For the initial assessment of a potential precursor in terms of volatility and thermal stability, thermogravimetric analysis (TGA) is an established procedure. Hereby, a small quantity of a sample is weighted (~10 mg for analytes in this study) and the mass loss as a function of heating temperature is traced. While evaporation of the intact analyte results ideally in the absence of a residual mass, high residual masses indicate early and undesirable decomposition. Title compounds 1 -12 were subjected to TG experiments to investigate their fundamental volatilization behavior and to draw conclusions on the effect of slight structural differences of related compounds hereon (Figure ). As it can be seen from Figure a, the two silylamides 1 and 2 demonstrated considerably different evaporation characteristics. While 1 underwent a sharp single step evaporation process with an onset temperature, here derived by the tangent method, of roughly 128 °C, the onset temperature for 2 was found to be around 181 °C.