A Ni filter was placed before the X'Celerator detector running in scanning line mode to remove Cu-Kβ line. The resultant diffraction patterns were compared to the Powder Diffraction File (PDF) cards and the reflection peaks corresponding to certain lattice planes were assigned. The PDF cards that were referenced for 3C-SiC and graphite in this work are #00-029-1129 and #00-056-0159, respectively. The preferred growth orientation of the 3C-SiC coatings was quantified by the texture coefficient (TC) 9 defined as follows: