The growth rate increases with increasing temperature, from 0.3 Å per cycle at 160 °C to 1.1 Å per cycle at 490 °C. Films deposited at a higher temperature were also more stable in atmosphere compared to films deposited at low temperatures. Ti based hybrid MLD films are very useful in electronics and in solar applications. Because of the similarity with TiO2 ALD films, titanicone films may be used for biological implants as well. As TiO2 films have catalytic and photocatalytic properties porous TiO2 frameworks formed by the annealing of titanicone films may serve as catalytic supports. Titanicone films can also be pyrolyzed under Ar to yield conducting TiO2/carbon composite films with important electrochemical applications as electrodes for Li ion batteries or pseudocapacitance supercapacitors. These films were also employed as coatings of nano Si electrodes and successfully improved their performance. As described above, different titanicone and Ti-organic MLD processes have been developed and although first principles density functional theory (DFT) simulations have recently been used to explore the reaction mechanism in Ti-organic MLD film growth, such a study that explores the surface reactions and the precursor chemistry in titanicone MLD film growth and the role of the precursor chemistries is still lacking.