using excimer laser lithography already print features with dimensions a fraction of the wavelength of light used – an amazing optical feat. New techniques such as immersion lithography, dual-tone resist and multiple patterning continue to improve the resolution of 193 nm lithography. Meanwhile, current research is exploring alternatives to conventional UV, such as electron beam lithography, X-ray lithography, extreme ultraviolet lithography and ion projection lithography. Extreme ultraviolet lithography is in mass production use as of 2020 by Samsung. Economy In 2001 NIST publication has reported that photolithography process constituted about 35% of total cost of a wafer processing costs. See also Dip-pen nanolithography Soft lithography Magnetolithography Nanochannel glass materials Stereolithography, a macroscale process used to produce three-dimensional shapes Wafer foundry Chemistry of photolithography Computational lithography ASML Holding Alvéole Lab Semiconductor device fabrication References External links BYU Photolithography Resources Semiconductor Lithography an overview of lithography Optical Lithography IntroductionIBM site with lithography-related articles Lithography (microfabrication) Microtechnology