highly efficient power plant operation. 2016 - Akira Yoshikawa, Kei Kamada, Yasuhiro Shoji. Developments of a novel garnet scintillators and industrialization by the academic startups. Semiconductors & semiconductor devices 2001 - . Pioneer work for high-quality epitaxial growth of semiconductor silicon carbide and power devices. 2002 - Tatau Nishinaga. Invention of micro-channel epitaxy for drastic reduction of dislocation in highly lattice-mismatched hetero-epitaxial systems. 2003 - Jyunichi Murota. Development of group IV hetero CVD technology and creation of atomically controlled processing. 2004 - Kazutoshi Wakabayashi. High-level synthesis and verification on system LSI. 2005 - Mitsuo Usami, Ryo Imura. Development of ultra-small chip for IC tags and related technology. 2006 - Takashi Ito. Advanced research for highly-reliable CMOS gate dielectric films by direct nitridation of silicon. 2007 - Hiroshi Iwai, Hisayo S. Momose, Tatsuya Ohguro. Pioneering work of sub-50 nm MOSFET research and development. 2008 - Masaru Sasago. A pioneer research and industrial development of excimer laser lithography technology. 2009 - Yoshinobu Nakagome, Masashi Horiguchi, Takayuki Kawahara. Pioneering development of seminal low-leakage CMOS circuits. 2010 - Hiroo Kinoshita. Pioneering research and longtime contribution for industrial approach on extreme ultraviolet lithography. 2011 - Digh Hisamoto. Invention and development of "fin" structure MOSFETs. 2012 - Shinichi Takagi. Pioneering contributions to understanding of carrier transport properties in channels of Si MOSFETs and to technology of the channel mobility enhancement. 2013 - Nobukazu Teranishi. Development of image sensors with pinned photodiode. 2014 - Takashi Eshita, Shoichiro Kawashima, Shigeo Kashiwagi. Development of high-reliability technologies for ferroelectric random access memory and its mass-production. 2015 - Hidefumi Ibe, Tadanobu Toba, Kenichi Shinbo. Development of impact assessment technologies for terrestrial neutron-induced soft-errors in semiconductor devices and prompt protection architecture against resultant failures in electronic systems. 2016 - Mitsuru Sugawara, Keizo Takemasa, Kenichi Nishi. Realization of superior characteristic quantum dot lasers with optical communication wavelength and its commercialization with mass-production. Measurement science & technology 2001 - Mitsuhiro Katayama. Development of coaxial impact-collision ion scattering spectroscopy and its application to in situ topmost surface analysis. 2002 - . Development of highly sensitive micro magnetic sensor using amorphous wire: magneto-impedance sensor. 2003 - Masashi Iwatsuki. Development of variable temperature SPM (scanning probe microscope). 2004 - Reiko Kuroda. Development and application of universal chiroptical spectrophotometer (UCS). 2005 - . Development and application of spin-polarized scanning electron microscope. 2006 - Yuji Miyahara, Toshiya Sakata. Electrical detection of biomolecular recognition using genetic field effect transistor and