We used Raman spectroscopy to probe graphene functionalization and further investigate the selectivity of Eu-BDC AS-ALD/MLD on graphene. Figure demonstrates that only a small blueshift of the G (≈1590 cm -1 ) and 2D (≈2680 cm -1 ) bands was observed after the deposition of a thin Eu-BDC film on pristine graphene. This shift is most probably caused by thermal annealing at 250°C during the ALD/MLD process. In the TPO areas, showing an increased D (≈1350 cm -1 ) band and an additional D' (≈1625 cm -1 ) band due to the oxidation process (see Figure ), three additional bands appeared after the Eu-BDC deposition (Figure ). Two bands at ≈1900 cm -1 (corresponding to 592 nm emission wavelength) and ≈2450 cm -1 (corresponding to 612 nm) are associated with electronic transitions of the Eu-BDC film, and their intensity increases with the laser dose, which correlates with the thickness and homogeneity of the film. A third band at ≈1525 cm -1 (579 nm) also corresponds to an electronic transition in Eu-BDC. The FTIR spectrum of a 100 nm Eu-BDC film deposited on a Si substrate (see Figure ) shows two main bands at ≈1394 cm -1 and ≈1545 cm -1 , corresponding to the asymmetric and symmetric stretching of the bonded carboxylate groups near the Eu 3+ ion. While the asymmetric stretching of the carboxylate group is close to the third band in the Raman spectrum at ≈1525 cm -1 , it is not Raman active but can be activated via surface-enhanced Raman spectroscopy with the appropriate substrate. We also carried out nano-FTIR spectroscopy on pristine graphene and graphene/Eu-BDC films via infrared scattering scanning near-field optical microscopy to study the distribution of Eu-BDC on graphene at the nanoscale. While pristine graphene shows no IR bands in the region of interest, the graphene/Eu-BDC film demonstrates two distinct peaks at ≈1402 and ≈1562 cm -1 (Figure ), similar to those observed for a thicker Eu-BDC film on Si. When comparing transmission FTIR and nano-FTIR spectra, the band positions may shift by a few wavenumbers. However, a more significant blueshift may indicate stronger electronic interactions between graphene and the thin Eu-BDC film compared to the film on Si.