To clarify the suitability of this process at the timeframe of interest for InN deposition, the initial concentration of 1 mol/m 3 was set for TMI, before it undergoes the irreversible pathways described in Eq. (7-8) on the kinetic simulation. Figs. 2 and S2 depict the chemical composition of this system within different timeframes, from a couple of seconds (100-400 s) to approximately 8 h. In Fig. (a), 100 s is clearly insufficient to enable product formation, as only ~2% of the initial precursor is effectively decomposed. The decomposition is improved by 6 % after 400 s (see Fig. )), and by about 32 % after 1 h of exposure (see Fig. ). Finally, the equilibrium conditions are expected to be achieved after ~450 min to result in 99 % of precursor decomposition, as shown in Fig. . In this case, methylindium (MI) is not the end point, instead undergoing polymerization (see Reaction 10). As pointed out by Hsu et al., the lack of selflimiting behaviour of the polymeric film should lead to surface droplets if the deposition is performed under an extended timeframe. These facts evidence that the TMI precursor should remain intact during the experiment performed by Deminsky et al., therefore constituting the physisorbed species that will initiate the deposition. As its deposition in a metallic form should be preceded by the formation of atomic In in gas phase, it turns out that the inclusion of the last In-CH3 bond breakage is relevant to model the TMI pyrolysis under these conditions.