Elemental composition of the films was obtained using Rutherford backscattering spectrometry (RBS) and time-of-flight elastic recoil detection analyses (ToF-ERDA). The measurements were carried out in a 5-MV NEC-5SDH-2 pelletron tandem accelerator. 2 MeV 4 He + ions were employed for RBS and detected in a scattering angle of 170°. Two different geometries, azimuth angle 5°+tilt angle 2° and azimuth angle 40°+tilt angle 2°, were chosen in order to minimize channelling effects. In addition, more suppression of the probable channelling effects was undertaken by multiple small random-angular movements around the equilibrium angles within a range of 2°. RBS spectra were fitted by SIMNRA 7.02 code with an ~1% statistic uncertainty to determine elemental compositions. Recoils, in ToF-ERDA, were detected at 45° angle between the primary beam and a ToF-E detector telescope in a gas ionization chamber (GIC) using a 36-MeV 127 I 8+ beam incident at 67.5° with respect to the sample surface normal.