Time-of-Flight Heavy Ion Recoil Detection Analysis (ToF-HIERDA) was performed employing the 5 MV 15-SDH-2 pelletron accelerator at Uppsala University , where 36 MeV I 8+ ions served as probing particles, incident under 67.5° with respect to the surface normal. Recoiling target nuclei were detected in a time-of-flight (ToF-) telescope combined with a segmented gas ionization chamber aligned 45° off the primary beam axis. ToF-energy coincidence spectra were transformed into depth profiles using the POTKU code. As a complement, and to compensate effects of multiple scattering caused by the Au-backing of the film of interest, which are deteriorating the depth profile , we performed additional elastic backscattering spectrometry experiments. Specifically, we employed 6 MeV He + primary ions incident under 5° off the surface normal using the same accelerator system. Backscattered particles were detected under 170° scattering angle. Evaluation of backscattering spectra was done using the SIMNRA software package in combination with cross sections provided by the SigmaCalc package. Data evaluation was subsequently performed in an iterative combinatorial approach providing depth resolved information on all species present -which can in turn be employed to obtain accurate areal mass densities for the probed film.