Once the actuators were dry, they were transferred to a plasma asher (Glow Research AutoGlow 200) in the cleanroom for plasma-enabled Atomic Layer Etching (ALE) treatment. The actuators were secured by clipping them to a silicon (Si) wafer. Various plasma conditions were tested by adjusting the O 2 :Ar ratios to 0%, 20%, 50%, 80%, and 100%, while maintaining a constant power of 100 W and a duration of one minute. Immediately after plasma treatment, the samples were subjected to conductivity measurements using a four-point probe method (source current: 0.01 A, geometrical correction factor: 4.2076).