Thermodynamics -Ti incorporation is generally more favorable than Al incorporation due to the somewhat higher stability of Ti compounds, lower Gibbs free energy of formation (at standard conditions, ΔG for TiN ≈ -339 kJ/mol and ΔG for AlN ≈ -318 kJ/mol) , and favorable reaction energies. The actual incorporation rates will also depend on kinetic factors and processing conditions. Even if Ti incorporation is thermodynamically favored, the kinetics of the reaction may be slower compared to Al, which could lead to differences in the final material properties.