Figure . Time-resolved deposition at 10 W and +40 V QCM bias voltage. The white areas show the precursor exposure (plasma off), indicating surface adsorption that goes to surface saturation after approximately 2 s. The grey areas show the plasma pulse, showing a significant mass loss, which are assumed to be due to a perturbation of the QCM signal due to plasma exposure (see Fig. ). The blue areas show a regime where no precursor is allowed into the system and no ignition of the plasma and are referred to as the stabilizing step for the QCM signal prior to the surface adsorption step.