W. Eschen, G. K. Tadesse, R. Klas, M. Tschernajew, F. Tuitje, C. Spielmann, A. Tünnermann, J. Limpert, and J. Rothhardt, "High Resolution Ptychographic Coherent Diffractive Imaging using Table-top XUV Sources," in Imaging and Applied Optics 2018 (3D, AO, AIO, COSI, DH, IS, LACSEA, LS&C, MATH, pcAOP), The Optical Society (Optical Society of America, 2018), paper JM3E.4.
We present a coherent imaging setup for extended samples achieving record-high resolution for non-periodic samples. A Siemens star pattern is imaged and the Rayleigh criterion is used to provide a reliable sub-50 nm resolution claim.