The Raman spectra (Almega, USA using He-Ne laser) of the films consisted of mainly three features, a G (graphite) peak at around 1580 cm -1 due to optical zone center vibrations (E2g mode) of pairs of sp 2 C atoms in aromatic rings or olefinic chains; a D (disordered) peak around 1360 cm -1 , which arises from the limitations in the graphite domain size induced by grain boundaries or imperfections i.e. substitutional N atoms, sp 3 carbon or other impurities . The broad peak originating around ~2700 cm -1 is historically named G' being the second most prominent peak observed [5, 6, 7]. These features are common for any carbon related films The D and G bang intensity ratios were analyzed with N2 flow rate and it was reported that the C-N bond increased with increase in N incorporation . In this communication however a more in-depth analysis has been tried. The Raman spectra from 1000-1800 cm -1 wavenumbers were deconvoluted Gaussian peaks. The incorporation of nitrogen leads to breaking of C=C and formation of C=N bonds and clustering of sp 2 carbon. The extent of clustering and the cluster size increases with higher nitrogen incorporation till saturation is achieved 1 . However, the phenomena of clustering and cluster size are separate events and a competition exists between these two when nitrogen is introduced