Next, the thermodynamics of the first, second and third ligand loss reactions of Ti(DMA)4 precursor are examined. These reactions take place with a proton transfer from surface OH groups to the DMA ligands of Ti(DMA)4 to form protonated molecules, H-DMA, released as by-products and the formation of new Ti-O bonds between Ti(DMA)4 and oxygen atoms on the surface. After the third ligand loss reaction, Ti of Ti(DMA)4 is bonded to three surface oxygens and to one DMA ligand that can exchange with one organic molecule during the organic precursor pulse. The coordination number of Ti of the Ti(DMA)4 molecule is four and remains unchanged during the ligand loss reactions. When we compare these energies to those calculated for TiCl4 interacting and binding on the same selected surfaces, we see that Ti(DMA)4 interacts and binds more favourably with the surfaces as the calculated reaction energies are much larger. This is consistent with bond dissociation energy values for the breakage of the Ti-Cl and Ti-N bonds (494 kJ/mol and 464 kJ/mol, respectively) which show that the Ti-Cl bond is stronger and thus more difficult to break.