to In(triaz)3. It also showed a near identical TGA graph with a slightly higher onset volatilisation temperature (155 °C) and negligible residual mass. These results were quite remarkable when compared to the Ga amidinates and guanidinates, which are unsuitable for ALD due to their lack of volatility. This makes Ga(triaz)3 the first example of a volatile hexacoordinated M-N bonded precursor. The ALD chemistry of Ga(triaz)3