AFM images of PVAc-transferred graphene (PVAc graphene) after TPO (Figure ) and 50 ALD/MLD cycles of Eu-BDC at 250°C (Figure ) show selective deposition on predefined 2x2 um 2 areas with UDLW. The thickness of the Eu-BDC films had a little variation with the laser dose and was ≈7.1 nm for 158 pJ 2 s, while deposition on pristine graphene occurred only on wrinkles and polymer residues, with an average thickness of 0.19±0.1 nm (Figure ). When the deposition was performed on PMMA-transferred samples (PMMA graphene) at 250°C (Figure ), the Eu film thickness was ≈6.6 nm at 158 pJ 2 s, however, the average thickness on the pristine graphene surface increased to 0.71±0.3 nm. The loss of selectivity due to surface contamination by polymer residues was more pronounced for AS-ALD/MLD deposition performed at a lower temperature of 200°C (Figure ). Differences in the chemical structures between PMMA and PVAc affected the interaction of their residues with precursors on pristine graphene areas. Although UDLW is a maskless method, polymer residues from the graphene transfer process significantly affect the selectivity of material deposition. Figures and show that Eu-BDC film growth on pristine graphene occurred only on residues already visible before the ALD/MLD process and on graphene wrinkles. To address this issue, employing dry transfer methods or depositing on freshly grown graphene can be effective solutions. These residues often enhance nucleation during the ALD and MLD processes on 2DM, and selecting a precursor that interacts less strongly with commonly used polymers could be a promising area for further research. Secondary electron images obtained using a helium ion microscope (HIM) after ALD/MLD of Eu-BDC show a smooth distribution of europium compound in TPO areas with sharp edges, and minimal growth in pristine graphene regions (Figure ). At low laser doses (<100 pJ 2 s), the film roughness in TPO areas is affected by wrinkles. At high pulse energies exceeding 25 pJ (for doses 360 pJ 2 s, 625 pJ 2 s, 630 pJ 2 s, and 900 pJ 2 s), the graphene structure changes due to an increased amount of oxygen species, becoming porous and less conductive, as observed in the last four squares of the HIM image.