All measurements except for nanocalorimetry and thermoelectric/Hall effect characterization were performed within 24 h after annealing to avoid sample degradation. The combinatorial characterization data arising from compositional gradients in the films was managed with the COMBIgor tool, the Research Data Infrastructure, and integrated into the High-Throughput Experimental Materials Database. Elemental composition and film thickness were determined by x-ray fluorescence (XRF) calibrated by Rutherford backscattering spectrometry (RBS, composition) and spectroscopic ellipsometry (thickness). X-ray diffraction (XRD) measurements were conducted using Cu K α radiation, a 2D detector, and a fixed incidence angle of 10 • . Raman spectra were measured with 532 nm excitation wavelength and 4 W/mm 2 power density. Scanning electron microscopy (SEM) images were taken at 5 kV beam voltage.