The size and size dispersion and the obtained superlattices were evaluated via SAXS. The experiments were performed at the high energy materials science (HEMS) beamline operated by Helmholtz-Zentrum Geesthacht at the PETRA III storage ring at the Deutsches Elektronen Synchrotron (DESY). The energy of the incident beam was 87.1 keV (wavelength: 0.01423 nm), and the beam size was (0.2 × 0.2) mm 2 . A two-dimensional PerkinElmer detector with a pixel size of 200 µm was placed at a sample-to-detector distance of 3256 mm to detect the scattering signal. Background scattering of the experimental setup was subtracted from the data before further analysis. The fitting procedure was performed using self-developed Python code. The calculation of the particle sizes was performed via the particle form factor and the lattice parameters via the position of the (111) Bragg reflectionas reported previously. No radiation damage was observed for the chosen exposure times.