Energy dispersive X-ray fluorescence (EDXRF) measurements were performed using a Shimadzu EDXRF 7000 instrument to ensure the stoichiometry of In and Cl in LiInCl6, Y and Cl in LiYCl6, P and Cl and P and S in LiPS5Cl, and Al and P in Li1.48Al0.48Ge1.52(PO4)3 were as expected. The EDXRF measurements were carried out using x-rays generated by a Rh anode with acceleration voltage of 50 kV. The measured stoichiometries were determined from calibration curve method using standard samples (InCl3, YCl3, PCl5, PS5 and Al(PO4)3) using K-α x-ray emissions for Cl, P, S and Al; and L-α x-ray emissions for In and Y.