From the XRD diffractograms in Figure , it is evident that films deposited at 1100 and 1200 °C are polycrystalline, as seen from the additional reflections from crystal planes other than (0003) and higher order diffractions. For higher temperatures, the films are oriented along [0003] since no reflections from crystal planes other than (0003) and higher order diffractions are visible in the diffractograms.