Fabricating functional and biocompatible nanointerfaces is challenging due to the inherent complexity of biological systems and the need for versatile, customizable surface modification materials that can effectively bridge inorganic and biological surfaces at the nanoscale. These materials must meet three main criteria: 1) versatile interfacial interactions: the surface modification material should enable a broad spectrum of customizable interactions with biomolecules, ranging from repulsion or antifouling properties to various levels of preferential attachment and specific molecular recognition; 2) substrate compatibility: the surface modification should be uniformly thin and applicable to a variety of substrates, including dielectric, semiconductor, and metallic surfaces; 3) compatibility with lithographic processes: the surface modification material should integrate into lithographic flows and it must withstand common lithographic processes including exposure to organic solvents, resist materials, UV or electron radiation, and high-temperature baking, without compromising its chemical properties and biocompatibility.