Misfit dislocations are commonly seen at the interface in our study. The Burgers circuit analysis around individual misfits indicated the Burgers vector of 𝑏 = 𝑎 < 011 ̅ 0 > association with edge dislocation as shown in Fig. . This type of misfits can be observed periodically at the interface which could be visualized by the filtered inverse FFT image (IFFT, Fig. ). This edge-type misfit dislocations are known to be the most common and efficient defect for strain relaxation at interfaces with large lattice mismatch as have been observed in InN/AlN and other material systems. The only other structural defects observed are some regions where certain atomic columns do not show well-distinguished projections as indicated by the blue arrows in Fig. . We believe these are in-plane irregularities related to point defects caused by the coalescence between separate grains of monolayers in order to minimize the energy. We believe that this is a consequence of extremely low growth rate (0.37Å per ALD cycle), so the imperfections are introduced at boundaries such as vacancies and impurities without any distinguishable Burger vectors. It should be mentioned that the dark contrast propagating along growth direction in the TEM image is not associated with threading dislocations. Instead, they reflect the In-deficient nature due to the high-angle annular dark-field imaging. In vacancies and impurities of light elements are speculated to be the point defects. This argument is supported by our Raman results which will be discussed later.