Instead of trying to alter the reaction probabilities for surface chemical reactions, we seek to enhance the diffusion of molecules down the recessed features to allow for conformal deposition also at higher temperatures. Kinetic molecular theory assumes that the temperature of a system in the absolute scale is proportional to the average kinetic energy of its particles. A local thermodynamic equilibrium can be assumed at, and above the substrate surface, in thermal CVD processes. The gaseous species above the surface will then all have the same temperature, and hence the same average kinetic energy. For a binary mixture of two gases, A and B, this can be expressed as: