The statistical parameters extracted from the surface topography images were roughness (Rq), fractal dimension (FD), entropy (S), and autocorrelation length (L). The values resulting from this analysis of all the samples are summarized in Table . The surface roughness analysis (Table ) shows that although both DC and HiPIMS generally result in sub-1 nm surface roughness, in the HiPIMS method the highest sur-face roughness recorded was 0.603 nm, which is 1.7 times less than the highest surface roughness recorded with the DC method. It is worth discussing here the increased rate of surface roughness depending on the power supply method. For both methods, it can be observed a non-linear increase of roughness with time deposition. For DC method the roughness tends to increase rapidly after 5 to 10 minutes of deposition time (29% increase) and slower after another 5 minutes (13% increase in the interval between 10 to 15 minutes deposition time). On the other hand, for the HiPIMS method, we observe a slow increase of the roughness between 5-and 10-minutes deposition time (13%) and a rapid increase of the roughness between 10-and 15-minutes deposition time (24%).