The stage movement reproducibility was measured by moving the stage ~40 mm away from the center location and back and then performing an internal measurement of the shift in subsequent ion images. A standard deviation on shifts in both directions is deemed as an estimation of the reproducibility of the movement. To test this performance, Si -ion images were acquired by scanning a 12 x 12 µm 2 area defined with 512 x 512 pixels and a dwell time of 0.3 ms/pixel, and a lateral resolution of 120 nm. An image was acquired in ~80 s in SIMS position, then the sample stage was moved in front of the optical microscope and moved back again in SIMS position for a subsequent image acquisition. This sequence was repeated until a total of 8 images were acquired. WinImage was then used to calculate the shift between 2 consecutive images. An algorithm of image registration with a subpixel precision calculated the shifts in x and y directions. The first image was defined as the reference image, and image shifts in both directions were calculated from it.