The Ga 3d spectral region (Figs. ) is dominated by a peak at 18.90.5 eV, corresponding to Ga-N bonding. A minor shoulder peak at 20.50.5 eV corresponding to Ga-O bonding. The N 1s XPS spectral region shows a dominant peak at 396.60.3 eV, corresponding to N-Ga bonds 8 with a shoulder peak at 400.10.4 eV, corresponding to N=C bonding. Auger peaks from the Ga region is also observed in the N 1s spectral Top view scanning electron micrographs (Fig. ) shows that the 35±3 nm thick films deposited at 320 °C with different B-pulses have very similar morphology.