installed at exhaust side, this type of pumps are used in load lock in semiconductor manufacturing processes. This type of pump suffers from high power consumption(~1 kW) compared to turbomolecular pump (<100W) at low pressure since most power is consumed to back atmospheric pressure. This can be reduced by nearly 10 times by backing with a small pump. More examples Additional types of pump include the: Venturi vacuum pump (aspirator) (10 to 30 kPa) Steam ejector (vacuum depends on the number of stages, but can be very low) Performance measures Pumping speed refers to the volume flow rate of a pump at its inlet, often measured in volume per unit of time. Momentum transfer and entrapment pumps are more effective on some gases than others, so the pumping rate can be different for each of the gases being pumped, and the average volume flow rate of the pump will vary depending on the chemical composition of the gases remaining in the chamber. Throughput refers to the pumping speed multiplied by the gas pressure at the inlet, and is measured in units of pressure·volume/unit time. At a constant temperature, throughput is proportional to the number of molecules being pumped per unit time, and therefore to the mass flow rate of the pump. When discussing a leak in the system or backstreaming through the pump, throughput refers to the volume leak rate multiplied by the pressure at the vacuum side of the leak, so the leak throughput can be compared to the pump throughput. Positive displacement and momentum transfer pumps have a constant volume flow rate (pumping speed), but as the chamber's pressure drops, this volume contains less and less mass. So although the pumping speed remains constant, the throughput and mass flow rate drop exponentially. Meanwhile, the leakage, evaporation, sublimation and backstreaming rates continue to produce a constant throughput into the system. Techniques Vacuum pumps are combined with chambers and operational procedures into a wide variety of vacuum systems. Sometimes more than one pump will be used (in series or in parallel) in a single application. A partial vacuum, or rough vacuum, can be created using a positive displacement pump that transports a gas load from an inlet port to an outlet (exhaust) port. Because of their mechanical limitations, such pumps can only achieve a low vacuum. To achieve a higher vacuum, other techniques must then be used, typically in series