Kameeswarar temple is located in Villianur, a village on Puducherry - Villupuram main road. The temple has a flat entrance tower facing South, and all the shrines of the temple are enclosed in concentric rectangular granite walls. The central shrine is approached through pillared halls. The central shrine facing East houses the image of Kameeswarar in the form of Lingam (an iconic form of Shiva). The shrine of KokilambaAmman, facing South, is located in separate shrine around the first precicnt. The central shrine is approached through a Mahamandapam and Arthamandapam. As in other Shiva temples in South India, the shrines of Vinayaka, Murugan, Navagraha, Chandekeswara and Durga are located around the precinct of the main shrine. The second precinct has the temple tank and a garden around the periphery of the compound wall.