In the last decade, several further DFs have been developed which partly combine features of several rungs, introduce exact exchange in smarter ways (range-separated DFs, local hybrid DFs) or become dependent on the unoccupied orbitals (rung 5, double hybrid DFs). However, in AS-ALD modelling none of these more modern DFs is in use up to now. Large-scale benchmark studies in molecular chemistry as well as surface science can deliver guidelines on how to choose the best DF for the given research question in AS-ALD. But often, the implementation of more exotic functionals is limited in the available computational codes. The lack of accurate benchmark data in AS-ALD makes it also hard to evaluate the different DFs for their accuracy. Thus, currently, there is hardly any study not using the PBE functional (Tab. 1 and Tab. 2). If several DFs are used, quite large deviations can be found.