As mentioned earlier, in a STXM instrument the optical element focusing the monochromatic X-rays onto the sample is a Fresnel zone plate defining the spatial resolution of the system . Rosner et al. recently demonstrated a spatial resolution of 7 nm obtained in a soft X-ray STXM. A spatial resolution of at least ~30 nm or better is readily available to users in almost all synchrotron STXMs. However, it is important to consider the required spatial resolution for the sample within the scope of investigation. For example, if spectroscopic information is needed in a planar film, one should avoid focusing the beam on a small spot unless necessary, given that a small spot implies high photon density that could inevitably induce radiation damage as well as carbon cracking .