Prior research on partial electron impact ionization cross-sections of Cu(hfac)2 using a quadrupole mass spectrometer, shows Cu(hfac) + as the dominant ionic specie. Cu(hfac) + was then reported to having an ionization threshold energy of 10 eV, reaching its peak around 24 eV. Free Cu + ions (Cu(II)) where reported to only be a very minor species below 20 eV. We have recently characterized the electron temperature in e-CVD, albeit for another e-CVD chamber, showing that the electron temperature spatially varies between 1 and 7 eV for plasma powers between 50 and 125 W. We expect that the electron temperature follows a Maxwellian distribution, meaning that electrons with lower-and higher energy than the measured 1-7 eV are likely found. Considering these numbers for the electron temperature, Cu(hfac) + is likely the predominant ionic Cu-containing radical formed in the plasma conditions used in this study.