Using a Xeuss 3.0 setup from Xenocs S.A. with a microfocus copper source, we performed X-ray measurements. This setup produced Cu Kα radiation (wavelength λ = 1.5418 Å), which we focused and monochromatized using a 2D single reflection multilayer optics. For GIWAXS and GISAXS, we collimated the beam with scatterless slits and aligned the silicon substrate surface at a grazing incidence angle of 0.18°to the incoming X-ray beam. The Eiger 4M single photon counting detector from DEC-TRIS, equipped with 75 µm pixels and situated 80.0 mm from the sample, captured the scattered X-rays.