The resulting data were analyzed using CasaXPS 67 software. Given that the material was amorphous phase with the presence of amorphous carbon, the calibration was performed against the sp 2 hybridized C-C peak position set at 284.5 eV. Time-of-flight elastic recoil detection analysis (ToF-ERDA) measurements were conducted on B4C film of 800 nm thickness deposited on Si substrate. The measurements were performed using 36 MeV Iodine ( 127 I 8+ ) ions as projectile beam and with a time-of-flight detector. The elemental composition was estimated by extracting the histograms and converting them into depth profile of elemental composition using Potku software. Raman spectroscopy measurements were conducted employing a 532 nm laser for excitation at 25 mW power, utilizing a x60 objective lens. The spectral data were collected with an accusation time of 20 sec and an accumulative average of 15 scans to avoid measurement artifacts and cosmic ray spikes. The spectra backgrounds were fitted with linear background and subtracted before the analysis. Some measurements were carried out on thick B4C film deposited on Si substrate. The known crystalline Si reference sample was used to calibrate the spectrum.