Next, we investigated the effect of dwell time on the beamskirt effect, at constant pressure (5 Pa, as determined from our analysis shown in Fig. ), electron dose (2680 µC/cm 2 ) and acceleration voltage (2 kV). The results are shown in Fig. . From this chart we see that (ID/IG)pattern/(ID/IG)skirt can be as high as 15 at the lowest dwell time of 0.4 µs. As mentioned above, the total dose is proportional to the dwell time but is inversely proportional to the square of P.