Film thicknesses were measured by spectroscopic ellipsometry (SE) that uses COMPLETEEASE software for data analysis and reporting of results. Ellipsometric spectra were recorded in the wavelength range of 210 -1690 nm at four angles of incidence (45°, 55°, 65°and 75°) using a variable angle a J.A. Wollam RC2 Mueller matrix spectroscopic ellipsometer. The thicknesses of the films were then obtained by modeling the measured data using Cauchy dispersion function.