Mech 5. This mechanism is shown for completeness, as H radicals are not expected to be present during the first-half cycle of InN deposited, in N2, by means of ALD methods. In this sense, the reaction should give origin to DMI molecules and CH4 after a Δ ‡ H barrier of ~50 kJ/mol is overcome. However, as pointed out by other research groups, other reactions should be included to model the decomposition in H2 environment, which is out of scope of this work.