 Yayori Abe, Fumiharu Nakajima, Yuki Watanabe, Masanari Kajiwara, Shigeki Nojima, and Toshiya Kotani, Hotspot detection based on surrounding optical feature, Proc. SPIE 10588, Design-Process-Technology Co-optimization for Manufacturability XII, 105880I Presented at SPIE Advanced Lithography: March 01, 2018; Published: 20 March 2018; Authors: Yayori Abe et al. 