Eon-LT™ is a temperature measuring film thickness monitor that surpasses conventional monitors that are blind to thermal changes of the crystal. The combination of frequency and temperature measurement allows unprecedented accuracy in real-time rate and film thickness monitoring.
Why measure temperature? Because the frequency change of a crystal by process heating can easily be equal to the frequency change caused by coating. In normal operation there is a built-in 10% error in most rate measurements. In the worst case it can be 100%. Why measure if your measurements are always wrong?
Ready to learn more? Request our most recent data sheets, talk to our engineering team about your specific needs, and receive a quote for your own Eon-LT™ Monitor by contacting us at sales@colnatec.com or calling +1 480-634-1449.