Again, the experimental results were confronted with numerical simulations using the same model as described above. The results of the corresponding simulations in which 5×5 spot arrays with different separations (5.6 µm, 2.2 µm and 0.8 µm) were used, can be seen in Fig. . Based on the exposure time and laser repetition rate, 585 laser pulses were considered in each case and the diffusion parameters were kept constant compared to the previous simulation since the experiments were conducted with the same resin (see Table ). A decay factor of 0.995 (assuming exponential decay) corresponds to a species half-life of 0.012 s, in good agreement with previously reported values for short-lived radical species . As in the previous experiment, we can see a strong similarity between the simulated structures and the experimental results. A noticeable difference is the height of the simulated structures which tends to saturate ("flat top") as a consequence of the limited Z range of the simulations (computing load limitations).