Chemically sputtered WO2 and WO3 are also observed, but with a smaller frequency than WO4. When these particles were obtained in the vacuum environment, several molecular decays were observed. Initially, ejected WO4 caught a single sputtered O atom and was converted into WO5, which then decomposed into WO3 and two single oxygen atoms. Subsequently, WO3 underwent decomposition into WO2 and a single oxygen atom. Throughout the simulation, single oxygen atoms and WO4 continued to form various WOx compounds , such as WO2, WO3, WO4, and WO5, as well as individual O atoms and O2 molecules. We observed a notable increase of the sputtered WOx molecules after reaching saturation of the oxide ad-layers, determined by an impact O energy. The number of WOx particles sputtered at 30 eV significantly exceeded that at 1eV impact.