Table implies that the conversion efficiency of AcAc-Zr to ZrP is not high enough. Theoretically, if ideal Zr(HPO4)2・ H2O, α-ZrP, exists in the film, the ratio of the number of atoms should be Zr : P : O = 1 : 2 : 9. However, as shown in Table , the composition analysis of the ZrP film prepared in this study shows that the ratio is Zr : O : P = 1.0 : 1.1 :