T= 25 °C. For the deposition, this setting is particularly important because it corresponds to the bubbler temperature (T= 23 °C) in which the precursor is stored until the process is initiated. In this case, the negligible Keq values determined for the homolytic dissociation in a stepwise process (~10 -39 and ~10 ) indicate that i) DMI is not the end point for the reaction and ii) the formation of MI is not favored under equilibrium conditions. In contrast, the overall reaction has a large Keq of 6.46 x10 +2 that points out for a feasible process at equilibrium. For this reason, the latter value is more adequate to represent the process in which the activation barrier is not yet included, as also evidenced at higher temperatures.