For the C1s peaks, annealing to 400 K leads to a significant loss of intensity in the CTFSI peak (cyan), and upon annealing to 450 K this peak has completely disappeared. Hence, at this point, TFSI-like species, in particular the CF3 groups, are fully decomposed. This result is not only consistent with our findings for the other elements, in particular for the F1s signal, which indicated already decomposition of TFSI-like species and molecular fragments under these conditions, but goes beyond them as it shows that also CF3 groups have disappeared. For the other BMP-TFSI related peaks a quantitative evaluation was hardly possible because of the dominant contribution from the graphite substrate peak (284.6 eV) and the related satellite at 290.5 eV, which increases upon increasing desorption of BMP-TFSI decomposition products.