Characterization. The 3C-SiC coated graphite plates were broken into 4 equal-sized pieces along the gas flow direction to probe the film deposition. The characterizations, i.e. X-ray diffraction (XRD), scanning electron microscopy (SEM) and Raman measurement, have been carried out mainly on the third piece from the inlet of the susceptor. The structure and phase of as-deposited samples was examined by XRD (PANalytical X'Pert PRO Powder X-ray