These results seem to indicate that diffusion in the PR_hybrid resist is significantly stronger than in the PR_organic resist, being of both longer range (higher σ value) and with a longer diffusing species lifetime (lower decay rate). Besides, Fig. shows significant out of focal plane polymerization which also appears in the simulations but to a more limited extent, probably because the simulations only model interactions close to the focus plane and do not take out of plane light energy into effect (computational load limitations currently prevent this). As explained above (Fig. and Fig. ), such out of focus plane interactions very probably do occur (particularly for large arrays such as the 11×11 spot array used here) and are likely to be at least partially responsible for the increased height of the experimental structures of the PR_hybrid structures.