Originally, the MEMS chip (Figure ) was fabricated and used for the in-situ TEM experiments. The TEM observation was conducted through a perforated thin amorphous silicon nitride membrane attached to the heating plate (Figures ). The MEMS chip with the deposited sample was placed into the Thermo Fischer Scientific NanoEx-i/v heating and biasing holder for in-situ STEM imaging and elemental analysis (EDS) at elevated temperatures (Figure ). The holder is similar to the standard single-tilt holder used for analysis of TEM grids, however, with a rectangular fitting for the MEMS chip and with contacts for an external power supply. In-situ experiments were performed on a Thermo Fisher Scientific Talos F200i microscope equipped with a Bruker Dual-X (EDS) spectrometer, operated in the TEM regime at the high voltage of 80 kV and beam current of 1 nA. The setup allows continual measurements with real-time video output of the process. The in-situ annealing was observed at 820 °C. The in-situ TEM experiment was acquired as real-time Video 3 and Video 4.