As oxide/metalcone films are of high interest, we explored the feasibility of anatase TiO2/titanicone, rutile TiO2/titanicone and Al2O3/titanicone film formation. This is a common approach in modelling MLD chemistry. [38][39] We performed fundamental investigation on the interactions between the hydroxylated anatase TiO2, hydroxylated rutile TiO2 and hydroxylated Al2O3 surfaces with TiCl4 and ethylene glycol (EG) or glycerol (GL) precursors. The hydroxylated surfaces that results from the interactions with water and before the introduction of TiCl4 are taken from previous studies. [50]