Tris(N,N′-diisopropyl-2-dimethylamido-guanidinato) indium (III) (ITG) has a distorted octahedral arrangement, in which the indium center atom is connected to the chelating ligands through In-N bonds. Buttera and collaborators has previously investigated the decomposition path of this precursor, proposing that ITG (cmp1) first undergoes a ligand dechelation to form a coordination bond between the indium center and the amide nitrogen atom (N3) in cmp2a, as depicted in Fig. (a). To achieve this point, the initial In-N1 or In-N2 bond is elongated and broken to allow the rotation of the guanidinate ligand (step R1a). Thereafter, the elimination of carbodiimide (CDI) is expected to occur alongside the back-bone nitrogen (N3) transfer to the indium atom (steps R1b and R1c).