selectivity. One approach used in catalysis to avoid the computation of reaction barriers is making use of the Bell-Evans-Polanyi (BEP) principle. It states that there is a correlation between thermodynamic driving forces and barrier heights for a set of similar reactions (i.e., a more thermodynamically favorable reaction (strong negative ΔE) has a lower barrier (moderate ΔE ‡ )) and thus allows to approximate reaction barriers by assuming the same prefactor (eq. 1.5) and the same position of the transition state on the reaction coordinate for all reactions considered. For (AS-)ALD, it has not been checked systematically, if the BEP is a good approximation. Initial findings that the Hammond postulate, which gives similar statements, is true for SAM decomposition were reported already by Xu and Musgrave. There are AS-ALD studies assuming the BEP to hold. 1.