QCM measurements of the e-CVD process with Cu(acac)2 show a very similar QCM trace as with Cu(hfac)2 (Fig. ). Notably, films deposited with Cu(acac)₂ exhibited comparable carbon content to those prepared with Cu(hfac)₂, as shown in Figs. and. This observation indicates that both precursor molecules may generate similar fragment species under plasma exposure, which then adsorb onto the film surface.