TheReactor is based on an SEM stage containing a MEMS chip with a micro-heating plate covered by a cap containing a pressure-limiting aperture and a gas inlet (Figure ). By covering the stage with the cap, theReactor body is closed permitting locally increased gas pressure (up to 500 Pa) of various inlet gases. A sample deposited on the micro-heating plate in the Reactor is heated by the Joule effect (up to 1200 °C with a maximal heating rate of 4.10 4 K s - 1 ). Very fast sample heating and cooling allows for a precise control of the reaction setup and kinetic measurements. The heated specimen eventually reacts with the gaseous atmosphere.