(i) Finite nucleation delay (i.e., the number of ALD cycles where no growth happens) on NGS and unwanted start of growth (Fig. .a) (ii) Disintegration of inhibitor layer in area-deactivation processes due to desorption or chemical reactions (Fig. .b) (iii) Penetration of inhibitor layer by precursors and reaction with unpassivated surface groups (Fig. .c) (iv)