 17 October 2008 New method of 2-dimensional metrology using mask contouringRyoichi Matsuoka; Yoshikazu Yamagata; Akiyuki Sugiyama; Yasutaka ToyodaRyoichi Matsuoka , Yoshikazu Yamagata , Akiyuki SugiyamaProceedings Volume 7122, Photomask Technology 2008; 71222T 2008 Ryoichi Matsuoka, Yoshikazu Yamagata, Akiyuki Sugiyama, Yasutaka Toyoda, New method of 2-dimensional metrology using mask contouring, Proc. SPIE 7122, Photomask Technology 2008, 71222T 17 October 2008; doi: 10.111712.802137; Introduction of a die to database verification tool for the...Ryoichi Matsuoka, Yoshikazu Yamagata, Akiyuki Sugiyama, Yasutaka Toyoda, New method of 2-dimensional metrology using mask contouring, Proc. SPIE 7122, Photomask Technology 2008, 71222T 17 October 2008; 