Design and Testing of a Damped Piezo-Driven Decoupled XYZ Stage
Zhong Chen Junjie Shi Songwei Zhu Xineng Zhong Xianmin Zhang Zhong Chen Junjie Shi Songwei Zhu Xineng Zhong Xianmin Zhang
Lightly-damped dynamics of a flexure-based mechanism will tend to largely deteriorate the broadband control performance if its hysteresis nonlinearity has been compensated. This paper developed a novel damped piezo-driven decoupled XYZ nanopositioning stage, which consists of three orthogonal parallel kinematic subchains, in which each subchain has a translational pair using a bridge-type piezo-dr...