This suggests that carbon reduction by the added pulse between TMA and NH3 is not a chemical cleaning pulse, but rather acts to prevent re-adsorption of carbon containing species from the surface. Interestingly, the different gases used influence the crystallinity of the films. GIXRD measurements of films deposited with H2, N2 and Ar show that the intensity of the (100) plane decreases when going from H2 to N2 and to Ar (Fig ). Theta-2theta showed the same trend Intensity (arb. units)