The clustering phenomenon is based on three primary processes viz., atomic diffusion, number of atoms getting involved in cluster and coalescence. The atomic diffusion process occurs as the atoms try to obtain the adsorption sites which make the total surface free energy to minimum. An increase in cluster size will occur when the number of atoms in the cluster increases. Coalescence of the existing atoms in a cluster will on the other hand reduce the total cluster size. There was almost no change in the G and D peak positions with increase in nitrogen. The G band peak being constant around 1580 cm -1 and the ID/IG height ratio staying between 1.32 to 1.66 shows all the films existing in the second stage of the three stage Although for more than 5 layers the 2D peak resembles the graphitic state [8], the features obtained from Raman spectra indicates a coexistence of nc-graphite, nc-carbonitride and graphene. Although its to early to draw any inference, a existence of graphene monolayer (ML) within few nanometer from* the surface due to possible reconstruction and recombination is a possibility which could have occurred from the disturbance due to absence of the bonding forces of the nearest neighbours on one side of the surface atoms resulting in separation of one monolayer of graphene from the bulk. A distance more than 3.35Å, which is the distance between MLs in graphite now possibly exists between the surface graphene monolayer from the next ML [9]. This region called the selvedge in common nomenclature of surface physics, retains the atomic arrangement parallel to the surface but changes spacing normal to the surface possibly creating an independent graphene layer. The graphene ML also consists of a surface energy which is the excess energy in the solid-vacuum system. It is different from bulk energy due to the broken bonds and the reconstruction and recombination Hydrogenation of graphene to form graphane results in the occurrence of D, D' and D+D' peaks with broadening and reduction in intensity of the G and 2D peaks [8, 9, 11]. Although no prominent D' peak at 1620cm -1 was observed, the occurrence of D+D' peaks indicate hydrogenation of the graphene layer to form graphane. The 2G peaks around 3240 cm -1 are associated with the overbending of the longitudinal optical branches of graphite. These peaks have also been called 2D' as they are the overtone of D' peak . With increase in nitrogen concentration in the film, an increase in intensity of these peaks was observed which either saturates or shows a decrease further. The peak position and width of these however although don't follow meticulously any trend, show opposite variation with nitrogen increase. The peak around 2550cm -1 could not be explained and may be possibly due to either upper shifted C≡C bonds or overtones of D+D' which was initially found close to D+D' for lower nitrogen flow of 5 sccm and later got shifted due to cluster formation.