Through-plane nano and Micromechanical properties of films, before and after annealing, are investigated using AFM (Bruker -Icon Peak force), Peak Force™ Quantitative Nanomechanics (QNM) in air mode. The tips used are RTESPA-300 and RTESPA-525 models, with spring constant k = 40N/m and k = 200N/m, respectively. The estimated tip radii are between 8-12 nm in both cases and the maps are acquired with high resolution (512 samples/line, and 512 lines per image). After collecting maps, the images from different channels are analyzed using the software NanoScope Analysis.