The reversible specific capacities are comparable to those without masking (the means are 230.6 and 240.6 for the first cycle and 243.7 and 222.6 mAh/g for the second cycle), considering the uncertainty of the thickness measurements, variation in effective current densities and different cut-off potential. The coulombic efficiencies are reproducible between different spots, and better for a thicker substrate, which might be attributed to the lower surface area to lower effective current density (corrected by the leakage area) or volume ratio of the thin films . The difference in OCP potentials is less than 150 mV for the measurements before charge/discharge cycles and less than 20 mV after cycling. EIS results are hard to compare since the difference in the geometry of leaked areas and since the resistances are also dependent on the position of the RE, which might change between the two series of experiments.