When TDMAA and TDMAT are exposed to NH₃, they undergo a complete transamination reaction , transferring amino groups and forming new compounds with less carbon while releasing dimethylamine. Transaminated compounds decompose at significantly lower temperatures compared to their non-transaminated counterparts. As a result, the overall activation energy required for the decomposition of these dimethyl amido precursors is reduced, allowing for film deposition to occur at lower temperatures which can be advantageous for deposition on temperature sensitive substrates. This can enhance the quality of the films produced and improve the incorporation of desired elements into the film structure while minimizing unwanted carbon content and other impurities. Fig. shows the XPS depth profiles, illustrating effects of molar ratio changes XPS depth profile analysis (Figs. and) reveals that the surface composition before sputtering predominantly comprises oxides, i.e., metal oxide and oxidized metal nitride, while the bulk of the films have low oxygen content and C content almost below the detection limit of XPS. This scenario is consistent with surface oxidation of AlxTi1-xN when exposed to air, resulting in a protective oxide layer on the film surface. Fig. shows XPS depth profiles for AlxTi1-xN samples that were grown from the same precursor mixture without refilling the bubbler. The Ti component of the films decreases gradually with continued deposition, which is explained by the differences in reactivity between TDMAA and TDMAT with NH3, which leads to the depletion of the Ti precursor. The mixture of TDMAA and TDMAT is generally a dispersion which becomes liquid in excess TDMAT. TDMAA is a solid at room temperature and has a lower vapor pressure than the liquid TDMAT, resulting in preferential TDMAT evaporation, meaning if there is need to increase the Ti content in the films, excess TDMAT is required, otherwise eventually deposited films will just be AlN. Fig. illustrates how the differences in precursor volatilities affect film composition.