The Al2O3 and MoO3 plasma-enhanced ALD coatings were carried out on the obtained NMC811 particles using a Fiji G2 ALD system at 150°C in 200 cycles. In this coating, Trimethylaluminum (Al(CH3)3, TMA) and H2O were employed for Al2O3 coating. In the case of MoO3 coating, bis(tertbutylimido)-bis(dimethyl amido) molybdenum and oxygen plasma were also used as precursors with exposure, waiting, and purge times of 0.01 s, 5 s, and 40 s, respectively. Nitrogen was used as the flowing gas, and the flow rate was set at 20 sccm. The vacuum condition in the reaction chamber was controlled at 10 -3 -10 -2 torr, and the overpressure threshold for the coating processes was considered as 250 torr.