Torr using differential pumping with a turbomolecular pump. The ALD process used for the QMS measurements was modified by increasing all the purging times up to 90 seconds to have a better resolution in time of the ALD process. The data was then collected for a total flow of five cycles for both the A-C pulses and the A-B-C pulses prior to the collection of the RGA results. Prior to every measurement, the background signal of the reactor was measured in the range of mass-to-charge ratio (m/z) range from 1 to 100 to serve as a reference. The QMS measurements were performed with 200, 300, or 400 °C on the reactor walls and substrate holder.