One of the most extensively researched metalcones are titanicones. Titanicones are deposited by coupling a titanium inorganic precursors such as titanium tetrachloride (TiCl4) with organic alcohols such as ethylene glycol (EG) [27] [29] , glycerol (GL) [30] or fumaric acid (FC). Tetrakis(dimethylamino)titanium (Ti(N(CH3)2)4, henceforth denoted Ti(DMA)4 ) was also successfully employed as Ti source and combined with EG and GL to deposit titanicone films. In ref titanicone films were deposited using TiCl4 as metal source and EG or GL as organic precursors. TiCl4-EG films and TiCl4-GL films were deposited on Si(100) wafers. XRR analysis found a growth per cycle (GPC) of ∼4.6 Å/ cycle for TiCl4-EG films in temperature 90 °C which decreases to 1.5 Å/ cycle at 135 °C. This drop may be related to the desorption of unreacted TiCl4 species at 135 °C. In addition, the reduction in growth rate may be caused by the desorption of Ti(-O(CH2)2O-)2 species or double reactions of the organic precursor in which the molecule lies flat with both termini binding to Ti sites. The thickness and thickness reduction with temperature increment observed for TiCl4-EG films was similar to the thickness and thickness reduction observed for alucone films grown using TMA and EG (4.0 Å/cycle at 85 °C to 0.4 Å/cycle at 175 °C) and zincone films grown using DEZ and EG (4.0 Å/ cycle at 90 °C to 0.25 Å /cycle at 170 °C). For TiCl4-GL films the growth rate was 2.8 Å/cycle at 130 °C and it decreased to 2.1 Å/cycle at 210 °C. The thickness of TiCl4-GL films was similar to the thickness of alucone films grown using TMA and GL (2.5 Å/cycle). Similar growth rates of TiCl4-EG and TiCl4-GL films were achieved also in ref ( TiCl4-EG: 4.5 Å/cycle at 115 °C; TiCl4-GL: 2.2 Å/cycle at 150 °C).