The influence of inter-spot separation in the polymerization threshold is even more clearly demonstrated in Fig. showing microfabricated voxel structure arrays obtained with different spacings but in otherwise identical exposure conditions. While reducing the inter-spot distance from ca. 5.6 µm to 2.2 µm, the voxel array remains reasonably homogeneous, except for the slightly over-corrected central spot; indeed, the array is more uniform, indicating a possible use of the proximity effects as a corrective parameter to the overcorrection of zeroorder. However, at a 0.9 µm inter-spot distance, the voxel structures at the edges appear clearly smaller than those that are closer to the center and uncontrolled polymerization has occurred at the center, resulting in structures with ill-controlled height and the merging of individual voxels into an undefined intricate structure.