For the acquisition of the OrbiSIMS depth profiles, a 20 keV Ar3000 + analysis beam of 20 µm diameter, was used as primary ion beam. Ar3000 + with duty cycle set to 4.2% and GCIB current was 220 pA. The Q-Exactive depth profile was run on the area of 400 × 400 µm using random raster mode with crater size 498 × 498 μm. The cycle time was set to 400 μs.