In order to visualize potential changes in crystallinity Virtual Dark Field imaging was applied to a Scanning Precession Electron Diffraction (SPED) measurement of an implanted polycrystalline LLZTO sample as shown in Figure . It reveals grain size in the range of 3-6 µm and amorphization of LLZTO down to a depth of around 650±10 nm. The region below shows indications of a mixed crystallinity, with amorphous regions dotting crystalline parts, though it is difficult to distinguish between amorphization caused by electron beam damage and the one stemming from ion implantation. This is in accordance with the Monte Carlo simulation and allows the assumption that a significant amount of the incorporated Ag could be detectable in a range from 550 to 750 nm for further measurements.