W-based PFCs in ITER and other fusion reactors are actively cooled to room temperature, motivating lab-based experiments performed at ambient temperatures. Because existing studies, to the best of our knowledge, have primarily concentrated on W oxidation at high temperatures, the understanding of the oxidation of tungsten at room temperatures, especially when impinged by nonthermal oxygen atoms, is limited. In this work, we study the creation of surface W oxides at room temperature when irradiated by energetic O atoms (1-30 eV), as well as their properties including the effects on chemical sputtering of W.