T= 240 °C. At the low end of the ALD growth temperatures, Fig. (a) shows that the onset of decomposition is already at 10 s and an equilibrium is reached after 100 s with only a very small amount of ITG undecomposed (< 0.01 %). The residence time for the precursor in the reactor is only a few seconds and as such at the low end of the ALD process most of the decomposition of the ITG precursor comes from the decomposition already done in the bubbler.