As a result, the quick recombination of CH3 radicals should lead to ethane (C2H6) formation as the main byproduct in toluene (C7H8), 41 N2 and He 42 carriers. In the former, methane (CH4) also appears as a minor product from the radical attack on the -CH3 group from toluene, whereas it constitutes the main product in H2. As CH4 is produced in a very low extent in N2 and He carriers, its formation is not included to model the TMI pyrolysis that is relevant for the InN deposition performed by Deminsky et al. From this point, the elementary steps described in Reactions (7-9) will be referred as Mech 1.