We built a 2D numerical model of the chip and evaluated it in COMSOL Multiphysics (version 5.4). We specifically studied the frequency response of the device. At resonance frequencies, we looked at the wall displacement as well as the Gor'kov potential and streaming velocity. First, a mesh study was conducted, to determine the converged mesh parameters (see Figure ). After the initial frequency domain study of the Thermoviscous Acoustics and Solid Mechanics interface, a stationary study of the Creeping Flow interface at the resonance frequency was carried out by taking the solutions from the first study into account.