and an encoder used to measure the position of the stage relative to the scale and report this to the motor controller, allowing a motion controller to reliably and repeatably move the stage to set positions. Multiple axis stage configurations For position control in more than one direction, multiple linear stages may be used together. A "two-axis" or "X-Y" stage can be assembled from two linear stages, one mounted to the platform of the other such that the axis of motion of the second stage is perpendicular to that of the first. A two-axis stage with which many people are familiar is a microscope stage, used to position a slide under a lens. A "three-axis" or "X-Y-Z" stage is composed of three linear stages mounted to each other (often with the use of an additional angle bracket) such that the axes of motion of all stages are orthogonal. Some two-axis and three-axis stages are integrated designs rather than being assembled from separate single-axis stages. Some multiple-axis stages also include rotary or tilt elements such as rotary stages or positioning goniometers. By combining linear and rotary elements in various ways, four-axis, five-axis, and six-axis stages are also possible. Linear stages take an advanced form of high performance positioning systems in applications which require a combination of high speed, high precision and high force. Application Semiconductor manufacturing Linear stages are used in semiconductor devices fabrication process for precise linear positioning of wafers of the purposes of wafer mapping dielectric, characterization, and epitaxial layer monitoring where positioning speed and precision are critical. Variations Linear Slide Nano Linear Stage Nano Positioning Linear Stage Ultra Precision Machining Linear Stage References Positioning instruments Systems engineering Optomechanics