The same features appear as positive bands (red, consumption) upon exposure to D2S. In later cycles, we observe a blueshift of several bands to 2872, 2830, 2780, between 1430 and 1485, 1254, 1140, 1060 and 954 cm -1 . The integrated differential CH area plotted against the deposition time in Figure reflects the approximate reaction rate and density of reactants (peak area, indicated as number next to each peak). In the first ALD cycle, we observe a larger peak area upon exposure to TDMAH and D2S than in later cycles. Comparing the peak shapes, we find sharper, more narrow bands during TDMAH exposure and broader, less intense bands during D2S exposure. Between signals, the differential CH area always decreases to zero.