The kMC approach is a stochastic way to solve these coupled rate equations. It requires as input the reaction energies and barriers for all relevant reactions in a chemical system. These parameters can be based on ab initio computations (e.g., adsorption energies) but can also be determined to fit experimental data or simply represent reasonable assumptions . The modeling is then carried out on a lattice representing the surface. The type and complexity of this lattice (e.g., is off-lattice adsorption allowed?) determines the quality of description of the AS-ALD process.