At low temperatures, the overall change of ΔrG is positive (≤ 69 kJ/mol for the first and second decomposition and ≤ 114 kJ/mol for the third), although it is systematically decreased with the temperature due to the positive entropic effect from the adduct separation (steps R1c/R2c/R3c). The relative low magnitude of the free energy, especially at higher temperatures when it approximates to zero, indicates that the decomposition will be at equilibrium with significant amounts of both decomposed and undecomposed ITG. Since the decomposition is entropically driven, a decrease in pressure would push the equilibrium towards the product formation. This indicates that at the low pressures commonly used in the ALD processes a large amount of precursor could be decomposed even at low temperatures.