XPS C1s spectra identified a BE of 285.8 eV associated with C-O or C-N bonds originating from the UiO-66-NH2 (Figures and). BE of 290.3 eV was also observed which can be attributed to the π-π* transition signal in the HOPG substrate. This was confirmed by the analysis of a bare HOPG substrate (Figure ). Therefore, the π-π* transition signal from the substrate was used as a reference for comparative analysis. This allowed the quantification of C-O/C-N content (285.8 eV) for films grown for 5 and 30 minutes yielding an average thicknesses of 1.7 and 4.7 nm, respectively. As expected, the ratio of C-O/C-N to π-π* transition signals increased for the thicker film (Figure ) aligning with the accumulation of a larger quantity of UiO-66-NH2 in the thicker film with XPS detection depth resolution of 5-10 nm from the surface. The presence of order in the as-deposited films was probed by synchrotron-based grazing incident wide-angle X-ray scattering (GIWAXS). For this, UiO-66-NH2 films were deposited on chemical vapor deposition (CVD) derived graphene resting onto SiO2coated Si wafers (SiO2/Si). The analysis was carried out for films prepared with 5 min of deposition time. Three other thicker films were also analyzed by repeating the deposition to 4 cycles. These are referred to as cycle 2, cycle 3, and cycle 4. These samples were subjected to GIWAXS measurements at a small incidence angle range of 0.08-0.10°, identified as the critical angle to yield the highest intensity, ensuring that reflections fully came from the thin films (Figure and S12, Supplementary note 4). The grazing incidence footprint at these angles was approximately 2.1 to 2.6 cm across the samples, with a beam width of 124 µm (Figure and Table ), allowing for the acquisition of structural data across a large film area (~3 mm 2 in size). Additionally, corrections were applied to adjust for the distortions caused by the curvature of the Ewald sphere when projecting onto a flat 2D detector, resulting in the missing wedge in the final GIWAXS images (Supplementary note 5). The correction enables the accurate extraction of quantitative structural information.