surfaces to adhere together. Separating the two surfaces is often complicated due to the fragile nature of the microstructure. Stiction is often circumvented by the use of a sublimating fluid (often supercritical CO2, which has extremely low surface tension) drying process where the liquid phase is bypassed. CO2 displaces the rinsing fluid and is heated past the supercritical point. As the chamber pressure is slowly released the CO2 sublimates, thereby preventing stiction. See also Blish lock References Friction Surface science