However, the 2.3 nm InN is seemingly compressively-strained as the profile shifts toward lower 2θ angle. Metallic In, which is a common inclusion in InN thin films or on the surface, seen as a peak at 33 o , is not detected in our films. On the other hand, no peak is observed in a grazing incidence XRD (GI-XRD) 2θ scan in the range of 20-90° using a fixed 0.5° incident angle under current geometry. By tilting the sample 90 o (χ = 90°), the diffraction peaks associated with (101 ̅ 0) and (112 ̅ 0) of InN should be revealed under their corresponding orientations.