Science and Engineering of Microelectronic Fabrication (2001, 2nd ed) T. Hattori: Ultraclean Surface Processing of Silicon Wafers : Secrets of VLSI Manufacturing (2004)Geschke, Klank & Telleman, eds.: Microsystem Engineering of Lab-on-a-chip Devices, 1st ed, John Wiley & Sons. . Micro- and Nanophotonic Technologies (2017) eds: Patrick Meyrueis, Kazuaki Sakoda, Marcel Van de Voorde. John Wiley & Sons. External links Videos and animations on microfabrication techniques and related applications. MicroManufacturing Conference. Semiconductor device fabrication Nanotechnology Microtechnology