The reactor geometry was discretized to a grid of 7 million elements. The governing equations of mass, momentum, and energy conservation were numerically solved together with the species transport equation using the finite volume solver Ansys Fluent 2020R2 (ANSYS Inc., Canonsburg, PA, USA). Due to the low vapor pressure of TMI in combination with the vacuum draw bubbler used for precursor supply , TMI was modelled a passive concentration diluted in the carrier gas with an ideal, square-wave pulse. No chemical reactions were considered in the residence time model, since the chamber volume is large (in the order of 10 4 cm 3 including the plasma cone) and the disk-shaped substrate holder where the flow impinges has a large gas volume directly on top due to the plasma cone (see Fig. ). Hence, the bulk of the precursor is expected to pass over the substrate and through the chamber without any reactions and give negligible impact on the flow pattern. The main objective of this modelling is to study the time needed to purge the deposition chamber from TMI before the start of the NH3 pulse to avoid overlap of precursors; due to the idealizations, the model cannot provide quantitative results such as growth rate. Additional computational details are given in Supplementary Material.