Femtosecond laser micromachining is used for device fabrication by milling air holes and/or troughs into ferroelectric crystals by directing them through the focus region of a femtosecond laser beam. . The advantages of femtosecond laser micromachining for a wide range of materials have been well documented. In brief, free electrons are created within the beam focus through multiphoton excitation. Because the peak intensity of a femtosecond laser pulse is many orders of magnitude higher than that from longer pulse or continuous wave lasers, the electrons are rapidly excited, heated to form a quantum plasma. Particularly in dielectric materials, the electrostatic instability, induced by the plasma, of the remaining lattice ions results in ejection of these ions and hence ablation of the material, leaving a material void in the laser focus region.  Also, since the pulse duration and ablation time scales are much faster than the thermalization time, femtosecond laser micromachining does not suffer from the adverse effects of a heat-affected-zone, like cracking and melting in regions neighboring the intended damage region.