device that had the structure of a modern MOS transistor. The principles behind the device were the same as the ones that were tried by Bardeen, Shockley and Brattain in their unsuccessful attempt to build a surface field-effect device. The device was about 100 times slower than contemporary bipolar transistors and was initially seen as inferior. Nevertheless Kahng pointed out several advantages of the device, notably ease of fabrication and its application in integrated circuits. Composition Usually the semiconductor of choice is silicon. Recently, some chip manufacturers, most notably IBM and Intel, have started using an alloy of silicon and germanium (SiGe) in MOSFET channels. Unfortunately, many semiconductors with better electrical properties than silicon, such as gallium arsenide, do not form good semiconductor-to-insulator interfaces, and thus are not suitable for MOSFETs. Research continues on creating insulators with acceptable electrical characteristics on other semiconductor materials. To overcome the increase in power consumption due to gate current leakage, a high-κ dielectric is used instead of silicon dioxide for the gate insulator, while polysilicon is replaced by metal gates (e.g. Intel, 2009). The gate is separated from the channel by a thin insulating layer, traditionally of silicon dioxide and later of silicon oxynitride. Some companies have started to introduce a high-κ dielectric and metal gate combination in the 45 nanometer node. When a voltage is applied between the gate and body terminals, the electric field generated penetrates through the oxide and creates an inversion layer or channel at the semiconductor-insulator interface. The inversion layer provides a channel through which current can pass between source and drain terminals. Varying the voltage between the gate and body modulates the conductivity of this layer and thereby controls the current flow between drain and source. This is known as enhancement mode. Operation Metal–oxide–semiconductor structure The traditional metal–oxide–semiconductor (MOS) structure is obtained by growing a layer of silicon dioxide () on top of a silicon substrate, commonly by thermal oxidation and depositing a layer of metal or polycrystalline silicon (the latter is commonly used). As the silicon dioxide is a dielectric material, its structure is equivalent to a planar capacitor, with one of the electrodes replaced by a semiconductor. When a voltage is applied across a MOS structure, it modifies the distribution of charges in the semiconductor. If we consider a p-type semiconductor (with the density of acceptors, p the density of holes; p = NA in neutral