at pizza house in Dover - 0
- Police obtain warrants for suspect wanted in Dover, Manchester bank robberies - 0
- Police searching for person stealing from cars in Manchester - 1
- Innocent verdict in vehicle death of former Amherst Fire Chief - 11
- NH Guard Officer convicted of sex trafficking - 2
- MBTA sergeant facing a dozen charges after multiple arrests - 0
- Portsmouth mechanic arrested Friday on theft charges - 1
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- Jury acquits Mont Vernon driver, who was checking text, in death of former Amherst fire chief - 7
30 years later, Tammy Belanger isn't forgottenREADER COMMENTS: 0
- NHIAA Football: Campbell pounces on Newport mistakes - 0
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- NHIAA Football: Leadership matters - 0
- Windham turns back St. Thomas - 0
- College Notebook: Daniel Webster relishes its men's soccer conference crown - 0
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Proposal calls for gas pipeline across 17 NH communitiesREADER COMMENTS: 0
A kinder, gentler House Speaker?
College Football: Wildcats are CAA champs
Carpenter ready for break from baseball
Obama's action a first step?
A kinder, gentler House Speaker?
Pipeline's NH route moves to top choice
College Hockey: Providence blanks UNH
College Football: Wildcats are CAA champs
- Whom do you think bears the brunt of the blame for the mayhem this weekend in Keene?
- KSC students
- 37%
- KSC administration
- 2%
- Police
- 6%
- Visitors from out of town
- 18%
- A combination of any/all of the above
- 37%
- Total Votes: 2483


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Anyone can mess with it, to Google's detriment.
Never has a tweet been more true, or potentially more disastrous for a vendor. Years ago Google's Andy Rubin, stung by Steve Jobs' criticism that Android wasn't truly open, tweeted that anyone could fork - i.e., modify - Android, making it "open" in the truest sense of the word.
Never judge a phone by its cover.
This chunky, black box was in fact the world's first 'smartphone'. The IBM Simon went on sale to the public on 16 August 1994 and combined mobile phone technology with a wide range of computing features.
China's second-largest e-commerce player receives a funds injection after the Singapore investment firm buys up 602,139 shares for US$17.2 million.
Temasek also forks out US$12.8 million for Chinese security software maker, Cheetah Mobile.
A sweaty gym workout is not only good for your health - it could also energise your phone.
A tattoo that produces power from perspiration has been unveiled at the American Chemical Society meeting.
Apple has banned two potentially hazardous chemicals from being used in the final assembly process at 22 of its iPhone and iPad production plants.
Benzene, which is a carcinogen, and n-Hexane, which can cause nerve damage, will no longer be used in cleaning agents or degreasers at the facilities, the firm said.
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Telstra will look to grow its already massive mobile customer base through adding devices, rather than individuals.
Telstra insists that despite having more mobile subscribers than Optus and Vodafone combined, the company will still add more subscribers, but those are likely to be devices rather than people.
Vodafone has the worst quality of calls for mobile phone customers in rural areas, according to research by Ofcom.
The regulator looked at data from EE, O2, Three, and Vodafone on the performance of their networks.
Australian legal firm Maurice Blackburn said on Tuesday it had filed open class actions against five banks over late credit card fees worth hundreds of millions of dollars.
The legal proceedings could become one of Australia's biggest ever class actions, including hundreds of thousands of customers.
As the FCC moves to lift its ban on in-flight cellphone use, a ban that has been in place for more than 20 years, the Department of Transportation (DOT) is preparing to step in and lay down the law.
In late July, Wikipedia announced that it would accept donations in bitcoin.
In its first week of accepting bitcoin, Wikipedia racked up $140,000 in new funds, according to Coinbase, the service that powers its cryptocurrency influx.
Under more stringent censorship, WeChat promises to stop "rumors" from spreading on its instant messaging platform.
The Chinese National Internet Information Office released a new set of rules on August 7 restricting the distribution of information to the public through instant messaging apps.
Ecuador is on its way to signing in a law that would see the creation of a new government-backed digital currency and simultaneously ban the use of other cryptocurrencies in the country.
Ecuadorian President Rafael Correa is planning to sign into law a bill that would see the country create a government-backed cryptocurrency in order to help pay the nation's bills, according to a report by Bloomberg.
A Russian group has hacked 1.2 billion usernames and passwords belonging to more than 500 million email addresses, according to Hold Security - a US firm specialising in discovering breaches.
In 2009, Oslo became the first city to get 4G.
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Microsoft has filed a contract dispute suit against Samsung over Android patent-licensing royalties.
Microsoft has filed a contract dispute suit against Samsung over what Microsoft claims is a breach of contract by Samsung involving Android patent royalties.
Some 78 percent of Singaporeans shop online at least once a month, but more than half at 57 percent are concerned about their financial details falling into the wrong hands, reveals survey on e-commerce security.
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I had a hardcopy of this book. When I read this book, I thought I wanted to heard this book. That's why I bought the audio version of this book. This book is great to learn how to write better. I strongly recommend you to buy this book. The guide is simple and easy but strong. One thing I don't like is that this audio version is abridged so this is not the whole book.
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Nearly 100 students are taking part in summer classes at the Kane Elementary School.
The ŌĆ£summer schoolŌĆØ is for children who have completed classes from pre-kindergarten through fourth grade.
In a report at a meeting of the Kane School Board earlier this month, Elementary School Principal Linda Lorenzo said children ŌĆ£were invited to summer school based on academic needs.ŌĆØ
ŌĆØStudents will be working on targeted areas with the summer school staff,ŌĆØ she said. ŌĆ£Pre and post-assessments will track student progress and growth as a result of the summer school program.ŌĆØ
In other business at the 58-minute meeting, the school board:
See full article by purchasing the June 28 edition of The Kane Republican.┬Ā
Kane School Board
When:┬Ā Thursday, Aug. 9
Time:┬Ā 7 p.m.
Where:┬Ā Middle School auditorium


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Question: Is there a special technique or method to help when we are overtaken by emotion? Ram Dass: The question was, are there spiritual techniques when you are overcome by emotion? Well, I'll tell you, as your practice gets more and more powerful, what happens is you see the stuff as it starts before it… Read more »
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An Environmental Awakening
Question: I am the father of a three year old. It appears that, given the current trends, the planet will become uninhabitable before he can live out a normal life span. There will be a lot of suffering if human life on the planet comes to an end. I understand that it is all supposed… Read more »
Compassionate Action and Suffering
Question: How do you visualize taking compassionate action into the field to those that appear to be creating suffering? Ram Dass: In doing social action, you are often dealing with people who, by the nature of the way they are living their lives, are creating suffering. And how you do social action is like… Read more »
Using Emotions on the Spiritual Path
How can we use our emotions positively on our spiritual path? We can look at the practice of what is called devotional yoga, or Bhakti Yoga as it's called in Hinduism. For example, if your relationship is to say Christ- you could take a picture of Jesus and then think about the qualities of his… Read more »


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Careweneed.com: See the facts and compare your views on care
The Care & Support Alliance has developed an online tool which reveals key statistics about social care in each constituency in England.
Simply type in your postcode and find out how many older people, disabled people and carers live in your area to gain an idea of how crucial social care is to so many people.
We commissioned a YouGov survey which asked over 4,500 people across England what they thought about the state of care services for older and disabled people and how such support should be funded. You can take the survey and compare your results to other people in your area, of your age, or voting intention: www.careweneed.com
We launched the site at the political party conferences this autumn, where hundreds of MPs and other visitors engaged with the data on interactive screens at our exhibition stand.
The findings of our polling demonstrate that care is not just of crucial importance to hundreds of thousands of people, but a real election issue.
Chronic under-funding of social care over the last five years has led to a tightening of eligibility, which has seen fewer and fewer people getting the support they desperately need. Councils report that some £3.5bn has come out of the care system. In October, the Government published new national eligibility criteria for care under the Care Act reforms, which come into effect in April 2015. Research by the London School of Economics indicates that 340,000 people – who struggle to live independently – could be locked out of the new care system as a result of the changes.
Our polling
The YouGov poll we commissioned in September this year was one largest independent surveys of public attitudes to social care to date. The message from the public was loud and unanimous: people are not confident they will receive the care they might need and increased government expenditure on social care is their top priority along with health services. Check out the full findings here.
CSA response to Better Care Fund announcement (30 October 2014)
Today (30 October), the Department of Communities and Local Government, and the Department of Health, approved local plans for Better Care Fund (BCF) spending and announced further money for the scheme following increased investment from local authorities.
The Secretary of State for Health, Jeremy Hunt MP, wrote in the Telegraph yesterday that the £5.3 billion – an increase from the initial £3.8bn – will be invested in 151 plans across the country to help keep elderly people healthy at home, and avoid needless admissions to hospitals and care homes.
Responding to this announcement, Richard Hawkes, Chair of the Care & Support Alliance, said:
"The Better Care Fund is a bold and ambitious bid to address the crisis in care and move us closer to a preventive, more integrated, system that keeps people out of A&E and living independently.
"But the real issue is that chronic underfunding has seen a year-on-year rationing of support, which will not be addressed by this fund.
"The only long-term solution to the care crisis is a longer term investment in the overall funding for adult social care.
"The Barker Commission experts argue that as a country we can afford it.
"In fact we can't afford not to. Every day, our 76 organisations hear horror stories of older and disabled people who struggle to get the support they need to simply get up, get dressed and get out of the house. This has a huge impact on carers, who we know are struggling right now.
"Care – along with the NHS – is now undoubtedly an election issue. Our recent survey shows the public has lost confidence in the current system. It shows care, along with health, is where the public want the Government to invest more."
For more information, please visit http://careandsupportalliance.com/
CSA members respond to the Government's new national eligibility criteria for care (23 Oct 2014)
Age UK
Caroline Abrahams, Charity Director at Age UK, said:
"It is hugely disappointing that the new national eligibility criteria fail to give more people access to care. The care system is in a desperate place with funding failing to keep pace with rising demand. As a result, care is now restricted to only those in the greatest need. The situation is bleak for those older people who need help with everyday tasks –they are being denied their dignity and peace of mind when they are most vulnerable but without help could well end up in hospital. .
"Everyday day there is another horror story of an older person failed by the system and sadly things will not improve until the social care funding gap is filled. Politicians in every party need to recognise this and commit to action as an urgent priority."
Alzheimer's Society
Responding to the new national eligibility framework, Jeremy Hughes, Chief Executive at Alzheimer's Society said:
'In setting the eligibility criteria for council-funded social care so high thousands of people with dementia will be cut off from the vital support they need and deserve. It is absurd logic that services which help prevent people from reaching crisis point are given such low priority. People with dementia shouldn't be waiting for an emergency until someone steps in – our care services should be working to prevent that crisis from happening.
'Without hard cash the black hole in social care finances will suck the potential out of this opportunity for transformative change and we will continue to see people with dementia struggling to live from day-to-day.'
Independent Age
Care Act 2014 (part 1): In response to today's publication of statutory guidance and response to consultation, Janet Morrison, Chief Executive of Independent Age said:
"We welcome the new rules to support the Care Act, in particular the strengthening of protection for families from having to pay unfair top-up fees for relatives' care home costs. We also welcome the requirement for councils to improve information and advice services on care issues. However we think the government has missed an opportunity to liberalise the rules on who is eligible for social care, meaning that an estimated 235,000 older people will continue to be outside the system and need to either pay for care themselves, receive it from friends and families – or go without. This is shortsighted because many of those outside the care systems may as a result need to draw on health and other services earlier as a result"
Midland Heart
Ruth Cooke, CEO Midland Heart, in support of the Care & Support Alliance, said:
"We know that increasing demand and falling resources will together unhinge the aspirations of the new care reforms. This pressure means that the bar to accessing services is being raised.
"We are a provider of early intervention services for many vulnerable people and see the very positive difference preventative services can make. Its about helping an individual live with dignity and independence in their own home.
"With more people excluded from the care system, we will see countless older and disabled customers unable to get the vital services they need and they will simply hit crisis point.
"We need a bigger, honest whole system debate on making prevention truly work – it's a debate about funding, eligibility, integration and wellbeing."
Paul Farmer, Chief Executive of Mind, the mental health charity, said: "Social care isn't just for older people or those with physical disabilities. It can play a vital role in keeping people with mental health problems well and able to cope.
"We welcome some of the provisions in the guidance and regulations, in particular the inclusion of support for people to maintain and stay in their home. This will particularly help people with mental health problems and was something we have been campaigning for.
"However, without more funding in the system many people with mental health problems will be denied access to the care and support they need. A very low level of relatively inexpensive support with managing bills, doing the weekly food shop or getting out and socialising with others can make sure someone stays on their feet and manages their mental health problems well. Take that away and people can descend into illness, unable to get out of bed, wash, dress, get to work or maintain relationships. This has serious implications for other parts of the system such the NHS, as people reach crisis point and need much more intensive and expensive hospital or home-based health care.
"As NHS England today highlights, our NHS is straining at the seams. Mental health services in particular are struggling to cope with the numbers of people seeking support and the government would be well-advised to consider the long-term implications of denying thousands of people the basic social care support they need. A little initial investment will not only save money in the long run – it will save lives."
Threshold for social care "far too high"
National deafblind charity Sense today (23 October) warned that many disabled and older people will miss out on services they desperately need following the Government's publication of the regulations that set out who is eligible for social care from 2015 under the new Care Act.
Sue Brown, Head of Campaigns and Public Policy at Sense, said:
"The Care Act is an incredible opportunity for politicians to finally get social care right in the UK. However under the regulations released today the threshold for people to become eligible for social care is set far too high. As a result, many disabled and older people will miss out on the services they desperately need for day-to-day life. It is also vital that the Government releases enough funds for local authorities to provide the right level of support for what is currently a chronically underfunded system. Otherwise the Care Act will be built on sand.
"Inadequate social care has a knock on effect and results in further demands on the NHS. For example, the deafblind people we support can become more susceptible to falls or require hospital treatment because they didn't get the support they needed from social care. The Government must act and provide the funding that will allow disabled people to receive adequate care."
New care overhaul leaves 300k older and disabled people struggling to live on their own (23 Oct 2014)
Care & Support Alliance Press Release: New care overhaul leaves 300k older and disabled people struggling to live on their own (23rd October 2014)
Following a crucial Government announcement on its flagship care reforms, a coalition of more than 75 charities is calling on the Government to urgently reconsider plans that risk leaving more than 300,000 older and disabled people without support to things as basic as getting up, getting washed and getting out of the house.
With parties pledging support for the NHS, the Care and Support Alliance joins experts in arguing that an effective, preventative care system is the only way to ease the admissions crisis.
The CSA says that the care system is on its knees, with demand going up but fewer and fewer people getting support.
The Government brought in sweeping reform of the care system in May – ending the postcode lottery, backing carers and capping catastrophic costs.
The Government today publishes a final version of its new national criteria for social care eligibility – in other words, it reveals who will and who will not get care from April 2015.
Chronic underfunding of the care system has seen councils increasingly ration access to care to only those with the highest needs.
But the Government now confirms that it doesn't plan to reverse the trend.
Research by London School of Economics shows this means 340,000 people – who struggle to live on their own – will be locked out of the new care system.
The Care Minister, Norman Lamb, has previously said his intention is to set the level at the equivalent of 'substantial' in the current system. This formally excludes people who are misleadingly described as having moderate needs, but who actually struggle to do basic tasks without support.
The CSA argues that sitting behind this issue is a tale of chronic underfunding.
Councils report that some £3.5bn has come out of the care system in the last five years.
The Alliance is campaigning for a properly funded care system. The call to action follows YouGov polling which shows that the public have lost confidence in the current care system and that care – along with health – is the place they'd most like to see greater investment.
Richard Hawkes, Chair of the Care and Support Alliance, said:
"The Care Act is a ground-breaking piece of legislation – capping catastrophic care costs and ending the postcode lottery.
"But it will only live up to its promise of a genuinely preventative system that promotes wellbeing, if the Government re-thinks its plans to exclude so many older and disabled people from the system.
"Setting a high threshold for the care system is a bit like going to the doctor with a chest infection and being told to come back with pneumonia.
"Every day, our 76 organisations hear horror stories of older and disabled people who struggle to get the support they need to simply get up, get dressed and get out of the house.
"Care – along with the NHS – is now undoubtedly an election issue. Population changes mean more and more people need care. Yet fewer and fewer people get it, as chronic underfunding has seen a year-on-year rationing of support.
"Our survey shows the public has lost confidence in the current system. It shows care, along with health, is where the public want the Government to invest more.
"The only long-term solution to the care crisis is an increase in funding, and – as the Barker Commission experts rightly argue – as a country we can afford it. In fact we can't afford not to."
The CSA is on-hand for interviews, case studies and background information.
Contact Warren Kirwan in the Scope press office on 02076197200 or firstname.lastname@example.com.
The Care and Support Alliance was set up in July 2009. It is a consortium of over 75 organisations that represent and support older and disabled people, including disabled children, those with long-term conditions and their families, and campaigns to keep adult care funding and reform on the political agenda. For more information go to www.careandsupportalliance.com
Who are the "340,000"…
According to the research conducted by London School of Economics setting a high bar on eligibly (equivalent to substantial) would see the following people ineligible for council care:
- 69,000 working age disabled people with moderate needs not in the system
- 36,000 working age disabled people with moderate needs currently in the system
- 170,000 older people (over 65s) with moderate needs not currently in the system
- 65,000 older with moderate needs currently in the system
= 340,000
(From Fernández JL et al. (2013) Implications of setting eligibility criteria for adult social care services in England at the moderate needs level. London: PSSRU, LSE, http://www.pssru.ac.uk/archive/pdf/dp2851.pdf)
Care facts and figures
- There are about 1.3m older and disabled people who get care from councils and around a million others who need care and support to do the basics in life but don't get any help from their council.
- The care crisis is well documented. Age UK are reporting that almost 900,000 older people in England and Wales who struggle with such basic tasks as washing and dressing are being left to fend for themselves.
- Councils report that some £3.5bn has come out of the care system in the last five years. Of the 152 councils in England responsible for care, government figures show nearly 90% now offer care only to those with the highest level of needs. In those areas this means older and disabled people who are unable to undertake several aspects of personal care, or of work, education or training are no longer eligible for council-funded care.
- An independent YouGov survey of more than 4,500 people in England, commissioned by the Care & Support Alliance (CSA), shows that only around a quarter of people believe that if they needed it, they would receive enough care to would allow them a good quality of life.
- When it comes to just older people the figures are even starker. Two thirds of people aged 60+ believe the Government should be doing more on social care. Around seven in 10 are not confident they will receive good care. After the NHS, social care is the biggest priority for voters when it comes to government spending.
- In the words of the Minister, the Care Act represents the most significant reform of care and support in more than 60 years. The Care Act aims to modernise adult social care, end the postcode lottery, drive up quality of care, cap care costs, and promote wellbeing.
- The most important decision for older and disabled people will be whether they are entitled to care in the new system, due to come in in 2015. The proposals were published for public consultation in the summer 2014 and the Government published its final version on 23rd October 2014. Eligibility will also be used to determine who benefits from the 'cap on costs'.
- The Barker Commission recently released its report on how we create a system fit for the 21st Century and proposals for how we can afford it.
CSA response to the Alzheimer's Society's report on care costs for people with dementia (10 Sept 2014)
Responding to today's news about dementia care, Richard Hawkes, Chair of the Care and Support Alliance, said:
"Today's shock findings from Alzheimer's Society represent yet more evidence that care is in crisis.
"Care is now undoubtedly an election issue.
"Population changes mean more and more people need care. Yet fewer and fewer people get it, as chronic underfunding has seen a year-on-year rationing of support.
"Our survey shows the public has lost confidence in the current system. It shows care, along with health, is where the public want the Government to invest more.
"The only long-term solution to the care crisis is an increase in funding, and – as the Barker Commission experts rightly argue – as a country we can afford it. In fact we can't afford not to."
CSA Response to the Barker Commission's final report on the future of health and social care (4 September 2014)
The Barker Commission on the Future of Health and Social Care in England published its final report today: http://www.kingsfund.org.uk/publications/new-settlement-health-and-social-care
Responding to the report, Richard Hawkes, Chair of the Care & Support Alliance, said:
"The Commission is right not to pull its punches. The only long-term solution to the care crisis is an increase in funding, and – yes – as a country we can afford it.
"Care is undoubtedly an election issue. Our survey published this week shows the public has lost confidence in the current system. It shows care, along with health, is where the public want the Government to invest more.
"Population changes mean more and more people need care. Yet fewer and fewer people get it, as chronic underfunding has seen a year-on-year rationing of support.
"The Barker Commission has rightly put the spotlight on how we create a system fit for the 21st Century and come up with realistic proposals for how we can afford it.
"It's positive that they're thinking not just about people who get care at the moment, but also the half a million people who would've got care in 2009 – and who now find themselves squeezed out of the system.
"The Commission recommends bringing them back into the system in 2025. But 10 years is a long time to wait to get support if you're struggling to live independently – so we'd like to see the Government progress this faster than that."
See the results of our YouGov poll which asked more than 4,700 people about their attitudes to social care: http://careandsupportalliance.com/2014/08/31/csa-press-release-the-english-public-has-given-a-vote-of-no-confidence-in-the-care-system-31-august-2014/
CSA members respond to our YouGov findings revealing majority of public concerned about care
Mike Adamson, Acting Chief Executive of the British Red Cross said:
"It is clear that care is an issue which the majority of people have real concerns about, young and old alike. People are not confident that our care system would provide them with the support they would need if they were to lose their independence.
"From 2015 the new Care Act will set eligibility for state-funded care at a level which will mean only those with the most serious needs will qualify for support.
"This is despite a wealth of evidence that supporting people with moderate and low-level needs makes economic sense. It enables people to live fulfilling lives in which they can participate in society and can prevent the need for further support from the health and social care system.
"In our experience this is particularly true for frail older people, who are often capable of living independently but could need support at critical times such as following a discharge from hospital.
"Creating a care system which is truly committed to wellbeing, prevention and integration is clearly a priority for everyone, but it will not happen if the Government does not ensure that there is sufficient funding at all levels of the system."
Mark Lever, Chief Executive of the National Autistic Society, said:
"The funding and eligibility models for social care do not stack up.
"The care system should give people with autism the support they need to stay safe and healthy, and protect them from abuse, neglect and loneliness. Proper investment is needed to ensure this is the case.
"The voting public are crying out for a proper commitment to rectify the care system. This demand must be heeded before it is allowed to deteriorate any further."
Caroline Abrahams, Charity Director at Age UK says:
"These polls underline how anxious older people now are as more and more people become aware of just how broken our social care system has become and realise that they really can't rely on care to be there for them if and when they need it.
'People of all ages deserve to feel confident that if they need help they will get it. Instead, hundreds of thousands of vulnerable people and their families are being abandoned to sink or swim alone and simply struggle as best they can with those everyday tasks such as dressing, or washing, or going to the toilet or preparing food, that the rest of us take for granted."
Paul Farmer, Chief Executive of Mind, the mental health charity, said:
"Social care services are incredibly important in helping some people with mental health problems stay well and live independently in the community but many find it hard to access the support they need. Mental health problems are often hidden or have fluctuating symptoms and, in a cash-strapped system, people with mental health problems lose out because they struggle to demonstrate their need for care and support.
"Investment in social care for people with mental health problems would lead to savings to the wider welfare and healthcare systems, as people stay well and active in the community, are more likely to return to work and are less likely to require costly acute healthcare."
Mario Ambrosi, Anchor's Head of Corporate Affairs says:
"The Alliance's report sends a clear message to the government: more needs to be done to support the social care sector through increasing its funding.
"While increasing funding to the sector is key, there are other issues identified in Anchor's recent Grey Pride manifesto that must be addressed, such as institutional ageism in health, lack of appropriate retirement housing, and the dysfunctional relationship between the NHS and social services.
"We at Anchor believe that to really make changes that will benefit older people today and future generations, someone must take on this responsibility at Cabinet level. This is why we have been calling for a Minister for Older People since 2011. It is imperative the government shows that it is prepared and committed to addressing the needs of Britain's ageing population."
Sue Brown, Head of Public Policy at Sense, said:
"This survey reveals that three out of four people are deeply concerned about the level of social care they would receive if they needed it. But for the deafblind people we support, this is already the reality and many are not receiving the support they desperately need.
"Without the right support deafblind people risk becoming trapped in their homes without the opportunity to participate in the community. Inadequate social care has a knock on effect and results in further demands on the NHS.
"The results of the survey show that social care is high on the agenda for most people and that there is a need to fix what is currently a broken system. Not just for the people that need care now, but for everyone that will in the future. The Care Act is an incredible opportunity to ensure the future of social care in this country. It is vital that the Government releases enough funds for local authorities to provide the right level of support for what is currently a chronically underfunded system."
Commenting on the Care & Support Alliance YouGov poll into the level of funding for care needs, Ruth Cooke CEO Midland Heart said:
"Appropriate Government funding to deliver the right care system is absolutely critical. Every single local authority we work with is faced with massive financial pressures. We are told we will lose 50% funding in some adult social care areas by the end of the year, with local authorities having to make incredibly difficult choices about what they fund and what they cut.
"Providers also need to make changes to the services we deliver -often we work with the same customers as our health colleagues and we also want the right reform to give the best outcomes for our customers. Too much is at stake if our health and care services don't deliver – for our most vulnerable customers it's their dignity, their health, quality and enjoyment of life."
Responding to the CSA YouGov poll, Paul Breckell, Chief Executive of charity Action on Hearing Loss (formerly RNID), said:
"As the UK's largest hearing loss charity and a member of the Care and Support Alliance, we support the call for increased investment into the extremely underfunded social care sector. One in six of us has some form of hearing loss and with a growing ageing population this figures is set to increase dramatically. Many of those already affected by hearing loss are denied access to the support and equipment they need to stay healthy, safe and independent and the 250,000 care home residents with hearing loss are often left isolated in a world of silence due to a lack of support and deaf awareness. Effective management of hearing loss can have a huge impact on people's health, wellbeing and safety and improves the management of any other health conditions that they have, reducing the need for more intensive care and saving the NHS millions of pounds in the long run."
Mencap spokeswoman, Loraine Bellamy, who has a learning disability, expressed her pleasure at hearing the public's backing for greater funding in social care. However, the survey revealed a huge lack of confidence in the care system, with just 3% of people saying they were very confident that they or a close family member would get a sufficient level of care provided to have a good quality of life. While 24% say there were fairly confident and 13% said they did not know.
Mencap spokeswoman Loraine Bellamy, who has a learning disability, said:
"I am delighted to hear that the public want to see more money spent on social care. For myself, and many other vulnerable people, social care means we are able to go out and be part of our communities. Without help with things such as managing money, washing or medication many vulnerable people would be stuck indoors and isolated. I am lucky enough to have a full-time job, but this is possible because I receive the support I need. Without the support of social care I fear of going back into my shell and being isolated.
"I am glad the government can now see how the general public thinks social care is one of the most important issues for the entire country. I hope they listen to this message and do not ignore the country's wishes for more funding in the care system"
Shan Nicholas, United Response Interim CEO said, "The clear "vote of no confidence" issued in the Care & Support Alliance survey displays that the public are waking up to the reality of the social care crisis. Local Authority budgets are being squeezed down to providing a level of care that is at best just "sufficient". However, United Response firmly believes that meaningful social care should be far more than just the bare minimum – it is about respecting dignity and providing choice. Ultimately, the care we provide to the most vulnerable sends a clear message about our priorities as a society. We need to get those priorities right."


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Book your room at Rooms Damira Split
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Triple RoomMax Occupancy: 3 guests (up to 2 children, 2 infants)
Hotel in Split, walk to Diocletian's Palace
Located in the heart of Split, this hotel is within a 10-minute walk of Natural History Museum, Diocletian's Palace, and Gregory of Nin Statue. Cathedral of Saint Domnius and Mestrovic Gallery are also within 2 mi (3 km).
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This hotel features tour/ticket assistance.
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All 4 rooms provide conveniences like sitting areas and refrigerators, plus free WiFi and balconies. Other amenities available to guests include memory foam beds, TVs, and separate bathtubs and showers.Information missing or incorrect? Tell us!
Rooms Damira Split
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Hotel Amenities
Rooms Damira Split features tour/ticket assistance.
- Breakfast available (surcharge)
- Total number of rooms - 4
- Number of floors - 3
- Tours/ticket assistance
- Year Built 1891
- Number of buildings/towers - 1
Room Amenities
- Balcony
- Separate sitting area
- Refrigerator
- Coffee/tea maker
- Hair dryer
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Continental breakfasts are available for a surcharge and are served each morning between 7:30 AM and 9:30 AM.
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The recreational activities listed below are available either on site or nearby; fees may apply.
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To make requests for specific accessibility needs, complete the "Special or Accessibility Requests" section of "Trip Preferences" when you book your hotel.
- Accessible bathroom
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Special requests are subject to availability upon check-in and may incur additional charges. Special requests cannot be guaranteed.
- No onsite parking is available.
- Breakfast fee: HRK 7 for adults and HRK 5 for children (approximately)


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February 13, 2014
Karmak Inc. introduces Lisa McCloud as Director of Marketing.Since joining the Karmak team in May, McCloud has been charged with leading marketing efforts focused on the goal of providing value and being a useful source of information for its customers. McCloud brings with her nearly 20 years of marketing experience in roles that range from product management to eCommerce, corporate communications to customer service.
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Shoes for Wayne
Hey Wayne, we talked on that thing called Instagram a week ago and I wanted to show you somma my art. Here are a pair of Alex Grey shoes I drew awhile back for someone that I thought you'd like. I like to make these for people and I'd love to do a pair for you or any of your bandmates sometime for free with whatever you'd want on it! Next time you guys are in Chicago playing a show I'll come with some of my artwork or find a way to mail it if you like. Have yourself a weird day and hopefully we will meet someday soon -Alex Manley @alex5292
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Will the United States support Ukraine's opposition forces?Asked by Isaiah Smith, from Birdville High School
It is in the interests of the United States to see Ukraine emerge as a stable democracy with strong economic and political ties to the...
Speaker: Charles A. Kupchan, Whitney Shepardson Senior Fellow, Council on Foreign Relations
February 28, 2014
Ukraine's new government faces several challenges in the coming weeks. However, a successful and careful transition could usher in a new era for the country, bringing in political and economic reforms that afford it more autonomy away from Russia's sphere of influence. Charles Kupchan, CFR's Whitney Shepardson Senior Fellow, highlights three things to know about Ukraine's way forward:
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Maximalist finds lessons in the past that anticipate and clarify our chaotic present, revealing the history of U.S. foreign policy in an unexpected new light. More
This clear and authoritative book presents a sweeping account of China's global resource quest and the unrivaled expansion of its economy. More
The story of the tragic and often tormented relationship between the United States and Pakistan, and a call to prepare for the worst, aim for the best, and avoid past mistakes. More
This Independent Task Force asserts that elevating and prioritizing the U.S.-Canada-Mexico relationship offers the best opportunity for strengthening the United States and its place in the world.
This Independent Task Force report finds that as more people and services become interconnected and dependent on the Internet, societies are becoming increasingly vulnerable to cyberattacks.
The authors argue that it is essential to begin working now to expand and establish rules and norms governing armed drones, thereby creating standards of behavior that other countries will be more likely to follow.
The author examines Pakistan's complex role in U.S. foreign policy and advocates for a two-pronged approach that works to quarantine threats while integrating Pakistan into the broader U.S. agenda in Asia.
The authors assess the political, security, and economic challenges facing U.S. policymakers in Afghanistan and evaluate a range of policy options.
Learn more about CFR�s mission and its work over the past year in the 2014 Annual Report. The Annual Report spotlights new initiatives, high-profile events, and authoritative scholarship from CFR experts, and includes a message from CFR President Richard N. Haass.
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It is in the interests of the United States to see Ukraine emerge as a stable democracy with strong economic and political ties to the...
With the annexation of Crimea and rhetoric about protecting Russians in the near abroad, President Vladimir Putin has helped launch a new...
The crisis has spiraled into conflict that has killed thousands and continues to feed tensions between Russia and Western powers over...
How dangerous is the situation in Crimea and what next for the fledgling government set up in Ukraine? This issue guide offers background and...


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A nonvolatile memory array includes floating gates that have an inverted-T shape in cross section along a plane that is perpendicular to the direction along which floating cells are connected together to form a string. Adjacent strings are isolated by shallow trench isolation structures. An array having inverted-T shaped floating gates may be formed in a self-aligned manner.
1. A method of forming an array of non-volatile memory cells on a semiconductor substrate having a surface, comprising:
forming a dielectric layer on the surface of a substrate;
forming a first conductive layer over the dielectric layer;
forming trenches in the substrate, the trenches separate the first conductive layer into a plurality of first conductive portions, the trenches separate the dielectric layer into a plurality of gate dielectric regions that are self-aligned to the plurality of first conductive portions;
forming a plurality of shallow trench isolation structures in the trenches, the shallow trench isolation structures extend in a first direction and are spaced apart in a second direction that is perpendicular to the first direction;
subsequently forming a plurality of sidewall spacers that extend in the first direction along exposed sidewalls of ones of the plurality of shallow trench isolation structures, the plurality of sidewall spacers overlying first conductive portions;
subsequently forming a plurality of second conductive portions defined by the plurality of sidewall spacers and contacting the first conductive portions; and
subsequently removing the plurality of sidewall spacers thereby exposing surfaces of the plurality of first conductive portions and the plurality of second conductive portions.
2. The method of
3. The method of
4. The method of
5. The method of
6. A method of forming an array of non-volatile memory cells on a semiconductor substrate having a surface, comprising:
forming a dielectric layer on the surface of a substrate;
forming a first conductive layer over the dielectric layer;
forming trenches in the substrate, the trenches separate the first conductive layer into a plurality of first conductive portions, the trenches separate the dielectric layer into a plurality of gate dielectric regions that are self-aligned to the plurality of first conductive portions;
forming a plurality of shallow trench isolation structures in the trenches, the shallow trench isolation structures extend in a first direction and are spaced apart in a second direction that is perpendicular to the first direction, the plurality of shallow trench isolation structures separated by the plurality of first conductive portions;
subsequently forming a plurality of sidewall spacers that extend in the first direction along exposed sidewalls of ones of the plurality of shallow trench isolation structures, the plurality of sidewall spacers overlying first conductive portions;
deliberately forming a cavity in individual ones of the first conductive portions;
subsequently forming a plurality of second conductive portions defined by the plurality of sidewall spacers and contacting the first conductive portions, forming the plurality of second conductive portions includes filling the cavity in individual ones of the first conductive portions; and
subsequently removing the plurality of sidewall spacers thereby exposing surfaces of the plurality of first conductive portions and the plurality of second conductive portions.
7. The method of
8. The method of
9. The method of
10. The method of
11. The method of
This application is related to U.S. patent application Ser. No. 11/534,139, entitled, "Nonvolatile Memory with Reduced Coupling Between Floating Gates," filed on the same day as the present application; which application is incorporated in its entirety by reference as if fully set forth herein.
This invention relates generally to non-volatile flash memory systems, and, more specifically, to the structures of memory cells and arrays of memory cells, and to the process of forming them. All patents, patent applications and other documents cited in the present application are hereby incorporated by reference in their entirety.
There are many commercially successful non-volatile memory products being used today, particularly in the form of small form factor cards, which use an array of flash EEPROM (Electrically Erasable and Programmable Read Only Memory) cells. In one type of architecture, a NAND array, a series of strings of more than two memory cells, such as 16 or 32, are connected along with one or more select transistors between individual bit lines and a reference potential to form columns of cells. Word lines extend across cells within a large number of these columns. An individual cell within a column is read and verified during programming by causing the remaining cells in the string to be over driven so that the current flowing through a string is dependent upon the level of charge stored in the addressed cell. An example of a NAND architecture array and its operation as part of a memory system is found in U.S. Pat. No. 6,046,935.
In another type of array having a "split-channel" between source and drain diffusions, the floating gate of the cell is positioned over one portion of the channel and the word line (also referred to as a control gate) is positioned over the other channel portion as well as over the floating gate. This effectively forms a cell with two transistors in series, one (the memory transistor) with a combination of the amount of charge on the floating gate and the voltage on the word line controlling the amount of current that can flow through its portion of the channel, and the other (the select transistor) having the word line alone serving as its gate. The word line extends over a row of floating gates. Examples of such cells, their uses in memory systems and methods of manufacturing them are given in U.S. Pat. Nos. 5,070,032, 5,095,344, 5,315,541, 5,343,063, 5,661,053, and 6,281,075.
A modification of this split-channel flash EEPROM cell adds a steering gate that provides a strong capacitive coupling to the floating gate without having direct control of the channel. Each steering gate of an array extends over one column of floating gates, perpendicular to the word line. The effect is to relieve the word line from having to perform two functions at the same time when reading or programming a selected cell. Those two functions are (1) to serve as a gate of a select transistor, thus requiring a proper voltage to turn the select transistor on and off, and (2) to drive the voltage of the floating gate to a desired level through an electric field (capacitive) coupling between the word line and the floating gate. It is often difficult to perform both of these functions in an optimum manner with a single voltage. With the addition of the steering gate, the word line need only perform function (1), while the added steering gate performs function (2). For source side injection programming, efficient programming is obtained by driving the select gate just barely (by for example 0.5V) about its threshold voltage, whereas the steering gate voltage will be incrementally increased from one programming pulse to the next, with verify and lockout operation performed in between programming pulses. The use of steering gates in a flash EEPROM array is described, for example, in U.S. Pat. Nos. 5,313,421 and 6,222,762.
In any of the types of memory cell arrays described above, the floating gate of a cell is programmed by injecting electrons from the substrate to the floating gate. This is accomplished by having the proper doping in the channel region and applying the proper voltages to the source, drain and remaining gate(s).
Two techniques for removing charge from floating gates to erase memory cells are used in the three types of memory cell arrays described above. One is to erase to the substrate by applying appropriate voltages to the source, drain and other gate(s) that cause electrons to tunnel through a portion of a dielectric layer between the floating gate and the substrate. The other erase technique is to transfer electrons from the floating gate to another gate through a tunnel dielectric layer positioned between them. In the second type of cell described above, a third erase gate is provided for that purpose. In the third type of cell described above, which already has three gates because of the use of a steering gate, the floating gate is erased to the word line, without the necessity to add a fourth gate. Although this latter technique adds back a second function to be performed by the word line, these functions are performed at different times, thus avoiding the necessity of making a compromise because of the two conflicting requirements. When either erase technique is utilized, a large number of memory cells are grouped together for simultaneously erasure, in a "flash." In one approach, the group includes enough memory cells to store the amount of user data stored in a disk sector, namely 512 bytes, plus some overhead data. In another approach, each group contains enough cells to hold several thousand bytes of user data, equal to many disk sectors' worth of data. Multi-block erasure, defect management and other flash EEPROM system features are described in U.S. Pat. No. 5,297,148.
As in most integrated circuit applications, the pressure to shrink the silicon substrate area required to implement some integrated circuit function also exists with flash EEPROM systems. It is continually desired to increase the amount of digital data that can be stored in a given area of a silicon substrate, in order to increase the storage capacity of a given size memory card and other types of packages, or to both increase capacity and decrease size. One way to increase the storage density of data is to store more than one bit of data per memory cell. This is accomplished by dividing a window of a floating gate charge level voltage range into more than two states. The use of four such states allows each cell to store two bits of data, eight states stores three bits of data per cell, and so on. A multiple state flash EEPROM structure and operation is described in U.S. Pat. Nos. 5,043,940 and 5,172,338.
Increased data density can also be achieved by reducing the physical size of the memory cells and/or the overall array. Shrinking the size of integrated circuits is commonly performed for all types of circuits as processing techniques improve over time to permit implementing smaller feature sizes. But there are usually limits of how far a given circuit layout can be shrunk in this manner, since there is often at least one feature that is limited as to how much it can be shrunk, thus limiting the amount that the overall layout can be shrunk. When this happens, designers will turn to a new or different layout or architecture of the circuit being implemented in order to reduce the amount of silicon area required to perform its functions. The shrinking of the above-described flash EEPROM integrated circuit systems can reach similar limits.
Another flash EEPROM architecture utilizes a dual floating gate memory cell along with the storage of multiple states on each floating gate. In this type of cell, two floating gates are included over its channel between source and drain diffusions with a select transistor in between them. A steering gate is included along each column of floating gates and a word line is provided thereover along each row of floating gates. When accessing a given floating gate for reading or programming, the steering gate over the other floating gate of the cell containing the floating gate of interest is raised sufficiently high to turn on the channel under the other floating gate no matter what charge level exists on it. This effectively eliminates the other floating gate as a factor in reading or programming the floating gate of interest in the same memory cell. For example, the amount of current flowing through the cell, which can be used to read its state, is then a function of the amount of charge on the floating gate of interest but not of the other floating gate in the same cell. Examples of this cell array architecture and operating techniques are described in U.S. Pat. Nos. 5,712,180, 6,103,573 and 6,151,248.
In these and other types of non-volatile memories, the amount of field coupling between the floating gates and the control gates passing over them is carefully controlled. The amount of coupling determines the percentage of a voltage placed on the control gate that is coupled to its floating gates. The percentage coupling is determined by a number of factors including the amount of surface area of the floating gate that overlaps a surface of the control gate. It is often desired to maximize the percentage coupling between the floating and control gates by maximizing the amount of overlapping area. One approach to increasing coupling area is described by Yuan et al in U.S. Pat. No. 5,343,063. The approach described in that patent is to make the floating gates thicker than usual to provide large vertical surfaces that may be coupled with the control gates. Another approach that increases area coupling a floating gate and a control gate is described by Yuan in U.S. Pat. No. 6,908,817.
When increasing the vertical coupling areas between adjacent floating and control gates, it is further desirable to do so in a manner that does not increase the area of the substrate that is occupied by each cell. Also, it is preferable to reduce the floating gate to floating gate coupling, so that adjacent floating gates do not greatly affect each other.
A nonvolatile memory array stores charge in floating gates that have an inverted-T shape in cross section along the word line direction. This shape reduces coupling between adjacent floating gates in the bit line direction because of the reduced area of opposing floating gate facets in the bit line direction. The reduction in the dimension of the upper portion of such a floating gate, compared to a floating gate with a rectangular shape, provides more space for a control gate and dielectric layer between adjacent floating gates in the word line direction. A memory array with floating gates having an inverted-T shape may be produced using various processes.
One process for forming an inverted-T shaped floating gate forms STI structures and channel regions that extend in the bit line direction using masking portions. By forming masking portions using resist slimming, channel regions are made narrower than STI structures. Channels may also be narrower than the minimum feature size (F) of the lithographic process used. Subsequently, a first floating gate layer is formed and additional masking portions with sidewall spacers are used to pattern the first floating gate layer into first floating gate portions that are wider than underlying channel regions (and may be wider than F), thus providing a high tolerance for misalignment between the first floating gate portions and channel regions. Subsequently, yet another set of masking portions and sidewall spacers is formed so that slots between sidewall spacers extend from first floating gate portions. Second floating gate portions are formed in the slots. Subsequently, a dielectric layer and control gate layer are formed over the floating gates and an etch is performed to separate the control gate layer into word lines and, at the same time, separate floating gate portions into individual floating gates.
Another process for forming an inverted-T shaped floating gate forms a first floating gate layer and then uses masking portions over the first floating gate layer to establish locations for STI structures so that STI structures are self aligned to first floating gate portions formed from the first floating gate layer. STI structures have sidewalls that extend vertically to a level higher than first floating gate portions. Sidewall spacers are formed on these sidewalls so that sidewall spacers leave slots over first floating gate portions. Second floating gate portions are formed in these slots so that they are self aligned to the first floating gate portions. Subsequently, sidewall spacers are removed and STI structures are partially etched back. A dielectric layer and a control gate layer are deposited over the floating gate portions. The dielectric layer, control gate layer and floating gate portions are then etched together so that word lines are formed that are self aligned to floating gates.
Another process for forming an inverted-T shaped floating gate forms a floating gate layer with masking portions extending in the bit line direction. The floating gate layer is partially etched using the masking portions to cover parts of the floating gate layer that then form vertical projections when unmasked portions of the floating gate layer are removed. The floating gate layer is not etched through by this partial etching. Subsequently, sidewall spacers are formed on the sidewalls of vertical projections by an oxidation process that reduces the thickness of vertical projections. Then, these sidewalls are used as a mask to etch through the floating gate layer, thus forming separate floating gate portions. Sidewall spacers are also used as a mask for etching into the underlying substrate to form STI trenches. Silicon Dioxide is added to fill the trenches. Masking portions and sidewall spacers are removed and a dielectric layer and a control gate layer are deposited. The control gate layer, dielectric layer and floating gate portions are then etched together to form word lines that are self aligned to floating gates.
Memory Operation
An example of a memory system 100 incorporating the various aspects of the present invention is generally illustrated in the block diagram of
The controller 180 is connectable through lines 140 to a host device (not shown). The host may be a personal computer, notebook computer, digital camera, audio player, various other hand held electronic devices, and the like. The memory system 100 of
The decoder and driver circuits 130 and 190 generate appropriate voltages in their respective lines of the array 110, as addressed over the bus 160, according to control signals in respective control and status lines 135 and 195, to execute programming, reading and erasing functions. Any status signals, including voltage levels and other array parameters, are provided by the array 110 to the controller 180 over the same control and status lines 135 and 195. A plurality of sense amplifiers within the circuit 130 receive current or voltage levels that are indicative of the states of addressed memory cells within the array 110, and provides the controller 180 with information about those states over lines 145 during a read operation. A large number of sense amplifiers are usually used in order to be able to read the states of a large number of memory cells in parallel. During reading and program operations, one row of cells is typically addressed at a time through the circuits 190 for accessing a number of cells in the addressed row that are selected by the circuit 130. During an erase operation, all cells in each of many rows are typically addressed together as a block for simultaneous erasure.
A plan view of an example of a NAND memory cell array 110 formed on a silicon substrate is shown in
Between STI structures 210 a-d, there are strings 220 a-c of memory cells running in the y-direction. Thus, the direction of the strings is parallel to the direction of the STI structures. Each of strings 220 a-c includes many memory devices connected in series.
An exemplary memory cell includes a floating gate 230 and conductive source/drain regions 240 a-b in the substrate adjacent to floating gate 230, on either side in the y-direction. Strings are separated by STI structures 210 a-d. STI structures 210 a-d form isolating elements that electrically isolate source/drain regions from source/drain regions of cells in adjacent strings. Along the y-direction source/drain regions are shared by adjacent cells. The source/drain regions electrically connect one cell to the next cell thus forming a string of cells. The source/drain regions 240 a-c in this example are formed by implanting impurities into the substrate in the required areas.
Floating gates shown in the embodiment of
Lower and upper floating gate portions 231, 232 of this embodiment are both made of doped polysilicon. Polysilicon may be deposited in an undoped form and later implanted to form doped polysilicon or may be deposited in doped form. In one embodiment, lower floating gate portion 231 is deposited as undoped polysilicon and upper floating gate portion 232 is deposited as doped polysilicon. Later, after being subject to elevated temperatures for some period during processing, dopant from upper floating gate portion 232 diffuses into lower floating gate portion 231 so that it too becomes doped and conductive. Other suitable electrically conductive materials may also be used in place of doped polysilicon. Lower floating gate portion 231 and upper floating gate portion 232 may also be deposited in a single layer instead of two separate layers.
Word lines 250 a-c are shown extending across the array in the x-direction in
Not shown in
Process for Forming Inverted-T Floating Gate
Subsequent to the planarizing step, a gate dielectric layer 617 (in this example, Silicon Dioxide) is formed across substrate 305 (e.g. by thermal oxidation or deposition) and a first conductive layer 519 of conductive material (in this example, polysilicon) is deposited over gate dielectric layer 617 as shown in
One advantage of the structure of
An advantage of the structure of
Another advantage of the embodiment of
Self-Aligned Process
An alternative process to that described above uses self-alignment to produce features that do not need a separate alignment step to establish their relative locations. By not requiring separate alignment steps, the overall process flow may be simplified and thus, costs may be reduced. In addition, failure due to misalignment may be reduced or eliminated.
Sidewall Oxidation Process
In an alternative embodiment, inverted-T shaped floating gates are formed by shaping a conductive layer by removal of conductive material and subsequently separating the conductive layer into separate conductive portions and forming STI trenches so that they are self-aligned to conductive portions.
Subsequently, a dielectric layer 2818 is deposited over conductive portions 2404 a-c and a control gate layer 2820 is deposited over dielectric layer 2818 as shown in
Although the various aspects of the present invention have been described with respect to exemplary embodiments thereof, it will be understood that the present invention is entitled to protection within the full scope of the appended claims.
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Hi, I'm trying to install an extension for WorldPay payments. When I enter the extension key and hit "Install" I get the following error
Failed to download magento-community/Phoenix_Worldpay within preferred state "stable", latest release is version 0.9.0beta, stability "beta", use "channel://connect.magentocommerce.com/community/Phoenix_Worldpay-0.9.0beta" to installCannot initialize 'channel://connect.magentocommerce.com/community/Phoenix_Worldpay', invalid or missing package fileInstall ErrorsPackage "channel://connect.magentocommerce.com/community/Phoenix_Worldpay" is not validPEAR ERROR: install failed
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Settings --> Preferred State: --> Change to Beta
Lol. Obviously! Thanks!
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iPevo SO-10W Skype Phone – 8
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Grew up back East, got sick of the cold and headed West. Since I was small I have been pushing buttons - both electronic and human. With an insatiable need for tech I thought "why not start a blog focusing on technology, and use my dislikes and likes to post on gadgets."
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