text: Today, optical coatings made from TiO, SiO, TaO etc. (and combinations of these) in most cases consist of amorphous phases of these compounds. Much research is carried out into thin amorphous films as a gas separating membrane layer. The technologically most important thin amorphous film is probably represented by a few nm thin SiO layers serving as isolator above the conducting channel of a metal-oxide semiconductor field-effect transistor (MOSFET). Also, hydrogenated amorphous silicon (Si:H) is of technical significance for thin-film solar cells.