The thickness of the ALD/MLD Eu-BDC films showed little variation with the laser dose for PVAc graphene layers within 50 cycles (Figure ). However, a small variation in thickness was observed for 100 cycles and doses below 70 pJ 2 s. Graphene transferred via PMMA demonstrated a higher dependence on the laser dose, with thickness saturation occurring only after 100 pJ 2 s for 50 cycles and 360 pJ 2 s for 100 cycles, respectively. This variation can be attributed to the presence of polymer residues, particularly for PMMA, which may inhibit the oxidation of graphene at low fs-laser doses and reduce the number of functional groups in the TPO area. In our further analysis, we used the heights of the ALD/MLD films measured within the laser dose range of 225-438 pJ 2 s, where all studied samples showed saturation of film thickness (see Figure ).