The compositional analysis of selected films was performed using time-of-flight energy elastic recoil detection analysis (ToF-ERDA). The measurements were done using a 36 MeV 127 I +8 beam. The incidence angle of primary ions and exit angle of recoils were both 67.5° to the sample surface normal constituting a recoil angle of 45°. The time-of-flight vs energy loss map is also utilized, this has better separation for lighter elements (B and C). The measured ToF-ERDA spectra data was then converted into relative atomic concentration profiles using the Potku code.