which in time results in sensor drift. Additionally inbuilt micropump facilitates sensor regeneration and thus resolves saturation issues by expelling gas molecules out of the sensor surface. Breath analysis is related field of use for the gas sensor that is empowered by micropump. Micropump can advance remote diagnostic and monitoring of gastrointestinal tract and pulmonary diseases, diabetes, cancer etc. by means of portable devices within telemedicine programs. The promising application for MEMS micropumps lies in drug delivery systems for diabetes-, tumor-, hormone-, pain and ocular therapy in forms of ultra-thin patches, targeted delivery within implantable systems or intelligent pills. Piezoelectric MEMS micropumps can replace traditional peristaltic or syringe pumps for intravenous, subcutaneous, arterial, ocular drug injection. Drug delivery application does not require high flow rates, however, the micropumps are supposed to be precise in delivering small doses and demonstrate back pressure independent flow. Due to biocompatibility and miniature size, silicon piezoelectric micropump can be implanted on the eyeball to treat glaucoma or phthisis. Since under these conditions the eye loses its ability to ensure outflow or production of aqueous humour, the implanted micropump developed by Fraunhofer EMFT with the flow rate of 30 µl/s facilitates proper flow of the fluid without restricting or creating any inconvenience to the patient. Another health issue to be solved by micropump is bladder incontinence. Artificial sphincter technology based on the titanium micropump ensures continence by automatically adjusting the pressure during laughter or coughing. The urethra is opened and closed by means of a fluid-filled sleeve that is regulated by the micropump. Micropump can facilitate scent scenario for consumer, medical, defense, first responder applications etc. to enhance the effect of with ubiquitous picture scenarios (movies) and sound scenarios (music). Microdosing device with several scent reservoirs that are mounted near the nose can release 15 different scent impressions in 1 min. Advantage of the micropump lies in the possibility to smell sequence of scents without different odors being mixed. The system ensures an appropriate dose of the scent to be detected by the user only as soon as scent molecules are delivered. Numerous applications are possible with micropump for scent-dosing: tasters training (wine, food), learning programs, psychotherapy, anosmia treatment, first responder training etc. to facilitate full immersion in the desired environment. Within analytical systems, the micropump can be for lab-on-chip applications, HPLC and Gas Chromatography systems etc. For the latter micropumps are required to ensure accurate