decomposition have previously been studied by photolytic, femtosecond/nanosecond laser mass spectrometry and using a microplasma, although under atmospheric pressure, which is not the same pressure regime as e-CVD. Thermal routes have also been investigated. Photolytic decomposition showed that FeCp2 decomposes to Fe, FeCp, FeC3H3, FeC2H2, Cp, C10H10 and C3H3, highly dependent on photon energy , laser mass spectrometry studies showed decomposition products containing Fe, FeCp, FeCp(C3H3), FeC3H3, FeC2H2, Cp, C10H10, C3H3 and C2H2. In the study using an atmospheric pressure microplasma, decomposition products such as FeCp, Cp and hydrocarbons originating from Cp decomposition and hydrocarbon recombination were discussed. Thermal decomposition studies showed that FeCp2 decomposed to Fe, FeCp and Cp, while one study suggests additional products, e.g., Cp-H, CH4 and H2. To determine feasible reaction pathways, we recently laid a foundation for e-CVD plasma decomposition studies of FeCp2, were we showed that the Ar plasma discharge in the e-CVD process at a process pressure of 33 Pa has an electron temperature of 1-5 eV and an electron density on the order of 10 16 electrons/m 3 . It should be noted that we are assuming a Maxwellian distribution of the electron energies in our plasma discharge, meaning that even if the electrons in the e-CVD plasma has a measured electron temperature of 1-5 eV, a fraction of electrons in the high-energy tail will exceed these energies. This sets the boundaries for the plasma chemical reactions possible in the e-CVD plasma.