At a constant temperature, the step coverage of the sample prepared at lower pSi is less than that prepared at higher pSi, presumably due to the more pronounced depletion effect along the trench as discussed above, and as reported by Abelson. However, for both pSi, the resulting step coverage follows the same trend and increases with decreasing temperature. With pSi= 20 Pa, the coating prepared at 950°C is nearly conformal with a SC of 0.98. Decreasing the temperature further to 900°C with pSi= 20 Pa results in a coating whose thickness is measurable at the bottom of the trench but is vanishing on the top surface, leading to an infinite SC and, hence, the coating can be assumed superconformal.