layer is removed to release the beams, using a selective etch process that does not damage the structural layer. Many combinations of structural and sacrificial layers are possible. The combination chosen depends on the process. For example, it is important for the structural layer not to be damaged by the process used to remove the sacrificial layer. Examples Surface Micro-machining can be seen in action in the following MEMS (Microelectromechanical) products: Surface Micro-machined Accelerometers 3D Flexible Multichannel Neural Probe Array Nanoelectromechanical relays See also Bulk micromachining Magnetic nanoparticles MEMS Semiconductor device fabrication References Nanotechnology Microtechnology Microelectronic and microelectromechanical systems