shown in . A reliable chemical quantification can be attempted if a full spectrum can be obtained. To avoid the above-mentioned problems the most effective methodology would be to break the entire energy range into two or three energy sections with few overlapping energy points. The energy stacks can then be appended and aligned during post processing. A focus scan as well as an OSA scan should be performed on a sacrificial region on the sample between each energy section to assure a good focus as well as beam alignment.