 Mr. Hisashi Watanabe ProfileSenior Engineer at Panasonic CorpTakashi Yuito, Vincent Wiaux, Lieve Van Look, Geert Vandenberghe, Shigeo Irie, Takahiro Matsuo, Akio Misaka, Hisashi Watanabe, Masaru SasagoSatoko Nakaoka, Hisashi Watanabe, Yoshimitsu OkudaKEYWORDS: Lithography, Deep ultraviolet, Reflection, Interfaces, Reflectivity, Control systems, Critical dimension metrology, Photoresist processing, Bottom antireflective coatings, AbsorptionKEYWORDS: Monochromatic aberrations, Phase shifting, Silicon, Chromium, Image registration, Optical testing, Image quality, Critical dimension metrology, Semiconducting wafers, Overlay metrologyKEYWORDS: Monochromatic aberrations, Error analysis, Optical simulations, Excimer lasers, Overlay metrologyKEYWORDS: Lithography, Monochromatic aberrations, Optical lithography, Lithographic illumination, Calibration, Wavefronts, Distortion, Optical simulations, Semiconducting wafers, Overlay metrologyEmiko Sugiura, Hisashi Watanabe, Tadashi Imoriya, Yoshihiro TodokoroKEYWORDS: Reticles, Lithium, Defect detection, Manufacturing, Inspection, Photomasks, Optical proximity correction, Mask making, Semiconducting wafers, Optics manufacturingKEYWORDS: Lithography, Reticles, Defect detection, Inspection, Computer programming, Photomasks, Optical proximity correction, Mask making, X-ray technology, Defect inspectionKEYWORDS: Lithography, Optical lithography, Capacitors, Silicon, Capacitance, Very large scale integration, Photomasks, Mask making, Semiconducting wafers, Phase shiftsKEYWORDS: Phase shifting, Optical lithography, Polymethylmethacrylate, Opacity, Polymers, Chromium, Very large scale integration, Photomasks, Semiconducting wafers, Phase shifts 