The data presented is similar to previous in-situ IRAS studies investigating ALD of HfS2 on Co3O4(111) that some of the authors have reported on before. We assign the appearance and loss of bands upon dosing of TDMAH and D2S, respectively, to the formation and loss of TDMAH-derived surface species. More specifically, the observed bands arise from surfacebound -NMe2 ligands. For the band assignment, we refer to a study from Li et al. which provides a detailed description of the adsorption of TDMAH on hydrogen-terminated Si(100) using IR spectroscopy and DFT. In brief, the signals appearing at 2872, 2830 and 2780 cm -1 are assigned to CH stretching vibrations (CH), while the broad band appearing between 1430 and 1485 cm -1 arises from CH deformation modes (CH). The bands at 1254, 1140, and 1060 cm -1 are assigned to coupled Hf-N, C-N, and C-H stretching and deformation modes. Finally, the signal at 954 cm -1 is associated with coupled Hf-N-C stretching modes (ν(Hf-N) and ν(N-C)).