Because of the unstabilized nature of PR_hybrid and the wide range of evidence obtained in all of the abovedescribed experiments for the involvement of diffusion (probably of radical species) in the proximity effects and most notably the much increased lifetime of the diffusing species in PR-hybrid resist compared to PR_organic, we hypothesized that addition of MEHQ as stabilizer should help in reducing proximity effects in the latter. Thus, a stabilized equivalent of PR_hybrid, where 700 ppm MEHQ were added to the formulation was prepared and used for parallel microfabrication with an 11×11 spot DOE at 1.85 µm inter-spot distance. Systematic comparison between results obtained with PR_hybrid and PR_hybrid stabilized with 700 ppm MEHQ (Fig. ) clearly establishes that the addition of the stabilizer consistently reduces proximity effects (at the expense of reduced photoresist sensitivity). As a consequence, the quality of periodic arrays fabricated with PR_hybrid with 700 ppm MEHQ becomes relatively similar to that obtained with PR_organic, although a slight central over-polymerization was still observed.