A correction term for higher-order excitations, HOE, was incorporated whenever computationally feasible by taking the difference of UHF-UCCSDT(Q) and RHF-UCCSD(T) energies at the cc-pVnZ basis, and if possible, the difference of UHF-UCCSDTQ(P) and UHF-UCCSDT(Q) energies as well. Core-electron correlation and core-valence interactions, CV, are accounted for by a correction term composed of the difference between all-electron RHF-UCCSD(T,Full) calculations and frozen-core RHF-UCCSD(T) calculations using the cc-pwCVnZ or aug-cc-pwCVnZ basis sets. The aug-cc-pwCVnZ series was included here as we found that the inclusion of diffuse functions improves basis set convergence for the CV correction in fluorine-containing species. Scalar relativistic effects, REL, were accounted for by taking the difference between RHF-UCCSD(T) energies with and without the Douglas-Kroll-Hess relativistic one-electron integrals using the aug-cc-pwCVnZ-DK basis sets. Diagonal Born-Oppenheimer corrections, DBOC, were computed at CCSD/cc-pVnZ for smaller species or HF/cc-pVnZ for larger species based on computational feasibility. Spin-orbit effects, SO, were not considered as significant for the species used in this work, as indicated in Table .