In-situ quadrupole mass spectrometry (QMS) for gaseous species measurements was conducted using a Hiden Analytical HPR-30 residual gas analysis (RGA) vacuum process sampling system that includes a HAL 201 RC mass spectrometer in multiple ion detection (MID) mode and Bar Scan mode with the Faraday detector (source voltage for electron impact ionization set at 70 eV to ensure efficient reactant molecule fragmentation). The mass spectrometer is placed approximately 80 cm from the main reaction zone (substrate stage). It is important to acknowledge that the surface-generated species detected in the QMS analysis may arise from all surfaces in the reactor. Given that the reactor wall surfaces are relatively much larger than the substrate size, species originating from the walls can significantly impact the measured signal. To guarantee that all identified reaction products stem from reactions occurring at a consistent temperature, it is essential to maintain uniform temperatures across both the walls and substrate. In this study, temperatures were standardized at 150 °C to ensure that the measured reaction products were representative of reactions taking place.