T= 300 °C. At such conditions the onset of decomposition is less than one second and at equilibrium is reached after ~3 s for 300 °C (see Fig. . This would mean that at high temperatures the precursors would also decompose in the reactor chamber and at the highest temperatures almost all ITG would have decomposed before it would reach the surface for deposition. The main decomposition product is still the double eliminated ITG (cmp3), however at 300 °C the triple eliminated ITG (cmp4) also reaches significant levels. As expected by the large barrier and less favored reaction free energy the β-hydrogen elimination only shows neglectable contribution to the overall decomposition.