Only two computational studies addressed other types of inhibitors: A hydrophobic CFx layer was modelled with a CF3-terminated Si(001) surface in a slab model by Kim et al. to gain insight into Pt ALD on protected versus unprotected silicon surfaces. Protection of the same surface by molecular-layer deposited indicone was modelled in the second study by Lee et al. It should be noted that the precursor-inhibitor approach discussed below also leads to a surface modification (OH groups at the SiO2 surface are replaced by -OCH3 groups). This suggests that the line between surface functionalization and inhibitor adsorption is blurry. These works will be discussed together with other SMI approaches below.