 These equations enable coupled simulations of fluid, thermal, chemical, biological, electrical and mechanical phenomena.CFD-ACE+ solver allows for coupled heat and mass transport along with complex multi-step gas-phase and surface reactions which makes it especially useful for designing and optimizing semiconductor equipment and processes such as chemical vapor deposition (CVD).Researchers at the Ecole Nationale Superieure d'Arts et Metiers used CFD-ACE+ to simulate the rapid thermal chemical vapor deposition (RTCVD) process.