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The American Society of Heating, Refrigerating and Air-Conditioning Engineers (ASHRAE) has a created a new staff position to handle its work in codes. The assistant manager of standards and codes will be responsible for interaction with model code organizations and represent the Society at code hearings, working directly with ASHRAE's Code Interaction Subcommittee (CIS).
The subcommittee's activities include interacting with model codes organizations, such as the International Code Council (ICC) and the National Fire Protection Association (NFPA), to ensure proper reference to ASHRAE standards and other documents in building codes.
"In recent years, as the Society began to write standards intended for adoption by code models, ASHRAE's activities in codes interaction moved from a fairly passive monitoring of codes to a much more proactive interaction with the model code bodies," Bruce Hunn, ASHRAE's director of technology, said. "ASHRAE has become active in not only proposing changes to the ICC and NFPA model codes, but in monitoring dozens of proposals and comments made by others that affect ASHRAE standards."
Besides its active involvement in the International Energy Conservation Code (IECC), ASHRAE participates in the International Mechanical Code, International Residential Code, and the Uniform Mechanical Code of the International Association of Plumbing and Mechanical Officials.
In addition, in 2002 ASHRAE began a program of Standard 90.1 training for ASHRAE chapters, with course offerings two to three times per year. Chapter members attending these train-the-trainer workshops then conduct training for local code officials.
CIS also is beginning to more proactively address codes issues related to code-intended standards that are not currently referenced in codes.
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Nov 26, 2014: Hamilton Beach 3Q income down slightly
Nov 26, 2014: LG's sales of Inverter Linear Compressor refrigerators top 10 million
Nov 25, 2014: Robotics Exhibits Grow 25% at 2015 CES
Nov 25, 2014: Index shows HVAC/R contractors more positive than last year
Nov 25, 2014: Consumer Confidence Index Declines
Daily News>>
November 2014: U.S. Appliance Industry: Market Value, Life Expectancy & Replacement Picture 2014
October 2014: Portrait of the European Appliance Industry
September 2014: Appliance Industry Focus: HVAC
June 2014: Appliance Magazine Market Insight: April 2014


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animals canvas prints, wildlife canvas prints, birds canvas prints, galapagos canvas prints, nature canvas prints, pencil canvas prints, art canvas prints, conservation canvas prints, environment canvas prints, ocean canvas prints
Corner Detail: Stretched canvas print with 1.5" stretcher bars and mirrored image sides. Also available with black sides, whites sides, and 5/8" stretcher bars.
Bring your artwork to life with the texture and depth of a stretched canvas print. Your image gets printed on one of our premium canvases and then stretched on a wooden frame of 1.5" x 1.5" stretcher bars (gallery wrap) or 5/8" x 5/8" stretcher bars (museum wrap). All stretched canvases ship within 3 - 4 business days and arrive "ready to hang" with pre-attached hanging wire, mounting hooks, and nails.
Stretched canvas prints look beautiful with or without frames.
Fine Art America is one of the largest, most-respected giclee printing companies in the world with over 40 years of experience producing museum-quality prints. All of our prints are produced on state-of-the-art, professional-grade Epson printers. We use acid-free papers and canvases with archival inks to guarantee that your prints last a lifetime without fading or loss of color.
I have studied animals all my life and I was always known as the nerdy kid who was spending her days learning scientific names and telling the difference between one bird species and the others. But besides watching documentaries and reading books, doing art has been another way for me to study animals. In my life as a conservationist, I have met many like-minded people who, just like me, have dedicated their lives to animals and their preservation. I have met people from all over the world, but a few years ago I had the incredible pleasure to meet a group of people working to preserve the islands of Galapagos - the homeland of the giant tortoises and the place where Darwin invented his famous theory of evolution. The group is called...
COPYRIGHT NOTICE: All the artwork on this website is copyright by Lucy D. with all rights reserved. None of the work posted by Lucy D. on this website or elsewhere on the Internet should be used without the artist's written permission. � Lyuboslava Dimitrova, also known as Lucy D., is one of the youngest members of the world's art community. Coming from the small European country of Bulgaria, her passion for art was originally triggered by the amazing beauty and charm of the Bulgarian nature. Lucy's love for nature and all its creations was the factor that made her so passionate about art as well, making her realize that she had finally found a way to express herself and show her admiration for the natural world at the same time....
Our return policy is very simple:
If you're not happy with a purchase that you made on FineArtAmerica.com, for any reason, you can return it to us within 30 days of the order date. As soon as it arrives, we'll issue a full refund for the entire purchase price. Please note - Fine Art America does not reimburse the outgoing or return shipping charges unless the return is due to a defect in quality.
Fine Art America sells thousands of pieces of artwork each month - all with a 100% money-back guarantee.
If you've hesitated to purchase artwork online in the past, why not give us a try? You have nothing to lose!
We take great pride in the fact that 275,706 artists have chosen Fine Art America to fulfill their orders, and we look forward to helping you select your next piece!
Customer Service: 877-807-5901
(Call Any Time - 24 Hours Per Day)
All canvas prints ship from our production facility within three business days of your order.

subset: commoncrawl


text:
Program Description
Kapiʻolani Community College's Paralegal program is the only Hawai'i-based paralegal program offered in the State. Since 1978, it has been an American Bar Association-approved program and has been the major source of trained paralegals in the Hawai'i legal community. A paralegal is a legal professional who assists in the delivery of legal services, generally under the supervision of an attorney. A paralegal is a member of the legal team in private law offices, government agencies, and corporations, performing technical and paraprofessional responsibilities. These include interviewing and assisting clients, legal research and writing, communicating effectively, implementing legal procedures, preparing instruments and documents, assisting in judicial and administrative appearances, representing clients in selected administrative hearings, completing client projects, calendaring, and coordinating office functions. These functions overlap with those of an attorney. The program graduate will be qualified to work in a private law firm, corporation, public
agencies, and public law firms.
The Associate in Science, Paralegal degree articulates to the University of Hawai'i-West O'ahu towards the Bachelor of Arts (BA) in Public Administration with concentration options in General Public Administration or Justice Administration.
A paralegal may not provide legal services directly to the public.
Degree and Certificate Programs
The Kapi'olani CC Paralegal program offers an associate in science (AS) degree.
- Associate in Science – Paralegal (60 credits)
Potential Careers and Employers
- Careers: Graduates of the associate in science (AS) degree in paralegal may be eligible for paralegal positions in private law firms, businesses, nonprofit organizations, and government agencies. Legal secretary certificate recipients may be eligible for work as secretaries, office managers, clerks, or administrative assistants in a law related organization.
- Employers: The United States Department of Labor publishes the Occupational Outlook Handbook with additional information about careers in paralegals and legal secretaries.
Contact Information
- Counselors/Advisors: Lori Sakaguchi, Student's last name: A-L, 808.734.9017
- Counselors/Advisors: Cynthia Kimura, Student's last name: M-Z, 808.734.9107
- Paralegal Program Coordinator: Susan Jaworowski
Download forms & documents of the Paralegal Program Toolbox.
View the Paralegal Program Outcomes.


text:
14th of June 2007 (Thu), 20:39
I am upgrading the ram on my computer from 512 to 1 gig.....will I notice a huge increase in speed from photoshop? The specs are- Dell workstation Pent 4 1.5 with 1 gig Rambus Ram.
View Full Version : how much faster will photoshop run - 512 ram to 1 gig?


text:
Best Phanatic Photo I've seen Yet
This is the body copy
Best Phanatic Photo I've seen Yet
Thanks to loyal reader A.R. Jenkins, who fowarded me this hilarious, photo-shopped pic. A.R. had no idea from where it originated, so I can't give proper credit to whomever created such a moving and inspirational work of genius.
But I have two words for him or her:


text:
There are currently no items to display.
Carmen was the only designer to use a pant and I applaud her for it, because she gave herself a big challenge and an even bigger risk: fit. Her black pant offered a sleek and minimal counterpoint to the exuberance of the top pieces - a gold shrunken jacket over a floral blouse. It wasn't for everyone, but I found it to be stunning.


text:
J. Cole Hits the Studio With Bone Thugs-N-Harmony
J.Cole has gotten the opportunity to collab with some pretty iconic figures in music like TLC, Jay Z and Missy Elliot. Now he can add Bone Thugs-N-Harmony to his catalog. The Roc Nation artist recently teamed up in the studio with Krayzie and Bizzy Bone. Steve Lobel confirmed the collaboration in a recent interview: "J. Cole was telling his story and Kray is like, 'I'm gonna tell you my story.' But we're gonna let Cole tell it first. The record's f---ing crazy. Crazy. Bizzy [Bone] got on it, too." –– George Chapman
(Photos from left: John Ricard / BET, Bennett Raglin/BET/Getty Images for BET)
Music Matters Daily: K. Michelle Drops 'Going Under'11/25/2014
Music Matters Daily: J. Cole Talks Negative Stereotypes11/20/2014
November Music Matters Showcase Highlights11/18/2014
Music Matters Daily: J. Cole Celebrates Friday Night Lights11/14/2014
Music Matters Daily: Big Sean's 'IDFWU' Music Video11/05/2014
Music Matters Daily: Miguel and Ludacris Give 'Good Lovin''10/31/2014
Music Matters Daily: Janelle Monáe Talks Lauryn Hill10/24/2014
Music Matters Showcase at A3C Festival Highlights10/20/2014
Music Matters Daily: Miguel Previews New Song, 'Coffee'10/17/2014
Music Matters Daily: K. Michelle Honored by ASCAP10/10/2014
Music Matters Daily: Flying Lotus, Kendrick Lamar Drop Video10/03/2014
September Music Matters Showcase Highlights09/30/2014
Music Matters Daily: Rockie Fresh Drops New Song, 'Hesitate'09/25/2014
Music Matters Daily: Ab-Soul Talks Battling Slaughterhouse09/19/2014
Music Matters Daily: ScHoolboy Q, Nas Drop 'Studio' Remix09/11/2014
Music Matters Showcase in Liverpool09/10/2014
Music Matters Daily: Kendrick Lamar and Nas Co-Headline08/29/2014
Music Matters Daily: Jessie J Announces New Album08/22/2014
Music Matters Daily: J. Cole Tributes Mike Brown, 'Be Free'08/15/2014
August Music Matters Showcase Highlights08/13/2014
Music Matters Daily: Trailer Drops for K. Michelle Musical08/08/2014
Music Matters Daily: Jessie J on Why Music Matters08/06/2014
Music Matters Daily: Eric Bellinger and Kid Ink Collab07/25/2014
Music Matters Daily: Adrian Marcel Releases Weak After Next07/18/2014
Music Matters Daily: Is Black Hippy the Best Group Ever?07/12/2014
Music Matters Daily: Dollar and a Dream Tour Kicks Offs07/02/2014
Music Matters at BET Experience 2014 Highlights06/30/2014
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The Highlights: Baldwin Hills Crenshaw Plaza Showcase06/24/2014
Music Matters at BET Experience: The Performers06/03/2014
May Music Matters Showcase05/14/2014
April Music Matters Showcase04/09/2014
Music Matters Showcase at SXSW03/14/2014
Music Matters February Showcase02/14/2014
Music Matters Showcase: Grammy Edition01/25/2014


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Taiwan's former foreign minister and national security chief have been impeached in a diplomatic scandal involving the alleged embezzlement of 30 million U.S. dollars, officials said Thursday.
(Read the article>)
ByCBS InvestigatesCBS NewsJanuary 15, 2009, 10:05 AM
Taiwan's Ex-FM, Security Chief Impeached In Diplomatic Scandal
© 2009 CBS Interactive Inc. All Rights Reserved.
CBS Investigates


text:
HSUS Letter to McDonalds
The HSUS submits a letter to McDonalds encouraging the corporation to switch to cage-free eggs.
The Humane Society of the United States (HSUS) has submitted a shareholder resolution to fast-food giant McDonald's, asking that the McDonald's franchises begin making the transition to cage-free eggs, on both ethical and safety grounds. Currently, all of the US McDonald's restaurants use only eggs from caged hens, though all of the English franchises are cage-free, and the European Union (EU) franchises are soon to follow by the end of the year. "Piling hens into cages so small the birds can't even extend their wings, is both an animal welfare and food safety threat," said Dr. Michael Greger, the director of public health and animal agriculture for the HSUS. "It's time for the McDonald's to follow the lead of major companies and phase-in cage-free eggs, which are better for animals and safer for consumers."
US Senator Cory Booker Goes Vegan
New Jersey Senator tests out veganism for animal ethics and health.
Read More »
New Study: Vegan Diet Can Cure Diabetes
Research indicates that a plant-based diet can improve blood sugar levels and help reverse type 2 diabetes.
Read More »
Tofurky Feast Celebrates 20 Years
The ubiquitous holiday roast has been gracing Thanksgiving tables for two decades.
Read More »
Shocking New Video: Animal Abuse at Chick-fil-A Chain
Mercy For Animals releases undercover footage exposing horrific abuse at farms supplying the country's top chicken fast-food chain.
Read More »
Whole Foods Market Arrests Renowned Vegan Activist
Well-known vegan and social justice activist arrested during peaceful protest against the sale of rabbit meat.
Read More »
More Flashbacks
- Vegan Meat Brand Acquired by Birds Eye Parent Company
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- Los Angeles Museum Hosts Ivory Crush on November 6
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- Vegan Business Conference Kicks Off in Austin, TX
- Acclaimed Los Angeles Vegan Restaurateur Passes Away
- Chipotles Sofritas Now Available Throughout South
- Breast Cancer Survivors: Go Plant-Based
- New York City Bar Hosts Vegan Speaker Panel
- Supreme Court: California Foie Gras Ban Stands
- Robin Quivers Headlines 2014 Texas Veggie Fair
- Annual Chicago VeganMania Returns This Weekend
- Coming This Thanksgiving: Tofurky Trots 2014


text:
Debbie's Reviews > Smoke Portrait
Smoke Portrait
by Trilby Kent
by Trilby Kent
Debbie's review
bookshelves: library-reading-group, word-war-1-11
Feb 06, 11
bookshelves: library-reading-group, word-war-1-11
Read in February, 2011
I always find a childs view of the world interesting and this was more so as 13 year old Martin was pretending to be a 36 year old convict in his correspondence to twenty something Glen following a postal error. I only wish that his letters were longer and more frequent as Glen provides most of the letters and she seems to get little in return although she seems unaware of this. Alternating between the two each chaptor moves the story forward between Belgium and Ceylon. It was disappointing that the loose ends were all tied up very quickly at the end in just the closing pages. I definatley got the feel of an exotic land and the love affair was very convincing and I would have liked more of this. At times the life of a 13 year old seemed slow and boring in comparison and I didnt really get the feel of the impending war. It was inevitable that the lie would be uncovered and It was just a case of when in the story it would happen.
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text:
Kavalierglass Opens Showroom Doors At Forty One Madison
Thursday September 26th, 2013 - 12:25PM
These are shortcuts to your favorite social networking and bookmark sites. Add this story to your Facebook page, del.icio.us, DiggIt, and many others!
Kavalierglass, makers of SIMAX brand borosilicate glassware, will officially open the doors to its new showroom during the October New York Tabletop Market.
On the 19th floor at 41 Madison, Kavalierglass will be displaying all of its well-known collections including SIMAX, Love Plates, Bohemia Cristal, and Walther-Glas, according to the company.
SIMAX, which demonstrates a 175 year-history in blown glassware, comes in various divisions such as kitchenware, home décor, SIMAX for kids, and SIMAX exclusive.
Love Plates, glass plates has been a party favor for the "Celebrity Gift Bags" at the American Music Awards, and the Radio Music Awards, and the Francis Ford Coppola "Pre Oscar Party," according to the company.
Kavalierglass carries 14 collections of Walther-Glas, ranging from Astoria to Natascha to Susana. Bohemia Cristal comes in the categories of tableware, decanters, or gift sets.
"We are a one-stop quality glass shop, being the only full US borosilicate line supplier; nobody makes color like Love plates and the private label opportunities with Walther glass are extensive. Czech (Bohemia) Crystal speaks for itself," said Greg Bittner, sales manager.
Launching this market will be the Bijou collection, a modern German design in different glassware colors.
Tags: tabletop • Forty One Madison • Kavalierglass • New York Tabletop Market • New York Tabletop Show • Love Plates • Bohemia Cristal • SIMAX • borosilicate • Housewares • Tabletop • Trade Shows •
Warm Weather Cools The Bon-Ton Q3 Sales »
Williams-Sonoma Expanding U.S. Furniture Manufacturing
Spectrum Brands Q4, Annual Sales Rise
Keurig Cold Slated For Fall 2015 Launch
Williams-Sonoma Partners With Chef Tyler Florence
Coffee Sales Drive Keurig Q4 Revenue; CFO Resigns
Trade Groups Urge Government Intervention In West Coast Ports Negotiations
Digital Subscription Service
Now Available
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When a former Navy SEAL who survived a suicide bomb attack on his barracks in Iraq talks about how to lead through perseverance, people should listen. Eric Greitens, speaking at the annual Chief Housewares Executive SuperSession, offered a compelling lesson in leadership that should resonate with any industry professional.


text:
Ludum Dare 30
Ludum Dare 28
Ludum Dare 27
Ludum Dare 26
Ludum Dare 25
Ludum Dare 24
Ludum Dare 23
Ludum Dare 22
Ludum Dare 21
About jonnopon3000 (twitter: @jonnopon3000)
Since playing Prince of Persia: The Sands of Time when I was eight years old, I've wanted to make games. It wasn't my first game, but it was the first that left me inspired. As a result, I've kept track of the industry in as many ways as I can for years, and began teaching myself how to program a couple of years ago. Now, at 18, I have one released game (Snake Invaders: http://www.kongregate.com/games/jonnopon3000/snake-invaders), and have taken part in a few Ludum Dares.
I pride myself on my progress, and take inspiration from the fact that I still have loads to learn.
jonnopon3000's Trophies
Archive for the 'LD #22' Category
Alone in the unknown Timelapse!
So I finally loaded up Vegas Pro 9 last night and inserted the some 2,537 images that Chronolapse took of my screen during the 72 hour Jam for LD#22. I whacked on some good music, was surprised by how well the tempo of the music and the image changes matched up in places, and published.
My only regret is not capturing Nathan's screen, as that's where most of the game's art happened and a bit of coding, too.
Let's not regret though, enjoy the timelapse!
Alone in the unknown: Sounds, Other Stuff
A new blog post at From The Beginning with a video detailing our new sounds and other changes. Too many to write about while we're so tired, really.
Almost ready to submit the game for the Jam.
– Jonno & Nathan
Alone in the unknown: Enemies and Multiple Machine Linking!
A new blog post at From The Beginning detailing our new level system, the new enemies and the new multiple machine linking system. There is a video to show off the latter two.
Again, hope you're all enjoying yourselves
– Jonno & Nathan
Alone in the unknown: Puzzle Elements and art!
A new blog post at From The Beginning explaining and showing off our current three puzzle elements and how we think the game will turn out.
Video at the end of the post.
Hope you're all enjoying yourselves
– Jonno & Nathan
Alone in the unknown Machines and Menus
More progress as we finish the pause and menu states and implement the first working version of linking machine classes like doors and switches.
The blog post at From The Beginning has more information and a video demonstration.
Good luck once again to all, hope you're enjoying yourselves as much as us.
– Jonno & Nathan
Alone in the unknown First Look and Info
Posted a first look of our Jam game to my blog, found at From The Beginning.
Do enjoy, good luck to everyone!
– Jonno & Nathan
I'm in With a Friend! (+ background & info)
Ok, finally an official word: I'm definitely in for Ludum Dare #22!
I participated in Ludum Dare #21, and it was there that I produced my first ever hand-made Java + Java2D game. I've made a hell of a lot of progress since then, and am moving into Java + OpenGL (LWJGL library). I've dabbled in C# and C++ as well. Another interest I've taken is teaching a couple of friends how to use the language and encouraged learning for them. I also took part in the LD One-Hour Jam for fun.
This time, I'm in with a friend. His name's Nathan, and he's pretty much in the position that I was in for my first LD. Working as a team, we hope to combine efforts and skills and produce something to be proud of in 72 hours for a Jam entry. I can at least guarantee that this'll be better than my last attempt, Captain Starfire.
A lot of my posts will be on Google+, Twitter and my public blog, From The Beginning. I might be doing a timelapse of my screen as well depending on whether I have the hard drive space or not.
Nathan and I will be using Java with the standard Java2D library to produce this game. We may decide to dip into a bit of OpenAL for sexy audio, depending on the time we have towards the end.
Thanks for reading, good luck all, and do check out my G+, Twitter and blog:
Blog: From The Beginning
Twitter: @jonnopon3000
Google+: https://plus.google.com/100416291177265133194/posts
– Jonno


text:
Welcome to The BRIDGE, the social and information hub of the dental lab industry. Connect with industry peers and vendors, ask questions, sign up for events, review products, read LMT articles and industry news and more!
Harry Carlisle · Owner/Ceramist at Carlisle Porcelain Studio
I recently closed my lab and have several items to sell To view please go to http://rockford.craigslist.org/hab/4667597751.html
Harry Carlisle commented on Nancy Zhang's answer
I had this problem years ago and it seemed to be running the first opaque to high. I have used non precious...(more)
Harry Carlisle commented on Lena Lobbe, RDT's photo
Hi Lena.... I have been using NP since 1967. There were tough times in the begining. I refuse to use...(more)


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Danielle Smith says she is determined to win the legislature come 2016 against a government posting unbalanced budgets amid a series of petty scandals and outrages
The strong vote of confidence in Redford's leadership from Progressive Conservative party members means there will not be a leadership race to replace her
Political observers aren't expecting any upsets this weekend at the PCs annual general meeting and convention, despite murmurs of dissent in the rank and file
We 'wish to assure MLA Mike Allen and all Albertans that his activities in Minnesota would be lawful, private and welcome in Alberta,' the release says
After Allen was released Tuesday, he phoned in his resignation from Alberta's governing Progressive Conservative caucus and issued an apology
Mike Allen, MLA for Fort McMurray-Wood Buffalo, was arrested by St. Paul police Monday night but so far hasn't been charged
Analysis: If giant cheques representing bulk donations can be submitted without so much as a bat eyelash, then donation limits are basically unenforceable
Alison Redford has one mark against her that makes the upcoming leadership review even more volatile. Many don't consider her to be likable
'There appears to be a quid pro quo. It's expected that you donate money to the governing party in return for influence, grants and so forth'
Delegates voted to allow the MPs to retain their previous status but they will no longer be allowed to bring along 15 extra delegates to the annual convention in the future


text:
AntiDupl.NET 2.2.30
AntiDupl.NET 2.2.30AntiDupl.NET is a small and easy to use application that will help you find and delete your duplicate images. It can find and display duplicate images in the main graphic formats: JPEG, GIF, TIFF, BMP and PNG.
The comparison is based on the contents of the files, so the program can find not only almost identical, but similar images. In addition, the program can find images with some types of defects.
Interface: Russian, English, Italian, Spanish, Chinese, German.
Requirements: .NET Framework 2.0.
User rating:
votes: 0
Rate it
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November 27, 2014
Posted Tuesday, November 12, 2013 --- 8:52 a.m.
HATTIESBURG, Miss. (AP) -- Brett and Deanna Favre's foundation, Favre 4 Hope, has supported charities in Mississippi and Wisconsin with $180,000 in grants for 2013.
The foundation said Monday that Mississippi charities receiving grants are Special Olympics of Mississippi, Hope Haven, Association for the Rights of Citizens with Disabilities, Make a Wish of Mississippi, Memorial Hospital Deanna Favre Fund, University of Southern Mississippi Children's Center for Communication and Development, USM Brett Favre Athletic Scholarship and the Pink Ribbon Fund.
Wisconsin charities include Ribbon of Hope, Rawhide Boys Home and The Brett and Deanna Favre Miracle League of Green Bay.
Favre and volunteer coaches and students from Oak Grove High will be coaching 40 Special Olympics athletes to compete in the new National Football League Flag Football program.
Copyright 2013: Associated Press
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In a fast-moving afternoon session March 20, the U.S. Senate passed a continuing resolution to keep government funded through the current fiscal year.
The measure, technically a substitute amendment to a continuing resolution passed by the House of Representatives, contains appropriations for several government departments including Justice, Commerce, Homeland Security and Agriculture. The original House bill funded Defense, Veterans Affairs and military construction. Remaining government functions will be funded by continuing resolution at FY 2012 levels.
The bill preserves the across-the-board cuts in the Budget Control Act of 2011, known as sequestration.
An amendment to shift $55 million in USDA funds to prevent furloughs of meat and poultry inspectors passed on a voice vote. An amendment to shift some funding out of a Pentagon biofuels program and into the operations and maintenance budget failed.
The House appears poised to take up the bill quickly, while the Senate plans to pivot to a debate on a budget for 2014.
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GSA's administrator talks with FCW about short-term hiring, long-term planning and Robert Frost.
Without a future vision and an appetite for risk, reforms lead down a rabbit hole. There is a better way.
VA's top tech official says he is balancing risks while trying to keep the department's online services open for business.
After five years on the job, the founding director of the Office of Government Information Services believes that a deeper understanding and acceptance of FOIA is seeping into the federal government.
The September attack, made public Nov. 10, potentially puts customer and employee personal information at risk, including addresses, Social Security numbers and emails.
The General Services Administration's Matthew Goodrich predicts more agency-driven authorizations and previews a new two-year road map.
Archie Mackie became product director of enterprise computing at the Army PEO EIS in June. In a Nov. 7 interview with FCW, he explained why the Army is cautious but hopeful in its adoption of the cloud.
While IT procurement and design are already quite centralized under the Office of Information and Technology, sources tell FCW that telemedicine IT and app development at the Veterans Health Administration will be rolled up under the OI&T as well.
Steve Kelman argues that the best place to improve federal procurements is at the beginning.
The sequestration is nothing more than a TAX on Federal employees. Thanks Tea Party!
According to the article, even though a continuing resolution is Senate-approved, they are still enforcing the across-the-board cuts imposed by sequestration. So, in order for one group to get what they want (Spending cuts), they used sequestration as an extortion weapon? I would have less problem with that if the tactic was strictly between parties. But instead, the 'gun-to-the-head' was put against Government workers, programs and services. The 'still-happening' cuts are directly attributed to a two-party Congress trying to 'best' each other while the American public can only watch as more jobs and services are lost.
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This page contains Cheats for Angry Birds Star Wars organized by sections for 3DS. Angry Birds Star Wars is a Strategy General game, made by Rovio Entertainment Ltd, released on Oct 29, 2013 and published by Activision. If you can't find a hint or secret in our list, then please check this page periodically for the latest updates.
- Developer:
Angry Birds Star Wars 3DS CheatsRovio Entertainment Ltd
- Publisher: Activision
- Genre: Strategy General
- Release Date: Oct 29, 2013
- ESRB: Everyone
Stuck on this game? Set a specific, clearly defined question and let others answer your question or view answers to previously asked questions. If you think you are an Angry Birds Star Wars expert then please try to help others with their questions.
I completed Hoth level 10, but no trailer was unlocked. Can someone please tell me what I did wrong?!...
Posted on: 04-30-2014
Don't forget to Bookmark this page for the latest Angry Birds Star Wars Cheats. At this moment there are no cheats or walkthroughs available for Angry Birds Star Wars. If you know cheats, secrets, hints or glitches for this game then please Submit them.Submit Cheats
Angry Birds Star Wars - Official Launch Trailer
- Nov 21, 2013, Views: 93
Angry Birds Star Wars - Character Trailer
- Nov 21, 2013, Views: 43
Angry Birds Star Wars - Multiplayer Trailer
- Nov 21, 2013, Views: 39
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Loose Tooth
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Authors: Suen, Anastasia
Title: Loose tooth
Publisher: New York : Viking, 2002.
Characteristics: 1 v. (unpaged) :,col. ill. ;,24 cm.
Content Type: text
Media Type: unmediated
Carrier Type: volume
Summary: Peter can't decide if he wants his loose tooth to fall out because if it falls out, he will have a gap in his smile for the school pictures, but money from the tooth fairy will help him buy a new basketball.
Local Note: 1 3 6 7 9 10 14 15
Additional Contributors:
Statement of Responsibility: story by Anastasia Suen ; illustrations by Allan Eitzen ; based on characters created by Ezra Jack Keats
Subject Headings: African Americans Juvenile fiction. Basketball stories Juvenile literature. Teeth Juvenile fiction.
Topical Term: African Americans
Basketball stories
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Washington Kayak Club
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November 2014
Check out our new
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tab: One stop for all the information you need to go paddling!
From the Prez
By Sybille Fleischmann
I am honored to serve as WKC president for the next year and to plan, together with the board and you, many new activities to keep WKC traditions alive. Over the winter we are preparing First Aid and CPR classes, a First Aid Kit packing party, and a class on "gourmet cooking on kayak trips".
This is your club. Please let us know what activities you would like to see happen at the club. Feel free to join us at the next board meeting on November 20 to share your ideas or send me an e-mail.
A huge thank you to Dave Ortland who injected the WKC with new energy and volunteered so much of his time over the past years to initiate new activities, polish the WKC website and lead the club.
Thanks to all the paddleboard members and all our volunteers who keep classes, trips and pool sessions running smoothly!
Looking forward to paddling, surfing and playing with you on whatever water we can find.
Featured Trip
Rivers and Camping on the Olympic Peninsula: Thanksgiving Weekend
This is a 20+ year old annual Thanksgiving weekend trip to the Olympic Peninsula hosted by Bill Petty.
Rivers and camping are determined by skill of group and water flow. It is all decided on the fly based upon the sum of all conditions. Potential rivers include Humptulips, Matheny Creek, Wynoochee, Sol Duc, NF Calawha, Dungeness, Dosewallips, Elwha - in no particular order. Let's paddle!
November 28 - 30
Where: Olympic Peninsula
Skill Level: SK II+/III - IV
Contact: Bill Petty
Trip Details
Upcoming Training
Pool Play: Tukwilla, Shoreline, and Tacoma
Annual Roll Clinic
took place this year from October 4 to 25. Congratulations to recent graduates who learned that mastering the second half of the roll is much more challenging than the first half.
View more images from the Annual Roll Clinic:
WKC 2014 Roll Clinic Slideshow
Keep working on that roll!
Continue to build your skills at weekly pool sessions offered in Tukwilla, Shoreline, and Tacoma.
The fee for weekly pool sessions is
$10 for WKC members and $15 for non-members
Check the Event Calendar for upcoming dates:
WKC Event Calendar
If you have any questions about pool sessions:
WKC Pool Coordinators
News and Events
WKC General Meeting: Paddling Year Round in the Pacific Northwest
With Shawna Franklin and Leon Somme
Last month, Shawna and Leon from Body Boat Blade presented tips for paddling in the "off" season in the Pacific Northwest. They encouraged paddlers to enjoy the solitude of fall, winter, and early spring, suggesting these are the most beautiful, wildlife-rich times of the year to paddle. For these trips to be enjoyable there are many things to consider, including; planning for weather, accounting for shorter daylight hours, understanding seasonal changes in tides, and devising creative strategies for staying warm and dry. From their trip around Iceland to many years of winter paddling in the PNW, Shawna and Leon shared experiences of how to truly love "off" season paddling.
Thank you Shawna and Leon!
WKC General Meeting Photos
San Juan Preservation Trust is Requesting Volunteers
Bella French from the San Juan Preservation Trust is requesting volunteers for the fall season. Please join her stewardship team and sign-up for volunteer work days scheduled this fall.
November 14: Wild and Scenic Film Festival
Read More
9th Annual Deception Pass Dash: December 13 - 14
The PNW's most adventurous winter race! Each December, this challenging 6 mile course takes paddlers through the swirling waters of Deception Pass! You don't need to be an expert paddler to participate - race organizers simply ask that you prepare (practice paddling, rolling, rescues, etc) and make safe decisions about your paddling ability on the day of the race (based on actual conditions). All racers should have significant paddling experience and proven self-rescue skills.
$55 per racer (price goes up to $70 on 11/20/14)
11/15 Update:
- Racing clinics and Demos will be held on Saturday, and the race is Sunday morning (starting gun at 8:40am).
- Dash organizers are looking for volunteers to assist with the race. If you are interested, please contact:
Dave Ortland:
Steven Exe:
Make plans to race with other WKC members in the discussion forum, then register for the event:
WKC Discussion Forum
Register Here
Washington State Ferries Now Accepting Reservations
The WSDOT is now accepting reservations for the following ferry routes:
Current Routes:
- Port Townsend/Coupeville
- Anacortes/Sidney B.C.
- Anacortes/San Juans for Executive (commercial only)
- Anacortes / San Juan Islands (beginning Jan. 5, 2015)
Reservation holders are prioritized. Up to 80 percent of sailing capacity can be allocated to reservations, which means drive-up passengers may wait through multiple sailings for space, if they did not make reservations ahead of time. Keep this in mind for upcoming kayaking trips and plan ahead.
More Information
R2AK - Do You Have What It Takes?: June 4
Race to Alaska. Sail, row, paddle 750 cold water miles from Port Townsend to Ketchikan. First place prize is $10,000. Do you have what it takes?
Watch Video
Strategize with fellow WKC members, then register if you dare.
WKC Discussion Forum
Register Today
Golden Gate Sea Kayak Symposium: Jan 30 - Feb 1 **EVENT CANCELED**
Canoe & Kayak Calendar of Events for 2014
Check out cool kayaking events going on around the rest of the country.
Link to Events
Recent Trip Reports
Cypress Island Surf and Turf
By Peter Babler
An October 3 Sea Kayaking trip around Cypress Island, with stops at Pelican Beach and a hike on the Eagle Cliff Trail to the summit lookout.
Read More
My First Annual Lumpy Waters Trip
By Tomas Tabisola
I first heard about Lumpy Waters last year when I won a certificate for Basic Skills Sea Kayak Class for Two at a Washington Waters Trail Association Auction Dinner. In googling Alder Creek to get its phone number, I saw a video and photos of the Fifth Annual Lumpy Waters Symposium on its website and it looked like everyone was having a great time. I knew immediately I wanted to be part of it.
Read More
WKC Luau
By Dave Ortland
Two weeks ago on Sept 20 we had an epic event at Hobuck Beach in Neah Bay - the first club Luau and Beach party. Tomas Tabisola prepared an amazing Hawaiian feast including a roast pig. Ineze Arlene and Hilary Barnes helped prepare the side dishes for Tomas' menu. We declare them to be Knights of the WKC for their heroic efforts! At least 40 club members and guests attended and contributed potluck to the feast, music, and camaraderie.
Read More
Cedar River Float
By Mike Grijalva
Starting our float at the park above Hwy 169 and under the bike trail(old railroad bridge), we floated about a mile to this obstruction. A high bank on river left gave way when the clay soil became supersaturated with water, and all the earth and trees came down and across the river. This section has been closed to the public since that time, but Sgt. Knauss of the King Co. Marine Division gave our WKC trip permission to go down through this area. We floated under the first trees, but had to get out and walk around trees that span the river just below here.
Read More
San Juan River Trip
By Mike Grijalva
A group of river folks that ran the Main Salmon last year together, had so much fun, that we did another river this year. 9 teens and 8 adults headed to the San Juan River in S. Utah about the middle of August.
Read More
La Push 7 Day Coastal Paddle
By Bill Porter
Paddled with a group of WKC (Washington Kayak Club) friends launching at the Quileute River Marina in La Push, WA. We paddled to Mosquito Cove some 11 miles to the south, which was our intended campsite. Fog... lots of sea fog in the mornings and fairly brisk winds in the 15-25k range in the afternoons for most of this trip. Highlight was loads of warm sunshine each and every day.
Read More
Paddling Panama's Pacific Coast - The Gulf of Chiriqui
By Colin Reedy
Mandatory non-disclosure agreement.
This article reveals little known exotic locations for epic kayaking yet to be developed or even much populated. By reading this information you promise to do your utmost to maintain their confidentiality... and get there someday soon. That being said, check this out.
Read More
Lake Chelan Shakedown
By Brenna McVety
Lake Chelan has long been on my list of kayaking adventures. This summer, I finally had the time and weather window to to make that trip happen. I checked in with Dave Ortland, WKC President, shortly before departing. I let him know I was heading to Lake Chelan. I would load my kayak onto the ferry and ride to Stekehin, then paddle 50 miles back to Chelan. Simple lake with lots of campsites. No big deal, right? He indicated there was a very good chance I would not make it...
Read More
Copyright 2014 Washington Kayak Club
President: Sybille Fleischmann
Secretary: Bill Porter
Treasurer: Jackie Brown
Editor: Brenna McVety,
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Precision Pet Little Stinker Telescoping Scoop with RakeItem # HN-PPP204
- Telescoping scoop handle extends from 22 to 37 in.
- Rake for easy cleanup on grass, sand, or soil
- Strong yet lightweight plastic is easy to clean
- Includes scoop and rake
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Order today, receive no later than Friday, November 28th. Some limitations apply.
Sport this fun Cielo tank from Element this summer for a cute way to beat the heat!
- Machine wash, dry flat
- Flared waist
- Laced back and front details
- Sheer fabric
- Clip tag at hem
- Fashion Sleeveless
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from Americas
Decades after El Salvador's armed conflict, hundreds of families still search for children who were taken from them amid the fighting.
A repressive emergency law adopted in Canada's Quebec province violates freedoms of speech, assembly and movement in breach of international obligations.
A Sarayaku indigenous activist speaks out about her community's fight to defend their rights and protect their traditional lands in Ecuador's rainforest.
Activists from around the globe share their stories from the frontline of defending human rights.
Amnesty International releases its flagship yearly report documenting the state of the world's human rights.
Six journalists have been killed in less than a month in Mexico, raising grave concerns about freedom of expression.
No one has claimed responsibility for the attack in the Colombian capital which killed two people and injured at least 50.
Brazil's new Truth Commission must bring to light the full extent of violations committed under the country's military rule.
North Carolina has voted in favour of a ban on same-sex marriage and civil unions, contravening rights protected under international law.
In Cuba, critics of the government have to find creative ways of ensuring their stories get out, as internet access is highly controlled.
Amnesty International hears from journalists and bloggers across the world who face abuse and even imprisonment while trying to do their job.
Presidential elections in Dominican Republic offer an "extraordinary opportunity" in the battle for human rights.
Brazil has taken important steps to address the horrific crimes committed during the regime of 1964-1985.
Levon Helm, an influential US musician and longtime supporter of Amnesty International, has passed away in Woodstock, New York.
A Mexican man who denounced federal police for kidnapping, torture and extortion has been found dead.
Albert Woodfox, 65, and Herman Wallace, 70, have been in solitary confinement in Louisiana's Angola Prison since 1972.
Connecticut's State Senate has voted to abolish the death penalty, joining a worldwide trend away from capital punishment.
Inmates in the isolation unit at Arizona State Prison are kept under dehumanising conditions that lack health care and rehabilitation opportunities.
Man accused of raping three 12-year-old girls acquitted by Brazil's Supreme Court on the basis that they were allegedly "sex-workers".
A new Amnesty report describes how more than 2,000 prisoners in Arizona are confined for months or years in conditions of extreme isolation.


text:
An article handling system especially adapted for transporting thin, fragile articles such as silicon wafers into and out of a sealed environment such as a vacuum chamber comprises a vibratory track for transporting articles to be processed, an article handler associated with the track for removing articles from the track for processing and returning them to the track thereafter, and a pair of loader/unloaders at opposite ends of the track for intermittently supplying articles to be processed to the track and removing them therefrom after processing.
1. A loader/unloader for wafers, comprising:
A. a cassette for holding a plurality of wafers thereon in spacd apart position, and having an open face through which said wafers may be removed from, or supplied to, said cassette;
B. said cassette including at least first and second side walls having ribs on the interior surfaces thereof for supporting the wafers thereon and spaced apart in a vertical direction by an amount at least slightly greater than the thickness of the wafer to be stored therein;
C. a tongue extensible into said face and between said wafers, said tongue having a portion adapted to convey said wafers away from or to said cassette;
D. the ribs on opposed side walls of the cassette being spaced apart at an amount sufficient to accommodate passage of said tongue therebetween;
E. means bringing said tongue into contact with said wafers; and
F. means vibrating said tongue to thereby transfer wafers between said tongue and cassette.
2. The loader/unloader of claim 1 further including means mounting said cassette for vertical motion whereby wafers may be removed from, or supplied to, successive storage spaces in said cassette as said cassette is moved.
3. The loader/unloader of claim 1 wherein the means vibrating said tongue is adapted to advance wafers thereon along the tongue.
4. The loader/unloader of claim 1 wherein the means bringing said tongue into contact with said wafers includes
(1) motor means energizable to move said cassette with respect to said tongue, and
(2) a controller for selectively energizing said motor means.
5. The loader/unloader of claim 1 further comprising:
A. means for mounting said cassette for movement in a first direction; and
B. the means bringing said tongue into contact with said wafers including means selectively indexing the cassette in the mounting means and moving the cassette in said first direction to bring the tongue into article-supporting relation with wafers in said cassette.
6. The loader/unloader of claim 5 in which the means vibrating said tongue comprises:
(1) a platform connected to said tongue for movement therewith;
(2) flexure means supporting said platform; and
(3) electromagnetic driver means for vibrating said platform to thereby impart limited vibratory motion to said tongue.
7. The loader/unloader of claim 5 wherein the ribs define compartments and the means indexing the cassette indexes the cassette one compartment at a time.
8. The loader/unloader of claim 1 wherein the tongue has a flat base portion and opposed side walls forming a shallow trough for moving a wafer therealong and being of substantially greater mass than said wafer.
9. In a semiconductor processing system for processing semiconductor wafers such as silicon wafers, the system having a processing station including a sealable vacuum chamber and means for supplying wafers to the processing station, the means for supplying wafers to the processing station including a cassette for holding a plurality of wafers thereon in spaced apart position and having an open face through which said wafers may be removed from/or supplied to, said cassette, the improvement comprising:
A. a tongue extensible into said cassette face and between said wafers;
B. means bringing said tongue into contact with said wafers;
C. means vibrating said tongue to thereby transfer wafers between said tongue and said cassette;
D. said means vibrating said tongue having associated therewith a vibrating track for transporting wafers between said tongue and said sealable vacuum chamber.
This application is a division of United States Patent Application Ser. No. 580,350 filed May 23, 1975, by Norman B. Brooks and Michael M. Olmstead and assigned to the assignee of the present invention now U.S. Pat. No. 4,030,622 issued 6/21/77.
A. Field of the Invention
The invention comprises an article handling system, and, more particularly, a wafer handling system. The system includes a transporter for transporting an article from one place to another, a transfer mechanism for removing the article from the track for processing and thereafter returning it for transport, and a loader/unloader for selectively feeding the articles to the track and receiving them therefrom. The system is especially useful in wafer vacuum processing operations.
B. Prior Art
Article handling systems are frequently used in industrial processing operations to minimize manual handling of various articles. In some fields, such as in the processing of semiconductor wafers, the processing is highly automated and numerous handling system of varied characteristics are utilized.
Semiconductor wafers are large, thin, flat wafers (typically, several inches in diameter and several thousandths of an inch thick) which are used in substantial quantities in the semiconductor industry to form electronic circuits and components; they are light in weight (fractions of ounces) and fragile. Successful processing of these wafers requires maintenance of high purity levels in all stages of the operation and much of the processing is therefore performed in a vacuum. One such operation involves selectively irradiating portions of the wafer with an ion beam to thereby modify its electronic characteristic. The irradiation takes place in a vacuum chamber under conditions of moderate to high vacuum (10-4 torr to 10-7 torr); the ion beam is admitted to the chamber through a sealed port containing windows that are transparent to the beam.
A wide variety of techniques have heretofore been used to transport the wafers into and out of sealed chambers such as vacuum chambers. Such techniques have included, among others, the use of rotary carousels, endless conveyor belts, movable carriages, etc. With these techniques, the carriage element must at some point penetrate the housing of the chamber, and the penetration points must therefore be sealed so as to isolate the chamber from its ambient environment. Because of the need to accommodate the motion of the carriage element, these seals are of limited effectiveness in sealing the chamber, and thus the vacuum must be reestablished after each wafer is introduced. This is time consuming and often greatly slows production.
In some systems the primary portion of the movable carriage element, together with its driving source, is located wholly within the chamber to help alleviate the seal problem. Special precautions must then be taken to prevent loss of the lubricant element in the driving source, since its loss will subject the driving source to failure and will also contaminate the environment within the chamber. Contamination is an especially serious problem in semiconductor processing.
Because of the stringent requirements placed on the seal and the transport system by the need to maintain high vacuum conditions, therefore, present transport systems, despite their frequently considerable cost and complexity, are only partially effective in maintaining a good vacuum and generally require frequent repair and maintenance.
Once the wafer or other article being processed is moved to the interior of the chamber, it must generally be further handled to position it for processing. For example, in the case of ion beam implantation of semiconductor wafers, the wafer must be held in a position transverse to the beam while the latter scans the wafer. Handling systems to accomplish this frequently are of considerble mechanical complexity, often due in part to the nature of the transport mechanism which carries the wafer into and out of the chamber.
In automated systems, the articles to be processed are often mounted on a carrier; in such cases they must be unloaded from the carrier for processing and returned to it thereafter. Loader/unloader systems to perform this function are frequently complex and often are not well matched mechanically to the transport system.
Accordingly, it is an object of the invention to provide an improved article handling system for moving articles into and out of sealed chambers.
Still a further object of the invention is to provide an improved article handling system for semiconductor wafer processing operations.
Another object of the invention is to provide an improved article transporter.
Still another object of the invention is to provide a transporter for semiconductor wafers.
Yet another object of the invention is to provide an improved transporter for moving semiconductor wafers into and out of a vacuum chambers.
Yet another object of the invention is to provide an article transfer mechanism which is especially adapted for use with the transporter herein described.
Yet another object of the invention is to provide an improved article loader/unloader that is especially simple in design and operation.
Still a further object of the invention is to provide an article loader/unloader that is especially well matched mechanically to the transport system disclosed herein.
Another object of the invention is to provide a wafer loader/unloader that is compatible with conventional wafer storage systems.
Due to the stringent limitations imposed by vacuum processing operations on semiconductor manufacturing, the article handling system of the present invention will be described with particular reference to the carriage of semiconductor wafers into and out of a vacuum processing chamber where they are to be irradiated by an ion beam.
The first track section comprises a pair of pass-through valves positioned on the wafer entrance side of the chamber and spaced apart from each other by a track segment of sufficient length to accommodate a wafer between them. The valves themselves are of the type shown in U.S. Pat. No. 3,833,018 issued July 20, 1974 to Norman B. Brooks and assigned to the assignee of the present invention. The entrance and exit orifices of the valves comprise thin, elongated slots aligned with the track section; a rotor within each valve housing has a corresponding slot which is aligned with the entrance and exit orifices when the valve is opened for passage of a wafer therethrough.
The track segment between the valves is wholly enclosed to form a thin, flat conduit for accomodating a wafer in the interior thereof and isolating it from its environment; the opposed ends of the conduit are sealed to the corresponding valve walls and encompass the valve inlet and outlet orifices. The conduit and the valves thereby form an air-tight "forechamber" of limited volume which provides an intermediate isolation stage between the vacuum chamber and its environment. A second track section is formed by a similar pair of valves and track conduits on the wafer exit side of the chamber.
A third track section extends through the chamber itself and is joined at its opposite ends to the first and second track sections to form a single rigid track with them. Elliptical bellows of sufficient cross-section to encompass the entrance and exit apertures, and thus the track section passing through them, extend between the chamber housing on the entrance and exit sides thereof and the innermost valve of the first and second track sections, respectively. These bellows seal the chamber apertures so that access to the chamber interior is obtained only via the valves and their corresponding forechambers.
The valves and their connecting track sections form an extended, continuous, rigid track of substantial mass. The track is forced to undergo small amplitude vibrations by means of a pair of vibrators which are attached to the yoke from which the track is suspended. The vibration has a first displacement component perpendicular to the track which repetitively lifts wafers momentarily out of contact with the track, and a second displacement component directed along the track which advances the wafers along the track by a minute amount each time they are lifted off the track. Although the incremental advance is small during a given vibration cycle, the vibrations occur at a sufficiently rapid rate, (e.g. sixty cycles per second, which is the common electrical line frequency in the United States) to advance the wafers along the track at an appreciable rate.
As noted previously, the track and the vacuum chamber are mounted independently of each other. The bellows which are connected between the track and the chamber vibration-isolate the chamber from the track. This minimizes the driving energy required for the track. Further, it facilitates precise processing of the wafers within the chamber.
The valves on the entrance and exit sides of the chamber are actuated by corresponding solenoids. The various valves are operated in sequence to move a wafer from the exterior of the chamber, into the forechamber, and then into the main vacuum chamber. Once within the chamber, the wafer is removed from the track at a wafer processing station comprising a platen which is detachably connected to the track and normally forms part of it. The platen is connected to a rotatable shaft and is rotated upwardly from the track and into a processing position as the shaft rotates. In this position, the platen, and thus the housing to which it is ultimately connected, are vibration-decoupled from the track and thus the housing is immune to vibration during processing. This allows the next wafer to be processed to be moved into the forechamber during processing without disturbing the wafer being processed, and this thereby accelerates the over-all processing rate. The positions of the wafers is optically sensed at various stages to control the sequencing.
Two different platens are described herein. In a first embodiment the platen comprises a cylindrical plate having an inwardly sloping edge; it sits in the track during transport of the wafer into the chamber and vibrates with the track. A pair of arms extending transversely from a rotary shaft swing the platen out of the track once the wafer moves into it and thereby vibration-decouples the platen and its wafer from the track during processing. In another embodiment, the platen is shaped to fit into a recess in the track without touching it and with the surface of the platen positioned slightly below that of the track. "Islands" extend upwardly from the track through apertures in the platen. These islands vibrate with the track and receive the wafer thereon. The platen, which is connected to an arm extending transversely from a rotary shaft picks up the wafer from these islands for processing. The platen is thus vibration-decoupled from the track at all times.
The simple yet effective loader described herein is particularly adapted to the wafer transporter. It uses a casette having a number of separate compartments for accomodating the wafers therein and orienting them with their flat surfaces parallel to each other. Wafers are slid into and out of the respective compartments through an open face thereof. The casette is mounted on an index mechanism which orients the casette vertically so that the wafers are horizontal. A tongue-like extension of the track extends into the open face of the casette beneath the lowermost of the wafers to be processed. The index mechanism indexes the casette downwardly, one compartment at a time, so that successive wafers contact the tongue. On contact, the vibration of the tongue carries each wafer out of the casette and onto the track for processing. A similar loader/unloader at the opposite end of the track receives the wafers from the track after processing and loads them into a corresponding casette.
The foregoing and other and further objects and features of the invention will be more readily understood from the following detailed description of the invention when taken in conjunction with the accompanying drawings in which:
FIG. 1 is a view in perspective of a wafer ion-implantation chamber incorporating a wafer handling system in accordance with the present invention;
FIG. 2 is an enlarged view in perspective of the vacuum chamber of FIG. 1;
FIG. 3 is a vertical sectional view along the lines 3--3 of FIG. 2;
FIG. 4 is a horizontal plan view along the lines 4--4 of FIG. 2;
FIG. 5 is a vertical sectional view along the lines 5--5 of FIG. 2.
FIG. 6 is a view in perspective of the wafer-holding platen of the present invention in its load/unload position;
FIG. 7 is a view in perspective of the platen of FIG. 5 in the elevated position;
FIG. 8 is an illustrative timing waveform useful in explaining the invention;
FIG. 9 is a sketch illustrating the utilization of a pair of transport systems in accordance with the invention for parallel processing lines;
FIG. 10 is a horizontal sectional view of the loader/unloader system taken along the lines 10--10 of FIG. 1;
FIG. 11 is a vertical sectional view of the loader/unloader along the lines 11--11 of FIG. 10;
FIG. 12 is a rear view in perspective of an alternative wafer-transfer platen in accordance with the invention;
FIG. 13 is a view in perspective of the front face of the platen; and
FIG. 14 is a vertical view along the lines 14--14 of FIG. 13.
A generally continuous track 30 formed from connected track sections 32, 34, 36, respectively, extends through an entrance aperture 40 and an exit aperture 42 of the chamber 10. The track 30 is supported from a yoke 44 independent of the chamber 10; the yoke 44 in turn rests on platforms 46, 48 which are driven by electromagnetic vibrators 50, 52 connected to the yokes 46, 48 by semi-rigid flexure straps 54, 56, respectively. The vibrators drive the platforms 46, 48 and cause them to undergo small amplitude vibrations along with the yoke 44 and track 30. The vibration has an upwardly-directed vertical component perpendicular to the track 30 and a horizontal component parallel to this track and directed to the right in FIG. 2.
The first track section 32 is formed from first and second pass-through valves 60, 62, respectively, and an enclosed track segment 64 in the form of a conduit terminating in vertical end plates 66, 68 respectively, which are connected to the valves 60, 62, respectively. The conduit 64 and the end plates 66, 68, each have an aperture 70 extending through them and of a size such as to accomodate the article to be processed. In the present illustration, the article comprises a semiconductor wafer and thus the conduit and aperture are wide and thin to conform to the wafer shape.
The valves 60 and 62 are identically constructed and only valve 62 will be described in detail. As shown particularly in FIGS. 3 and 4, valve 62 is formed from a cylindrical rotor 72 mounted for rotation within a parallelepiped housing 74 by means of a cylindrical shaft 76 and bearings 78 and 80. The shaft 72 and 74 have central apertures extending therethrough commensurate with, and aligned with, aperture 70 in the conduit 64. Solenoids 82, 84 (FIG. 2) control the rotation of the rotors of the valves 60, 62, respectively. When the aperture in the rotor is aligned with the apertures in the housing, the valve is opened and a wafer can pass through the valve from one side thereof to the other; when the rotor is not so aligned, the valve is closed. When both valves 60 and 62 are closed, the conduit segment 64 is sealed off at both its end to form a "forechamber" of limited volume. This forechamber is of sufficient length, that is, the valves 60 and 62 are spaced far enough apart, to accomodate a single wafer therein. This assists in accelerating the wafer processing, as will be described in more detail below. Further details of the construction may be obtained from U.S. Pat. No. 3,833,018 noted above.
The third track section 36 at the chamber exit is essentially identical to the first track section 32, having corresponding valves 60' and 62', forechamber 66', and bellows 96' and will not be described in further detail. The second track section 34 comprises a track segment 90 extending between, and connecting at its opposite ends to end plates 92, 94 of yoke 44. The track segments 32 and 36 are also connected to these end plates, such as by welding or the like. A first elliptical bellows 96 is connected between a pair of end plates 98, 100; the bellows surrounds the entrance aperture 40 of chamber 10 and encompasses track section 34. End plate 98 is connected to end plate 92 by bolts 102 (FIG. 4) or the like, while end plate 100 is connected to the chamber 10 by means of bolts 104 or the like. O-ring seals 106, 108 form an air-tight seal at the connecting planes. A similar arrangement is provided at the exit end of the chamber 10 and will not further be described.
Disposed within the track 90 is a platen 120 connected for rotation about a shaft 122 by means of arms 124, 126; these arms, together with shaft 122, are formed with hollow-core interiors. The shaft 122 extends through rotary, air-tight fittings 130, 132 in the sidewalls of the chamber 10 and is connected via conduits 134, 136 to a water supply source and drain, respectively. During processing of a semiconductor wafer, water flows through the shaft 122 and arms 124, 126 and the interior of the platen 120 to cool the platen which is heated by bombardment of the ion beams. The shaft 122 is rotated from outside the chamber by means of a drive-link connection 140 which in turn is driven from a motor (not shown).
When the shaft 122 is rotated, it raises the platen 120 upwardly out of the track 90 and into a position where it intersects the ion beam 22 directed through the chamber windows 18, 20; this is shown more clearly in FIGS. 6 and 7 to which reference should now be made. A pair of arms 150, 152 connected to shafts 154, 156, respectively, which extend through the platen 120, have fingers 158, 160, respectively, which fit into corresponding notches 162, 164, respectively, in the track 90. Gears 166, 168 attached to shafts 154, 156 are positioned to intermesh with each other. A wire 170 has one end thereof connected to a spring 174 which in turn is connected to a wall (not shown) of the chamber 10; the other end of the wire 170 extends over a pin 176 connected to the underside of the platen and is tied to the shaft 156.
When the platen is in the rest position shown in FIG. 6, the wire 170 has several turns extending around the shaft 156. When the shaft 122 is thereafter rotated, the effective path length of the wire from the chamber wall to the shaft 156 increases since the wire bends around shaft 22 during rotation. Wire 170 thus unwinds from shaft 156, and, as it does so, it rotates the shaft 156 in the clockwise direction as seen from underneath the track 90 in FIG. 5. This in turn rotates the gears 166 and 168 into the position shown in FIG. 6 where the platen is fully elevated. As the platen is elevated, the arms 150, 152 rotate inwardly and engage the wafer on the platen to maintain it in position during processing. Due to the spring 174, wafers of different sizes are readily accomodated by the arms 150, 152, a feature of importance when production is rapdily shifted from one wafer type to another. As the platen 120 is returned toward the track 90, the gears 166, 168 rotate in the opposite direction and the arms 150, 152 swing outwardly of the platen to release the wafer carried on it. A spring (not shown) within shaft 156 reversely rotates the arms to the open position on return of the platen to the track.
Referring now specifically to FIGS. 1, 10 and 11, wafers to be processed are supplied to the track 30 from a loader/unloader 180 comprising a casette 182 in the form of a rectangular box having sidewalls 184 and 186 and ribs 188 on the side walls extending transversely to an open face of the casette. The ribs define compartments within the casette for the reception of wafers 190 therein; they are spaced apart by a distance greater than the width of a wafer so as to allow a certain amount of "play" of the wafer therein. The casette is mounted for vertical motion on a pair of guides 192, 194 which in turn are mounted for horizontal motion on a platform 196 which slides within a housing 198. A rack 200 formed on the rear of casette 182 mates with a pinion 202 driven by a motor 204 to thereby vertically advance the casette. A motor 206 drives the platform 196 toward and away from the track 30.
A tongue-like extension 210 of the track 30 extends into the open face of the casette 182 and between adjacent wafers when the platform 196 is advanced toward the track. The casette is initially positioned such that the tongue is beneath the lowermost compartment containing a wafer to be processed. Each time the motor 204 indexes the casette downwardly a single wafer contacts the tongue 210 and is lifted from the ribs 188 onto the tongue. A similar loader/unloader 212 receives the wafers from the track 30 after processing and loads them one by one into a corresponding casette 214 which indexes upwardly, but starting with the tongue extension of the track at the uppermost compartment. The operation of the loader/unloader 212 is otherwise the same as that of the loader/unloader 180 and need not be described in further detail.
Mounted within each forechamber is a light source 220 and a light-responsive element 222 positioned to detect the presence or absence of a wafer in the forechamber. Similarly, a light source 224 (FIG. 3) is positioned to transmit light along a path 226 into a light-responsive element 228 on reflection from a wafer on platen 120 but not otherwise, to thereby detect when a wafer is on the platen. A controller 230 (FIG. 1) connected to receive the outputs of the light-responsive elements sequences the operation of the loader/unloader, the valves, and the platens, as will now be described in more detail. The track 30 is tilted slightly downwardly (from left to right in FIG. 1) to assist in moving the wafers along the track.
Referring now to FIG. 8, an illustrative timing sequence that is useful in explaining the operation of the system is shown.
The operating sequence of the various components is illustrated by pulse-shaped wavefoms, with the horizontal axis representing time. When the waveform is "low" (pulse absent), the corresponding unit is considered to be in a passive or inoperative state, that is, in the case of a loader/unloader, it is stationary; in the case of a valve, it is closed; and in the case of the platen, it is in the lowered position. Conversely, when the waveform is "high" (pulse present), the corresponding unit is considered to be on or operative, that is, in the case of a loader/unloader, it is indexing to a new position; in the case of a valve, it is opened to allow passage of a wafer therethrough and in the case of the platen, it is in the rotated or elevated position.
To begin the processing, the motor 204 (See FIG. 1) is energized from the controller 230 to index the casette 182 downwardly. As the casette moves downwardly, the tongue 210 picks up a wafer 190 from the ribs 188. The tongue, being connected to, and forming part of, the track 30, vibrates with the track and thereby advances the wafer toward the valve 60. The travel time from the casette to the valve is indicated by the horizontal distance between the trailing edge of the waveform 240 and the front edge of the waveform 242. Valve 60 then opens (as indicated by waveform 242 in FIG. 8) to admit the wafer into the forechamber 64 and thereafter closes on receipt of a signal from sensor 222 indicating that the wafer has cleared the valve and is in the forechamber. The forechamber may now be "rough pumped" to a pressure intermediate that of the chamber 10 and atmospheric pressure by auxiliary pumping means (not shown) via a nozzle to minimize the vacuum loss in the main chamber when valve 62 is opened. Alternatively, the forechamber may be evacuated from the main chamber.
Valve 62 next opens to pass the wafer into the chamber 10. When the wafer moves onto the platen, as detected by lightsensor 226, the platen is thereupon elevated (waveform 246) to bring the wafer into the path of the beam 22 for processing. During the time it is elevated, the platen is decoupled from the track 30 and thus the vibration of the track has no effect on the wafer. This is important in ion implantation systems since vibration could cause scanning irregularities which could vary the electrical characteristics of the wafer in an undesired manner. However, the track is still vibrating and thus other wafers are being moved to or from the forechambers. This increases the processing rate.
After the wafer has been processed, the platen is again lowered. This returns the wafer to the track and it travels toward the valve 62. The latter is then opened (waveform 248) and the wafer passes through it. This also exposes the interior of chamber 10 to the interior volume of forechamber 64' and thus the forechamber 64' is preferably "rough-pumped" prior to opening valve 62'. Like the forechamber 64, the latter is of small volume relative to the main chamber and vacuum conditions in the main chamber are again quickly restored. After entrance into the forechamber 64', as detected by the output of lightsensor 222', valve 62' closes and, shortly thereafter, valve 60' opens (waveform 251). Wafer 190 then passes through the valve 60' onto the tongue 210' and then into the casette 212. Thereafter the casette is indexed (waveform 253) to accept a subsequent wafer.
From FIG. 8, it will be noted that there may be several wafers on the track 30 at a given time. For example, while one wafer is traveling through forechamber 64 toward valve 64, another is passing through forechamber 64' and still another has just been loaded onto the loader/unloader 212'. Thus, transport of the wafer to and from the processing chamber can take place during the processing without unduly disturbing the processing operation and this greatly accelerates the production rate.
Further acceleration of the production rate may be obtained by aligning two or more systems of the type illustrated and described herein and interconnecting their chambers 10 so that the beam 22 travels through both chambers in succession. While the platen in one chamber is elevated, that in the other chamber is depressed so that only one platen will be in the beam path at a given time. The units are thus operated in a tandem or "push-pull" mode to thereby further increase the production rate.
This is illustrated schematically in FIG. 9 in which first and second chambers 10A and 10B are placed face to face with their tracks 30A and 30B parallel to each other and side by side. Wafers are fed along both tracks simultaneously, and a single controller is utilized such that platen 120A of chamber 10A is elevated while platen 120B of chamber 10B is depressed, and vice versa.
An alternative form of platen is illustrated in FIGS. 12 through 14. The platen 250 shown there comprises a rectangular plate having apetures 252 therein which are made with corresponding islands 254 carried on track 90. The platen 250 rotates about shaft 122. An arm 256 which connects platen 250 to shaft 122 has an aperture 258 through which a guide 260 attached to the track 90 passes. Pairs of triangular ridges 262 and 263 on the front face of platen 250 serve as supports for wafers of different diameters, (e.g. 1 1/2-3 1/4 inches in diameter) while a pair of pins 264 serve as safety stops.
The top faces of the islands 254 are aligned with the wafer-bearing or upper surface of the track 90 so that they support a wafer on the same level as this track. When the platen is rotated into an elevated position, however, it lifts the wafer from the islands for processing by beam 22. The guide 260 eases the wafer onto the supports 262 or 264, as the case may be.
From the foregoing, it will be seen that we have provided an improved article transport system. The system is uniquely suited to transporting an article into and out of a sealed environment such as a vacuum chamber, but it will be understood that it may be used in connection with other sealed environments. For example, some processing operations extensively irradiate materials, and it is necessary to contain this radiation from the environment. This is done in chambers which are "radiation sealed" and the artcle handling system of the present invention is particularly useful in connection with these applications also. Further, microwave processing operations are generally conducted in a chamber that is isolated or sealed from its environment, and the present invention is particularly useful in transporting articles into and out of such a chamber. Other processing operations for which the present invention is well suited also suggest themselves to those skilled in the art.
Further, we have provided a loader/unloader which is particularly well adapted to the transport system of the present invention and, when used with that system, needs no separate drive source.
Finally, we have provided an improved article handler particularly well adapted to the article transporter for efficiently removing articles from the transporter and returning them to it. The article handler has a minimum of moving parts and is efficient and reliable in operation.
It will be understood that various changes may be made by those skilled in the art without departing from either the spirit or the scope of the invention and it is intended that the foregoing be taken as illustrative only, and not in a limiting sense, the scope of the invention being defined with particularity in the claims.
Patent Citations
Referenced by
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text:
Being there for my widowed mother-in-law
She is in her late seventies, healthy, financially set and very independent. As such, my support will be of the comforting nature. I have asked her to be my "Mass buddy" and she laughingly agreed. That will give me the opportunity to have weekly contact with her without looking like I'm checking up on her.
I know we all grieve differently and I suspect it is different for women than men (although I have no evidence upon which to base that assumption). So what I'm asking is, from a ladies perspective, what other means of comfort might I provide her. Please keep in mind, that I don't want to overwhelm her, I just want to make certain that she knows she is not alone.
Thank you in advance and peace be with you all.


text:
Jack Bauer fights on as the iconic clock stops ticking on the historic series finale of 24. Download part 2 now!
After eight seasons and 194 hours, the inventive and suspenseful 24, which has been nominated for 68 Emmys, reaches its historic conclusion. In a special two-hour television event, emotions run high as the harrowing day climaxes with resolute President Taylor closing in on a world-changing peace treaty and a vengeful Jack Bauer taking matters into his own hands for one last and unforgettable job. The events of the groundbreaking and iconic action-packed series come full circle. Download part 2 now!
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