OTFC-PX, equipped with a planetary dome and ion source issuitable for coating a reflector and lenses with high curvature.
Planetary dome improves coating uniformity over substrate.
Dome angle can be inclined in accordance with lens curvature.
IAD system greatly improves film quality.
High precision spectrum property at spherical substrate can beobtained at high accuracy by optical monitor.
Large size chamber (1800 mm in diameter) with planetary domeincreases productivity.