and Sb +5 oxidation states in the case of when Sb 2 O 3 and Sb were used as dopant sources. In ZSb05_2 only the Sb +3 component was observed and its intensity is substantially lower than for other samples. As shown by XRD, most of Sb is bound in ZnSb intermetallic with a much lower crystallization temperature than ZnO, which might lead to significant inhomogeneity of Sb distribution in the sample. In the sample doped with Sb, the intensities of Sb +3 and Sb +5 components are close in comparison with the case of Sb 2 O 3 doping where the Sb +3 component is dominating.