Polycrystalline SiC has been an interest of research for decades due to its high hardness, corrosion resistance and phase stability at elevated temperatures. Cubic silicon carbide, also known as 3C-SiC or β-SiC, is often utilized as a hard protective coating because it can be deposited as a coating via chemical vapor deposition (CVD) at moderate temperatures around 1000 ℃. The precursors employed in the SiC CVD can be classified into two categories.