The topography images obtained by AFM investigations on samples containing CrN films deposited by DC power supply are presented in Figure . Analysis of the topography images acquired on samples obtained by the DC sputtering method (Figure ) reveals that the defects tend to be visible at reduced deposition times, with the characteristic structures of the substrate fading out after a deposition time of 10 minutes. Another noticeable observation is that in DC sputtering, a characteristic columnar growth structure is observed. Even after 15 minutes of deposition, the CrN layer does not become uniform.