Besides inter-spot distance which partly depends on the magnification of the objective, the numerical aperture of the objective used for the fabrication is another important parameter that influences proximity effects, because it will affect light distribution and inter-spot overlaps of the PSF functions. In order to address this issue, parallel fabrication using a 0.95 NA (Zeiss 40× Apochromat) and a 1.40 NA (Zeiss 100× Apochromat) microscope objective were compared.