used: at backscattering angles to detect heavier elements by RBS and forward (recoil) detector to simultaneously detect the recoiled hydrogen. The recoil detector for LI-ERDA typically has a “range foil” which is typically a Mylar foil placed in front of the detector for blocking scattered incident ions but allow lighter recoiling target atoms to pass through to the detector. Usually a 10 µm thick Mylar foil is able to completely stop 2.6 MeV He+ ions but allows the recoiled protons to go through with a low energy loss. HI-ERDA is more widely used compared to LI-ERDA because it can be used to study a lot more variety of elements compared to LI-ERDA. It can be used to identify heavy elements. It is used to detect recoiled target atoms and scattered beam ions using several detectors namely silicon diode detector, time-of-flight detector, gas ionization detector, etc. Such detectors are described below. Main advantage of HI-ERDA is its ability to obtain quantitative depth profiling information of all the sample elements in one measurement. Recent studies have shown that depth resolution obtained by using this technique is excellent. Depth resolution less than 1 nm can be obtained with good quantitative accuracy thus giving these techniques significant advantages over other surface analysis methods. Also, the accessible depth of 300 nm can be achieved using this technique. A wide range of ion beams including 35Cl, 63Cu, 127I, and 197Au, with different energies can be used in this technique in order for recoil to occur. It must be noted that LI-ERDA and HI-ERDA both provide similar information. The difference in the name of the technique is only due to the type of ion beam used as a source. The setup and the experimental conditions affect the performances of both of these techniques. Factors such as multiple scattering, and ion beam induced damage must be taken into account before obtaining the data because these processes can affect the data interpretation, quantification and the accuracy of the study. Additionally, the incident angle and the scattered angle help determine the sample surface topography. Incorporating surface topography into Ion Beam Analysis technique, a reliable characterization of layers of a surface can be obtained. Prominent Features of ERDA ERDA is very similar to RBS, but instead of detecting the projectile at the back angle, the recoils are detected in the forward direction. Doyle and Peercey in 1979 were able to establish