TDMAT is a well-studied precursor and has been used extensively for TiN deposition. The suggested main decomposition mechanisms for TDMAT shown in Fig. can be summarized as: i) β-hydride elimination, where a hydrogen atom located on the β-carbon (adjacent to the Ti metal center) is eliminated. Subsequently, a double bond between the β-carbon and the adjacent is formed, resulting in the creation of hydride species and N-methyl methyleneimine (CH3N=CH2); ii) an intramolecular insertion metallacycle generation reaction which results in the formation of a metallacycle Ti-C-N ring, that can participate in consecutive reactions and iii) the transfer of a proton (transamination and hydrogenation) to a dimethylamido group, leading to the formation of dimethylamine.