As Figure shows, at the surface of NMC cathode, the EC and Li2CO3 will decompose to CO2 and H2O during the cycling process. But with the PEALD coating artificial CEI, these parasite reactions could be suppressed due to the separated the NMC cathode and carbonate electrolyte, while the Li-ions still allowed to penetrate through the artificial CEI. Thus the cycling stability of the cell can be improved. The electrochemical performance of the modified NMC811 cathodes by Al2O3 and MoO3 deposited layers was analyzed and compared with the bare NMC811 composition. Discharge capacity of the cathodes was gained in 130 cycles at 0.5 C with a cut-off potential range of 3.0-4.5 V, which is depicted in Figure . The observed capacity decay could be attributed to the loss of oxygen lattice on the NMC surface during the charging process. Meanwhile, the coating step could minimize the mentioned occurrences, resulting in a higher capacity retention. In addition, electrolyte decomposition, transition metal dissolution, and the formation of insulation phases on the cathode surface are other possible reasons of the capacity fading, which might be suppressed through the modification of the cathode material. Accordingly, the enhanced discharge capacity after modifying the coating layers could be due to the advantage of spherical particles in the added layers to accelerate the Li + ion movements. Also, the improved cycling performance of the NMC@Al2O3 could be assigned to the alleviation of the electrolyte decomposition, as well as the reduction in the impedance. Overall, the presence of the coating layer could be conducive toward hindering the significant expansion of the active materials, leading to the enhancement of the dimensional and performance stability in the cathode components. As is shown in Figure , the discharge capacity of the pristine NMC811 was enhanced from 147 mAh g -1 to 190 mAh g -1 and 157 mAh g -1 , respectively, through the introduction of Al2O3 and MoO3 coating layers.