Two types of substrates have been used in our study. Silicon (001) substrates have been used to test the removal speed for different SU-8 formulations. Additionally, epitaxial solar cells on GaAs (001) substrates have been used to test the compatibility of our SU-8 removal procedure with our photovoltaic devices. Both types of substrates were metallized with a 60 nm Ti adhesion layer and a 5 nm Pt top layer. The photovoltaic devices additionally had a pattern of silver wires electrodeposited through the lithographically defined SU-8 mask.