The first experimental parameter investigated was the water vapor pressure within the ESEM chamber. A series of patterning experiments were performed at pressures from 5 to 30 Pa and ID/IG values were measured for each experiment. These experiments were performed at doses ranging from 275-2750 µC/cm 2 for three values of P: 9.96 nm, 15.39 nm, and 19.92 nm.