From monitoring the growth in continuous and time-resolved CVD, it is found that the QCM indeed can be used to monitor net mass evolution in time. During the time the plasma is ignited, the measurement is, however, perturbed, which we showed for both continuous and time-resolved processes. We ascribe this perturbation to drawing an electron current through the QCM crystal, causing resistive heating. To circumvent the perturbation of the high frequency signal during the timeresolved process, a stabilizing step is needed after each plasma pulse. This means that characteristics, such as surface saturation can be probed. For the net mass gain (i.e., growth rate), no stabilizing steps are needed due to that the resonant frequency drops back down and that no disturbance is persistent.