These species are formed as intermediates during the decomposition and reaction processes involving TDMAT on Si. Generation of methane (CH4) during the gas phase decomposition of TDMAT at elevated temperatures (>350 °C) was proposed to be a gaseous radical disproportion reaction. We carried out a mass spectrometric survey scan to see the residual reaction species and byproducts leaving the ALD reactor during TDMAT-NH3 processes (Fig. and Fig. ). The main residual species from the reactor (other than co-reactant NH3, carrier gases N and Ar, and residual