Here, we note the limited thickness for Sample 3 that may affect the B/N ratio. The oxygen content was determined to 2.9, 4.4, and 2.7 at.% with the lowest in Sample 3 and the highest content in Sample 2. The carbon content in Sample 1 and 2 are 10 at.%, but only 2 at.% in Sample 3. Figure shows no visible peaks that can be assigned to boron clusters or B-C bonding seen from reported binding energies in the range 188.1 to 188.6 eV , but with tails on the B-N peaks for Samples 1 and 2 that can be assigned to B-C bonding. Epitaxial growth relationships of r-BN were determined by φ-scans conducted on Sample 1 and 2 in Figure . Besides showing the orientation of r-BN with respect to the template, the φ-scans in Figure show the twinning of r-BN. The epitaxial relationships between the r-BN film, the ZrB2(0001) template, and the 4H-SiC(0001) substrate were determined from the φ-scans in Figure and GID in Figure to be: