Since the rate Γ depends on the experimental growth rate, Γ = 1 s 5D was set, which is valid for a deposition rate of about 0.001 -0.1 ML • s 5D . As indicated, 𝐸 $ corresponds to the activation energy, 𝑘 / to the Boltzmann constant, and 𝜈 to the pre-exponential factor. For some processes (D0 « D1, D2 « D3, T0 « T1, E2 « E3 (Ex.)) with very small activation barriers (<0.02 eV), the pre-exponential factor could not be determined due to imaginary frequencies in the TS. In these cases, a value of 𝜈 = 5.0 • 10 DE s 5D was assumed, which corresponds to the average value of the pre-exponential factor, usually in the range between 10 DE -10 DF s 5D .