 30 July 2001 Dry-etching and nanofabrication technology perspective for novel optical devicescomponentsKiyoshi Asakawa; Yoshimasa Sugimoto;Kiyoshi Asakawa , Yoshimasa SugimotoProceedings Volume 4532, Active and Passive Optical Components for WDM Communication; 2001 Kiyoshi Asakawa, Yoshimasa Sugimoto, Dry-etching and nanofabrication technology perspective for novel optical devicescomponents, Proc. SPIE 4532, Active and Passive Optical Components for WDM Communication, 30 July 2001; doi: 10.111712.436023; Kiyoshi Asakawa, Yoshimasa Sugimoto, Dry-etching and nanofabrication technology perspective for novel optical devicescomponents, Proc. SPIE 4532, Active and Passive Optical Components for WDM Communication, 30 July 2001; 