EDAX elemental mapping obtained for the case of DC power supply deposition are presented in Figure . For each time duration of the deposition, a composite image is displayed containing SEM cross section and Si, Cr, and N elemental maps, respectively. The distribution of Cr and N in the deposited layer (Figs. and) is homogeneous and uniform with no noticeable defects in the deposition layer. It is therefore expected that the thin CrN layer will provide corrosion resistance for the Si surface beneath. The interaction (diffusion) at the deposition/substrate interface can also be noticed.