From this, we suggest that TEG bonds to surface NH2 groups, losing one or more ethyl ligands as intact species or recombining with adjacent hydrogen to desorb as ethane. The possibility of β-elimination of C2H4 cannot be excluded, as it has been found favored in the gas phase . We note that the decomposition pattern of C2H4, results in m/z = 25, 26, and 27 , and the absence of such peaks can be seen as a sign that C2H4 formation is low during the ALD process.