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PowUpload 1.0
PowUpload is an ASP.Net file upload control that enables an ASP.NET application to capture and save files uploaded to the web server by a browser. PowUpload is fully compatible with the standard files upload protocol defined in RFC1867 for the HTML POST Form. PowUpload handles and stores the contents of the POST request to a file on the server hard disk rather than loading large file into memory as the built-in ASP.NET upload support does.
See also: file upload, file upload component, upload files, asp net file upload, .net file upload, upload file in asp net, upload file to server, upload files asp, upload files to web, upload files web, upload large files, web file upload, http file upload
PowUpload .NET 1.1
MultiPowUpload 1.5
MultiPowUpload ? multiple file upload component. It is easy client-side solution that can be used to perform file uploads from a user machine to the web server. It needs just Flash player plug-in on users side and any standard file upload script on server side. MultiPowUpload features include: multiple file selection, rich progress and status information, file filters by extension, possibility to cancel an upload anytime.
See also: multiple upload, multiple file upload, upload multiple files, flash upload, multiple image upload, multiple file uploads, net multiple file upload, upload multiple images, asp net multiple file upload, php multiple upload, cgi multiple upload file
HTML Help Generator for VS.NET 2003 2.0
HTML Help Generator for Visual Studio.NET creates context sensitive HTML Help for your applications in seconds. Features HTML page and image generation, table of contents, index and search, images with hotspots and export to Word. The wizard lets you set many options for page layout and application specific information. Results can also be exported as Word document (documentation) or to your website.
See also: html help compiler, html help authoring, create html help file, htmlhelp, HHW, html help workshop, html help, NET, VS.NET, Visual Studio, html code help, html codes help, winhelp, technical documentation, user documentation, documentation
GetByMail 184.108.40.206
With GetByMail you can stay at home and have access to your office computer and vice versa through your e-mail account. You can get remote directory listings, download/upload files and directories, perform change dir, make dir, rename and delete operations, capture remote computer desktop screens. GetByMail gives you a unique ability to share files on your computer with other people simply through e-mail. GetByMail is compatible with Gmail.
See also: download upload, ftp, share files, file sharing, remote access, mail, gmail, getbymail, remote, p2p
WinSuperKit 6.0 Build 558
WinSuperKit is a powerful network toolkit that is used to list ip address and MAC address of all PCs on network neighborhood, find ip address of a special host or host name of a specail ip address on internet or intranet, ping a host, trace routes and display the geographical location of the ip address. It can capture network packet, monitor network speed and compare files, can setup the date of your computer with network timer.
See also: search, net clock, capture, file, compare, location, geographical, trace, address, find, monitor
Natural Born Chatter 2.9.8
Popular text chat solution that was designed specifically for small and medium local area networks. It doesn't require an Internet connection or a dedicated server, because it utilizes your network, enabling your staff to prioritize and communicate effectively. This program makes it easy to simultaneously exchange files, clipboard data, and text messages. Best of all, your users will have equal access to all of the tools and functions.
See also: chatting, ICQ, network, area, local, room, communication, netsend, receive, send, network, net, transfer, file, replacement, winpopup, chat, secure, messages, messaging, messenger, instant, lan, chatter, born, natural, broadcast
FTP Now 2.6.31
FTP Now is a fast, multi-threaded Windows FTP client software with the look-and-feel of Windows Explorer. It makes moving files between the Internet and your computer as simple as local file manipulation. Features include full drag and drop FTP upload and download, transfer entire folders at once, connection wizard, upload/download multiple files simultaneously, fully customizable user interface, CERN proxy support, and bookmark remote folders.
See also: ws_ftp, cuteftp, cute, bulletproof, getright, voyager, web, broken, restart, recover, resuming, resume, explorer, site, ftpsite, engine, pro, command, search, ftpnow, free, ware, share, downloads, download, upload, transfer, files, file, client, ftp
SyncBackSE 188.8.131.52
Easily backup, synchronize, or restore your files to another drive, FTP server, ZIP file, networked drive, or removable media. Highly configurable, SyncBackSE includes: open/locked file copying; fast backup; true synchronization; SSL, TLS, MODEZ, UTF8 support; email results; simulated backups; file filters; copy verification; background backups; auto-close of programs; easy and expert modes; profile groups; and extensive context sensitive help.
See also: cdr backup, backup for window 2000, backup os, backup drive software, backup zip, backup express, lan backup, online data, window xp backup, server backup, microsoft backup, backup strategy, backup device, nt backup, free backup, data backup software, network backup, email backup, hard disk backup, internet backup, backup and restore, ms backup, netware backup, disk backup, backup xp, backup copy dvd, backup drive, remote backup, backup program, free backup software backup now, backup mypc, window backup, backup utility, computer backup, hard drive backup, backup system, outlook backup, online backup, file backup, pc backup, outlook express backup, data backup, cd backup, dvd backup, backup software, backup removable media, task scheduling, restore, ftp, zip, synchronization, synchronisation, sync, backup, backup free ware, backup cds, ftp backup, net backup, network backup software, pc game backup, simple backup, backup and recovery, backup dvd serial, data protection, archive, data recovery, SSL, TLS, open file handler, open file backup, fast backup
SynchronEX File Sync/FTP/DAV for Linux 22.214.171.124
Realizes robust multi-directional file tree synchronization and backup over local & network paths in any situation: From laptop synchronization to scheduled backup tasks to incremental FTP/FTPS/DAV website upload. Supports true synchronization of (re)moved files and directories, provides collision detection, advanced wildcard filters, ZIP compression and Python script automation. More than 15 GUI wizards. Duplicate file finder included.
See also: mirroring, files, duplicate, incremental, tree, detection, collision, copy, directories, synchronisation, synchronization, free, directory, upload, webdav, dav, ftps, ftp, backup, linux, file, synchronizer
XUpload Pro 2.2
XUpload Pro is an advanced upload progress bar indicator for web based file uploads written on Perl. XUpload lets you to accept file uploads on your website and shows upload progress bar which is showing upload progress in real-time. Upload progress bar could be shown in popup window or right on the upload page. It also shows upload progress in percents, upload speed, elapsed and remaining time,size of uploading files. Will work on any hosting.
See also: mutiple file upload, sibsoft, upload file, xupload, progress bar, file uploader, web upload, perl upload, bulk uploads, upload bar, upload progress bar, ajax upload
Help Generator for Visual Studio 2005 2.2
HTML Help Generator for Visual Studio 2005 is the fastest way to add Help to your applications. Features HTML page and image generation, table of contents, index and search, images with hotspots and export to Word. The WYSIWYG wizard lets you set many options for page layout and application specific information. Results can also be exported as Word document (documentation) or to your website.
Includes state-of-the-art help editor.
See also: Visual Studio 2005, Visual Studio, NET, NET Tools, Help File Tools, html help, Help Authoring, html help workshop, HHW, htmlhelp, create html help file, html help authoring, html help compiler, html code help, html codes help, winhelp, technical documentation, user documentation, documentation
PHP File Uploader 22.214.171.124
A File Upload/Download Component,You overcome the limitations of traditional form-based uploading. With file Uploader, the mode to upload files via HTML input fields will be history.
See also: Upload, Uploader, File Uploader, File upload, Image uploader, Image upload, ActiveX, Universal HTTP File Uploader ActiveX, BreakPoint upload, Large file upload
Upload2000 Turbo 1.0
UPLOAD 2000 is a powerful, fast, and easy-to-use email experimental tool, which lets you store and share files on any mail account. UPLOAD 2000 splits the file you want to share/store and sends the file segments one by one to your account, then it merges the segments back to the original file when the file is downloaded. It uses multi-thread mechanism and P2P technology to make downloading files much faster.
See also: File, Share, upload, download, mailbox
Remote File Transfer Tool 188.8.131.520
Web file transfer software is secure FTP client program to transfer files over Internet. Network data copy utility is featured with uni-directional and bi-directional synchronization capabilities to run multiple tasks simultaneously as NT.
See also: Remote, file, transfer, copy, web, files, download, ftp, copying, upload, download, documents, filter, browse, directory, schedule, synchronize, folder, manage, logon, credentials, execute, events, action, send, email, play, sound
FileGee Backup & Sync Enterprise Edition 8.8.12
As an excellent file backup and file synchronization software, FileGee features high efficiency, stability and less resource occupancy, and is adequate to meet the requirements of users. With no need for additional hardware resources, it can create carefree and full automatic backup and synchronization environments and can complete the file backup and synchronization operations accurately
See also: backup, synchronize, ftp, fxp, multithread, ssl, service, download, upload, encrypt, file, database
ActiveFile.exe 3.0
With ActiveFile's advanced features, such as support for ASP. NET ( Sample Application provided ) , file Upload, restart of interrupted downloads, download failure detection, and industry standard data compression, it's no wonder that companies like Associated Press , Xerox, Disney, and Pepsi chose Infomentum tools to aid their development efforts.
See also: File Upload, File Download, File Archiving, File Zip, Secure Upload
.NET SFTP Component in CS VB.NET ASP.NET 2.0.313.626
The Ultimate SFTP .NET Component offers a comprehensive interface for SFTP, providing the developer with everything that he needs to incorporate secure file transfers in an application, as well as remote file management using SFTP. In addition to downloading and uploading by file name, URL, and wild card masks, the SFTP library also supports remote file management functionality such as directory listings and the ability to rename, delete and move
See also: net component, dotnet component, dotnet, .net, component, framework, upload, download, sftp, ssh, ssh secure, put, sfpt, layer, ipv6, binary, RFC 959, RFC 1579
DE Internet Speed Booster 184.108.40.206
Internet Speed Booster is the powerful easy way to speed up your internet connection. With Internet Speed Booster you can speed up you internet connection,utilize your memory,utilize your internet connection and change your windows settings.Net Pinger prevents you from being disconnected from your ISP.Speed Booster optimizes the way your PC sends and receives data over the internet.RAM Booster allows you to free physical memory or RAM on your PC.
See also: Internet, Speed, Booster, speed up, internet connection, Utilize, memory, Net Pinger, Ram Booster, Optimize, backup, file, restore, delete, modem, monitor, system resources
ASP.NET File Upload (AjaxUploader.com) 3.0
Ajax Uploader is an easy to use, hi-performance ASP.NET upload component which allows you to upload files to web server without refreshing the page. It supports ASP.NET AJAX frameworks and works in ajax updatepanel. Ajax Uploader allows you to upload large files to a server with the low server memory consumption. The look and feel of file upload controls can be customized to seamlessly blend into your website design.
See also: ASP.NET Upload, Ajax Upload, ASP upload, Upload Control, Upload component


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It may seem strange for an aesthetician to lead seminars that teach attendees how to properly wax their legs or give a soothing massage, but Edie McCue of E.M. Aesthetics makes them a central part of her practice. She believes everyone should have access to spa treatments and relaxation, even at home. As an aesthetician for more than 20 years, though, McCue still lends an expert hand for clients who want to leave the treatments to a professional. She quenches dry skin with shea-butter wraps, exfoliates dull facial cells with microdermabrasion, fights muscular tension with therapeutic massages, and performs head-to-toe hair-removal sessions.
At Reflexions Medical Spa, LLC, a duo of doctors helms an aesthetic medical spa that administers a suite of nonsurgical procedures. Available services include microdermabrasion, laser hair removal, and IPL therapy.
Under the supervision of Marino Salon and Spa Laser Clinic's medical doctor, licensed laser technicians and aestheticians James and Veronika Marino use their 18 years plus of experience to bring clients a menu of services. Veronika, the lead licensed aesthetician, runs the spa side of the business, welcoming clients into her private spa room for anti-aging treatment facials, acne treatment facials, laser services, and makeup services featuring ID Bare Minerals products. James, a certified laser technician, permanently removes hair from the faces and bodies of both men and women. When not working one-on-one with clients, Veronika and James host educational events in the spa, where they teach the importance of avoiding toxins and maintaining a healthy skin regime.
The staffers at Good For You Massage & Day Spa invite clients to unwind inside their colorful, private treatment rooms with a lineup of facials, body services, and rejuvenating massages. Massage therapists demonstrate the spa's personal approach by consulting with clients before administering any of their signature massages, such as Swedish, deep-tissue, or hot-stone massage. While their skilled hands mend tense and sore muscles, therapists maintain constant communication with the client to make sure that the pressure feels comfortable. The list of facials wards off environmental hazards with a variety of ingredients, including organic ground coffee to exfoliate rough skin and wake up clients who fall asleep during their pampering sessions.
For almost 10 years, the specialists at Healthy-Aging Skin, A Clinical Day Spa have harnessed advanced technology to combat skincare woes. The staff specializes in treating acne and waving away the signs of aging, and combines the latest in medical equipment with experience and skills gained over the last decade. This technology includes an intense pulse light laser, DiamondTome microdermabrasion system, and cryogenic therapy for those who want smaller pores and to know exactly what Han Solo felt like while frozen. While many of their offerings live in the realm of medspa treatments, clients in need of a bit of relaxation can enjoy one of their completely organic facials.
More than 20 years after opening as a two-room massage clinic, Massage For Health and Day Spa has blossomed into a full-service aesthetic center whose custom treatments still revolve around therapeutic modalities. Each member of the 15-person staff masters a specific soothing discipline, from licensed massage practitioners to professional manicurists to two aestheticians whose voices sound like the beach. Massage therapists blend essential oils to please noses and achieve specific health goals during the signature aromatherapy massage. Treatments draw from Western and Eastern philosophies to bolster therapies with enhancements such as collagen masks or Thai herbal massage balls.

subset: commoncrawl


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Latest Diving Stories
British teen Tom Daley, an Olympics diving hopeful, has been the target of taunts by bullies, two London newspapers reported Thursday. The Daily Telegraph reported Rob Daley, the father of the 14-year-old diver, is considering removing his son from Eggbuckland Community College in Plymouth because of
British teen Tom Daley, an olympic diving hopeful, has been the target of taunts by bullies, two London newspapers said Thursday. The Telegraph reported that Rob Daley, the father of the 14-year-old diver, is considering removing his son from Eggbuckland Community College in Plymouth because of constant
By Christian Trejbal firstname.lastname@example.com 381-1645 The shell of Christiansburg's new aquatic center looms above Franklin Street. Its brick walls, blue roof and gaping window holes carve a striking form against the sky.
In neighborhood pools and competitive events, diving injuries add up.
By Pete Hayes, The Telegraph, Alton, Ill. Jul. 11--FLORISSANT -- Members of the Summers-Port dive team take a back seat to no one these days -- including their swimming cousins.
Recent news headlines throughout the country have reported on numerous water accidents resulting in extreme injuries and in some cases death. In addition to thousands of water related injuries that occur each year, drowning is one of the leading causes of death in toddlers and children.
By Laith Agha, The Monterey County Herald, Calif. Jan. 27--It's known as "Mortuary Beach" for a reason.
By Randy Ludlow, The Columbus Dispatch, Ohio Aug. 13--CIRCLEVILLE, Ohio -- When John Sanders began diving for bodies in 1965, it was a touch-and-go operation. Up to two dozen divers would line up and grope along the bottom of a murky lake or river, hoping to bump into the corpse.
By John Raby No diving The U.S. Army Corps of Engineers announced the diving ban from cliffs at the following lakes in Southern West Virginia: Beech Fork, Bluestone, Burnsville, East Lynn, R.D. Bailey, Summersville and Sutton.
Sarah Bonham and her friends have jumped off 40-foot-high sandstone cliffs into Summersville Lake countless times during camping trips and church youth functions. To many teenagers, the summertime rite is as common as tanning and fishing.
- Pertaining to the surface or end opposite to the mouth in a radiate animal.


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News and notes from Wade Phillips news conference and other things at Valley Ranch on Wednesday.
It appears if Williams can play next week, Crayton would sit for Austin.
"He's the top player in the world," Phillips said of Woods. "Probably the greatest player ever, and he's a football fan. He and Romo text quite a bit. I think they dog each other a little bit when they don't have their best games. I think they're good friends. It was interesting that he was interested in what we were doing. I'm interested in what he's doing because he talked about being a leader. 'I'm in an individual sport and I'm my own leader.' ''
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Atlas Estates is to develop a third tower next to the Hilton Hotel in Warsaw's Wola district, as reported by ISBnews. Market research shows interest in a residential project at this location, according to Atlas representatives. Indeed, the new tower will mainly house residential apartments. The real estate company is expecting a credit line in…
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'Jersey Shore' Star Jenni 'JWoww' Farley Has Secret Artistic Background
9:59 PM PST 1/20/2011 by Kimberly Nordyke
See artwork, including paintings and sketches, by the MTV star.
It turns out Jersey Shore star Jenni "JWoww" Farley has more talents than tanning and partying.
Gawker.com has discovered a website featuring sketches and paintings by the MTV reality star that are said to be created when she was a student at the New York Institute of Technology.
According to her bio on her official site, Farley spent three years studying computer programming and then went on to study fine arts and graphic design, later opening her own graphic arts business, Jenni Farley Designs Inc.
Check out Farley's artwork here.


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Recorded at a 2006 show in London, The Confessions Tour is Madonna's second concert CD+DVD set in eight months. The first, I'm Going to Tell You a Secret, supported her American Life album and had the distinction of being both the first live album of her quarter-century career and her greatest musical fiasco. While similar in staging, this new set supports a much better album, 2005's stronger Confessions on a Dance Floor, and that alone makes it the better of the two. Viewed together-- their quick succession makes it impossible to assess them separately-- this pair of releases signals the beginning of a new stage in Madonna's career, one in which director Jonas Åkerlund has become more crucial than musical producer Stuart Price, and music has become secondary to the dizzying, dazzling, slightly nauseating spectacle of her live show.
That spectacle has eclipsed music in the Madonnaverse is readily apparent on the Confessions tracklists. The DVD contains a full concert, with 21 tracks running more than two long hours. The CD has a mere 13, including two versions of "Sorry" and several of Stuart Price's instrumental interludes, which demand visuals to explain what the hell is going on. Instead of "Live to Tell", the CD contains songs like "Confessions", during which Madge's dancers describe life-changing experiences. One tells of an abusive father, another of her belief in angels, the third of his "decision to gangbang." Without the performers' hyperactive and not unimpressive moves, the song sounds aimless and exploitive, group therapy set to music.
Instead of presenting herself as the art-school activist of Secret (which was recorded during an election year, after all), on Confessions Madonna plays the part of a self-help guru-- Tony Robbins with a Farrah 'do and an ugly leotard. The recurring theme is self-empowerment, which she means to be universal, but which ultimately is specific to Madonna. On the lively "Jump" she extols the virtues of self-motivation and sisterhood. She confidently masters the simplest guitar riffs on "I Love New York" and "Drowned World" and doesn't care what you think of her clumsy dances moves.
Granted, empowerment is easy when you've got thousands of fans applauding your at every turn. And why shouldn't they? Madonna has the power to put on a ludicrous, obscenely expensive stage show-cum-counseling session year after year, as well as the brand name to make Confessions one of the top-grossing tours of 2006. She has the body of her much younger self, so she can still rock a leotard or a feathered collar, no matter how ill-advised such wardrobe choices may be. And her voice has aged surprisingly well. She can't sell the girlish giggle of "Lucky Star" or "Like a Virgin", but she's got a deeper, heartier range that works best on ballads like "Drowned World/Substitute for Love" and "Paradise (Not for Me)". We are left, however, to imagine how commanding Madonna would sound on a good ballad, like "Oh Father" or "Something to Remember". "Live to Tell" might have fit the bill here, but she delivers it perched uncomfortably on a mirror-covered cross, which limits her breathing and phrasing as well as our ability to take her seriously.
Let's talk about that disco crucifixion. Nothing says "I've got a messiah complex" like performing on a cross, and this notorious routine, which begins as a comment on the travails of fame, sure enough turns into a plea to end AIDS in Africa. That's a serious issue, and it deserves better than this confused, self-aggrandizing pitch. Nevertheless, this segment will likely be a selling point for many fans and bystanders alike: It was cut from the original NBC broadcast of the show following the expected avalanche of Catholic uproar and outraged punditry.
But it's a polite curtsy compared to what happens when Madonna's politics go global. During "Forbidden Love" two male dancers appear with symbols of Islam and Judaism painted on their abdomens, locking arms stoically in a choreography that makes them look like two children fighting in the backseat. But that's just silly, not insulting. The show's nadir comes during "Isaac". Centerstage stands a giant cage in which a burqa-clad dancer twirls and gyrates. When the gate lifts, her cage dance becomes a striptease. From one oppression to another...
As always, Madonna is at her best when the stakes are low and the music frivolous, an approach that seems natural for the frothy disco of Confessions on a Dance Floor. The live show's best-- and consequently most meaningful-- moments come during the closing disco-kitsch set, which begins with a mash-up of her underrated single "Music" and the Trammps' "Disco Inferno" and closes with a medley of "Lucky Star" and "Hung Up". Despite the tacky travel-agency brochure vibe of "La Isla Bonita", these songs achieve the sort of gaudy pop transcendence that justifies the month's-pay ticket price.
Still, it's too little too late to salvage Confessions, which, with Secret, feels like a failure of imagination. Åkerlund gives you everything you don't want from a concert film: incessant quick cuts that you give you no sense of space or stage, overdubbed music and vocals that give you no sense of performance, and only a few shots of the audience to gauge their excitement. But Madonna herself is mostly to blame. On stage, she draws from a deep well of amazing pop songs and has the money and power to reinvent this sort of traveling circus. So why not try to break down the wall between performance and audience and hold a gigantic rave? Or, better yet, launch a small-club tour and share the spotlight with some musical collaborators. Work with Timbaland or even Xiu Xiu. Let other people write songs for you. Reinvent yourself for real this time. Until Madonna comes up with something completely new and makes her shows as exciting to watch as they are to perform, her spectacle will never be as fun or as world-changing as her music.
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Copper Cazos available in Many Sizes, Please Select Below the sizes and weights are approximate.
The Larger sizes Starting at the 20 inch or above are heavier than the first 3 displayed
used in the Cooking of Carnitas, Candy Making and other Specialty Cooking purposes.
Copyright © 2014 Tigercook.comPowered by Cookwarex.com your Cookware Wholesale Source Featuring Copper Cazos-Cazos-Propane Burners-Monarca Tortilla Roller-Tortilla Presses - 200 Quart Stockpots-Kinox Cookware-Marble Stone Fry Pans-Oster Blender Parts-Tortilla Makers-Copper Casos-Stoves Camping-Flatware 84 Pc Germany Kaiserkoch Set-Stoves-Zebra Loop Pot-BBQ Stoves High Pressure Burners-Zebra Cookware - Zebra Steamers-Griddles Stainless Steel-Multi Jet Burners


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Entertainment | Celebrity
Access All Areas is Shah Rukh Khan-on-demand
Bollywood superstar promises interactive song-and-dance extravaganza in Dubai
- Image Credit: Francois Nel/Gulf News
- Deepika Padukone and Shah Rukh Khan during the press conference at the Atlantis Hotel.
Two things are guaranteed when you meet Bollywood superstar Shah Rukh Khan: He will be at least an hour late and he will superbly gloss over that tiny blip with his charming persona when he arrives. Khan ticked both boxes as he met with local press on Sunday evening in Dubai to announce an interactive song-and-dance spectacle titled Access All Areas scheduled for December 1 in the city.
"I am sorry about my tardiness. But we have been shooting emotional scenes all day and have been having long days at work," said Khan, eliciting sympathetic noises from the women in the crowd.
The 47-year-old is currently filming director Farah Khan's Happy New Year in Dubai, and is expected to be here throughout the month. But it's not all work and no play for the actor. who says he enjoys live performances.
Access All Areas will be held at the Dubai International Cricket Stadium on the eve of UAE National Day.
"This show by Duvent has a new concept. Just like how we have video-on-demand, we will have songs-on-demand. The audience can request for songs that we should dance to," explained Khan.
His Chennai Express co-star Deepika Padukone will be one of the main attractions of the show.
"He's the reason why I am on this show. It will be my first live show and I will get to learn so much from Shah Rukh," said Padukone, flashing her dimpled smile. "The best part about him is that whatever we do we make sure that we have fun while doing it. He never makes it seem like it's all about him even if it's about him."
tabloid! caught up with Shah Rukh Khan for a one-on-one to talk about the show. And yes, he was consistently diplomatic:
He didn't "choose" Deepika
"It's a little awkward when I am asked why I chose a particular co-star to be on a film or a live show. Such questions arise because Bollywood is considered a male-dominated industry. I didn't choose Deepika. The way I look at it is that she was gracious and kind enough to be a part of my Access All Areas world tour. Remember, all actors have a huge talent management team behind them. Every star decides what they are going to do throughout the year. So I don't go around choosing stars as people think. But it helps if stars who sign up have a hit behind them — just like how Deepika and I have a hugely successful film, Chennai Express, behind us."
He's not a great dancer
"I am not a technically sound dancer. I need to work on my moves a lot. I can move to a beat but beyond that I will need at least 40 days to perfect routines for such a show. While Deepika might take just a day for it. I will never do a live show until I am prepared for it thoroughly. But there's one track that I will make sure that Deepika dances to. It's that track from Desi Boyz called Subah Hona Dey."
Access All Areas might mean you can have a bath with him
"Oops, that's not allowed, says my manager. Can people sleep with me? I am just joking. Coming back to Access All Areas tour, I don't like it when shows end up as a song and dance performance. We want to hold contests that will make it an interactive experience for the 25,000 strong crowd. We want our fans to tell us what they want to see and hear. We will also choose winners who will get a chance to come backstage with us. But they won't be allowed while the show's going on since they could get crushed under running stars. But we can promise them a tour backstage after the show is over.
He's 'a marketing Einstein'
"Is marketing a bad thing? But not everything is about marketing. When we dressed up in local clothes [at an earlier press conference at Atlantis, The Palm, to promote Happy New Year in Dubai], it was to thank everyone. We have taken over suites, the roads and The Dubai Mall and everybody has been so gracious in letting us shoot our film. When it's a thank you that comes from our heart, it's more than marketing."
He would go on reality show Bigg Boss
"If televison shows like Big Boss [hosted by his rival Salman Khan] invite us, then it will be very nice to be on it. We just started shooting the film Happy New Year. It will take us a year to complete it by and by then, inshallah, if there are television shows like Big Boss, then why not? But it's all a long way off."
Go get yours
Tickets for Access All Areas will start at Dh99 and will go on sale from September 19. For more details, go to duvent.com
While Shah Rukh Khan has promised tabloid! that he will make Deepika Padukone dance to his favourite track, Subah Hone Na De from Desi Boyz. we have come up with our own wishlist. Here's hoping SRK will oblige.
Lungi Dance (Chennai Express): We had to wait until the end of the comedy to watch Shah Rukh Khan dance in this ode to Tamil superstar Rajinikanth. Hopefully, the wait won't be that long at All Access Areas Tour as the Honey Singh rap number has everything going for it.
Aankhon Mein Teri (Om Shanti Om): It's no secret that Deepika Padukone is rooting for Aankhon Mein Teri, the song that launched her face in Bollywood. At the press conference, she made it clear that she had an emotional connection to it since it brought back memories of her first film with Shah Rukh Khan. We like it because there's no song that screams old-school glamour like Aankhon Mein Teri. It doesn't get more Bollywood than the step in which Padukone waves like a superstar to her screaming fans. Bring it on, we say.
Angrezi Beat (Cocktail): This hit number from Padukone's blockbuster has become a party anthem in all desi nightclubs. The Honey Singh song extolls the virtues of partying hard
Dard E Disco (Om Shanti Om): A shirtless Shah Rukh is an integral part of this song's choreography. Do we need to say more?
Chammak Challo (RA.One): The superhero flick didn't find many takers but Chammak Chalo, sung by Akon, held universal appeal. While it's yet to been seen if the song's item girl, Kareena Kapoor, will join the All Access Areas Tour, it will still rock if Padukone will dance to this hit number.
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Kendrick Lamar & Nigel Sylvester Talk Careers, Broken Bones, & More [Video]
What better place to reflect on success than in
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Rosenthal Sambonet Group Acquires Arzberg
Tuesday September 10th, 2013 - 10:30AM
These are shortcuts to your favorite social networking and bookmark sites. Add this story to your Facebook page, del.icio.us, DiggIt, and many others!
The Rosenthal Sambonet Group has acquired the tabletop brand Arzberg, which had been in insolvency.
The package includes the brand name of Arzberg, including all rights associated with this as well as the stocks. The takeover of existing production facilities is not being covered, according to Rosenthal.
"We are happy to keep this renowned brand in Bavaria and we are sure that from this cooperation the whole group and its employees will benefit", said Pierluigi Coppo, managing director of Rosenthal. The products of Arzberg will be sold in the future under the existing brand name.
Rosenthal's other brands include tabletop brands Rosenthal, Rosenthal meets Versace, and Hutschenreuther. Since August 2009, Rosenthal is part of the Sambonet Paderno group, an Italian leader in the manufacture of tabletop and kitchen accessories.
Tags: Arzberg • Rosenthal • Acquisition • Sambonet Paderno Group • Tabletop • Porcelain • Housewares • Tabletop •
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A Batteryless Sensor Chip for the Internet of Things
A prototype sensor saves power by using transistors that never fully turn "on."
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A prototype sensor saves power by using transistors that never fully turn "on."
Imprint Energy is developing a long-lasting, bendable, and rechargeable battery.
A California-based company is commercializing an abundant, naturally occurring material that can turn waste heat into power.
New effort would pinpoint the source, type, and dispersal patterns of smog across Beijing to drive street-level predictions and targeted remediation.
As the Internet of things grows to encompass billions of devices, its power usage will require novel technologies for improving efficiency.
Researchers are discovering ways to grow marijuana more efficiently.
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Solar City's acquisition of a solar-panel startup could help it lower installation costs and produce inexpensive solar power, but it'll need more production capacity.


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a adjective meanin someone is so fuckin sexy that you have no other word to describe how sexy they are except sexalexin
damn that mama walkin down the street looks mighty sexalexin
by corn muffin December 29, 2007
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Attention Moms! Take a break on the last Tuesday of the month, courtesy of...
- Healthy Eating
- About Our Products
- Recipes
- Online Ordering
- Mission & Values
- Blogs
- Store Departments
Attention Moms! Take a break on the last Tuesday of the month, courtesy of...
Elevate your tailgate with high quality, delicious ingredients that are free...
No holiday celebration is complete without a few bottles of wine, so join in...
Let us do the cooking for you! Holidays are a busy time for everyone, so why not save time by ordering your party platters, Hanukkah or Christmas meals from Whole Foods Market. Our meals come with all the fixings and Whole Foods Market's famous quality standards. Place your order online anytime at www.wholefoodsmarket.com/shop or visit our holiday ordering table, then enjoy the season with your friends and family!
Save BIG on wild-caught Alaskan Sockeye Salmon! Priced at $7.99/lb, save $7 for one day only, while supplies last. Pair it with a stellar wine from our Top Ten Collection – Santa Julia Innovacion Shiraz (also on sale for $9.99, save $1)!
This salmon is certified by the Marine Stewardship Council, a guarantee to consumers that it is from a well-managed fishery and was caught in an environmentally sustainable manner!
Witness a showdown and be the taste tester in our Latke Cookoff! Our friends from KosherEye.com will battle our Demo Team to see who can come up with the best latke recipe. Get some ideas and take a recipe to make your favorite at home! All samples will be kosher.
Don't get your tinsel in a tangle! We'll discuss effective strategies for coping with stress, demonstrate some simple relaxation techniques and practice exercises for mindful eating. You'll be prepared for a relaxing and cheery holiday season. Space is limited. Pre-register for each seminar at Customer Service or email@example.com.
Avoid the mall craziness and bring the kids to shop with us! Our holiday helpers will be on hand to find them the perfect gift for mom, dad and siblings. From gift sets and toys to candles, bath salts and books... we've got something for everyone. We'll have $5, $10 and $20 gift sections and will gift wrap for free! Just give them a budget and leave the rest to us.
Whether for energy, relaxation, mood support, digestion or weight loss... teas have magical effects! Come taste delicious teas, learn about their health benefits and find out how to make your own at home using simple herbs. Space is limited. Pre-register for each seminar at Customer Service or firstname.lastname@example.com.
Give the gift of love... If you've been thinking of adopting a furry new family member, today is the day! We'll have dogs up for adoption in front of our store. Adopt one of them and you'll receive a FREE starter gift package ($30 value)!


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Sign In With LinkedIn
The LinkedIn JavaScript API makes it incredibly easy to let you customers authenticate using their LinkedIn account. You can then use that information to register them for your own site, identify them in a blog comment, or otherwise use this to streamline their experience. This provides you with increased registrations with minimal work.
The most important piece of data for you to capture and store is the LinkedIn member id. This is an application-specific unique identifier for every member. With this token, you can easily retrieve profile information about any of your users who have authenticated using Sign In with LinkedIn.
Our introduction, Hello World in Five Easy Steps, shows how you can get an API key, add our JavaScript framework to your page, and create a Sign In with LinkedIn button that looks like:
Localize the plugin
You can localize the Sign In plugin in the same language as the main site. Following is the list of languages that we support with their corresponding language code:
- English - en_US
- Arabic - ar_AE
- Chinese (Simplified) - zh-CN
- Chinese (Traditional) - zh-TW
- Czech - cs_CZ
- Danish - da_DK
- Dutch - nl_NL
- French - fr_FR
- German - de_DE
- Indonesian - in_ID
- Italian - it_IT
- Japanese - ja_JP
- Korean - ko_KR
- Malay - ms_MY
- Norwegian - no_NO
- Polish - pl_PL
- Portuguese - pt_BR
- Romanian - ro_RO
- Russian - ru_RU
- Spanish es_ES
- Swedish - sv_SE
- Tagalog - tl_PH
- Thai - th-TH
- Turkish - tr_TR
In order to convert the plugin in a language of your choice, simply supply the framework with the "lang" parameter and the 5-character lang-locale code of the desired language as shown in the example below. If the "lang" parameter is not supplied or the desired lang-locale is not found/supported, the plugin will fall back to English.
1 2 3 4 5

For the above example, the text on the Sign In plugin will convert to Spanish and the plugin will look like:
Convert LinkedIn member into identified member of your site
After the member has signed in and authenticated your application, you have access to their member id and basic profile information. Your key is getting that data back to your server.
One option is to use a web form for registration. Here is a simplified example:
Place the following in your :
1 2 3 4

And the following in your :
1 2 3 4 5 6 7

You use the inside of the IN/Login template to echo out the person's name in the sign up form. More importantly, you've added a hidden variable, linkedin-in, to pass the member id. This is the value you should store to identify the person in future page requests.
Tags and Templating are covered in more detail in the Tags and Templating Tutorial.
An alternative approach is using the JavaScript API to directly fetch the person's information. You can then pass that back using either a web form, like above, or an AJAX call.
Here is another simplified example:
Place the following in your :
1 2 3 4 5 6 7 8 9 10 11 12 13 14

And the following in your :
This generates a Sign In with LinkedIn button and triggers the onLinkedInAuth() function upon completion. That function makes an IN.API.Profile() API call for the current viewer and provides you with the member id in the callback function. You can then use the AJAX framework of your choice, such as Dojo, YUI, or jQuery, to pass that value back to your server.
The JavaScript API is covered in more detail in the JavaScript API Tutorial and the JavaScript API Reference.
Regardless of how you accomplish the task, once you've captured the member id, you can begin referencing it for future requests and use it with the LinkedIn JavaScript and REST APIs.


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Home » NewHampshire.com » Travel & Tourism
ATVs granted highway access in time to save North Country festival this weekend
Monday's announcement coincides with this weekend's Jericho ATV Festival. For years, town officials have opened local roads to ATV use, especially for an event such as the Jericho festival.
"Allowing off-road vehicles to travel on state highways will help make New Hampshire's unparalleled ATV-riding experiences an even greater success," Hassan said in prepared remarks.
Christopher Gamache, chief of the state Bureau of Trails, said legislation was enacted about a year ago to allow permits for ATV use on state highways. He said both the state Department of Transportation and State Police must sign off on the permits; the DOT does not want ATVs on any stretch of highway where the speed limit exceeds 40 mph.
"Riding on the highway is going to be a new experience for OHRV users, and riders and motorists need to be aware of one another," Gamache said. He said it will be important for the ATV users to pay attention to signs.
Altogether, about 17 1/2 miles of highways will be open to off-road vehicle use, complementing between 800 and 1,000 miles of ATV trails, he said.
The Trails Bureau website — nhtrails.org — is expected to be updated with the road routes early next week.
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The goods: The Yardbird team has unveiled Khong River House, a post-colonial homage to northern Thailand and Vietnam, in South Beach's former Miss Yip space.
Ambience: Bare lightbulbs, Thai fishing traps, scuffed brick walls and Thai license plates create an industrial, globetrotting vibe. The main dining room can get loud; seek out dining "alcoves" in the back for a quieter, more intimate atmosphere.
The grub: Northern Thai, Vietnamese and Burmese street food from executive Chef Piyarat Potha Arreeratn (aka Chef Bee). Most small plates average $12, shareable mains are $17-$36 and rice is $4.
Begin with Burmese noodle wraps with dried red chile, roasted peanuts, palm sugar, lemon and cilantro. Move on to small plates like fiery chicken wings flash-fried and dressed in a sticky chile sauce and grilled eggplant salad with mint and sour roasted chile paste. Specialties include spicy, aged pork ginger salad with fried curried rice balls; jungle curry with fragrant tiny bitter eggplants, chicken, peppercorns, baby corn and mushrooms; rotisserie chicken (gai yaang) marinated in coconut milk and lemongrass; and salt-crusted grilled whole fish stuffed with basil and lemongrass.
Desserts include Thai donuts with chocolate and lemon curd dipping sauces, coconut cake and mango napoleon.
Verdict: The Yardbird crew takes you to Thailand.
[1] http://www.miami.com/restaurants/first-look
[2] http://www.miami.com/breaking-bread-nina-compton-monday-pop-dinner-article
[3] http://www.miami.com/restaurants/nibbles-and-bits
[4] http://www.miami.com/miami-restaurant-review-vintro-kitchen-miami-beach-article
[5] http://www.miami.com/restaurants/the-big-review
[6] http://www.miami.com/comfort-food-goodness-oozes-daily-melt-miami-article
[7] http://www.miami.com/restaurants/fork-road
[8] http://www.miami.com/stripsteak-fontainebleau-latest-michael-mina039s-south-florida-mini-empire-article
[9] http://www.miami.com/tamarina-puts-coastal-italian-flavors-downtown-miami-article
[10] http://www.miami.com/ceviche-105-fresh-start-south-beach-article
[11] http://www.miami.com/modern-italian-bistro-moye-opens-brickell-article
[12] http://www.miami.com/babylon-opens-gateway-turkish-cuisine-south-beach-article
[13] http://www.miami.com/ironside-pizza-slinging-neapolitan-pies-miami-article
[14] http://www.miami.com/seven-dials-gives-classic-british-pub-fare-miami-makeover-article
[15] http://www.miami.com/morimoto-rolls-south-beach-style-article
[16] http://www.miami.com/finka-fuses-cuban-korean-and-peruvian-food-west-miami-article
[17] http://www.miami.com/vintro-kitchen-emphasizes-seafood-miami-beach-boutique-hotel-article
[18] http://www.twitter.com/miamicom


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trool: a person who enters a blog comments conversation with the intent to hijack it or divert it from it's subject and tone but does so in such a clumsy, clueless manner as to provoke laughter and derision rather than humorless animosity. etymology: the word, trool, was "invented" a few months ago as a result of careless typing. it proved to be an immediate hit amongst commenters at firedoglake from which it seems to have spread virally.
that trool slipped on his own drool!
fookin' a! 'e cunt creep up on a dead neocon!
poor trool! somebody please wipe her chin ......
fookin' a! 'e cunt creep up on a dead neocon!
poor trool! somebody please wipe her chin ......
από fahrender 9 Απρίλιος 2007
A troll being used as a tool by another troll.
TehreTard is a trool of Zen444 as they both have the similiar trolling style.
από Idiot-Finder 16 Φεβρουάριος 2008
A troll + tool.
Person 1: that douche is wearing sunglasses inside
Person 2: that's a trool
Person 2: that's a trool
από Wasserbrunner yeah 6 Νοέμβριος 2011


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Abbé Benoit and our CEO @benkeesey outside the United Nations.
Like a baws.
B - Keezy
Cool dude
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To kill someone by force feeding them too much Hummus.
Shit! abraham just commited Hummuscide oy vay!
by eore May 03, 2007
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An apparatus and process for enhancing the ignition of a gas to form a plasma in a plasma tool. The apparatus and process includes the use of a plasma tube to locally enhance the applied electric field so that plasma can be initiated at higher pressures, at lower electric fields, and/or in otherwise difficult gases to ignite. The plasma tube includes at least one conductive fiber secured to the tube. A process for enhancing the local electric field includes coupling the plasma tube to an energy source such as microwave energy, radiofrequency energy, or a combination comprising at least one of the foregoing energy sources.
1. A plasma tube comprising:
an open ended cylindrical body, wherein the body includes a gas inlet at one end, and an outlet at an other end; and
at least one conductive fiber secured to the body.
2. The plasma tube according to
3. The plasma tube according to
4. The plasma tube according to
5. The plasma tube according to
6. The plasma tube according to
7. The plasma tube according to
8. The plasma tube according to
9. The plasma tube according to
10. The plasma tube according to
11. The plasma tube according to
12. The plasma tube according to
13. The plasma tube according to
14. A plasma tool comprising:
a plasma generating chamber comprising a plasma tube, wherein the plasma tube comprises an open ended cylindrical body, wherein the body includes a gas inlet at one end an outlet opening at an other end, and at least one conductive fiber secured to the body; and
an energy source in operative communication with the plasma tube.
15. The plasma tool according to
16. The plasma tool according to
17. The plasma tool according to
18. The plasma tool according to
19. The plasma tool according to
20. The plasma tool according to
21. The plasma tool according to
22. The plasma tool according to
23. The plasma discharge tool according to
24. The plasma discharge tool according to
25. A process for reducing the electric field breakdown point of a gas, the process comprising:
securing a conductive fiber to a surface of a plasma tube, wherein the plasma tube comprises an open ended cylindrical body, wherein the body includes a gas inlet at one end, an outlet at an other end, and at least one conductive fiber in contact with the body;
flowing a gas into the gas inlet of the plasma tube;
applying an electric field to the gas flowing in the plasma tube to form a plasma; and
discharging the plasma from the outlet of the plasma tube.
26. The process according to
27. The process of
28. The process of
29. The process of
30. The process of
31. The process of
[0001] The present application is a continuation-in-part application of, and claims priority from, U.S. patent application Ser. No. 09/838,234, entitled �Lamp Utilizing Fiber for Enhanced Starting Field� filed on Apr. 20, 2001,which application claims the benefit of the date of an earlier filed provisional application, having U.S. Provisional Application No. 60/199,810, filed on Apr. 26, 2000, hereby incorporated by reference in their entireties.
[0002] The present disclosure relates generally to fabrication of integrated circuits, and more particularly, to plasma mediated processing and apparatuses employed for fabricating the integrated circuit.
[0003] In the process of fabricating integrated circuits (IC's) on wafers, the wafers are subjected to many process steps before a finished IC is produced. The wafers are typically processed with a myriad of specialized tools for forming the various features of the IC, with many of the steps repeated several times. Specialized tools utilized in the IC fabrication process include, but are not limited to, photolithography tools, etchers, ashers, photostabilizers, ion implantation equipment and the like. A significant number of these tools expose the wafer or selected portions of the wafer to a plasma.
[0004] Typically, the tools that employ a plasma generate the plasma in close proximity to the wafer surface or produce reactants that interact with the wafer, such as for etching of materials, ashing of photoresist, deposition of materials or the like. Plasma tools are also employed for generating light, such as for example, during photostabilization processes, curing processes, charge erasure processes, and the like. Some plasma-mediated processes employ plasma discharges that are either difficult to ignite, or ignite, but do so irreproducibly with variable delays before ignition is achieved. Once ignited, these discharges are typically sustained with lower required voltages or reduced electric fields. Unfortunately, variability in ignition can lead to variability in processing, inefficiencies, and reduced throughput.
[0005] In the semiconductor industry, throughput is often a very important issue. With large volumes and low profit margins in the more competitive areas, incremental improvements in throughput can provide the necessary edge to compete successfully. Variability associated with plasma ignition is often a cause for decreased throughput since process times have to be adjusted to account for the variability.
[0006] One causal factor for the difficulty in igniting a gas to form a plasma is due to the relatively high pressures of the working gas. Gases generally have a minimum breakdown voltage operating point that corresponds to relatively low pressures, pressures generally less than about 400 torr and more typically about less than 200 torr. As the gas pressure increases, the required voltage, or electric field, needed to break down the gas increases monotonically. This behavior is problematic since some processes benefit from operation at relatively high pressures, even up to atmospheric-type pressure ranges, at which point very high voltages are required to break down the gas.
[0007] Another causal factor for difficulty in plasma ignition is the use of electronegative gases or gas mixtures. Electronegative gases are gases that have a high affinity for electron capture, so that it is very difficult for electrons, once generated, to accelerate and create more free electrons from collision to cause the gas to break down. As a result, establishing a well behaved, steady state plasma can be difficult since the electronegative gas atoms or molecules recapture the electrons. Unfortunately, electronegative gases are frequently the gases of choice for plasma mediated processing of semiconductor wafers for the manufacture of IC's.
[0008] The specialized tools that utilize plasmas are driven by energy sources such as microwaves, radiofrequency (RF), other high frequency sources, or the like. Ignition efficiency with these energy sources is generally poor. For example, in the case of a microwave driven plasma, microwave power supplied by a magnetron can be reflected back into the magnetrons. The power supplied by a magnetron is coupled to a microwave cavity for generating the plasma. For most plasma processes, the microwave power can range up to 5,000 watts (W) with gas pressures ranging from 0.5 torr to greater than 5 torr. A common microwave operating frequency is 2.45 gigahertz (GHz). Through the center of the microwave cavity is a plasma tube running lengthwise. The tube is open ended so that it has a gas feed port on top and a gas/plasma exhaust opening at the bottom, leading into a wafer-processing chamber. It is through this tube that various processing gases are passed. Typical gases can include oxygen, nitrogen, hydrogen, helium, and mixtures of these, as well as electronegative gases such as CF4, NF3, and CHF3. Water vapor can also be added. The combined flow rates for the process gases can be as high as 5000 standard cubic centimeters per minute (sccm) or higher. After power is supplied to the magnetrons but prior to ignition, there is no plasma load to absorb the power and power is reflected back into the magnetrons. Reflected power results in a reduced efficiency of the tool and also results in potential damage to the magnetron source. Moreover, once ignited, improper tuning of the microwave driven plasma can further exacerbate the problem of reflected power.
[0009] Many plasma tools include tuning hardware to optimize ignition of the gas to form the plasma as well as provide optimization of the breakdown voltage during steady state operation. The ability to ignite the gas mixture depends on the multi-dimensional space defined by all of these variables: gas, pressure, flow rate, electric field provided by the microwave power, and tuning of the cavity. The tuning hardware generally includes an adjustable antenna and an adjustable short. The tuning of the microwave cavity is achieved by moving the antenna position into and out of the microwave cavity, and moving the adjustable short (i.e., a conducting end-plate) up and down to define the length of the cavity. Tuning further adds to the delays associated with operating the plasma tool and as a result, affects throughput.
[0010] Once ignited, the reflected power depends on the same variables. That is, without the cavity tuned properly for the given load, some portion of the microwave energy generated from the magnetron is reflected from the load and returned to the microwave source. This reflected power occurs because the presence or absence of the plasma changes the load as seen by the microwave circuit, and changes the tuning of the resonant microwave cavity since the material within the microwave cavity (plasma versus no plasma) affects the resonant wavelength for the cavity. As previously discussed, reflected power results in reduced efficiency of the tool and potential damage to the magnetron source. FIG. 1 graphically illustrates an example of the reflected power versus antenna position and adjustable short position. As shown, relatively high values (>30%) of reflected power can be encountered without proper tuning. Moreover, it has been observed that the optimum starting position of the antenna is usually not the same as the optimum position once the plasma has ignited. Hence, hardware and software has to be added in order to accommodate the two different optimum positions, thereby increasing the costs associated with the operation and manufacture of the plasma tool.
[0011] While the repositioning of the antenna offers the advantages of ignition over a larger operating regime, and improved operation during an �on� phase, there still remains a need for a more robust ignition system and process so that repositioning is not necessary or is minimized. Antenna positioning and adjustment of the short requires time, which impacts throughput. Moreover, the use of the microwave cavity tuning system affects reliability, and adds to the total cost to manufacture the plasma tool as well as operating costs.
[0012] A plasma tool includes a plasma generating chamber comprising a plasma tube, wherein the plasma tube comprises an open ended cylindrical body, wherein the body includes a gas inlet at one end an outlet opening at an other end, and at least one conductive fiber secured to the body; and an energy source in operative communication with the plasma tube.
[0013] A process for reducing the electric field breakdown point of a gas includes securing a conductive fiber to a surface of a plasma tube, wherein the plasma tube comprises an open ended cylindrical body, wherein the body includes a gas inlet at one end, an outlet at an other end, and at least one conductive fiber in contact with the body; flowing a gas into the gas inlet of the plasma tube; applying an electric field to the gas flowing in the plasma tube to form a plasma; and discharging the plasma from the outlet of the plasma tube.
[0014] These and other objects, advantages and features of the invention will become better understood from the detailed description of the invention that is described in conjunction with the accompanying drawings.
[0015]FIG. 1 is a graph depicting percent reflected power as a function of antenna position and short position for a microwave driven plasma tool;
[0016]FIG. 2 is a cross section of a microwave downstream plasma system;
[0017]FIG. 3 is a schematic illustration showing the electric field enhancement around a single fiber;
[0018]FIG. 4 is a schematic illustration showing equipotential lines for a conductive fiber encased in a non-conductive substrate;
[0019]FIG. 5 graphically illustrates the electric field as a function of pressure showing the field strengths required for breakdown of argon gas with conductive fibers at different angles relative to the applied electric field;
[0020]FIG. 6 illustrates a partial perspective view of an apparatus suitable for measuring the breakdown electric field of a gas;
[0021]FIG. 7 illustrates a top down cross-sectional view of the plasma tube of FIG. 6;
[0022]FIG. 8 graphically electric field as a function of pressure showing the field strengths required for breakdown of noble gases with and without an enhanced electric field;
[0023]FIG. 9 graphically illustrates the electric field as a function of pressure showing the field strengths required for breakdown of various electronegative gases with and without an enhanced electric field;
[0024]FIG. 10 graphically illustrates wafer throughput for various plasma-mediated processes employed in IC fabrication;
[0025]FIG. 11 illustrates the apparatus of FIG. 6 including an illumination source (λ);
[0026]FIG. 12 graphically illustrates the electric field as a function of pressure showing the field strengths required for breakdown of argon gas with and without the additional focused exposure of radiation from the illumination source of FIG. 11;
[0027]FIG. 13 graphically illustrates the variability of the electric field at breakdown for argon at a constant pressure of 200 Torr with and without focused exposure from the illumination source of FIG. 11; and
[0028]FIG. 14 graphically illustrates plasma intensity as a function of time for a plasma tool with and without an enhanced field.
[0029] A method and apparatus for enhancing the ignition of a gas to form a plasma in a plasma tool includes placing conductive fibers in or near a plasma discharge volume to locally enhance the applied electric field so that plasma can be initiated at higher pressures, at lower electric fields, and/or in otherwise difficult gases to ignite. Advantageously, the process and apparatus reduces the overall process times for igniting the gas and forming a stable plasma discharge. As a result, wafer throughput for plasma-mediated processes is increased, thereby providing a significant commercial advantage.
[0030] In a preferred embodiment, at least one conductive fiber is located within or in close proximity to the plasma discharge volume. Preferably, the conductive fiber is disposed in close proximity to a wall of a plasma tube, wherein the plasma discharge volume is first generated. More preferably, the conductive fiber is secured to an interior wall of the plasma tube. The conductive fiber is preferably coated with a protective coating. As will be discussed in further detail below, the plasma tube is generally an open-ended elongated cylindrical body fabricated from quartz, sapphire, alumina-coated quartz or like material. The plasma tube includes a gas feed inlet at one end and plasma exhaust at the other end. The plasma exhaust is generally discharged into a processing chamber. Gases flowing through the tube are excited with an energy source to breakdown the gases and form the plasma discharge volume. An exemplary plasma tool employing a plasma tube is shown in FIG. 2.
[0031] The present disclosure is not intended to be limited to any particular plasma tool and is applicable to those plasma-generating tools employing RF, microwave energy or other high frequency energy sources, individually or in combination, to generate the plasma. Suitable plasma tools include downstream ashers, curing plasma tools, photostabilization tools, plasma tools configured for charge erasure and the like, such as for example, the plasma asher commercially available under the trade name FUSION ES3i from the Axcelis Technologies, Inc. in Rockville, Md.
[0032] Turning now to FIG. 2, the illustrated exemplary plasma tool 10, shown here configured for microwave driven plasma ashing, generally includes a plasma-generating chamber 12, a microwave energy source 14 and a wafer processing chamber (not shown). The plasma-generating chamber 12 includes a microwave cavity 16 having a plasma tube 18 passing therethrough. The microwave cavity 16 is a cylindrical �can-like� structure and is typically fed with microwave energy from the microwave energy source 14 via an antenna 30 protruding into the cavity 16. The plasma tube 18 is an open ended cylindrical body that includes a gas feed inlet 26 at one end and a plasma/gas exhaust 28 at its other end.
[0033] The microwave energy source 14 includes a magnetron 20 that provides microwave power through a directional coupler assembly 22 to an adjustable waveguide assembly 24, which couples the microwave energy into the microwave cavity 16 through which the plasma tube 18 extends. The adjustable waveguide assembly 24 includes the adjustable antenna 30 that moves laterally into and out of the microwave cavity and an adjustable short (not shown) that vertically adjusts the length of the cavity 16. Plasma is excited in the gas flowing through the plasma tube 18 and is discharged into a process chamber (not shown) for treating wafers contained therein. The plasma generated within the plasma tube 18 defines the plasma discharge volume.
[0034] While not wanting to be bound by theory, the presence of a conductive fiber within or in close proximity to the plasma discharge volume enhances the local electric field as shown in FIG. 3. The conductive fiber allows charges (i.e., electrons) to accumulate at each end, thus distorting and enhancing the local electric field within the plasma tube 18. The gas flowing through the plasma tube 18 is exposed to the enhanced local electric field, breaks down and becomes conductive. It is believed that because the fiber resistance is high relative to the volume resistance of the steady state plasma, it does not couple significant energy during steady state operation. This reduces the field enhancement at the tips of the fiber during steady state operation, consequently reducing plasma disturbance and overheating of the fiber during operation.
[0035]FIG. 4 graphically depicts a modeled electrical field of a 100-micron conductive fiber 93 encased in a 1-millimeter thick quartz substrate 95. The dashed lines represent lines of equipotential. Narrow spacing between the equipotential lines indicates regions of high field strength. Thus, the regions at the tips of the fiber, with equipotential lines that are closer together, represents a region of enhanced electric field (gradient of potential is enhanced). The field strength outside the quartz substrate is lower and less likely to contribute to breakdown of a gas. Alternatively, the fiber may be positioned on the outside wall, i.e., the exterior or interior surfaces of the plasma tube. More preferably, the fiber is disposed on the interior surface of the plasma tube. Note that the plasma tube 18 is chosen to be non-conducting since it is disposed within the microwave cavity 16.
[0036] The fiber is fabricated from a conductive material. Preferably, the fiber is fabricated from conductive materials that provide for a relatively high enhancement of the electric field, and is capable of surviving many ignition cycles. Alternatively, the fiber is fabricated from a non-conductive material having conductive domains and/or a conductive coating.
[0037] Preferred conductive materials for fabricating the fiber include tantalum, gold, copper, silver, tungsten, molybdenum, aluminum, carbon, graphite, palladium, platinum, ceramics, and composites or compositions comprising at least one of the foregoing materials. Other electrically conductive materials may include conducting polymers, such as polyanaline and polypyrrole, and metal powders entrapped within a thermally and plasma resistant protective coating to produce the conductive fiber. More preferably, the conductive fiber is selected from the group including a platinum fiber, a platinum coated silicon carbide fiber, and a silicon carbide fiber.
[0038] The surface resistivity for platinum is about 10−5 ohm�cm and for SiC fibers the surface resistivity generally ranges from about 1 to about 105 ohm�cm. An especially preferred silicon carbon fiber having a surface resistivity of about 1 ohm�cm is commercially available under the trade name Hi-Nicalon� and is produced by Nippon Carbon Co., Ltd., Tokyo, Japan.
[0039] Although the resistivity of a given material is constant, the resistance of a specific volume of the same material is a function of its dimensions and resistivity. In general, the dimensions and resistivity of the fiber are chosen so that the fiber effectively enhances the electrical field yet, is resistive enough so that the fiber does not couple significant energy during steady state operation. The length and shape of the fiber disposed within or in proximity to the plasma discharge are generally unrestricted. The fiber length, depending on the construction, can be between about 50 nanometers to about 10 centimeters depending on the plasma tool and operating conditions. However, for most plasma applications, it is preferred that the length of the fiber is at about 3 millimeters (mm) to about 5 mm. Preferably, the fiber has a substantially circular cross sectional shape. Fibers having substantially non-circular cross sections may be beneficial for particular applications in terms of bonding the fiber to the wall or having a thinner profile for field enhancement. The thickness of each fiber is preferably less than about 100 microns. At thicknesses greater than about 100 microns, it is difficult to protect the fiber from the heat and reactivity of the plasma. Moreover, thicker fibers do not readily conform to the plasma tube surfaces, thus compounding the difficulty in protecting the fiber from the plasma.
[0040] There are a number of other variables that may be considered in fabricating or choosing a suitable fiber, well within the skill of those in the art in view of this disclosure. For example, the fiber should possess sufficient mechanical strength and thermal conductivity to prevent degradation or breakage during deposition of the fibers and during operation of the plasma tool, i.e., during ignition, steady state operation of the plasma and shut down. The melting point of the fibers is preferably greater than the temperatures encountered by the fiber during operation of the plasma source.
[0041] The orientation, or angle, of the fiber with respect to the applied electric field is preferably aligned to the applied electric field since charge separation and build-up can only occur along the length of the fiber. More preferably, the fiber is substantially parallel to the applied electric field. With a fiber of fixed length oriented at an angle not substantially parallel to the applied electric field, its effective length along the electric field is reduced by cos θ, where θ is the angle of the fiber with respect to the electric field. FIG. 5 graphically illustrates this effect for a 5 mm Hi-Nicalon� silicon carbide fiber in argon. At an angle of about 60 degrees to the electric field, breakdown of argon did not occur. In contrast, increased electric field enhancement is observed as the angle of the fiber is oriented closer to parallel to the applied electric field.
[0042] In the case of multiple fibers being disposed within or in proximity to the plasma discharge volume, it is contemplated that each one of the fibers may be of the same composition or a different composition depending on the intended use of the plasma tool. Multiple fibers are preferred in those plasma tools including a relatively large plasma tube. At large separations, the fibers can act independently and further amplify the enhancement effect. Sufficient fiber separation for most plasma tools may be maintained by spacing the ends of opposing fibers such that the localized discharges (i.e., electron clouds) created by adjacent fiber tips do not interfere (i.e., shield) each other. This translates into a separation of approximately 3 mm. However, operation at smaller separations is still possible, especially if the number of fibers is large, i.e., greater than about 3.
[0043] A sol gel coating process is preferably employed to secure the fiber to the plasma tube. The sol gel coating preferably comprises a dielectric material and serves to protect the fiber from the plasma during operation of the plasma tool. Sol gel coating processes are well known in the art. For example, PCT Publication Nos. WO 98/56213 and WO 00/30142 describe various sol gel processes for coating a microwave lamp screen and interior surfaces of a bulb. In general terms, the sol gel solution is formulated to yield the desired coating after evaporation of an organic solvent and subsequent curing at an elevated temperature. Preferably, the desired sol gel coating is formed from a silicon dioxide precursor. The thickness of the sol-gel coating is preferably greater than about 0.1 micron to about 10 microns or more.
[0044] An exemplary process for applying the sol gel coating includes the use of a silicon dioxide precursor such a tetraorthoethylsilicate (TEOS) to prepare a sol gel solution. At least one fiber is placed onto a wall of a plasma tube and the sol gel solution is then coated onto the wall. Preferably, the wall is an interior wall of the plasma tube. The coating is then dried and cured at an elevated temperature. Several layers may be applied in this manner. The drying and curing process secures the fiber to the wall. When secured in this manner, a thin layer of the silicon dioxide coating may be between the fiber and the wall. For heat sinking purposes, the fiber is preferably in thermal contact with the plasma tube wall over substantially the entire length of the fiber. However, for thin layers of sol gel between the fiber and the wall, the fiber is still effectively in thermal contact with the wall. In this manner, the plasma tube wall acts as a heat sink. Several additional sol gel layers may be added to ensure that the fiber is sufficiently coated and protected during operation of the plasma tool.
[0045] An exemplary sol gel recipe, expressed in molar ratios, includes about 1 part TEOS, about 1 to about 4 parts ethanol, about 0 to about 5 parts water and about 0.1 to about 0.3 parts hydrochloric acid. More preferably, the sol gel recipe includes about 1 part TEOS, about 1 to about 3 parts ethanol, about 0.5 to about 5 parts water and about 0.1 to about 0.3 parts hydrochloric acid. In a preferred embodiment, the sol gel recipe includes 1 part TEOS, about 3 parts ethanol, about 1 part water and about 0.15 parts hydrochloric acid.
[0046] In general, it is believed that the resulting dielectric thickness (e.g., silicon dioxide layers) deposited onto the conductive fiber is at about 0.2 to about 0.5 microns. Several layers may be applied and the resulting thickness may still be less than about 1 to about 2 microns. Preferably, the final thickness of the dielectric coatings is effective to inhibit reaction between the plasma and the fiber during operation and facilitate the desired field enhancement. Depending on the applied starting field strength, between 2 and 4 layers of sol-gel applied coatings are preferred.
[0047]FIGS. 6 and 7 illustrate an apparatus 100 in which an electric field required to break down a gas can be measured. A cylindrical quartz plasma tube 102 is adapted to be pressurized with a gas and a fiber 104 is positioned within the quartz tube 102 to enhance the local electric field during operation. The plasma tube 102 is open ended so that gases can be continuously introduced, and exhaust gases and reactants can be exited from the plasma portion, just as in the wafer processing tool described above in FIG. 2. A rectangular resonant microwave cavity 106 includes an electric field probe 108 disposed therein to measure the field in the region under test. The probe 108 is connected to a measurement device 110. An adjustable tuner 112 is positioned inside the cavity 106. Accordingly, both the amount of microwave power and the Q of the cavity can be adjusted to set a desired E field. The fiber 104 is positioned on a quartz or sapphire substrate 114. The substrate 114 is mounted on a quartz or sapphire rod 116 and inserted into the quartz tube 102. The tube 102 passes though the cavity 106 such that microwave energy can be applied to the gas inside the tube 102. The fiber 104 is aligned along the electric field. The probe 108 is positioned inside the cavity 106 such that the measured E field at the probe position corresponds to the same E field as that applied to the pressurized gas at the position of the quartz tube 102. In the illustrated apparatus 100, for example, the tube 102 is centered at a distance of � wavelength from the end of the cavity and the probe 108 is positioned a distance of � wavelength from the same end of the cavity 106. The gas type and pressure may be varied within the tube 102, such that the electric field strength and the breakdown delay time may be measured for the different pressures and applied field strengths to characterize the enhancement provided by the fiber 104.
[0048]FIG. 8 graphically illustrates the breakdown field for three noble gases commonly employed in plasma-mediated processes. The breakdown field was measured with and without the presence of a conductive fiber in or in close proximity to the plasma discharge volume using the apparatus of FIGS. 6 and 7. In the presence of a platinum coated SiC fiber, the breakdown electrical field for these gases was extended up to 3 atmospheres for the various noble gases. In contrast, breakdown of these gases is limited to a pressure of less than 300 torr without the presence of a conductive fiber.
[0049]FIG. 9 graphically illustrates the breakdown field for various electronegative gas mixtures measured with and without the presence of a platinum SiC coated fiber using the apparatus of FIGS. 6 and 7. Without the presence of the conductive fiber, the breakdown of the gas mixtures did not occur at pressures greater than 200 torr and/or required application of an electrical field in excess of about 6�105 V/m. In contrast, the presence of the platinum SiC coated fiber within the plasma tube broke down the same gas mixtures at pressures greater than 2,000 Torr and at a significantly lower electric field. In particular, the electric field was less than about 2�105 V/m for an argon/fluorine gas mixture at pressures from about 100 Torr to greater than about 1,000 Torr.
[0050] As previously described, some plasma tools utilize tuning hardware for optimizing the electric field breakdown for the particular gas mixture at ignition and also separately during steady state operation. The need to tune for a separate optimized �start� condition is eliminated with the use of the conductive fiber in the plasma tube. Reflected power is minimized since the local electric field generated by the conductive fibers lowers the electric field necessary to breakdown the plasma. As a result, a plasma load is available sooner to absorb microwave power and reduce the amount of reflected power. Significant savings in process time and manufacturing costs can be obtained by eliminating the use of the tuning hardware, e.g., adjustable antenna and short positions for a special �start� condition and positioning of the antenna and short hardware. A commercially available plasma ashing tool that employs tuning hardware is the Fusion ES3i Plasma Asher available from Axcelis Technologies, Inc. Using the Fusion ES3i Plasma Asher as an example, it is estimated that it takes about one second for the antenna to be adjusted once the magnetron is engaged, about one second for the antenna to be adjusted to the preprogrammed �on position� once the plasma is ignited and about 1.5 to about 3.5 seconds for antenna movement for optimization, resulting in a cumulative time of about 3.5 to about 5.5 seconds per wafer for the tuning hardware. Consequently, an immediate increase in wafer throughput will result from eliminating the need for a �start� position or a �start� condition. FIG. 10 illustrates the projected improvements in wafer throughput for various plasma-mediated processes that would result by eliminating the need for a separate �start� condition.
[0051] In another embodiment, a light source is focused onto a region near the location of the fiber. FIG. 11 illustrates the apparatus of FIG. 6 configured with the light source 120. Preferably, the light source 120 is an ultraviolet light source and is focused with a lens 122. The UV light reacts with the atmosphere within the plasma tube at the focused location, or with nearby material surfaces, to produce a source of �seed� electrons . It is believed that photons emitted from the light source ionize metastable states of the gas in the atmosphere to produce the seed electrons, or eject photoelectrons from nearby surfaces. The presence of these electrons reduces the breakdown electric field and also makes the breakdown more reproducible and reliable.
[0052]FIGS. 12 and 13 illustrate the effect of using a UV light source having a primary wavelength of about 254 nm focused at a location near the fiber. FIG. 12 graphically compares the breakdown electrical field for argon gas as a function of pressure with and without the use of UV light. It is observed that the breakdown electric field is stable with the illumination of UV light and is generally less in magnitude than the breakdown electric field generated without the use of UV light. The reduction is believed to be associated with the additional electrons generated by the UV light exposure upon reaction with the atmosphere. FIG. 13 graphically illustrates the reliability associated with and without the use of UV light after cycling the plasma on and off numerous times. The breakdown electrical field was monitored for argon gas at a constant pressure of 200 Torr. The data clearly shows that the use of focused UV illumination increases the operating range by making the ignition more reliable than without UV illumination.
[0053] In addition to improving ignition cycles, the conductive fiber and its use in some plasma applications can be used to reduce run-up time. Once a plasma discharge is initiated (i.e., initial breakdown), there is typically a finite time for the plasma discharge to reach a steady state or equilibrium condition, hereinafter defined as �run-up� time. The use of an enhanced electric field reduces the run-up time. FIG. 14 illustrates the run-up time for a conventional plasma tool compared to a plasma tool including the enhanced electric field, i.e., conductive fiber in close proximity to the plasma discharge volume. The intensity of the plasma discharge in a conventional plasma tool (without the use of a conductive fiber) reaches a steady state after about 15 seconds. In contrast, the use of a plasma tool with the enhanced electric field (with the use of a conductive fiber) reaches a steady state after about 1 second, a savings of about 14 seconds. Tables I and II shows the effect on wafer throughput of reducing the run-up time for typical processes utilized in the fabrication of the IC. Table I illustrates typical results of a conventional plasma tool without the use of an enhanced electric field whereas Table II illustrates the results of the same plasma tool with the enhanced electric field.
[0055] By elimination of the run-up time, the throughput can be increased as much as about 15% for certain recipes, such as that for poly/oxide etch, metal etch and other recipes that require low power operation.
[0056] According to the foregoing, the advantages of the invention include at least the following:
[0057] 1. At a fixed electric field, the present disclosure allows ignition of gases at pressures over one order of magnitude greater than without the enhanced electric field.
[0058] 2. The present disclosure permits ignition of certain gases at pressures up to about 5 atmospheres, whereas ignition of certain gases is only possible up to about 150 to about 200 mtorr.
[0059] 3. At a fixed gas pressure, the present disclosure allows ignition of gases with applied electric fields much lower than previously possible.
[0060] 4. The present disclosure permits ignition of gases in previously impossible conditions. As a result, the present disclosure increases the operating regime of plasma tools.
[0061] 5. A reduction of delay times between when power is applied to the plasma tool and the time at which the plasma is created. For example, in the case of microwave energy sources, the present disclosure increases the operating lifetime of the magnetron.
[0062] 6. The present disclosure eliminates the need to retune microwave cavities between startup and steady-state operation, thus eliminating complexity, hardware, cost, and consequently improving reliability.
[0063] 7. The present disclosure shortens the time to full-on conditions (i.e., reduces run-up time) in plasmas, thus improving the throughput.
[0064] 8. The present disclosure eliminates the need for external auxiliary starting devices.
[0065] The foregoing descriptions of the preferred embodiments of the invention have been presented for purposes of illustration and description. It is not intended to be exhaustive or to limit the invention to the precise forms disclosed. Obvious modifications or variations are possible in light of the above teachings. The embodiments were chosen and described to provide the best illustration of the principles of the invention and its practical applications to thereby enable one of ordinary skill in the art to utilize the invention in various embodiments and with various modifications as are suited to the particular use contemplated. All such modifications and variations are within the scope of the invention as determined by the appended claims when interpreted in accordance with the breadth to which they are fairly, legally and equitably entitled.
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