 Nanoelectromechanical systems mass spectrometer

A nanoelectromechanical systems mass spectrometer (NEMS-MS) is an instrument measuring the mass of analyte particles by detecting the frequency shift caused by the adsorption of the particles on a NEMS resonator.NEMS-MS was invented by Prof. Michael Roukes and Dr. Kamil Ekinci at the California Institute of Technology in 1999.