Given these chemical pathways for the gas-phase decomposition of TEG, the Bpulses used in this study could induce ethyl eliminating surface chemistries: H2 gas as Bpulse would favor H2 assisted C2H6 elimination, an Ar-plasma would bring additional energy to the surface favoring β-hydrogen eliminations, and an H2-plasma as B-pulse would favor both H2 assisted C2H6 elimination and β-hydrogen elimination of C2H4 as it brings both energy and hydrogen to the surface. These suggested surface chemical paths, summarized in Fig. , would all render a hydrogen-terminated surface. The variation in GPC with the different B-pulses presented in (Fig. ) shows that the GPC increases as: no B-pulse < H2 gas < Ar-plasma < H2-plasma. It can also be seen that the most significant increase is between no B-pulse and H2 gas as B-pulse, while the B-pulses bring, within experimental errors, almost the same improvement in GPC. We propose that the B-pulse serves to eliminate ethyl ligands from the surface, enabling a larger fraction of the surface to be nitridized by the NH3 plasma since the nitridation will then to a larger extend be done on a hydrogen-terminated surface: