CaF 2 has almost no absorption in the range of 500-4000 cm -1 . The absorption of CaF 2 in the range of 3000-4000 cm -1 and 1500 cm -1 is less than one-tenth of that of SiO 2 . It is also possible that a small amount of carbon contamination, which is unavoidable in e-beam deposition, contributed to the spectra. When we measured by FTIR spectra of CaF 2 , which was used as a deposition target material with thickness of about 5 mm, the peak did not appear. In other words, the peaks that were not included in the original raw material appeared in the spectra of thin nanofilms. SiO 2 has an absorption peak in the near-to-mid-IR spectral region, which were clearly observed (Fig. ). The respective attributions of the absorption bands is shown by the Lorenzian spectral line-shapes at absorption peaks of amorphous SiO 2 glass (Fig. ). The absorption spectrum of SiO 2 is also temperaturedependent because the amorphous state of SiO 2 changes at high temperature. Silica glass network is relatively stable up to around 600 • C. Therefore, utilizing SiO 2 absorption can be very useful for construction of a high-temperature resistant metasurfaces. The results of the reflection spectra of the metasurfaces fabricated by changing the ratio of SiO 2 to CaF 2 are shown in Figs. and. Namely, the Fig. represents several reflection spectra and Fig. is mapping of all 60 spectra at different nano-disc diameters.