Three stages of growth were studied with increasing layer thickness, which we label: i) sub-monolayer, ii) intermediate stage, and iii) converged film, corresponding to 5, 300 and 600 seconds of plasma deposition, respectively (see methodology for details of the plasma conditions used). The resulting films were studied using atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS) in order to characterise the topography and chemistry of each sample.