The measurement procedure for the process involved monitoring mass-to-charge (m/z) values in the same pressure ranges simultaneously. This monitoring encompassed three distinct sets of measurements: five 'background' ALD cycles with no precursor, co-reactant or plasma power turned on; five 'normal' plasma ALD cycles with both precursor and co-reactant and five 'normal' thermal ALD cycles. Selected m/z values were chosen from the Bar Scans to make up MID scans based on similar pressure ranges for easy comparison e.g. grouping them as m/z = 15 and 16; m/z = 29 and m/z = 42, 43, 44 and 45. By structuring the measurement procedure in this manner, all sets of cycles were designed to induce similar pressure fluctuations as those experienced during a standard ALD cycle. This approach aimed to minimize any potential impact of pressure variations on the measured signal, ensuring a more accurate assessment of the process dynamics and reaction products. The obtained data was analysed using MASsoft 10 (Hiden Analytical) software.