Our experimental protocol for SU-8 removal starts with a 10 min immersion in a 40% solution of dimethylamine in water at 70 • C. Higher temperatures are not recommended as the highly volatile dimethylamine solute lowers the boiling point of the solution, and vigorous boiling leads to rapid loss of the dimethylamine. Then we proceed by rinsing in deionized water, blow drying in N 2 , and immersion in concentrated sulfuric acid followed again by rinsing in deionized water and blow drying in N 2 . Depending on thickness, UV exposure and postexposure bake conditions, the immersion time required for complete removal ranges from 5 seconds to 30 minutes.