Several species, summarized in Table , were detected during the ALD process as illustrated in It should be noted that nitride processes with NH3 adds uncertainties to the interpretation of the m/z = 16 signal, as it can also be NH2 from NH3 decomposition/ fragmentation in the QMS. Mass spectrometry species from an electron impact energy of 70 eV show that the detected ions primarily consisted of fragments from the effluent molecules, with no portion of the spectrum representing parent molecular ions. This is illustrated in Fig. for both the plasma and thermal processes in comparison to the background where no parent precursor is pulsed. DMA is characterized by known peaks at m/z = 45, 44, 30 (HNCH3 + ), and 15 (CH3 + ). The presence of peaks at m/z = 28 (N=CH2 + ), 27, and 26 is indicative of N-methylmethaneimine (MMI, CH₃N=CH₂). MMI can also be identified by the peak at m/z = 43 or 42 (CH2=N-CH2 + ). Additionally, a fraction of the peak at m/z = 15 (CH3 + ) may result from the fragmentation of MMI, a common byproduct from the decomposition of dimethylamido-metal precursors.