The MC approaches presented in this review can be classified based on their strategy to gain insight into AS-ALD. The most complex approach uses elemental reactions and their rate constants to describe the system as complete as possible. Overall, such kMC simulations provide the most insightful picture but at the highest computational cost. The simplest MC approach presented here is neglecting thermodynamic and kinetic information. By so called random sequential adsorption (RSA) simulations, the question of adsorbate packing and density is addressed. A third group of MC simulations is located between RAS and kMC in terms of complexity and insights, as they can be considered simplified kMC or more complex RAS simulations. As a side note, similar to DFT and HF, a mean-field approximation is possible in the kinetic modeling of a system assuming uncorrelated adsorbates. Such methods are referred to as (mean-field) microkinetic modelling. Since they are not yet used in AS-ALD, we will not further discuss them.