Conventional micro-and nanoelectromechanical systems (MEMS/NEMS) are usually made from silicon using advanced lithographic methods. In recent years, however, numerous studies explored the fabrication of MEMS/NEMS from nanomaterials to enable tunable functional properties beyond those of purely silicon-based devices. For example, 2D-nanomaterials and nanoparticle-based freestanding membranes have been used for the fabrication of highly sensitive pressure sensors, electrostatic actuators, resonators, and chemical sensors. Furthermore, such hybrid devices can be fabricated using print methods, such as transfer printing. However, in order to use nanomaterials for such applications, they must be robust enough. Additionally, a fundamental knowledge of their mechanical and electromechanical properties is indispensable to enable their rational implementation into hybrid MEMS/NEMS for specific applications.