d'Este, the only male heir of the Duchy of Modena and Reggio. Their daughter Maria Beatrice d'Este thus had the government on both territories, which however remained separate state entities until her death. In 1796 the Este were deprived of their possessions by the troops of Napoleon Bonaparte. The latter incorporated the territory into the Cispadane Republic, then making it flow into the Cisalpine Republic. During this period the region was briefly disputed against Napoleon by the Austrians of the anti-French coalition (1799) and experienced a rapid succession of different administrative systems, more or less provisional. As a last administrative change, in 1806, the French emperor assigned the Duchy of Massa and Carrara to the Principality of Lucca and Piombino, governed by his older sister Elisa Bonaparte Baciocchi. During the Napoleonic domination Maria Beatrice d'Este (then ruler of the Duchy) was forced to take refuge in Vienna with the family of her husband, Ferdinand Karl, Archduke of Austria-Este, uncle of Emperor Francis II, from whom she governed her duchy in exile. With the fall of the Napoleonic regime, the Congress of Vienna again assigned to Maria Beatrice the ancestor duchy that had been stolen from her. After the Restoration and the end of the independence of various local entities such as the Marquisate of Fosdinovo, the Duchy of Massa and Carrara included, in addition to the traditional territories, numerous others territories in Tuscany. In 1829, on the death of Maria Beatrice, the duchy of Massa and the principality of Carrara were annexed to the duchy of Modena and Reggio, led by her son Francis IV. In 1860, with the deposition, the previous year, of Francis V, the duchy of Modena and Reggio (also including the territories of Massa and Carrara) was annexed to the Kingdom of Sardinia, of which it constituted the province of Massa and Carrara. Marquis, Princes, then Dukes of Massa and Carrara Giacomo I Malaspina (1445–1481) Marquis of Massa and Lord of Carrara since 1473 Alberico II Malaspina (1481–1519) Ricciarda Cybo-Malaspina (1519–1546) and (1547–1553) Giulio I Cybo-Malaspina (1546–1547) Alberico I Cybo-Malaspina (1554–1623) Marquis of Massa and Carrara from 1558, then Prince of Massa and Marquis of Carrara from 1568 Carlo I Cybo-Malaspina (1623–1662) Alberico II Cybo-Malaspina (1662–1690) Duke of Massa and Prince of Carrara from 1664 Carlo II Cybo-Malaspina (1690–1710) Alberico III Cybo-Malaspina (1710–1715) Alderamo Cybo-Malaspina (1715–1731) Maria Teresa Cybo-Malaspina (1731–1790) Maria Beatrice (1790–1796) Duchess of Massa