Next, we investigated the effect of varying the base on the reaction outcome. While the reaction using KF gave a similar result (entry 6), the addition of K3PO4 increased the yield of 3 to 86% (entry 7). Under these reaction conditions, we observed the formation of 83% PhMe2SiF (6) relative to the amount of C-F bonds. When the amount of K3PO4 was reduced to 1 equiv., the yield of 3 decreased by 32% with concomitant production of silane 5 in 35% yield (entry 8). This result implies that silane 5 was transformed into hydrocarbon 3 upon addition of excess hygroscopic K3PO4, which introduces a certain amount of water. In the absence of a base, the yield of hydrocarbon 3 decreased (entry 9).