Luineach O'Neill became the paramount Ulster chief. Turlough was the son of Conn Bacach's uncle, and was the fourth son of Niall Connallach macArt óg O'Neill, Tanist of Tyrone (1519–1544). Turlough assumed the position of The O'Neill Mor and held it through a great deal of fighting until 1595 when he died. During his Chiefship, Turlough initially battled the sons of his predecessor Shane, who were called the MacShanes, but soon after established a peace with the brothers, granting them the eastern third of his lands (Glenconkeyn and parts of Tir Eoghan along the western side of Lough Neagh) in return for their military loyalty. MacShanes Conn and his brother Shane both served as Turlough's tanists at different times. At the same time, Turlough battled the up-and-coming Baron of Dungannon, Hugh Rua O'Neill who was placed in Ulster as a counterweight to Turlough's power by the English. Hugh Rua eventually succeeded to the title of Earl of Tyrone and upon Turlough's death, became The O'Neill Mor himself. After nearly a decade of warfare with the English forces in Ireland, Hugh O'Neill, Earl of Tyrone, surrendered in 1603, just days after the death of his enemy Queen Elizabeth. Hugh stayed in Ulster as the Earl for another five years. But after numerous threats to his life, he secretly departed Ireland for the French coast in 1607 in what is famously called the Flight of the Earls. Hugh continued to use his title after he fled to the Continent in the Flight of the Earls, although in the law of the Kingdom of Ireland it was forfeit by act of the Irish Parliament a year later. So did his son Shane O'Neill, whose will left his title to his only, if illegitimate, son Hugo Eugenio O'Neill; when he died in 1641 at the head of his regiment in Spain. Other Spanish exiled descendants of Hugh Rua continued to use the title and command the Ulster Irish Regiment in the Spanish Army through the seventeenth century. The barony of Dungannon was created in 1542 as the title designated for the declared heir of the Earldom. Ferdocha or Mathew O'Neill, natural son of Conn Bacach the 1st Earl, was the first to hold the title of Baron Dungannon. The line that descended from Mathew kept the Baron of Dungannon as one of its junior titles at least through the death of Don Eugenio O'Neill,