The residence time at a given temperature was varied by placing the sample at different positions in the susceptor. Regardless the deposition temperature, the BxC films deposited at low residence times (below 0.10 s) were polycrystalline with no preferred orientation in contrast with the films deposited at longer residence times which showed preferred orientation. For residence times between 0.10 and 0.12 s this orientation evolved from [022 ̅ 1] at 1200 °C, to [0003] at 1300 °C to [101 ̅ 4] at 1400 °C, with a minor contribution of the (202 ̅ 5) planes in all cases, as shown in Figure . For longer residence times (0.14 s), only the [0003] direction is favored at all temperatures. Finally, we found that the onset of pyrolytic graphite formation occurs at around 1400 °C and for residence times around 0.09 s and becomes the dominant phase at higher temperatures and residence times.