In order to investigate double reactions of EG and GL we build also the surface models after the We also examine the change in the Ti-O distances to the surface oxygens after the introduction of the EG and GL, and these are presented in table SI 6. The computed Ti-O distances show that after the introduction of the EG and GL Ti-O bonds to the surface oxygens undergo negligible changes, indicating that the EG and GL will not affect the stability of the systems. In the upright configuration organic molecules bind to Ti sites through one terminal OH group and one H-DMA molecule is released while in the flat configuration organic molecules will bind through two terminal OH groups with two neighbouring Ti sites and two H-DMA molecules are released. Figure shows the optimised atomic structures of the MLD reaction products of 2TiDMA terminated anatase TiO2, rutile TiO2 and Al2O3 surfaces with the upright and flat lying EG and GL. Calculated energetics for the reactions of EG and GL in the upright and flat laying configuration with the 2TiDMA terminated surfaces are shown in table . Calculations energetics suggest that organic molecules EG and GL combined with Ti(DMA)4 in a anatase TiO2, rutile TiO2 and Al2O3 surface behave similarly as when combined with Ti(DMA)4 in a Si substrate. Experimental data in ref shows that for Ti(DMA)4-EG films deposited in a Si substrate in a temperature range 80-150 °C the growth starts but it stops after 5-10 cycles, and this most