the Al(NO3)3 precursor concentration (in mol/liter, using water and/or ethanol as solvent), the volume percentage of water the precursor solution (in %), the precursor flow rate (in liter/hour), the sprayer nozzle diameter (in µm), the spray opening cone angle (in °), the oxygen flow rate (liter/min) and the magnetron output power (affecting the plasma temperature, within ~ 3-7 kW). The assessed range of experimental parameters is shown in Table . Since the sprayer output hole and cone angle depend on the hardware spray header, they could not be continuously tuned. However, the trained model enabled prediction of their effect on phase output by input division and extrapolation, see sec. 5.7. pressed into this cavity so that it was at level with the ZBH outer ring surface in order to avoid height errors on the XRD results. For background correction, the blank ZBH signal was recorded and subtracted from the total sample signal for each scan. Scans were carried-out over the angular range of 10-90° 2𝜃𝜃 at increments of 0.026° with a scanning time of 1 hour per sample. For data evaluation, the HighScore Plus softeware package (V4.9, Malvern Panalytical) and OriginPro (2018, OriginLab) were used.